JPH0775153B2 - Liquid metal ion source - Google Patents
Liquid metal ion sourceInfo
- Publication number
- JPH0775153B2 JPH0775153B2 JP27400786A JP27400786A JPH0775153B2 JP H0775153 B2 JPH0775153 B2 JP H0775153B2 JP 27400786 A JP27400786 A JP 27400786A JP 27400786 A JP27400786 A JP 27400786A JP H0775153 B2 JPH0775153 B2 JP H0775153B2
- Authority
- JP
- Japan
- Prior art keywords
- current
- liquid metal
- voltage
- ion source
- metal ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明はイオン源に係り、特に小型化、低コスト化が可
能な電流制御部を有する液体金属イオン源に関するもの
である。Description: TECHNICAL FIELD The present invention relates to an ion source, and more particularly to a liquid metal ion source having a current controller capable of being downsized and reduced in cost.
従来、引出し電極電位を高耐圧電流制御素子（真空管）
を用いて制御し、イオン電流を安定化した例としては、
アナリテイカル，ケミストリー,45,NO.11,9月（1973
年）第1884〜1889頁（Analtical Chemistry,Vol.45,NO.
11,SEPTEM−BER（1973）PP1884−1889）において論じら
れている安定化手法がある。これは第２図に示す制御回
路により放出イオン電流を安定化するものである。Conventionally, the extraction electrode potential is controlled by a high withstand voltage current control element (vacuum tube)
As an example of stabilizing the ion current by controlling with,
Analytical, Chemistry, 45, NO.11, September (1973
1884-1889 (Analtical Chemistry, Vol. 45, NO.
11, SEPTEM-BER (1973) PP1884-1889). This stabilizes the emitted ion current by the control circuit shown in FIG.
上記従来技術は、放出イオン電流を変えた時の加速電圧
の変動，数μＡの低い放出電流値における安定性、装置
の小型化等について配慮されていなかつた。The above-mentioned prior art has not taken into consideration fluctuations in the acceleration voltage when changing the emitted ion current, stability at a low emission current value of several μA, miniaturization of the device, and the like.
以下、これらの点を列挙する。These points are listed below.
１）ポテンシヨメータR4により一度電流を設定すると、
フイードバツクがかかつてもニードル21の電位は変動し
ないが、電流の設定値を変えるとニードル電位も変動し
てしまう。1) Once the current is set by potentiometer R 4 ,
The potential of the needle 21 does not fluctuate even if the feedback is over, but the needle potential also fluctuates when the set value of the current is changed.
２）放出イオン電流を大幅に変える場合、電流検出抵抗
R1の抵抗値を変える必要があるが、これには高圧に浮い
た切替回路が必要となる。2) When the emitted ion current is changed significantly, a current detection resistor
It is necessary to change the resistance value of R 1 , but this requires a switching circuit floating at high voltage.
３）ニードル電位を抵抗分圧器R2＋R3でモニタしている
ため、そのブリーダ電流が必要となつている。この制御
回路は、放出イオン電流とブリーダ電流を加算した値を
一定に保つ様に動作するため、放出イオン電流を小さく
設定する場合、その制御性に問題が出てくる。3) Since the needle potential is monitored by the resistance voltage divider R 2 + R 3 , the bleeder current is required. Since this control circuit operates so as to keep constant the value obtained by adding the emission ion current and the bleeder current, when the emission ion current is set small, there arises a problem in its controllability.
４）加速電圧を8KV付近とし、また、ニードル21と引出
し電極22間の電圧を８〜13KV程度とするイオン源のセツ
テイングを行つているため、引出し電極電位が０〜−5K
V程度の負電圧となり、真空管の陽極側に高圧電源を付
加する必要がある。4) Since the accelerating voltage is set to around 8KV and the ion source is set so that the voltage between the needle 21 and the extraction electrode 22 is about 8 to 13KV, the extraction electrode potential is 0 to -5K.
It becomes a negative voltage of about V, and it is necessary to add a high voltage power supply to the anode side of the vacuum tube.
本発明の目的は上記１）〜４）の従来装置の持つ欠点を
排除し、小型，低コストで高い性能を有する液体金属イ
オン源を提供することにある。An object of the present invention is to eliminate the drawbacks of the above-mentioned conventional devices 1) to 4), and to provide a liquid metal ion source having high performance with a small size and low cost.
上記目的は、第１図に示すようにイオン放出部１を加速
電源３に直接々続し、イオン引出し電圧を加速電圧より
低い値に調整して引出し電極２の電位が常に正となるよ
うに、引出し電極２を直接高耐圧電流制御素子の陽極に
接続し、接地電位からイオン電流を制御することにより
達成される。The above-mentioned object is to directly connect the ion emission unit 1 to the acceleration power source 3 as shown in FIG. 1 and adjust the ion extraction voltage to a value lower than the acceleration voltage so that the potential of the extraction electrode 2 is always positive. This is achieved by directly connecting the extraction electrode 2 to the anode of the high withstand voltage current control element and controlling the ionic current from the ground potential.
本発明の要旨は、第一動作電位点に接続されたイオンエ
ミッタと、前記イオンエミッタからイオンビームを引き
だすための引出し電極とを有する液体金属イオン源であ
って、前記引き出し電極と第２動作電位点との間に直接
接続された電流制御素子および電流検出手段と、前記電
流検出手段からの信号を前記電流制御素子の制御入力へ
負帰還する負帰還手段とを具備することによって前記引
き出し電極に流れる電流を定電流化したことを特徴とす
る液体金属イオン源にある。The gist of the present invention is a liquid metal ion source having an ion emitter connected to a first operation potential point and an extraction electrode for extracting an ion beam from the ion emitter, wherein the extraction electrode and the second operation potential are provided. To the extraction electrode by providing a current control element and a current detection means directly connected to the point, and negative feedback means for negatively feeding back the signal from the current detection means to the control input of the current control element. A liquid metal ion source is characterized in that the flowing current is made constant.
以下、本発明の一実施例を第３図により説明する。 An embodiment of the present invention will be described below with reference to FIG.
真空カラム５内には、Ga−In−Sn合金をイオン材料とし
て装着したエミツター（ニードル）１と引出し電極２を
配置した。加速電流３はエミツター１に接続し、引出し
電極２は制御回路４内の真空管（6BK4）の陽極に接続し
た。この制御回路４は引出し電極に流入するイオン電流
を設定値に安定化することで放出イオン電流の安定化を
図つたものである。以下、動作を説明する。The vacuum column 5, were placed G a -I n -S n alloy Emitsuta mounted as an ion material (needles) 1 and the extraction electrode 2. The acceleration current 3 was connected to the emitter 1 and the extraction electrode 2 was connected to the anode of the vacuum tube (6BK4) in the control circuit 4. The control circuit 4 stabilizes the emitted ion current by stabilizing the ion current flowing into the extraction electrode to a set value. The operation will be described below.
加速電流３をオン（ON）するとエミツター１は加速電位
となる。引出し電極２は最初接地電位であるからエミツ
ター１と引出し電極２間に加速電圧がそのままかかり即
座にイオン放出が開始する。放出したイオンの大部分は
引出し電極２に流入し、真空管6BK4の陽極を経て陰極へ
流れそして抵抗R1を経てグランドに流入する。この電流
は抵抗R1の端子電圧として検出され電圧フオロワA1の出
力となる。A1の出力とポテンシヨメータR2の設定電圧を
インピーダンス変換したA2の出力はA3により比較増幅さ
れ真空管の制御格子電圧を変化させイオン電流を制限す
る。この帰還はA1の出力とA2の出力が等しくなる様に働
き、結局、電流検出抵抗R1の抵抗値とポテンシヨメータ
R2の出力電圧により設定した電流値に引出し電極電流が
安定化される。When the acceleration current 3 is turned on (ON), the emitter 1 becomes the acceleration potential. Since the extraction electrode 2 is initially at the ground potential, the accelerating voltage is applied as it is between the emitter 1 and the extraction electrode 2, and the ion emission is immediately started. Most of the ejected ions flow into the extraction electrode 2, flow through the anode of the vacuum tube 6BK4 to the cathode, and then flow into the ground via the resistor R 1 . This current is detected as the terminal voltage of the resistor R 1 and becomes the output of the voltage follower A 1. The output of A2 to the set voltage and the output of the potentiometer R 2 and impedance transformation A1 limits the comparison amplified ion current by changing the control grid voltage of the vacuum tube by A3. This feedback works so that the output of A1 and the output of A2 become equal, and eventually the resistance value of the current detection resistor R 1 and the potentiometer.
The extraction electrode current is stabilized at the current value set by the output voltage of R 2 .
本実施例は、イオン材料に常温で融解しているGa−In−
Sn合金を用いたため、通常加速電位で駆動する加熱電源
が不要で、かつ、上記の制御回路を用い高圧に浮いた回
路を無くしている。よつて、高電圧絶縁を要求されるの
は、ほぼ、イオン源構成要素間を接続するケーブルのみ
となり、絶縁トランスも不要で、非常にコンパクトで低
コストなものとなつている。This embodiment, G a -I n that melt at ordinary temperature ionic material -
Since an Sn alloy is used, a heating power source that is normally driven at an acceleration potential is not necessary, and a circuit floating at high voltage is eliminated by using the above control circuit. Therefore, high voltage insulation is required almost only for the cables that connect the ion source components, and no isolation transformer is required, making it extremely compact and low cost.
本発明によれば、液体金属イオン源に用いる高圧電源は
加速電源だけで良く、イオン電流の制御には高圧電源が
不要でかつ、制御回路は全て接地電位で駆動しているた
め高電圧絶縁が必要な部分が極少にできる。よつて、本
発明は装置を小型，低コストにする効果がある。According to the present invention, the high-voltage power supply used for the liquid metal ion source is only the acceleration power supply, the high-voltage power supply is not necessary for controlling the ion current, and the control circuit is driven at the ground potential, so that high-voltage insulation is achieved. The necessary parts can be minimized. Therefore, the present invention is effective in reducing the size and cost of the device.
第１図は本発明の基本概念図、第２図は従来装置の回路
図、第３図は本発明の一実施例になる回路図である。 １……イオン放出部（エミツター、あるいはニード
ル）、２……引出し電極、３……加速電源、４……制御
回路、５……真空カラム。FIG. 1 is a basic conceptual diagram of the present invention, FIG. 2 is a circuit diagram of a conventional device, and FIG. 3 is a circuit diagram showing an embodiment of the present invention. 1 ... Ion emission part (emitter or needle), 2 ... Extraction electrode, 3 ... Accelerating power source, 4 ... Control circuit, 5 ... Vacuum column.
Claims (2)
タと、前記イオンエミッタからイオンビームを引きだす
ための引出し電極とを有する液体金属イオン源であっ
て、 前記引き出し電極と第２動作電位点との間に直列接続さ
れた電流制御素子および電流検出手段と、 前記電流検出手段からの信号を前記電流制御素子の制御
入力へ負帰還する負帰還手段とを具備することによって
前記引き出し電極に流れる電流を定電流化したことを特
徴とする液体金属イオン源。1. A liquid metal ion source having an ion emitter connected to a first operating potential point and an extraction electrode for extracting an ion beam from the ion emitter, wherein the extraction electrode and the second operation potential point. And a current control element connected in series between the current control element and the current detection means, and negative feedback means for negatively feeding back the signal from the current detection means to the control input of the current control element. A liquid metal ion source characterized in that the current is made constant.
る真空管の陰極と前記第２動作電位点との間に接続され
た電流検出抵抗であり、 前記負帰還手段は前記電流検出抵抗における電圧降下と
基準電圧とを比較し、該比較結果を上記真空管の制御入
力に印加する電圧比較手段であることを特徴とする特許
請求の範囲第１項記載の液体金属イオン源。2. The current detection means is a current detection resistance connected between the cathode of the vacuum tube which is the current control element and the second operating potential point, and the negative feedback means is a voltage at the current detection resistance. 2. The liquid metal ion source according to claim 1, wherein the liquid metal ion source is a voltage comparing means for comparing the voltage drop with a reference voltage and applying the comparison result to the control input of the vacuum tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27400786A JPH0775153B2 (en) | 1986-11-19 | 1986-11-19 | Liquid metal ion source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27400786A JPH0775153B2 (en) | 1986-11-19 | 1986-11-19 | Liquid metal ion source |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63128525A JPS63128525A (en) | 1988-06-01 |
| JPH0775153B2 true JPH0775153B2 (en) | 1995-08-09 |
Family
ID=17535651
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27400786A Expired - Fee Related JPH0775153B2 (en) | 1986-11-19 | 1986-11-19 | Liquid metal ion source |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0775153B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6914386B2 (en) * | 2003-06-20 | 2005-07-05 | Applied Materials Israel, Ltd. | Source of liquid metal ions and a method for controlling the source |
| JP5537050B2 (en) * | 2008-04-11 | 2014-07-02 | 株式会社日立ハイテクノロジーズ | Focused ion beam device |
-
1986
- 1986-11-19 JP JP27400786A patent/JPH0775153B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63128525A (en) | 1988-06-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |