JPH0763573B2 - Waste treatment method for liquid filtration equipment - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a waste treatment method of a liquid filtration device for treating waste of a liquid filtration device used for filtering lubricating oil of a vacuum pump, for example. Is.

[Conventional technology]

FIG. 2 shows a conventional liquid filtration device. In the figure, a container (1) has a container part (1a) having an inlet (2) and made of a conductor, and an opening (1b) of the container part (1a). And a lid portion (1c) having a delivery port (3). The filter (4) has one end surface attached to the lid (1c), filters the liquid fed into the container (1) through the inlet (2), and then the outlet (3) through the container (1). Send it out. The electrode (5) is attached to the lid portion (1c) via an insulator (501), and has a tubular shape so that the filter (4) can be inserted therein. The voltage applying means (6) is constituted by the outer peripheral portion of the container part (1a) and the electrode (5), and applies a voltage to the liquid in the container (1).

Next, the operation will be described. A voltage is applied to the liquid introduced into the container (1) through the inlet (2) as indicated by the arrow A by the voltage applying means (6). Therefore, the impurities in the liquid are ionized or the electric double layer is destroyed,
Alternatively, the zeta potential of the electric double layer is neutralized, and the impurities are electrostatically aggregated and become large, and after being filtered by the filter (4), the container (1) is fed from the outlet (3) as indicated by an arrow B.
Sent out.

[Problems to be solved by the invention]

In the above filtering device, when the liquid is, for example, a lubricating oil of a vacuum pump, the impurities in the liquid are fine, such as in the order of micro, and the impurities are electrostatically aggregated and become large until they are filtered by the filter (4). However, there was a problem that it took a long time. Further, when gas is mixed in the liquid, there is a problem that the gas cannot be removed. Further, when the liquid is, for example, a lubricating oil for a vacuum pump of a semiconductor manufacturing line, compounds such as arsine, diborane, phosphine and the like are mixed into the lubricating oil, and the lubricating oil cannot be simply processed. .

The present invention has been made in order to eliminate such problems, and in a liquid filtration device that filters impurities in a liquid in a short time and strongly adsorbs impurities such as gas to an adsorbent, it is possible to safely treat waste. It is an object of the present invention to provide a waste treatment method for a liquid filtration device to be performed.

[Means for solving problems]

The liquid treatment apparatus waste treatment method according to the present invention includes a voltage applying unit for applying a voltage to a liquid to be treated, an adsorbing unit for circulating a liquid to which a voltage is applied in an adsorbent, and an adsorbent passing through the adsorbent. A liquid filtering apparatus provided with a filtering means for filtering a liquid with a filter includes a step of accumulating waste and a step of neutralizing the accumulated waste.

[Action]

In the present invention, the voltage applying means ionizes the impurities in the liquid, or neutralizes the zeta potential of the electric double layer, electrostatically agglomerates the impurities, and the adsorption means adsorbs the impurities. After being filtered by a filtering means, wastes are accumulated and harmlessly neutralized with an alkaline solution.

〔Example〕

FIG. 1 shows an embodiment of a liquid filtration device applied to the present invention. In the figure, a bottom surface of a container part (1a) is formed with a taper (1d), and the container part (1d) communicates with the container part (1d). A first drain (1e) is provided at the bottom of the side surface of 1a). The lid (1c) is provided with a second drain (1f), and an electrode connecting conductor (1h) connected to a later-described sealed container (5C) via an insulator (1g) is inserted therethrough.
The bolt (1i) is attached to the container part (1a) and the lid part (1c). The delivery port (3A) is made of a conductive pipe, and is inserted through a lid (1c) and a filter (4A) made of an insulating material whose one end surface is attached to the lid (1c), and is inserted into the filter (4A). ) One end (3a) protruding from the other end
Is closed by a mounting tool (8) which is a bag nut described later, and through holes (3b) are evenly formed in the inside of the filter (4A). The first electrode (5A) is made of a porous body or a mesh body and has a cylindrical shape. The first electrode (5A) accommodates the filter (4A), and one end surface of the first electrode (5A) is covered with an insulator (5x) to cover (1c).
Attached to the electrode connection conductor (1h). The second electrode (5B) is made of a porous body or a mesh body and has a cylindrical shape. The second electrode (5B) accommodates the first electrode (5A), and one end surface of the second electrode (5B) is covered with the insulator (5x) to the lid portion (1c). Installed,
It is connected to the electrode connection conductor (1h) at the same potential as the first electrode (5A). The sealed container (5C) is configured by closing both end surfaces of the first and second electrodes (5A) and (5B) so as to form a cylindrical hollow portion (5D). The voltage applying means (6A) comprises a container part (1a), first and second electrodes (5A) and (5B), and a delivery port (3A). The bottom plate (7) is made of, for example, an insulator, penetrates one end (3a) of the delivery port (3A), and is connected to the filter (4A) and the first and second electrodes (5A) and (5B). It is installed in contact with the end face. Fixture (8)
Is, for example, a bag nut, and one end (3a) of the delivery port (3A)
The end plate (3a) of the delivery port (3A) is closed by screwing on the outer periphery of the bottom plate (7) and the bottom plate (7) is attached to the delivery port (3A). The adsorbent (9) is, for example, Zeo herb, sorbito, activated clay, etc., and is enclosed between the first and second electrodes (5A) and (5B), that is, in the hollow part (5D) of the sealed container (5C). ing. The transformer (10) is connected between the first and second electrodes (5A) and (5B) and the lid portion (1c) via the electrode connecting conductor (1h),
The first and second electrodes (5A) and (5B) are at a positive potential, and the deflection part (1
A voltage of, for example, 10 to 3000 V / cm is applied so that c) becomes the ground potential.

