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JPH0772946B2 - Magneto-optical recording medium - Google Patents
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JPH0772946B2 - Magneto-optical recording medium - Google Patents

Magneto-optical recording medium

Info

Publication number
JPH0772946B2
JPH0772946B2 JP59211321A JP21132184A JPH0772946B2 JP H0772946 B2 JPH0772946 B2 JP H0772946B2 JP 59211321 A JP59211321 A JP 59211321A JP 21132184 A JP21132184 A JP 21132184A JP H0772946 B2 JPH0772946 B2 JP H0772946B2
Authority
JP
Japan
Prior art keywords
magneto
recording medium
film
optical recording
amorphous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59211321A
Other languages
Japanese (ja)
Other versions
JPS6190349A (en
Inventor
新司 高山
敏夫 新原
克弘 金子
愃 杉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59211321A priority Critical patent/JPH0772946B2/en
Priority to DE19853536210 priority patent/DE3536210A1/en
Publication of JPS6190349A publication Critical patent/JPS6190349A/en
Priority to US07/294,941 priority patent/US4923765A/en
Publication of JPH0772946B2 publication Critical patent/JPH0772946B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/10582Record carriers characterised by the selection of the material or by the structure or form
    • G11B11/10586Record carriers characterised by the selection of the material or by the structure or form characterised by the selection of the material
    • G11B11/10589Details
    • G11B11/10591Details for improving write-in properties, e.g. Curie-point temperature
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03GELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00Recording-members for original recording by exposure, e.g. to light, to heat or to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/16Layers for recording by changing the magnetic properties, e.g. for Curie-point-writing
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/10582Record carriers characterised by the selection of the material or by the structure or form
    • G11B11/10586Record carriers characterised by the selection of the material or by the structure or form characterised by the selection of the material

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Thin Magnetic Films (AREA)

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明はレーザ光を用いて情報の記録、再生,消去を行
なう光磁気記録に係り、特に記録感度大で、再生時の信
号と雑音の比C/Nを向上するのに好適な、磁気光学効果
大の光磁気記録媒体に関する。
Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to magneto-optical recording in which information is recorded, reproduced and erased by using a laser beam, and particularly, the recording sensitivity is high and the ratio of signal and noise at the time of reproduction. The present invention relates to a magneto-optical recording medium having a large magneto-optical effect, which is suitable for improving C / N.

〔発明の背景〕 最近、書き換え可能な光記録方式である光磁気記録の記
録材料として、比較的大きなカ−回転角が得られる希土
類−鉄族系非晶質膜が注目を浴びている。これらの非晶
質膜の中でも、特に、カー回転角θの大きい値が得ら
れるTb−Fe−Co非晶質膜の研究開発が活発化している。
例えば、特開昭58−73746等がその代表的なものであ
る。しかしこれら合金系の非晶質膜も含めて、従来の非
晶質膜では次の如き問題があった。
BACKGROUND OF THE INVENTION Recently, as a recording material for magneto-optical recording, which is a rewritable optical recording system, a rare earth-iron group amorphous film, which can obtain a relatively large curve rotation angle, has attracted attention. Among these amorphous films, research and development of a Tb-Fe-Co amorphous film, in which a large value of the Kerr rotation angle θ k can be obtained, is particularly active.
For example, Japanese Patent Laid-Open No. 58-73746 is a typical example. However, conventional amorphous films including these alloy-based amorphous films have the following problems.

(1)磁化が飽和した時のカ−回転角は大きいが、残留
磁化でのカー回転角が小さいため再生信号が十分とれな
い。
(1) The curl rotation angle is large when the magnetization is saturated, but the Kerr rotation angle in the residual magnetization is small, so that a reproduction signal cannot be obtained sufficiently.

(2)残留磁化でのカー回転角は比較的大きいが、キュ
リー温度が高すぎるため記録感度が悪く、そのため再生
信号が十分得られない。
(2) The Kerr rotation angle due to remanent magnetization is relatively large, but the Curie temperature is too high and the recording sensitivity is poor. Therefore, a sufficient reproduced signal cannot be obtained.

(3)残留磁化でのカー回転角は比較的大きく、キュリ
ー温度も比較的低いが、記録に際して、記録ドメインの
中心に書けない部分が生じるため変調ノイズが大きくな
ってしまい、その結果十分な再生時の信号と雑音の比C/
Nがとれない。
(3) The Kerr rotation angle due to remanent magnetization is relatively large, and the Curie temperature is relatively low, but at the time of recording, an unwritable portion occurs at the center of the recording domain, which causes large modulation noise, resulting in sufficient reproduction. Signal-to-noise ratio C /
N cannot be taken.

〔発明の目的〕[Object of the Invention]

本発明の目的は磁気光学効果が十分に大きく、高い再生
C/N比(あるいはS/N比)が得られ、実用に好適な非晶質
光磁気記録材料を提供することにある。
The object of the present invention is to achieve a sufficiently high magneto-optical effect and high reproduction.
An object is to provide an amorphous magneto-optical recording material that can obtain a C / N ratio (or S / N ratio) and is suitable for practical use.

〔発明の概要〕[Outline of Invention]

非晶質垂直磁化膜を実際に光磁気記録材料として用いる
場合、次の如きことが要請されるとみなされていた。
When the amorphous perpendicularly magnetized film was actually used as a magneto-optical recording material, it was considered that the following was required.

(1)キュリー温度(Tc)は半導体レーザ光のパワーの
制限や、記録感度及び膜寿命の点で約250℃以下である
のが望ましい。
(1) It is desirable that the Curie temperature (Tc) is about 250 ° C. or lower in terms of the power limit of semiconductor laser light, recording sensitivity and film life.

(2)また保持力(Hc)も記録情報の熱安定性の点から
約1kOe以上であるのが望ましい。しかし本発明者等は以
上の要請のみではなく、キュリー温度以外に補償温度
(Tcomp)も、Tcとのかねあいで記録感度、再生ノイズ
等に大きく影響を及ぼすことを見い出した。
(2) Also, the holding power (Hc) is preferably about 1 kOe or more from the viewpoint of thermal stability of recorded information. However, the present inventors have found that not only the above requirements but also the compensation temperature (Tcomp) in addition to the Curie temperature have a great influence on the recording sensitivity, reproduction noise, etc. in the balance with Tc.

本発明の光磁気記録媒体は次の如き構成を有する。即
ち、 膜面に垂直な方向に磁化容易軸を有し、実質的に非晶質
である希土類−鉄族系光磁気記録媒体において、補償温
度がキュリー温度以上か、あるいは補償温度がキューリ
ー温度よりも低くしかもその差が100℃以内になること
を特徴とする。
The magneto-optical recording medium of the present invention has the following constitution. That is, in a rare earth-iron group magneto-optical recording medium that has an easy axis of magnetization in the direction perpendicular to the film surface and is substantially amorphous, the compensation temperature is equal to or higher than the Curie temperature, or the compensation temperature is higher than the Curie temperature. It is also characterized by being low and the difference being within 100 ° C.

上記希土類−鉄族系光磁気記録媒体の二元系,三元系、
或いは四元系材料の例としてはTb−Fe−Co,Tb−Fe,Tb−
Gd−Fe,Tb−Sm−Fe,Tb−Co,Tb−Dy−Fe,Tb−Dy−Fe−C
o,Tb−Gd−Fe−Co,Tb−Sm−Fe−Co,Tb−Er−Fe−Co,Dy
−Sm−Fe−Co等が揚げられる。
Binary system, ternary system of the rare earth-iron group magneto-optical recording medium,
Alternatively, examples of quaternary materials include Tb-Fe-Co, Tb-Fe, Tb-
Gd-Fe, Tb-Sm-Fe, Tb-Co, Tb-Dy-Fe, Tb-Dy-Fe-C
o, Tb-Gd-Fe-Co, Tb-Sm-Fe-Co, Tb-Er-Fe-Co, Dy
-Sm-Fe-Co etc. are fried.

