JPH0769275B2 - Surface inspection machine - Google Patents
Surface inspection machineInfo
- Publication number
- JPH0769275B2 JPH0769275B2 JP1095520A JP9552089A JPH0769275B2 JP H0769275 B2 JPH0769275 B2 JP H0769275B2 JP 1095520 A JP1095520 A JP 1095520A JP 9552089 A JP9552089 A JP 9552089A JP H0769275 B2 JPH0769275 B2 JP H0769275B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- line sensor
- inspected
- inspection machine
- light receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000007689 inspection Methods 0.000 title claims description 15
- 230000007547 defect Effects 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 4
- 230000003746 surface roughness Effects 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000005286 illumination Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
【発明の詳細な説明】 ［産業上の利用分野］ 本発明はガラス基材表面や、銅張積層板表面などの被検
査物の表面の汚れ、凹凸、傷等の欠陥を検出する表面検
査機に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention is a surface inspection machine for detecting defects such as dirt, unevenness, and scratches on the surface of an object to be inspected such as the surface of a glass substrate or the surface of a copper clad laminate. It is about.
［従来の技術］ この種の表面検査機は第４図に示すように照明装置６に
より被検査物２の表面を斜め方向より照明し、その照明
による被検査物２表面の反射光を被検査物２の横方向と
並行する方向に走査方向を持つラインセンサ１によって
受光走査検知し、その受光量に応じたラインセンサ１の
電圧出力を信号処理回路３で２値化して基準値と比較
し、汚れや、傷、或は凹凸による欠陥を識別するもので
ある。[Prior Art] This type of surface inspection machine illuminates the surface of the inspection object 2 from an oblique direction by an illumination device 6 as shown in FIG. 4, and inspects the reflected light on the surface of the inspection object 2 due to the illumination. The line sensor 1 having a scanning direction parallel to the lateral direction of the object 2 detects the light receiving scanning, and the voltage output of the line sensor 1 corresponding to the received light amount is binarized by the signal processing circuit 3 and compared with the reference value. It identifies defects such as stains, scratches, and irregularities.
［発明が解決しようとする課題］ ところで被検査物２が縦方向に波打ち、しかもラインセ
ンサ１の受光走査方向が被検査物２の横方向の線に斜め
（Ａ−Ｂ）となるように設定されている場合、ラインセ
ンサ１の受光走査検知出力も第５図に示すように波打
ち、欠陥検出が困難となるという問題があった。[Problems to be Solved by the Invention] By the way, it is set so that the inspection object 2 corrugates in the vertical direction, and the light receiving scanning direction of the line sensor 1 is oblique to the horizontal line of the inspection object 2 (AB). In such a case, there is a problem in that the light-reception scanning detection output of the line sensor 1 is corrugated as shown in FIG. 5, making it difficult to detect defects.
本発明は上述の問題点に鑑みて為されたもので、被検査
物の表面が波打って欠陥を検知することができる表面検
査機を提供することを目的とする。The present invention has been made in view of the above problems, and an object of the present invention is to provide a surface inspection machine capable of detecting a defect in which the surface of an object to be inspected corrugates.
［課題を解決するための手段］ 本発明は被検査物の横方向に並行する受光走査方向を持
つラインセンサにより被検査物の表面からの反射光を受
光走査検知し、受光量に応じたラインセンサからの検知
出力を信号処理回路で２値化して被検査物の表面の欠陥
を検知する表面検査機において、縦方向に波打った被検
査物の表面粗さの縦方向の最大傾斜角度の約２倍の角度
範囲の入射角の反射光を通過させる遮光板と、遮光板を
通過した反射光をラインセンサの受光面に集光する集光
レンズとをラインセンサの受光光軸線上に設けたもので
ある。[Means for Solving the Problems] According to the present invention, a line sensor having a light-receiving scanning direction parallel to the lateral direction of an object to be inspected detects light reflected from the surface of the object to be inspected by scanning, and a line corresponding to the amount of light received. In a surface inspection machine that binarizes the detection output from the sensor with a signal processing circuit to detect defects on the surface of the inspection object, the surface roughness of the inspection object corrugated in the vertical direction Provided on the light-receiving optical axis of the line sensor are a light-shielding plate that transmits reflected light having an incident angle of about twice the angle range and a condenser lens that collects the reflected light that has passed through the light-shielding plate on the light-receiving surface of the line sensor. It is a thing.
［作用］ 而して本発明によれば被検査物の表面が波打ち、ライン
センサの受光部の走査方向が被検査物の横方向に対して
斜めとなっていても、被検査物からの反射光をラインセ
ンサの受光走査方向の各受光部位において斜め配置によ
る影響を受けることなく受光することができ、被検査物
の表面に欠陥が無ければ、受光部の受光量に差が生じ
ず、結果受光走査検知出力に波打ちが現れないため、欠
陥があれば明確に受光走査検知出力の変化として捕える
ことができるのである。[Operation] Therefore, according to the present invention, even if the surface of the object to be inspected is wavy and the scanning direction of the light receiving portion of the line sensor is oblique to the lateral direction of the object to be inspected, reflection from the object to be inspected Light can be received without being affected by the oblique arrangement at each light receiving site in the light receiving scanning direction of the line sensor, and if there is no defect on the surface of the object to be inspected, there is no difference in the amount of light received by the light receiving unit. Since no waviness appears in the light-receiving scan detection output, any defect can be clearly recognized as a change in the light-receiving scan detection output.
［実施例］ 以下本発明を実施例により説明する。[Examples] The present invention will be described below with reference to Examples.
第１図は本実施例の構成を示しており、ラインセンサ１
の前方には被検査物２の表面粗さの傾斜角θの２倍の入
射角２θとなる窓孔4aを開口した遮光板４と、この窓孔
4aより入射した反射光を集光してラインセンサ１の受光
面に集光する集光レンズ５とラインセンサ１の受光光軸
線上に設けてある。FIG. 1 shows the configuration of this embodiment, and the line sensor 1
In front of the light shielding plate 4 having a window hole 4a having an incident angle 2θ which is twice the inclination angle θ of the surface roughness of the inspection object 2, and the window hole 4a.
It is provided on the light receiving optical axis of the line sensor 1 and a condenser lens 5 that collects the reflected light incident from 4a and collects it on the light receiving surface of the line sensor 1.
而してラインセンサ１の受光部の走査方向が被検査物２
の横方向に対して第２図に示すａ−ｂ−ｃ−ｄのように
斜めとなり、しかも被検査物２の表面に縦方向の波打ち
があっても、第３図で破線に示すラインセンサ１の視点
に於ける反射角は傾斜面a,cで夫々最小、最大となりこ
の最小と最大の範囲が丁度、傾斜角度θの約２倍とな
り、従ってこの角度２θの範囲の反射光がラインセンサ
１の受光面で受光されればラインセンサ１の受光走査検
知出力にばらつきが生じず、受光走査検知出力の波打ち
を減少させることができるのである。Therefore, the scanning direction of the light receiving portion of the line sensor 1 is the inspection object 2
2 is inclined with respect to the horizontal direction as shown in ab-c-d in FIG. 2 and the surface of the object to be inspected 2 is corrugated in the vertical direction, the line sensor shown by the broken line in FIG. The reflection angle from the viewpoint 1 is the minimum and the maximum on the inclined surfaces a and c, respectively, and the range between the minimum and the maximum is exactly twice the inclination angle θ. Therefore, the reflected light in the range of this angle 2θ is When the light is received by the light receiving surface of No. 1, the light receiving scanning detection output of the line sensor 1 does not vary, and the waviness of the light receiving scanning detection output can be reduced.
［発明の効果］ 本発明は縦方向に波打った被検査物の表面粗さの縦方向
の最大傾斜角度の約２倍の角度範囲の入射角の反射光を
通過させる遮光板と、遮光板を通過した反射光をライン
センサの受光面に集光する集光レンズとをラインセンサ
の受光光軸線上に設けてあるから、被検査物の表面が波
打ち、ラインセンサの受光走査方向が被検査物の横方向
に対して斜めとなっていても、被検査物からの反射光が
ラインセンサの受光走査方向の各受光部位において受光
量が殆どばらつくことなく受光することができ、結果ラ
インセンサの受光走査検知出力に波打ちが生じず、欠陥
があれば明確に受光走査検知出力の変化として捕えるこ
とができるという効果を奏する。EFFECTS OF THE INVENTION The present invention provides a light-shielding plate that allows reflected light having an incident angle of approximately twice the maximum vertical tilt angle of the surface roughness of a wavy object to pass therethrough, and a light-shielding plate. Since a condenser lens that collects the reflected light that has passed through the line sensor on the light receiving surface of the line sensor is provided on the light receiving optical axis of the line sensor, the surface of the inspected object corrugates and the light receiving scanning direction of the line sensor is inspected. Even if the object is oblique to the lateral direction, the reflected light from the object to be inspected can be received at each light receiving portion in the light receiving scanning direction of the line sensor with almost no variation in the amount of received light. The light receiving scanning detection output is not wavy, and if there is a defect, it can be clearly recognized as a change in the light receiving scanning detection output.
第１図は本発明の実施例の要部の構成図、第２図、第３
図は同上の動作説明図、第４図は従来例の構成図、第５
図は同上の動作説明図である。 １はラインセンサ、２は被検査物、３は信号処理回路、
４は遮光板、５は集光レンズである。FIG. 1 is a configuration diagram of a main part of an embodiment of the present invention, FIG. 2 and FIG.
FIG. 4 is a diagram for explaining the operation of the above, FIG. 4 is a configuration diagram of a conventional example, and FIG.
The figure is a diagram for explaining the operation of the above. 1 is a line sensor, 2 is an object to be inspected, 3 is a signal processing circuit,
Reference numeral 4 is a light shielding plate, and 5 is a condenser lens.
Claims (1)
を持つラインセンサにより被検査物の表面からの反射光
を受光走査検知し、受光量に応じたラインセンサからの
検知出力を信号処理回路で２値化して被検査物の表面の
欠陥を検知する表面検査機において、縦方向に波打った
被検査物の表面粗さの縦方向の最大傾斜角度の約２倍の
角度範囲の入射角の反射光を通過させる遮光板と、遮光
板を通過した反射光をラインセンサの受光面に集光する
集光レンズとをラインセンサの受光光軸線上に設けて成
ることを特徴とする表面検査機。1. A line sensor having a light receiving scanning direction parallel to the lateral direction of an object to be inspected detects light reflected from the surface of the object to be inspected, and outputs a detection output from the line sensor according to the amount of light received. In a surface inspection machine that detects defects on the surface of an object to be inspected by binarizing with a processing circuit, the surface roughness of the object to be inspected in the longitudinal direction is within an angle range about twice the maximum inclination angle in the longitudinal direction. A light-shielding plate that allows reflected light of an incident angle to pass through and a condenser lens that collects the reflected light that has passed through the light-shielding plate on the light-receiving surface of the line sensor are provided on the light-receiving optical axis of the line sensor. Surface inspection machine.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1095520A JPH0769275B2 (en) | 1989-04-15 | 1989-04-15 | Surface inspection machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1095520A JPH0769275B2 (en) | 1989-04-15 | 1989-04-15 | Surface inspection machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02275345A JPH02275345A (en) | 1990-11-09 |
| JPH0769275B2 true JPH0769275B2 (en) | 1995-07-26 |
Family
ID=14139842
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1095520A Expired - Fee Related JPH0769275B2 (en) | 1989-04-15 | 1989-04-15 | Surface inspection machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0769275B2 (en) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5265494A (en) * | 1975-11-26 | 1977-05-30 | Nippon Steel Corp | Method of detecting surface flaw of hot steel material |
| JPH0411422Y2 (en) * | 1985-04-19 | 1992-03-23 |
-
1989
- 1989-04-15 JP JP1095520A patent/JPH0769275B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02275345A (en) | 1990-11-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |