JPH077717B2 - Air ionization adjusting method and device - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to an air ionization method and apparatus, and in particular, for suppressing the electrostatic charge by keeping the ion content in the atmosphere in a specific region at a predetermined value. , Or for the control of air ionization devices for other purposes.

[Conventional technology]

The accumulation of electrostatic charge can cause various detrimental effects. That is, the discharge of electrostatic charges not only makes people uncomfortable, but can also disrupt the operation of electronic devices such as computers. The problem of electrostatic charge creation is particularly sought to be solved in certain industrial operations, such as the manufacture of small semiconductor electronic devices as a prominent example.

The discharge of static electricity may destroy minute conductive passages in a microchip wafer, and the accumulation of electric charges on such a wafer may attract fine dust and make the product defective. Have.

Maintaining a high level of ionization in the vicinity of the object to be protected is a clean manufacturing method for electronic devices.
Although a very effective technique for suppressing the buildup of electrostatic charge in rooms or elsewhere, the accumulation of charge on the object attracts air ions of opposite polarity, thus neutralizing the charge.

Most air ionization systems have one or more sharp, pointed electrodes adapted to provide a high voltage. In this case, the strong electric field generated near the tip of the electrode causes the molecules of the constituent gas of the air to separate into positive and negative charged ions. Thus, ions of the opposite polarity or charge of that of the electrode are attracted to and neutralized by the electrode, and ions of the same polarity are repelled by the electrode and from each other and dispersed outwardly into the surrounding atmosphere. Also, the movement of ions from the electrodes to the area of the object to be protected is usually accelerated by providing a flow of air from the electrodes to the object area.

In the case of air ionization systems intended to suppress electrostatic charge, the charge to be suppressed can be of either polarity and is therefore usually designed to produce both positive and negative ions, which have opposite voltages. Use two electrodes,
This can be achieved by periodically reversing the voltage on one electrode. Producing both types of ions simultaneously tends to reduce the effective range of the device because the mixed positive and negative ions are rapidly neutralized with each other by charge exchange.

U.S. Pat. No. 4,54, filed on September 17, 1985 by Scott JSGehlke et al.
No. 2,434 "Meteod and Apparatus for Sequenced Bipolar
Air Ionization) "describes a method and apparatus that extends the effective range of a bipolar air ionization device and also provides other advantages. It is designed to initiate the generation of positive and negative ions at distant electrodes during alternating time periods separated by off-intervals, which do not significantly mix the two types of ions or neutralize each other. The flow of air allows the pulses of each ion to be carried a considerable distance from the electrodes before the onset of.

In devices of the type described above, a precise limit on the ion output rate is desired. In addition, effective electrostatic charge suppression at a specific location requires that the ratio of positive ions to negative ions be within a narrow range and that the total concentration of ions in the atmosphere is close to or equal to the optimum value. Is. Too many ions of one polarity have the unproductive effect of charging the object. Also, a low concentration of ions is not suitable for neutralizing the electrostatic charge, and too high a concentration has a detrimental effect. The optimum value of the required positive ion to negative ion ratio and the optimum total ion concentration vary from place to place. Also, the optimum ratios and concentrations may change over a period of time at a particular location due to changes in activity at that location, equipment, air flow patterns, or other conditions. Also, the air ion content at the location may deviate from the desired level due to changes in the ionization device itself, such as electrode degradation due to corrosion, fluctuations in commercial power supply voltage or other causes.

Therefore, the air ionizer must allow individual adjustments of both positive and negative ion production rates, and atmospheric ions at the location to be readjusted when changes in conditions favor it. It is preferable to monitor the content.

In the system described in the aforementioned U.S. Pat.No. 4,542,434, the positive and negative electrode voltages, the timing of the positive and negative ion production cycles and the duration of the off cycle between the ion production cycles are each individually adjustable. ing. This allows tuning of the system to provide a positive ion to negative ion ratio and total ion concentration that meet the needs of the particular site where the system is installed. Thus, the ion level at the location can be monitored by the sensor device and retuned to each other when changing conditions require it.

Bipolar air ionization devices of the type described above have at least one negative ion generating electrode coupled to a negative high voltage generator and at least one positive ion generating electrode coupled to a positive high voltage generator, and control The system produces a periodic timing signal that alternately activates the negative and positive high voltage generators so that only one type of ion is produced at any given time. In this way, direct neutralization that may occur due to charge exchange between ions of opposite polarity can be avoided. The control system can also be adjusted to provide an off-interval in which no generator is activated following each activation of the high voltage generator.
In this way, each polarity ion will scatter a considerable distance from the electrode before the opposite polarity ions are produced, delaying mixing of opposite polarity ions and thus delaying neutralization by mutual charge exchange. This extends the effective range of the air ionization system.

Until now, due to the characteristics of high voltage generators, timing
There was an undesired prolongation of ion production following each ion generation cycle as required by the system. That is, each high voltage generator has a capacity such that the control system charges it to a higher voltage level each time the generator is activated, and after the control system deactivates the high voltage generator, the capacitor is switched on. It takes some time to discharge. As a result, ion production continues to occur for a limited period at a reduced rate during the off intervals required by the control system. Therefore, the control accuracy of the ion generation rate and the timing is lowered, and the effect of the off interval for expanding the range of the air ionization device as described above is reduced. In particular, the problem becomes significant when the flow velocity of air in the vicinity of the ionization electrode is low and residual produced ions cannot be rapidly carried away from the electrode region.

Such bipolar air ionization systems, as pointed out before encountering other problems under certain operating conditions, show patterns of activity, devices, and airflow at locations where electrostatic charge should be suppressed. Or because of changes in other conditions, changes in total ion output or changes in the ratio of negative to positive ion output rates are desired during operation. Monitoring the ion content of the air and adjusting the negative or positive ion output can be done manually, but with a feedback system that automatically and continuously does this in response to the signal from the air ion sensor. Is often convenient.

The desire for changes in ion output changes at different locations in the room. Different ion output rates at different locations can be provided by using multiple pairs of positive and negative air ionizers spaced apart such that each pair has its own individual ion sensor and feedback circuit. it can. Some installations do not require this degree of extreme control, and due to cost considerations, lack of space and other factors, use a single sensor and feedback circuit to provide such a pair. It is also possible to carry out control of all or a group of air ionizers. Conventional feedback circuits designed for individual control of single air ionizers are not ideally suited for joint control of groups of standoff units of the type described above. A single sensor and feedback circuit responds directly to the instantaneous change in ion content at a particular location in the room. These variations are not necessarily indicative of conditions elsewhere in the room. Therefore,
A single sensor and feedback circuit
When such a change is not needed, it may cause a change in the ion production rate or a change in the ratio of negative ions to positive ions elsewhere.

[Problems to be Solved by the Invention]

An object of the present invention is to provide an improved air ionization adjusting method and apparatus which solves some of the problems described above.

[Means for Solving the Problems]

In accordance with the present invention, the cycle of positive ion production alternates with the cycle of negative ion production to suppress the production of ions of both polarities during a certain interval prior to each ion production cycle. A method can be provided to keep the ionic content within the desired range. Another step is to instantaneously generate negative ions between each cycle of positive ion generation and one of the subsequent ion generation suppression intervals, and each cycle of negative ion generation and the subsequent ion generation suppression interval. And instantaneously generating positive ions with one of the two.

