JPH0764401B2 - Carrier - Google Patents

Description

Description: TECHNICAL FIELD OF THE INVENTION The present invention relates to a conveying device for taking an unprocessed work out of a magazine, processing the work, and then storing the work in the magazine again.

[Technical background of the invention and its problems]

For example, in the manufacture of a semiconductor device, the electrodes on the semiconductor chip after the wafer process are drawn out to form the leads of the package. Therefore, die bonding for fixing the semiconductor chip to the lead frame, and the gap between the electrodes on the chip and the leads of the lead frame are performed. Wire bonding for wiring, resin sealing for forming a package with resin, and the like are performed. Since the lead frame as a work is manufactured as a unit between these steps and between the steps, the transportation of the lead frame is important.

FIG. 4 shows a part of a carrying device for carrying the lead frames in the wire bonding process, in which the lead frames 2 housed in the magazine 1 are pulled out one by one by the feed claws 3, and the guide rails 4 It is mounted on top and is transported by another feed claw 3 ', 3 "and stored in another empty magazine 5 placed at the other end of the guide rail 4. These magazines 1 and 5 are a magazine elevator 6 and It is listed in 7. Magazine elevator 6
And 7 are connected to the sliding shaft 12 by lead screws 10 and 11 driven by the rotation of motors 8 and 9, respectively.
Go up and down along 13, 14, and 15. A wire bonding device 16 is provided at the center of the guide rail 4, and the arm 17 of the wire bonding device 16 moves so that the die-bonded semiconductor chip 18 of the lead frame 2 therebelow is provided.
A wire 19 is laid between the electrode of and the lead of the lead frame 2.

Here, the guide rail 4, the magazine elevators 6, 7, the feed pawl 3, a drive mechanism for the feed pawl (not shown), and the like constitute a conveyance device for the lead frame 2.

By the way, according to such a carrier, the carrier path of the lead frame 2 is a straight line, and the elevators 6 and 7 are provided at both ends thereof. For this reason, not only the total length becomes long and the size of the apparatus is increased, but also two elevators 6 and 7 having a complicated structure and expensive are required, resulting in high cost. Further, it is necessary to manually set the magazine 1 in which the unprocessed lead frame 2 is stored in one elevator 6 and the empty magazine 5 in the other elevator 7. Therefore, one magazine
Since the work must be interrupted and the magazines 1 and 5 above must be replaced with new ones each time the work of 1,5 minutes is completed,
It was also said that workability was poor.

[Object of the Invention]

SUMMARY OF THE INVENTION It is an object of the present invention to provide a transporting device that can be downsized and its structure can be simplified and that does not have to interrupt the work for each magazine.

[Outline of Invention]

This invention is a lower conveyor that carries a magazine containing unprocessed workpieces and conveys this magazine to the take-out position, and an upper portion that is arranged above this lower conveyor and carries out a magazine containing the workpieces that have been processed. Conveyor, comprising an elevator arranged opposite one end side of the lower conveyor and the upper conveyor, in this elevator, the transfer mechanism and the lower part to take the magazine from the lower conveyor and transfer it to the upper conveyor A positioning mechanism is provided for positioning the magazine taken out from the conveyor at a position where the work is taken out from the magazine and a position where the processed work is stored.

Example of Invention

An embodiment of the present invention will be described below with reference to FIGS. The transport device shown in FIG. 2 has a main body 21. A first wall 22 is erected on one end side of the upper surface of the main body 21 in parallel with the one end surface of the main body 21. As shown in FIG. 1, a lower conveyor 23 is horizontally provided in the lower portion of the outer surface of the first wall body 22, and an upper conveyor 24 is horizontally provided above the lower conveyor 23. Each conveyor
Each of the endless belts 23, 24 has a pair of endless belts 25 that are parallel to and separated from each other in the horizontal direction. The endless belts 25 are stretched between a driven pulley 26 and a drive pulley 27. The driven pulley 26 and the drive pulley 27 are rotatably provided on a support shaft 28 having one end attached to the first wall 22. The drive pulley 27 of the lower conveyor 23 is driven to rotate by the first motor 31 via the drive belt 29.
The drive pulley 27 of the upper conveyor 24 is also rotatably driven by the second motor 33 via the drive belt 32. The motors 31 and 33 are attached and fixed to the first wall body 22. In addition, a receiving plate 34 is provided at a position between the pair of endless belts 25 of each of the conveyors 23, 24 except for one end on the driven pulley 26 side. These receiving plates 34 are for each conveyor 2
The endless belt 25 is prevented from being largely deflected by the load of the magazine 35 placed on 3, 24.

In the lower conveyor 23, a plurality of magazines in which unworked works, for example, lead frames 36 which are not wire-bonded are stored in multiple stages in the vertical direction at predetermined intervals
35 are placed. The magazine 35 located at the foremost end of the lower conveyor 23 in the traveling direction shown by the arrow in FIG. 1 is placed in a standby position at the position where it abuts the first stopper 37 provided on the first wall 22. Has become. Above upper conveyor
As will be described later, a magazine 35a containing a wire-bonded lead frame 36 is placed on the 24 and is carried out. The magazine 35a located at the forefront in the traveling direction of the upper conveyor 24 shown by the arrow in FIG.
The second stopper 38 extended from the above is abutted and positioned.

An elevator 41 is arranged at a position facing one end sides of the lower conveyor 23 and the upper conveyor 24. The elevator 41 has the first wall body on one widthwise end side of the main body 21.
A second wall body 42 is provided upright in a state orthogonal to 22. A guide groove 43 is formed on the inner surface of the second wall body 42 over the entire length in the height direction, and one vertical side of an elevator body 44 is slidably supported in the guide groove 43. As shown in FIG. 2, a nut body 45 is fixed to one end of the elevator main body 44 in the width direction, and a feed screw 46 is screwed to the nut body 45. The upper and lower ends of the feed screw 46 are a pair of support pieces 47 projecting from one side surface of the second wall body 42.
It is rotatably supported by. A driven pulley 48 is fitted on the lower end of the feed screw 46. This driven pulley 48
And the drive pulley 51 that is rotationally driven by the third motor 49 that is arranged near the second wall 42.
Is stretched. Therefore, the feed screw 46 is the third
When it is rotationally driven by the motor 49, the elevator main body 44 is vertically driven along the guide groove 43 via the nut body 45.

Also, on the upper surface of the other side of the elevator body 44,
A first slider 53 is provided which is slidable in the same direction as the traveling directions of the conveyors 23, 24. An L-shaped first connector 54 is attached to the front end portion of the side surface of the first slider 53. The connecting body 54 includes the elevator body
Rod 56 of the first air cylinder 55 provided on the side surface of 44
Are connected. Therefore, when the first air cylinder 55 is actuated and the rod 56 is biased in the projecting direction, the first slider 53 slides in the direction projecting from the horizontal side of the elevator body 44. There is.

A second slider 57 is provided on the upper surface of the first slider 53 so as to be slidable in the same direction as the first slider 53. The length dimension of the second slider 57 is formed to be about half the length dimension of the first slider 53. A second connecting member 58 is fixed to the front end of the side surface of the second slider 57. The rod 61 of the second air cylinder 59 provided on the side surface of the first slider 53 is coupled to the second coupling tool 58. When the rod 61 of the second air cylinder 59 is biased in the projecting direction, the second slider 57 is located on the front end side of the first slider 53, and the rod 61 is biased in the retracting direction. The second slider
57 is located on the rear end side of the first slider 53.

On the other hand, on the upper surface of the main body 21, a conveying path indicated by an arrow in FIG.
62 are formed. The carrying-in portion, which is one end of the carrying path 62, is provided to the second slider 57 when the second slider 57 is at the forward position on the first slider 53 as shown in FIG.
The carry-out section, which is the other end, faces the first slider 53.
It is formed so as to face the second slider 57 in the retracted position above. As will be described later, the lead frame 36 taken out from the magazine 35 transferred onto the second slider 57 is supplied to the transport path 62 from the lower conveyer 23.
In order to take out the lead frame 36 from the magazine 35, a means such as a feed claw method shown in FIG. 4 may be used. Further, the lead frame 36 placed on the transport path 62 may be transported by another feed claw, or a transport means such as a roller may be used, and the point is not limited at all. A wire bonding device is provided in the middle of the transport path 62.
63 is arranged and the wire moves to the lead frame 36 which is positioned and conveyed below the arm 64 by its movement.
65 is to be wired.

Next, the operation of the transfer device having the above structure will be described with reference to FIG.
I will explain based on (11). FIG. 3 (1) shows a state in which a plurality of magazines 35 accommodating lead frames 36 that are not wire-bonded are placed on the lower conveyor 23. The most advanced magazine 35 has a first stopper 37.
Is abutted against and positioned. At this time, the upper surface of the second slider 57 of the elevator main body 44 has the magazine 35
Is positioned slightly below the lower surface of the. Further, the second slider 57 is the first slider 53.
It is positioned on the front end side of. When the operation is started in such a state, first, as shown in FIG. 3B, the first slider 53 is driven in the forward direction by the first air cylinder 55, and the front end of the first slider 53 is moved. The second slider 57 located on the side is the most advanced magazine on the lower conveyor 23.
Penetrate below 35. Then, as shown in FIG. 3 (3), the elevator body 44 is driven in the ascending direction so that the magazine 35 is transferred onto the second slider 57 and engaged with the first stopper 37. Can be lifted to a height at which it comes off.

Next, the first air cylinder 55 is driven in the opposite direction to the above, and the first slider 53 is driven in the backward direction as shown in FIG. The magazine 35 transferred to is positioned so as to face the carry-in portion of the transport path 62. After that, as shown in FIG. 3 (5), the elevator main body 44 is driven upward, and the uppermost lead frame 36 housed in the magazine 35 is positioned so as to be at the same height as the transport path 62. Then, the lead frame 36 at the uppermost stage is taken out by a feed claw or the like (not shown), transferred onto the conveyance path 62, and conveyed. The lead frame 36 is positioned at a position of the wire bonding device 63, and is then transported again to the unloading portion of the transport path 62. During this time, the elevator main body 44 is
As shown in FIG. 5 (5), the lead frames 36 held in the magazine 35 are elevated and driven at a pitch P corresponding to the interval, and the lead frames 36 from the magazine 35 are conveyed one by one in the conveying path 63.
Will be supplied to.

On the other hand, when the wire bonding is performed by the wire bonding device 63 and the lead frame 36 reaches the carry-out portion of the carrying path 62, the second air cylinder 59 is actuated and the second air cylinder 59 is operated, as shown in FIG. Slider 57 is the first slider
Driven to the rear end side on 53, the magazine 35 is positioned so as to face the carry-out portion of the transport path 62. Then, the elevator body 44 is driven and the lead frame of the magazine 35 is driven.
The uppermost part from which 36 is taken out is positioned so as to be at the same height as the above-mentioned transport path 62. Then, the lead frame 36 is taken into the uppermost part of the magazine 35 by an appropriate means (for example, a feed claw). In this way, the lead frame 36 is taken out from the magazine 35 and the lead frame 36 after wire bonding is taken in in a predetermined cycle, and the last lead frame 36 in one magazine 35 is taken in as shown in FIG. The process ends in the state shown in (7).

Next, as shown in FIG. 3 (8), the elevator main body 44 is driven in the upward direction, the upper surface of the second slider 57 is positioned slightly higher than the upper conveyor 24, and the second slider 57 is moved. 57 is driven to the front end side of the first slider 53. After that, as shown in Fig. 3 (9), the first
After the slider 53 of the first slider 53 is driven in the forward direction and the front end side of the first slider 53 enters the one end side of the upper conveyor 24, the elevator main body 44 is lowered as shown in FIG. Magazine 35 on the second slider 57,
That is, the lead frame 36 after wire bonding is completed.
A magazine 35 containing the is placed. Next, as shown in FIG. 3 (11), the first slider 53 is driven in the backward direction, and the upper conveyor 24 is driven to convey the magazine 35 placed thereon in the direction indicated by the arrow. This completes the wire bonding work for one magazine 35 minutes. Then, a new work is started again from the state shown in FIG. 3 (1).

That is, according to the transfer device having the above structure, the lower conveyor 23, the upper conveyor 24 and the elevator 41 are arranged on one end side of the transfer path 62, and after wire bonding to the lead frame 35 taken out from one magazine 35, The lead frame 35 after wire bonding can be stored in the same magazine 35. Therefore, the overall length of the device can be shortened and downsized, and since only one elevator 41 is required, the structure can be simplified. Also,
Since the wire bonding can be continuously performed on the lead frames 35 stored in the plurality of magazines 35 placed on the lower conveyor 23, the work efficiency is improved.
In addition, the lead frame 35 with wire bonding
There is no need to prepare an empty magazine 35 to store the.

The carrying device according to the present invention is not limited to a device for wire bonding to a lead frame, and it is necessary to take out a work stored in a magazine from this magazine, perform various processes, and then store it again in the magazine. Of course, it can be applied to a certain process.

〔The invention's effect〕

As described above, according to the present invention, the lower conveyor, the upper conveyor and the elevator are arranged on one end side of the conveying path, the work taken out from one magazine is subjected to predetermined processing, and then the work is stored in the same magazine. I made it possible. In other words, it is only necessary to place a pair of conveyors and an elevator on one end side of the transport path, so it is possible to reduce the size of the device by shortening the overall length of the device, and it is also one elevator that is expensive and has a complicated structure. Therefore, the structure can be simplified and the cost can be reduced. Further, since it is possible to place a plurality of magazines on the lower conveyor and continuously process all the works stored in the plurality of magazines, one continuous operation is equivalent to one magazine. The work efficiency can be improved as compared with the conventional method, which can only perform the above work. Further, since it is not necessary to prepare an empty magazine for storing the processed work, this also has an advantage that workability can be improved.

[Brief description of drawings]

FIG. 1 is a side view showing the arrangement of a pair of conveyors and an elevator showing an embodiment of the present invention, FIG. 2 is a perspective view of the same schematic overall structure, and FIGS. 3 (1) to (11) are Similarly, an explanatory view showing the operation in sequence, and FIG. 4 is a perspective view of a conventional conveying device. 23 ... lower conveyor, 24 ... upper conveyor, 35 ... magazine,
36 ... Lead frame (work), 41 ... Elevator, 44 ...
Elevator body (transfer mechanism), 53 ... First slider (transfer mechanism), 57 ... Second slider (positioning mechanism).

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification number Reference number in the agency FI Technical indication location H01L 21/68 A (72) Inventor Norihiro Iketani No. 8 Shinsugita-cho, Isogo-ku, Yokohama-shi, Kanagawa Stock expression (72) Inventor, Koichiro Atsumi, Incorporated Toshiba Industrial Technology Research Institute Co., Ltd. (8) Shinsugita-cho, Isogo-ku, Yokohama-shi, Kanagawa Stock Production Technology Research Laboratories, Toshiba Corporation (56) Reference JP-A-60-153306 (JP, A)

Claims (1)

[Claims] 1. A lower conveyor for mounting a magazine containing unprocessed workpieces and conveying the magazine to a take-out position, and one end which is above the lower conveyor and which is on the carry-in side of the conveying side end of the lower conveyor. The upper conveyor that carries out the magazines in which the workpieces that have been processed and have been arranged in line with each other are carried out, and the magazines that are arranged with respect to the transport-side end portions of these lower conveyors and one end portion that serves as the carry-in side of the upper conveyor. A transfer mechanism for taking out from the lower conveyor and transferring to the upper conveyor, and a positioning mechanism for positioning the magazine taken out from the lower conveyor at a position where the work is taken out from this magazine and a position where the processed work is stored. An elevator having the same.