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JPH07811B2 - Method for manufacturing shadow mask material - Google Patents
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JPH07811B2 - Method for manufacturing shadow mask material - Google Patents

Method for manufacturing shadow mask material

Info

Publication number
JPH07811B2
JPH07811B2 JP60029970A JP2997085A JPH07811B2 JP H07811 B2 JPH07811 B2 JP H07811B2 JP 60029970 A JP60029970 A JP 60029970A JP 2997085 A JP2997085 A JP 2997085A JP H07811 B2 JPH07811 B2 JP H07811B2
Authority
JP
Japan
Prior art keywords
shadow mask
etching
nickel
mask
mask material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60029970A
Other languages
Japanese (ja)
Other versions
JPS61190023A (en
Inventor
勉 羽田野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP60029970A priority Critical patent/JPH07811B2/en
Publication of JPS61190023A publication Critical patent/JPS61190023A/en
Publication of JPH07811B2 publication Critical patent/JPH07811B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D8/00Modifying the physical properties of ferrous metals or ferrous alloys by deformation combined with, or followed by, heat treatment
    • C21D8/02Modifying the physical properties of ferrous metals or ferrous alloys by deformation combined with, or followed by, heat treatment during manufacturing of plates or strips

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Heat Treatment Of Steel (AREA)
  • Heat Treatment Of Sheet Steel (AREA)
  • Electrodes For Cathode-Ray Tubes (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はシヤドウマスク用素材の製造方法に関する。The present invention relates to a method for manufacturing a material for a sheer mask.

〔従来の技術〕[Conventional technology]

通常、シヤドウマスク素材としてはアルミキルド鋼が用
いられているが、最近カラーブラウン管が種々なOA機器
のデイスプレイ、コンピユータの端末等に多く用いられ
ている。これらの用途では静止画像が多く、このため電
子ビームによつてシヤドウマスクが局部的に加熱され、
熱膨張によつてシヤドウマスクの一部がドーム状に膨れ
上がるいわゆるドーミング現象を起こし、画像が乱れる
という問題を発生している。この問題を解消するにはシ
ヤドウマスクの材質を熱膨張率の小さいものとすればよ
く、また低熱膨張率の材料としてはニツケル−鉄合金で
あるアンバー型合金(以下アンバー材という)が知られ
ているので、シヤドウマスク用素材としてアンバー材を
用いればよいと考えられる。ところが市販のアンバー材
は普通C<0.1%、Mn<0.5%を含むもので、穿孔性が悪
く、また、鉄とニツケルの腐蝕速度が異なることもあつ
て、エツチング面が滑らかにならないという現象を起こ
し、このために良好な孔形状が得られずシヤドウマスク
全体のムラレベルを低下させている。
Usually, aluminum killed steel is used as the material for the sheer mask, but recently, color cathode ray tubes are widely used for various OA equipment displays, computer terminals, and the like. In these applications, many static images are used, which causes the electron beam to locally heat the shadow mask.
The thermal expansion causes a so-called doming phenomenon in which a part of the sheer dough mask expands into a dome shape, causing a problem that the image is disturbed. In order to solve this problem, the material of the shear mask should have a small coefficient of thermal expansion, and as a material having a low coefficient of thermal expansion, nickel-iron alloy amber type alloy (hereinafter referred to as amber material) is known. Therefore, it is considered that amber material may be used as the material for the sheer mask. However, commercially available amber materials usually contain C <0.1% and Mn <0.5%, have poor perforation properties, and the corrosion rate of iron and nickel is different, so that the etching surface does not become smooth. As a result, a good hole shape cannot be obtained, and the unevenness level of the entire shadow mask is lowered.

〔発明が解決しようとする問題点〕[Problems to be solved by the invention]

そこで本発明が解決しようとする問題点はフオトエツチ
ングにより良好な孔を形成でき、滑らかなエツチング面
を得ることができる、シヤドウマスク用ニツケル−鉄合
金素材を提供することにある。
Therefore, a problem to be solved by the present invention is to provide a nickel-iron alloy material for a shear mask, which can form a good hole by photo etching and can obtain a smooth etching surface.