Also, in the method of the present invention for limiting the ion content of the atmosphere at a given location, a step of producing ions of a first polarity in the atmosphere for a first limited time period and a second, relatively short second time period. Comparing producing ions of opposite polarity in the atmosphere during a time period, suppressing ion production during a third time period, and producing ions of opposite polarity during a fourth time period, The step of generating ions of the first polarity during the relatively short fifth time period and the step of suppressing ion generation during the sixth time period are repeated, and the above steps are repeated.

Further in accordance with the present invention, at least one positive ion emitter, at least one negative ion emitter, and a cycle of positive ion ejection alternating with a cycle of negative ion ejection, both of which before each cycle of ion ejection. Controlling the ion content of the atmosphere at a given location, such as by providing control means to periodically activate and deactivate the ion emitter in such a way as to provide intervals to suppress the release of polar ions. Giving the device. In this case, the apparatus comprises first circuit means for causing a relatively short actuation of the negative ion ejector between each of the positive ion ejection cycles and one of the subsequent ion ejection suppression intervals. Each of the negative ion emission cycles and one of the subsequent ion emission suppression intervals
And a second circuit means for causing a relatively short operation of the positive ion emitter.

Further, in the case of the device of the present invention for keeping the ion content of the atmosphere in a predetermined place within a desired range, the first and second air ionization electrodes separated from each other and the positive high voltage coupled to the first electrode are used. A generator and a negative high voltage generator coupled to the second electrode. Further, the device alternates the cycle of positive high voltage generator activation with the cycle of negative high voltage generator activation, disabling both high voltage generators before each cycle of high voltage generator activation. A control device for periodically activating and deactivating the positive and negative high voltage generators in such a way as to place an interval for activation, and an ion sensor for detecting the ion content of the atmosphere, And a means for generating a signal indicating a net polarity, and changing the ion output of the high-voltage generator according to the signal during the ion generation period so that the ion content falls within a desired range. And return means for holding. Still further, the apparatus temporarily activates the negative high voltage generator after each activation cycle of the positive high voltage generator, and positively activates the positive high voltage generator after each activation cycle of the negative high voltage generator. It has means for temporarily activating the voltage generator.

Further, according to the present invention, the cycle of positive ion generation is alternated with the cycle of negative ion generation, and an interval for suppressing generation of both positive and negative ions is placed before the cycle of ion generation, A method is provided for maintaining atmospheric ion content at a predetermined location within a desired range, including the step of producing positive and negative ions at discrete points in the atmosphere. In this case, the method further senses the change in atmospheric ionic content to produce a feedback signal having a magnitude and polarity that varies according to a change in atmospheric ionic content magnitude and net polarity. Integrating the signal to suppress the effect on it of short-term fluctuations in the ion content that do not persist through multiple ion generation cycles; and, depending on the integrated signal, the positive and negative ion generation. Maintaining the ion content within a desired range by varying the amount of ions produced during the cycle.

Furthermore, according to the present invention, a plurality of spaced air ionization means including at least a first electrode and a second electrode, a positive high voltage generator coupled to the first electrode, and a second high voltage generator coupled to the first electrode. Multiple high voltage generators, including a negative high voltage generator, and alternating the active cycle of the positive high voltage generator with the active cycle of the negative high voltage generator, before each active cycle of the high voltage generator. A control means for periodically activating and deactivating the positive and negative high voltage generators in such a way as to place an interval deactivating both high voltage generators, and an ion content of the atmosphere A sensor for detecting, including means for producing a signal having a magnitude and polarity that varies according to a change in magnitude and net polarity of the ionic content of the atmosphere; and integrating the signal to primarily the high voltage Through multiple actuations of the generator Means for generating an integrated signal that changes in accordance with a change in the ion content that continues and suppresses the influence of a relatively short time variation of the ion content in the atmosphere; The atmospheric ion content at a predetermined location is characterized in that the high voltage generator and the electrode output in the electrode are changed according to a signal, and a feedback means is provided for keeping the ion content within a desired range. A device is provided for holding within a desired range.

In view of the above-mentioned limited perspective, the present invention can increase the effective range of the ionization device by terminating the ion production more rapidly after each periodic ion production cycle required by the control system. It enables more effective and fine control of the ion content of air in a specific region. That is, the positive ion generation cycle is followed by the instantaneous operation of the negative ion emitter, and the negative ions thus obtained are attracted to the positive ionization electrode,
Neutralize the residual charge on the capacity of the positive high voltage generator. Thus, the control system can quickly stop positive ion production, which can last most of the time during the off interval set after each ion cycle. Also, in the same manner, depending on the demands of the control system, the momentary operation of the positive ion emitter is maintained after the cycle of negative ion generation, and the negative high voltage 8th century capacity is rapidly discharged. .

Also, for other particular configurations, the present invention is designed to prevent overreaction of the feedback system in an air ionizer of the type controlled by a feedback signal from a sensor that monitors air ion content. The short-term fluctuation of Thus, the system does not necessarily indicate conditions in other areas where the ion content is controlled, rather than instantaneous variations in ion content in a particular area of the sensor, rather than air ion content that persists through multiple ion production cycles. Will respond to changes in.

〔Example〕

 The present invention will be described below with reference to the drawings.

For the purpose of illustration, FIG. 1 shows an air ionization device (air) according to an embodiment of the present invention as an equipment in a clean room 12 for manufacturing electronic devices, in which harmful electrostatic charge is suppressed to prevent product damage. Ionizer 11).
The seed ionization device 11 can also be used in other locations where static charge suppression is required or where control of atmospheric ionic content is required for other purposes.

The main constituent elements of the air ionization apparatus 11 shown in FIG. 1 are one or more ion emission units (emitter units) 13 fixed to the ceiling of the clean room 12 as standard.
For example, a control console 14 mounted on the wall of the room in an accessible location, and in this embodiment one or more ion sensors 16 arranged to be exposed to room air in a suspended manner from the ceiling. , And one or more feedback modules 17 that can be placed in the vicinity of the ion ejection unit 13. Also, as detailed below, a four conductor cable 18 connects the control console 14 to each of the ion emitting units 13 and one or more additional four conductor cables 19 connect each sensor 16 to one or more. Connect to feedback module 17.

The ion ejection unit 13 may have a structure as described in the above-mentioned U.S. Pat. No. 4,542,434. That is, as shown in FIG. 2, each unit 13 includes an outer casing (housing) 21, and two insulating pipes 22 and 23 spaced apart from each other extend downward from the housing. In addition, the lower ends of the tubes 22 and 23 have needle-shaped ionization electrodes 24 and
26 is positioned and axially extended within the cylindrical guard 27 so that the electrode tips are exposed to the surrounding atmosphere.

The housing 21 includes a negative high voltage power supply 28 connected to the electrode 24 through a tube 22 and a positive high voltage power supply 29 connected to the electrode 26 through a tube 23.
including. The high voltage power supplies 28 and 29 are formed by voltage amplifiers of known shape configured to rectify, smooth, and amplify low voltage AC inputs to provide a DC high voltage output that can be varied by changing the input voltage. be able to.

The high voltage power supplies 28 and 29 are operated alternately by the control console 14, as will be described in more detail below, and under many operating conditions the alternating periods of positive and negative ion production at electrodes 26 and 24 are It is designed to be isolated in a cycle that does not occur. Thus, a pulse of ions of each polarity can be dispersed over a considerable distance from the electrodes 24 or 26 before the two types of ion mixing occur. This slows the process of mutual neutralization by charge exchange and, in addition, the device 11
Allows high levels of air ionization to be maintained even at a significant distance from 13.

Returning to FIG. 1 again, the device is usually an ion emission unit.
An area (13) for suppressing electrostatic charge accumulation, in this case, an air flow (ventilation means) 31 is provided in order to accelerate the traveling of ions to a work table (work table) 32. For standard clean room 13, use fan 33 to provide airflow
31 is forced to ventilate downward through a breathable ceiling member 34, and is exhausted to the outside through a grating (grating) 36 provided on the floor. The airflow 31 helps to maintain a high level of ionization of air in the workbench as it reduces the transit time of ions to the workbench 32, reducing ion loss from charge exchange between positive and negative ions. Let

Only two discharge units 13 are shown in FIG.
In a standard clean room 12, a larger number of units 13 are usually provided, and the units are typically arranged in an array several feet apart. The ion ejection unit 13 is preferably located in a specific location where electrostatic charge problems are particularly significant, so the unit
The intervals of 13 do not necessarily have to be uniform.

Although each ion-emission unit 13 may have its own sensor 16 and return module 17 that require very fine adjustment of the air-ion content (which is often not necessary), In some cases, a single sensor 16 and return module 17 can be connected to all ion emitting units 13 or a single sensor and return module can be connected to a group of adjacent ion emitting units. Ideally, it is preferable to place the sensor 16 where electrostatic charge suppression is most critical, but it is often impractical because of the risk of damage or interference that can alter the sensor signal. The sensor 16 must be placed in such a risk-free place, and in the case of this embodiment, it is suspended from the ceiling of the room 12 and is placed at a height at which ion generation occurs. The sensor 16 needs to be arranged away from the position closest to the ion emission unit 13. This is because in the immediate vicinity of the unit 13, the mixture of positive ions and negative ions is the smallest, and the air ion content in that region is not an exact representation of the various conditions in the workbench 32. The structure and operation of the sensor 16 will be described below.

Returning again to FIG. 2, the control console 14 controls the high voltage power supplies 28 and 29 during alternating time periods separated by a time period such that both high voltage power supplies 28 and 29 are off.
Generate a timing signal that activates. (Each such ion generation time period is temporarily interrupted during an interval (time interval) in which both high voltage power supplies 28 and 29 are not operated, as will be described later.) Furthermore, the console 14
Circuit for adjusting the ion output of the device 11 so that the period of the periodic operation of the high voltage power supply 28, the period of the alternating operation of the high voltage power supply 29 and the period of the off cycle between these operations can be selected separately. To meet the requirements of the specific place where the equipment is installed.

The control console 14 includes a step-down transformer 37 adapted to connect its primary winding 38 to a private power supply input terminal 39 via an on / off switch 41 and a protective fuse 42. Also, a varistor 43 is placed in parallel with the primary winding 38 to protect the circuit from power line surges and transients.

In the case of the present embodiment, the transformer 37 uses a private AC power supply voltage of 48V.
It has the function of lowering the value of. Such voltage step-down can be achieved by using a lightweight and inexpensive electric cable 18
It is convenient, though not absolutely necessary, in that it allows the connection of 14 and emitter unit 13.

The secondary winding 44 of the transformer 37 is connected between first and second low voltage source conductors 45 and 46 which extend to the ion ejection unit 13 via the cable 18, respectively. Conductors 45 and 46 are
An operating current is provided to certain components of the ion ejection unit 13 and the feedback module 17, as described in more detail below.

Also, between the low voltage conductors 45 and 46, a negative high voltage generator
A first variac or adjustable autotransformer 47 is connected to allow selection of the AC voltage supplied to 28. In this case, it is possible to adjust the maximum output rate of negative ions that occurs during the negative ion generation cycle. Further, the adjustable output tap 48 of the autotransformer 47 is connected to the ion emission unit 13 via the normally used first semiconductor relay 49 and another lead wire 51 of the cable 18.

In addition, a similar second autotransformer 52 is connected between the low voltage conductors 45 and 46 to provide selection of the maximum positive ion output rate during the positive ion generation cycle, and Adjustable tap at the output of autotransformer 52
53 is a normally open semiconductor relay 54 and cable
It is connected to the ion emission unit 13 through another conductor wire 56 of 18.

Relays 49 and 54 alternate negative and positive high voltage generators 28 and 29 with timing signals 57 and 58 derived from a pulse generator 59 of known shape which produces a pulse signal of selectable waveform, respectively. To activate it, it should be alternately closed periodically. A suitable detailed circuit of this type of adjustable pulse generator 59 is described, for example, in the aforementioned U.S. Pat. No. 4,542,434, column 9, line 64 to column 12, line 11.

The timing signal 57 alternates between a first signal state in which the negative high voltage power supply 28 is activated and a second signal state in which the high voltage power supply is turned off, likewise the timing signal 58 is during the negative high voltage power supply off interval. , Alternating between first and second signal states that periodically activate positive high voltage power supply 29. (In this case, the same pulse generator of the aforementioned U.S. Pat. No. 4,542,434 makes it possible to introduce an off-interval of selectable duration after each ion generation cycle of either polarity. For the purpose, the off-interval time is adjusted to zero or close to zero so that the ion-generation cycle of opposite polarity continues shortly after or almost immediately after each ion-generation cycle. Occurs, but rather by the feedback circuit described below rather than by the timing signal generator 59.) The pair of signal conductors 61 and 62 of the pulse generator 59 persists with the DC power source 63 via the drive circuits of the relays 49 and 54, respectively. . The pulse generator 59 produces the timing signals 57 and 58 described above by periodically and alternately grounding each of the signal conductors 61 and 62. Thus, relays 49 and 54 are alternately closed to alternately supply operating current for negative and positive high voltage power supplies 28 and 29. A manually adjustable control 64 of a pulse generator of the type described above allows individual adjustment of the duration of the cycle of negative and positive ion generation. Feedback below
As is apparent from the process description, the feedback action is preselected because it regulates the air ion content under changing conditions and thus functions to interrupt the ion generation cycle and change the interval. The duration is actually the maximum duration.

The DC operating voltage for pulse generator 59 and relays 49 and 54 is connected to primary winding 38 of input transformer 37 in parallel with D.P.
C. Supplied by power supply 63. Further, a high resistance 66 is connected between the primary winding 38 and the secondary winding 44 of the input transformer 37 as shown in the figure, and a cable lead wire 46 is provided to connect the ion emission unit 13 and
It serves as a common or enclosure ground conductor for the sensor 16 and the feedback module 17.

Next, referring to FIG. 3, the above-described cable lead 51 for periodically supplying the operating current for the negative high voltage power supply 28 of the ion emission unit 13 is passed through the normally open first relay 67 of the feedback module 17. A cable lead, which is coupled to the high-voltage power supply 28 and supplies an operating current for the positive high-voltage power supply 29, is coupled to the power supply 29 via the normally open second relay 68. Relays 67 and 68 allow feedback circuit 17 to vary the effective duration of these cycles in response to the atmospheric ion content signal from sensor 16.

In addition, the feedback module 17, the ionization unit 13 and the sensor
High-voltage power supply 28 to the cable conductor 46 that limits the enclosure grounding for 16
And connect directly to 29. The ground symbol in FIG. 3 indicates a conductive connection to the cable conductor 46.

Also, to connect the DC power source 70 in the feedback module 17 across the low-voltage AC lead 45 and the common or housing ground lead 46, to activate the components of the feedback module described later and the sensor 16 that requires a DC operating current. In the case of this embodiment, positive and negative DC voltages each having a magnitude of 15V can be supplied.

The sensor 16 of this embodiment has a circular conductive disk 69 fixed to one surface of a circular insulating printed circuit board 71. Board 71
Are placed within a conductive shield 72 which surrounds the disk 69 in an isolated relationship from the disk. In FIG. 3, the circuit elements of the sensor 16 such as the amplifiers 73 and 74 are shown by symbols for easy understanding of the circuit, but in reality, they are mounted on the circuit board 71 in the shield 72. is doing. Further, the sensor 16 may have another structure, for example, a V-shaped plate or a cylinder may be used instead of the disc 69.

Disk 69 is connected to chassis ground through a high resistance 76 and a relatively low resistance 77 connected in series, and a capacitor 78 is connected between disk 69 and ground potential. In this case, the imbalance of the positive or negative air ions on the face of the disk 69 causes a current to flow through the resistors 76 and 77, resulting in a voltage drop across the resistor 76 indicating the magnitude and polarity of the imbalance. Occurs. The positive or non-inverting input of amplifier 73 connects it to disk 69, connects the negative or inverting input of the amplifier to the output of the amplifier, and via resistor 81 to the connection point between resistors 76 and 77. This produces a feedback signal voltage that varies in response to changes in the voltage drop across resistor 76.

Since the resistor 81 is not directly connected to the ground potential but is connected to the connection point 79, the amplifier 73 has a so-called bootstrap shape,
As a result, the effective resistance of the resistor 76 is amplified by the ratio of the value of the resistor 77 to the value of the resistor 81.

The multiplied resistance of capacitor 78 and resistor 76 defines an integrator circuit that provides some limited signal integration, thus the response of sensor 16 to varying ion ratios allows adjustment of the ionizer as described below. Try to match that of the ionization detector used to start. For this particular embodiment, the values of resistors 76, 77, 81 and capacitor 78 are chosen to give an effective time constant of 200 seconds. This time constant allows a rapid response to changes in atmospheric ionic content.

The amplifier 73 has its output fed back to the negative input via a conductive path 82 that does not include a significant resistance.
Its gain is 1. The output of the amplifier 73 is also connected to the shield 72 in order to keep the sensor shield 72 at the same voltage as the disk 69 at all times. Thus, the disc
Any leakage current that may distort the return signal between 69 and shield 72 can be avoided.

The feedback signal is supplied from the sensor 16 to the feedback module 17 via the buffer / inverter amplifier 74. That is, the output signal from the integrating amplifier 73 is connected to the negative input of the amplifier 74 via the resistor 83, and the positive input of the amplifier 74 is grounded. Also,
The output of amplifier 74 is coupled to its negative input via feedback resistor 85.

The feedback signal voltage is higher than the output of the buffer amplifier 74 by the resistor 86.
To the positive input of the DC level shift amplifier 84 of the feedback module 17. DC of feedback signal voltage from sensor 16
The levels need not be symmetrical about the zero level and can be biased to either positive or negative average voltage levels. This is because the sensor 16 is not located in the target with respect to the positive and negative ionizing electrodes 24 and 26 because it is close to the grounded target, or if one preferentially choses the predominance of one polarity ion or otherwise. May occur for the reason of. Amplifier 84 cooperates with a manually adjustable potentiometer to allow the feedback signal voltage to be balanced around the zero level.

In particular, a signal integrating resistor 88 and a capacitor 89 are connected between the positive input of the amplifier 84 and the chassis ground. Also, the amplifier 84
The output of is connected to the negative DC power supply terminal via Zener diode 91, circuit connection point 92 and resistor 93, and also to the positive DC power supply terminal via other Zener diode 94, circuit connection point 96 and resistor 97. Connecting. The Zener diode 91 extracts a positive current from the output of the amplifier 84 when the output voltage of the amplifier 84 reaches a predetermined positive value with respect to the voltage at the connection point 92, and the Zener diode 94 changes the output voltage of the amplifier to the circuit connection point 96. When a predetermined negative level is reached with respect to the voltage at, a positive current is provided towards the output of the amplifier 84. Further, the resistance element 98 of the potentiometer 87 is connected between the connection points 92 and 96, the movable tap 99 of the potentiometer is connected to the negative input of the amplifier 84, and between the output of the amplifier and the negative input. Coupling capacitor 101.

The output of amplifier 84 is also made available to be coupled to other circuit components of feedback module 17 via mode control switch 102. During initial system adjustment, switch 102
Amplifier 84 is not coupled to such other circuit components,
It shall be in a position where the return process is inactive. In this case, a voltmeter 103 or other voltage monitor is temporarily connected between the output of the amplifier 84 and the ground potential, and the voltmeter 103 is found to have symmetrically shifted the feedback signal level around the zero voltage level. The potentiometer 87 is preferably adjusted to change the reference voltage supplied to the negative input of the amplifier 84 until instructed by.

Under most conditions, the feedback signal from amplifier 84 oscillates between positive and negative voltage levels depending on the alternating positive and negative ion generation cycles. The feedback circuit 17 responds to positive or negative voltage levels above a preselected value by shortening the duration of one polarity ion generation cycle and extending the duration of the opposite polarity ion generation cycle. This keeps the positive to negative ion ratio at the working position and the concentration of each type of ion at the working position within a narrow range of values.

When relays 67 and 68 are in the closed state throughout the operation of the system, the operating cycle of negative high voltage power supply 28 alternates with the operating cycle of positive high voltage power supply 29 and the device is shown in FIG.
Continuing to produce ions of one polarity or the other, as shown at 104. Again in FIG. 3, the feedback module 17 controls the relays 67 and 68 to actually amplify each ion production cycle required by the control console 14.
It includes a timer circuit 106 that temporarily suspends for an interval determined by the feedback signal from 84. In particular, the timer circuit 106 is configured so that the relay 67 immediately after each positive ion generation cycle.
For a short burst of negative ions,
Next, the relay 67 is opened for an interval depending on the polarity and magnitude of the feedback signal at that time. After the off interval, the timer circuit 106 closes the relay 67 again, deenergizes the cable conductor 51 and energizes the cable conductor 56 in the manner described above, causing the control console 14 to cycle the negative ion generation. The production of negative ions is restarted until the end.
The timer circuit 106 then responds by cycling the other relay 68 in a similar manner during the subsequent positive ion production cycle. These operations of the timer circuit 106 are required by the control console for the ion generation sequence of FIG.
104 is converted into an actual ion production sequence as shown by waveform 107 in FIG.

The interruption of each ion production cycle typically occurs shortly after the beginning of the cycle, for example 100 ms after ion production, although other timings are suitable. The times of these transient ion formations are shown in FIG. 4 to appear longer than normal due to their relatively long time scale.

Returning again to FIG. 2, each cycle of generation of positive ions at electrode 27 is immediately followed by a relatively short pulse of negative ions from neighboring electrode 24. This has the beneficial effect of abruptly ending the production of positive ions by the electrode 26.
The negative ions are electrostatically attracted to the positive electrode 26 and act to neutralize the residual charge in the positive high voltage generator 28 capacitance. Such charges could otherwise cause a continuous production of positive ions where one would like to have an ion production suppression interval. The same effect is
Obtained by a burst of positive ions from electrode 26 following each sustained cycle of negative ion production at nearby electrode 24.

Returning again to FIG. 3, the off-interval of ion production suppression that occurs shortly after the end of each ion production cycle is that the pulse of ions of each polarity emits ions before the subsequent mixing with ions of opposite polarity occurs. Allowed to move away from unit 13. This makes it possible to extend the range of the device by delaying the mutual neutralization of the two types of ions by charge exchange.

The above-described operation of the timer circuit 106 adjusts the production rate of each type of ion in response to the feedback signal from the amplifier 84 by varying the duration of the off interval as needed for the purpose. In particular, when the feedback signal from the amplifier 84 is made more negative, the timer circuit 106, as shown in the actual ion generation sequence waveform 107 of FIG.
During the negative ion production cycle, relay 67 is opened for a longer interval and relay 68 is opened for a shorter interval. This increases the output of positive ions and reduces the production of negative ions, thus neutralizing the atmospheric ion imbalance which makes the feedback signal even more negative. Similarly, the timer circuit 10
6 further shortens the off interval during the negative ion generation cycle and lengthens the off interval during the positive ion generation cycle in response to the positive feedback signal. This allows
The feedback signal is corrected for the atmospheric ion imbalance that causes a positive swing.

The timer circuit 106 can take any of a number of internal shapes, one embodiment of which is shown in FIG. The circuit 106 of this embodiment includes a voltage level detection amplifier 108 having an output terminal 109 connected to ground potential through a differentiating circuit formed by a capacitor 111, a resistor 112, a circuit connection 113 and another resistor 114, said resistor 114 is connected in series between the amplifier output and ground potential. Thus, every time the amplifier output 109 transitions from the negative state to the positive state, an instantaneous positive voltage appears at the connection point 113, and when the polarity of the amplifier output is switched in the opposite direction, the connection point becomes negative. The voltage appears for a short time.

The polarity transition at the amplifier output 109 occurs in response to the alternating transmission of the high voltage generator operating current on the cable leads 51 and 56. To this end, a resistor 116, a diode 117, a circuit connection 118 and another resistor 119 are connected to the cable conductor 5
Connect between 1 and ground potential. Resistors 116 and 119 form a voltage divider and a fairly high AC voltage on conductor 51 causes a DC amplifier.
It works to reduce to a level compatible with 108. Diode 117 rectifies the AC voltage so that only positive voltage appears at amplifier 108. Further, a capacitor 121 is connected in parallel with the resistor 119 to give a limited signal integration, and the time constant of the integrating circuit formed by the capacitor 121 and the resistor 119 is set to, for example, about 3 milliseconds. In this way, changes in the state of the amplifier 108 at the output 109 in response to each half cycle of the AC voltage on the cable lead 51 can be avoided.

Similarly, connect the other cable conductor 56 to resistor 116a, diode 11
7a, a circuit connection point 118a and a resistor 119a are connected to the ground potential, and a capacitor 121a is connected in parallel with the resistor 119a. Each of the constituent elements has the same function as described above with respect to the corresponding element 116 to 121.

Circuit connection points 118 and 118a connect to the non-inverting and inverting inputs of amplifier 108, respectively. Thus, the amplifier 10
The output 109 of 8 goes positive at the beginning of each transmission cycle of AC on cable conductor 51 and switches to a negative state at the end of each such transmission cycle in response to the next transmission of AC on cable conductor 56.

The change in polarity of the amplifier output 109 following each ion generation cycle causes a temporary voltage spike at the differentiation circuit connection 113, as described above. Thus, the non-inverting input of the first comparison amplifier 122 is connected to the connection point 113, and the inverting input of the amplifier 122 receives a positive voltage from the voltage divider 123 that is less than the instantaneous positive voltage appearing at the connection point 113 after each ion generation cycle. To receive. As a result, the output of the comparator 122 is momentarily switched to the high level state following each positive ion generation cycle, temporarily energizing the drive circuit of the relay 67 via the diode 124. Thus, the relay 67 is closed for a short time, and the desired instantaneous generation of negative ions at that time is performed.

The inverting input of the second comparison amplifier 126 is also connected to the circuit connection point 113. The non-inverting input of the second comparator 126 receives a negative voltage from another voltage divider 127 which is smaller than the instantaneous negative voltage appearing at the connection point 113 after the negative ion generation cycle. The output of the second comparator 126 is connected to the drive circuit of another relay 68 via another diode 128. Thus, the comparator
126 momentarily closes relay 68 after each negative ion generation cycle,
Generate a short pulse of the desired positive ions.

If the relay 67 or 68 is opened again after the short-term production of each of the above-mentioned ions, the next off-interval of no production of ions begins and the third comparison amplifier 129 causes the relay 67 via the other diode 131. Of the fourth comparator amplifier 132 is likewise coupled to the relay 68 via another diode 133, so that at the end of the off-interval these relays close again and have a sustained ion production period. Begins. The timing of such actuation by comparators 129 and 132, and thus the duration of each off interval, should be controlled by the feedback signal voltage from amplifier 84 and switch 102.

In particular, the feedback signal is transmitted to the inverting input of the third comparator 129 and also to the non-inverting input of the fourth comparator 132. To control the triggering of the comparators 129 and 132, a resistor 134, a circuit connection point 136, a diode 137, a circuit connection point 138 and a capacitor 139 are connected in series between the output terminal 109 of the level detection amplifier 108 and the ground potential. In addition, another diode 141, a circuit connection point 142, and a capacitor 143 are connected between the connection point 136 and the ground potential. The circuit connection points 138 and 142 are connected to each other via a fixed resistor 144 and a variable resistor 146 that are in a series relationship.

