JPH0782120B2 - Radiation image magnifying observation device - Google Patents

Description

The present invention relates to a radiographic image magnifying observation apparatus capable of observing a sample in at least two wavelength regions of visible light, ultraviolet light or X-ray.

[Conventional technology]

Conventionally, the radiation image magnifying and observing device used in the visible, ultraviolet, or X-ray wavelength range has been realized as a dedicated microscope for each wavelength range because its optical system is different for each wavelength range.

For example, “Parity” (Baifukan) Vol.01No.04 (1984)
In the X-ray microscope shown in, the X-ray from the X-ray source is incident on the sample placed at the sample setting position, and the transmitted X-ray is reflected by the oblique-incidence reflecting mirror in the X-ray image magnifying section, and the X-ray film, etc. An X-ray image is formed on. Therefore, the conventional X-ray microscope is dedicated to X-rays and cannot be used for observing a visible light image or an ultraviolet image at all.

[Problems to be Solved by the Invention]

As described above, in the conventional apparatus, the sample must be observed for each wavelength by using a dedicated apparatus. Therefore, when the visible light image, the ultraviolet ray image, and the X-ray image of a certain sample are to be observed, the sample is separated. I have to put it back in my microscope. Then, the position of each set is displaced, so that a radiation image of the same sample cannot be obtained with good reproducibility among visible light, ultraviolet rays, or X-rays.

Therefore, the present invention provides a radiographic image magnifying observation apparatus capable of reproducibly obtaining a radiographic image in each wavelength region of visible light, ultraviolet light, or X-ray without resetting a sample with the same device. To aim.

[Means for Solving the Problems]

A radiographic image magnifying observation apparatus according to the present invention is formed by passing a radiation source that emits radiation in at least two wavelength regions of visible light, ultraviolet rays, or X-rays toward a sample setting position, and a sample setting position. A radiation image enlarging unit that uses an oblique incidence reflecting mirror that magnifies the magnified radiation image, and detection means that detects the magnified radiation image for each visible light, ultraviolet ray, or X-ray wavelength region.

Here, a filter for selectively removing a visible light, ultraviolet ray, or X-ray wavelength region is interposed between the radiation source and the sample setting position or between the sample setting position and the radiation image enlarging portion. Alternatively, a photoelectric conversion unit having sensitivity to at least one of visible light, ultraviolet rays, and X-rays may be provided at the position where the magnified radiation image is formed. Further, a reflecting means capable of moving forward and backward is provided in the optical path of the radiation in the radiation image enlarging section, and a reflected light detecting means having sensitivity to the reflected light is provided at an image forming position of the reflected light by the reflecting means. Good.

[Action]

According to the configuration of the present invention, the radiation image can be appropriately changed between visible light, ultraviolet rays, and X-rays by exchanging the filter, etc., and these radiation images are connected to the detection means capable of detecting the radiation image for each wavelength region. To be imaged. Therefore, the radiation image of the sample can be selected and obtained in the visible light, ultraviolet ray, or X-ray wavelength region.

〔Example〕

An embodiment of the present invention will be described below with reference to FIGS. 1 and 2 of the accompanying drawings. In the description of the drawings, the same elements will be denoted by the same reference symbols, without redundant description.

FIG. 1 is a configuration diagram of a radiographic image magnifying observation apparatus according to an embodiment of the present invention. The radiation source 1 is composed of, for example, a synchrotron radiation type light source.
Emit radiation in the wavelength range up to the line. That is, the synchrotron radiation light (SOR light) has a wavelength distribution as shown in FIG. 2, and this is transmitted through the filter 2 arranged in front of the radiation source 1, and the sample of the sample setting member 3 The sample 4 provided at the set position is irradiated. Here, the filter 2 may be made of borosilicate glass, quartz glass, or polyparaxylylene (trade name parylene) having a thickness of several μm. When a filter made of borosilicate glass is used, ultraviolet rays and X-rays are cut off and only visible light is transmitted. When quartz glass is used, X-rays are cut and only ultraviolet rays and visible light are transmitted. And when using polyparaxylylene, 300-3000
Ultraviolet rays with a wavelength of about Å are cut and X-rays and visible light are transmitted.

When the radiation passes through the sample 4, a radiation image is formed, and the radiation image is incident on the radiation image enlarging portion 6 through the entrance window 5. Here, as the material of the entrance window 5, a material that allows good transmission of X-rays, ultraviolet rays and visible light and does not allow the passage of atmospheric gas is used. For example, a polypropylene film having a thickness of about 1 to 10 μm is suitable. ing. The incident radiation is reflected by the oblique-incidence reflecting mirror 7, whereby the radiation image is enlarged regardless of the wavelength region of the radiation. Then, after the unnecessary radiation is cut by the stopper 8, an enlarged radiation image is formed on the photocathode 9.

Here, a reflecting mirror 10 that can move back and forth is provided in the optical path of the radiation, and when the reflecting mirror 10 is retracted from the optical path by the support rod 11 (in the case of the solid line in the figure), the magnified radiation image is photoelectric. An image is formed on the surface 9. In contrast,
When the reflecting mirror 10 is advanced to the optical path of radiation by the support rod 11 (indicated by the dotted line in the figure), the enlarged radiation image is formed on the light receiving surface of the photodetector 12.

When the magnified radiation image is formed on the photocathode 9, photoelectrons corresponding thereto are emitted from the photocathode 9, and the resulting electron image is magnified by the coils 13a and 13b. Then, the magnified electronic image is doubled by the microchannel plate 14 and then focused on the fluorescent surface 15 to form an optical image. As described above, in the present embodiment, the electronic image enlarging unit 16 is added to the radiation image enlarging unit 6.
It has a structure attached. The optical image formed on the fluorescent surface 15 is captured by the camera 17 and then stored in the frame memory 18
Monitor 19 equipped with a CTR etc.
Given to. On the other hand, the output signal of the photodetector 12 is also input to the monitor 19.

Next, the operation of the radiation image magnifying observation apparatus shown in FIG. 1 will be described for each detection of visible light, ultraviolet rays, and X-ray images.

First, when observing a visible light image, a filter made of borosilicate glass is used. Then, the support rod 11 is operated to advance the reflecting mirror 10 into the optical path of the radiation as shown by the dotted line in FIG. Then, ultraviolet rays and X-rays of the radiation emitted from the radiation source 1 are cut by the filter 2,
Only visible light is applied to the sample 4. This visible light image is magnified by the radiation image magnifying section 6, reflected by the reflecting mirror 10 and focused on the light receiving surface of the photodetector 12. Therefore, monitor 4
It is possible to observe the visible light image of.

After switching to the observation of ultraviolet rays after observing such a visible light image, the filter 2 is replaced with that made of quartz glass. Then, the support rod 11 is operated to retract the reflecting mirror 10 from the optical path of the radiation as shown by the solid line in FIG.
Then, the X-rays of the radiation emitted from the radiation source 1 are cut by the filter 2, and only the visible light and the ultraviolet rays are collected by the sample 4
Is irradiated. For this reason, a visible light image and an ultraviolet light image are formed on the photocathode 9, but if the photocathode 9 is designed to have sensitivity only to X-rays and ultraviolet rays, only the ultraviolet image can be handled. Then, photoelectrons are emitted. Therefore, the electronic image formed by the photoelectrons is enlarged and amplified, formed on the fluorescent surface 15, optically captured by the camera 17, and sent from the frame memory 18 to the monitor 19, so that the ultraviolet image of the sample 4 can be observed.

When observing the X-ray image after observing the visible light image and the ultraviolet light image as described above, the filter 2 is replaced with a filter made of polyparaxylylene. In this way, the filter 2 cuts off ultraviolet rays in the wavelength range of 300 to 3000 Å, and the sample 4 is irradiated with only visible light and X-rays. Then, the visible light image and the X-ray image are formed on the photocathode 9 as in the case of observing the ultraviolet image. However, since the photocathode 9 has no sensitivity to visible light, only the X-ray image is displayed on the monitor 19 in the end.

The present invention is not limited to the above embodiment, and various modifications can be made.

For example, the radiation source is not limited to the SOR light source, and a gas plasma light source, a laser plasma light source, or the like can be appropriately used. Further, it may be applicable not only in a wide wavelength range from visible light to X-rays but also in a wavelength range from ultraviolet rays to X-rays. In this case, the reflecting mirror 10, the photodetector 12 and the like can be omitted in FIG. Further, the filter 2 may be made of various materials. Further, it is not essential to provide the electronic image enlarging portion.

〔The invention's effect〕

As described above in detail, in the present invention, the radiation image can be appropriately changed between visible light, ultraviolet rays or X-rays by replacing the filter, etc., and these radiation images can be detected for each wavelength region. Is imaged on the means. Therefore, a radiation image in each wavelength region of visible light, ultraviolet light, or X-ray can be obtained with good reproducibility without resetting the sample with the same device.

[Brief description of drawings]

FIG. 1 is a configuration diagram of a radiation image magnifying observation apparatus according to an embodiment of the present invention, and FIG. 2 is a wavelength distribution diagram of synchrotron radiation light. 1 ... Radiation source, 2 ... Filter, 3 ... Sample setting member, 4
... sample, 5 ... incident window, 6 ... radiation image enlarging part, 7 ... oblique incidence reflecting mirror, 8 ... stopper, 9 ... photocathode, 10 ... reflecting mirror, 11 ...
Support rod, 12 ... Photodetector, 14 ... Micro channel plate, 15 ... Fluorescent surface, 16 ... Electronic image magnifying section, 17 ... Camera, 18 ...
Frame memory, 19 ... Monitor.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Takeshi Hayakawa 1 126-1, Nomachi, Hamamatsu City, Shizuoka Prefecture Hamamatsu Photonics Co., Ltd. (56) References JP-A-64-3600 (JP, A)

Claims (4)

[Claims] 1. A radiation source that emits radiation in at least two wavelength regions of visible light, ultraviolet rays, or X-rays toward a sample setting position, and a radiation image formed by passing through the sample setting position. Radiation image magnifying observation, comprising: a radiation image magnifying unit that uses a magnifying oblique incidence reflecting mirror; and detection means that detects the magnified radiation image for each visible light, ultraviolet ray, or X-ray wavelength region. apparatus. 2. A wavelength region of visible light, ultraviolet rays or X-rays is selectively removed between the radiation source and the sample setting position or between the sample setting position and the radiation image enlarging portion. A filter is interposed.
The radiographic image magnifying observation apparatus described. 3. The image forming position of the enlarged radiation image,
The radiographic image magnifying observation apparatus according to claim 1, further comprising photoelectric conversion means having sensitivity to at least one of visible light, ultraviolet rays, and X-rays. 4. A reflection means capable of advancing and retracting is provided in an optical path of the radiation in the radiation image enlarging portion, and a reflection light detecting means having sensitivity to the reflection light is formed at an image forming position of the reflection light by the reflection means. The radiographic image magnifying observation apparatus according to claim 1, further comprising: