JPH0775215B2 - Method for etching aluminum foil for electrolytic capacitors - Google Patents
Method for etching aluminum foil for electrolytic capacitorsInfo
- Publication number
- JPH0775215B2 JPH0775215B2 JP2097403A JP9740390A JPH0775215B2 JP H0775215 B2 JPH0775215 B2 JP H0775215B2 JP 2097403 A JP2097403 A JP 2097403A JP 9740390 A JP9740390 A JP 9740390A JP H0775215 B2 JPH0775215 B2 JP H0775215B2
- Authority
- JP
- Japan
- Prior art keywords
- etching
- ions
- aluminum foil
- electrolytic solution
- electrolytic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Description
【発明の詳細な説明】 〔産業上の利用分野〕 この発明は電解コンデンサ用アルミニウム箔のエッチン
グ方法に関し、さらに詳しく言えば、中高圧用のアルミ
ニウム電解コンデンサ用電極箔のエッチング方法に関す
るものである。Description: TECHNICAL FIELD The present invention relates to a method for etching an aluminum foil for an electrolytic capacitor, and more specifically to a method for etching an electrode foil for an aluminum electrolytic capacitor for medium and high voltage.
この種の電極箔には、電極体となるアルミニウム箔を電
気的もしくは化学的にエッチング処理して実効表面積を
拡大したものが使用される。For this type of electrode foil, an aluminum foil to be used as an electrode body is used which is electrically or chemically etched to increase the effective surface area.
拡面率を上げる方法は種々提案されているが、一般的に
は、アルミニウム箔を硫酸、蓚酸、燐酸などの皮膜を形
成する酸を添加した塩化物水溶液中で電気的にエッチン
グを行い、ピットを多数形成する前段エッチングと、塩
素イオン、硫酸イオン、硝酸イオンの少なくとも1種類
以上を含む水溶液中で電気的もしくは化学的エッチング
を行い、ピットの内壁に沿ってアルミニウムを溶解し、
ピット径を目的の太さにする後段エッチングとを組合せ
て行うようにしている。Although various methods have been proposed for increasing the surface expansion rate, generally, aluminum foil is electrically etched in a chloride aqueous solution to which a film-forming acid such as sulfuric acid, oxalic acid, or phosphoric acid is added to form a pit. Pre-stage etching to form a large number of, and electrical or chemical etching in an aqueous solution containing at least one or more of chlorine ions, sulfate ions, nitrate ions, to dissolve aluminum along the inner wall of the pit,
It is performed in combination with post-stage etching that makes the pit diameter the target thickness.
アルミニウム箔には、不純物として銅が10〜50ppm含ま
れている。したがって、工業的に連続エッチングを行う
と、前段、後段のそれぞれの電解液中に銅が一定量増加
していく。The aluminum foil contains 10 to 50 ppm of copper as an impurity. Therefore, when continuous etching is industrially performed, a certain amount of copper increases in the electrolytic solution in each of the former and latter stages.
電解液中に銅イオンが存在すると、アルミニウム箔の表
面溶解が促進される。これは銅イオンの存在量に比例
し、その量が多くなるとピット内径の溶解よりも箔表面
の溶解が起こりやすくなり、大幅な拡面率の低下をもた
らすことになる。The presence of copper ions in the electrolytic solution promotes surface dissolution of the aluminum foil. This is proportional to the amount of copper ions present, and if the amount of copper ions increases, dissolution of the foil surface will occur more easily than dissolution of the inner diameter of the pits, resulting in a large reduction in surface expansion rate.
このため、従来では定期的に電解液を更新したり、特殊
な処理設備を設置して銅イオンを除去するようにしてい
るが、コストアップの問題が生ずる。また、電解液を更
新する際には、その都度ラインを止める必要があるた
め、生産性にも悪影響を及ぼすことになる。For this reason, conventionally, the electrolytic solution is regularly renewed or a special treatment facility is installed to remove copper ions, but this causes a problem of cost increase. In addition, since the line needs to be stopped each time the electrolytic solution is renewed, productivity is adversely affected.
