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JPH0761713B2 - Head for ink jet printer - Google Patents
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JPH0761713B2 - Head for ink jet printer - Google Patents

Head for ink jet printer

Info

Publication number
JPH0761713B2
JPH0761713B2 JP60213994A JP21399485A JPH0761713B2 JP H0761713 B2 JPH0761713 B2 JP H0761713B2 JP 60213994 A JP60213994 A JP 60213994A JP 21399485 A JP21399485 A JP 21399485A JP H0761713 B2 JPH0761713 B2 JP H0761713B2
Authority
JP
Japan
Prior art keywords
ink
adhesive layer
vibrator
piezo
piezoelectric vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60213994A
Other languages
Japanese (ja)
Other versions
JPS6273952A (en
Inventor
正光 上原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP60213994A priority Critical patent/JPH0761713B2/en
Publication of JPS6273952A publication Critical patent/JPS6273952A/en
Publication of JPH0761713B2 publication Critical patent/JPH0761713B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1607Production of print heads with piezoelectric elements
    • B41J2/161Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1607Production of print heads with piezoelectric elements
    • B41J2/1618Fixing the piezoelectric elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1623Manufacturing processes bonding and adhesion

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はインクジェットプリンタにおいて、電気的信号
を加えることによって発生させるピエゾ振動子の機械変
形を効率よくインクに伝達し、インクを安定に高速応答
させるための接着層の材料特性にかかわるものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention efficiently transfers mechanical deformation of a piezo-vibrator generated by applying an electric signal to an ink in an ink jet printer, and stably responds to the ink at high speed. It is related to the material characteristics of the adhesive layer for the purpose.

〔従来の技術〕 従来のインクジェットプリンタはピエゾ振動子を半田合
金などの金属の共晶合金を用いて高温に加熱して接合し
ていた。
[Prior Art] In a conventional inkjet printer, a piezo oscillator is heated to a high temperature and joined using a eutectic alloy of a metal such as a solder alloy.

〔発明が解決しようとする問題点〕[Problems to be solved by the invention]

しかしピエゾ振動子と被接合物の熱膨張係数に大差があ
り、接合時高温に保った後、室温まで冷却するとピエゾ
振動子に非常に大きな残留応力がかかってしまった。接
合層の金属は硬いため、残留応力を吸収できずにピエゾ
振動子が破損する事が多かった。また接合時高温にする
必要があり、プラスチック製のインクジェットプリンタ
ヘッドに対してはヘッド材料が溶融破壊されて使用でき
なかった。さらに柔かい粘着剤を使用すると、ピエゾ振
動子の振動を粘着剤が吸収してしまい、インク噴射がで
きなかった。
However, there is a large difference in the coefficient of thermal expansion between the piezo-vibrator and the object to be bonded, and when the temperature was kept high during bonding and then cooled to room temperature, a very large residual stress was applied to the piezo-vibrator. Since the metal of the bonding layer is hard, the residual stress cannot be absorbed and the piezoelectric vibrator is often damaged. In addition, it was necessary to raise the temperature at the time of joining, and the head material was melted and destroyed and could not be used for a plastic inkjet printer head. When a softer adhesive was used, the vibration of the piezo oscillator was absorbed by the adhesive, making it impossible to eject ink.

そこで本発明の目的とするところは、ピエゾ振動子の機
械的変形を効率よくインクに伝達する信頼性の良好なイ
ンクジェットプリンタ用ヘッドを提供することにある。
Therefore, an object of the present invention is to provide a highly reliable inkjet printer head that efficiently transmits mechanical deformation of a piezoelectric vibrator to ink.

[問題点を解決するための手段] 本発明のインクジェットプリンタ用ヘッドは、基板との
間にインク流路を形成した振動板上にピエゾ振動子を接
着したオンデマンド型のインクジェットプリンタ用ヘッ
ドであって、前記振動板と前記ピエゾ振動子とをショア
硬度40度(Dスケール)以上の接着層を介して接着した
ことを特徴とする。
[Means for Solving Problems] An inkjet printer head of the present invention is an on-demand inkjet printer head in which a piezo oscillator is adhered to a diaphragm having an ink flow path formed between the substrate and the diaphragm. The vibrating plate and the piezo oscillator are bonded together via an adhesive layer having a Shore hardness of 40 degrees (D scale) or more.

