JPH0774104B2 - Method for manufacturing multifunctional ceramics - Google Patents
Method for manufacturing multifunctional ceramicsInfo
- Publication number
- JPH0774104B2 JPH0774104B2 JP61133213A JP13321386A JPH0774104B2 JP H0774104 B2 JPH0774104 B2 JP H0774104B2 JP 61133213 A JP61133213 A JP 61133213A JP 13321386 A JP13321386 A JP 13321386A JP H0774104 B2 JPH0774104 B2 JP H0774104B2
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Description
【発明の詳細な説明】 [発明の目的] (産業上の利用分野) 本発明は、多機能セラミックの製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application] The present invention relates to a method for producing a multifunctional ceramic.
(従来の技術) 近年、Si3N4、SiC、AlN等を中心とするファインセラミ
ックスが新素材として注目されている。これらの材料
は、主として高温での優れた機械的性質を有することか
ら、かかる性質を着目した応用が考えられており、高強
度、高耐摩耗素材を目的とした開発がなされきた。しか
しながら、用途の多用化、技術水準の向上等により、こ
れらセラミックスが本来保有している特性を維持したま
ま、他の機能を同時に兼ね備えた複合機能材料が要望さ
れつつある。付加的な機能としては、例えば導電性、潤
滑性、磁性、耐食性、熱伝導性等の多数の物理的機能、
化学的機能が挙げられる。(Prior Art) In recent years, fine ceramics such as Si 3 N 4 , SiC, and AlN have attracted attention as new materials. Since these materials mainly have excellent mechanical properties at high temperatures, applications focusing on such properties have been considered, and development aimed at high-strength, high-wear resistant materials has been made. However, due to the diversification of applications and improvement of the technical level, there has been a demand for a composite functional material having other functions at the same time while maintaining the characteristics originally possessed by these ceramics. Additional functions include numerous physical functions such as conductivity, lubricity, magnetism, corrosion resistance, thermal conductivity, etc.
It has a chemical function.
このような要望から、従来より種々の複合機能素材が提
案されている。しかしながら、これら複合機能材料はセ
ラミックスに他の機能又は特性を有する物質を単に添加
したものである。従って、かかる素材は製造においての
複合化が困難であること、付加的な機能を発揮させるた
めに比較的多量の添加組成が選ばれることから基体とし
てのセラミックスの優れた特性が損われ、結果的には所
期の目的を備えた新素材を得ることが困難となる問題が
あった。From such a demand, various composite functional materials have been conventionally proposed. However, these composite functional materials are ceramics to which substances having other functions or characteristics are simply added. Therefore, it is difficult to compound such a material in manufacturing, and a relatively large amount of additive composition is selected to exert an additional function. Has a problem that it is difficult to obtain a new material having the intended purpose.
(発明が解決しようとする問題点) 本発明は、従来の混合等により得られる複合材料におい
て2つ以上の機能を保有させるための複合化技術の手法
確立と、製造された材料自体の特性的な限界が問題とな
っていることに着目し、これらを解決することにより窒
化ケイ素系または窒化アルミニウム系のセラミックの特
性と特定の被覆物質(粉末物質)による付加的機能を合
せもつ多機能セラミックを容易に製造し得る方法を提供
しようとするものである。(Problems to be Solved by the Invention) The present invention is to establish a technique of a composite technology for retaining two or more functions in a composite material obtained by conventional mixing and the like, and to characterize the manufactured material itself. However, by solving these problems, a multifunctional ceramic having the characteristics of silicon nitride-based or aluminum nitride-based ceramics and the additional function of a specific coating material (powdered material) can be obtained. It is intended to provide a method that can be easily manufactured.
(問題点を解決するための手段) 本願第1の発明は、セラミック粉末を含む顆粒体と前記
顆粒体に比べて微細な粉末物質とを混合し、転動させて
前記顆粒体の表面を前記粉末物質により一様に被覆して
包み込む工程と、 前記粉末物質被覆顆粒体を圧縮して凝集体に成形した
後、その成形体を焼結する工程とを具備し、 前記セラミック粉末を含む顆粒体は、窒化ケイ素と、希
土類酸化物又は熱処理により該希土類酸化物を生成する
化合物と、Al2O3、AlN、MgO、TiO2および加熱処理によ
りそれらの酸化物を生成する化合物から選ばれる1種又
は2種以上の混合物とからなり、 前記粉末物質は、前記セラミックと異なり、Al、B、S
i、Tiの酸化物、炭化物、窒化物、Al、Si、Tiの硼化物
から選ばれる少なくとも1種のセラミックからなること
を特徴とする多機能セラミックの製造方法である。な
お、ここに用いる化合物としては金属硝酸塩、金属炭酸
塩等を挙げることができる。(Means for Solving Problems) In the first invention of the present application, a granule containing a ceramic powder and a powder substance finer than that of the granule are mixed and tumbled to form a surface of the granule. Granules containing the ceramic powder, comprising: uniformly coating with a powder substance and wrapping the powder substance; and compressing the powder substance-coated granules to form an aggregate, and then sintering the compact. Is one kind selected from silicon nitride, a rare earth oxide or a compound that produces the rare earth oxide by heat treatment, Al 2 O 3 , AlN, MgO, TiO 2 and a compound that produces those oxides by heat treatment. Alternatively, the powder substance is different from the ceramic in that Al, B, S
The method for producing a multifunctional ceramic is characterized by comprising at least one ceramic selected from oxides of i and Ti, carbides, nitrides, borides of Al, Si, and Ti. Examples of the compound used here include metal nitrates and metal carbonates.
本願第2の発明は、セラミック粉末を含む顆粒体と前記
顆粒体に比べて微細な粉末物質とを混合し、転動させて
前記顆粒体の表面を前記粉末物質により一様に被覆して
包み込む工程と、 前記粉末物質被覆顆粒体を圧縮して凝集体に成形した
後、その成形体を焼結する工程とを具備し、 前記セラミック粉末を含む顆粒体は、窒化アルミニウム
と、希土類酸化物、アルカリ土類酸化物および加熱処理
によりそれらの酸化物を生成する化合物から選ばれる1
種又は2種以上の混合物とからなり、 前記粉末物質は、前記セラミックと異なり、Al、B、S
i、Tiの酸化物、炭化物、窒化物、Al、Si、Tiの硼化物
から選ばれる少なくとも1種のセラミックからなること
を特徴とする多機能セラミックの製造方法である。な
お、ここに用いる化合物としては金属硝酸塩、金属炭酸
塩等を挙げることができる。A second aspect of the present invention is to mix a granule containing ceramic powder with a fine powder substance as compared with the granule and roll the mixture to uniformly coat the surface of the granule with the powder substance. A step of compressing the powder substance-coated granules to form an aggregate, and then sintering the compact, wherein the granules containing the ceramic powder are aluminum nitride and a rare earth oxide, 1 selected from alkaline earth oxides and compounds that form these oxides by heat treatment
And a mixture of two or more kinds, the powder substance is different from the ceramic, and is Al, B, S.
The method for producing a multifunctional ceramic is characterized by comprising at least one ceramic selected from oxides of i and Ti, carbides, nitrides, borides of Al, Si, and Ti. Examples of the compound used here include metal nitrates and metal carbonates.
本願第1、第2の発明において、前記セラミック粉末を
含む顆粒体と前記粉末物質との配合割合は前記顆粒体に
対して前記粉末物質を容量割合で20〜40%の範囲するこ
とが望ましい。この理由は、前記粉末物質の配合量を20
容量%未満にすると、製造された多機能セラミックに目
的とする粉末物質の機能を充分に付与することが困難に
なる。一方、前記粉末物質の配合量が40容量%を越える
とセラミック自体の優れた性質が損われる恐れがある。In the first and second inventions of the present application, the mixing ratio of the granules containing the ceramic powder and the powder substance is preferably in the range of 20 to 40% by volume of the powder substance with respect to the granules. The reason for this is that the blending amount of the powder substance is 20
When the content is less than the volume%, it becomes difficult to sufficiently impart the intended function of the powder substance to the produced multifunctional ceramic. On the other hand, if the content of the powder substance exceeds 40% by volume, the excellent properties of the ceramic itself may be impaired.
本願第1、第2の発明において、前記顆粒体を作るには
例えば前記セラミック粉末を含む物質に溶剤、バイン
ダ、界面活性剤等を添加してスラリ状にし、これをスプ
レードライヤで処理する方法を採用することができる。In the first and second inventions of the present application, in order to form the granules, for example, a method of adding a solvent, a binder, a surfactant or the like to a substance containing the ceramic powder to form a slurry and treating the slurry with a spray dryer is used. Can be adopted.
本願第1、第2の発明において、前記セラミック粉末を
含む顆粒体と前記粉末物質との転動工程は前記顆粒体表
面に前記粉末物質を完全に被覆して前記粉末物質で顆粒
体を包み込むまで行なう。このようなことから前記顆粒
体の平均粒径は、10μm以上で、前記粉末物質の平均粒
径は前記顆粒体の径の1/10より小さくすることが望まし
い。In the first and second inventions of the present application, the step of rolling the granular material containing the ceramic powder and the powder substance is performed until the surface of the granular substance is completely covered with the powder substance and the granular substance is wrapped in the granular substance. To do. Therefore, it is desirable that the average particle size of the granules is 10 μm or more, and the average particle size of the powder substance is smaller than 1/10 of the diameter of the granules.
本願第1、第2の発明において、前記粉末物質被覆顆粒
体の圧縮成形は500〜2000kg/cm2の圧力で行なうことが
望ましい。この理由は、前記成形圧力を500kg/cm2未満
にすると、成形密度が低くなるため焼結密度を高くでき
なくなる恐れがある。一方、前記成形圧力が2000kg/cm2
を越えると成形体に過度の歪みを発生させ焼結後に変形
してしまう恐れがある。In the first and second inventions of the present application, it is desirable that compression molding of the powder substance-coated granules is performed at a pressure of 500 to 2000 kg / cm 2 . The reason for this is that if the molding pressure is less than 500 kg / cm 2 , the molding density will be low and the sintering density may not be increased. On the other hand, the molding pressure is 2000 kg / cm 2
If it exceeds, the molded body may be excessively strained and deformed after sintering.
本願第1、第2の発明において、前記成形体の焼結温度
は、組合わせられる顆粒体及び粉末物質の種類並びにそ
れら顆粒体と粉末物質が反応を起こさない条件に選定さ
れるが、通常、1300〜2200℃の範囲で行なえばよい。In the first and second inventions of the present application, the sintering temperature of the molded body is selected in accordance with the types of granules and powder substances to be combined and conditions under which the granules and powder substances do not react. It may be carried out in the range of 1300 to 2200 ° C.
(作用) 本願第1の発明によれば、セラミック粉末を含む顆粒体
と前記顆粒体に比べて微細な粉末物質とを混合し、転動
させて前記顆粒体の表面を前記粉末物質により一様に被
覆して包み込む工程と、この粉末物質被覆顆粒体を圧縮
して凝集体に成形した後、その成形体を焼結する工程と
を具備し、前記セラミック粉末を含む顆粒体として窒化
ケイ素と、希土類酸化物又は熱処理により該希土類酸化
物を生成する化合物と、Al2O3、AlN、MgO、TiO2および
加熱処理によりそれらの酸化物を生成する化合物から選
ばれる1種又は2種以上の混合物とからなる窒化ケイ素
およびその焼結助剤の材料を選定し、前記粉末物質とし
て前記顆粒体に比べて微細で、前記セラミックと異な
り、Al、B、Si、Tiの酸化物、炭化物、窒化物、Al、S
i、Tiの硼化物から選ばれる少なくとも1種のセラミッ
クからなる材料を選定することによって、緻密で、かつ
前記顆粒体の良好な自己焼結により形成された窒化ケイ
素セラミックの優れた耐摩耗性と、窒化ケイ素粒子に網
目状に均一に分散一体化された特定のセラミックからな
る粉末物質により付加された例えば自己潤滑性、高熱伝
導性、電気導電性のような別の機能とを有する多機能セ
ラミックを容易に製造することができる。しかも、前記
網目状に均一に分散一体化された粉末物質は特定のセラ
ミックからなるため、網目状部分での耐酸化性、耐熱性
等が優れた多機能セラミックを製造できる。(Operation) According to the first invention of the present application, the granules containing the ceramic powder and the powder substance finer than the granules are mixed and rolled to make the surface of the granules uniform by the powder substance. And a step of compressing the powder substance-coated granules to form an agglomerate and sintering the compact, and silicon nitride as a granule containing the ceramic powder, Rare earth oxides or compounds that form the rare earth oxides by heat treatment, and one or more mixtures selected from Al 2 O 3 , AlN, MgO, TiO 2 and compounds that form these oxides by heat treatment. The material of silicon nitride and its sintering aid consisting of and is selected, which is finer than the above-mentioned granules as the powder substance, and is different from the above-mentioned ceramics, oxides, carbides, and nitrides of Al, B, Si, and Ti. , Al, S
By selecting a material composed of at least one ceramic selected from borides of i and Ti, it is possible to obtain the excellent wear resistance of a silicon nitride ceramic that is dense and is formed by good self-sintering of the granules. , A multi-functional ceramic with additional functions such as self-lubricating, high thermal conductivity, electrical conductivity added by a powdered material consisting of a specific ceramic which is uniformly dispersed and integrated in a silicon nitride particle Can be easily manufactured. Moreover, since the powder substance uniformly dispersed and integrated in the mesh form is made of a specific ceramic, it is possible to manufacture a multifunctional ceramic having excellent oxidation resistance and heat resistance in the mesh part.
また、本願第2の発明によればセラミック粉末を含む顆
粒体と前記顆粒体に比べて微細な粉末物質とを混合し、
転動させて前記顆粒体の表面を前記粉末物質により一様
に被覆して包み込む工程と、この粉末物質被覆顆粒体を
圧縮して凝集体に成形した後、その成形体を焼結する工
程とを具備し、前記セラミック粉末を含む顆粒体として
窒化アルミニウムと、希土類酸化物、アルカリ土類酸化
物および加熱処理によりそれら酸化物を生成する化合物
から選ばれる1種又は2種以上の混合物とからなる窒化
アルミニウムおよびその焼結助剤の材料を選定し、前記
粉末物質として前記顆粒体に比べて微細で、かつ前記セ
ラミックと異なり、Al、B、Si、Tiの酸化物、炭化物、
窒化物、Al、Si、Tiの硼化物から選ばれる少なくとも1
種のセラミックからなる材料を選定することによって、
緻密で、かつ前記顆粒体の良好な自己焼結により形成さ
れた窒化アルミニウムセラミックの優れた熱伝導性、耐
摩耗性と、窒化アルミニウム粒子に網目状に均一に分散
一体化された粉末物質により付加された例えば自己潤滑
性のような別の機能とを有する多機能セラミックを容易
に製造することができる。しかも、前記網目状に均一に
分散一体化された粉末物質は特定のセラミックからなる
ため、網目状部分での耐酸化性、耐熱性等が優れた多機
能セラミックを製造できる。According to the second invention of the present application, a granule containing ceramic powder and a powder substance finer than the granule are mixed,
A step of rolling to uniformly coat the surface of the granules with the powder substance and wrapping, and a step of compressing the powder substance-coated granules to form an agglomerate and then sintering the compact. And aluminum nitride as a granule containing the ceramic powder, and one or a mixture of two or more selected from rare earth oxides, alkaline earth oxides, and compounds that generate these oxides by heat treatment. A material of aluminum nitride and its sintering aid is selected, which is finer than the above-mentioned granules as the powder substance and different from the above-mentioned ceramics, oxides, carbides of Al, B, Si and Ti,
At least 1 selected from nitrides, borides of Al, Si and Ti
By selecting a material consisting of a variety of ceramics,
Dense and excellent thermal conductivity and wear resistance of aluminum nitride ceramics formed by good self-sintering of the above granules, and added by powder material uniformly dispersed and integrated in aluminum nitride particles in a mesh A multifunctional ceramic having a specified function such as self-lubrication can be easily manufactured. Moreover, since the powder substance uniformly dispersed and integrated in the mesh form is made of a specific ceramic, it is possible to manufacture a multifunctional ceramic having excellent oxidation resistance and heat resistance in the mesh part.
(発明の実施例) 以下、本発明の実施例を詳細に説明する。(Examples of the Invention) Examples of the present invention will be described in detail below.
実施例1 まず、平均粒径0.85μmのSi3N4粉末90重量%、平均粒
径0.95μmのAl2O3粉末2重量%、平均粒径0.90μmのY
2O3粉末5重量%、平均粒径0.85μmのAlN粉末2重量%
及び平均粒径0.70μmのTiO2粉末1重量%からなる混合
粉に溶剤、界面改質剤を加えてスラリとし、このスラリ
をスプレードライヤにより平均粒径100μmのSi3N4系顆
粒体を作製した。Example 1 First, 90% by weight of Si 3 N 4 powder having an average particle size of 0.85 μm, 2% by weight of Al 2 O 3 powder having an average particle size of 0.95 μm, and Y having an average particle size of 0.90 μm.
2 O 3 powder 5% by weight, average particle diameter 0.85μm of AlN powder 2 wt%
Also, a solvent and an interfacial modifier are added to a mixed powder consisting of 1% by weight of TiO 2 powder having an average particle size of 0.70 μm to make a slurry, and the slurry is used to produce Si 3 N 4 type granules having an average particle size of 100 μm. did.
次いで、前記Si3N4系顆粒体80重量%と平均粒径1.2μm
の窒化硼素(BN)粉末20重量%をポットに収納し、回転
によりそれらを30分間転動させて顆粒体表面をBN粉末に
より被覆して包み込んだ。つづいて、このBN粉末被覆顆
粒体を1000kg/cm2の圧力で30mm×30mm×6mmの寸法に成
形した後、この成形体を700℃で脱脂し、更に1800℃の
窒素雰囲気にて焼結して焼結体を製造した。Next, 80% by weight of the Si 3 N 4 system granules and an average particle size of 1.2 μm
20% by weight of the boron nitride (BN) powder was stored in a pot, which was rolled for 30 minutes by rotation to cover the surface of the granule with the BN powder and wrap it. Subsequently, the BN powder-coated granules were molded at a pressure of 1000 kg / cm 2 into a size of 30 mm × 30 mm × 6 mm, the molded body was degreased at 700 ° C, and further sintered in a nitrogen atmosphere at 1800 ° C. To produce a sintered body.
得られた焼結体は、緻密化度合が96%で、かつBNがSi3N
4系顆粒体に対して網目状に分散一体化した構造を有す
るものであった。また、この焼結体はSi3N4セラミック
の耐摩耗性とBNの自己潤滑性を兼ね備えた複合機能を有
する新素材であることが確認された。The obtained sintered body had a densification degree of 96% and BN of Si 3 N.
It had a structure in which the 4 type granules were dispersed and integrated in a mesh shape. In addition, it was confirmed that this sintered body is a new material having a composite function that combines the wear resistance of Si 3 N 4 ceramics and the self-lubricating property of BN.
実施例2 前記実施例1と同様に30mm×30mm×6mmの寸法の成形を7
00℃で脱脂した後、カーボンモールドにセットして1700
℃、300kg/cm2の圧力でホットプレスを行なうことによ
り焼結体を製造した。Example 2 As in the case of Example 1, molding with dimensions of 30 mm × 30 mm × 6 mm was performed.
After degreasing at 00 ℃, set it on a carbon mold and set it to 1700
A sintered body was manufactured by hot pressing at 300 ° C. and a pressure of 300 kg / cm 2 .
得られた焼結体は、緻密化度合が略100%であり、かつS
i3N4セラミックの耐摩耗性とBNの自己潤滑性を兼ね備え
た複合機能を有した摺動部材として良好な特性を示すこ
とが確認された。The obtained sintered body has a densification degree of about 100% and S
It was confirmed that the sliding member has a composite function that combines the wear resistance of i 3 N 4 ceramics and the self-lubricating property of BN, and that it exhibits good characteristics.
実施例3 上記実施例1で作製したSi3N4系顆粒体80重量%と平均
粒径0.65μmの酸化アルミニウム(Al2O3)粉末20重量
%をポットに収納し、回転によりそれらを転動させて顆
粒体表面をAl2O3粉末により被覆して包み込んだ。つづ
いて、このAl2O3粉末被覆顆粒体を1000Kg/cm2の圧力で3
0mm×30mm×6mmの寸法に成形した後、この成形体を700
℃で脱脂し、更に1780℃の窒素雰囲気中で焼結して焼結
体を製造した。Example 3 80% by weight of Si 3 N 4 type granules produced in the above-mentioned Example 1 and 20% by weight of aluminum oxide (Al 2 O 3 ) powder having an average particle size of 0.65 μm were placed in a pot, and they were rotated. Then, the surface of the granules was covered with Al 2 O 3 powder and wrapped. Subsequently, the Al 2 O 3 powder-coated granules were mixed at a pressure of 1000 kg / cm 2
After molding to a size of 0 mm × 30 mm × 6 mm, this molded body is 700
Degreasing was performed at ℃, and further sintered in a nitrogen atmosphere at 1780 ℃ to produce a sintered body.
得られた焼結体は、緻密化度合が98%で、かつAl2O3がS
i3N4系顆粒体に対して網目状に分散一体化したサイアロ
ン(SIALON)構造を有するものであった。また、この焼
結体を空気中1200℃の耐酸化試験を行なったところ、極
めて優れた耐酸化特性を示すことが確認された。The obtained sintered body had a densification degree of 98% and Al 2 O 3 was S
It had a SIALON structure dispersed and integrated in a mesh with the i 3 N 4 system granules. Further, when this sintered body was subjected to an oxidation resistance test at 1200 ° C. in air, it was confirmed that it exhibited extremely excellent oxidation resistance characteristics.
実施例4 まず、平均粒径0.85μmのAlN粉末95重量%、平均粒径
0.90μmのY2O35重量%からなる混合粉に溶剤、界面改
質剤を加えてスラリとし、このスラリをスプレードライ
ヤにより平均粒径100μmのAlN系顆粒体を作製した。Example 4 First, 95% by weight of AlN powder having an average particle size of 0.85 μm and an average particle size
A solvent and an interfacial modifier were added to a mixed powder of 0.90 μm of Y 2 O 3 5% by weight to prepare a slurry, and this slurry was spray-dried to prepare AlN-based granules having an average particle size of 100 μm.
