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JPH0776155B2 - Method for manufacturing ceramic superconducting compact - Google Patents
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JPH0776155B2 - Method for manufacturing ceramic superconducting compact - Google Patents

Method for manufacturing ceramic superconducting compact

Info

Publication number
JPH0776155B2
JPH0776155B2 JP62158911A JP15891187A JPH0776155B2 JP H0776155 B2 JPH0776155 B2 JP H0776155B2 JP 62158911 A JP62158911 A JP 62158911A JP 15891187 A JP15891187 A JP 15891187A JP H0776155 B2 JPH0776155 B2 JP H0776155B2
Authority
JP
Japan
Prior art keywords
superconducting
superconductor
substance
vapor phase
ceramics
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62158911A
Other languages
Japanese (ja)
Other versions
JPS643917A (en
Inventor
直樹 宇野
靖三 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furukawa Electric Co Ltd
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Priority to JP62158911A priority Critical patent/JPH0776155B2/en
Publication of JPS643917A publication Critical patent/JPS643917A/en
Publication of JPH0776155B2 publication Critical patent/JPH0776155B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00Superconducting devices
    • H10N60/20Permanent superconducting devices
    • H10N60/203Permanent superconducting devices comprising high-Tc ceramic materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00Superconducting devices
    • H10N60/01Manufacture or treatment
    • H10N60/0268Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0576Processes for depositing or forming copper oxide superconductor layers characterised by the substrate
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00Superconducting devices
    • H10N60/01Manufacture or treatment
    • H10N60/0268Manufacture or treatment of devices comprising copper oxide
    • H10N60/0661Processes performed after copper oxide formation, e.g. patterning

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、臨界電流密度の高いセラミックス超電導成形
体の製造方法に関する。
The present invention relates to a method for producing a ceramics superconducting compact having a high critical current density.

〔従来の技術とその問題点〕[Conventional technology and its problems]

超電導成形体に非超電導物質が内在または被覆されると
磁束の移動が阻止される所謂ピンニング効果が生じて臨
界電流密度(以下Jcと略記)が向上する。
When a non-superconducting substance is contained in or coated on the superconducting compact, a so-called pinning effect that prevents the movement of magnetic flux occurs and the critical current density (hereinafter abbreviated as J c ) is improved.

従来、セラミックス超電導成形体に非超電導物質を内在
または被覆する方法は、加熱処理により反応して超電導
体となる複数の原料粉末を所定のモル比で配合し水など
で混練したのち、これを加熱処理して超電導体となし、
次いでこの上に非超電導物質を付着させ焼成する工程を
所望回数繰り返す方法により行われている。
Conventionally, a method of internally containing or coating a non-superconducting substance in a ceramic superconducting molded body is to mix a plurality of raw material powders which react by heat treatment to form a superconductor at a predetermined molar ratio and knead them with water or the like, and then heat this. Processed into a superconductor,
Then, a step of depositing a non-superconducting substance on the resultant and baking the same is repeated by a desired number of times.

ところで、非超電導物質のピンニング効果は、その表面
積に比例するので非超電導物質は、層状に薄く分布させ
るのが効果的であるが、上記の従来方法によると非超電
導物質を薄く形成することが困難なため、ピンニングの
効率が悪いばかりでなく、超電導体の占める体積比率が
減少し、更に従来法による超電導体は、原料の粉末粒子
径が大きいため、超電導体となる粉末粒子間の固相反応
が十分になされずJcなどの特性が低い欠点があった。
By the way, since the pinning effect of a non-superconducting substance is proportional to its surface area, it is effective to distribute the non-superconducting substance in a thin layer, but it is difficult to form the non-superconducting substance thin according to the above conventional method. Therefore, not only the pinning efficiency is poor, but the volume ratio occupied by the superconductor is reduced. Furthermore, since the powder particle size of the raw material is large in the conventional superconductor, the solid-phase reaction between the powder particles forming the superconductor However, there was a drawback that the characteristics such as Jc were low because of insufficient characteristics.

〔問題点を解決するための手段〕[Means for solving problems]

本発明は、かかる状況に鑑みなされたもので、その目的
とすることろは非超電導物質を薄く内在または被覆した
セラミックス超電導成形体の製造方法を提供することに
ある。即ち本発明は、超電導体を構成する各原子をそれ
ぞれ含む化合物からなる複数のターゲットと非超電導物
質のターゲットを用いて超電導体を構成する原子と非超
電導物質を、気相成長法により基材上に交互に所望厚さ
積層させることを特徴とするものである。
The present invention has been made in view of the above circumstances, and its object is to provide a method for manufacturing a ceramics superconducting molded body in which a non-superconducting substance is thinly contained or coated. That is, the present invention uses a plurality of targets made of a compound containing each atom constituting a superconductor and a target of a non-superconducting substance to form an atom constituting a superconductor and a non-superconducting substance on a substrate by a vapor phase growth method. And a desired thickness is alternately laminated.

本発明では、Y−Ba−Cu−O系,Y−Sr−Cu−O系,La−S
r−Cu−O系などのアルカリ土金属,希土類元素,銅,
酸素からなるセラミックス超電導体において適応性が高
く、上記の構成元素は、Y−Ba−Cu−O系について例示
すると、Y Cu Ba Cu Ba Cu Yの順に各原子が順次配列し
たペロブスカイト型構造をとることにより超電導体とな
り得るものである。
In the present invention, Y-Ba-Cu-O system, Y-Sr-Cu-O system, La-S
alkaline earth metals such as r-Cu-O system, rare earth elements, copper,
It is highly adaptable to ceramic superconductors made of oxygen, and the above constituent elements have a perovskite type structure in which each atom is sequentially arranged in the order of Y Cu Ba Cu Ba Cu Y when the Y-Ba-Cu-O system is exemplified. As a result, it can become a superconductor.

ターゲットとなる化合物は、Y−Ba−Cu−O系に例をと
るとY2O3,BaCO3,CuO3などが用いられる。
As a target compound, for example, Y 2 O 3 , BaCO 3 , CuO 3 or the like is used in the Y-Ba-Cu-O system.

また非超電導物質には、Cu,Cu−Ni,W,Mo,Ni,Al,Sb−Pb
などの金属材料またはガラス,Al2O3,Y2O3,CuO,CaO,MgO,
ZnO2などの無機材料が用いられる。
In addition, Cu, Cu-Ni, W, Mo, Ni, Al, Sb-Pb are used for non-superconducting materials.
Metal materials such as or glass, Al 2 O 3 ,, Y 2 O 3 ,, CuO, CaO, MgO,
An inorganic material such as ZnO 2 is used.

気相成長法としては、スパッタリング法,イオンプレー
ティング法,プラズマ重合法,真空蒸着法などのPVD法
が用いられる。
As the vapor phase growth method, a PVD method such as a sputtering method, an ion plating method, a plasma polymerization method, or a vacuum deposition method is used.

熱分解法,還元法,反応法などのCVD法も適用できる
が、原料の蒸気圧が低く、気相による反応系への導入が
困難なため実用的でない。
CVD methods such as thermal decomposition method, reduction method and reaction method can also be applied, but it is not practical because the vapor pressure of the raw material is low and introduction into the reaction system in the gas phase is difficult.

〔作用〕[Action]

本発明方法では、気相成長法により原子単位の積層がな
されるので超電導体となり得るペロブスカイト構造が容
易に形成される。また気相成長法によれば、非超電導物
質を超電導成形体にきわめて薄く積層させることができ
る。
In the method of the present invention, since the atomic units are stacked by the vapor phase growth method, a perovskite structure which can be a superconductor can be easily formed. Further, according to the vapor phase growth method, the non-superconducting substance can be extremely thinly laminated on the superconducting compact.

非超電導物質は、超電導成形体に内在または被覆され
て、ピンニング効果を生じるものであるが、この他に超
電導体の磁気特性を高め、更には機械的性質を向上させ
る働きがある。
The non-superconducting substance is contained in or coated on the superconducting molded body to cause a pinning effect, but in addition to this, it has the function of enhancing the magnetic properties of the superconductor and further improving the mechanical properties.

〔実施例〕〔Example〕

以下に本発明は実施例により具体的に説明する。 The present invention will be specifically described below with reference to examples.

(実施例1) Y−Ba−Cu−O系超電導体の構成原子を含む化合物Y
2O3,BaO,CuOの粉末および非超電導物質のZrO2粉末をそ
れぞれ直径50mm厚さ3mmの円盤に圧粉成形し、これら4
個の成形体を高周波スパッタ装置の別々のターゲットホ
ルダーにセットし、アルゴンと酸素の混合ガス中でスパ
ッタリングを行い、50μmφのSUS304線上に超電導体の
構成原子および非超電導物質を交互に積層した。
(Example 1) Compound Y containing constituent atoms of a Y-Ba-Cu-O-based superconductor
2 O 3 , BaO, CuO powder and non-superconducting ZrO 2 powder were pressed into a disk with a diameter of 50 mm and a thickness of 3 mm.
The individual compacts were set in different target holders of a high-frequency sputtering apparatus, sputtering was performed in a mixed gas of argon and oxygen, and constituent atoms of a superconductor and non-superconducting substances were alternately laminated on a SUS304 wire having a diameter of 50 μm.

はじめにY2O3,BaO,CuOをY:Ba:Cuのモル比で1:2:3になる
ようにスパッタリングして、上記線上に約1μmの膜を
形成し、次いでこの膜上にZrO2を20Åスパッタリング
し、この工程を10回繰り返し、厚さ約10μmの超電導体
膜を形成した。
First, Y 2 O 3 , BaO, and CuO were sputtered so that the molar ratio of Y: Ba: Cu was 1: 2: 3 to form a film of about 1 μm on the above line, and then ZrO 2 was formed on this film. Was sputtered for 20Å and this process was repeated 10 times to form a superconductor film having a thickness of about 10 μm.

比較のため次の従来方法によりサンプル線を作製した。For comparison, a sample line was prepared by the following conventional method.

(比較例1) Y2O3,BaO,CuOをY:Ba:Cuのモル比が1:2:3になるように水
で混練し、これを50μmφのSUS304線上に3.5μm付着
させたのち、400℃2H焼成し、次いでこの上にZrO2をス
プレードライで約1μm付着させた。上記一連の工程を
3回繰り返して厚さ約10μmの超電導体膜を形成し、次
いでこれを900℃4H加熱処理した。
(Comparative Example 1) Y 2 O 3 , BaO, and CuO were kneaded with water so that the molar ratio of Y: Ba: Cu was 1: 2: 3, and 3.5 μm of this was adhered onto a SUS304 wire of 50 μmφ. Baking at 400 ° C. for 2 hours, and then ZrO 2 was spray-dried thereon to a thickness of about 1 μm. The series of steps described above was repeated three times to form a superconductor film having a thickness of about 10 μm, and this was heat treated at 900 ° C. for 4H.

上記の実施例および比較例の2種のサンプル線を化学組
成および結晶構造を調整するために、O2気流中で700℃8
H加熱したのち2℃/minの速度で徐冷した。
In order to adjust the chemical composition and crystal structure of two samples lines of Examples and Comparative Examples, 700 ° C. in O 2 gas stream 8
After heating to H, it was gradually cooled at a rate of 2 ° C / min.

これらのサンプル線についてTc,Jc,磁化率を測定した。
結果は第1表に示した。
The T c , J c and magnetic susceptibility of these sample lines were measured.
The results are shown in Table 1.

第1表より明らかなように本発明品(1)は従来の比較
方法品(2)に較べてTc,Jc,磁化率とも高い値を示して
いる。
As is clear from Table 1, the product (1) of the present invention has higher values of T c , J c and magnetic susceptibility than the product of the conventional comparison method (2).

実施例では、非超電導物質を同心円の層状に分布させた
が、薄い片状にして分散させても同様の効果が得られ
る。
In the examples, the non-superconducting substance is distributed in concentric layers, but the same effect can be obtained by dispersing the non-superconducting substance in the form of thin pieces.