The diode 137 is connected to the output 109 of the amplifier 108 as described above.
The output 109 during the negative ion generation cycle in which is positive.
Is placed to allow positive charging of capacitor 143 via resistors 144 and 146 from. In contrast, the diode
141 are placed in opposite directions to allow negative charging of capacitor 139 during the positive ion generation cycle. At the beginning of such a negative charging cycle of the capacitor 139, said capacitor is connected to the diode 137 during the previous positive charging cycle of the capacitor 143.
Have a positive charge obtained through. Capacitor 13
The time interval determined by the value of 9 and the resistances 134, 144, 146 is necessary for charging the capacitor and thus for reversing and negative at circuit connection point 138. The connection point 138 connects it to the inverting input of the fourth comparator 132. Thus, after the time interval required for capacitor 139 to obtain a negative charge equal to the feedback signal voltage, comparator 132 is triggered to close relay 68 again. Thus, the off-interval ends and a continuous cycle of positive ion production begins, which continues until the control console completes the ion production cycle by de-energizing the cable conductor 56 as previously described.

The circuit connection point 142 is connected to the non-inverting input of the third comparator 129,
Thus, relay 67 is allowed to undergo the same cycling during negative ion production.

If the feedback signal voltage (inverted in amplifier 74) becomes more negative due to an increase in the content of positive ions in the atmosphere, it will take a longer time period to raise the charge at node 138 to that value. I need. Therefore, the positive ion generation is reduced by interrupting the positive ion generation cycle over a longer interval. Also, if there are fewer negative feedback signals, the charging time will be shorter, thus increasing the positive ion output. The change in feedback during the negative ion production cycle has the same effect on the negative ion output by changing the timing of closing relay 67 in essentially the same way.

During the off-interval caused by the feedback signal of a predetermined magnitude, the value of the resistor 146 is equal to that of the capacitors 139 and 14
Since the time required for charging 3 is changed, it can be selected by adjusting the variable resistor 146.

Returning to FIG. 3 again, feedback signal input 1 to the timer circuit 106
Capacitor 147 and resistor 148 are connected between 49 and chassis ground.
Are connected in parallel to give a certain degree of feedback signal integration. The time constant of the integrating means 151, ie the product of capacitance and resistance, depends on the conditions under which a particular installation should be operated. When the time constant is set to be relatively low, for example, about 200 seconds or less, the ionization device 11 uses the so-called pulse bias.
Operates on a pulse basis. The response of sensor 16 and feedback module 17 to changes in air ion content is fast enough that changes in air ion content in the vicinity of the sensor result in significant changes in ion output during the current or shortly after ion production cycle. It is a thing. This is a highly preferred mode of operation under many conditions, especially when each discharge unit 13 has its own local sensor 16 and return module 17.

Under certain other conditions, it may be desirable to delay the response of the feedback system to avoid unwanted ion production.
A fast-response feedback system could be a single sensor, for example.
When controlling a plurality of ion emission units 13 by 16, or when arranging a sensor far away from the emission units, excessive ion generation is brought about.
Under those conditions, the perceived change in air ion content in the vicinity of sensor 16 is instantaneous and confined to that vicinity, indicating a need for a change in ion output at the location of emitter unit 13. is not.

Changes in the sensed air ion content that connect through multiple cycles of ion production represent more general changes throughout the chamber requiring changes in ion output. The feedback system can respond to such long-term changes in the originally sensed air ion content rather than instantaneous variations by increasing the degree of integration of the feedback signal. In a standard clean room, the capacitor 147 and the resistor 148 are about 300 seconds to about 700 seconds, although other values may be appropriate in some cases to cause this mode of operation.
It is desirable to have a value that can set the time constant within the range of seconds.

Even without the integrating means 151, there is a limited degree of feedback signal integration in the circuit. Capacitor 78 and resistors 76 and 77 in sensor circuit 16 and capacitor 89 and resistor 88 at the input to amplifier 84 provide some integration, but they give the system response as desired under certain operating conditions. It cannot be concentrated enough to have a sufficiently high time constant to delay it. As mentioned above, a significant change in the magnitude of the feedback signal voltage can occur during the course of a single ion production cycle in the absence of the additional integrating means 151.

During start-up of the ionization device 11 at a specific location, the switch 102 is temporarily opened to supply a positive voltage from a suitable power source directly to the drive circuit terminals 152 of the relays 67 and 68,
Hold the relay closed. This deactivates the feedback system, alternating non-interrupting cycles of positive ion production with non-interrupting cycles of negative ion production. Thus, the ion content of the air is detected with a charged plate monitor or other ion detector. Then, returning again to FIG. 2, the desired air ion content is present and any periodic change in the positive to negative ion ratio at the work site due to the alternating cycle of positive and negative ion production is acceptable. Adjust a plurality of adjustable controls 48, 53, and 64 of control console 14 until observed by the monitor to be within limits. Voltage swings of ungrounded conductors at work sites that are limited to the range of about + 100V to about -100V are usually not subject to any detrimental effects of electrostatic discharge, and in many cases wider voltage swings are acceptable.

After performing the system tuning described above to meet the needs of a particular installation, the timing signal control 64 of the pulse generator 59 is readjusted to maintain the portion of the periodic timing signals 57 and 58 that evoke the production of ions. Try to extend the time. This provides an operating range in which the feedback process can change the ion generation cycle as described above if conditions change and a longer ion generation cycle is required.

Next, returning to FIG. 3 again, the potentiometer 87 is adjusted to center the feedback signal voltage level around the zero level as described above, and the switch 102 is closed to activate the feedback process. Then, variable resistance 14
Adjust 6 to limit the positive and negative peaks of the feedback signal to a sufficiently small range that the positive and negative swings of air ion content are kept within desired limits. In this case, reducing the resistance of resistor 146 would reduce comparators 129 and 132.
Triggering in response to a smaller change in the feedback signal and increasing the resistance has the opposite effect.

Thus, the ionization device 11 operates in the manner described above, in a working position under changing conditions such that it requires changing the output rate of one or both types of ions to achieve its purpose. Keep both positive and negative ion concentrations at selected values.

As described above, an air ionization apparatus of a type including a feedback control of a special shape, particularly a type of changing the ion output rate by temporarily interrupting the periodic ion generation cycle
11 has been described for illustrative purposes, feedback signal integration as described above is of the form of adjusting the ion output in response to the sensor signal by varying the high voltage on the ionizing electrode, where conditions are appropriate. It can also be used in air ionization systems. Also, at the end of each ion production cycle, the aforesaid method and apparatus for abruptly ending the ion production is described in systems using other types of feedback control, or in the aforementioned U.S. Pat.No. 4,542,434. It can also be adapted to bipolar air ionization systems that do not include sensors or feedback, such as the system.

For example, in FIG. 3, if the ion sensor 16 removes all of the feedback module 17, relays 67,68 and DC power source 70 from the system, the system essentially becomes the system described in the aforementioned US Pat. No. 4,542,434. Return The operation as described in said patent is retained. In particular, in the sixth arrangement shown, the pulse train 57a has a pulse train 57a during the circulation cycle which is in a high level state which opens the relay 54.
Repetitive pulse train 57a, which differs from the previous case in that it goes into a low state for a moment to close relay 49.
The timing pulse generator 59 can be adjusted to cause and 58a on leads 61 and 62, respectively. Further, in the same manner, the pulse train 58a is converted into the pulse train 57a.
Goes to a high level to open relay 49, during a cycle that temporarily goes low to close relay 54. With these pulse train waveforms, the repetitive energization period of the positive high voltage generator is alternated with the repetitive energization period of the negative high voltage generator, as in the case of the aforementioned patent, with each energization period Before deactivating all high voltage generators
It is possible to put an interval. In this case, unlike the above-described embodiment, the ion generation period and the off-interval do not have a variable time controlled by the feedback signal, but have a fixed time determined by the setting of the pulse generator 59.

