JPH0782631B2 - Magnetic head - Google Patents
Magnetic headInfo
- Publication number
- JPH0782631B2 JPH0782631B2 JP19077694A JP19077694A JPH0782631B2 JP H0782631 B2 JPH0782631 B2 JP H0782631B2 JP 19077694 A JP19077694 A JP 19077694A JP 19077694 A JP19077694 A JP 19077694A JP H0782631 B2 JPH0782631 B2 JP H0782631B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic head
- air bearing
- processing
- slider
- bearing surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000003754 machining Methods 0.000 claims description 12
- 238000006243 chemical reaction Methods 0.000 claims description 11
- 238000005498 polishing Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 229910003460 diamond Inorganic materials 0.000 description 4
- 239000010432 diamond Substances 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 230000001939 inductive effect Effects 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、スライダと磁気変換素
子とを有する磁気ヘッドに関し、更に詳しくは、スライ
ダに備えられる空気ベアリング面の平面形状制御のため
の改良に係る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head having a slider and a magnetic conversion element, and more particularly to an improvement for controlling the plane shape of an air bearing surface provided in the slider.
【０００２】[0002]
【従来の技術】従来より、磁気ディスク装置には、磁気
記録媒体の走行によって生じる動圧を利用して、磁気記
録媒体との間に空気ベアリングを保って動作する磁気ヘ
ッドが用いられている。このような磁気ヘッドは、例え
ば特公昭５８−２８６５０号公報等で公知であり、その
基本的な構成は、媒体対向面側に空気ベアリング面を有
するスライダの空気流出端部側に、磁気変換素子を配置
した構造となっている。2. Description of the Related Art Conventionally, a magnetic head has been used in a magnetic disk device, which utilizes dynamic pressure generated by running of a magnetic recording medium to maintain an air bearing between the magnetic recording medium and the magnetic recording medium. Such a magnetic head is known, for example, from Japanese Patent Publication No. 58-28650, and its basic configuration is such that a magnetic conversion element is provided on the air outflow end side of a slider having an air bearing surface on the medium facing surface side. It has a structure in which is arranged.
【０００３】この種の磁気ヘッドでは、媒体対向面は高
度の平面度を持つように研磨加工されるが、更に、起動
特性や動作特性の改善のために、空気ベアリング面の平
面形状を、微小領域で凸面または凹面となるように制御
しなければならないことも多い。例えば、小型磁気ディ
スク装置では、ディスク起動時のヘッド／媒体間面接触
摩擦によるモータトルク増大を避けるため、浮上特性に
実質的に影響を与えない程度の、僅かに凸面のクラウン
形状となるようなものが要求されることがある。このよ
うな空気ベアリング面の平面形状制御に関して、特公昭
５８−２１３２９号公報には、媒体対向面の表面を機械
研磨する技術が開示されている。特開平１ー１７６３７
６号公報にはスライダの媒体対向面とは反対側の面に硬
化性樹脂を付着させ、その硬化収縮力を利用して、空気
ベアリング面の平面形状を制御する技術が開示されてお
り、特開平１ー２６７８２２号公報には、媒体対向面と
は反対側の面に、比較的幅の広い溝を設け、溝のある部
分と、溝のない部分との間の加工歪差を利用して、空気
ベアリング面の平面度を制御する技術が開示されてい
る。In this type of magnetic head, the medium facing surface is polished so as to have a high degree of flatness. Further, in order to improve the starting characteristics and operating characteristics, the planar shape of the air bearing surface is made minute. It is often necessary to control the area to be convex or concave. For example, in a small-sized magnetic disk device, in order to avoid an increase in motor torque due to contact friction between the head and the medium at the time of disk startup, the crown shape is slightly convex so as not to substantially affect the flying characteristics. Things may be required. Regarding such plane shape control of the air bearing surface, Japanese Patent Publication No. 58-21329 discloses a technique of mechanically polishing the surface of the medium facing surface. JP-A-1-17637
Japanese Unexamined Patent Publication No. 6 discloses a technique in which a curable resin is attached to the surface of the slider opposite to the medium-opposing surface, and the curing shrinkage force is used to control the planar shape of the air bearing surface. In Japanese Patent Laid-Open No. 1-267822, a groove having a relatively wide width is provided on the surface opposite to the medium facing surface, and a difference in processing strain between a grooved portion and a grooveless portion is utilized. , A technique for controlling the flatness of the air bearing surface is disclosed.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、空気ベ
アリング面の平面制御は極めて微小な領域で行われる。
例えば、クラウン形状として要求される凸面は、１０ｎ
ｍ〜３００ｎｍ前後の微小凸面であり、このような微小
凸面を、特公昭５８−２１３２９号で開示される連続機
械研磨によって付与することは非常に困難である。しか
も、高密度記録対応のための低浮上量化により、スライ
ダが小型化される傾向にあり、機械研磨作業が益々困難
になりつつある。However, the plane control of the air bearing surface is performed in an extremely small area.
For example, the convex surface required for the crown shape is 10n
It is a minute convex surface of about m to 300 nm, and it is very difficult to impart such a minute convex surface by continuous mechanical polishing disclosed in Japanese Patent Publication No. 58-21329. Moreover, the slider has tended to be downsized due to the reduced flying height for high density recording, and the mechanical polishing work is becoming more and more difficult.
【０００５】また、硬化性樹脂付着による空気ベアリン
グ面の平面形状制御の場合は、硬化性樹脂の経時変化に
より、空気ベアリング面の平面度が変化してしまう。溝
加工による制御は、溝加工自体の難しい上に、平面制御
量に応じた専用治具が必要であり、全体として、生産性
が悪く、コスト高になる。Further, in the case of controlling the plane shape of the air bearing surface by adhering the curable resin, the flatness of the air bearing surface changes due to the change with time of the curable resin. The control by the groove processing is difficult in the groove processing itself and requires a dedicated jig according to the plane control amount, resulting in poor productivity and high cost as a whole.
【０００６】本発明の課題は、空気ベアリング面の平面
形状を、ｎｍ領域の微小範囲で制御した磁気ヘッドを提
供することである。本発明の更にもう一つの課題は、制
御された空気ベアリング面の平面形状に、経時変化を生
じることのない磁気ヘッド装置を提供することである。
本発明の更にもう一つの課題は、空気ベアリング面の平
面形状を、凸面または凹面の何れの方向にも制御し得る
制御自由度の高い磁気ヘッドを提供することである。 The object of the present invention is to provide a flat air bearing surface.
Providing a magnetic head whose shape is controlled in the minute range of the nm range
It is to serve. Yet another object of the present invention is to control
The plane shape of the controlled air bearing surface changes over time.
An object of the present invention is to provide a magnetic head device that does not twist.
Still another object of the present invention is to flatten the air bearing surface.
Surface shape can be controlled in either convex or concave direction
The purpose is to provide a magnetic head having a high degree of control freedom.
【０００７】[0007]
【課題を解決するための手段】上述した課題解決のた
め、本発明は、スライダを有する磁気ヘッドであって、
前記スライダは、媒体対向面側に、空気ベアリング面
と、前記空気ベアリング面よりも低い底面を有する溝と
を有し、前記溝の前記底面、または、前記媒体対向面と
向き合う反対側の面の少なくとも一方に、加工歪みを誘
発して前記空気ベアリング面の平面形状を制御する加工
痕を有する。To solve the above problems, the present invention provides a magnetic head having a slider,
The slider has an air bearing surface on the medium facing surface side.
If, having <br/> a groove having a lower bottom surface than the air bearing surface, the bottom surface of the groove or, at least one of the opposite surface facing the said bearing surface, induced a processing strain
It has machining marks that are emitted to control the planar shape of the air bearing surface .