〔実施例〕〔Example〕

第1図に本発明に用いたインクジェットプリンタヘッド
の構成と動作を示す。流路に対応する溝を形成した基板
1と振動板2を接合してインク流路3およびノズル4を
形成する。流路3はインクが流動するに必要な形状をし
ており通常断面は0.2×0.3mm程度である。ノズル4は通
常断面が0.05×0.05mm程度の大きさである。振動板2上
には接着層5を介して金属板6が接着され、第1図に示
したように順次接着層5,ピエゾ振動子7,薄膜電極8,半田
バンプ9が形成されている。接着層5は通常導電性であ
り、半田バンプ9と金属板6の間にスイッチ10を介して
電源11より駆動電圧V0をピエゾ振動子7に印加させ、前
記ピエゾ振動子と金属板6に発生させた機械的歪を順次
接着層5,振動板2,インク12に伝達させてインク12を押し
出し、インク滴13をノズル4より噴射方向14に噴射し印
字する。印字後ピエゾ振動子7の変形を回復させ、噴射
したインクの不足分をインク供給口15から供給方向16に
供給する。第2図は接着層5に各種材料を用いて接着層
5の硬度を変化させた場合のインク滴の噴出速度の相対
的変化である。接着層のショアー硬度をDスケールで70
度に設定した場合のインク滴の速度10m/sec,を基準にし
て各硬度でのインク滴の相対速度を求めた。この時電源
11の印加電圧V0は100V,パルス幅は250μs,周期1KHzで一
定とした。また接着層の材料には各種重合度の異なる有
機シリコン系接着剤,ウレタン系接着剤,エポキシ系接
着剤,アクリル系接着剤,ポリエステル系接着剤,ポリ
アミド系接着剤,フエノール系接着剤,アルファシアノ
系接着剤および前記系の粘着剤ならびに前記系のホット
メルト接着剤および前記系の接着剤を混合して、加熱条
件、硬化時間を変化させて硬度を変化させて用いた。こ
れらの接着材料は接合に伴う機械的な残留応力を良好に
吸収し、ピエゾ振動子の割れも発生しなかった。接合材
の硬度35以下ではインク滴の相対速度が0.5となって、
インク滴の噴射方向に乱れが発生して印字ができなかっ
た。接着剤5の硬度が40以上であればインク滴の相対速
度が0.8以上となり印字に乱れはなかった。
FIG. 1 shows the configuration and operation of the inkjet printer head used in the present invention. The ink flow path 3 and the nozzle 4 are formed by joining the substrate 1 having the groove corresponding to the flow path and the vibration plate 2 to each other. The flow path 3 has a shape necessary for the ink to flow, and its cross section is usually about 0.2 × 0.3 mm. The nozzle 4 usually has a cross section of about 0.05 × 0.05 mm. A metal plate 6 is adhered on the vibration plate 2 via an adhesive layer 5, and as shown in FIG. 1, an adhesive layer 5, a piezoelectric vibrator 7, a thin film electrode 8 and a solder bump 9 are sequentially formed. The adhesive layer 5 is normally conductive, and a drive voltage V 0 is applied to the piezo-vibrator 7 from the power source 11 via the switch 10 between the solder bump 9 and the metal plate 6 to apply the piezo-vibrator to the metal plate 6. The generated mechanical strain is sequentially transmitted to the adhesive layer 5, the vibration plate 2, and the ink 12 to push out the ink 12, and the ink droplets 13 are ejected from the nozzle 4 in the ejection direction 14 for printing. After printing, the deformation of the piezoelectric vibrator 7 is recovered, and the shortage of the ejected ink is supplied from the ink supply port 15 in the supply direction 16. FIG. 2 is a relative change in the ejection speed of ink droplets when the hardness of the adhesive layer 5 is changed by using various materials for the adhesive layer 5. The Shore hardness of the adhesive layer is 70 on the D scale.
The relative velocity of the ink droplets at each hardness was calculated based on the ink droplet velocity of 10 m / sec when the degree was set to 0 degree. Power supply at this time
The applied voltage V 0 of 11 was 100 V, the pulse width was 250 μs, and the period was 1 KHz. The materials for the adhesive layer include organic silicone adhesives, urethane adhesives, epoxy adhesives, acrylic adhesives, polyester adhesives, polyamide adhesives, phenolic adhesives, and alpha cyano, which have different degrees of polymerization. The system adhesive and the above system pressure-sensitive adhesive, the above system hot melt adhesive and the above system adhesive were mixed and used by changing the heating conditions and the curing time to change the hardness. These adhesive materials satisfactorily absorbed the mechanical residual stress associated with joining and did not cause cracking of the piezoelectric vibrator. When the hardness of the bonding material is 35 or less, the relative velocity of ink drops is 0.5,
Disturbance occurred in the ink droplet ejection direction, and printing could not be performed. When the hardness of the adhesive 5 was 40 or more, the relative velocity of the ink droplets was 0.8 or more, and the printing was not disturbed.

電源11の印加電圧V0を変化させて接着層5の硬度70の場
合のインク滴速度を2倍以上に増加させたり、1/2まで
減少させても、前記の各々の駆動電圧では接着層5の硬
度が40度未満の場合は安定した印字ができなかった。こ
れらの事柄は第3図に示すように、印字中にピエゾ振動
子7に印加される駆動電圧と逆起電力を観察することに
よりよく理解された。(a)はピエゾ振動子を変形させ
るための駆動電圧波形であり、P1,P2のパルスが印加さ
れた時に、インクを噴出させるようにピエゾ振動子7は
変形する。ピエゾ振動子7は2×4×0.1mmであり静電
容量が約1500PF(at 1KHz)のコンデンサであるため、
実際にピエゾ振動子7に印加される電圧の立上りは遅れ
るがパルス印加時間内でピエゾ振動子7に充電飽和して
一定値V0となる。駆動パルスP1の印加が終了するとイン
ク滴13を噴射し終りピエゾ振動子7に充電された電荷が
ダイオード17およびブリーダ抵抗18を通じて放電される
が、ピエゾ振動子7の機械的な変形歪が解放されるため
に逆起電力が発生し、ピエゾ振動子7の両電極間の電圧
波形接着層5の硬度が40以上の場合は(b)のようにな
って駆動パルス電圧P1印加終了後もピエゾ振動子7は一
定時間最大振幅A1,周期(t2−t1)の減衰振動を行なう
ことがわかった。したがって前記減衰振動終了後に次の
駆動パルス電圧P2を印加するとピエゾ振動子7は安定な
機械的歪を加えられ安定に印字を行なうことができるこ
とがわかった。次に接着層5の硬度を35度にした場合の
ピエゾ振動子7の両電極間の電圧波形を(c)に示す。
駆動パルス電圧P1印加終了後のピエゾ振動子7の減衰振
動の振幅A2はA1より大きく周期(t′−t1)も(t2
t1)より長かった。これは接着層5の硬度が小さいと接
着層5がピエゾ振動子7の機械歪を吸収し振動板2に効
率良く伝達しないためであることがわかった。したがっ
て次の駆動パルス電圧P2の印加時にも前駆動パルスP1
よるピエゾ振動子7の減衰振動が残っており、この逆起
電力による電圧波形19が残っているため前記残留してい
る電圧に駆動パルス電圧P2が重畳されて歪んだ駆動電圧
20が印加され、印字ができない状態となることがわかっ
た。
Even if the applied voltage V 0 of the power supply 11 is changed to increase the ink drop velocity in the case where the hardness of the adhesive layer 5 is 70 to more than double or decrease it to 1/2, the adhesive layer is not affected by the respective driving voltages. When the hardness of 5 was less than 40 degrees, stable printing could not be performed. These matters were well understood by observing the drive voltage and the counter electromotive force applied to the piezoelectric vibrator 7 during printing, as shown in FIG. (A) is a drive voltage waveform for deforming the piezo-vibrator, and the piezo-vibrator 7 is deformed so as to eject ink when the pulses P 1 and P 2 are applied. Since the piezo vibrator 7 is 2 × 4 × 0.1 mm and has a capacitance of about 1500 PF (at 1 KHz),
Although the rise of the voltage actually applied to the piezoelectric vibrator 7 is delayed, the piezoelectric vibrator 7 is charged and saturated to a constant value V 0 within the pulse application time. When the application of the drive pulse P 1 is completed, the ink droplets 13 are ejected and the charge charged in the piezoelectric vibrator 7 is discharged through the diode 17 and the bleeder resistor 18, but the mechanical deformation strain of the piezoelectric vibrator 7 is released. As a result, a counter electromotive force is generated, and when the hardness of the voltage waveform adhesive layer 5 between both electrodes of the piezoelectric vibrator 7 is 40 or more, it becomes as shown in (b) and even after the application of the drive pulse voltage P 1 is completed. It has been found that the piezo-vibrator 7 performs a damping oscillation with a maximum amplitude A 1 and a period (t 2 −t 1 ) for a certain period. Therefore, it was found that when the next drive pulse voltage P 2 is applied after the end of the damping vibration, the piezoelectric vibrator 7 is subjected to stable mechanical strain and stable printing can be performed. Next, a voltage waveform between both electrodes of the piezoelectric vibrator 7 when the hardness of the adhesive layer 5 is 35 degrees is shown in (c).
The amplitude A 2 of the damping vibration of the piezoelectric vibrator 7 after the application of the drive pulse voltage P 1 is larger than A 1 and the cycle (t ′ 2 −t 1 ) is also (t 2
It was longer than t 1 ). It has been found that when the hardness of the adhesive layer 5 is small, the adhesive layer 5 absorbs the mechanical strain of the piezo-vibrator 7 and does not efficiently transmit it to the diaphragm 2. Therefore, even when the next drive pulse voltage P 2 is applied, the damping vibration of the piezoelectric vibrator 7 due to the previous drive pulse P 1 remains, and the voltage waveform 19 due to this counter electromotive force remains, so Distorted drive voltage due to superposition of drive pulse voltage P 2
It was found that 20 was applied and printing could not be performed.

〔発明の効果〕〔The invention's effect〕

以上述べたように、本願発明のインクジェットプリンタ
用ヘッドは、振動板とピエゾ振動子をショア硬度40度
(Dスケール)以上の接着層により接着したことによ
り、接着剤にピエゾ振動子の振動が吸収されてインク噴
射が十分できなくなるような問題が改善され、微小なピ
エゾ振動子の機械的変形(振動)を振動板を介して効率
よくインク流路中のインクに伝達することができ、イン
ク滴吐出における信頼性の高いインクジェットプリンタ
用ヘッドを提供できる。
As described above, in the ink jet printer head of the present invention, the vibration plate and the piezoelectric vibrator are bonded by the adhesive layer having a Shore hardness of 40 degrees (D scale) or more, so that the vibration of the piezoelectric vibrator is absorbed by the adhesive. As a result, the problem that the ink cannot be ejected sufficiently is improved, and the minute mechanical deformation (vibration) of the piezoelectric vibrator can be efficiently transmitted to the ink in the ink flow path through the vibrating plate. It is possible to provide an inkjet printer head with high reliability in ejection.

【図面の簡単な説明】[Brief description of drawings]

第1図:本発明のインクジェットヘッドの断面図、第2
図:本発明のヘッドを構成する接着層5の硬度と噴射す
るインク滴13の速度との関係の説明図、第3図:本発明
のヘッドの駆動電圧とピエゾ振動子にかかる電圧の関係
を示す図。 1……基板 2……振動板 3……流路 4……ノズル 5……接着層 6……金属板 7……ピエゾ振動子 8……薄膜電極 9……半田バンプ 10……スイッチ 11……駆動電圧 12……インク 13……インク滴 14……噴射方向 15……インク供給孔 16……インク供給方向 17……ダイオード 18……ブリーダ抵抗 19……逆起電力による電圧波形 20……歪んだ駆動電圧
FIG. 1: Cross-sectional view of an inkjet head of the present invention, second
Figure: Explanatory diagram of the relationship between the hardness of the adhesive layer 5 constituting the head of the present invention and the speed of the ejected ink droplets 13, Figure 3: The relationship between the drive voltage of the head of the present invention and the voltage applied to the piezoelectric vibrator FIG. 1 ... Substrate 2 ... Vibration plate 3 ... Flow path 4 ... Nozzle 5 ... Adhesive layer 6 ... Metal plate 7 ... Piezo vibrator 8 ... Thin film electrode 9 ... Solder bump 10 ... Switch 11 ... … Driving voltage 12 …… Ink 13 …… Ink drop 14 …… Jet direction 15 …… Ink supply hole 16 …… Ink supply direction 17 …… Diode 18 …… Bleeder resistance 19 …… Voltage waveform due to back electromotive force 20 …… Distorted drive voltage

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】ノズルと連通するインク流路が形成された
基板と、該基板上に形成された振動板と、該振動板上の
前記インク流路に対応する位置に接着したピエゾ振動子
とを有するインクジェットプリンタ用ヘッドにおいて、 前記振動板と前記ピエゾ振動子をショア硬度40度(Dス
ケール)以上の接着層により接着したことを特徴とする
インクジェットプリンタ用ヘッド。
1. A substrate on which an ink flow path communicating with a nozzle is formed, a vibration plate formed on the substrate, and a piezo vibrator bonded to a position on the vibration plate corresponding to the ink flow path. An inkjet printer head having the above-mentioned, wherein the vibrating plate and the piezo-vibrator are adhered by an adhesive layer having a Shore hardness of 40 degrees (D scale) or more.
JP60213994A 1985-09-27 1985-09-27 Head for ink jet printer Expired - Lifetime JPH0761713B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60213994A JPH0761713B2 (en) 1985-09-27 1985-09-27 Head for ink jet printer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60213994A JPH0761713B2 (en) 1985-09-27 1985-09-27 Head for ink jet printer

Publications (2)

Publication Number Publication Date
JPS6273952A JPS6273952A (en) 1987-04-04
JPH0761713B2 true JPH0761713B2 (en) 1995-07-05

Family

ID=16648496

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60213994A Expired - Lifetime JPH0761713B2 (en) 1985-09-27 1985-09-27 Head for ink jet printer

Country Status (1)

Country Link
JP (1) JPH0761713B2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2717025B2 (en) * 1990-07-10 1998-02-18 富士通株式会社 Print head
WO1992000849A1 (en) * 1990-07-10 1992-01-23 Fujitsu Limited Printing head
EP0755793B1 (en) * 1995-07-26 2001-04-04 Sony Corporation Printer apparatus and method of production of same
JP3687426B2 (en) 1999-07-23 2005-08-24 セイコーエプソン株式会社 Printing auxiliary tool, assembly jig for the same, and recording apparatus

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5519523A (en) * 1978-07-28 1980-02-12 Canon Inc Recording device
JPS5660262A (en) * 1979-10-22 1981-05-25 Canon Inc Recording head
JPS56118872A (en) * 1980-02-26 1981-09-18 Seiko Epson Corp Ink jet head
JPS57201665A (en) * 1981-06-05 1982-12-10 Hitachi Ltd Ink jet device
JPS58205759A (en) * 1982-05-26 1983-11-30 日産自動車株式会社 Vibration inhibiting material
JPS5989163A (en) * 1982-10-25 1984-05-23 Seiko Epson Corp inkjet head
JPS60116457A (en) * 1983-11-29 1985-06-22 Fujitsu Ltd Manufacture of inkjet head
JPS60145857A (en) * 1984-01-10 1985-08-01 Canon Inc Droplet discharge device

Also Published As

Publication number Publication date
JPS6273952A (en) 1987-04-04

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