次いで、前記AlN系顆粒体80重量%と平均粒径1.2μmの
窒化硼素(BN)粉末20重量%をポットに収納し、回転に
よりそれらを30分間転動させて顆粒体表面をBN粉末によ
り被覆して包み込んだ。次いで、このBN粉末被覆顆粒体
を1000Kg/cm2の圧力で30mm×30mm×6mmの寸法に成形し
た後、この成形体を700℃で脱脂し、更に1800℃の窒素
雰囲気中で焼結して焼結体を製造した。Next, 80% by weight of the above AlN-based granules and 20% by weight of boron nitride (BN) powder with an average particle size of 1.2 μm were placed in a pot, and they were rolled for 30 minutes by rotation to coat the surface of the granules with BN powder. I wrapped it up. Then, the BN powder-coated granules were molded into a size of 30 mm × 30 mm × 6 mm at a pressure of 1000 Kg / cm 2 , the molded body was degreased at 700 ° C, and further sintered in a nitrogen atmosphere at 1800 ° C. A sintered body was manufactured.
得られた焼結体は、緻密化度合が96%で、かつBNがAlN
系顆粒体に対して網目状に分散一体化した構造を有する
ものであった。また、この焼結体はAlNセラミックの耐
摩耗性とBNの自己潤滑性を兼ね備えた複合機能を有する
新素材であることが確認された。The obtained sintered body had a densification degree of 96% and BN was AlN.
It had a structure in which it was dispersed and integrated in a mesh shape with respect to the system granules. In addition, it was confirmed that this sintered body is a new material having a composite function that combines the wear resistance of AlN ceramics and the self-lubricating property of BN.
実施例5 上記実施例4と同様な方法により作製した30mm×30mm×
6mmの寸法の成形体を700℃で脱脂した後、カーボンモー
ルドにセットして2000℃、300Kg/cm2の圧力でホットプ
レスを行なうことにより焼結体を製造した。Example 5 30 mm × 30 mm × manufactured by the same method as in Example 4 above
A compact having a size of 6 mm was degreased at 700 ° C., set in a carbon mold, and hot-pressed at 2000 ° C. and a pressure of 300 Kg / cm 2 to produce a sintered compact.
得られた焼結体は、緻密化度合が略100%であり、かつA
lNセラミックの耐摩耗性とBNの自己潤滑性を兼ね備えた
複合機能を有した摺動部材として良好な特性を示すこと
が確認された。The obtained sintered body has a densification degree of about 100%, and A
It has been confirmed that the sliding member has a composite function that combines the wear resistance of lN ceramics and the self-lubricating property of BN, and that it shows good properties.
実施例6 上記実施例4で作製したAlN系顆粒体80重量%と平均粒
径0.95μmの窒化ケイ素(Si3N4)粉末20重量%をポッ
トに収納し、回転によりそれらを転動させて顆粒体表面
をSi3N4粉末により被覆して包み込んだ。次いで、このS
i3N4粉末被覆顆粒体を1000Kg/cm2の圧力で30mm×30mm×
6mmの寸法に成形した後、この成形体を700℃で脱脂し、
更に1780℃の窒素雰囲気中で焼結して焼結体を製造し
た。Example 6 80% by weight of the AlN-based granules produced in Example 4 and 20% by weight of silicon nitride (Si 3 N 4 ) powder having an average particle size of 0.95 μm were placed in a pot and tumbled by rotation. The surface of the granule was covered with Si 3 N 4 powder and wrapped. Then this S
i 3 N 4 powder coated granules at a pressure of 1000 kg / cm 2 30 mm × 30 mm ×
After molding to a size of 6 mm, degrease this molded body at 700 ° C,
Further, it was sintered in a nitrogen atmosphere at 1780 ° C. to produce a sintered body.
得られた焼結体は、緻密化度合が98%で、かつSi3N4がA
lN系顆粒体に対して網目状に分散一体化したサイアロン
構造を有するものであった。また、この焼結体を空気中
1200℃の耐酸化試験を行なったところ、極めて優れた耐
酸化特性を示すことが確認された。The obtained sintered body had a densification degree of 98% and Si 3 N 4 was A
It had a sialon structure that was dispersed and integrated in a mesh with the 1N-based granules. In addition, this sintered body
As a result of an oxidation resistance test at 1200 ° C., it was confirmed that it exhibited extremely excellent oxidation resistance characteristics.
実施例7 上記実施例4で作製したAlN系顆粒体80重量%と平均粒
径0.1μmの酸化ケイ素(SiO2)粉末20重量%をポット
に収納し、回転によりそれらを転動させて顆粒体表面を
SiO2粉末により被覆して包み込んだ。次いで、このSiO2
粉末被覆顆粒体を1000Kg/cm2の圧力で30mm×30mm×6mm
の寸法に成形した後、この成形体を700℃で脱脂し、更
に1780℃の窒素雰囲気中で焼結して焼結体を製造した。Example 7 80% by weight of the AlN-based granules prepared in the above-mentioned Example 4 and 20% by weight of silicon oxide (SiO 2 ) powder having an average particle size of 0.1 μm were placed in a pot, and they were tumbled by rotation to make granules. Surface
It was covered with SiO 2 powder and wrapped. Then this SiO 2
Powder coated granules at a pressure of 1000 kg / cm 2 30 mm x 30 mm x 6 mm
After being molded into a size of, the molded body was degreased at 700 ° C. and further sintered in a nitrogen atmosphere at 1780 ° C. to manufacture a sintered body.
得られた焼結体は、緻密化度合が約98%で、かつSiO2が
AlN系顆粒体に対して網目状に分散一体化したアルシオ
ン(ALSION)構造を有するものであった。また、この焼
結体を網目状に電気不良導体部が形成された特殊な機能
材料であることが確認された。The obtained sintered body had a densification degree of about 98% and SiO 2
It had an ALSION structure that was dispersed and integrated in a mesh with the AlN-based granules. In addition, it was confirmed that this sintered body was a special functional material in which an electrically defective conductor portion was formed in a mesh shape.
[発明の効果] 以上詳述したように、本発明によれば窒化ケイ素または
窒化アルミニウムからなる特定のセラミックの性質と、
特定の被覆物質(粉末物質)による付加的機能を合せも
つ多機能セラミックを簡単に製造し得る方法を提供でき
る。[Effects of the Invention] As described in detail above, according to the present invention, the properties of a specific ceramic made of silicon nitride or aluminum nitride,
It is possible to provide a method capable of easily manufacturing a multifunctional ceramic having an additional function of a specific coating material (powder material).
───────────────────────────────────────────────────── フロントページの続き (72)発明者 米澤 武之 神奈川県川崎市幸区小向東芝町1番地 株 式会社東芝総合研究所内 (72)発明者 大沼 佳之 神奈川県川崎市幸区小向東芝町1番地 株 式会社東芝総合研究所内 (72)発明者 水谷 敏昭 神奈川県川崎市幸区小向東芝町1番地 株 式会社東芝総合研究所内 (56)参考文献 特開 昭59−97571(JP,A) 特開 昭60−46962(JP,A) 特開 昭60−215569(JP,A) 特開 昭54−139620(JP,A) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Takeyuki Yonezawa 1 Komukai Toshiba-cho, Sachi-ku, Kawasaki-shi, Kanagawa Inside the Toshiba Research Institute (72) Inventor Yoshiyuki Onuma Komukai-shiba, Kawasaki-shi, Kanagawa No. 1 in Toshiba Research Institute Co., Ltd. (72) Inventor Toshiaki Mizutani No. 1 Komukai Toshiba-cho, Sachi-ku, Kawasaki-shi, Kanagawa Inside Toshiba Research Institute Co., Ltd. (56) Reference JP-A-59-97571 (JP, A) ) JP-A-60-46962 (JP, A) JP-A-60-215569 (JP, A) JP-A-54-139620 (JP, A)
Claims (8)
に比べて微細な粉末物質とを混合し、転動させて前記顆
粒体の表面を前記粉末物質により一様に被覆して包み込
む工程と、 前記粉末物質被覆顆粒体を圧縮して凝集体に成形した
後、その成形体を焼結する工程とを具備し、 前記セラミック粉末を含む顆粒体は、窒化ケイ素と、希
土類酸化物又は熱処理により該希土類酸化物を生成する
化合物と、Al2O3、AlN、MgO、TiO2および加熱処理によ
りそれらの酸化物を生成する化合物から選ばれる1種又
は2種以上の混合物とからなり、 前記粉末物質は、前記セラミックと異なり、Al、B、S
i、Tiの酸化物、炭化物、窒化物、Al、Si、Tiの硼化物
から選ばれる少なくとも1種のセラミックからなること
を特徴とする多機能セラミックの製造方法。1. A step of mixing a granule containing a ceramic powder and a powder substance finer than the granule, rolling the granule, and uniformly covering the surface of the granule with the powder substance. A step of compressing the powder substance-coated granules to form an agglomerate, and then sintering the compact, wherein the granules containing the ceramic powder are made of silicon nitride, a rare earth oxide, or a heat treatment. A powder that forms the rare earth oxide and one or a mixture of two or more selected from Al 2 O 3 , AlN, MgO, TiO 2 and a compound that forms those oxides by heat treatment; Unlike ceramics, the materials are Al, B, S
A method for producing a multifunctional ceramic, comprising at least one ceramic selected from oxides of i, Ti, carbides, nitrides, borides of Al, Si, and Ti.
を前記顆粒体に対して前記粉末物質を容積割合で2〜40
%配合して混合することを特徴とする特許請求の範囲第
1項記載の多機能セラミックの製造方法。2. A granule containing ceramic powder and a powder substance, wherein the powder substance is contained in a volume ratio of 2 to 40 with respect to the granule.
%. The method for producing a multifunctional ceramic according to claim 1, wherein the mixture is mixed and mixed.
0kg/cm2に設定することを特徴とする特許請求の範囲第
1項記載の多機能セラミックの製造方法。3. The molding pressure of the powder substance-coated granules is 500 to 200.
The method for producing a multifunctional ceramic according to claim 1, wherein the value is set to 0 kg / cm 2 .
ることを特徴とする特許請求の範囲第1項記載の多機能
セラミックの製造方法。4. The method for producing a multifunctional ceramic according to claim 1, wherein the sintering temperature of the compact is set to 1300 to 2200 ° C.
に比べて微細な粉末物質とを混合し、転動させて前記顆
粒体の表面を前記粉末物質により一様に被覆して包み込
む工程と、 前記粉末物質被覆顆粒体を圧縮して凝集体に成形した
後、その成形体を焼結する工程とを具備し、 前記セラミック粉末を含む顆粒体は、窒化アルミニウム
と、希土類酸化物、アルカリ土類酸化物および加熱処理
によりそれら酸化物を生成する化合物から選ばれる1種
又は2種以上の混合物とからなり、 前記粉末物質は、前記セラミックと異なり、Al、B、S
i、Tiの酸化物、炭化物、窒化物、Al、Si、Tiの硼化物
から選ばれる少なくとも1種のセラミックからなること
を特徴とする多機能セラミックの製造方法。5. A step of mixing a granule containing ceramic powder and a powder substance finer than that of the granule, rolling the granule, and uniformly covering the surface of the granule with the powder substance. Compressing the powder substance-coated granules to form an aggregate, and then sintering the compact, wherein the granules containing the ceramic powder include aluminum nitride, a rare earth oxide, and an alkaline earth. And a mixture of one or more selected from compounds that generate oxides by heat treatment, wherein the powder substance is different from the above-mentioned ceramic, Al, B, S
A method for producing a multifunctional ceramic, comprising at least one ceramic selected from oxides of i, Ti, carbides, nitrides, borides of Al, Si, and Ti.
を前記顆粒体に対して前記粉末物質を容積割合で2〜40
%配合して混合することを特徴とする特許請求の範囲第
5項記載の多機能セラミックの製造方法。6. Granules containing ceramic powder and a powder substance, wherein the powder substance is contained in a volume ratio of 2 to 40 with respect to the granules.
% Compounding and mixing, The manufacturing method of the multifunctional ceramics of Claim 5 characterized by the above-mentioned.
0kg/cm2に設定することを特徴とする特許請求の範囲第
5項記載の多機能セラミックの製造方法。7. The molding pressure of the powder substance-coated granules is 500 to 200.
The method for producing a multifunctional ceramic according to claim 5, wherein the setting is 0 kg / cm 2 .
ることを特徴とする特許請求の範囲第5項記載の多機能
セラミックの製造方法。8. The method for producing a multifunctional ceramic according to claim 5, wherein the sintering temperature of the compact is set to 1300 to 2200 ° C.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61133213A JPH0774104B2 (en) | 1986-06-09 | 1986-06-09 | Method for manufacturing multifunctional ceramics |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61133213A JPH0774104B2 (en) | 1986-06-09 | 1986-06-09 | Method for manufacturing multifunctional ceramics |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62292666A JPS62292666A (en) | 1987-12-19 |
| JPH0774104B2 true JPH0774104B2 (en) | 1995-08-09 |
Family
ID=15099369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61133213A Expired - Lifetime JPH0774104B2 (en) | 1986-06-09 | 1986-06-09 | Method for manufacturing multifunctional ceramics |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0774104B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114874012B (en) * | 2022-05-10 | 2023-05-02 | 航投(厦门)新材料科技有限公司 | High-strength complex-phase ceramic component and preparation method thereof |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54139620A (en) * | 1978-04-21 | 1979-10-30 | Tokyo Shibaura Electric Co | Manufacture of double layered granular ceramic |
| JPS5997571A (en) * | 1982-11-22 | 1984-06-05 | 三菱電機株式会社 | Electroconductive parts and manufacture |
| JPS6046962A (en) * | 1983-08-22 | 1985-03-14 | 三菱自動車工業株式会社 | Sintering part |
| JPH0666532B2 (en) * | 1984-04-09 | 1994-08-24 | 富士通株式会社 | Method for manufacturing glass-ceramic composite substrate |
-
1986
- 1986-06-09 JP JP61133213A patent/JPH0774104B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62292666A (en) | 1987-12-19 |
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