JPH0763618B2 - Ultrafine particle manufacturing method - Google Patents
Ultrafine particle manufacturing methodInfo
- Publication number
- JPH0763618B2 JPH0763618B2 JP1315052A JP31505289A JPH0763618B2 JP H0763618 B2 JPH0763618 B2 JP H0763618B2 JP 1315052 A JP1315052 A JP 1315052A JP 31505289 A JP31505289 A JP 31505289A JP H0763618 B2 JPH0763618 B2 JP H0763618B2
- Authority
- JP
- Japan
- Prior art keywords
- resistance wire
- ultrafine
- ultrafine particles
- wire
- particle size
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000011882 ultra-fine particle Substances 0.000 title claims description 64
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 239000000463 material Substances 0.000 claims description 34
- 239000002245 particle Substances 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 7
- 239000002994 raw material Substances 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 description 11
- 239000000843 powder Substances 0.000 description 9
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 7
- 238000001816 cooling Methods 0.000 description 5
- 229910000953 kanthal Inorganic materials 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 5
- 239000004332 silver Substances 0.000 description 5
- 238000007796 conventional method Methods 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- 229910052755 nonmetal Inorganic materials 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- -1 IC elements Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000000635 electron micrograph Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 238000009736 wetting Methods 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000011164 primary particle Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Manufacture Of Metal Powder And Suspensions Thereof (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は超微粒子の製造方法に関し、より詳細には超微
粒子の高度利用あるいは周辺技術の確立のために必要と
される均一かつ制御された粒径をもつ超微粒子を長時間
安定して発生させるための超微粒子の製造方法に関す
る。Description: TECHNICAL FIELD The present invention relates to a method for producing ultrafine particles, and more particularly, to a uniform and controlled method required for advanced utilization of ultrafine particles or establishment of peripheral technology. The present invention relates to a method for producing ultrafine particles for stably generating ultrafine particles having a particle size for a long time.
IC素子等電子材料、光フアィバー、高機能セラミックス
等の高度先端技術では、超薄膜等のナノメータ制御技術
に関心が集まっている。As for advanced technology such as electronic materials such as IC elements, optical fibers, and high-performance ceramics, nanometer control technology for ultra-thin films is attracting attention.
本発明の超微粒子製造技術もその一つである。The ultrafine particle manufacturing technique of the present invention is one of them.
しかしながら、この超微粒子製造技術の展開は必ずしも
十分ではない。However, the development of this ultrafine particle manufacturing technique is not always sufficient.
これは最も重要な粒子径制御技術に下記の問題点がある
からである。This is because the most important particle size control technology has the following problems.
すなわち、（１）従来の超微粒子製造方法が加熱炉等に
よる超微粒子素材と融解、蒸発、急冷という物理的現象
を利用するため、炉内温度制御等の困難さから得られる
超微粒子が広い粒度分布を有する場合が多かったり、
（２）また一方、化学反応による超微粒子の製造方法の
場合も、その反応制御の困難さから一次粒子が集合した
鎖状粒子が生成しやすい。That is, (1) since the conventional method for producing ultrafine particles utilizes the ultrafine particle material in a heating furnace and the physical phenomena of melting, evaporation, and quenching, the ultrafine particles obtained from the difficulty of controlling the temperature in the furnace have a wide particle size. Often have a distribution,
(2) On the other hand, also in the case of the method for producing ultrafine particles by chemical reaction, chain particles in which primary particles are aggregated are likely to be generated due to the difficulty in controlling the reaction.
上記のように、ナノメータ制御等の高度先端技術への超
微粒子技術の適用には超微粒子の発生制御技術が不可欠
な課題である。As described above, in order to apply ultrafine particle technology to advanced technology such as nanometer control, ultrafine particle generation control technology is an essential issue.
すなわち本発明は、可能な限り均一粒径で、しかも長時
間、安定して製造可能であり、かつその粒径も容易に調
節できる超微粒子の製造方法を提供することを目的とす
るものである。That is, it is an object of the present invention to provide a method for producing ultrafine particles which has a particle size as uniform as possible, can be stably manufactured for a long time, and can be easily adjusted in particle size. .
本発明者らは、超微粒子の製造方法について種々研究を
重ねた結果、小さい直径の線状あるいは小さい粒径の粉
末状に調製した素材を抵抗線と常圧下で接触させ、該抵
抗線への供給電力を調節しながら、これを気化させ、次
いで気化蒸気を冷却することにより、均一かつ所望の粒
子径に制御された超微粒子が得られることを見出し、こ
の知見に基づいて本発明をなすに至った。As a result of various studies on the method for producing ultrafine particles, the present inventors have made a material prepared into a linear shape having a small diameter or a powder having a small particle diameter into contact with a resistance wire under normal pressure, and It was found that ultrafine particles controlled to have a uniform and desired particle size can be obtained by evaporating the supply power and then cooling the vaporized steam while adjusting the supply power, and based on this finding, the present invention is made. I arrived.
すなわち、本発明は、常圧下で素材を抵抗線に接触さ
せ、抵抗線に通電して素材を気化させたのち、気化蒸気
を冷却して超微粒子を製造するに当り、該素材として直
径1mm以下の線状又は平均粒子径1mm以下の粉末状に調製
したものを用いるとともに、該抵抗線への供給電力を調
節することにより生成する超微粒子の粒子径を制御する
ことを特徴とする超微粒子の製造方法に関するものであ
る。That is, the present invention, the material is brought into contact with the resistance wire under normal pressure, after energizing the resistance wire to vaporize the material, when cooling the vaporized steam to produce ultrafine particles, the diameter of the material is 1 mm or less. Of the ultrafine particles characterized by controlling the particle size of the ultrafine particles produced by adjusting the electric power supplied to the resistance wire while using the linear or the powder having an average particle diameter of 1 mm or less. The present invention relates to a manufacturing method.
本発明における超微粒子素材は線状で、または粉末状で
使用され、特に素材が線状とならない場合には粉末状で
使用するのが好ましい。The ultrafine particle material in the present invention is used in a linear form or in a powder form, and particularly when the material is not a linear form, it is preferably used in a powder form.
線状の場合には、その線径は1mm以下、好ましくは0.5mm
以下であり、粉末状の場合の粉末度は平均粒径が1mm以
下、好ましくは0.1mm以下である。In the case of a wire, the wire diameter is 1 mm or less, preferably 0.5 mm
The average particle size is 1 mm or less, preferably 0.1 mm or less.
また抵抗線としては、通電によって発熱するニクロム
線、カンタル線、タングステン線、タンタル線、白金線
等が用いられる。As the resistance wire, a nichrome wire, a kanthal wire, a tungsten wire, a tantalum wire, a platinum wire, or the like, which generates heat when energized, is used.
本発明においては、抵抗線よりも線状の超微粒子素材が
電気の良導体、例えば銀、アルミニウム等の場合には、
線状の超微粒子素材を抵抗線に電気が流れるように断続
的に抵抗線に巻きつける必要がある。In the present invention, when the ultrafine particle material linear than the resistance wire is a good electric conductor, such as silver or aluminum,
It is necessary to intermittently wind the linear ultrafine particle material around the resistance wire so that electricity flows through the resistance wire.
一方、線状の超微粒子素材が抵抗線よりも非良導体の場
合、例えば白金抵抗線に対する鉛細線等のように線状の
超微粒子素材の抵抗が高い場合には、発熱抵抗線に電気
が流れるので、連続的に巻きつけられる。On the other hand, when the linear ultrafine particle material is a poorer conductor than the resistance wire, for example, when the resistance of the linear ultrafine particle material such as a lead wire for platinum resistance wire is high, electricity flows through the heating resistance wire. So it can be wound continuously.
超微粒子素材が線状にならない場合、例えばセラミック
スの多く、あるいは食塩等の化合物では超微粒子素材の
粉末をアルコール、水等揮発性溶媒に分散させた後、抵
抗線を浸漬するか、またはこの分散液を抵抗線に塗布す
ることによって抵抗線に付着させる。If the ultrafine particle material does not become linear, for example, with many ceramics or compounds such as salt, disperse the powder of the ultrafine particle material in a volatile solvent such as alcohol or water, or immerse the resistance wire, or The liquid is applied to the resistance wire to adhere to the resistance wire.
また本発明においては、複数の撚線からなる抵抗線を用
いて超微粒子製造量を増加させることもできる。Further, in the present invention, it is possible to increase the production amount of ultrafine particles by using a resistance wire composed of a plurality of twisted wires.
更に複数の撚線からなる抵抗線と粉末状素材を用いる場
合、抵抗線と抵抗線との間に粉末を接触保持することも
できるので、比較的大粒径の粉末状素材からも超微粒子
を製造することができる。Further, when a resistance wire composed of a plurality of twisted wires and a powder material are used, it is possible to hold the powder in contact between the resistance wires, so that it is possible to generate ultrafine particles from a powder material having a relatively large particle size. It can be manufactured.
更にまた本発明においては、超微粒子素材と抵抗線とが
互いに濡れの関係でない組合せであるのが好ましい。例
えば金属の抵抗線には非金属の超微粒子素材を用いるの
が好ましい。Furthermore, in the present invention, it is preferable that the ultrafine particle material and the resistance wire are in a combination that is not in a wetting relationship with each other. For example, it is preferable to use a nonmetallic ultrafine particle material for the metal resistance wire.
この理由は、抵抗線の通電発熱によって超微粒子素材が
融解した後、抵抗線の表面上で超微粒子素材は球状を呈
するので、抵抗線の発熱量を均一に保持することがで
き、均一粒径の融解超微粒子素材を発生することができ
るからである。The reason for this is that after the ultrafine particle material has melted due to the heat generation of the resistance wire when energized, the ultrafine particle material has a spherical shape on the surface of the resistance wire, so the amount of heat generated by the resistance wire can be kept uniform and a uniform particle size This is because the molten ultrafine particle material can be generated.
超微粒子素材と抵抗線とが互いに濡れの関係にある場合
には、融解した超微粒子素材が抵抗線を膜状に覆うの
で、抵抗線の抵抗が変化し、この結果、抵抗線の発熱量
も変化するので好ましくない。When the ultrafine particle material and the resistance wire have a wet relationship with each other, the melted ultrafine particle material covers the resistance wire in a film shape, so that the resistance of the resistance wire changes, and as a result, the heating value of the resistance wire also increases. It is not preferable because it changes.
従って本発明においては、この濡れの関係から金属の超
微粒子を製造するためには非金属抵抗線の使用が好まし
く、また非金属の超微粒子を製造するためには金属抵抗
線の使用が好ましいが、金属抵抗線は発熱初期に抵抗線
表面が酸化されて非金属となる場合があるので、注意が
必要である。Therefore, in the present invention, it is preferable to use a non-metal resistance wire in order to produce ultrafine particles of metal due to this wetting relationship, and it is preferable to use a metal resistance wire in order to produce ultrafine particles of nonmetal. Note that the surface of the metal resistance wire may be oxidized to become a non-metal in the initial stage of heat generation, so caution is required.
本発明方法においては、抵抗線に線状又は粉末状の素材
を接触させた状態で、抵抗線の両端を電源に接続し、電
力を供給する。これにより抵抗線が発熱して、素材を融
解させ、気化させる。In the method of the present invention, both ends of the resistance wire are connected to a power source in a state where the resistance wire is in contact with a linear or powdery material, and power is supplied. This causes the resistance wire to generate heat, melting the material and vaporizing it.
次に、この気化蒸気を冷却すれば目的とする超微粒子を
得ることができる。この気化蒸気の冷却は、大気中で自
然に冷却して行うこともできるが、必要ならば冷却ガス
中に導入して行うこともできる。Next, by cooling this vaporized vapor, the desired ultrafine particles can be obtained. The cooling of the vaporized vapor can be carried out by naturally cooling it in the atmosphere, but it can also be carried out by introducing it into a cooling gas if necessary.
この際、抵抗線への供給電力を多くすれば生成する超微
粒子の粒子径は大きくなるし、また供給電力を少なくす
れば生成する超微粒子の粒子径は小さくなる。したがっ
て、抵抗線への供給電力を調節することによって、目的
とする超微粒子の粒子径を制御することができる。At this time, if the power supplied to the resistance wire is increased, the particle size of the ultrafine particles generated becomes large, and if the power supplied is decreased, the particle size of the ultrafine particles generated becomes small. Therefore, the particle size of the target ultrafine particles can be controlled by adjusting the power supplied to the resistance wire.
以下、本発明の実施例を述べる。Examples of the present invention will be described below.
第１図に概要を示す装置を用いて銀の超微粒子を製造し
た。まず、線径0.26mmφ、長さ17cmのカンタル線３に0.
2mmφの銀線４を断続的に巻きつけた。Ultrafine silver particles were produced using the apparatus outlined in FIG. First of all, 0.
A 2 mmφ silver wire 4 was wound intermittently.
これを、直径14mmφ、6mmφの石英二重管１の内管２中
に入れ、カンタル線３の両端を交流電源に接続し、カン
タル線への供給電力を変化させた。This was put in the inner tube 2 of the quartz double tube 1 having a diameter of 14 mmφ and 6 mmφ, and both ends of the kanthal wire 3 were connected to an AC power source to change the power supplied to the kanthal wire.
なお、内管２および外管１には、それぞれ0.56/minお
よび2.6/minの空気５、６を流した。In addition, 0.56 / min and 2.6 / min of air 5 and 6 were made to flow into the inner tube 2 and the outer tube 1, respectively.
カンタル線３は通電によって発熱し、銀線４は融解し、
気化蒸気は空気６によって内管２から排出され、空気５
と混合、冷却されて銀の超微粒子を得た。この結果、カ
ンタル線への供給電力量の変化によって第２図、第３図
および第４図の電子顕微鏡写真に示すような粒子径の異
なる銀の超微粒子を得た。これら写真上の1cmが１μｍ
に相当し、倍率はそれぞれ２万倍である。The Kanthal wire 3 generates heat when energized, the silver wire 4 melts,
The vaporized steam is discharged from the inner pipe 2 by the air 6, and the air 5
It was mixed with and cooled to obtain ultrafine silver particles. As a result, silver ultrafine particles having different particle diameters were obtained as shown in the electron micrographs of FIGS. 2, 3, and 4 by changing the amount of electric power supplied to the Kanthal wire. 1 cm on these pictures is 1 μm
And the magnification is 20,000 times.
なお、第２図は供給電力が40Wの場合であり、第３図は
供給電力50W、第４図は供給電力70Wの場合である。Note that FIG. 2 shows the case where the supply power is 40 W, FIG. 3 shows the case where the supply power is 50 W, and FIG. 4 shows the case where the supply power is 70 W.
これら第２図〜第４図から、本発明によって得られる超
微粒子は均一性に優れていて従来の方法で得られたもの
に比較して遜色がなく、装置の簡便さ、および粒子径の
制御性の点で極めて優れていることが明らかである。From these FIG. 2 to FIG. 4, the ultrafine particles obtained by the present invention are excellent in uniformity and comparable to those obtained by the conventional method, the simplicity of the apparatus and the control of the particle size. It is clear that it is extremely excellent in terms of sex.
上述したとおり、本発明によれば下記の効果を奏するこ
とができる。As described above, according to the present invention, the following effects can be obtained.
イ．本発明では加熱源として抵抗線のみを使用するの
で、従来のような加熱炉が不要であり、従って抵抗線へ
の供給電力によって得られる超微粒子の粒径を容易に制
御することができ、極めて便利である。I. In the present invention, since only the resistance wire is used as the heating source, the conventional heating furnace is not necessary, and therefore the particle size of the ultrafine particles obtained by the power supplied to the resistance wire can be easily controlled, It is convenient.
ロ．超微粒子素材が直接に抵抗線と接触するので、超微
粒子製造のための電力効率が良好である。従来の方法で
は、加熱炉等でガスを媒介とする間接的加熱のため、熱
の利用効率が低い欠点があった。B. Since the ultrafine particle material comes into direct contact with the resistance wire, the power efficiency for producing the ultrafine particles is good. The conventional method has a drawback that the heat utilization efficiency is low because of indirect heating through a gas in a heating furnace or the like.
ハ．本発明では、加熱源として抵抗線のみを使用するの
で、方法が簡便であり、線径の異なる、または異種の抵
抗線を接続することによって、必要とする任意の粒度分
布を有する超微粒子を得ることができる。C. In the present invention, since only the resistance wire is used as the heating source, the method is simple, and by connecting resistance wires having different or different wire diameters, ultrafine particles having any desired particle size distribution can be obtained. be able to.
ニ．超微粒子素材が抵抗線と直接接触しているので、超
微粒子素材の温度は常に抵抗線の表面温度に近い温度と
なり、粒子径が均一な超微粒子の発生が期待できる。D. Since the ultrafine particle material is in direct contact with the resistance wire, the temperature of the ultrafine particle material is always close to the surface temperature of the resistance wire, and it can be expected to generate ultrafine particles having a uniform particle size.
従来のポート状発熱体に粉末等を載せる方法では、発熱
体および素材の温度分布が不均一となるので、良好な超
微粒子が得られない傾向があった。In the conventional method of placing powder or the like on the port-shaped heating element, the temperature distribution of the heating element and the material becomes non-uniform, so that good ultrafine particles tend not to be obtained.