又、記録された情報が安定に存在するためにはごく一般
にはキュリー温度は100℃以上(より好ましくは150℃以
上)となしている。
In addition, the Curie temperature is generally set to 100 ° C. or higher (more preferably 150 ° C. or higher) so that recorded information can be stably present.

しかし、Tcが250℃以下であっても、Tcompが室温附近に
あると記録時に形状均一な記録ドメインが形成されず、
そのために高い変調ノイズが生じ、再生時のC/Nが低下
してしまうことがわかった。このことは記録時の飽和磁
化の大きさとその温度変化に大きく依存する。
However, even if Tc is 250 ° C. or lower, if Tcomp is near room temperature, a recording domain with a uniform shape is not formed during recording,
Therefore, it was found that high modulation noise occurs and C / N at the time of reproduction decreases. This largely depends on the magnitude of saturation magnetization during recording and its temperature change.

Tcompが室温以上の場合はTcompがTc以上か、あるいはTc
より低くてもTcとの差が100℃以内のTc近傍、より好ま
しくはTc−Tcomp_60℃の範囲内にあるのが望ましい。一
般に、希土類−鉄族系光気記録媒体においては、これら
の温度範囲を満足する組成範囲は、補償組成よりも希土
類元素に富んだ組成側に限られていることがわかった。
その代表例として、第1図にTb−Fe−Co非晶質垂直磁化
膜(TbxFe100-x-yCoy)のキュリー温度Tcと補償温度Tco
mpの各Co濃度に対するTb濃度依存性を示す。図に矢印は
補償組成のTb濃度を示す。図において、1の曲線はy=
30.4のTc,2はy=17.5のTc,3はy=11のTc,4はy=10.3
のTc,5はy=5のTc,6はy=30.4のTcomp,7はy=17.5
のTcomp,8はy=11のTcomp,9はy=10.3のTcomp,10はy
=5のTcompを各々示している。図から、Co量が増すに
従い、Tcは上昇し、TcとTcompが一致するTb濃度が高濃
度側に移行していることがわかる。さて、上記でTcomp
がTc近傍あるいはそれ以上の組成は高Tb濃度側組成(す
なわち補償組成よりもTb元素に富んだ組成)であること
がわかる。従って、第1図の結果から、Tb−Fe−Co非晶
質垂直磁化膜の最適組成は、補償組成よりもTb元素に富
んだTb24〜30原子%,コバルト7〜14原子%,残部が鉄
元素より成る狭い組成範囲である。ここでカ−回転角θ
が0.3゜(λ=633nm)以上の高い値を得るためにCo量
の下限は8原子%である。勿論、これら三元系に他の希
土類元素や遷移金属元素等の不純物元素を少量添加する
ことにより、さらに特性向上の最適化が可能であること
は言うまでもない。
If Tcomp is room temperature or higher, Tcomp is Tc or higher, or Tc
Even if it is lower, it is desirable that the difference from Tc is within the vicinity of Tc within 100 ° C, and more preferably within the range of Tc-Tcomp_60 ° C. In general, it has been found that in the rare earth-iron group optical gas recording medium, the composition range satisfying these temperature ranges is limited to the composition side rich in the rare earth element rather than the compensation composition.
As a typical example, FIG. 1 shows the Curie temperature Tc and the compensation temperature Tco of a Tb-Fe-Co amorphous perpendicular magnetization film (Tb x Fe 100-xy Co y ).
The dependence of Tb concentration on each Co concentration of mp is shown. The arrow in the figure indicates the Tb concentration of the compensation composition. In the figure, the curve of 1 is y =
30.4 Tc, 2 is y = 17.5 Tc, 3 is y = 11 Tc, 4 is y = 10.3
Of Tc, 5 is Tc of y = 5, 6 is Tcomp of y = 30.4, and 7 is y = 17.5.
, Tcomp of 8 is y = 11, 9 is Tcomp of y = 10.3, and 10 is y
= 5 for each Tcomp. From the figure, it can be seen that as the amount of Co increases, Tc rises, and the Tb concentration at which Tc and Tcomp match shifts to the high concentration side. Well, above Tcomp
It can be seen that the composition near or above Tc is a composition on the high Tb concentration side (that is, a composition richer in Tb element than the compensation composition). Therefore, from the results of FIG. 1, the optimum composition of the Tb-Fe-Co amorphous perpendicular magnetization film is 24 to 30 atomic% of Tb which is richer in Tb element than the compensating composition, 7 to 14 atomic% of cobalt, and the balance is iron. A narrow composition range consisting of elements. Where the car rotation angle θ
In order to obtain a high value of k of 0.3 ° (λ = 633 nm) or more, the lower limit of Co content is 8 atom%. Needless to say, it is possible to further improve the characteristics by adding a small amount of another impurity element such as a rare earth element or a transition metal element to the ternary system.

