JPH0765145B2 - High saturation magnetic flux density Fe-based soft magnetic alloy and high saturation magnetic flux density Fe-based soft magnetic alloy ribbon - Google Patents
High saturation magnetic flux density Fe-based soft magnetic alloy and high saturation magnetic flux density Fe-based soft magnetic alloy ribbonInfo
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- JPH0765145B2 JPH0765145B2 JP2230135A JP23013590A JPH0765145B2 JP H0765145 B2 JPH0765145 B2 JP H0765145B2 JP 2230135 A JP2230135 A JP 2230135A JP 23013590 A JP23013590 A JP 23013590A JP H0765145 B2 JPH0765145 B2 JP H0765145B2
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Description
【発明の詳細な説明】 「産業上の利用分野」 本発明は、磁気ヘッド、トランス、チョークコイル等に
用いられる軟磁性合金に関するものであり、特に、高飽
和磁束密度で軟磁気特性に優れたFe系軟磁性合金に関す
る。TECHNICAL FIELD The present invention relates to a soft magnetic alloy used for magnetic heads, transformers, choke coils, and the like, and in particular, it has a high saturation magnetic flux density and excellent soft magnetic characteristics. Fe-based soft magnetic alloy.
「従来の技術」 磁気ヘッド、トランス、チョークコイル等に用いられる
軟磁性合金において一般的に要求される諸特性は以下の
通りである 飽和磁束密度が高いこと。"Prior Art" The characteristics generally required for soft magnetic alloys used in magnetic heads, transformers, choke coils, etc. are as follows: High saturation magnetic flux density.
透磁率が高いこと。High magnetic permeability.
低保磁力であること。Must have low coercive force.
薄い形状が得やすいこと。It is easy to obtain a thin shape.
また、磁気ヘッドに対しては、前記〜に記載の特性
の他に耐摩耗性の観点から以下の特性が要求される。Further, the magnetic head is required to have the following characteristics from the viewpoint of wear resistance in addition to the characteristics described above.
硬度が高いこと。High hardness.
従って軟磁性合金あるいは磁気ヘッドを製造する場合、
これらの観点から種々の合金系において材料研究がなさ
れている。Therefore, when manufacturing a soft magnetic alloy or magnetic head,
From these viewpoints, material research has been conducted in various alloy systems.
従来、前述の用途に対しては、センダスト、パーマロ
イ、けい素鋼等の結晶質合金が用いられ、最近ではFe基
およびCo基の非晶質合金も使用されるようになってきて
いる。Conventionally, crystalline alloys such as sendust, permalloy, and silicon steel have been used for the above-mentioned applications, and recently Fe-based and Co-based amorphous alloys have also been used.
「発明が解決しようとする課題」 しかるに磁気ヘッドの場合、高記録密度化に伴う磁気記
録媒体の高保磁力化に対応するため、より好適な高性能
磁気ヘッド用の磁性材料が望まれている。またトラン
ス、チョークコイルの場合は、電子機器の小型化に伴
い、より一層の小型化が必要であるため、より高性能の
磁性材料が望まれている。[Problems to be Solved by the Invention] However, in the case of a magnetic head, a more suitable magnetic material for a high-performance magnetic head is desired in order to cope with a high coercive force of a magnetic recording medium accompanying a high recording density. Further, in the case of transformers and choke coils, further miniaturization is required as electronic devices are miniaturized. Therefore, magnetic materials having higher performance are desired.
ところが、前記のセンダストは、軟磁気特性には優れる
ものの、飽和磁束密度は約1.1T(約11KG)と低い欠点が
あり、パーマロイも同様に軟磁気特性に優れる組成にお
いては、飽和磁束密度が約0.8T(約8KG)と低い欠点が
あり、けい素鋼は飽和磁束密度は高いものの軟磁気特性
に劣る欠点がある。However, although the sendust has excellent soft magnetic characteristics, it has a low saturation magnetic flux density of about 1.1 T (about 11 KG), and permalloy also has a saturation magnetic flux density of about 10% in a composition having excellent soft magnetic characteristics. It has a low defect of 0.8T (about 8KG). Silicon steel has a high saturation magnetic flux density, but has a defect of poor soft magnetic properties.
一方、非晶質合金において、Co基合金は軟磁気特性に優
れるものの飽和磁束密度が1.0T程度と不十分である。ま
た、Fe基非晶質合金は、組成によっては飽和磁束密度が
高く、1.5Tあるいはそれ以上のものが得られるが、飽和
磁束密度の高い組成系のものはな磁気特性が不十分であ
る。On the other hand, among amorphous alloys, Co-based alloys have excellent soft magnetic characteristics, but their saturation magnetic flux density is insufficient at about 1.0 T. Further, the Fe-based amorphous alloy has a high saturation magnetic flux density depending on the composition, and one having a saturation flux density of 1.5 T or more can be obtained. However, the composition system having a high saturation magnetic flux density has insufficient magnetic characteristics.
ところで、これら従来の磁性材料が有する磁気特性と実
用的な磁気装置が要求する磁気特性の関係を見ると、ト
ランスにおいては、商用周波数あら数10KHzで用いられ
るものは、扱う電力が大きい場合が多く、それらに用い
られるコア材の飽和磁束密度はできるだけ大きいことが
望まれる。By the way, looking at the relationship between the magnetic properties of these conventional magnetic materials and the magnetic properties required by practical magnetic devices, transformers often used at a commercial frequency of several tens of KHz often handle large electric power. It is desirable that the saturation magnetic flux density of the core material used for them is as large as possible.
例えば、近年、柱上トランスなどにおいては、飽和磁束
密度が1.4T以上であることが必要とされ、実際には、1.
5T以上の飽和磁束密度を有するけい素鋼、あるいは、1.
3T以上の飽和磁束密度を有するFe基非晶質合金などが、
満足ではない透磁率を有するにもかかわらず用いられて
いる。For example, in recent years, pole transformers and the like have been required to have a saturation magnetic flux density of 1.4 T or higher.
Silicon steel with a saturation magnetic flux density of 5T or higher, or 1.
Fe-based amorphous alloys with a saturation magnetic flux density of 3T or more,
It is used despite having an unsatisfactory magnetic permeability.
このような場合、コア材を構成する磁性材料の透磁率が
高いと、トランスとしての効率が良くなり、特に10000
以上の透磁率が得られるとそのメリットが著しくなる
が、1.4T以上の透磁率を有する実用磁性材料は見あたら
ないのが実状である。In such a case, when the magnetic permeability of the magnetic material forming the core material is high, the efficiency as a transformer is improved,
When the above magnetic permeability is obtained, the merit becomes remarkable, but in reality, no practical magnetic material having a magnetic permeability of 1.4 T or more is found.
また、通常の軟磁性材料が用いられるのは、周知の如く
数Hz〜数100Hzの周波数帯域であるが、この範囲におい
て高い飽和磁束密度と透磁率を同時に実現できる軟磁性
材料が得られるならば、トランス等の磁気部品を小型化
および低ロス化できることは周知のことである。即ち、
軟磁性材料の飽和磁束密度が高くなれば、その分だけ磁
束が多くなり、結果として磁気部品の体積を小型にでき
るのである。更に、磁気部品のロスの大半は熱として外
部に放出されるので、他の機器や部品との間隔をあけた
りする工夫が一般に必要とされるが、これが磁気部品を
備えた磁気装置全体の小型化への大きな障害となつてい
た。従って、磁気部品を小型化すれば上述の問題を解決
することができ、結果として磁気装置全体を小型化する
ことが可能にある。Further, the usual soft magnetic material is used in a frequency band of several Hz to several hundreds Hz as is well known, but if a soft magnetic material capable of simultaneously achieving high saturation magnetic flux density and magnetic permeability in this range is obtained. It is well known that magnetic parts such as transformers and transformers can be miniaturized and reduced in loss. That is,
The higher the saturation magnetic flux density of the soft magnetic material, the more the magnetic flux increases, and as a result, the volume of the magnetic component can be reduced. Furthermore, since most of the loss of magnetic parts is released to the outside as heat, it is generally necessary to devise a space for other devices and parts, which is a small size of the entire magnetic device equipped with magnetic parts. It was a big obstacle to the change. Therefore, the above problem can be solved by downsizing the magnetic component, and as a result, the entire magnetic device can be downsized.
ところが、従来の軟磁性材料は、前述した通り、高い飽
和磁束密度を有するものは透磁率が低くなる傾向にあ
り、具体的には、実用的なFe基非晶質合金において飽和
磁束密度を1.3〜1.5Tとすると、透磁率10000を割って90
00程度になる傾向があり、実用的なCo基非晶質合金にお
いて透磁率を10000以上とすると、飽和磁束密度は1.0T
を割る傾向にある。However, as described above, the conventional soft magnetic material tends to have a low magnetic permeability when it has a high saturation magnetic flux density. Specifically, in a practical Fe-based amorphous alloy, the saturation magnetic flux density is 1.3% or less. If it is ~ 1.5T, the magnetic permeability will be divided by 10,000 to 90
When the magnetic permeability of a practical Co-based amorphous alloy is 10,000 or more, the saturation magnetic flux density is 1.0T.
Tends to divide.
従って前述したような高飽和磁束密度と高透磁率を兼備
し、かつ、高い機械強度と熱安定性を有するような実用
的な軟磁性材料が望まれている。Therefore, there is a demand for a practical soft magnetic material that has both the high saturation magnetic flux density and the high magnetic permeability as described above, and has high mechanical strength and thermal stability.
本発明の目的は、1.4T以上の高飽和磁束密度と10000以
上の高透磁率を兼ね備え、かつ、高い機械強度と高い熱
安定性を併せ持つFe系軟磁性合金および軟磁性合金薄帯
を提供することを目的とする。An object of the present invention is to provide a Fe-based soft magnetic alloy and a soft magnetic alloy ribbon having a high saturation magnetic flux density of 1.4 T or higher and a high magnetic permeability of 10,000 or higher, and having both high mechanical strength and high thermal stability. The purpose is to
「課題を解決するための手段」 本発明は前記問題点を解決するために以下の組成を有し
たものであり、従来実用合金と同程度あるいはより優れ
た軟磁気特性を有し、しかも高い飽和磁束密度を併せ持
つFe系軟磁性合金を得ることに成功し、本発明に想到し
た。"Means for Solving the Problems" The present invention has the following composition in order to solve the above-mentioned problems, has the same or better soft magnetic properties as conventional practical alloys, and high saturation. We succeeded in obtaining an Fe-based soft magnetic alloy having a magnetic flux density, and conceived the present invention.
請求項1に記載の高飽和磁束密度Fe系軟磁性合金は前記
課題を解決するために、次式で示される組成からなるな
るものであり、飽和磁束密度が1.4T以上、1kHzにおける
透磁率が10000以上であって、非晶質相中に微細結晶粒
が析出された構造を有するものである。The high saturation magnetic flux density Fe-based soft magnetic alloy according to claim 1 is composed of a composition represented by the following formula in order to solve the above problems, and has a saturation magnetic flux density of 1.4 T or more and a magnetic permeability at 1 kHz. It is at least 10,000 and has a structure in which fine crystal grains are precipitated in an amorphous phase.
(Fe1-aQa)bBxTy 但しQはCo,Niのいずれか、または、両方であり、TはT
i,Zr,Hf,V,Nb,Ta,Mo,Wからなる群から選ばれた1種又は
2種以上の元素であり、且つ、Zr,Hfのいずれか、又は
両方を含み、a≦0.05、b≦93原子%、x=0.5〜8原
子%、y=4〜9原子%である。(Fe 1-a Q a ) b B x T y However, Q is either Co or Ni, or both, and T is T
i, Zr, Hf, V, Nb, Ta, Mo, W is one or more elements selected from the group consisting of, and contains either or both of Zr, Hf, a ≦ 0.05 , B ≦ 93 at%, x = 0.5 to 8 at%, y = 4 to 9 at%.
請求項2に記載の高飽和磁束密度Fe系軟磁性合金は前記
課題を解決するために、次式で示される組成からなるな
るものであり、飽和磁束密度が1.4T以上、1kHzにおける
透磁率が10000以上であって、非晶質相中に微細結晶粒
が析出された構造を有するものである。The high saturation magnetic flux density Fe-based soft magnetic alloy according to claim 2 is composed of a composition represented by the following formula in order to solve the above-mentioned problems, and has a saturation magnetic flux density of 1.4 T or more and a magnetic permeability at 1 kHz. It is at least 10,000 and has a structure in which fine crystal grains are precipitated in an amorphous phase.
FebBxTy 但しTはTi,Zr,Hf,V,Nb,Ta,Mo,Wからなる群から選ばれ
た1種又は2種以上の元素であり、且つ、Zr,Hfのいず
れか、又は両方を含み、b≦93原子%、x=0.5〜8原
子%、y=4〜9原子%である。Fe b B x T y However, T is one or more elements selected from the group consisting of Ti, Zr, Hf, V, Nb, Ta, Mo and W, and either Zr or Hf , Or both, and b ≦ 93 atomic%, x = 0.5 to 8 atomic%, and y = 4 to 9 atomic%.
請求項3に記載の高飽和磁束密度Fe系軟磁性合金は、前
記課題を解決するために、請求項1または2に記載の微
細結晶粒を合金溶湯から急冷して得られた非晶質合金を
熱処理することにより生成したものである。The high saturation magnetic flux density Fe-based soft magnetic alloy according to claim 3 is an amorphous alloy obtained by rapidly cooling the fine crystal grains according to claim 1 or 2 from a molten alloy to solve the above problems. It is generated by heat-treating.
請求項4に記載の高飽和磁束密度Fe系軟磁性合金は、前
記課題を解決するために、請求項1、2又は3に記載の
高飽和磁束密度Fe系軟磁性合金において、Tの原子%を
示すyの値を4<y≦9の範囲としたものである。The high saturation magnetic flux density Fe-based soft magnetic alloy according to claim 4 is the high saturation magnetic flux density Fe-based soft magnetic alloy according to claim 1, 2 or 3 in order to solve the above problems. The value of y that indicates is within the range of 4 <y ≦ 9.
請求項5に記載の高飽和磁束密度Fe系軟磁性合金は、前
記課題を解決するために、請求項1、2又は3に記載の
高飽和磁束密度Fe系軟磁性合金から合金薄帯を形成した
ものである。The high saturation magnetic flux density Fe-based soft magnetic alloy according to claim 5 forms an alloy ribbon from the high saturation magnetic flux density Fe-based soft magnetic alloy according to claim 1, 2 or 3 in order to solve the above problems. It was done.
以下に本発明を更に詳細に説明する。The present invention will be described in more detail below.
本発明の高飽和磁束密度Fe系軟磁性合金は、前記組成の
非晶質合金あるいは非晶質相を含む結晶質合金を溶湯か
ら急冷することにより得る工程と、この工程で得られた
ものを加熱し微細な結晶粒を析出させる熱処理工程とに
よって通常得ることが出来る。The high saturation magnetic flux density Fe-based soft magnetic alloy of the present invention comprises a step of rapidly cooling an amorphous alloy or a crystalline alloy containing an amorphous phase having the above composition from a molten metal, and a step obtained by this step. It can be usually obtained by a heat treatment step of heating to precipitate fine crystal grains.
本発明において、非晶質相を得やすくするためには、非
晶質形成能の高いZr、Hfのいずれかを含む必要がある。
またZr,Hfはその一部を他の4A〜6A族元素のうち、Ti,V,
Nb,Ta,Mo,Wと置換することが出来る。ここでCrを含めな
かったのは、Crが他の元素に比べ非晶質形成能が劣って
いるからである。In the present invention, in order to easily obtain the amorphous phase, it is necessary to contain either Zr or Hf having a high amorphous forming ability.
Zr and Hf are part of other 4A-6A group elements, Ti, V,
It can be replaced with Nb, Ta, Mo, W. The reason why Cr is not included here is that Cr is inferior in amorphous forming ability to other elements.
Bには本発明合金の非晶質形成能を高める効果、および
前記熱処理工程において磁気特性に悪影響を及ぼす化合
物相の生成を抑制する効果があると考えられ、このため
B添加は必須である。Bと同様にAl,Si,C,P等も非晶質
形成元素として一般に用いられており、これらの元素を
添加した場合も本発明と同一とみなすことができる。It is considered that B has the effect of increasing the amorphous forming ability of the alloy of the present invention and the effect of suppressing the formation of the compound phase that adversely affects the magnetic properties in the heat treatment step, and therefore addition of B is essential. Like B, Al, Si, C, P and the like are generally used as amorphous forming elements, and the addition of these elements can be regarded as the same as the present invention.
