JPH0764535B2 - Method for removing radioactive elements from metallic silicon - Google Patents
Method for removing radioactive elements from metallic siliconInfo
- Publication number
- JPH0764535B2 JPH0764535B2 JP17866590A JP17866590A JPH0764535B2 JP H0764535 B2 JPH0764535 B2 JP H0764535B2 JP 17866590 A JP17866590 A JP 17866590A JP 17866590 A JP17866590 A JP 17866590A JP H0764535 B2 JPH0764535 B2 JP H0764535B2
- Authority
- JP
- Japan
- Prior art keywords
- metallic silicon
- aqueous solution
- mineral acid
- radioactive elements
- uranium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Silicon Compounds (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、金属珪素から直接に二酸化珪素(シリカ)を
合成する際の原料として好適な安価で高純度の金属珪素
を得ることができる金属珪素から放射性元素を除去する
方法に関する。TECHNICAL FIELD OF THE INVENTION The present invention relates to a metal silicon which is suitable as a raw material for directly synthesizing silicon dioxide (silica) from metal silicon and which can obtain inexpensive and highly pure metal silicon. The present invention relates to a method for removing radioactive elements.
従来の技術及び発明が解決しようとする課題 近年、ICやLSIの封止材としてエポキシ樹脂に二酸化珪
素(シリカ)粉末を多量に充填したエポキシ樹脂組成物
が利用されている。2. Description of the Related Art In recent years, an epoxy resin composition in which a large amount of silicon dioxide (silica) powder is filled in an epoxy resin is used as an IC or LSI sealing material.
しかしながら、シリカ粉末によってはウランやトリウム
などの放射性元素が多量に含まれていることがあり、こ
のため、この種のシリカ粉末を用いて製造したエポキシ
樹脂組成物で高集積化されたICやLSIを封止すると、ア
ルファー線によりメモリーが誤動作するという不具合が
ある。そこで、従来、このような放射性元素を含まない
シリカを製造するため、例えば特開昭60−81011号公報
などには、天然高純度石英を原料として高純度溶融シリ
カを製造する方法、特開昭61−190556号公報等には、高
純度珪素化合物を原料としてゾルーゲル法、又は、加水
分解・熱酸化により高純度シリカを製造する方法、特開
昭58−168267号公報には、天然高純度シリカを化学処理
により高純度化する方法、更に特開昭60−42217号公報
には、水ガラスを原料としてこの原料をイオン交換樹脂
で処理し、その後ゲル化させて焼成することにより高純
度シリカを製造する方法が提案されている。However, some silica powders may contain a large amount of radioactive elements such as uranium and thorium. Therefore, IC and LSI highly integrated with epoxy resin compositions manufactured using this type of silica powder There is a problem that the memory malfunctions due to alpha rays when the is sealed. Therefore, conventionally, in order to produce such a silica containing no radioactive element, for example, JP-A-60-81011 discloses a method for producing high-purity fused silica using natural high-purity quartz as a raw material. No. 61-190556 discloses a sol-gel method using a high-purity silicon compound as a raw material, or a method for producing high-purity silica by hydrolysis / thermal oxidation, and JP-A-58-168267 discloses natural high-purity silica. A method for highly purifying silica by chemical treatment, and further, JP-A-60-42217 discloses that high-purity silica is obtained by treating water glass as a raw material with an ion exchange resin, and then gelling and baking the raw material. A method of manufacturing has been proposed.
しかし、このような方法においてもシリカ粉末中のウラ
ン等の放射性元素の含有量を減らすには原料として高価
な高純度の金属珪素を用いなければならず、それ故、従
来市販されている高純度シリカ粉末は非常に高価なもの
で汎用性が低いものであった。従って、安価な高純度の
金属珪素の供給が望まれていた。However, even in such a method, expensive high-purity metallic silicon must be used as a raw material in order to reduce the content of radioactive elements such as uranium in the silica powder. Silica powder was very expensive and had low versatility. Therefore, it has been desired to supply inexpensive high-purity metallic silicon.
本発明は、上記事情に鑑みてなされたもので、金属珪素
から直接にシリカを合成する際の原料として好適な高純
度の金属珪素を安価に得ることができる、金属珪素から
放射性元素を除去する方法を提供することを目的とす
る。The present invention has been made in view of the above circumstances, and it is possible to inexpensively obtain high-purity metallic silicon suitable as a raw material for directly synthesizing silica from metallic silicon. A radioactive element is removed from metallic silicon. The purpose is to provide a method.
課題を解決するための手段及び作用 本発明者は上記目的を達成するため鋭意検討を重ねた結
果、金属珪素粉末、特に200ミクロン以下の粒度に粉砕
した金属珪素粉末を鉱酸水溶液、好ましくは0.1規定以
上の鉱酸水溶液にアルコール性水酸基を有する化合物を
併用したもので洗浄することにより、金属珪素粉末中の
放射性元素を簡単に除去し得、ウラン及びトリウムの含
有量が1ppb以下の高純度の金属珪素を安価に得ることが
でき、この高純度金属珪素は金属珪素から直接シリカを
合成する際の原料として好適であることを知見し、本発
明をなすに至った。Means and Actions for Solving the Problems As a result of extensive studies conducted by the present inventor to achieve the above object, a metal silicon powder, particularly a metal silicon powder pulverized to a particle size of 200 microns or less, an aqueous solution of a mineral acid, preferably 0.1 By washing with a combined use of a compound having an alcoholic hydroxyl group in an aqueous solution of a mineral acid of a prescribed amount or more, radioactive elements in the metal silicon powder can be easily removed, and the content of uranium and thorium is 1 ppb or less of high purity. It was found that metallic silicon can be obtained at a low cost, and that this high-purity metallic silicon is suitable as a raw material for directly synthesizing silica from metallic silicon, and has completed the present invention.
従って、本発明は、金属珪素粉末を鉱酸水溶液で洗浄し
て、金属珪素粉末中のウラン及びトリウムの含有量をそ
れぞれppb以下とすることを特徴とする金属珪素から放
射性元素を除去する方法、及び、金属珪素粉末を鉱酸水
溶液で洗浄する際、0.1規定以上の鉱酸水溶液を用いる
と共に、アルコール性水酸基を有する化合物を併用する
前記の方法を提供する。Therefore, the present invention is a method of removing radioactive elements from metallic silicon, characterized in that the metallic silicon powder is washed with an aqueous solution of mineral acid, and the contents of uranium and thorium in the metallic silicon powder are each ppb or less. Further, when the metallic silicon powder is washed with an aqueous solution of a mineral acid, the above method is used, in which an aqueous solution of a mineral acid of 0.1 N or more is used and a compound having an alcoholic hydroxyl group is used in combination.
以下、本発明につき更に詳述する。Hereinafter, the present invention will be described in more detail.
本発明の方法で使用する金属珪素は、珪素含有量が99.5
%以上のものであれば如何なるものでもよく、例えばブ
ラジル、ノルウェー、中国などで製造されているものが
利用できる。The metallic silicon used in the method of the present invention has a silicon content of 99.5
Any material may be used as long as it is at least%. For example, those manufactured in Brazil, Norway, China, etc. can be used.
更に、金属珪素粉末は、鉱酸水溶液による洗浄効果を高
めるために予めボールミル、衝撃式粉砕機などで粉砕
し、粒度が200ミクロン以下で平均粒径が5〜50ミクロ
ン、特に粒度が150ミクロン以下で平均粒径が10〜30ミ
クロンの粉末にすることが好ましい。Further, the metallic silicon powder is previously pulverized by a ball mill, an impact pulverizer or the like in order to enhance the cleaning effect by the mineral acid aqueous solution, and has a particle size of 200 microns or less and an average particle size of 5 to 50 microns, especially a particle size of 150 microns or less. It is preferable to use a powder having an average particle size of 10 to 30 microns.
また、鉱酸水溶液としては、例えば硫酸,塩酸,硝酸等
の水溶液が好適に用いられ、これら鉱酸の混合水溶液で
もよい。なお、これらの鉱酸水溶液のうちでは硝酸水溶
液が望ましい。これは、硝酸は金属珪素中に残存しても
次の酸化工程で高温に晒されるため、酸化されて揮発す
るからである。As the aqueous solution of mineral acid, for example, an aqueous solution of sulfuric acid, hydrochloric acid, nitric acid or the like is preferably used, and a mixed aqueous solution of these mineral acids may be used. Of these mineral acid aqueous solutions, nitric acid aqueous solutions are preferable. This is because even if nitric acid remains in metallic silicon, it is exposed to high temperatures in the next oxidation step, and is oxidized and volatilized.
更に、鉱酸水溶液の酸濃度は0.1規定以上5規定以下が
望ましく、0.1規定に満たないとウラン等の放射性元素
を除去できない場合があり、5規定を越えると金属珪素
と酸が反応してシリカ粉末の収率が低下する場合があ
る。Furthermore, the acid concentration of the mineral acid aqueous solution is preferably 0.1 normal or more and 5 normal or less, and if it is less than 0.1 normal, radioactive elements such as uranium may not be removed. The powder yield may decrease.
