JPH0765159B2 - Vacuum deposition equipment - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a vacuum vapor deposition apparatus, and in particular to a material for optical discs such as optical video discs and optical audio discs.
The present invention relates to a vacuum vapor deposition apparatus suitable for forming a thin film of Al or the like.

[Prior Art] FIG. 5 shows a conventional vacuum vapor deposition apparatus for an optical disk, in which a pair of rod-shaped vapor deposition electrodes 3 and 4 are fixedly mounted on a fixed disk 2 in a vacuum chamber 1, and these evaporation electrodes are provided. An aluminum evaporation source 5 is connected and attached between 3 and 4 at predetermined intervals. A ring-shaped rotary table 6 that surrounds the evaporation electrodes 3 and 4 is supported by a rotatable fixed disk 2 via rollers 7, and a plurality of holder shafts 8 are rotatably supported on the rotary table 6. There is. Holder plates 9 are fixed to the holder shafts 8, and a plurality of plastic optical disk materials 10 are attached to both surfaces of the holder plates 9. Rotating gears 11 are attached to the lower end of the holder shaft 8 penetrating the rotary table 6, and these rotary gears 11 engage with the outer teeth of the disc 2, and the outer teeth of the rotary table 6 are connected to the motor 12. Is engaged with the drive gear 13.

The rotary table 6 is driven by the motor 12 via the drive gear 13.
When is rotated, the rotation gear 11 also rotates while rotating around the disc 2. Thus, the optical disc material 10 on the holder plate 9
Rotates around the evaporation electrodes 3 and 4 as shown in FIG. In this state, the aluminum vapor from the evaporation source 5 which is electrically heated is uniformly and evenly deposited on the optical disk material 10 which is revolving around its axis.

[Problems to be Solved by the Invention] However, in the above-described vacuum vapor deposition apparatus for optical discs, since the optical disc material 10 is mounted on the holder plate 9, the number of vapors that can be deposited at one time is small (for example, diameter
There was a problem that the efficiency was not good in the case of a 300 mm disc (76 discs).

Therefore, an object of the present invention is to provide a vacuum vapor deposition apparatus capable of vapor-depositing a large number of film-forming thin plates at one time.

[Means for Solving the Problems] In order to achieve this object, the present invention provides an evaporation source mounting body, which is composed of a pair of rod-shaped electrodes spaced apart from each other, for mounting a plurality of evaporation sources; and is substantially parallel to the evaporation source mounting body. A plurality of mounting shafts that extend around the evaporation source mounting body and revolve around the evaporation source mounting body; and a plurality of mounted shafts that are respectively held at right angles to the axis line at predetermined intervals along the axial direction of the mounting shafts. A thin film-forming plate is provided.

[Operation] Each thin film-forming plate attached to the mounting shaft with a distance from each other
Deposition is performed while revolving around the evaporation source mounting body and rotating. Since the vapor from the evaporation source reaches the surface of the film-forming thin plate through the gap between the film-forming thin plates, the vapor can be evenly and uniformly attached.

Since the deposition target thin plates are mounted at right angles to the mounting axis by the holding portion, it is possible to vapor-deposit a large number of deposition target thin plates at one time.

If the attachment pitch of the evaporation source is substantially equal to or less than the distance between the thin film-forming layers, the vapor deposition can be performed more uniformly.

If the holding unit holds the two film-forming thin plates in a state of being superposed on each other, the number of the film-forming thin plates attached to the mounting shaft can be significantly increased.

Similarly, by making the film-forming thin plates of the adjacent mounting shafts alternately overlap each other, more film-forming thin plates can be vapor-deposited at one time.

[Embodiment] An embodiment of the vacuum vapor deposition apparatus according to the present invention will be described below with reference to FIGS. 1 to 4 in which the same parts as those in FIGS. 5 and 6 are designated by the same reference numerals.

In FIG. 1, a plurality of mounting shafts 14 rotatably supported on the ring-shaped rotary table 6 extend parallel to the rod-shaped evaporation electrodes 3 and 4 and are arranged at substantially equal intervals so as to surround the evaporation electrodes 3 and 4. It is arranged. The lower end of the mounting shaft 14 is the rotary table 6
A plurality of optical disc materials 10 made of plastic along the axial direction of each mounting shaft 14 that passes through the shaft and is fixed to the rotation gear 11, and revolves around the electrodes 3 and 4 while rotating by the rotational drive of the motor 12. It is held perpendicular to the axial direction.
The holding of the optical disk material 10 is performed by fixing two optical disk materials 10 whose back surfaces are superposed on each other at predetermined intervals D to the mounting shaft 14 by a holder 15 as shown in detail in FIG. .

Predetermined distance D of optical disc material 10 and aluminum evaporation source 5
The relationship between the pitch P and the pitch P depends on the distance between the optical disk material 10 and the evaporation source 5, but it is generally desirable to set the pitch P so that the pitch P is approximately equal to or less than the predetermined distance D, and thus the vapor deposition is performed. Uniformity is ensured. Other configurations are the same as those in FIG.

Next, the operation of this embodiment will be described.

When the motor 12 is rotationally driven, the ring-shaped rotary table 6 rotates about the evaporation source 5 via the drive gear 13, whereby the rotation gear 11 engaged with the outer teeth of the fixed disc 2 is rotated.
Rotates, and the optical disk material 10 revolves around the evaporation source 5 while rotating.

The evaporation source 5 generates heat when electricity is applied to the electrodes 3 and 4, and is an optical disk material that revolves around its own axis as schematically shown in FIG.
An aluminum film 16 (FIG. 2) is formed by vapor deposition on the surface of the optical disk material 10 through the interval D of 10.

As described above, in order for the evaporation material to sufficiently enter the gap D of the optical disc material 10 and adhere to the surface of the optical disc material 10, for example, in the case of an optical disc material having a diameter of 300 mm, the gap D
Requires about 100 mm.

The aluminum film 16 thus formed was substantially the same in characteristics as that formed by the conventional vacuum deposition apparatus shown in FIG. This is because the vapor from the evaporation source 5 adheres to the surface of the optical disk material 10 in substantially the same direction in both the present invention and the conventional apparatus, that is, both are oblique directions. More specifically, in the conventional vacuum deposition apparatus,
As shown in FIG. 6, the optical disk material 10 is temporarily perpendicular to the vapor from the evaporation source 5 at the position A, but is inclined like the position B at other positions. In the present invention, as shown in FIG. 3, the surface of the optical disc material 10 is always inclined with respect to the vapor from the evaporation source 5.

By stacking the optical disc materials 10 on the mounting shaft 14 with a predetermined distance D from each other as described above, 160 optical disc materials (this is about twice as many as the number of 76 discs mounted in the conventional vacuum deposition apparatus described above). Was able to be installed at once.

FIGS. 4 (a) and 4 (b) show an example of the structure of the mounting shaft 14 for further increasing the number of mounted optical disc materials 10, which are mounted on one of a pair of adjacent mounting shafts 14,14. Optical disc material 10 and optical disc material attached to the other
10 is mounted so as to be staggered in the axial direction, and the distance L between the adjacent mounting shafts 14 and 14 is such that one optical disk material 10 and the other optical disk material 10 of the adjacent mounting shafts are part of each other in the axial direction. It is designed to overlap.

In the above embodiment, one set of two optical disk materials 10, 10 having their back surfaces overlapped with each other was mounted on the mounting shaft 14 in order to increase the number of mounted disks, but the present invention is not limited to this. They may be installed separately from each other.

Further, in the above-mentioned example, the optical disk material is used as the film-forming thin plate, but other thin plates can be used.

[Effects of the Invention] As is clear from the above description, according to the present invention, the thin film-forming sheet is mounted by the holding portion at a right angle to the mounting axis and at a predetermined distance in the axial direction. It is possible to vapor-deposit evenly and uniformly on a large number of thin film-forming sheets.

If the attachment pitch of the evaporation source is set to be substantially equal to or less than the interval between the thin films to be deposited, vapor deposition can be performed more uniformly.

Further, if the holding portion holds the two film-forming thin plates in a state of being superposed on each other, the number of the film-forming thin plates attached to the mounting shaft can be significantly increased.

Similarly, if the deposition target thin plates of the adjacent mounting shafts are alternately and partially overlapped with each other, vapor deposition can be performed on more deposition target thin plates at one time.

[Brief description of drawings]

FIG. 1 is a sectional view showing an embodiment of a vacuum vapor deposition device according to the present invention, and FIG. 2 is an enlarged view showing in detail the mounting shaft of FIG.
FIG. 3 is an explanatory view showing a state in which the evaporation material from the evaporation source is vapor-deposited on the optical disk material, and FIGS. 4 (a) and 4 (b) are a plan view and a front view showing a modified example of the above embodiment, FIG. 5 is a sectional view showing a conventional vacuum vapor deposition apparatus, and FIG. 6 is an explanatory view showing a vapor deposition method by the vacuum vapor deposition apparatus of FIG. 3, 4 ... Rod-shaped evaporation electrode (evaporation source mounting body), 5 ... Evaporation source, 10 ... Thin plate to be deposited, 14 ... Mounting shaft, 15 ... Fixed part.

Claims (3)

[Claims] 1. An evaporation source mounting body for mounting a plurality of evaporation sources, which comprises a pair of rod-shaped electrodes separated from each other; a plurality of evaporation source mounting bodies extending substantially parallel to each other and revolving and rotating around the evaporation mounting body. And a plurality of film-forming thin plates held at right angles to the axis at predetermined intervals along the axial direction of each of these mounting axes. 2. The evaporation source is mounted on the pair of rod-shaped electrodes at a substantially constant pitch, and the pitch is substantially equal to or less than the distance between the coated thin plates. The vacuum vapor deposition device according to item 1. 3. The distance between a pair of the mounting shafts adjacent to each other is such that the film-forming thin plate mounted on one of the adjacent mounting shafts and the film-forming thin plate mounted on the other adjacent mounting shaft are mutually adjacent. Determined to partially overlap in the axial direction,
It is characterized in that the film-forming thin plate on the one adjacent mounting shaft and the film-forming thin plate on the other adjacent mounting shaft are determined so as to be axially staggered with respect to each other. The vacuum vapor deposition device according to claim 1.