For such a type of device, the brief energization or turn-off spike of the opposite polarity high voltage generator following each sustained ion production cycle causes the timing signal conductors 61 and 62 to be essentially directed to FIG. It can be provided by cross-connecting with a pair of level detection / differentiation circuits 153 and 154 of the type described above. Therefore, returning again to FIG. 6, circuit 153 has its non-inverting input connected to resistor 1
A voltage level sense amplifier 156 adapted to connect to conductor 62 via 57, the inverting input of said amplifier 156 having a value less than the voltage on conductor 62 when timing signal 58a is in its high state. The positive voltage from the voltage divider 158 is supplied. The output of amplifier 156 is then
Each time the timing signal 58a returns to the high level state at the end of the positive ion generation cycle, the high level state is set.

The output of the amplifier 156 is connected to ground potential via a differentiation circuit formed by a capacitor 159, a resistor 161, a circuit connection point 162 and a resistor 163. Thus, each time the output of amplifier 156 goes high at the end of the positive ion production cycle, a brief voltage rise occurs at node 162. This brief voltage rise causes its emitter to ground and its collector to feed the base of NPN transistor 164 connected to signal conductor 61. Thus, transistor 164 is momentarily biased conductive by such time, and conductor 61
Since the upper voltage is dropped for a short time, the relay 49 is closed for a short time, causing the desired instantaneous negative ion production.

Circuit 154 is similar and includes an amplifier 156a having a non-inverting input connected to conductor 61 via resistor 157a and an inverting input receiving the reference voltage from voltage divider 158a. Further, by connecting the capacitor 159a, the resistor 161a, the connection point 162a and the resistor 163a in series between the output of the amplifier 156a and the ground potential, and grounding the signal conducting wire 62 for a short time, a short circuit at the connection point 162a is achieved. Transistor 164a responds to the voltage rise over time. Thus, circuit 154 closes relay 54 each time waveform 57a returns to the high state, as described above with respect to circuit 153, causing a brief positive ion production.

The present invention is not limited to the examples described in the present specification, and the present invention includes other modifications.

[Brief description of drawings]

FIG. 1 is a front view of an embodiment of the device of the present invention installed in a clean room of a type for processing electronic circuit elements, and FIG. 2 is a perspective view of individual ion emission units of the device shown in FIG. 1 and the device. The schematic circuit diagram of the low voltage source and the timing signal circuit of FIG. FIG. 5 is a diagram showing waveforms in a portion of a circuit that produces such timing, FIG. 5 is a detailed circuit diagram showing the timer circuit of FIG. 4, and FIG. 6 is suitable for use in an air ionization apparatus that does not use feedback. It is a circuit diagram which shows a part of other Example of this invention which has a fixed ion generation period. 11 …… Air ionizer 12 …… Clean room 13 …… Ion emission unit 14 …… Control console 16 …… Ion sensor 17 …… Return module 18, 19 …… Conductive cable 21 …… Outer casing 22, 23 …… Insulating tube 24,26 …… Ionizing electrode 27 …… Cylindrical guide 28,29 …… High-voltage power supply 32 …… Workbench 33 …… Fan 34 …… Breathable ceiling 36 …… Lattice 37 …… Step-down transformer 38 …… Primary winding 41 …… On-off switch 42 …… Protective fuse 43 …… Varistor 44 …… Secondary winding 47,52 …… Auto winding transformer 48,53 …… Adjustable output tap 49,54,67 , 68 …… Relay 59 …… Adjustable pulse generator 63,70 …… DC power supply 64 …… Manual adjustable control 66,76,77,81,83,85,86,88,93,97,98,112,113,114,116,1
16a, 119,119a, 134,144,146,148,157,157a, 161,161a, 16
3,163a ... Resistor 69 ... Conductive disk 71 ... Printed circuit board 72 ... Conductive shield 73,74,84,108,122,126,129,132,156,156a ..... Amplifier 76,77,81,83,85,86,88,93,97,112,114,116,116a, 119, 11
9a, 148,157,161,161a, 163,163a …… Resistance 78,89,101,111,121,121a, 139,143,147,159 …… Capacitor 87 …… Potentiometer 91,94 …… Photodiode 102 …… Switch 103 …… Voltmeter 106 …… Timer circuit 117,117a, 124,128,131,133,137,141 …… Diode 123,127,158,158a ...... Voltage divider 151 …… Integrator 153,154 …… Differentiation circuit 164,164a …… NPN type transistor

Claims (18)