以上、本発明の高飽和磁束密度Fe系軟磁性合金に含まれ
る合金元素の限定理由を説明したが、これらの元素以外
でも耐食性を改善するために、Cr,Ruその他の白金族元
素を添加することも可能であり、また、必要に応じて、
Y,希土類元素,Zn,Cd,Ga,In,Ge,Sn,Pb,As,Sb,Bi,Se,Te,L
i,Be,Mg,Ca,Sr,Ba等の元素を添加することで磁歪を調整
することもできる。その他、H,N,O,S等の不可避的不純
物については所望の特性が劣化しない程度に含有してい
ても本発明の高飽和磁束密度Fe系軟磁性合金の組成と同
一とみなすことできるのは勿論である。Although the reasons for limiting the alloying elements contained in the high saturation magnetic flux density Fe-based soft magnetic alloy of the present invention have been described above, in order to improve corrosion resistance other than these elements, Cr, Ru and other platinum group elements are added. It is also possible, and if necessary,
Y, rare earth element, Zn, Cd, Ga, In, Ge, Sn, Pb, As, Sb, Bi, Se, Te, L
Magnetostriction can also be adjusted by adding elements such as i, Be, Mg, Ca, Sr, and Ba. Other, inevitable impurities such as H, N, O, S can be regarded as the same as the composition of the high saturation magnetic flux density Fe-based soft magnetic alloy of the present invention even if they are contained to the extent that the desired characteristics are not deteriorated. Of course.
本発明合金におけるFe,Co,Niの量のbは、93原子%以下
である。これは、後述するように、bが93原子%を越え
ると高い透磁率が得られないためであるが、飽和磁束密
度10kG以上を得るためには、bが75原子%以上であるこ
とがより好ましい。The amount b of Fe, Co and Ni in the alloy of the present invention is 93 atomic% or less. This is because, as will be described later, when b exceeds 93 atom%, a high magnetic permeability cannot be obtained, but in order to obtain a saturation magnetic flux density of 10 kG or more, it is more preferable that b is 75 atom% or more. preferable.
次に本発明の高飽和磁束密度Fe系軟磁性合金の組成限定
理由について実施例をもって詳細に説明する。Next, the reasons for limiting the composition of the high saturation magnetic flux density Fe-based soft magnetic alloy of the present invention will be described in detail with reference to examples.
「実施例1」 以下の各実施例に示す合金は片ロール液体急冷法により
作成した。すなわち、1つの回転している鋼製ロール上
におかれたノズルより溶融金属をアルゴンガスの圧力に
より前記ロール上に噴出させ、急冷して薄帯を得る。以
上のように作成した薄帯の幅は約15mmであり、厚さは約
20〜40μmであった。"Example 1" The alloys shown in the following examples were prepared by a single roll liquid quenching method. That is, molten metal is jetted onto the roll by the pressure of argon gas from a nozzle placed on one rotating steel roll, and is rapidly cooled to obtain a ribbon. The width of the ribbon created as described above is about 15 mm, and the thickness is about
It was 20-40 μm.
透磁率は、薄帯を加工し、外径10mm、内径6mmのリング
状とし、これを積み重ねたものに巻線し、インダクタン
ス法により測定した。実効透磁率(μe)の測定条件は
10mOe,1KHzとした。飽和磁束密度(Bs)はVSMにて10kOe
で測定した磁化より算出した。なお、以下に示す実施例
では、600℃または650℃の温度で1時間保持後、水焼入
れした後の磁気特性を示す。The magnetic permeability was measured by an inductance method by processing a thin strip into a ring shape with an outer diameter of 10 mm and an inner diameter of 6 mm, winding the stacked pieces. The measurement conditions of effective permeability (μe) are
It was set to 10 mOe and 1 KHz. Saturation magnetic flux density (Bs) is 10kOe in VSM
It was calculated from the magnetization measured in. In the examples described below, magnetic properties are shown after water quenching after holding at a temperature of 600 ° C. or 650 ° C. for 1 hour.
まず、本発明合金の磁気特性および構造におよぼす熱処
理の効果について本発明合金の一つであるFe91Zr7B2合
金を例にとって以下に説明する。なお、昇温速度毎分10
℃の示差熱分析により求めたFe91Zr7B2合金の結晶化開
始温度は480℃であった。First, the effect of heat treatment on the magnetic properties and structure of the alloy of the present invention will be described below by taking the Fe 91 Zr 7 B 2 alloy, which is one of the alloys of the present invention, as an example. The heating rate is 10
The crystallization start temperature of the Fe 91 Zr 7 B 2 alloy determined by the differential thermal analysis at ℃ was 480 ℃.
第1図は、Fe91Zr7B2合金の実効透磁率に及ぼす焼鈍
(各温度で1時間保持後水焼入れ)の効果を示す。FIG. 1 shows the effect of annealing (water quenching after holding for 1 hour at each temperature) on the effective magnetic permeability of the Fe 91 Zr 7 B 2 alloy.
第1図より急冷状態(RQ)における本合金の実効透磁率
は、低い値を示すが、500〜650℃の焼鈍により、急激に
増加している。ここで650℃熱処理後の厚さ約20μmの
試料について透磁率の周波数依存を調べたところ1KHzで
26500、10KHz19800、更に100KHzで7800と、高い測定周
波数においても優れた軟磁気特性を示した。また、透磁
率に及ぼす冷却速度の影響を調べたところ、650℃で1
時間保持後、水焼入れにより急冷した本合金の実効透磁
率26500に対し、空冷した場合、その値は18000となり、
熱処理後の冷却速度も重要である。From FIG. 1, the effective magnetic permeability of this alloy in the rapidly cooled state (RQ) shows a low value, but it rapidly increases due to annealing at 500 to 650 ° C. The frequency dependence of the magnetic permeability was examined for a sample with a thickness of about 20 μm after heat treatment at 650 ° C.
It showed excellent soft magnetic characteristics even at high measurement frequencies of 26500, 10KHz19800, and 100KHz of 7800. Moreover, when the effect of the cooling rate on the magnetic permeability was investigated, it was found that
After holding for a period of time, the alloy's effective magnetic permeability of 26500, which was quenched by water quenching, was 18,000 when air-cooled.
The cooling rate after heat treatment is also important.
よって本合金の磁気特性は最適な熱処理条件を適当に選
ぶことにより調整することができ、また磁場中焼鈍など
により磁気特性を改善することもできる。Therefore, the magnetic properties of the present alloy can be adjusted by appropriately selecting the optimum heat treatment conditions, and the magnetic properties can be improved by annealing in a magnetic field.
次にFe91Zr7B2合金の熱処理前後の構造の変化をX線回
折法により調べ、熱処理後の組織を透過電子顕微鏡を用
いて観察し、結果をそれぞれ第2図と第3図に示す。Next, the structural change of the Fe 91 Zr 7 B 2 alloy before and after heat treatment was investigated by X-ray diffraction method, and the structure after heat treatment was observed with a transmission electron microscope. The results are shown in FIGS. 2 and 3, respectively. .
第2図より、急冷状態では非晶質に特有のハローな回折
図形が、熱処理後には体心立方晶に独特の回折図形がそ
れぞれ認められ、本合金の構造が熱処理により、非晶質
から体心立方晶へと変化したことがわかる。そして第3
図より、熱処理後の組織が、粒径約100〜200Å程度の微
結晶から成ることがわかる。また、Fe91Zr7B2合金につ
いて熱処理前後の硬さの変化を調べたところ、ビッカー
ス硬さで急冷状態の750DPNから600℃熱処理後には1400D
PNと従来材料にない高い値まで増加し、磁気ヘッド用材
料に好適であることも判明した。From Fig. 2, a halo diffraction pattern peculiar to amorphous is observed in the quenched state, and a peculiar diffraction pattern to body-centered cubic is recognized after the heat treatment. It can be seen that the crystals have changed to heart cubic. And the third
From the figure, it can be seen that the structure after heat treatment is composed of fine crystals with a grain size of about 100 to 200Å. In addition, the change in hardness before and after heat treatment of the Fe 91 Zr 7 B 2 alloy was examined, and it was found that after the heat treatment at 650 DPN in the quenched state with Vickers hardness at 1400 D after heat treatment
It has also been found that PN is increased to a high value that is not possible with conventional materials and is suitable for magnetic head materials.
以上のごとく本発明合金は、前述の組成を有する非晶質
合金を熱処理により結晶化させ、超微細結晶粒を主とす
る組織を得ることにより、高飽和磁束密度でかつ軟磁気
特性に優れ、更に高い硬さと高い熱安定性を有する優れ
た特性を得ることができる。As described above, the alloy of the present invention is obtained by crystallizing the amorphous alloy having the above-mentioned composition by heat treatment to obtain a structure mainly composed of ultrafine crystal grains, which has a high saturation magnetic flux density and excellent soft magnetic characteristics, It is possible to obtain excellent properties having higher hardness and high thermal stability.
次に前記合金のZr量およびB量を変化させた場合の実施
例を示す。後に記載する第1表および第4図と第5図と
第6図と第7図は焼鈍後の磁気特性を示す。Next, examples in which the amounts of Zr and B of the alloy are changed will be shown. Table 1, which will be described later, and FIGS. 4, 5, 6, and 7 show the magnetic characteristics after annealing.
第4図と第5図と第6図により、Zr量が4〜9原子%の
範囲で高透磁率と高飽和磁束密度が得やすいことがわか
る。また、Zr量が4原子%以下では10000以上の実効透
磁率が得られず、9原子%を超えると透磁率が急激に低
下するとともに飽和磁束密度も低下するため好ましくな
い。そこで、本発明合金におけるZr含有量の限定範囲を
4〜9原子%とした。From FIG. 4, FIG. 5 and FIG. 6, it can be seen that high permeability and high saturation magnetic flux density are easily obtained in the range of Zr content of 4 to 9 atomic%. Further, if the Zr content is 4 atomic% or less, an effective magnetic permeability of 10,000 or more cannot be obtained, and if it exceeds 9 atomic%, the magnetic permeability sharply decreases and the saturation magnetic flux density also decreases, which is not preferable. Therefore, the limited range of the Zr content in the alloy of the present invention is set to 4 to 9 atom%.
同様にB量については、0.5〜8原子%の範囲で実効透
磁率10000以上の高透磁率が得やすいことがわかり、こ
のためB含有量の限定範囲を0.5〜8原子%とした。ま
たZr,B量が前記範囲にあっても、Fe量が93原子%を超え
ると高い透磁率が得られないため、本発明合金における
Fe含有量は93原子%以下とした。Similarly, regarding the B content, it was found that a high magnetic permeability of 10,000 or more in effective magnetic permeability was easily obtained in the range of 0.5 to 8 atomic%, and therefore the limited range of the B content was set to 0.5 to 8 atomic%. Further, even if the amount of Zr, B is in the above range, high magnetic permeability cannot be obtained when the amount of Fe exceeds 93 atomic%, so
The Fe content was 93 atomic% or less.
「実施例2」 次に実施例1に示したFe−Zr−B系合金のZrをHfで置換
したFe−Hf−B系合金について説明する。"Example 2" Next, the Fe-Hf-B-based alloy obtained by substituting Hf for Zr in the Fe-Zr-B-based alloy shown in Example 1 will be described.
実施例としてFe−Hf−B系合金のHf量を4〜9原子%の
範囲で変化させた場合の結果を後記する第2表に示す。As an example, Table 2 below shows the results when the Hf content of the Fe-Hf-B system alloy was changed in the range of 4 to 9 atomic%.
第2表から、4〜9原子%の範囲においてFe−Hf−B系
合金の実効透磁率がFe−Zr−B系合金のものと同等であ
ることがわかる。また、第2表中に示すFe91Zr4Hf3B2合
金の磁気特性は実施例1のFe−Zr−B系合金の磁気特性
と同等である。従って実施例1に示したFe−Zr−B系合
金のZrは、その組成限定範囲である4〜9原子%すべて
においてHfと一部もしくは全て置換可能である。It can be seen from Table 2 that the effective magnetic permeability of the Fe-Hf-B alloy is equivalent to that of the Fe-Zr-B alloy in the range of 4 to 9 atomic%. The magnetic characteristics of the Fe 91 Zr 4 Hf 3 B 2 alloy shown in Table 2 are equivalent to those of the Fe—Zr—B alloy of Example 1. Therefore, Zr of the Fe-Zr-B-based alloy shown in Example 1 can be partially or completely replaced with Hf in all 4 to 9 atomic% which is the composition limiting range.
「実施例3」 次に実施例1および実施例2に示したFe−(Zr,Hf)−
B合金のZr,Hfの一部をNbで置換する場合について説明
する。"Example 3" Next, Fe- (Zr, Hf)-shown in Examples 1 and 2 was used.
A case where a part of Zr and Hf of the B alloy is replaced with Nb will be described.
実施例としてFe−Zr−B系合金のZrの一部を1〜5原子
%のNbで置換した場合の結果を第3表に示す。As an example, Table 3 shows the results when a part of Zr of the Fe-Zr-B alloy was replaced with 1 to 5 atomic% of Nb.
第3表から高い透磁率を得やすいZr+Nbの量は、Fe−Zr
−B系合金でのZr量と同じ4〜9原子%であり、NbはZr
と同等の添加効果を有しているのがわかる。従って、Fe
(Zr,Hf)−B合金のZr,Hfの一部はNbで置換することが
可能である。From Table 3, the amount of Zr + Nb that is easy to obtain high magnetic permeability is Fe-Zr.
-The amount is 4-9 atom%, which is the same as the amount of Zr in B alloys, and Nb is Zr.
It can be seen that it has the same addition effect as. Therefore, Fe
A part of Zr, Hf of the (Zr, Hf) -B alloy can be replaced with Nb.
「実施例4」 次に、Fe−(Zr,Hf)−Nb−B合金のNbをTi,V,Ta,Mo,W
と置換えする場合について説明する。実施例として、後
記する第4表に、Fe−Zr−T−B(T=Ti,V,Ta,Mo,W)
系合金の磁気特性を示す。[Example 4] Next, Nb of the Fe- (Zr, Hf) -Nb-B alloy was changed to Ti, V, Ta, Mo, W.
The case of replacing with will be described. As an example, Fe-Zr-TB (T = Ti, V, Ta, Mo, W) is shown in Table 4 below.
The magnetic characteristics of the alloys are shown.
第3表中の各実施例とも、Fe系非晶質合金で通常得られ
る実効透磁率の5000を上回り、一部のものはそれ以上の
値、即ち、10000を超える優れた透磁率を示している。
従って、Fe−(Zr,Hf)Nb−B合金のNbはTi,V,Ta,Mo,W
と置換することが可能である。In each of the examples in Table 3, the effective magnetic permeability which is usually obtained with the Fe-based amorphous alloy exceeds 5000, and some of them show a value higher than that, that is, excellent magnetic permeability exceeding 10,000. There is.
Therefore, Nb of the Fe- (Zr, Hf) Nb-B alloy is Ti, V, Ta, Mo, W.
Can be replaced with.
「実施例5」 次に本発明合金におけるCoおよびNi含有量の限定理由に
ついて説明する。実施例として、(Fe1-aQa)91Zr7B2合
金(Q=Co,Ni)のCoおよびNi量(a)と透磁率の関係
を第8図に示す。Example 5 Next, the reasons for limiting the Co and Ni contents in the alloy of the present invention will be described. As an example, FIG. 8 shows the relationship between the magnetic permeability and the amounts (a) of Co and Ni of (Fe 1-a Q a ) 91 Zr 7 B 2 alloy (Q = Co, Ni).
第8図において、aが0.05以下の範囲においては実効透
磁率10000以上の高い値を示すが、0.05を越える範囲で
は実効透磁率が急激に低下するので実用上好ましくな
い。よって本発明合金におけるCoおよびNi含有量(a)
は、0.05以下とした。In FIG. 8, when a is 0.05 or less, a high value of effective magnetic permeability of 10,000 or more is shown, but in the range of 0.05 or more, the effective magnetic permeability sharply decreases, which is not preferable in practice. Therefore, Co and Ni contents in the alloy of the present invention (a)
Was 0.05 or less.
「発明の効果」 以上説明したように本発明によれば、従来の実用合金で
は兼ね備えることができなかった、1.4T以上の飽和磁束
密度と10000以上の透磁率を有するので、本発明の合金
および薄帯は、磁気記録媒体の高保磁力化に対応するこ
とが必要であり、高い透磁率を要求される磁気ヘッド
用、あるいは、より一層の小型化軽量化が望まれている
トランスやチョークコイル用として好適である。"Effects of the Invention" As described above, according to the present invention, it was impossible to combine the conventional practical alloys, since it has a saturation magnetic flux density of 1.4T or more and a magnetic permeability of 10,000 or more, the alloy of the present invention and Thin ribbons are required for high coercive force of magnetic recording media, and for magnetic heads that require high magnetic permeability, or transformers and choke coils for which further size reduction and weight reduction are desired. Is suitable as
即ち、本発明の軟磁性合金および薄帯は、飽和磁束密度
1.4T以上であって、透磁率が10000以上であるので、従
来材料と比較した場合、磁気ヘッド用、トランス用、チ
ョークコイル用などの磁気部品用に用いるといずれの場
合も効率を良くすることができると同時に低ロス化が実
現でき、それらの磁気部品を用いた磁気装置の小型軽量
化、低ロス化に寄与する。That is, the soft magnetic alloy and the ribbon of the present invention have saturation magnetic flux density
Since it is 1.4T or more and the magnetic permeability is 10,000 or more, when compared with conventional materials, it should be used in magnetic parts for magnetic heads, transformers, choke coils, etc. to improve efficiency in any case. At the same time, low loss can be realized, which contributes to reduction in size and weight of a magnetic device using those magnetic parts and reduction in loss.
