JPH0758530B2 - Magnetic head - Google Patents

Description

The present invention relates to a magnetic head suitable for use in a video tape recorder (VTR) or the like.

[Conventional technology]

In recent years, a magnetic head using a metal-based magnetic material as a magnetic film forming a magnetic path has become widespread.

FIG. 5 shows an example of the tape sliding surface. In such a magnetic head, two magnetic films 2 and 4 are abutted on a non-magnetic substrate 1 via a non-magnetic film (not shown), and the abutted portion serves as a headgear 3 and these magnetic films 2, 4 A non-magnetic protection plate 7 is provided on the top. That is, the magnetic films 2 and 4 are sandwiched between the nonmagnetic substrate 1 and the nonmagnetic protective plate 7. Non-magnetic substrate 1, magnetic film 2,
A tape sliding surface is formed by the surface of the nonmagnetic protection plate 7 and the surface of the nonmagnetic protection plate 7. The surface 8 of the non-magnetic substrate 1 serves as a reference plane, and the tape sliding direction (the direction in which the magnetic head magnetic tape slides) indicated by the arrow is parallel to this reference surface 8 and the magnetic films 2, 4 The exposed surface is also parallel to this reference surface 8,
The headgear 3 is inclined with respect to the reference plane 8 by an angle θ (0 ° <θ <90 °).

A metal magnetic material is used for the magnetic films 2 and 4, and is relatively soft, but a hard material such as glass or ceramics is used for the non-magnetic substrate 1 and the non-magnetic protective plate 7.

FIG. 6 shows a tape sliding surface of another example of the conventional magnetic head. This is a thin-film magnetic head for a computer. A groove is provided on the surface of one non-magnetic substrate 1 to form a magnetic film 2, and a groove is also provided on the surface of a non-magnetic protective plate 5 to form a magnetic film 4. They are formed and then abutted so that the magnetic films 2 and 4 face each other through a non-magnetic film (not shown). The head gear gap 3 is formed by the abutting portions of the magnetic films 2 and 4. The headgear 3 is parallel to the reference plane 8 which is the surface of the non-magnetic substrate 1.

When such a magnetic head is used in a VTR of the azimuth recording system, it is necessary to arrange the magnetic head so that the head gear 3 is inclined by a desired angle θ with respect to the tape sliding direction (arrow). An example of the arrangement is shown in FIG. In the figure, the non-magnetic substrate 1 has a trapezoidal cross section, and magnetic films 2 and 4, a headgear 3 and the like are formed on one inclined surface thereof. The magnetic head is placed on the surface of the base 19 so that the bottom surface of the non-magnetic substrate 1 faces downward. At this time, the reference surface 8 is inclined with respect to the surface of the base body 19, and the head gear tape 3 is inclined with respect to the tape sliding direction (arrow).
Is inclined by an angle θ.

A thin film coil 12 and a bonding pad 14, which is a terminal thereof, are provided on the surface of the non-magnetic substrate 1, and a terminal plate 15 is provided on the surface of a substrate 19. These bonding pads 14
The terminal board 15 and the terminal board 15 are connected by a wire 16.

FIG. 8 shows a tape sliding surface of still another example of the conventional magnetic head (for example, JP-A-60-243810 and JP-A-61-3313). In this magnetic head, the substrate 17
The reference surface 8 which is the surface of the substrate 17 is parallel to the tape sliding direction (arrow). The magnetic films 2 and 4 made of a metallic magnetic material are inclined with respect to the reference plane, and the headgear 3 at the abutting portion of these magnetic films 2 and 4 is also inclined at a predetermined angle θ ′ with respect to the tape sliding direction. is doing. Further, non-magnetic materials 18c, 18d, 18b and 18a are filled between the surfaces of the magnetic films 2 and 4 and the substrate 17 in order to narrow the magnetic path in the headgear 3 portion. With such a configuration, the tape sliding surface is composed of the exposed surfaces of the magnetic films 2 and 4, the substrate 17, and the non-magnetic materials 18a to 18d.

[Problems to be solved by the invention]

By the way, in the magnetic head shown in FIG. 5, the magnetic films 2 and 4 extend to the ends of the magnetic head in the tape sliding direction, and the non-magnetic substrate 1 and the non-magnetic protection on both sides of them are made of hard material. Since the plate 7 is provided, when the magnetic head slides on the magnetic tape at a high speed like a VTR, the magnetic films 2 and 4 made of a soft metallic magnetic material are worn or scratched, and the non-magnetic substrate 1 There is a problem that a level difference is likely to occur with respect to the non-magnetic protective plate 7, spacing loss is increased, and tape slidability is deteriorated.

On the other hand, in the magnetic head shown in FIG. 6, the magnetic film 2,
Since 4 is surrounded by the non-magnetic substrate 1 and the non-magnetic protective plate 5 made of a hard material, wear and scratches on the magnetic films 2 and 4 can be reduced. However, in general, a film formed by a thin film forming process such as vapor deposition or sputtering is inevitably denser than a bulk. Therefore, when the tape sliding surface has more dense bulk material, scratches and dust adhesion on the tape sliding surface are smaller. However, in the manufacturing process of the patterned coil thin film head for the purpose of improving the head reproducing efficiency, in order to take advantage of the manufacturing process, a non-magnetic film called a protective film or a non-magnetic material is formed on the magnetic film, The tape sliding surface was configured including the protective film. Further, in order to perform azimuth recording with the magnetic head shown in FIG. 6, when the bonding pad 14 and the terminal 15 are joined by wire bonding as shown in FIG. 7, the bonding pad 14 is a base material. Since the wire 16 is inclined with respect to the surface thereof, it is difficult to bond the wire 16 to the bonding pad 14, which causes a problem in the head assembly.

In the magnetic head shown in FIG. 8, the headgear 3 is inclined with respect to the surface of the substrate 17 by a predetermined angle .theta. ', And the magnetic films 2, 4
Similarly, since the substrate 17 made of a hard material and the non-magnetic materials 18a to 18d are provided on the tape sliding direction side in the same manner, the problems of the respective magnetic heads can be solved, but the tape sliding surface has many problems. The exposed portions of the different types of material cause uneven wear and impair the flatness of the tape sliding surface.

SUMMARY OF THE INVENTION It is an object of the present invention to solve the above problems, provide a magnetic head that maintains excellent performance and is easy to assemble.

[Means for solving problems]

In order to achieve the above object, the present invention has a step portion having a side surface inclined in the same direction as the angle at which the non-magnetic substrate forms the headgear, and the first magnetic film is formed on the step portion, and The first and second magnetic films are surrounded by the non-magnetic substrate and the non-magnetic protective film when viewed from the tape sliding surface side. Further, the headgear formed by the first and second magnetic films is tilted by a predetermined angle θ (where 0 ° <θ <90 °) with respect to the surface of the non-magnetic substrate serving as a reference surface.

[Action]

The non-magnetic substrate has a step portion having a side surface inclined in the same direction as the angle of forming the headgear, the first magnetic film is formed on the step portion, and the first magnetic film and the first magnetic film are seen from the tape sliding surface side. Since the magnetic film 2 is surrounded by the non-magnetic substrate and the non-magnetic protective film, the ratio of the non-magnetic substrate that is a bulk on the tape sliding surface is increased, and as a result, the tape sliding surface is scratched. Deterioration of the tape slidability such as adhesion and dust adhesion is prevented, and uneven wear can be prevented by using the material of the same composition for the non-magnetic substrate and the non-magnetic protective film. The flatness of the sliding surface can be maintained, the tape slidability is improved, and the head gear is tilted by a predetermined angle θ with respect to the reference surface. Therefore, when the magnetic head of the present invention is attached to a substrate or the like. , The reference surface to the substrate Yet can set Hetsudogiyatsupu the desired azimuth angle as a line, such as connection of the coil assembly is improved Te easily and summer.

〔Example〕

 Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a perspective view showing an embodiment of a magnetic head according to the present invention, in which 1 is a non-magnetic substrate, 2 is a magnetic film, 3 is a headgear, 4 is a magnetic film, 5 and 6 are non-magnetic protective films, Reference numeral 8 is a reference plane.