〔発明の実施例〕Example of Invention

以上、本発明を実施例を用いて説明する。 The present invention is described above with reference to the embodiments.

本発明の非晶質合金膜は直径8インチのCo円板上に1×
1cm2の希土類元素と鉄元素等の遷移金属元素を面積化で
所定の組成になるように配置した複数ターゲットを用い
て、周知のマグネトロンスパッタ法で作製した。また記
録・再生評価用ディスクとして、5″φガラスディスク
上にUV樹脂でトラッキング用の溝を形成し、その上にTb
−Fe−Co膜(膜厚約1000Å)、SiO2膜(膜厚約700Å)
の順に被膜したものを用いた。
The amorphous alloy film of the present invention is 1 × on a Co disk having a diameter of 8 inches.
It was produced by a well-known magnetron sputtering method using a plurality of targets in which 1 cm 2 of rare earth elements and transition metal elements such as iron elements were arranged so as to have a predetermined composition in area. Also, as a recording / playback evaluation disk, a tracking groove was formed with UV resin on a 5 ″ φ glass disk, and Tb was formed on it.
-Fe-Co film (film thickness approx. 1000Å), SiO 2 film (film thickness approx. 700Å)
Was used in this order.

本発明の1実施例として、補償組成よりもTb元素に富ん
だ組成の代表例として、Tb26 Fe62 Co12,Tb28 Fe59 Co1
3,Tb28.5 Fe60.5,Co11等の組成の非晶質垂直磁化膜を記
録膜とした。以下にそれらの膜特性を示す。キュリー温
度Tc=180〜230℃,補償温度Tcomp≧180℃,保持力Hc=
1〜8kOe,飽和磁化Ms=100〜190emu/cc,カー回転角θ
(λ=633nm)=0.3〜0.35゜同様にして、これらの膜を
用いて5″φ多層膜ディスクを作製した。この場合で
も、記録レーザ光パワー5mW〜9mWの時、記録時の外部磁
場200Oe以上で変調ノイズが零になる。この条件で、C/N
は51〜54dBであった。
As one example of the present invention, as a representative example of a composition richer in Tb element than the compensating composition, Tb26 Fe62 Co12, Tb28 Fe59 Co1
An amorphous perpendicular magnetization film having a composition such as 3, Tb28.5 Fe60.5, Co11 was used as the recording film. The film characteristics thereof are shown below. Curie temperature Tc = 180 to 230 ℃, compensation temperature Tcomp ≧ 180 ℃, holding power Hc =
1 to 8 kOe, saturation magnetization Ms = 100 to 190 emu / cc, Kerr rotation angle θ k
(Λ = 633 nm) = 0.3 to 0.35 ° In the same manner, a 5 ″ φ multilayer film disk was manufactured using these films. Even in this case, when the recording laser light power was 5 mW to 9 mW, the external magnetic field at the time of recording was 200 Oe. With the above, the modulation noise becomes zero.
Was 51 to 54 dB.

上述の実施例において希土類−鉄族系光磁気記録媒体と
して、Tb−Fe−Coを代表例として示したが、その例を前
述した希土類−鉄族系光磁気記録媒体において同様の効
果を奏する。
Although Tb-Fe-Co is shown as a representative example of the rare earth-iron group magneto-optical recording medium in the above-described embodiments, the same effect can be obtained in the rare earth-iron group magneto-optical recording medium described above.

以上の実施例から明らかなように、本発明の非晶質垂直
磁化膜は、変調ノイズがほとんど無く、干渉構造で多重
反射によりカー回転角を見かけ上あげなくても高いC/N
値が得られることがわかった。これらの膜と屈折率の比
較的高いZnS,AlN,Si3N4,BN,SiO等の干渉膜とを組み合せ
た干渉多層膜ディスクでは、さらに高い56dB以上の高C/
Nが得られる。
As is clear from the above examples, the amorphous perpendicular magnetization film of the present invention has almost no modulation noise and has a high C / N ratio even if the Kerr rotation angle is not apparently increased due to multiple reflection in the interference structure.
It turns out that a value is obtained. An interference multilayer film disk that combines these films and an interference film of ZnS, AlN, Si 3 N 4 , BN, SiO, etc., which has a relatively high refractive index, has an even higher C / value of 56 dB or more.
N is obtained.

【図面の簡単な説明】[Brief description of drawings]

第1図はTb−Fe−Co非晶質垂直磁化膜のキュリー温度Tc
と補償温度Tcompの各Co濃度、yに対するTb濃度、x依
存性を示す図である。
Figure 1 shows the Curie temperature Tc of the Tb-Fe-Co amorphous perpendicular magnetization film.
FIG. 3 is a diagram showing the dependence of each compensation temperature Tcomp on Co concentration, Tb concentration on y, and x dependency.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 杉田 愃 東京都国分寺市東恋ヶ窪1丁目280番地 株式会社日立製作所中央研究所内 (56)参考文献 特開 昭58−159252(JP,A) 特開 昭59−159510(JP,A) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor, Sugita 1-280, Higashi Koigakubo, Kokubunji, Tokyo (56) References JP-A 58-159252 (JP, A) JP-A 59 -159510 (JP, A)

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】膜面に垂直な方向に磁化容易軸を待つ、希
土類−鉄族系非晶質膜を有する記録媒体において、前記
記録媒体は原子比率でテルビウム24〜30%,コバルト7
〜14%,残部実質的に鉄より成る補償組成よりも希土類
元素に富み実質的に非晶質であり、かつ、キュリー温度
が250℃以下で補償温度が50℃以上であることを特徴と
する光磁気記録媒体。
1. A recording medium having a rare earth-iron group amorphous film, which waits for an easy axis of magnetization in a direction perpendicular to the film surface, wherein the recording medium has an atomic ratio of terbium of 24 to 30% and cobalt of 7.
〜14%, the balance is richer in rare earth elements than the compensation composition consisting essentially of iron, and is substantially amorphous, and the Curie temperature is 250 ° C or lower and the compensation temperature is 50 ° C or higher. Magneto-optical recording medium.
JP59211321A 1984-10-11 1984-10-11 Magneto-optical recording medium Expired - Lifetime JPH0772946B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP59211321A JPH0772946B2 (en) 1984-10-11 1984-10-11 Magneto-optical recording medium
DE19853536210 DE3536210A1 (en) 1984-10-11 1985-10-10 Magneto-optical recording medium
US07/294,941 US4923765A (en) 1984-10-11 1989-01-06 Magneto-optical recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59211321A JPH0772946B2 (en) 1984-10-11 1984-10-11 Magneto-optical recording medium

Publications (2)

Publication Number Publication Date
JPS6190349A JPS6190349A (en) 1986-05-08
JPH0772946B2 true JPH0772946B2 (en) 1995-08-02

Family

ID=16604010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59211321A Expired - Lifetime JPH0772946B2 (en) 1984-10-11 1984-10-11 Magneto-optical recording medium

Country Status (1)

Country Link
JP (1) JPH0772946B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2703913B2 (en) * 1986-12-26 1998-01-26 キヤノン株式会社 Recording / reproducing apparatus and recording / reproducing method

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59159510A (en) * 1983-03-01 1984-09-10 Canon Inc magneto-optical recording medium
JPS58159252A (en) * 1982-03-17 1983-09-21 Canon Inc magneto-optical recording medium

Also Published As

Publication number Publication date
JPS6190349A (en) 1986-05-08

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