〔効果〕〔effect〕

以上述べたように、本発明によれば超電導体に非超電導
物質を薄く内在または被覆できるのでピンニングが効率
よくなされ、また超電導体の占める比率が高く、且つ超
電導体の構成原子が適切に配列されるので、Jcなどの超
電導特性に優れたセラミックス超電導成形体が得られ、
工業上顕著な効果を奏する。
As described above, according to the present invention, since the non-superconducting substance can be thinly contained or coated in the superconductor, pinning is efficiently performed, and the ratio of the superconductor is high, and the constituent atoms of the superconductor are appropriately arranged. Therefore, a ceramics superconducting compact having excellent superconducting properties such as J c can be obtained.
It has a remarkable industrial effect.

フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 FI 技術表示箇所 H01B 13/00 HCU 7244−5G Continuation of front page (51) Int.Cl. 6 Identification number Reference number within the agency FI Technical display area H01B 13/00 HCU 7244-5G

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】超電導体を構成する各原子をそれぞれ含む
化合物からなる複数のターゲットと非超電導物質のター
ゲットを用いて超電導体を構成する原子と非超電導物質
を、気相成長法により基材上に交互に所望厚さ積層させ
ることを特徴とするセラミックス超電導成形体の製造方
法。
1. A plurality of targets made of a compound containing each atom constituting a superconductor and a target of a non-superconducting substance are used to deposit the atoms constituting the superconductor and the non-superconducting substance on a substrate by a vapor phase growth method. A method for manufacturing a ceramics superconducting molded body, comprising alternately laminating a desired thickness.
【請求項2】超電導体を構成する原子が、アルカリ土金
属,希土類元素,銅および酸素からなることを特徴とす
る特許請求の範囲第1項記載のセラミックス超電導成形
体の製造方法。
2. The method for producing a ceramics superconducting compact according to claim 1, wherein the atoms constituting the superconductor are composed of an alkaline earth metal, a rare earth element, copper and oxygen.
【請求項3】気相成長法がPVD法であることを特徴とす
る特許請求の範囲第1,2項いずれかに記載のセラミック
ス超電導成形体の製造方法。
3. The method for producing a ceramics superconducting compact according to claim 1, wherein the vapor phase growth method is a PVD method.
JP62158911A 1987-06-26 1987-06-26 Method for manufacturing ceramic superconducting compact Expired - Fee Related JPH0776155B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62158911A JPH0776155B2 (en) 1987-06-26 1987-06-26 Method for manufacturing ceramic superconducting compact

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62158911A JPH0776155B2 (en) 1987-06-26 1987-06-26 Method for manufacturing ceramic superconducting compact

Publications (2)

Publication Number Publication Date
JPS643917A JPS643917A (en) 1989-01-09
JPH0776155B2 true JPH0776155B2 (en) 1995-08-16

Family

ID=15682038

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62158911A Expired - Fee Related JPH0776155B2 (en) 1987-06-26 1987-06-26 Method for manufacturing ceramic superconducting compact

Country Status (1)

Country Link
JP (1) JPH0776155B2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6454612A (en) * 1987-08-24 1989-03-02 Sumitomo Electric Industries Superconductive structure
DE69016283T3 (en) * 1989-06-30 1998-04-02 Sumitomo Electric Industries Substrate with a superconducting layer.
JP2726750B2 (en) * 1990-11-05 1998-03-11 財団法人 国際超電導産業技術研究センター Oxide superconducting thin film
JPH04298913A (en) * 1991-04-01 1992-10-22 Semiconductor Energy Lab Co Ltd Superconducting wire
US6383989B2 (en) * 2000-06-21 2002-05-07 The Regents Of The University Of California Architecture for high critical current superconducting tapes
JP2008130291A (en) * 2006-11-17 2008-06-05 Central Res Inst Of Electric Power Ind Superconductor film and manufacturing method thereof
JP5736603B2 (en) * 2010-11-22 2015-06-17 住友電気工業株式会社 REBCO oxide superconducting thin film and manufacturing method thereof

Also Published As

Publication number Publication date
JPS643917A (en) 1989-01-09

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