JPH0777011B2 - Method of manufacturing thin film magnetic head - Google Patents
Method of manufacturing thin film magnetic headInfo
- Publication number
- JPH0777011B2 JPH0777011B2 JP29453987A JP29453987A JPH0777011B2 JP H0777011 B2 JPH0777011 B2 JP H0777011B2 JP 29453987 A JP29453987 A JP 29453987A JP 29453987 A JP29453987 A JP 29453987A JP H0777011 B2 JPH0777011 B2 JP H0777011B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- core
- magnetic head
- thin film
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 title claims description 23
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 239000010408 film Substances 0.000 claims description 23
- 239000004020 conductor Substances 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 13
- 238000010030 laminating Methods 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 29
- 230000005415 magnetization Effects 0.000 description 11
- 230000004907 flux Effects 0.000 description 9
- 230000035699 permeability Effects 0.000 description 9
- 239000000463 material Substances 0.000 description 6
- 239000000696 magnetic material Substances 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 238000007740 vapor deposition Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 229910000702 sendust Inorganic materials 0.000 description 4
- 125000006850 spacer group Chemical group 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical group [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/3113—Details for improving the magnetic domain structure or avoiding the formation or displacement of undesirable magnetic domains
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
- G11B5/3143—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding
- G11B5/3146—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding magnetic layers
- G11B5/3153—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding magnetic layers including at least one magnetic thin film coupled by interfacing to the basic magnetic thin film structure
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Magnetic Heads (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、磁気記録再生装置に適用される薄膜磁気ヘ
ツドを製造する薄膜磁気ヘツドの製造方法に関する。Description: TECHNICAL FIELD The present invention relates to a method for manufacturing a thin film magnetic head for manufacturing a thin film magnetic head applied to a magnetic recording / reproducing apparatus.
通常、磁気記録再生装置に適用される磁性ヘツドとして
磁気コアと巻線とからなるバルクタイプのものが一般的
であるが、最近では、たとえば特開昭62−46416号公報
（G11B 5/31）に記載のような薄膜磁気ヘツドが、小型
化，高密度化を容易に図れるという利点から、注目さ
れ，盛んに開発が進められている。Normally, a bulk type magnetic head comprising a magnetic core and a winding is generally used as a magnetic head applied to a magnetic recording / reproducing apparatus, but recently, for example, JP-A-62-46416 (G11B 5/31). The thin-film magnetic head as described in 1) has attracted attention and is under active development because it has the advantage of being easily miniaturized and increased in density.
そして、この種の薄膜磁気ヘツドは、たとえば第３図に
示すように構成されており、ガラスなどの非磁性基板
（１）上に下部磁性コア（２）が形成されたのち、下部
磁性コア（２）の上面の一部に絶縁層を介して渦巻状の
導体コイル層（３）が形成され、下部磁性コア（２）の
前部の上面にギヤツプスペーサ層（４）が形成され、ギ
ヤツプスペーサ層（４）上から，絶縁層（５）を介した
導体コイル層（３）前部上，下部磁性コア（２）の後部
上にわたつて上部磁性コア（６）が形成され、その後低
融点ガラス材（７）により上部磁性コア（６）上に保護
板（８）が接合され、薄膜磁気ヘツドの製造が行なわれ
る。This type of thin film magnetic head is constructed, for example, as shown in FIG. 3, and after the lower magnetic core (2) is formed on the non-magnetic substrate (1) such as glass, the lower magnetic core ( A spiral conductor coil layer (3) is formed on a part of the upper surface of 2) via an insulating layer, and a gear spacer layer (4) is formed on the upper surface of the front part of the lower magnetic core (2). 4) An upper magnetic core (6) is formed from above on the front part of the conductor coil layer (3) and the rear part of the lower magnetic core (2) via the insulating layer (5), and then a low melting glass material. The protective plate (8) is bonded onto the upper magnetic core (6) by (7), and the thin film magnetic head is manufactured.
ところが、その種従来の薄膜磁気ヘツドの場合、下部磁
性コア（２）および上部磁性コア（６）が、ともに厚さ
５〜20μｍの単層構造であり、センダスト合金やパーマ
ロイ,Co系アモルフアス合金などの高透磁率金属材料を
蒸着あるいはスパツタリングにより形成されており、こ
れらの高透磁率金属の透磁率が高周波に対して低下する
傾向があるため、このように高透磁率金属材料を下部，
上部磁性コア（２），（６）に使用した従来の薄膜磁気
ヘツドでは、高周波領域において記録再生効率が低下す
るという問題点がある。However, in the case of such a conventional thin film magnetic head, both the lower magnetic core (2) and the upper magnetic core (6) have a single layer structure with a thickness of 5 to 20 μm, such as sendust alloy, permalloy, and Co-based amorphous alloy. The high-permeability metal material is formed by vapor deposition or sputtering, and the magnetic permeability of these high-permeability metals tends to decrease with respect to high frequencies.
The conventional thin film magnetic head used for the upper magnetic cores (2) and (6) has a problem that recording / reproducing efficiency is lowered in a high frequency region.
また、第３図に示す薄膜磁気ヘツドの場合、導体コイル
層（３）および絶縁層（５）の層厚によつて生じる上部
磁性コア（６）の傾斜部の厚みが他の平坦部に比べて薄
くなるため、この傾斜部での漏れ磁束が多くなり、記録
再生効率の低下を増長するという問題点がある。Further, in the case of the thin film magnetic head shown in FIG. 3, the thickness of the inclined portion of the upper magnetic core (6) caused by the layer thickness of the conductor coil layer (3) and the insulating layer (5) is larger than that of other flat portions. Therefore, there is a problem that the magnetic flux leaks from the inclined portion is increased and the deterioration of the recording / reproducing efficiency is increased.
そこで、この発明では、薄膜磁気ヘツドの高周波領域に
おける磁気特性を改善し、記録再生効率の向上を図るこ
とを技術的課題とする。Therefore, it is a technical object of the present invention to improve the magnetic characteristics of the thin film magnetic head in the high frequency region and to improve the recording / reproducing efficiency.
そして、前記した従来技術の問題点を解決するための手
段を、実施例に対応する第１図および第２図を用いて説
明する。Then, means for solving the above-mentioned problems of the prior art will be described with reference to FIGS. 1 and 2 corresponding to the embodiment.
すなわち、基板（９）上に、下部磁性コア（12），導体
コイル層（13），上部磁性コア（22）を積層して薄膜磁
気ヘツドを製造する薄膜磁気ヘツドの製造方法におい
て、この発明では、 フロントギヤツプ部およびバツクギヤツプ部の前記下部
磁性コア（12）上に、磁気異方性磁性膜（17）を，該磁
性膜（17）の磁化困難軸が磁気記録媒体の摺接する前記
基板（９）の前面に垂直になるように積層して第１コア
（18）を形成し、 前記第１コア（18）上に該第１のコア（18）のフロント
ギャップ上の部分とバックギャップ上の部分とが連結す
るように磁性膜（19）を積層して第２コア（21）形成
し、 前記第1,第２コア（18），（21）の積層により前記上部
磁性コア（22）を形成している。That is, in the method of manufacturing a thin film magnetic head, the lower magnetic core (12), the conductor coil layer (13) and the upper magnetic core (22) are laminated on the substrate (9) to manufacture a thin film magnetic head. A magnetic anisotropic magnetic film (17) on the lower magnetic cores (12) of the front gear part and the back gear part, and the hard magnetic axis of the magnetic film (17) is in sliding contact with the magnetic recording medium (9). A first core (18) is formed by stacking the first core (18) so as to be perpendicular to the front surface of the first core (18), and a portion of the first core (18) on the front gap and a portion of the back gap. A magnetic film (19) is laminated to form a second core (21) so that the upper magnetic core (22) is formed by laminating the first and second cores (18) and (21). is doing.
したがつて、この発明によると、磁気異方性を有する磁
性体の高周波領域（10KHz以上）における透磁率が、磁
化困難軸方向で最大となり，磁化容易軸方向で最小とな
るため、第１コア（18）の材料として磁気異方性を有す
る磁性材料を用い、その磁化困難軸が磁気記録媒体の摺
接する基板（９）の前面に垂直になるように第１コア
（18）を形成することにより、高周波領域における透磁
率の最も高い磁化困難軸の方向と記録，再生時の磁束の
伝搬方向とが平行となり、高周波領域における磁気ヘツ
ドの記録再生効率の向上が図れ、しかも上部磁性コア
（22）を第１コア（18）および第２コア（21）の積層に
より形成することにより、従来のように導体コイル層
（13）の層厚による傾斜部が上部磁性コア（22）に生じ
ることがなく、上部磁性コア（22）における漏れ磁束の
発生が防止され、磁気ヘツドの記録再生効率のいつそう
の向上が図れることになる。Therefore, according to the present invention, the magnetic permeability in the high frequency region (10 KHz or more) of the magnetic material having magnetic anisotropy becomes maximum in the hard magnetization axis direction and minimum in the easy magnetization axis direction. A magnetic material having magnetic anisotropy is used as the material of (18), and the first core (18) is formed so that its hard axis of magnetization is perpendicular to the front surface of the substrate (9) in sliding contact with the magnetic recording medium. As a result, the direction of the hard axis having the highest magnetic permeability in the high frequency region becomes parallel to the magnetic flux propagation direction during recording and reproduction, and the recording / reproducing efficiency of the magnetic head in the high frequency region can be improved, and the upper magnetic core (22 ) Is formed by stacking the first core (18) and the second core (21), an inclined portion due to the layer thickness of the conductor coil layer (13) may be formed in the upper magnetic core (22) as in the conventional case. Without the upper magnetic core (22 Generation of the leakage magnetic flux can be prevented in, so that attained the time so improvement of the recording and reproducing efficiency of the magnetic head.
つぎに、この発明を、その１実施例を示した第１図およ
び第２図とともに詳細に説明する。なお、第１図は完成
した薄膜磁気ヘツドの切断右側面図であり、第２図
（ａ）〜（ｉ）は製造工程を示す斜視図である。Next, the present invention will be described in detail with reference to FIGS. 1 and 2 showing one embodiment thereof. Incidentally, FIG. 1 is a cut right side view of the completed thin film magnetic head, and FIGS. 2 (a) to (i) are perspective views showing a manufacturing process.
まず、第２図（ａ）に示すようなガラス等からなる四角
形の非磁性基板（９）の前半部上に、同図（ｂ）に示す
ように、２層のセンダスト膜（10）の間に,SiO2やAl2O3
等の絶縁膜（11）を介在させた多層構造の下部磁性コア
（12）を、蒸着あるいはスパツタリングにより形成す
る。このとき、第２図（ｂ）に示すように、絶縁膜（1
1）のフロントギヤツプ部およびバツクギヤツプ部に相
当する部分を除去しておく。First, as shown in FIG. 2 (b), between two sendust films (10) on the front half of a square non-magnetic substrate (9) made of glass or the like as shown in FIG. 2 (a). In addition, SiO 2 and Al 2 O 3
A lower magnetic core (12) having a multi-layer structure with an insulating film (11) such as is interposed therebetween is formed by vapor deposition or sputtering. At this time, as shown in FIG. 2 (b), the insulating film (1
Remove the parts corresponding to the front gear back and back gear back of 1).
つぎに、第２図（ｃ）に示すように、フオトリゾグラフ
イ技術により、下部磁性コア（12）上に銅等の導電性材
料からなる矩形の渦巻状の導体コイル層（13）を形成す
るとともに、フロントギヤツプ部である前部の下部磁性
コア（12）上に所定厚さのギヤプスペーサ層（14）を形
成したのち、同図（ｄ）に示すように、前部を除く下部
磁性コア（12）上および導体コイル層（13）上に絶縁層
（15）を形成する。Next, as shown in FIG. 2 (c), a rectangular spiral-shaped conductor coil layer (13) made of a conductive material such as copper is formed on the lower magnetic core (12) by a photolithography technique. At the same time, after forming a gear spacer layer (14) of a predetermined thickness on the front lower magnetic core (12) which is the front gear portion, as shown in FIG. An insulating layer (15) is formed on the conductor layer (12) and the conductor coil layer (13).
このとき、絶縁層（15）のバツクギヤツプ部に相当する
部分をエツチング等により除去して開口（16）を形成
し、開口（16）に下部磁性コア（12）が露出するように
しておく。なお、（13）は基板（９）上の後半部に形成
された導体コイル層（13）の接続リード部である。At this time, a portion of the insulating layer (15) corresponding to the back gap portion is removed by etching or the like to form an opening (16) so that the lower magnetic core (12) is exposed in the opening (16). Reference numeral (13) is a connection lead portion of the conductor coil layer (13) formed on the rear half of the substrate (9).
そして、第２図（ｅ）に示すように、ギヤツプスペーサ
層（14）上から、絶縁層（15）の前部上，開口（16）内
の下部磁性コア（12）上にわたり、Co系アモルフアス材
等からなる磁気異方性磁性膜（17）を，該磁性膜（17）
の磁化困難軸が磁気テープなどの磁気記録媒体の摺接す
る基板（９）の前面に垂直になるように磁界をかけなが
ら、蒸着あるいはスパツタリング等により形成したの
ち、同図（ｆ）に示すように、エツチングにより、磁性
膜（17）のフロントギヤツプ部およびバツクギヤツプ部
のみを残して他の部分を除去し、第１コア（18）を形成
し、同図（ｇ）に示すように、第１コア（18）上に該第
１コア（18）のフロントギャップ上の部分とバックギャ
ップ上の部分とが連結するように、等方性磁性膜である
多層の等方性センダスト膜（19）に絶縁膜（20）を介在
させてなる第２コア（21）を蒸着あるいはスパツタリン
グにより積層し、同図（ｈ）に示すように、第1,第２コ
ア（18），（21）からなる上部磁性コア（22）を形成す
る。Then, as shown in FIG. 2 (e), the Co-based amorphous material is spread over the gap spacer layer (14), the front part of the insulating layer (15) and the lower magnetic core (12) in the opening (16). A magnetic anisotropic magnetic film (17) composed of
Is formed by vapor deposition or sputtering while applying a magnetic field so that the hard axis of magnetization becomes perpendicular to the front surface of the substrate (9) which is in sliding contact with a magnetic recording medium such as a magnetic tape, as shown in FIG. , Etching removes the other parts of the magnetic film (17), leaving only the front gear back portion and the back gear tap portion, to form the first core (18), and as shown in FIG. An insulating film is formed on the multilayer isotropic sendust film (19) which is an isotropic magnetic film so that the part on the front gap and the part on the back gap of the first core (18) are connected to each other. The second core (21) having the (20) interposed is laminated by vapor deposition or sputtering to form an upper magnetic core composed of the first and second cores (18) and (21) as shown in FIG. (22) is formed.
つぎに、第２図（ｉ）に示すように、上部磁性コア（2
2）上および絶縁膜（15）上に、低融点ガラス（23）に
よりチタン酸バリウム等のセラミツク材料からなる保護
板（24）を接合し、薄膜磁気ヘツドが完成する。Next, as shown in FIG. 2 (i), the upper magnetic core (2
2) A protective plate (24) made of a ceramic material such as barium titanate is bonded to the upper surface and the insulating film (15) by a low melting point glass (23) to complete a thin film magnetic head.
このとき、磁気異方性を有する磁性体の高周波領域（10
KHz以上）における透磁率が、磁化困難軸方向で最大と
なり，磁化容易軸方向で最小となるため、第１コア（1
8）の材料として磁気異方性を有する磁性材料を用い、
しかもその磁化困難軸が磁気記録媒体の摺接する基板
（９）の前面に垂直になるように第１コア（18）を形成
することにより、高周波領域における透磁率の最も高い
磁化困難軸の方向と記録，再生時の磁束の伝搬方向とが
平行になり、高周波領域における磁気ヘツドの記録再生
効率の向上が図れる。At this time, the high frequency region (10
The magnetic permeability at KHz or higher becomes maximum in the direction of hard magnetization and minimum in the direction of easy magnetization.
A magnetic material having magnetic anisotropy is used as the material of 8),
Moreover, by forming the first core (18) so that the hard axis of magnetization is perpendicular to the front surface of the substrate (9) which is in sliding contact with the magnetic recording medium, the direction of the hard axis of magnetization having the highest magnetic permeability in the high frequency region can be obtained. The magnetic flux propagation direction during recording and reproduction becomes parallel, and the recording / reproducing efficiency of the magnetic head in the high frequency region can be improved.
また、上部磁性コア（22）を第１コア（18）および第２
コア（21）の積層により形成することにより、従来のよ
うに導体コイル層（13）の層厚による傾斜部が上部磁性
コア（22）に生じることがなく、上部磁性コア（22）に
生じることがなく、上部磁性コア（22）における漏れ磁
束の発生が防止され、磁気ヘツドの記録再生効率のいつ
そうの向上が図れる。In addition, the upper magnetic core (22) is connected to the first core (18) and the second magnetic core (22).
By forming the core (21) by stacking, the inclined portion due to the layer thickness of the conductor coil layer (13) does not occur in the upper magnetic core (22) as in the conventional case, but occurs in the upper magnetic core (22). Therefore, the generation of leakage flux in the upper magnetic core (22) is prevented, and the recording / reproducing efficiency of the magnetic head can be improved at any time.
さらに、下部磁性コア（12）および上部磁性コア（18）
の第２コア（21）を、多層の磁性膜に絶縁膜を介在させ
た構造としたため、従来に比べ、うず電流損が抑制さ
れ、結晶異方性に伴う透磁率の減少が抑えられ、磁気ヘ
ツドの特性の向上が図れる。In addition, the lower magnetic core (12) and the upper magnetic core (18)
Since the second core (21) has a structure in which an insulating film is interposed in a multi-layer magnetic film, eddy current loss is suppressed and the decrease in magnetic permeability due to crystal anisotropy is suppressed as compared with the conventional structure. The head characteristics can be improved.
したがつて、前記実施例によると、上部磁性コア（22）
の第１コア（18）の材料として磁気異方性を有する磁性
材料を用い、その磁化困難軸が磁気記録媒体の摺接する
基板（９）の前面に垂直になるように第１コア（18）を
形成したため、高周波領域における透磁率の最も高い磁
化困難軸の方向と記録，再生時の磁束の伝搬方向とを平
行にすることができ、高周波領域における磁気ヘツドの
記録再生効率の向上を図ることができる。Therefore, according to the above embodiment, the upper magnetic core (22)
A magnetic material having magnetic anisotropy is used as the material of the first core (18) of the first core (18) so that its hard axis of magnetization is perpendicular to the front surface of the substrate (9) in sliding contact with the magnetic recording medium. Since it is formed, the direction of the hard axis having the highest magnetic permeability in the high frequency region can be made parallel to the propagation direction of the magnetic flux during recording and reproduction, and the recording / reproducing efficiency of the magnetic head in the high frequency region can be improved. You can
また、上部磁性コア（22）を第１コア（18）および第２
コア（21）の積層により形成したため、従来のように導
体コイル層（13）の層厚による傾斜部が上部磁性コア
（22）に生じることがなく、上部磁性コア（22）におけ
る漏れ磁束の発生を防止でき、磁気ヘツドの記録再生効
率のいつそうの向上を図ることができ、しかも下部磁性
コア（12）および第２コア（21）の多層構造化により、
うず電流損の抑制および透磁率の低下の抑制を図ること
ができ、特性の優れた薄膜磁気ヘツドを提供することが
できる。In addition, the upper magnetic core (22) is connected to the first core (18) and the second magnetic core (22).
Since it is formed by stacking the cores (21), an inclined portion due to the layer thickness of the conductor coil layer (13) does not occur in the upper magnetic core (22) unlike the conventional case, and a leakage magnetic flux is generated in the upper magnetic core (22). Can be prevented, the recording / reproducing efficiency of the magnetic head can be improved at any time, and the lower magnetic core (12) and the second core (21) have a multilayer structure.
It is possible to suppress eddy current loss and decrease in magnetic permeability, and to provide a thin film magnetic head with excellent characteristics.
なお、前記実施例では、第１コア（18）を形成する場
合、蒸着あるいはスパツタリングの際に磁界をかけなが
ら磁気異方性磁性膜（17）を形成することにより、該磁
性膜（17）の磁化困難軸が磁気記録媒体の摺接する基板
（９）の前面に垂直になるようにしたが、磁性膜（17）
の成膜時には磁界をかけず、成膜後の熱処理時に磁界を
かけることにより、磁性膜（17）の磁化困難軸が基板
（９）の前面に垂直になるようにしてもよい。In the above-mentioned embodiment, when the first core (18) is formed, the magnetic anisotropic magnetic film (17) is formed by applying a magnetic field during vapor deposition or sputtering, so that the magnetic film (17) is formed. The hard axis of magnetization was made perpendicular to the front surface of the substrate (9) in sliding contact with the magnetic recording medium.
The magnetic field may not be applied during the film formation, and the hard axis of the magnetic film (17) may be perpendicular to the front surface of the substrate (9) by applying the magnetic field during the heat treatment after the film formation.
以上のように、この発明の薄膜磁気ヘツドの製造方法に
よると、上部磁性コアの第１コアの材料として、磁気異
方性を有する磁性材料を用い、その磁化困難軸が磁気記
録媒体の摺接する基板の前面に垂直になるように第１コ
アを形成したため、高周波領域における透磁率の最も高
い磁化困難軸の方向と記録，再生時の磁束の伝搬方向と
を平行にすることができ、高周波領域における磁気ヘツ
ドの記録再生効率の向上を図ることができ、しかも上部
磁性コアを第１コアおよび第２コアの積層により形成し
たため、従来のように導体コイル層の層厚による傾斜部
が上部磁性コアに生じることがなく、上部磁性コアにお
ける漏れ磁束の発生を防止でき、磁気ヘツドの記録再生
効率のいつそうの向上を図ることが可能となり、特性の
優れた薄膜磁気ヘツドを提供することができ、その効果
は極めて大きい。As described above, according to the method of manufacturing a thin-film magnetic head of the present invention, a magnetic material having magnetic anisotropy is used as the material of the first core of the upper magnetic core, and the hard axis of magnetization makes sliding contact with the magnetic recording medium. Since the first core is formed so as to be perpendicular to the front surface of the substrate, it is possible to make the direction of the hard axis having the highest magnetic permeability in the high frequency region parallel to the propagation direction of the magnetic flux at the time of recording and reproduction, and thus the high frequency region. It is possible to improve the recording / reproducing efficiency of the magnetic head in, and since the upper magnetic core is formed by laminating the first core and the second core, the inclined portion due to the layer thickness of the conductor coil layer has the upper magnetic core as in the conventional case. It is possible to prevent the generation of leakage flux in the upper magnetic core, and to improve the recording / reproducing efficiency of the magnetic head anytime. It is possible to provide the soil, the effect is very large.
第１図および第２図はこの発明の薄膜磁気ヘツドの製造
方法の１実施例を示し、第１図は製造された薄膜磁気ヘ
ツドの切断右側面図、第２図（ａ）〜（ｉ）はそれぞれ
製造工程を示す前方からの斜視図、第３図は従来の薄膜
磁気ヘツドの製造方法により製造された薄膜磁気ヘツド
の切断右側面図である。 （９）……基板、（12）……下部磁性コア、（13）……
導体コイル層、（17）……磁気異方性磁性膜、（18）…
…第１コア、（19）……等方性センダスト膜、（21）…
…第２コア、（22）……上部磁性コア。1 and 2 show an embodiment of a method of manufacturing a thin film magnetic head according to the present invention. FIG. 1 is a right side view of a cut thin film magnetic head manufactured, and FIGS. 2 (a) to (i). FIG. 3 is a perspective view from the front showing respective manufacturing steps, and FIG. 3 is a right side view of a thin film magnetic head manufactured by a conventional method for manufacturing a thin film magnetic head. (9) …… Substrate, (12) …… Lower magnetic core, (13) ……
Conductor coil layer, (17) …… Magnetic anisotropic magnetic film, (18) ・ ・ ・
... 1st core, (19) ... isotropic sendust film, (21) ...
… Second core, (22) …… Upper magnetic core.
Claims (1)
上部磁性コアを積層して薄膜磁気ヘッドを製造する薄膜
磁気ヘッドの製造方法において、 フロントギャップ部およびバックギャップ部の前記下部
磁性コア上に、磁気異方性磁性膜を、該磁性膜の磁気困
難軸が磁気記録媒体の摺接する前記基板の前面に垂直に
なるように積層して第１コアを形成し、 前記第１コア上に該第１のコアのフロントギャップ上の
部分とバックギャップ上の部分とが連結するように磁性
膜を積層して第２コアを形成し、 前記第１、第２コアの積層により前記上部磁性コアを形
成することを特徴とする薄膜磁気ヘッドの製造方法。1. A lower magnetic core, a conductor coil layer, and
In a method of manufacturing a thin film magnetic head in which an upper magnetic core is laminated to manufacture a thin film magnetic head, a magnetic anisotropic magnetic film is formed on the lower magnetic core in the front gap portion and the back gap portion, and The first core is formed by stacking so that the axis is perpendicular to the front surface of the substrate that is in sliding contact with the magnetic recording medium, and the first core is formed on the first core and on the front gap and the back gap. A method of manufacturing a thin-film magnetic head, wherein a magnetic film is laminated so as to be connected to a portion to form a second core, and the upper magnetic core is formed by laminating the first and second cores.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29453987A JPH0777011B2 (en) | 1987-11-20 | 1987-11-20 | Method of manufacturing thin film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29453987A JPH0777011B2 (en) | 1987-11-20 | 1987-11-20 | Method of manufacturing thin film magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01137418A JPH01137418A (en) | 1989-05-30 |
| JPH0777011B2 true JPH0777011B2 (en) | 1995-08-16 |
Family
ID=17809093
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29453987A Expired - Lifetime JPH0777011B2 (en) | 1987-11-20 | 1987-11-20 | Method of manufacturing thin film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0777011B2 (en) |
-
1987
- 1987-11-20 JP JP29453987A patent/JPH0777011B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01137418A (en) | 1989-05-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0668422A (en) | Magnetic pole structure of high densidy thin film recording head | |
| JPH11110717A (en) | Thin film single pole head | |
| US4868698A (en) | Magnetic head | |
| JPH0778858B2 (en) | Thin film magnetic head | |
| JP3394266B2 (en) | Method of manufacturing magnetic write / read head | |
| US5247415A (en) | Magnetic head having main and auxiliary magnetic paths | |
| JPS60175208A (en) | thin film magnetic head | |
| JPS61178710A (en) | Thin film magnetic head and manufacture thereof | |
| JPH0777011B2 (en) | Method of manufacturing thin film magnetic head | |
| JPS6142717A (en) | Thin-film magnetic head | |
| JP2891817B2 (en) | Magnetic head manufacturing method | |
| JPS6247812A (en) | Thin film magnetic head | |
| JP2002279608A (en) | Thin-film magnetic head and method of manufacturing the same | |
| JP3211295B2 (en) | Stacked magnetic head | |
| JPS62205507A (en) | Magnetic head | |
| JPH11316910A (en) | Thin film magnetic head and method of manufacturing the same | |
| JP3147420B2 (en) | Laminated magnetic head and method of manufacturing the same | |
| JPS6323771Y2 (en) | ||
| JPH02216604A (en) | Magnetic head and its production | |
| JPS632109A (en) | Magnetic head | |
| JPH02105309A (en) | Thin film magnetic head | |
| JPH0276111A (en) | thin film magnetic head | |
| JPH0468683B2 (en) | ||
| JPH01119911A (en) | Thin film magnetic head | |
| JPS6394418A (en) | magnetic head |