ホ．本発明では、加熱源として抵抗線を利用しているの
で、抵抗線を細くすることによって発熱量と超微粒子素
材との接触面積を増大させ、低電力により多量の超微粒
子を製造することができる。E. In the present invention, since the resistance wire is used as the heating source, by thinning the resistance wire, the amount of heat generated and the contact area with the ultrafine particle material can be increased, and a large amount of ultrafine particles can be produced with low power. .
ヘ．抵抗線を利用し、しかも超微粒子素材が直接抵抗線
に接触しているので、抵抗線への供給電力の調節によっ
て容易に抵抗線の発熱量を調節し、得られる超微粒子の
粒子径を調節することができる。F. Since the resistance wire is used and the ultrafine particle material is in direct contact with the resistance wire, the amount of heat generated by the resistance wire can be easily adjusted by adjusting the power supplied to the resistance wire, and the particle size of the resulting ultrafine particles can be adjusted. can do.
前記第２図〜第４図に示したように、抵抗線への供給電
力が増加すると超微粒子の粒子径が増大する。As shown in FIGS. 2 to 4, when the power supplied to the resistance wire increases, the particle size of the ultrafine particles increases.
ト．本発明で使用する抵抗線は簡単に製造することがで
き、また任意の形状に整えることができる。G. The resistance wire used in the present invention can be easily manufactured and trimmed into any shape.
チ．抵抗線と超微粒子状素材が直接接触しているので、
タングステン等の高融点抵抗線を利用すれば、かなりの
高融点の超微粒子素材の超微粒子を得ることができる。J. Since the resistance wire and the ultrafine particle material are in direct contact,
By using a high melting point resistance wire such as tungsten, it is possible to obtain ultrafine particles of a very high melting point ultrafine particle material.
第１図は本発明の方法に使用する製造装置の概要図、第
２図、第３図および第４図は本発明によって得られた銀
の超微粒子の粒子構造を示す電子顕微鏡写真である。 ３……抵抗線、４……超微粒子素材。FIG. 1 is a schematic view of a production apparatus used in the method of the present invention, and FIGS. 2, 3, and 4 are electron micrographs showing the particle structure of silver ultrafine particles obtained by the present invention. 3 ... Resistance wire, 4 ... Ultra fine particle material.
Claims (1)
に通電して素材を気化させたのち、気化蒸気を冷却して
超微粒子を製造するに当り、該素材として直径1mm以下
の線状又は平均粒子径1mm以下の粉末状に調製したもの
を用いるとともに、該抵抗線への供給電力を調節するこ
とにより生成する超微粒子の粒子径を制御することを特
徴とする超微粒子の製造方法。1. A raw material is brought into contact with a resistance wire under normal pressure, the resistance wire is energized to vaporize the raw material, and then vaporized steam is cooled to produce ultrafine particles. Production of ultrafine particles characterized by controlling the particle size of the ultrafine particles produced by adjusting the power supplied to the resistance wire while using a linear or powdery material having an average particle diameter of 1 mm or less Method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1315052A JPH0763618B2 (en) | 1989-12-04 | 1989-12-04 | Ultrafine particle manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1315052A JPH0763618B2 (en) | 1989-12-04 | 1989-12-04 | Ultrafine particle manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03178332A JPH03178332A (en) | 1991-08-02 |
| JPH0763618B2 true JPH0763618B2 (en) | 1995-07-12 |
Family
ID=18060858
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1315052A Expired - Lifetime JPH0763618B2 (en) | 1989-12-04 | 1989-12-04 | Ultrafine particle manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0763618B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100857596B1 (en) | 2005-08-23 | 2008-09-09 | 삼성전자주식회사 | Nano Particle Generator |
| JP5255311B2 (en) * | 2008-03-31 | 2013-08-07 | 独立行政法人科学技術振興機構 | Method for producing fine particles |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51133172A (en) * | 1975-05-16 | 1976-11-18 | Inoue Japax Res Inc | An exhaust gas treatment process |
| JPS52126666A (en) * | 1976-04-16 | 1977-10-24 | Nichiden Varian Kk | Method of making fine powder |
| JPS59162204A (en) * | 1983-03-04 | 1984-09-13 | Tanaka Kikinzoku Kogyo Kk | Method and device for ultrafine powder |
| JPS60228605A (en) * | 1984-04-27 | 1985-11-13 | Hitachi Ltd | Method for producing ultrafine particles |
-
1989
- 1989-12-04 JP JP1315052A patent/JPH0763618B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03178332A (en) | 1991-08-02 |
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