上記課題を解決するため、この発明においては、アルミ
ニウム箔を所定の電解液中において電気的にエッチング
して多数のピットを形成する第1のエッチング工程と、
同工程で形成されたピットの径を目的とする太さにする
ため、塩素イオン、硫酸イオン、硝酸イオンの少なくと
も1種以上を含む電解液中において電気的もしくは化学
的なエッチングを行う第2のエッチング工程とを有する
電解コンデンサ用アルミニウム箔のエッチング方法にお
いて、第2のエッチング工程に用いる電解液中に炭素族
金属元素イオンを所定量添加することを特徴としてい
る。この場合において、炭素族金属元素イオンは好まし
くはゲルマニウムイオン、スズイオン、鉛イオンから選
ばれる。また、その添加量は好適には0.01〜1000ppmの
範囲とされる。To solve the above problems, in the present invention, a first etching step of electrically etching an aluminum foil in a predetermined electrolytic solution to form a large number of pits,
In order to make the diameter of the pits formed in the same step the target thickness, the second step of performing electrical or chemical etching in an electrolytic solution containing at least one kind of chloride ion, sulfate ion and nitrate ion A method of etching an aluminum foil for an electrolytic capacitor, which comprises an etching step, is characterized in that a predetermined amount of carbon group metal element ions is added to the electrolytic solution used in the second etching step. In this case, the carbon group metal element ion is preferably selected from germanium ion, tin ion and lead ion. Moreover, the addition amount is preferably in the range of 0.01 to 1000 ppm.
なお、ピットを多数発生させる第1のエッチング工程に
おける電気的エッチングは直流電解エッチングが特に有
効であり、その電解液としては塩酸水溶液に添加物とし
て硫酸、燐酸、蓚酸などを1%以下の濃度で添加するの
が好適である。また、硫酸水溶液に添加物として塩酸を
0.5〜10%添加することも好ましい。さらに、この第1
のエッチング工程を2段に分割し、上述の塩酸系電解エ
ッチングを行ったのち、硫酸系電解エッチングを行って
もよい。また、第1のエッチング工程の前に、化学的ソ
フトエッチングを行ってもよい。Note that direct current electrolytic etching is particularly effective for electrical etching in the first etching step in which a large number of pits are generated. As the electrolytic solution, sulfuric acid, phosphoric acid, oxalic acid, etc. are added to a hydrochloric acid aqueous solution at a concentration of 1% or less. It is preferable to add it. In addition, hydrochloric acid was added to the sulfuric acid solution as an additive.
It is also preferable to add 0.5 to 10%. Furthermore, this first
The etching step may be divided into two steps, and after the above hydrochloric acid-based electrolytic etching, sulfuric acid-based electrolytic etching may be performed. Also, chemical soft etching may be performed before the first etching step.
ピット径を太くする第2のエッチング工程には、化学エ
ッチングと電解エッチングの2つの方法があるが、前者
の場合、硝酸水溶液に燐酸または蓚酸を1%以下の濃度
で添加したもの、塩酸水溶液に添加物として硫酸、燐
酸、蓚酸などを1%以下の濃度で添加したもの、または
硫酸水溶液に添加物として塩酸を0.5〜10%添加したも
のを電解液として用いるのが好適である。なお、この電
解液は、電解エッチングにも使用することができる。There are two methods of chemical etching and electrolytic etching in the second etching step for increasing the pit diameter. In the former case, nitric acid solution with phosphoric acid or oxalic acid added at a concentration of 1% or less, hydrochloric acid solution with It is preferable to use sulfuric acid, phosphoric acid, oxalic acid or the like added at a concentration of 1% or less as an additive, or 0.5 to 10% hydrochloric acid added as an additive to the aqueous solution of sulfuric acid as an electrolytic solution. This electrolytic solution can also be used for electrolytic etching.
第2のエッチング工程の電解液中に炭素族金属元素イオ
ンを添加することにより、銅イオンによるアルミニウム
箔の表面溶解が抑制される。By adding carbon group metal element ions to the electrolytic solution in the second etching step, surface dissolution of the aluminum foil by copper ions is suppressed.
以下、この発明の実施例を従来例と比較しながら説明す
る。Hereinafter, an example of the present invention will be described in comparison with a conventional example.
〔従来例〕 使用したアルミニウム箔;厚さ104μm,純度99.99% 第1のエッチング工程;塩酸5wt%,硫酸0.02wt%を
含む液温80℃の電解液にアルミニウム箔を浸漬し、電流
密度200mA/cm2の直流電流にて60秒間通電する。[Conventional example] Aluminum foil used; thickness 104 μm, purity 99.99% First etching step; aluminum foil was immersed in an electrolyte solution containing hydrochloric acid 5 wt% and sulfuric acid 0.02 wt% at a liquid temperature of 80 ° C., and current density was 200 mA / Energize for 60 seconds with a DC current of cm 2 .
第2のエッチング工程;前の工程でピットを形成した
アルミニウム箔を硝酸7wt%,燐酸0.1wt%を含む液温85
℃の電解液に15分間浸漬して化学エッチングを行う。Second etching step; aluminum foil having pits formed in the previous step is added with nitric acid 7 wt% and phosphoric acid 0.1 wt% at a liquid temperature of 85
Chemical etching is performed by immersing in the electrolytic solution at ℃ for 15 minutes.
まず、上記アルミニウム箔を第1のエッチング工程でエ
ッチングしてその表面にピットを形成し、次いで第2の
エッチング工程の電解液中の銅イオン濃度をそれぞれ0.
2,0.4,0.6,0.8,1.0ppmとしてエッチングを行い、銅イオ
ンの存在しないものを含め従来例として6種類のエッチ
ング処理済みのアルミニウム箔を得た。そして、これら
のアルミニウム箔を硼酸%水溶液(液温85℃)中におい
て200Vの化成電圧で化成し、その化成容量を測定した結
果を次の表1に示す。また、そのグラフを第2図に示
す。First, the aluminum foil is etched in the first etching step to form pits on its surface, and then the copper ion concentration in the electrolytic solution in the second etching step is adjusted to 0.
Etching was carried out at 2, 0.4, 0.6, 0.8, and 1.0 ppm to obtain 6 types of aluminum foil which had been subjected to etching treatment as a conventional example including those without copper ions. Then, these aluminum foils were subjected to chemical conversion at a chemical conversion voltage of 200 V in a boric acid% aqueous solution (liquid temperature 85 ° C.), and the chemical conversion capacity was measured. The results are shown in Table 1 below. The graph is shown in FIG.
〔実施例1〕アルミニウム箔、第1および第2のエッチ
ング条件は同じとして、上記従来例中容量低下の著しい
銅イオン濃度が1.0ppmの電解液中に硝酸鉛を用いて鉛
(Pb)イオンをそれぞれ0.01,0.1,1.0,10,100,1000ppm
添加してエッチングした箔の鉛イオンの添加量とその20
0V化成容量の測定結果を次の表2に示す。 Example 1 Assuming that the aluminum foil and the first and second etching conditions were the same, lead nitrate was used in an electrolytic solution having a copper ion concentration of 1.0 ppm, which markedly reduces the capacity in the conventional example, to produce lead (Pb) ions. 0.01, 0.1, 1.0, 10, 100, 1000ppm respectively
Amount of Lead Ion Added to Etched Foil and Part 20
The measurement results of 0V conversion capacity are shown in Table 2 below.
〔実施例2〕実施例1の鉛イオンに代え、塩化第一スズ
を用いてスズ(Sn)イオンをそれぞれ0.01,0.1,1.0,10,
100,1000ppm添加してエッチングした箔のスズイオンの
添加量とその200V化成容量の測定結果を次頁の表3に示
す。 Example 2 In place of the lead ions of Example 1, stannous chloride was used to add tin (Sn) ions to 0.01, 0.1, 1.0, 10, respectively.
Table 3 on the next page shows the measurement results of the amount of tin ion added to the etched foil after adding 100 and 1000 ppm and its 200V conversion capacity.
〔実施例3〕実施例1の鉛イオンに代え、塩化ゲルマニ
ウムを用いてゲルマニウム(Ge)イオンをそれぞれ0.0
1,0.1,1.0,10,100,1000ppm添加してエッチングした箔の
ゲルマニウムイオンの添加量とその200V化成容量の測定
結果を次頁の表4に示す。 [Example 3] In place of the lead ions of Example 1, germanium chloride was used to add germanium (Ge) ions to 0.0
Table 4 on the next page shows the measurement results of the amount of germanium ion added to the foil etched by adding 1,0.1,1.0,10,100,1000 ppm and its 200V conversion capacity.
また、上記実施例1〜3の炭素族金属元素イオン添加量
対箔の200V化成容量の特性グラフを第1図に示す。上記
の表2〜4および第1図のグラフから明らかなように、
Pb,Sn,Geのいずれもその有効添加量は約0.01〜1000ppm
であるが、より好ましい添加量は0.1〜100ppmである。 Further, FIG. 1 shows a characteristic graph of the carbon group metal element ion addition amount in Examples 1 to 3 above and the foil 200 V conversion capacity. As is clear from the graphs of Tables 2 to 4 and FIG.
Effective addition amount of Pb, Sn, Ge is about 0.01-1000ppm
However, the more preferable addition amount is 0.1 to 100 ppm.
〔実施例4〕まず第1のエッチング工程において、上記
と同じアルミニウム箔を塩酸7%、燐酸0.01%を含む液
温80℃の電解液に浸漬し、電流密度300mA/cm2の直流通
電を行った。次に、第2のエッチング工程として、塩酸
7%、硫酸30%を含む液温80℃の電解液中で電流密度25
0mA/cm2の直流通電を行った。さらに、第3のエッチン
グ工程として、塩酸7%、燐酸0.01%を含む液温80℃の
電解液に第2のエッチング工程を経たアルミニウム箔を
浸漬し、化学エッチングを行った。その際、電解液中の
銅イオン濃度が0.5ppmである電解液に硝酸鉛水溶液をそ
の電解液中の含量が5ppmとなるように添加した。[Example 4] First, in the first etching step, the same aluminum foil as described above was immersed in an electrolytic solution containing hydrochloric acid 7% and phosphoric acid 0.01% at a liquid temperature of 80 ° C, and a DC current having a current density of 300 mA / cm 2 was applied. It was Next, as a second etching step, a current density of 25% was set in an electrolytic solution containing hydrochloric acid 7% and sulfuric acid 30% at a liquid temperature of 80 ° C.
A direct current of 0 mA / cm 2 was applied. Further, in the third etching step, the aluminum foil subjected to the second etching step was immersed in an electrolytic solution containing hydrochloric acid 7% and phosphoric acid 0.01% at a liquid temperature of 80 ° C. to perform chemical etching. At that time, an aqueous solution of lead nitrate was added to the electrolytic solution having a copper ion concentration of 0.5 ppm in the electrolytic solution so that the content in the electrolytic solution was 5 ppm.
このようにして得たエッチドアルミニウム箔を200Vにて
化成し、その静電容量を測定したところ、2.04μF/cm2
であった。ちなみに、鉛無添加時の静電容量は、1.3μF
/cm2であった。The thus-obtained etched aluminum foil was formed at 200 V and its capacitance was measured to be 2.04 μF / cm 2
Met. By the way, the capacitance without lead is 1.3μF
It was / cm 2 .
〔実施例5〕まず第1のエッチング工程において、上記
と同じアルミニウム箔を硫酸30%、塩酸1.5%を含む液
温70℃の電解液に浸漬し、電流密度250mA/cm2の直流通
電を行った。次に、第2のエッチング工程として、硫酸
30%、塩酸2%を含む液温85℃の電解液中にアルミニウ
ム箔を浸漬し、化学エッチングを行った。その際、電解
液中の銅イオン濃度が0.5ppmである電解液に硝酸鉛水溶
液をその電解液中の含量が3ppmとなるように添加した。Example 5 First, in the first etching step, the same aluminum foil as described above was immersed in an electrolytic solution containing sulfuric acid 30% and hydrochloric acid 1.5% at a liquid temperature of 70 ° C., and a DC current having a current density of 250 mA / cm 2 was applied. It was Next, as a second etching step, sulfuric acid is used.
The aluminum foil was immersed in an electrolytic solution containing 30% and 2% hydrochloric acid at a liquid temperature of 85 ° C. to perform chemical etching. At that time, an aqueous lead nitrate solution was added to the electrolytic solution having a copper ion concentration of 0.5 ppm in the electrolytic solution so that the content in the electrolytic solution was 3 ppm.
このようにして得たエッチドアルミニウム箔を200Vにて
化成し、その静電容量を測定したところ、2.62μF/cm2
であった。これに対して、鉛無添加時の静電容量は、1.
4μF/cm2であった。The etched aluminum foil thus obtained was formed at 200 V and its capacitance was measured to be 2.62 μF / cm 2
Met. On the other hand, the capacitance without lead is 1.
It was 4 μF / cm 2 .
以上説明したように、この発明によれば、塩素イオン、
硫酸イオン、硝酸イオンの少なくとも1種以上を含み、
ピット径を目的の太さにする最終段のエッチング工程に
用いられる電解液中に炭素族金属元素イオン、とりわけ
鉛イオン、スズイオン、ゲルマニウムイオンを0.01〜10
00ppm添加することにより、銅イオンによるアルミニウ
ム箔の表面溶解が抑制される。したがって、電解液の定
期的な更新や、銅イオンを除去する処理設備などが不要
となる。As described above, according to the present invention, chlorine ion,
Contains at least one or more of sulfate ion and nitrate ion,
0.01 to 10 carbon group metal element ions, especially lead ions, tin ions, and germanium ions, are added to the electrolytic solution used in the final etching step for adjusting the pit diameter to the target thickness.
The addition of 00 ppm suppresses the surface dissolution of the aluminum foil due to copper ions. Therefore, it is not necessary to regularly update the electrolytic solution or to process copper ions.
第1図はこの発明による炭素族金属元素イオン添加量対
化成容量の関係を示したグラフ、第2図は電解液中の銅
イオン対化成容量の関係を示したグラフである。FIG. 1 is a graph showing the relationship between the amount of carbon group metal element ions added and the chemical conversion capacity according to the present invention, and FIG. 2 is a graph showing the relationship between the copper ion in the electrolytic solution and the chemical conversion capacity.
Claims (3)
電気的にエッチングして多数のピットを形成する第1の
エッチング工程と、同工程で形成されたピットの径を目
的とする太さにするため、塩素イオン、硫酸イオン、硝
酸イオンの少なくとも1種以上を含む電解液中において
電気的もしくは化学的なエッチングを行う第2のエッチ
ング工程とを有する電解コンデンサ用アルミニウム箔の
エッチング方法において、 上記第2のエッチング工程に用いる電解液中に炭素族金
属元素イオンを所定量添加することを特徴とする電解コ
ンデンサ用アルミニウム箔のエッチング方法。1. A first etching step in which a large number of pits are formed by electrically etching an aluminum foil in a predetermined electrolytic solution, and the diameter of the pits formed in the same step is adjusted to a target thickness. Therefore, in the method for etching an aluminum foil for an electrolytic capacitor, which comprises a second etching step of performing electrical or chemical etching in an electrolytic solution containing at least one or more of chloride ions, sulfate ions and nitrate ions, A method for etching an aluminum foil for an electrolytic capacitor, which comprises adding a predetermined amount of carbon group metal element ions to an electrolytic solution used in the etching step of 2.
イオン、スズイオン、鉛イオンから選ばれる請求項1に
記載の電解コンデンサ用アルミニウム箔のエッチング方
法。2. The method for etching an aluminum foil for an electrolytic capacitor according to claim 1, wherein the carbon group metal element ions are selected from germanium ions, tin ions and lead ions.
〜1000ppmである請求項1または2に記載の電解コンデ
ンサ用アルミニウム箔のエッチング方法。3. The amount of the carbon group metal element ions added is 0.01.
The method for etching an aluminum foil for an electrolytic capacitor according to claim 1 or 2, wherein the etching amount is about 1000 ppm.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1-140900 | 1989-06-02 | ||
| JP14090089 | 1989-06-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03101213A JPH03101213A (en) | 1991-04-26 |
| JPH0775215B2 true JPH0775215B2 (en) | 1995-08-09 |
Family
ID=15279410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2097403A Expired - Lifetime JPH0775215B2 (en) | 1989-06-02 | 1990-04-12 | Method for etching aluminum foil for electrolytic capacitors |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0775215B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3185453B2 (en) * | 1993-03-19 | 2001-07-09 | 松下電器産業株式会社 | Manufacturing method of electrode foil for aluminum electrolytic capacitor |
| CN103451713B (en) * | 2013-08-28 | 2016-01-20 | 广西贺州市桂东电子科技有限责任公司 | The corrosion pretreating method of mesohigh electric aluminum foil anodic oxidation deposition zinc or tin nucleus |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62216211A (en) * | 1986-03-17 | 1987-09-22 | 昭和電工株式会社 | Solid electrolytic capacitor |
-
1990
- 1990-04-12 JP JP2097403A patent/JPH0775215B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03101213A (en) | 1991-04-26 |
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