In the figure, on the tape sliding surface (the front surface in the figure), almost half of the upper surface of the non-magnetic substrate 1 is scraped off, and the scraped parts are provided with the magnetic films 2 and 4 and the non-magnetic protective film 5. ing. The magnetic films 2 and 4 are formed so as to be sandwiched between the non-abrasive remaining portion of the non-magnetic substrate 1 and the non-magnetic protective film 5, and a non-magnetic material is provided between the magnetic films 2 and 4 to form the head gear tape 3. Is formed. The headgear 3 is inclined by a predetermined angle with respect to a surface perpendicular to the reference surface 8 which is the lower surface of the non-magnetic substrate 1. The non-abrasive upper surface of the non-magnetic substrate 1, the upper surfaces of the magnetic films 2 and 4 and the upper surface of the non-magnetic protective film 5 are in one plane parallel to the reference plane 8, and the non-magnetic protective film 6 is provided on these. Has been.

As a result, on the tape sliding surface, the magnetic films 2 and 4 are surrounded by the non-magnetic substrate 1 and the non-magnetic protective films 5 and 6, and the head gear tape 3 is located at the center of the tape sliding surface. To be located.

As the magnetic films 2 and 4, a metal-based magnetic material such as amorphous or sendust is used. Further, the non-magnetic substrate 1, the non-magnetic material of the headgear 3 and the non-magnetic protective films 5, 6 are hard with the same composition, and the thermal expansion coefficient α is almost equal to that of the magnetic films 2, 4 80 × 10 ⁻⁷ 〜140 × A material having a temperature of about 10 ^-7 / ° C is desirable. For example, calcium titanate, Al ₂ O ₃ —TiC type, ZrO ₂ type,
A ceramic material such as MgO or a glass material is used.

In this way, the magnetic films 2 and 4 are surrounded by a hard material, and therefore have excellent tape slidability, and the abrasion and scratches due to sliding of these magnetic tapes can be significantly reduced. 1. Spacing loss can be prevented without causing a step with the non-magnetic protective films 5 and 6. Also, the headgear tape 3
With respect to, since a predetermined azimuth angle is set with respect to the reference plane 8, the terminals of the coil can be made parallel to the surface of the base when mounted on the base (without), and the wire bonding Can be done very easily. Furthermore, by making the non-magnetic substrate 1 and the non-magnetic protective films 5 and 6 of the same composition, uneven wear can be prevented on the tape sliding surface and flatness can be maintained. Therefore, the wear of the magnetic films 2 and 4 can be prevented, and the tape slidability is also improved.

The magnetic films 2 and 4 may be a single layer, for example, SiO 2.
_{It is also possible to use 2} or the like as an interlayer insulating film to form a multilayer structure.

Next, one specific example of the method for manufacturing the magnetic head will be described with reference to FIG.

First, a non-magnetic substrate 1 whose upper surface and lower surface are parallel to each other is formed (FIG. 2A), and the upper surface thereof is cut off by patterning or ion milling over a half or more portion. In this case, the front surface in the figure of the non-magnetic substrate 1 forms a tape sliding surface, but the portion other than this portion up to the width D that determines the depth of the gear is scraped off more. The surface 9 of the scraped portion is parallel to the lower surface of the non-magnetic substrate 1 (FIG. 2 (b)). Then, a magnetic film 2 is formed on the non-magnetic substrate 1 by sputtering, vapor deposition or the like (FIG. 2 (c)), and further, an insulating film 10 such as SiO ₂ or forsterite is formed thereon ( FIG. 2 (d)). Here, the thickness of the magnetic film 2 is thinner than the depth of scraping of the non-magnetic film 1 in FIG. 2 (b).

Next, the surface is flattened by lapping at least until the magnetic layer 2 on the upper surface of the non-magnetic substrate 1 which has not been scraped off is removed (FIG. 2 (e)). Then, the upper surface thereof is scraped off to the surface 9 of the non-magnetic substrate 1 so that the magnetic film 2 remains on the tape sliding surface (the front surface in the drawing) and the insulating film 10 remains on the inner side in the drawing. In this case, the surface of the step created by this scraping
11 is a gear cap surface, which is a non-magnetic substrate 1
Is inclined so that a desired azimuth angle can be obtained with respect to the lower surface of the (FIG. 2 (f)). Next, a sputter ring or the like is used to form a gear cap material on at least the gear cap surface 11, and a magnetic film 4 is formed in a portion centered on the gear cap surface 11 by mask sputtering or the like.
The nonmagnetic protective film 5 is formed on the entire surface of the nonmagnetic substrate 1.
(Fig. 2 (g)). In this case, the non-magnetic protective film 5 is made thicker than the step portion (FIG. 2 (f)) formed by the gear cap surface 11. After that, the magnetic film 4 and the non-magnetic protective film 5 are scraped off to the upper surface of the non-magnetic substrate 1 which is not scraped in FIG. 2 (b) by a lap or the like to flatten the surface (FIG. 2 (h)). ). Here, the track width T _W of the headgear 3 is regulated by this flattening. Further, the magnetic films 2 and 4 are close to each other at the portion of the headgear 3 having the depth D of the gear, but the magnetic films 2 and 4 are separated by the insulating film 10 at a portion deeper than this.

Next, a conductive material such as Cu is vapor-deposited on the portions of the magnetic films 2 and 4 which are separated by the insulating film 10, and these are patterned to form the coil 12 (FIG. 2). (I)). Then, the magnetic films 2, 4
The magnetic film 13 is formed so as to couple with each other. This allows
A magnetic path composed of the magnetic films 2, 13, 4 is formed (FIG. 2 (j)). Thereafter, a non-magnetic protective film is formed on the entire surface to obtain the magnetic head shown in FIG.

By the way, in general, a film formed by a thin film forming process such as vapor deposition or sputtering is more dense than a bulk. The non-magnetic substrate 1 which is a bulk is made of a dense material and has a smooth surface that forms a tape sliding surface, but the non-magnetic protective films 5 and 6 formed by the manufacturing process as described above are tape-slipped. The moving surface is rough and easily scratched, and dust easily adheres. But,
In this embodiment, the step portion including the inclined side surface obtained by the above-mentioned shaving on the non-magnetic substrate 1 also has the head gap 3.
Since the magnetic films 2 and 4 that surround the tape are surrounded, the tape sliding surface has a dense and smooth surface portion of the material of the non-magnetic substrate 1, so that the tape sliding surface is not scratched or dust is attached. It will be few.

In addition, in this specific example, only one chip has been described, but the present invention is not limited to this, and it may be formed by a wafer process like the IC process. Further, as shown in FIG. 3, a double azimuth structure having a plurality of head gears in one chip can be used, and an example of the wafer process is shown in FIG.

〔The invention's effect〕

As described above, according to the present invention, wear of the magnetic layer and uneven wear of the tape sliding surface can be prevented, spacing loss can be prevented, and scratches or dust on the tape sliding surface can be prevented. It is possible to prevent this, the slidability of the tape is improved, and the excellent effect of facilitating high-precision assembly is obtained.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of the magnetic head according to the present invention, FIG. 2 is a process drawing showing a specific example of a method of manufacturing the magnetic head shown in FIG. 1, and FIG. 3 is a magnetic head according to the present invention. FIG. 4 is a perspective view showing another embodiment of the head, FIG. 4 is a perspective view showing a part of the manufacturing process thereof, and FIGS. 5 and 6 are partial plan views showing the tape sliding surface of the conventional magnetic head, respectively. FIG. 7 is the sixth
FIG. 8 is a view showing a mounted state of the magnetic head shown in FIG. 8, and FIG. 8 is a partial plan view showing a tape sliding surface of another example of the conventional magnetic head. 1 ... Non-magnetic substrate, 2 ... Magnetic film, 3 ... Headgear tape, 4 ... Magnetic film, 5,6 ... Non-magnetic protective film.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (56) Reference JP-A-61-145716 (JP, A) JP-A-61-287023 (JP, A) JP-A-62-256210 (JP, A) JP-A-1- 33709 (JP, A)

Claims (1)

[Claims] 1. A magnetic head having a tape sliding surface composed of exposed surfaces of a first magnetic film, a second magnetic film, a non-magnetic substrate and a non-magnetic protective film, wherein the non-magnetic substrate is inclined in the same direction as an angle forming a headgear. A step portion having an inclined side surface, and the first magnetic film is formed on the step portion including the inclined side surface,
The first and second magnetic films are sandwiched by the non-magnetic substrate and the non-magnetic protective film on the tape sliding surface, and the first and second magnetic films are attached to the surface of the non-magnetic substrate forming a reference surface. The inter-membrane headgear has a predetermined angle θ (however, 0 ° <θ <90
Magnetic head characterized by being inclined only by (°).