【０００８】[0008]
【作用】スライダは溝の底面に加工歪みを誘発して空気
ベアリング面の平面形状を制御する加工痕を有する。か
かる加工痕を有することにより、空気ベアリング面の平
面形状を、ｎｍ領域の微小範囲で制御した磁気ヘッドを
実現することができる。また、加工痕の方向、数、位
置、深さ、幅及び形状等は経時変化を生じないから、加
工痕によって制御された空気ベアリング面の平面形状
に、経時変化を生じることのない磁気ヘッドが得られ
る。加工痕による空気ベアリング面の平面制御は、次の
ように行なわれる。即ち、例えば、加工痕を面上に仮想
された直線の上に乗るように配置した場合、加工痕のあ
る部分と、加工痕のない部分とで、加工歪差を生じ、加
工痕の乗る直線の両側で撓むような加工歪を生じる。こ
の加工歪によりスライダの空気ベアリング面の平面度が
制御される。加工痕は媒体対向面と向き合う反対側の面
に設けてもよい。空気ベアリング面の平面形状は加工痕
の数、位置、深さ、幅及び形状の選択に応じて、凸面ま
たは凹面の何れの方向にも制御できる。 [Operation] The slider induces processing strain on the bottom surface of the groove and causes air to flow.
It has processing marks that control the planar shape of the bearing surface. Or
The air bearing surface has
A magnetic head whose surface shape is controlled in a minute range in the nm range
Can be realized. In addition, the direction, number, and position of processing marks
The position, depth, width, shape, etc. do not change over time, so
Plane shape of air bearing surface controlled by work marks
In addition, it is possible to obtain a magnetic head that does not change with time.
It The plane control of the air bearing surface by machining marks is as follows.
Is done as follows. That is, for example, a machining mark is virtually
If you place it so that it rides on the straight line
Difference in processing strain between the part
Processing strain that causes bending on both sides of the straight line on which the marks are left is generated. This
The flatness of the air bearing surface of the slider is
Controlled. The processing mark is the opposite surface that faces the medium facing surface.
May be provided. The plane shape of the air bearing surface is a machining mark
Depending on the number, position, depth, width and shape of the
Alternatively, it can be controlled in either direction of the concave surface.
【０００９】加工痕は、ダイヤモンド、セラミックもし
くは超硬材料よりなるカッタまたは針状端子により、ス
ライダに機械加工を施して形成するか、レーザ、電子線
もしくはイオンのビームまたは超音波をスライダの必要
な個所に照射して形成するか、または微粒研摩材をスラ
イダに噴射して形成できる。これらの加工痕形成手段に
よれば、加工痕の数、位置、深さ、幅及び形状等を任意
に選定でき、空気ベアリング面を直接研磨加工して平面
形状を制御する場合に比べて、加工作業が極めて容易で
あり、しかもｎｍ領域の微小範囲で容易に制御できる。The machining mark is formed by machining the slider with a cutter or a needle terminal made of diamond, ceramic or a superhard material, or a laser, an electron beam or an ion beam or an ultrasonic wave is required for the slider. It can be formed by irradiating a spot or by spraying a fine abrasive onto a slider. According to these processing trace forming means, the number, position, depth, width, shape, etc. of the processing traces can be arbitrarily selected, and compared with the case where the planar shape is controlled by directly polishing the air bearing surface. The work is extremely easy and can be easily controlled in the minute range of nm range.
【００１０】[0010]
【実施例】図１は本発明に係る磁気ヘッドの斜視図、図
２は図１のＡ２ーＡ２線上における部分拡大断面図であ
る。１はスライダ、２は磁気変換素子である。スライダ
１は媒体対向面側に空気ベアリング面１１、１２と、空
気ベアリング面１１、１２から落ち込む溝１３とを有し
ている。空気ベアリング面１１、１２及び溝１３はスラ
イダ１の長さ方向に沿って設けられている。スライダ１
の長さ方向は、磁気ディスク等の磁気記録媒体との組み
合わせにおいて、空気の流れ方向ａと一致する。1 is a perspective view of a magnetic head according to the present invention, and FIG. 2 is a partially enlarged sectional view taken along the line A2-A2 in FIG. Reference numeral 1 is a slider, and 2 is a magnetic conversion element. The slider 1 has air bearing surfaces 11 and 12 on the medium facing surface side and a groove 13 that falls from the air bearing surfaces 11 and 12. The air bearing surfaces 11 and 12 and the groove 13 are provided along the length direction of the slider 1. Slider 1
The length direction of (1) corresponds to the air flow direction "a" in combination with a magnetic recording medium such as a magnetic disk.
【００１１】溝１３は底面に加工歪みを誘発する微小深
さの加工痕３１〜３ｎを有する。加工痕３１〜３ｎはス
ライダ１の長さ方向と交差する方向、すなわち幅方向に
向かって設けられている。加工痕３１〜３ｎは、図２に
示すように断面三角形状に形成したり、或は図３に示す
ように、断面矩形状に形成することができる。空気ベア
リング面１１、１２は平面形状が加工痕３１〜３ｎによ
って制御された凸面となっている。磁気変換素子２は、
空気の流れ方向ａと一致するスライダ１の長さ方向の一
端側において、スライダ１に備えられている。スライダ
１は、媒体対向面側に２つのレール１４、１５を有し、
レール１４、１５の表面を空気ベアリング面１１、１２
として利用する２レールタイプとなっている。図示は省
略するが、２本以上のレールを有するものであってもよ
い。スライダ１は、周知のセラミック構造体によって形
成されている。例えば、Ａｌ2Ｏ3−ＴｉＣまたはフェラ
イト等である。磁気変換素子２は薄膜磁気変換素子で構
成されており、従って、実施例は薄膜磁気ヘッドを示し
ている。２１、２２は取り出し電極である。薄膜磁気変
換素子２は誘導型であってもよいし、磁気抵抗効果素子
を用いたものであってもよい。誘導型の薄膜磁気変換素
子２には、面内記録再生用及び垂直記録再生用の両者が
含まれる。また、薄膜磁気ヘッドに限らず、ウインチェ
スタ型磁気ヘッドやコンポジット型磁気ヘッドであって
もよい。The groove 13 has processing traces 31 to 3n with a minute depth which induces processing strain on the bottom surface. The processing marks 31 to 3n are provided in a direction intersecting the length direction of the slider 1, that is, in the width direction. The processing marks 31 to 3n can be formed in a triangular shape in cross section as shown in FIG. 2 or can be formed in a rectangular shape in cross section as shown in FIG. The air bearing surfaces 11 and 12 are convex surfaces whose planar shape is controlled by the processing marks 31 to 3n. Magnetic conversion element 2,
The slider 1 is provided on one end side in the length direction of the slider 1 which coincides with the air flow direction a. The slider 1 has two rails 14 and 15 on the medium facing surface side,
The surfaces of the rails 14 and 15 are replaced with the air bearing surfaces 11 and 12
It is a 2-rail type used as. Although illustration is omitted, it may have two or more rails. The slider 1 is formed of a known ceramic structure. For example, Al 2 O 3 —TiC, ferrite, or the like. The magnetic conversion element 2 is composed of a thin film magnetic conversion element, and therefore the embodiment shows a thin film magnetic head. Reference numerals 21 and 22 are extraction electrodes. The thin film magnetic conversion element 2 may be an inductive type or may use a magnetoresistive effect element. The inductive type thin film magnetic conversion element 2 includes both in-plane recording / reproducing and perpendicular recording / reproducing. Further, not only the thin film magnetic head but also a Winchester type magnetic head or a composite type magnetic head may be used.
【００１２】上述のように、スライダ１は、空気ベアリ
ング面１１、１２を除く媒体対向面である溝１３に、加
工痕３１〜３ｎを有するから、加工痕３１〜３ｎのある
部分と、加工痕３１〜３ｎのない部分とで、加工歪差を
生じる。加工痕３１〜３ｎは、面上に仮想された直線の
上に乗るように配置されているから、加工痕３１〜３ｎ
の乗る直線の両側で撓むような加工歪を生じる。この加
工歪によりスライダ１の空気ベアリング面１１、１２の
平面度が制御される。空気ベアリング面１１、１２の平
面形状は加工痕３１〜３ｎの方向、数、位置、深さ、幅
及び形状の選択に応じて、凸面または凹面の何れの方向
にも制御できる。加工痕３１〜３ｎによる平面制御は、
空気ベアリング面１１，１２を直接研磨加工して平面形
状を制御する場合に比べて極めて容易であり、しかも平
面形状を、ｎｍ領域の微小範囲で容易に制御できる。ま
た、加工痕３１〜３ｎの方向、数、位置、深さ、幅及び
形状等は経時変化を生じないから、経時変化による空気
ベアリング面１１、１２の平面形状の変化を生じること
がない。As described above, the slider 1 has the processing marks 31 to 3n in the groove 13 which is the medium facing surface excluding the air bearing surfaces 11 and 12. Therefore, the portion having the processing marks 31 to 3n and the processing marks. There is a difference in processing strain between the portions without 31 to 3n. Since the processing marks 31 to 3n are arranged so as to ride on a virtual line on the surface, the processing marks 31 to 3n
A processing strain that causes bending on both sides of the straight line on which is generated. This processing strain controls the flatness of the air bearing surfaces 11 and 12 of the slider 1. The planar shape of the air bearing surfaces 11 and 12 can be controlled to be either a convex surface or a concave surface depending on the selection of the direction, number, position, depth, width and shape of the processing marks 31 to 3n. The plane control by the processing marks 31 to 3n is
This is extremely easy as compared with the case where the planar shape is controlled by directly polishing the air bearing surfaces 11 and 12, and the planar shape can be easily controlled in a minute range of nm range. Further, since the directions, numbers, positions, depths, widths, shapes, etc. of the processing marks 31 to 3n do not change with time, the planar shapes of the air bearing surfaces 11 and 12 do not change with time.
【００１３】図示の場合、空気ベアリング面１１、１２
及び溝１３は、スライダ１の長さ方向に沿って設けられ
ており、加工痕３１〜３ｎは、スライダ１の長さ方向と
直交する方向に設けられているから、図２に示すごと
く、加工痕３１〜３ｎによる加工歪Ｆ１が、空気ベアリ
ング面１１、１２の平面形状を、スライダ１の長さ方向
に沿って凸面となるように制御する。In the case shown, the air bearing surfaces 11, 12
2 and the groove 13 are provided along the length direction of the slider 1, and the processing marks 31 to 3n are provided in a direction orthogonal to the length direction of the slider 1, and therefore, as shown in FIG. The processing strain F1 caused by the marks 31 to 3n controls the planar shapes of the air bearing surfaces 11 and 12 so as to be convex along the length direction of the slider 1.
【００１４】図４は本発明に係る磁気ヘッドの他の実施
例を示す斜視図で、加工痕３１〜３ｎはスライダ１の長
さ方向に沿って設けられている。加工痕３１〜３ｎの誘
発する歪みにより、空気ベアリング面１１、１２は、図
１〜図３の場合と異なって、幅方向に沿って凸面となる
ように制御される。FIG. 4 is a perspective view showing another embodiment of the magnetic head according to the present invention. The processing marks 31 to 3n are provided along the length direction of the slider 1. Unlike the case of FIGS. 1 to 3, the air bearing surfaces 11 and 12 are controlled to be convex along the width direction due to the strain induced by the processing marks 31 to 3n.
【００１５】図５は本発明に係る磁気ヘッドの更に別の
実施例を示す図で、加工痕３１〜３ｎは媒体対向面と向
き合う反対側の面１０に設けられている。もし、加工痕
３１〜３ｎが面１０にのみ設けられていて、媒体対向面
側には設けられていない場合は、空気ベアリング面１
１、１２は凹面となるように制御される。加工痕３１〜
３ｎが媒体対向面側にも設けられている場合には、空気
ベアリング面１１、１２の平面形状は、媒体対向面側に
設けられた加工痕（図示しない）による凸面制御と、面
１０に設けられた加工痕３１〜３ｎによる凹面制御との
合成によって制御される。面１０の加工痕３１〜３ｎ
は、例えば媒体対向面側に設けられた加工痕による凸面
制御が大きすぎた場合等に、その修正手段として利用で
きる。図示はされていないが、加工痕３１〜３ｎは幅方
向に形成することもできる。FIG. 5 is a view showing still another embodiment of the magnetic head according to the present invention, in which the processing marks 31 to 3n are provided on the surface 10 opposite to the medium facing surface. If the processing marks 31 to 3n are provided only on the surface 10 and not on the medium facing surface side, the air bearing surface 1
Controls 1 and 12 are concave. Processing marks 31-
When 3n is also provided on the medium facing surface side, the planar shapes of the air bearing surfaces 11 and 12 are provided on the surface 10 by controlling the convex surface by processing marks (not shown) provided on the medium facing surface side. It is controlled by combining with the concave surface control by the processed marks 31 to 3n. Processing marks 31 to 3n on the surface 10
Can be used as a correction means when, for example, the convex surface control by the processing mark provided on the medium facing surface side is too large. Although not shown, the processing marks 31 to 3n can be formed in the width direction.
【００１６】図６は本発明に係る磁気ヘッドの更に別の
実施例を示す斜視図である。この実施例では、加工痕３
１〜３ｎのそれぞれは破線状に設けられている。FIG. 6 is a perspective view showing still another embodiment of the magnetic head according to the present invention. In this embodiment, the processing mark 3
Each of 1 to 3n is provided in a broken line shape.
【００１７】図７は本発明に係る磁気ヘッドの更に別の
実施例を示す斜視図であり、加工痕３１〜３ｎは長さ方
向及び幅方向に対して傾斜して設けられている。加工痕
３１〜３ｎに交差するように、他の加工痕の群を形成す
ることもできる。FIG. 7 is a perspective view showing still another embodiment of the magnetic head according to the present invention, in which the processing marks 31 to 3n are provided so as to be inclined with respect to the length direction and the width direction. Another group of processing marks may be formed so as to intersect the processing marks 31 to 3n.
【００１８】図８は本発明に係る磁気ヘッドの更に別の
実施例を示す斜視図であり、加工痕３１〜３ｎは、ある
平面領域を面状に覆うように点状に散在して設けられて
いる。図示は省略するが、上に述べた加工痕３１〜３ｎ
の態様を適宜組み合わせることが可能であり、それによ
って、空気ベアリング面１１、１２の平面形状を自由に
制御できる。FIG. 8 is a perspective view showing still another embodiment of the magnetic head according to the present invention. The processing marks 31 to 3n are provided in a dotted manner so as to cover a certain plane area in a plane. ing. Although not shown, the above-mentioned processing marks 31 to 3n
It is possible to appropriately combine the above modes, and thereby the planar shapes of the air bearing surfaces 11 and 12 can be freely controlled.