[Claims] 1. A cycle of positive ion production by a positive ion generator alternating with a cycle of negative ion production by a separate negative ion generator, during an interval preceding each ion production cycle,
A method of maintaining an atmospheric ion content within a desired range at a predetermined location, comprising the step of suppressing the generation of ions of both polarities, wherein the cycle of positive ion generation and one subsequent ion generation suppression interval Instantaneously producing a relatively short burst of negative ions, and instantaneously producing a relatively short burst of positive ions during each period of negative ion production and one of the subsequent ion production suppression intervals. An air ionization adjusting method, comprising: 2. Generating a timing signal defining a repetitive time period of the first sequence alternating with a repetitive time period of the second sequence, and positive ions in response to the start of each time period of the first sequence. Starting production and ending production of the positive ions at the end of each time period of the first sequence; and producing negative ions at the start of each time period of the second sequence, Terminating the production of the negative ions in response to the end of each time period of the second sequence, and temporarily suppressing the production of ions during the interval between the time periods of the first and second sequences, Setting an interval between the temporary ion generation and the subsequent suppression of ion generation.
The method described. 3. A step of sensing a change in the ion content of the atmosphere at the location to generate a feedback signal indicating the change, and changing the duration of the interval of ion generation in response to the feedback signal. And keeping the ionic content within a desired range. 4. The method of claim 3 including the step of integrating the feedback signal to suppress short-term variations that do not persist through a plurality of the time intervals. 5. A step of energizing a first ion generator that generates only ions of a first polarity for a short period of time during a first limited time period to generate ions of a first polarity in the atmosphere. During a relatively short second time period that follows the first time period, a second ion generator that generates only ions of opposite polarity to the first polarity is briefly energized to cause the opposite polarity in the atmosphere. Generating ions, suppressing ion production during a third time period subsequent to the second time period, and shortening the second ion generator for a fourth time period subsequent to the third time period. Temporarily energizing to generate the ions of the opposite polarity and energizing the first ion generator for a short period of time during a relatively short fifth time period following the fourth time period. Generating a single polarity ion, and a sixth time period following the fifth time period. Ion content control method of the air at the predetermined location, wherein a series of said steps comprises a step of suppressing between ion generation and so as to repeat the. 6. At least one positive high voltage generator, a positive ion emitting electrode, at least one negative high voltage generator, a negative ion emitting electrode, and cyclically activating these high voltage generators. And a control means for inactivating, the positive ion emission cycle alternates with the negative ion emission cycle, and an interval for suppressing the emission of ions of both polarities is placed before each ion emission cycle, An apparatus for controlling atmospheric ion content at a location, wherein a relatively short actuation of the negative high voltage generator between each of the positive ion ejection cycles and one of the subsequent ion emission suppression intervals is initiated. One circuit means and a second circuit means for causing a relatively short activation of the positive high voltage generator between each of the negative ion ejection cycles and one of the subsequent ion emission suppression intervals. Air ionization adjusting apparatus characterized. 7. A repetitive positive ion generation cycle activating the positive high voltage generator and alternating with the positive ion generation cycle,
Including timing means for setting a repetitive negative ion generation cycle for activating the negative high voltage generator, wherein the first circuit means activates the negative high voltage generator for a short time during each negative ion generation cycle, In the subsequent ion emission suppression interval, the negative high voltage generator is temporarily inactivated, and the second circuit means activates the positive high voltage generator for a short period of time during the positive ion generation cycle, and the subsequent ion is suppressed. 7. Device according to claim 6, characterized in that the positive high voltage generator is temporarily deactivated during the emission suppression interval. 8. Air ions having means for producing a feedback signal which varies with changes in atmospheric ion content.
8. The apparatus of claim 7 including a sensor and feedback circuit means for varying the time of the ion emission suppression interval to keep the ion content within the desired range. 9. A means for integrating said feedback signal, said integrating means having a time constant sufficient to suppress fluctuations in said signal limited to only one of said ion production periods. The apparatus of claim 8 characterized. 10. A positive high voltage generator via the first relay during each of a sequence of first and second relays and a repetitive positive ion production cycle alternating with a negative ion production cycle. And means for transmitting an operating current to the negative high voltage generator via the second relay during the negative ion generation time period. , The second relay is temporarily opened during the negative ion generation cycle, and the second circuit means is used to temporarily open the first relay during the positive ion generation cycle. 6. The device according to 6. 11. The first circuit means is configured to open the second relay after a predetermined time has elapsed from the start of each negative ion generation cycle, and this predetermined time is set to operate the negative high voltage generator for a short time. The second circuit means opens the first relay after a lapse of a predetermined time from the start of each positive ion generation cycle, and the predetermined time is set to the positive high voltage generator. 11. Device according to claim 10, characterized in that it has a sufficient time to enable a short time operation. 12. The second circuit means holds the second relay in an open state for a period sufficient to provide the interval to suppress the emission of ions of both polarities. The device according to claim 11, characterized in that the first relay is held in an open state. 13. An air ion sensor having means for producing a feedback signal voltage that varies according to the magnitude and net polarity of the ionic content of the atmosphere, the feedback signal voltage increasing the positive ion content of the atmosphere. , The duration of the ion emission suppression interval is increased during the positive ion generation cycle, and the duration of the interval between the positive ion generation cycle is decreased when the positive ion content of the atmosphere is decreased. The feedback signal voltage indicates an increase in the negative ion content of the atmosphere, the duration of the ion emission suppression interval is increased during a negative ion generation cycle, and the signal causes the negative ion content of the atmosphere to increase. Means for reducing the duration of the interval during the negative ion generation cycle when exhibiting a decrease in quantity. 14. A device for maintaining an ion content of atmospheric air within a desired range at a predetermined location, wherein first and second air ionization electrodes are separated from each other, and a positive high voltage generation is connected to the first electrode. And a negative high voltage generator coupled to the second electrode, and a cycle of activation of the positive high voltage generator alternating with a cycle of activation of the negative high voltage generator to provide activation of the high voltage generator. Control means for periodically activating and deactivating the positive and negative high voltage generators in such a way that there is an interval deactivating both high voltage generators before each cycle of An ion sensor for detecting the ion content of the atmosphere, including means for producing a signal indicating the magnitude and net polarity of the ion content, and the high voltage generation in response to the signal during the ion production period. Change the ion output of the vessel to contain the ion Means for holding the negative high voltage generator active after each operating cycle of the positive high voltage generator. Means for temporarily activating the positive high voltage generator after each cycle of operation. 15. A method in which the cycle of positive ion generation alternates with the cycle of negative ion generation, and a cycle for suppressing generation of both positive and negative ions is placed before the cycle of ion generation in the atmosphere. A method of keeping the atmospheric ion content at a predetermined location within a desired range, including the step of producing positive and negative ions at distant points in the atmosphere by sensing changes in the atmospheric ion content. Generating a feedback signal having a magnitude and polarity that varies according to changes in the magnitude and net polarity of the ion content, and integrating the feedback signal to maintain the ion content that does not persist through the plurality of ion generation cycles. Suppressing the effect of short-term fluctuations in the quantity on the feedback signal, and in response to the integration signal, is generated during the positive and negative ion generation cycles. Air ionization adjustment method characterized by by varying the amount of ions and a step of holding the ion content within the desired range. 16. Producing during the positive and negative ion production cycles by temporarily interrupting each cycle and varying the duration of the interrupt in response to changes in the integrated feedback signal. 16. The method according to claim 15, wherein the step of varying the amount of ions to be carried out is performed. 17. An increase in the time of interruption of the positive ion production cycle when the integrated feedback signal indicates a predetermined maximum positive ion content of the atmosphere, the integrated feedback signal being a predetermined minimum positive ion of the atmosphere. Reducing the time of interruption of the positive ion production cycle when displaying the content, and the integrating feedback signal displaying a predetermined maximum negative ion content of the atmosphere,
Increasing the time of interruption of the negative ion production cycle and decreasing the time of interruption of the negative ion production cycle when the integrated feedback signal indicates a predetermined minimum negative ion content of the atmosphere. The method according to claim 16, characterized by: 18. A positive high voltage generator coupled to a plurality of spaced air ionization electrodes including at least a first electrode and a second electrode and said first electrode, and a negative high voltage generator coupled to said second electrode. A plurality of high voltage generators, the positive high voltage active cycle alternating with the negative high voltage generator active cycle, and each high voltage generator before each operating cycle of the high voltage generator. A control means for periodically activating and deactivating the positive and negative high voltage generators in a manner such that an interval is provided for deactivating, and a sensor for detecting the ionic content of the atmosphere, A means for producing a signal having a magnitude and polarity that varies according to a change in the magnitude and net polarity of the ionic content of the atmosphere; and a means for integrating the signal, mainly for the plurality of high voltage generators. Containing the ion that lasts through operation And a means for generating an integrated signal that changes in response to changes in the atmospheric pressure and that suppresses the influence of fluctuations in the ion content of the atmosphere in a relatively short period of time; The ion content of the atmosphere at a predetermined location is kept within a desired range, which is provided with a feedback means for changing the ion output in the voltage generator and the electrode and keeping the ion content within the desired range. Device to do.