Next, the operation will be described. A voltage is applied to the liquid introduced into the container (1) through the inlet (2) as indicated by the arrow A by the voltage applying means (6A). For this reason, the relatively large particle impurities in the liquid sent between the container part (1a) and the second electrode (5B) are attracted to the second electrode (5B) by Coulomb force, and are electrophoresed. Collected around the second electrode (5B), the zeta potential is erased, and cohesive coarsening occurs due to intermolecular attraction. Impurities with lighter specific gravity than the liquid are floated and separated as shown by the arrow C, and are separated from the second drain (1f) into the container (1).
Stripped out. In addition, the impurities whose specific gravity is heavier than the liquid are
Sedimentation separation is performed as indicated by arrow D, and the sediment is removed from the first drain (1e) to the outside of the container (1).

The liquid from which the impurities with relatively large particles are removed is sent into the sealed container (5C) by pressure as shown by the arrow E, and enters the adsorbent (9) enclosed in the hollow part (5D). Touch evenly. In this case, the ions on the surface of the pores of the adsorbent (9) are enhanced by the charge applied to the first and second electrodes (5A) and (5B), and the Coulomb force of these ions causes the gas Water and low-molecular impurities are adsorbed and removed by the adsorbent (9).

On the other hand, the filter (4A) made of an insulating dielectric is the first
A voltage is applied by the electrode (5A) and the delivery port (3A) to charge the dielectric charge. Therefore, the colloidal particles and microparticles remaining in the liquid after passing through the adsorbent (9) are attracted by the pump pressure and the dielectric charge of the filter (4A) and gather on the outer periphery of the filter (4A). , The zeta potential is erased and aggregates to form a cake and trap the remaining particles. The liquid from which the impurities have been filtered in this way is delivered from the through hole (3b) of the delivery port (3A) through the delivery port (3A) to the outside of the container (1) as indicated by arrow B.

Also, the filter (4A), the adsorbent (9), the first and second
To replace the electrodes (5A) and (5B) of the lid, cover (1c)
From the container (1a), then remove the tightening tool (8) and remove the bottom plate (7), and filter (4A)
And the first and second electrodes (5A), (5B) and sealed container (5D)
Replace the adsorbent (9) inside.

As for the gas not adsorbed by the adsorbent (9), the first and second electrodes (5A) and (5B) are porous bodies or mesh bodies, and the through hole (3b) is formed in the delivery port (3A). Is provided, the liquid is discharged to the outside of the container (1) together with the liquid.

Next, the waste treatment of the liquid filtration device shown in FIG. 1 will be described. After filtering the liquid in this way and then removing the lid portion (1c), it can be seen that untreated liquid remains at the bottom of the container portion (1a). That is, since the inner wall surface of the container part (1a) is at earth potential, colloidal particles, which are compounds with gases such as phosphine, diborane, and arsine, are aggregated by displacement of the zeta potential, and a part of them is It can be seen that it is contained in the untreated liquid so as to adhere to the inner wall surface of the part (1a).

The untreated liquid in the container part (1a) is fed to the first drain (1
Discharge to the outside from e) and store in a waste container (not shown). Next, the inner wall surface of the container part (1a) is cleaned with a waste cloth, a Freon solution or the like, and the waste cloth, the Freon solution or the like is discarded in a waste container.

Next, when the container (5c) is taken out from the container part (1a), the second electrode (5B) forming the outer wall surface of the container (5C) has a positive potential and is exposed to gases such as phosphine, diborane and arsine. It can be seen that the colloidal particles that are the compound of (1) are aggregated and laminated. The laminate is removed with a spatula or the like, removed into a waste container, and then cleaned with a waste cloth or the like, and the waste cloth or the like is thrown into the waste container.

Next, the adsorbent (9) is discarded from the container (5c) into the waste container.

Next, after discarding the adsorbent (9) from the container (5c) into the waste container, the entire container (5c) is cleaned with a waste cloth and a Freon solution, and the waste cloth and a Freon solution are put into the waste container. throw away.

Next, the filter (4A) is pulled out from the inside of the first electrode (5A). The surface of the filter (4A) is polarized by the Coulomb force acting between the delivery port (3A) and the first electrode (5A) to generate a zeta potential. Therefore, the residual colloid in the liquid is adsorbed by the Coulomb force on the surface of the filter (4A) to form a cake layer. Therefore, the life of the filter (4A) is extended. Discard this filter (4A) in the waste container.

In this way, the waste of the liquid filtration device discarded in the waste container is neutralized with an alkaline solution such as caustic soda to render it harmless. Heavy oil is added to this detoxified waste and incinerated. After that, if necessary, the incinerated waste is directly or after being put into a drum can, and then solidified with concrete for concrete treatment.

In addition, the waste of the liquid filtration device disposed in the waste container may be directly incinerated without being neutralized. Alternatively, the neutralized waste may be packed in a drum or the like and then treated with concrete.

〔The invention's effect〕

As described above, according to the present invention, a voltage is applied to the liquid sent into the container by the voltage applying means to aggregate the impurities,
Gas and water and low-molecular impurities are adsorbed and removed by the adsorbent, and further, the waste generated in the liquid filtration device in which colloidal particles and microparticles are aggregated and captured by the filter,
Since they are accumulated, neutralized with an alkaline solution, or incinerated, the waste of the liquid filtration device can be safely disposed of.

[Brief description of drawings]

FIG. 1 is a sectional view showing an embodiment of a liquid filtering device applied to the present invention. FIG. 2 is a sectional view showing a conventional liquid filtering device. In the figure, (1) is a container, (1a) is a container part, (1b) is an opening, (1c) is a lid part, (1d) is a taper, (1e) (1
f) is the first and second drains, (2) is the inlet, (3A) is the outlet, (3a) is one end, (3b) is a through hole, (4A) is a filter, (5A), ( 5B) is the first and second electrodes, (5C) is a sealed container, (5D) is a hollow part, (6A) is voltage applying means, (7)
Is a bottom plate, (8) is an attachment, (9) is an adsorbent, (10)
Is a transformer, and (11a) and (11b) are first and second dielectrics. In the drawings, the same reference numerals indicate the same or corresponding parts.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Fukumoto Hayashiaki 4-chome, Mizuhara, Itami City, Hyogo Prefecture Mitsubishi Electric Corporation ELS Research Laboratory (72) Inventor Shoji Hama 4-chome, Mizuhara, Itami City, Hyogo Prefecture Address Mitsubishi Electric Co., Ltd. LSI Research Laboratory (72) Inventor Katsuhiko Tamura 4-1-1 Mizuhara, Itami City, Hyogo Prefecture Mitsubishi Electric Co., Ltd. Kitaitami Works (72) Inventor Kimihiko Okagami Nishi, Yodogawa-ku, Osaka-shi, Osaka Nakajima 4-3-4 Liquidcon Sand Co., Ltd.

Claims (2)

[Claims] 1. A voltage applying means for applying a voltage to a liquid to be treated, an adsorbing means for causing a liquid to which a voltage is applied by the voltage applying means to flow into an adsorbent, and a liquid passing through the adsorbent on a filter. In a liquid filtering device equipped with a filtering means for filtering, a step of discharging the liquid in the container constituting the voltage applying means, a step of removing deposits on the inner surface of the container, and a step of removing the adsorbent. A waste accumulation step comprising a step and a step of removing the filter, and the waste accumulated in the waste accumulation step is neutralized with an alkaline liquid, incinerated, or neutralized. A waste treatment method for a liquid filtration device, comprising a waste treatment step of post-incineration treatment. 2. The waste treatment step comprises a concrete treatment step of solidifying the waste that has been neutralized with an alkaline liquid, the waste that has been incinerated, or the waste that has been incinerated after being neutralized with concrete. The method for treating waste in a liquid filtration device according to claim 1, characterized in that