JPH0777275B2 - CO laser device - Google Patents
CO laser deviceInfo
- Publication number
- JPH0777275B2 JPH0777275B2 JP1237499A JP23749989A JPH0777275B2 JP H0777275 B2 JPH0777275 B2 JP H0777275B2 JP 1237499 A JP1237499 A JP 1237499A JP 23749989 A JP23749989 A JP 23749989A JP H0777275 B2 JPH0777275 B2 JP H0777275B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- laser
- temperature
- discharge part
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000003507 refrigerant Substances 0.000 claims description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- 238000001816 cooling Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 60
- 238000007599 discharging Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 230000010355 oscillation Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000005284 excitation Effects 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/04—Arrangements for thermal management
- H01S3/041—Arrangements for thermal management for gas lasers
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Lasers (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
Description
【発明の詳細な説明】 ［産業上の利用分野］ 本発明は、ガス循環・放電励起型COレーザ装置に関する
ものである。TECHNICAL FIELD The present invention relates to a gas circulation / discharge excitation CO laser device.
［従来の技術］ ３軸直交型の大出力放電励起型COレーザ装置は、COガス
の流れ方向と放電方向とレーザ光進行方向とが互いに直
交しており、COを含むレーザガスはガス循環機にて放電
部を循環されると共に放電部の入口側で冷却されるよう
になっている。このCOレーザ装置では、効率的な発振の
ためにガス循環機によりガスを循環し、放電部入口での
ガス温度を−40℃以下の低温に冷却することが必要であ
る。[Prior Art] In a three-axis orthogonal high-power discharge-excited CO laser device, a CO gas flow direction, a discharge direction, and a laser light traveling direction are orthogonal to each other, and a laser gas containing CO is supplied to a gas circulator. And is circulated in the discharge part and cooled at the inlet side of the discharge part. In this CO laser device, it is necessary to circulate the gas by a gas circulator to efficiently oscillate and cool the gas temperature at the inlet of the discharge part to a low temperature of −40 ° C. or lower.
従来のガス循環系を第４図により説明する。A conventional gas circulation system will be described with reference to FIG.
第４図において、先ずガス循環系は、閉ループの循環路
１が形成され、その循環路１に放電電極（図示せず）が
配置される放電部２が形成され、循環路１のレーザガス
を図示の矢印方向に循環すべくガス循環機３が設けられ
る。この放電部２での放電によりレーザガスが励起され
レーザ光が得られる。この放電部２に与えられた放電エ
ネルギーのうちの一部（10〜30％）のみがレーザ出力と
してレーザ装置から取り出され、残りのエネルギーは熱
となり、加熱されたレーザガスが循環路１内を循環する
ため、放電部２の入口側に低温冷媒による熱交換器４が
設けられ、熱交換器４にて放電部２への入口ガス温度TI
が−40℃にされ放電部２で、放電エネルギーを受けて出
口ガス温度TOが60℃に昇温された後、ガス循環機３で再
度、熱交換器４に循環されて放電部２への入口ガス温度
TIが−40℃にされ放電部２に循環されるようになってい
る。In FIG. 4, first, in the gas circulation system, a closed loop circulation path 1 is formed, and a discharge portion 2 in which a discharge electrode (not shown) is arranged is formed in the circulation path 1 to show the laser gas in the circulation path 1. A gas circulator 3 is provided to circulate in the direction of the arrow. The laser gas is excited by the discharge in the discharge section 2 and laser light is obtained. Only a part (10 to 30%) of the discharge energy given to the discharge part 2 is taken out from the laser device as a laser output, the remaining energy becomes heat, and the heated laser gas circulates in the circulation path 1. Therefore, a heat exchanger 4 using a low-temperature refrigerant is provided on the inlet side of the discharge section 2, and the inlet gas temperature T I to the discharge section 2 is set by the heat exchanger 4.
To −40 ° C. and the discharge part 2 receives discharge energy to raise the outlet gas temperature T O to 60 ° C., and then the gas circulator 3 circulates the heat exchanger 4 again to the discharge part 2. Inlet gas temperature
T I is set to −40 ° C. and is circulated to the discharge section 2.
［発明が解決しようとする課題］ ところで、このレーザガスの循環中、放電部２の放電
は、レーザの使用に合わせてオン・オフされるため、出
口レーザガス温度が大きく変動し、これに合わせて熱交
換器４で放電部２へのレーザガスの入口ガス温度TIを制
御するが、１台で温度制御することが困難である。また
熱交換器４を複数台にしてガスの温度制御を行ってもオ
ン・オフ時のガスの温度差が大きいため制御が困難であ
る。[Problems to be Solved by the Invention] By the way, during the circulation of the laser gas, the discharge of the discharge part 2 is turned on / off according to the use of the laser, so that the temperature of the exit laser gas greatly fluctuates, and accordingly the heat of the laser gas changes. Although the inlet gas temperature T I of the laser gas to the discharge section 2 is controlled by the exchanger 4, it is difficult to control the temperature by one unit. Further, even if a plurality of heat exchangers 4 are used to control the gas temperature, it is difficult to control because the gas temperature difference between on and off is large.
このため、第５図に示すように放電部２の出口側に電気
ヒータ５を設け、放電部２での放電がオフの時のみ、レ
ーザガス温度TMを60℃に昇温して、熱交換器４での入口
温度条件をオン時と同じ条件としてガス温度を制御する
ようにしている。For this reason, as shown in FIG. 5, an electric heater 5 is provided on the outlet side of the discharge section 2 and the laser gas temperature T M is raised to 60 ° C. only when the discharge in the discharge section 2 is off to perform heat exchange. The gas temperature is controlled under the condition that the inlet temperature in the container 4 is the same as that at the time of turning on.
しかしながら、常時設定レーザ出力を得るのに必要な電
力を放電部２とヒータ５で消費することとなり消費電力
が大きくなる問題がある。また熱交換器４は60℃のレー
ザガスを−40℃に冷却するため、膨大な冷却エネルギー
を必要とし、液体窒素等の低温冷媒の消費量が多くなる
問題がある。However, the discharge unit 2 and the heater 5 consume the electric power required to obtain the constantly set laser output, which causes a problem that the electric power consumption increases. Further, since the heat exchanger 4 cools the laser gas at 60 ° C. to −40 ° C., enormous cooling energy is required, and there is a problem that the consumption of the low temperature refrigerant such as liquid nitrogen increases.
さらに循環機３を流れるレーザガス温度は60℃と高温の
ため、循環機３が熱で損傷されやすい問題がある。Further, since the temperature of the laser gas flowing through the circulator 3 is as high as 60 ° C., there is a problem that the circulator 3 is easily damaged by heat.
本発明は上記事情を考慮してなされたもので、放電部に
供給循環するレーザガスの温度を放電部での放電の有無
にかかわらず安定して制御できるCOレーザ装置を提供す
ることを目的とする。The present invention has been made in consideration of the above circumstances, and an object of the present invention is to provide a CO laser device capable of stably controlling the temperature of the laser gas supplied and circulated to the discharge portion regardless of whether or not discharge is generated in the discharge portion. .
［課題を解決するための手段］ 本発明は、上記の目的を達成するために、ガス循環路
に、放電部とガス循環機を設け、その放電部の入口側
に、レーザガスを略−40℃に冷却する低温冷媒による主
熱交換器を設け、レーザの使用に合せて放電部をオン・
オフするCOレーザ装置において、放電部の出口側に、放
電部がオンの時放電部からのレーザガスを冷却し、放電
部がオフの時、主熱交換器で冷却されたレーザガスを常
温近くまで加温する水による副熱交換器を設けたもので
ある。[Means for Solving the Problems] In order to achieve the above object, the present invention provides a gas circulation path with a discharge part and a gas circulator, and at the inlet side of the discharge part, a laser gas of approximately -40 ° C is provided. It is equipped with a main heat exchanger that uses a low-temperature refrigerant to cool the
In the CO laser device that is turned off, the laser gas from the discharge part is cooled to the exit side of the discharge part when the discharge part is on, and the laser gas cooled by the main heat exchanger is added to near room temperature when the discharge part is off. A sub heat exchanger for warming water is provided.
［作用］ 上記の構成によれば、放電を行っている時には、水によ
る副熱交換器は放電部からの高温のレーザガス温度を略
常温近くまで下げることで、ガス循環機が熱による損傷
が少なくなり、また低温冷媒による主熱交換器は、入口
側レーザガスの温度が低い分、低温冷媒量が少なくな
る。また放電を行わない時には、水による副熱交換器
は、主熱交換器で、低温に冷却されそのまま放電部を通
ったレーザガスを略常温近くまで加温することで、放電
を行っている時の主熱交換器の入口のレーザガス温度と
同じ条件となり、その温度制御が正確にできる。[Operation] According to the above configuration, when discharging, the sub heat exchanger using water lowers the temperature of the high temperature laser gas from the discharge part to about room temperature, so that the gas circulation machine is less damaged by heat. Further, in the main heat exchanger using the low-temperature refrigerant, the amount of the low-temperature refrigerant decreases as the temperature of the inlet-side laser gas decreases. When no discharge is performed, the sub heat exchanger using water is the main heat exchanger, which heats the laser gas that has been cooled to a low temperature and passed through the discharge part as it is, to a temperature near room temperature. The conditions are the same as the laser gas temperature at the inlet of the main heat exchanger, and the temperature can be controlled accurately.
［実施例］ 以下、本発明の好適実施例を添付図面に基づいて説明す
る。[Embodiment] A preferred embodiment of the present invention will be described below with reference to the accompanying drawings.
第１図において、１は、閉ループに形成されたレーザガ
スの循環路で、その循環路１に、放電電極（図示せず）
が配置される放電部２が形成され、循環路１のレーザガ
スを図示の矢印方向に循環すべくガス循環機３が設けら
れる。この放電部２の入口側には、低温冷媒による主熱
交換器６が設けられ、また出口側には水による副熱交換
器７が設けられる。In FIG. 1, reference numeral 1 is a laser gas circulation path formed in a closed loop, and a discharge electrode (not shown) is provided in the circulation path 1.
Is formed, and a gas circulator 3 is provided to circulate the laser gas in the circulation path 1 in the direction of the arrow shown in the figure. A main heat exchanger 6 for the low-temperature refrigerant is provided on the inlet side of the discharge part 2, and a sub heat exchanger 7 for water is provided on the outlet side.
以上において循環路１内のレーザガスは、循環機３にて
図示の矢印方向に循環され、主熱交換器６で、液体窒素
等の低温冷媒と間接熱交換により入口温度TIが−40℃ま
で冷却され、放電部２に導入される。この放電部２で放
電が行われレーザが出力されている時は、レーザガスの
出口温度TOは60℃に昇温された後、副熱交換器７に流
れ、そこで水と間接熱交換により、出口温度TMが約20℃
に冷却され、循環機３にて主熱交換器６に供給されて−
40℃にされ放電部２に循環される。また放電部２で放電
が行われていない時は、−40℃に冷却されたレーザガス
は、そのままの温度で放電部２を通り、副熱交換器７を
通り、そこで約20℃に昇温され、主熱交換器６で放電を
行っている時と同様に、冷却される。従って放電部２で
の放電の有無にかかわらず放電部２でのレーザガス温度
を安定して制御でき、レーザ出力が安定する。In the above, the laser gas in the circulation path 1 is circulated in the direction of the arrow in the drawing by the circulator 3, and in the main heat exchanger 6, the inlet temperature T I is up to −40 ° C. by indirect heat exchange with a low temperature refrigerant such as liquid nitrogen. It is cooled and introduced into the discharge unit 2. When the discharge is performed in the discharge section 2 and the laser is being output, the outlet temperature T O of the laser gas is raised to 60 ° C. and then flows to the sub heat exchanger 7, where there is indirect heat exchange with water, Outlet temperature T M is about 20 ° C
And is supplied to the main heat exchanger 6 by the circulator 3
It is brought to 40 ° C. and circulated to the discharge part 2. When the discharge part 2 is not discharging, the laser gas cooled to −40 ° C. passes through the discharge part 2 at the same temperature, the auxiliary heat exchanger 7, and is heated to about 20 ° C. The main heat exchanger 6 is cooled as in the case of discharging. Therefore, the laser gas temperature in the discharge part 2 can be controlled stably regardless of the discharge in the discharge part 2, and the laser output is stabilized.
この放電部２でのレーザーガス温度とレーザ出力及び発
振効率との関係を第２図及び第３図に示した。図では放
電電流値が1A,2A,3Aにおけるガス温度に対するレーザ出
力の関係をそれぞれ曲線a,b,cで示した。第２図及び第
３図においてガス温度が低くなればレーザ出力及び発振
効率が上がり、また放電電流値が上がればレーザ出力及
び発振効率も上昇する。The relationship between the laser gas temperature in the discharge part 2 and the laser output and oscillation efficiency is shown in FIGS. 2 and 3. In the figure, the curves a, b, and c show the relationship between the laser output and the gas temperature when the discharge current is 1A, 2A, and 3A, respectively. 2 and 3, when the gas temperature is low, the laser output and oscillation efficiency are high, and when the discharge current value is high, the laser output and oscillation efficiency are also high.
尚上述の実施例においては、COレーザ装置について説明
したがCO2レーザ装置にも使用できる。この場合、循環
路１にCO2ガスを含んだレーザガスを流し、ミラー（出
力鏡）を代えればよい。またCO2レーザの場合は低温冷
媒による冷却は必要でないため、副熱交換器７のみ運転
すればよい。Although the CO laser device has been described in the above embodiments, the CO 2 laser device can also be used. In this case, the laser gas containing the CO 2 gas may be passed through the circulation path 1 and the mirror (output mirror) may be replaced. In the case of a CO 2 laser, cooling with a low-temperature refrigerant is not necessary, so only the sub heat exchanger 7 needs to be operated.
［発明の効果］ 以上説明したことから明らかなように本発明によれば次
のごとき優れた効果を発揮する。[Effects of the Invention] As is clear from the above description, according to the present invention, the following excellent effects are exhibited.
（１）放電部のレーザガス出口側に水による副熱交換器
を設けることで、放電している時はレーザガスを冷却
し、放電を行っていないときはレーザーガスを加温する
ことで、主熱交換器での入口温度条件が同じとなり、安
定した温度と制御が行える。(1) By providing a sub heat exchanger with water on the laser gas outlet side of the discharge part, the laser gas is cooled when discharging, and the laser gas is heated when discharging is not performed, so that the main heat The inlet temperature conditions in the exchanger are the same, and stable temperature and control can be performed.
（２）副熱交換器で、放電部からのレーザガスを常温ま
で冷却することで、ガス循環機の熱による損傷がなくな
ると共に主熱交換器での低温冷媒量が少なくてすむ。(2) By cooling the laser gas from the discharge part to room temperature in the sub heat exchanger, damage to the gas circulation machine due to heat is eliminated and the amount of low-temperature refrigerant in the main heat exchanger is small.
【図面の簡単な説明】 第１図は本発明の一実施例を示す図、第２図は本発明に
おいて、ガス温度とレーザ出力の関係を示す図、第３図
は同じくガス温度と発振効率の関係を示す図、第４図及
び第５図は従来例を示す図である。 図中、１はガス循環路、２は放電部、３はガス循環機、
６は主熱交換器、７は副熱交換器である。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a diagram showing an embodiment of the present invention, FIG. 2 is a diagram showing the relationship between gas temperature and laser output in the present invention, and FIG. 3 is the same as gas temperature and oscillation efficiency. And FIG. 4 and FIG. 5 are diagrams showing a conventional example. In the figure, 1 is a gas circulation path, 2 is a discharge part, 3 is a gas circulator,
6 is a main heat exchanger, and 7 is a sub heat exchanger.
フロントページの続き (72)発明者 平 辰二 神奈川県横浜市磯子区新中原町１番地 石 川島播磨重工業株式会社技術研究所内 (56)参考文献 特開 昭62−111486（ＪＰ，Ａ)Front page continuation (72) Inventor Tatsuji Hira, 1 Shinshinarahara-cho, Isogo-ku, Yokohama-shi, Kanagawa Ishikawajima-Harima Heavy Industries Co., Ltd. Technical Research Institute (56) Reference JP-A-62-111486 (JP, A)
Claims (1)
け、その放電部の入口側に、レーザガスを略−40℃に冷
却する低温冷媒による主熱交換器を設け、レーザの使用
に合せて放電部をオン・オフするCOレーザ装置におい
て、放電部の出口側に、放電部がオンの時放電部からの
レーザガスを冷却し、放電部がオフの時、主熱交換器で
冷却されたレーザガスを常温近くまで加温する水による
副熱交換器を設けたことを特徴とするCOレーザ装置。1. A gas circulation path is provided with a discharge part and a gas circulator, and at the inlet side of the discharge part, a main heat exchanger with a low-temperature refrigerant for cooling the laser gas to approximately -40 ° C. is provided for use of a laser. At the same time, in the CO laser device that turns the discharge part on and off, the laser gas from the discharge part is cooled to the outlet side of the discharge part when the discharge part is on, and is cooled by the main heat exchanger when the discharge part is off. A CO laser device characterized in that a sub-heat exchanger for heating the laser gas to near room temperature is provided with water.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1237499A JPH0777275B2 (en) | 1989-09-13 | 1989-09-13 | CO laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1237499A JPH0777275B2 (en) | 1989-09-13 | 1989-09-13 | CO laser device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03101181A JPH03101181A (en) | 1991-04-25 |
| JPH0777275B2 true JPH0777275B2 (en) | 1995-08-16 |
Family
ID=17016224
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1237499A Expired - Lifetime JPH0777275B2 (en) | 1989-09-13 | 1989-09-13 | CO laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0777275B2 (en) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4686680A (en) * | 1985-06-25 | 1987-08-11 | Laser Corporation Of America | Gas laser having improved crossflow blower arrangement |
-
1989
- 1989-09-13 JP JP1237499A patent/JPH0777275B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03101181A (en) | 1991-04-25 |
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| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20040616 |
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