〔問題点を解決するための手段〕[Means for solving problems]

本発明者は上記の問題点を解決すべく研究の結果、C含
有量を0.001〜0.008重量%に規制し、且つ冷間圧延工程
での最終圧下率を40〜70%に規制することで、フオトエ
ツチング適性を改善し、フオトエツチングにより良好な
孔を形成でき、滑らかなエツチング面を得ることがで
き、シヤドウマスク全体のムラレベルを向上させること
ができることを見いだし、かかる知見にもとづいて本発
明を完成したものである。
As a result of research to solve the above problems, the present inventor regulated the C content to 0.001 to 0.008% by weight and the final reduction rate in the cold rolling step to 40 to 70%. It has been found that the photo-etching suitability is improved, good holes can be formed by photo-etching, a smooth etching surface can be obtained, and the unevenness level of the entire shadow mask can be improved, and the present invention was completed based on such findings. It is a thing.

即、本発明に係るシャドウマスク用素材の製造方法は、
ニッケル−鉄合金を素材とする熱延鋼板に1回以上の冷
間圧延と焼鈍を施して所定板厚とするニッケルおよび鉄
を主成分とする、シャドウマスク用素材の製造方法にお
いて、C含有量を0.001〜0.008重量%に規制し、かつ、
冷間圧延工程での最終圧下率を40〜70%に規制すること
を特徴とするものである。
Immediately, the manufacturing method of the material for the shadow mask according to the present invention,
In a method for producing a material for a shadow mask, which comprises, as a main component, nickel and iron, which are obtained by subjecting a hot-rolled steel sheet made of a nickel-iron alloy as a raw material to cold rolling and annealing one or more times to give a predetermined thickness, Of 0.001 to 0.008% by weight, and
It is characterized in that the final rolling reduction in the cold rolling process is restricted to 40 to 70%.

以下に本発明の製造方法につき詳細に説明する。The production method of the present invention will be described in detail below.

本発明におけるシャドウマスク用素材の材料としては、
従来公知のニッケル−鉄合金であるアンバー材が用いら
れる。具体的には、米国のMilitary規格で規定されてい
る公知の「36%Ni-Fe合金」が用いられ得る。この場合
の36%Ni-Fe合金は、Niが35〜37重量%、残部がFeなら
びに不可避的不純物からなる。
As the material of the material for the shadow mask in the present invention,
Amber material which is a conventionally known nickel-iron alloy is used. Specifically, the known "36% Ni-Fe alloy" defined in the Military Standard of the United States can be used. In this case, the 36% Ni-Fe alloy contains 35 to 37% by weight of Ni, and the balance is Fe and inevitable impurities.

ニツケル−鉄合金は、転炉溶製後真空脱ガス装置によつ
て脱炭処理を行うが、真空度、溶鋼温度、処理時間等の
各種処理条件を選択しC含有量を0.001〜0.008重量%に
調整する。溶鋼を鋳型に鋳込み熱間圧延によつて熱延鋼
帯(板)とした後1回以上の冷間圧延と焼鈍を施して所
定板厚とするが、冷間圧延工程において最終圧下率を40
〜70%に規制する。C含有量を0.001〜0.008重量%に規
制したのは、0.008重量%を超えるC含有量では素材中
の炭化物が増加しフオトエツチング時エツチング面の結
晶粒界に析出してエツチング面が凹凸となつてしまうた
めであり0.001重量%未満のC含有量では合金中の酸素
量が高くなり、酸化物系介在物の量がフオトエツチング
時に穿孔性を損なうほどの量になるためである。最終圧
下率を40〜70%に規制したのは、40%以下の圧下率では
結晶粒径が大きいためフオトエツチング時エチツング面
に結晶粒界が顕著に現れ、エツチング面が凹凸となつて
しまうためであり、70%以上の圧下率では板形状を均一
にすることがむずかしくなり、またシヤドウマスクとな
つた後のプレス成型のためのチユーブメーカーでのアニ
ール後、結晶粒の成長が悪く安定したプレス成型性が得
られないためである。
Nickel-iron alloy is subjected to decarburization treatment by a vacuum degassing device after melting in a converter, but various treatment conditions such as vacuum degree, molten steel temperature and treatment time are selected and the C content is 0.001 to 0.008% by weight. Adjust to. Molten steel is cast into a mold to form a hot-rolled steel strip (plate) by hot rolling, and then cold rolling and annealing are performed one or more times to obtain a predetermined plate thickness. In the cold rolling process, the final reduction rate is 40%.
Regulate to ~ 70%. The C content is regulated to 0.001 to 0.008% by weight because when the C content exceeds 0.008% by weight, the carbides in the material increase and precipitate at the grain boundaries of the etching surface during photo-etching, resulting in uneven etching surface. This is because if the C content is less than 0.001% by weight, the amount of oxygen in the alloy will be high, and the amount of oxide inclusions will be such that the perforability is impaired during photoetching. The final rolling reduction was regulated to 40-70% because at a rolling reduction of 40% or less, the crystal grain size is large, so grain boundaries will appear prominently on the etching surface during photo-etching, and the etching surface will become uneven. With a reduction rate of 70% or more, it becomes difficult to make the plate shape uniform, and after annealing in a tube maker for press molding after connecting with a shear mask, the growth of crystal grains is poor and stable press molding is performed. This is because the sex cannot be obtained.

〔作用〕 本発明ではニツケル−鉄合金のC含有量を0.001〜0.008
重量%に規制することでフオトエツチング時穿孔性に有
害となる炭化物を少なくすることが可能となり、また最
終圧下率を40〜70%に規制することで結晶粒径が小さく
なり、エツチング面に結晶粒界が顕著に現れることが解
消され、エツチング面が滑らかとなる。これによつて形
状の良好な孔が形成され、シヤドウマスク全体のムラレ
ベルが向上する。
[Operation] In the present invention, the C content of the nickel-iron alloy is 0.001 to 0.008.
It is possible to reduce carbides that are harmful to the piercing properties during photo-etching by controlling the weight percentage, and the final rolling reduction is controlled to 40 to 70% to reduce the crystal grain size and to reduce the crystal size on the etching surface. The remarkable appearance of grain boundaries is eliminated, and the etching surface becomes smooth. As a result, holes having a good shape are formed, and the unevenness level of the entire shadow mask is improved.

〔実施例〕〔Example〕

次に本発明の実施例を説明する。 Next, examples of the present invention will be described.

C含有量及び最終圧下率の異なる2種類のニツケル−鉄
合金を、同一条件にてフオトエツチング工程を進行させ
エツチング状況を比較してみた。2種類のサンプルの成
分、最終圧下率等は表1に示す。サンプル1はC含有量
0.018wt%、最終圧下率20%であるが、供試サンプルの
エツチング面を走査電子顕微鏡で観察した結果エツチン
グ面において結晶粒界がはつきりと現れ、エツチング面
が凹凸となつてしまつていることが判明した。このた
め、シヤドウマスクのムラレベルは悪くなつている。こ
れに対して本発明の実施例であるサンプル2は、C含有
量0.004wt%、最終圧下率55%であるが、エツチング面
が滑らかとなつており、シヤドウマスクのムラレベルも
良くなつている。
Two kinds of nickel-iron alloys having different C contents and final rolling reductions were subjected to the photo etching process under the same conditions to compare the etching conditions. Table 1 shows the components of the two types of samples, the final reduction rate, and the like. Sample 1 has C content
0.018 wt%, final rolling reduction is 20%, but as a result of observing the etching surface of the sample under test with a scanning electron microscope, grain boundaries appear as sticking on the etching surface and the etching surface becomes uneven. It has been found. For this reason, the unevenness level of the shadow mask is getting worse. On the other hand, sample 2 which is an example of the present invention has a C content of 0.004 wt% and a final reduction rate of 55%, but the etching surface is smooth, and the unevenness level of the shed shadow mask is also improved.

(エツチング条件) ニツケル−鉄合金よりなる素材の一方の面に0.25mmピツ
チで配列された多数の大円ドツト状開口部(直径0.150m
m)を有する第1レジストパターンを設け、他方の面に
0.25mmピツチで配列された多数の小円ドツト状開口部
(直径0.090mm)を有する第2レジストパターンを設
け、液温60℃の46°Be′FeCl3腐蝕液を用い、20Kg/cm2
のスプレイ圧で両面からスプレイエツチングして大孔部
の口径0.220mm、小孔部の口径0.110mmの開孔を多数エツ
チング加工し、製品を得た。
(Etching conditions) A large number of large circular dot-shaped openings (0.150 m diameter) arranged in 0.25 mm pitch on one side of a nickel-iron alloy material.
m) is provided on the other surface of the first resist pattern.
A second resist pattern having a large number of small circular dot-shaped openings (0.090 mm diameter) arranged in 0.25 mm pitch was provided, and 20 Kg / cm 2 was used with a 46 ° Be′FeCl 3 corrosive liquid with a liquid temperature of 60 ° C.
Spray etching was performed from both sides with the spray pressure of No. 2, and a large number of holes having a diameter of 0.220 mm and a small hole of 0.110 mm were etched to obtain a product.

〔発明の効果〕〔The invention's effect〕

以上、詳記した通り、本発明の製造方法によればフオト
エツチングにより良好な孔を形成でき、滑らかなエツチ
ング面を得ることができるシヤドウマスク用ニツケル−
鉄合金素材を提供でき、それによつてシヤドウマスク全
体のムラレベルを向上させることができる。
As described above in detail, according to the manufacturing method of the present invention, a nickel mask for a shadow mask capable of forming a good hole by photo etching and obtaining a smooth etching surface.
An iron alloy material can be provided, thereby improving the unevenness level of the entire sheer dough mask.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】ニッケル−鉄合金を素材とする熱延鋼板に
1回以上の冷間圧延と焼鈍を施して所定板厚とするニッ
ケルおよび鉄を主成分とする、シャドウマスク用素材の
製造方法において、C含有量を0.001〜0.008重量%に規
制し、かつ、冷間圧延工程での最終圧下率を40〜70%に
規制することを特徴とする、シャドウマスク用素材の製
造方法。
1. A method for producing a material for a shadow mask, which comprises, as a main component, nickel and iron, which are obtained by subjecting a hot-rolled steel sheet made of a nickel-iron alloy as a raw material to cold rolling and annealing one or more times to a predetermined thickness. 2. The method for producing a material for a shadow mask, wherein the C content is regulated to 0.001 to 0.008% by weight and the final rolling reduction in the cold rolling step is regulated to 40 to 70%.
JP60029970A 1985-02-18 1985-02-18 Method for manufacturing shadow mask material Expired - Lifetime JPH07811B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60029970A JPH07811B2 (en) 1985-02-18 1985-02-18 Method for manufacturing shadow mask material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60029970A JPH07811B2 (en) 1985-02-18 1985-02-18 Method for manufacturing shadow mask material

Publications (2)

Publication Number Publication Date
JPS61190023A JPS61190023A (en) 1986-08-23
JPH07811B2 true JPH07811B2 (en) 1995-01-11

Family

ID=12290819

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60029970A Expired - Lifetime JPH07811B2 (en) 1985-02-18 1985-02-18 Method for manufacturing shadow mask material

Country Status (1)

Country Link
JP (1) JPH07811B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6452022A (en) * 1987-08-19 1989-02-28 Nippon Mining Co Production of shadow mask material
EP0567989B1 (en) * 1992-04-27 1997-07-09 Hitachi Metals, Ltd. Shadow mask sheet, method of producing the same and cathode ray tube provided therewith

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59200721A (en) * 1983-04-27 1984-11-14 Toshiba Corp Manufacture of shadow mask
JPS6021331A (en) * 1983-07-14 1985-02-02 Nippon Steel Corp Production of low thermally expanding fe-ni alloy sheet

Also Published As

Publication number Publication date
JPS61190023A (en) 1986-08-23

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