また、本発明の軟磁性合金および薄帯は、高い機械強度
を有し、高い熱安定性も兼ね備えているので、磁気ヘッ
ド用あるいはトランス用、チョークコイル用などとして
有用であり、これらに利用した場合、機械強度が高く、
熱安定性に優れたものを提供することができる。Further, since the soft magnetic alloy and the ribbon of the present invention have high mechanical strength and high thermal stability, they are useful as magnetic heads, transformers, choke coils, etc. If the mechanical strength is high,
It is possible to provide a material having excellent thermal stability.
更に、本発明において非結晶相の中に微細結晶粒が析出
された構造は、合金溶湯から急冷して非晶質相を生成さ
せ、この非晶質相に熱処理を施すことにより容易に得ら
れ、この微結晶粒が非晶質相中に析出することで優れた
軟磁気特性と高い飽和磁束密度の両方が発揮される。Further, in the present invention, the structure in which fine crystal grains are precipitated in the amorphous phase is easily obtained by rapidly cooling the molten alloy to generate an amorphous phase and subjecting this amorphous phase to heat treatment. By precipitating these fine crystal grains in the amorphous phase, both excellent soft magnetic characteristics and high saturation magnetic flux density are exhibited.
更にまた、本発明に係る組成と組織を有する軟磁性合金
からなる薄帯であるならば、積層することも容易にで
き、磁気ヘッドのコア材やトランスのコア材として容易
に適用することができる。Furthermore, if it is a ribbon made of a soft magnetic alloy having the composition and structure according to the present invention, it can be easily laminated and can be easily applied as a core material of a magnetic head or a core material of a transformer. .
第1図は本発明合金の一例の実効透磁率と焼鈍温度の関
係を示すグラフ、第2図は本発明合金の一例を熱処理前
後の構造変化を示すX線回折図形を示すグラフ、第3図
は本発明合金の一例の熱処理後の組織を示す顕微鏡写真
の模式図、第4図は600℃で熱処理した本発明合金の一
例においてZr量とB量とFe量を変化させた場合の透磁率
を示す三角組成図、第5図は650℃で熱処理した本発明
合金の一例においてZr量とB量とFe量を変化させた場合
の透磁率を示す三角組成図、第6図は本発明合金の一例
においてZr量とB量とFe量を変化させた場合の飽和磁束
密度を示す三角組成図、第7図は同合金のDs値を示す三
角組成図、第8図は本発明合金の一例におけるCo量と透
磁率との関係を示すグラフである。FIG. 1 is a graph showing the relationship between effective magnetic permeability and annealing temperature of an example of the alloy of the present invention, FIG. 2 is a graph showing an X-ray diffraction pattern showing the structural change before and after heat treatment of an example of the alloy of the present invention, and FIG. Is a schematic diagram of a micrograph showing a structure of an example of the alloy of the present invention after heat treatment, and FIG. 4 is a magnetic permeability when Zr content, B content and Fe content are changed in an example of the alloy of the present invention heat treated at 600 ° C. FIG. 5 is a triangular composition diagram showing the magnetic permeability when Zr content, B content and Fe content are changed in an example of the alloy of the present invention heat-treated at 650 ° C., and FIG. 6 is an alloy of the present invention. In one example, a triangular composition diagram showing the saturation magnetic flux density when Zr amount, B amount and Fe amount are changed, FIG. 7 is a triangular composition diagram showing the Ds value of the same alloy, and FIG. 8 is an example of the alloy of the present invention. 5 is a graph showing the relationship between the Co amount and magnetic permeability in FIG.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 潟岡 教行 宮城県仙台市青葉区向山1丁目4番7号 第2ハイネス向山212号 (56)参考文献 特開 昭63−236304(JP,A) 特開 昭64−28343(JP,A) 特開 平2−123705(JP,A) 特開 平4−99253(JP,A) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Noriyuki Kataoka 1-4-7 Mukoyama, Aoba-ku, Sendai-shi, Miyagi 2nd Highness 212 Mukoyama (56) Reference JP-A-63-236304 (JP, A) ) JP-A 64-28343 (JP, A) JP-A 2-123705 (JP, A) JP-A 4-99253 (JP, A)
Claims (5)
度が1.4T以上、1kHzにおける透磁率が10000以上であっ
て、非晶質相中に微細結晶粒が析出された構造を有する
ことを特徴とする高飽和磁束密度Fe系軟磁性合金。 (Fe1-aQa)bBxTy ただしQはCo,Niのいずれか、または、両方であり、T
はTi,Zr,Hf,V,Nb,Ta,Mo,Wからなる群から選ばれた1種
又は2種以上の元素であり、かつ、Zr,Hfのいずれか、
又は両方を含み、a≦0.05、b≦93原子%、x=0.5〜
8原子%、y=4〜9原子%である。1. A composition having a composition represented by the following formula, a saturation magnetic flux density of 1.4 T or more, a magnetic permeability at 1 kHz of 10,000 or more, and a structure in which fine crystal grains are precipitated in an amorphous phase. Fe-based soft magnetic alloy with high saturation magnetic flux density. (Fe 1-a Q a ) b B x T y However, Q is either Co or Ni, or both, and T
Is one or more elements selected from the group consisting of Ti, Zr, Hf, V, Nb, Ta, Mo, W, and any one of Zr, Hf,
Or including both, a ≦ 0.05, b ≦ 93 atomic%, x = 0.5 to
8 atom% and y = 4 to 9 atom%.
度が1.4T以上、1kHzにおける透磁率が10000以上であっ
て、非晶質相中に微細結晶粒が析出された構造を有する
ことを特徴とする高飽和磁束密度Fe系軟磁性合金。 FebBxTy ただしTはTi,Zr,Hf,V,Nb,Ta,Mo,Wからなる群から選ば
れた1種又は2種以上の元素であり、かつ、Zr,Hfのい
ずれか、又は両方を含み、b≦93原子%、x=0.5〜8
原子%、y=4〜9原子%である。2. A composition represented by the following formula, having a saturation magnetic flux density of 1.4 T or more, a magnetic permeability of 10000 or more at 1 kHz, and having a structure in which fine crystal grains are precipitated in an amorphous phase. Fe-based soft magnetic alloy with high saturation magnetic flux density. Fe b B x T y where T is one or more elements selected from the group consisting of Ti, Zr, Hf, V, Nb, Ta, Mo and W, and either Zr or Hf , Or both, b ≦ 93 atomic%, x = 0.5 to 8
Atomic% and y = 4 to 9 atomic%.
れた非晶質合金を熱処理することにより生成されたもの
であることを特徴とする請求項1又は2記載の高飽和磁
束密度Fe系軟磁性合金。3. The high saturation magnetic flux density according to claim 1 or 2, wherein the fine crystal grains are generated by heat-treating an amorphous alloy obtained by quenching the molten alloy. Fe-based soft magnetic alloy.
度Fe系軟磁性合金において、Tの原子%を示すyの値が
4<y≦9の範囲であることを特徴とする高飽和磁束密
度Fe系軟磁性合金。4. The high saturation magnetic flux density Fe-based soft magnetic alloy according to claim 1, 2 or 3, characterized in that the value of y showing the atomic% of T is in the range of 4 <y ≦ 9. High saturation magnetic flux density Fe-based soft magnetic alloy.
束密度Fe系軟磁性合金からなることを特徴とする高飽和
磁束密度Fe系軟磁性合金薄帯。5. A high-saturation-flux-density Fe-based soft magnetic alloy ribbon characterized by comprising the high-saturation-flux-density Fe-based soft-magnetic alloy according to claim 1, 2, 3 or 4.
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2230135A JPH0765145B2 (en) | 1990-08-31 | 1990-08-31 | High saturation magnetic flux density Fe-based soft magnetic alloy and high saturation magnetic flux density Fe-based soft magnetic alloy ribbon |
| CA002040741A CA2040741C (en) | 1990-04-24 | 1991-04-18 | Fe based soft magnetic alloy, magnetic materials containing same, and magnetic apparatus using the magnetic materials |
| DE69126367T DE69126367T2 (en) | 1990-04-24 | 1991-04-23 | Fe-based soft magnetic alloy and magnetic material containing this alloy and magnetic apparatus using these materials |
| EP91106549A EP0455113B1 (en) | 1990-04-24 | 1991-04-23 | Fe based soft magnetic alloy, magnetic material containing same, and magnetic apparatus using the magnetic materials |
| KR1019910006561A KR970007510B1 (en) | 1990-04-24 | 1991-04-23 | Fe based soft magnetic alloy, magnetic material containing same & magnetic apparatus using the magnetic material |
| US08/201,135 US5449419A (en) | 1990-04-24 | 1994-02-24 | Fe based soft magnetic alloy, magnetic materials containing same, and magnetic apparatus using the magnetic materials |
| US08/422,720 US5741373A (en) | 1990-04-24 | 1995-04-14 | Fe based soft magnetic alloy, magnetic materials containing same, and magnetic apparatus using the magnetic materials |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2230135A JPH0765145B2 (en) | 1990-08-31 | 1990-08-31 | High saturation magnetic flux density Fe-based soft magnetic alloy and high saturation magnetic flux density Fe-based soft magnetic alloy ribbon |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04333546A JPH04333546A (en) | 1992-11-20 |
| JPH0765145B2 true JPH0765145B2 (en) | 1995-07-12 |
Family
ID=16903131
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2230135A Expired - Lifetime JPH0765145B2 (en) | 1990-04-24 | 1990-08-31 | High saturation magnetic flux density Fe-based soft magnetic alloy and high saturation magnetic flux density Fe-based soft magnetic alloy ribbon |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0765145B2 (en) |
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|---|---|---|---|---|
| CN115821174B (en) * | 2022-12-12 | 2024-05-07 | 广东电网有限责任公司 | A Fe-Co-Zr-Mo-Ni-B bulk amorphous alloy with high glass forming ability and preparation method thereof |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2555057B2 (en) * | 1987-03-25 | 1996-11-20 | 株式会社日立製作所 | Corrosion resistant ferromagnetic film |
| JPH07116563B2 (en) * | 1987-07-23 | 1995-12-13 | 日立金属株式会社 | Fe-based soft magnetic alloy |
| JPH02123705A (en) * | 1988-11-02 | 1990-05-11 | Hitachi Ltd | Heat-resistant iron-based magnetic film and magnetic head using the same |
| JPH0499253A (en) * | 1990-08-13 | 1992-03-31 | Tdk Corp | Iron-based soft magnetic alloy |
-
1990
- 1990-08-31 JP JP2230135A patent/JPH0765145B2/en not_active Expired - Lifetime
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| JPH04333546A (en) | 1992-11-20 |
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