この場合、金属珪素粉末の鉱酸水溶液による洗浄は、室
温で金属珪素粉末と鉱酸の水溶液を混合させて反応除去
しても良いが、低濃度の鉱酸で効率よく放射性元素を除
去するには50℃以上で混合攪拌させて反応させた方がよ
い。また、反応時間は温度や金属珪素粉末の濃度にもよ
るが、1時間から20時間で金属珪素粉末中の放射性元素
を1ppb以下にすることができる。In this case, the washing of the metallic silicon powder with the aqueous solution of mineral acid may be carried out by mixing the metallic silicon powder and the aqueous solution of the mineral acid at room temperature for reaction removal, but in order to remove radioactive elements efficiently with a low concentration of mineral acid. It is better to mix and stir at 50 ° C or higher to react. Although the reaction time depends on the temperature and the concentration of the metal silicon powder, the radioactive element in the metal silicon powder can be reduced to 1 ppb or less in 1 to 20 hours.
またこの場合、金属珪素中のウラン等の放射性元素は金
属珪素の流界に多量に存在するため、ウラン等の放射性
元素を効率良く金属珪素から除くには鉱酸水溶液を粒界
の中まで浸透させることが好ましい。このため、本発明
では、金属珪素を鉱酸水溶液で洗浄する際、アルコール
性水酸液基を有する化合物を添加することが好適であ
る。In this case, radioactive elements such as uranium in metallic silicon are present in a large amount in the flow field of metallic silicon. Therefore, in order to efficiently remove radioactive elements such as uranium from metallic silicon, the aqueous solution of mineral acid penetrates into the grain boundaries. Preferably. Therefore, in the present invention, when the metallic silicon is washed with the aqueous solution of mineral acid, it is preferable to add a compound having an alcoholic hydroxide group.
ここで、アルコール性水酸基を有する化合物としては、
例えばエチレングリコール、ジエチレングリコール、ト
リエチレングリコール、テトラエチレングリコール、プ
ロピレングリコール、ジプロピレングリコール、トリプ
ロピレングリコール等のグリコール化合物、これらグリ
コール化合物のモノメチルエーテル、モノエチルエーテ
ル等のモノアルキルエーテル化合物、これらグリコール
化合物のジアルキルエーテル化合物(いわゆるグライム
類)などのエーテル型界面活性剤のようなアルカリ金属
を含まない有機系のもの、メタノール、エタノール、イ
ソプロピルアルコール、n−プロピルアルコール、ブタ
ノール、エリスリトール、グリセリンなどの水に可溶な
低級アルコールや多価アルコール等が好適である。Here, as the compound having an alcoholic hydroxyl group,
For example, glycol compounds such as ethylene glycol, diethylene glycol, triethylene glycol, tetraethylene glycol, propylene glycol, dipropylene glycol and tripropylene glycol, monomethyl ethers of these glycol compounds, monoalkyl ether compounds such as monoethyl ether, and these glycol compounds. It can be used for organic compounds that do not contain alkali metals such as ether type surfactants such as dialkyl ether compounds (so-called glymes), and water such as methanol, ethanol, isopropyl alcohol, n-propyl alcohol, butanol, erythritol and glycerin. Soluble lower alcohols and polyhydric alcohols are preferred.
更に、アルコール性水酸基を有する化合物の添加量は、
鉱酸水溶液1に対して0.01以上1以下(重量比)、特に
0.05以上0.5以下とすることが好ましく、0.01未満では
放射性元素を十分に除去できない場合があり、1を越え
るとコスト面で不利となる他に、鉱酸濃度を高くしない
と希釈されてしまい、充分な放射性元素の除去効果が達
成されない場合がある。一般に、アルコール性水酸基を
有する化合物を添加することによって鉱酸濃度が低くな
るため、この鉱酸水溶液としては、あらかじめ酸濃度の
高いものを使用することが好ましい。Furthermore, the addition amount of the compound having an alcoholic hydroxyl group is
0.01 or more and 1 or less (weight ratio) relative to 1 aqueous mineral acid solution, especially
It is preferable to set it to 0.05 or more and 0.5 or less, and if it is less than 0.01, radioactive elements may not be sufficiently removed, and if it exceeds 1, it will be disadvantageous in terms of cost, and if the concentration of mineral acid is not increased, it will be diluted. In some cases, the effect of removing a large amount of radioactive elements may not be achieved. In general, the mineral acid concentration is lowered by adding a compound having an alcoholic hydroxyl group. Therefore, it is preferable to use an aqueous solution of mineral acid having a high acid concentration in advance.
なお、金属珪素をメタノール等のアルコール類で良く濡
らした後、鉱酸水溶液で処理してもよい。The metallic silicon may be sufficiently wet with an alcohol such as methanol and then treated with an aqueous solution of mineral acid.
金属珪素粉末を鉱酸水溶液で処理した後は、遠心分離機
やろ過により鉱酸水溶液を除去し、次いでイオン交換
水、純水を用いて洗浄液のpHが6以上になるまで繰り返
し洗浄し、更に、金属珪素粉末を乾燥機やスプレードラ
イヤー等の乾燥装置で乾燥する。これにより、ウラン及
びトリウムの含有量が1ppb以下の高純度金属珪素粉末を
得ることができる。After treating the metallic silicon powder with the mineral acid aqueous solution, the mineral acid aqueous solution is removed by a centrifuge or filtration, and then repeatedly washed with ion-exchanged water and pure water until the pH of the washing solution becomes 6 or more. The metal silicon powder is dried with a dryer such as a dryer or a spray dryer. As a result, a high-purity metallic silicon powder having a uranium and thorium content of 1 ppb or less can be obtained.
発明の効果 本発明の方法によれば、金属珪素から放射性元素を簡単
に除去し得、ウラン及びトリウムの含有量が1ppb以下の
高純度の金属珪素を安価に得ることができる。Effects of the Invention According to the method of the present invention, radioactive elements can be easily removed from metallic silicon, and highly pure metallic silicon having a uranium and thorium content of 1 ppb or less can be obtained at low cost.
従って、本発明方法で得られる高純度金属珪素を用いる
と、ウラン及びトリウムの含有量が0.5ppb以下の高純度
シリカを安価に製造することが可能であり、また、この
高純度シリカはエポキシ樹脂組成物等の充填剤として用
いることができ、このような組成物は高集積ICの封止材
として好適である。Therefore, by using the high-purity metallic silicon obtained by the method of the present invention, it is possible to inexpensively produce high-purity silica having a uranium and thorium content of 0.5 ppb or less, and the high-purity silica is an epoxy resin. It can be used as a filler for a composition or the like, and such a composition is suitable as a sealing material for highly integrated ICs.
以下、実施例及び比較例を挙げて本発明を具体的に説明
するが、本発明は下記実施例に制限されるものではな
い。Hereinafter, the present invention will be specifically described with reference to Examples and Comparative Examples, but the present invention is not limited to the following Examples.
〔実施例1〕 最大粒径150ミクロン、平均粒径35ミクロンに粉砕した
金属珪素(珪素含有量99.65%、ウラン含有量10ppb、ト
リウム含有量4.9ppb、鉄含有量0.15%、カルシウム含有
量0.02%、アルミニウム含有量0.2%)100gに1Nの硝酸
水溶液500ml、メタノール100mlを加え、60℃で1時間攪
拌した。反応終了後、遠心分離機を用い水溶液を除去し
たのち、純水で洗浄した。洗浄後、乾燥することにより
高純度金属珪素を得た。この金属珪素中のウラン及びト
リウム含有量を測定した結果、ウラン含有量は0.4ppb,
トリウム含有量は0.3ppbであった。Example 1 Metallic silicon crushed to a maximum particle size of 150 microns and an average particle size of 35 microns (silicon content 99.65%, uranium content 10 ppb, thorium content 4.9 ppb, iron content 0.15%, calcium content 0.02% , Aluminum content 0.2%), 1N aqueous nitric acid solution (500 ml) and methanol (100 ml) were added, and the mixture was stirred at 60 ° C. for 1 hour. After the reaction was completed, the aqueous solution was removed using a centrifuge and then washed with pure water. High-purity metallic silicon was obtained by drying after washing. As a result of measuring the uranium and thorium contents in this metallic silicon, the uranium content was 0.4 ppb,
The thorium content was 0.3 ppb.
〔実施例2〜5、比較例〕 実施例1で使用した金属珪素100gを用い、表1に示す反
応条件で反応させて金属珪素の高純度化を行なった。結
果を表1に併記する。[Examples 2 to 5, Comparative Example] Using 100 g of the metal silicon used in Example 1, the reaction was carried out under the reaction conditions shown in Table 1 to highly purify the metal silicon. The results are also shown in Table 1.
表1の結果より、本発明の方法によれば、金属珪素から
ウラン及びトリウムを効率良く除去できることが確認さ
れた。 From the results of Table 1, it was confirmed that the method of the present invention can efficiently remove uranium and thorium from metallic silicon.
Claims (2)
属珪素粉末中のウラン及びトリウムの含有量をそれぞれ
1ppb以下とすることを特徴とする金属珪素から放射性元
素を除去する方法。1. The metallic silicon powder is washed with a mineral acid aqueous solution to adjust the contents of uranium and thorium in the metallic silicon powder.
A method for removing radioactive elements from metallic silicon, characterized in that the content is 1 ppb or less.
0.1規定以上の鉱酸水溶液を用いると共に、アルコール
性水酸基を有する化合物を併用する請求項1記載の金属
珪素から放射性元素を除去する方法。2. When the metallic silicon powder is washed with an aqueous solution of mineral acid,
The method for removing a radioactive element from metallic silicon according to claim 1, wherein a mineral acid aqueous solution having a normality of 0.1 N or more is used together with a compound having an alcoholic hydroxyl group.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17866590A JPH0764535B2 (en) | 1990-07-06 | 1990-07-06 | Method for removing radioactive elements from metallic silicon |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17866590A JPH0764535B2 (en) | 1990-07-06 | 1990-07-06 | Method for removing radioactive elements from metallic silicon |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0465311A JPH0465311A (en) | 1992-03-02 |
| JPH0764535B2 true JPH0764535B2 (en) | 1995-07-12 |
Family
ID=16052430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17866590A Expired - Lifetime JPH0764535B2 (en) | 1990-07-06 | 1990-07-06 | Method for removing radioactive elements from metallic silicon |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0764535B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100620215B1 (en) * | 2004-07-29 | 2006-09-08 | 한국원자력연구소 | Silica-based Standards for Swipe Sample Analysis |
| JP4958404B2 (en) * | 2005-03-17 | 2012-06-20 | 株式会社アドマテックス | Spherical silica particles, resin composition, and semiconductor liquid sealing material |
| DE102007031471A1 (en) * | 2007-07-05 | 2009-01-08 | Schott Solar Gmbh | Process for the preparation of silicon material |
| CN101823716A (en) * | 2010-03-09 | 2010-09-08 | 江西赛维Ldk太阳能高科技有限公司 | Method for separating silica powder and impurities in mixture |
| CN115947361A (en) * | 2022-11-21 | 2023-04-11 | 江苏联瑞新材料股份有限公司 | A kind of low radioactive alumina powder and preparation method thereof |
-
1990
- 1990-07-06 JP JP17866590A patent/JPH0764535B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0465311A (en) | 1992-03-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS645679B2 (en) | ||
| JPH05338B2 (en) | ||
| JP3507527B2 (en) | Method for producing carbide and nitride | |
| JP3182434B2 (en) | Cerium-mixed quartz glass object and method for producing the same | |
| CN114678154B (en) | A low temperature solidification method for silica gel containing radioactive iodine waste | |
| JPH0796447B2 (en) | Method for producing high-purity silica | |
| US3922331A (en) | Preparation of microporous rare-earth oxyhalides | |
| JPH0764535B2 (en) | Method for removing radioactive elements from metallic silicon | |
| JPS62502257A (en) | Stabilized silica gel and method for producing the same | |
| JP2542797B2 (en) | Method for producing high-purity silica | |
| JPS5954632A (en) | Preparation of quartz glass powder | |
| US4816299A (en) | Encapsulating compositions containing ultra-pure, fused-silica fillers | |
| JP2015531432A (en) | Low temperature dispersion synthesis of silver and silver products produced thereby | |
| JPH03193624A (en) | Method for production of stable and pure powder of boron nitride and product obtained thereby | |
| JP4517512B2 (en) | Method for producing high purity silica | |
| CN109761518A (en) | A kind of complex cement chromium removal grinding aid and preparation method thereof | |
| JPH06279589A (en) | Method for producing spherical silicone fine particles | |
| US4774068A (en) | Method for production of mullite of high purity | |
| US4693878A (en) | Process for the production of soluble alkali silicates | |
| CN115259174B (en) | A boron arsenide nanocrystal prepared by oxide, its preparation method and application | |
| JPS63274603A (en) | Method for elevating purity of hexagonal boron nitride to high level | |
| JPH0516372B2 (en) | ||
| JPH09268008A (en) | Purification of silica powder | |
| JPH05339B2 (en) | ||
| JPH0761856B2 (en) | Method for producing silicon dioxide powder |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080712 Year of fee payment: 13 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080712 Year of fee payment: 13 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090712 Year of fee payment: 14 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090712 Year of fee payment: 14 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100712 Year of fee payment: 15 |
|
| EXPY | Cancellation because of completion of term |