【００１９】上述の加工痕３１〜３ｎは、ダイヤモン
ド、セラミックもしくは超硬材料よりなるカッタまたは
針状端子により、スライダに機械加工を施方法、レー
ザ、電子線もしくはイオンのビームまたは超音波をスラ
イダの必要な個所に照射する方法、または、微粒研摩材
をスライダに噴射する方法等によって形成できる。これ
らの加工痕形成手段によれば、加工痕３１〜３ｎの方
向、数、位置、深さ、幅及び形状等を任意に選定でき、
空気ベアリング面１１，１２を直接研磨加工して平面形
状を制御する場合に比べて、加工作業が極めて容易であ
り、しかもｎｍ領域の微小範囲で容易に制御できる。The above-mentioned processing marks 31 to 3n are processed by a cutter or needle-shaped terminal made of diamond, ceramic or superhard material, and the slider is machined. A laser, an electron beam or an ion beam or ultrasonic waves is applied to the slider. It can be formed by a method of irradiating a required portion or a method of spraying a fine abrasive onto a slider. According to these processing trace forming means, the direction, number, position, depth, width, shape, etc. of the processing traces 31 to 3n can be arbitrarily selected.
Compared with the case where the planar shape is controlled by directly polishing the air bearing surfaces 11 and 12, the processing operation is extremely easy, and the control can be easily performed in a minute range of nm range.
【００２０】図９及び図１０は加工痕本数と空気ベアリ
ング面の平面形状制御との関係を示す実測データであ
る。横軸に加工痕本数を、縦軸に空気ベアリング面で測
定したＰＶ値（ｎｍ）をそれぞれ示してある。これらの
データは図１〜図３に示した磁気ヘッドで得られたもの
である。図９は、加工具として、先端角１２０度のダイ
ヤモンド．ボイレトを用い、１００ｇの荷重を加えて、
長さ６００μｍの加工痕を２００μｍのピッチで設けた
場合のデータを示している。図１０は、加工具として、
先端角１２０度のダイヤモンド．ボイレトを用い、１５
０ｇの荷重を加えて、長さ７００μｍの加工痕を１００
μｍのピッチで設けた場合のデータを示している。FIG. 9 and FIG. 10 are measured data showing the relationship between the number of processing marks and the plane shape control of the air bearing surface. The horizontal axis shows the number of processing marks, and the vertical axis shows the PV value (nm) measured on the air bearing surface. These data are obtained with the magnetic head shown in FIGS. FIG. 9 shows a diamond having a tip angle of 120 degrees as a processing tool. Using a boiler, add a load of 100g,
The data is shown in the case where processing marks having a length of 600 μm are provided at a pitch of 200 μm. FIG. 10 shows a processing tool
Diamond with a tip angle of 120 degrees. Using a bollet, 15
Apply a load of 0 g to make a machining mark of 700 μm in length 100
The data in the case of providing the pitch of μm is shown.
【００２１】これらのデータに示されるように、加工痕
の本数、長さ、ピッチ及び荷重に依存する加工痕の深さ
及び幅に応じて、ＰＶ値が制御されている。As shown in these data, the PV value is controlled in accordance with the depth and width of the processing marks depending on the number, length, pitch and load of the processing marks.
【００２２】[0022]
【発明の効果】以上述べたように、本発明によれば、次
のような効果が得られる。 （ａ）加工痕のある部分と、加工痕のない部分との間に
生じる加工歪差を利用して、スライダの空気ベアリング
面の平面度を制御した磁気ヘッドを提供できる。 （ｂ）空気ベアリング面の平面形状を、加工痕の方向、
数、位置、深さ、幅及び形状の選択に応じて、凸面また
は凹面の何れの方向にも制御し得る制御自由度の高い磁
気ヘッドを提供できる。 （ｃ）空気ベアリング面を直接研磨加工して平面形状を
制御する場合に比べて極めて容易であり、しかも空気ベ
アリング面の平面形状を、ｎｍ領域の微小範囲で容易に
制御し得る磁気ヘッドを提供できる。 （ｄ）加工痕の方向、数、位置、深さ、幅及び形状等は
経時変化を生じないから、経時変化による空気ベアリン
グ面の平面形状の変化を生じることのない磁気ヘッド装
置を提供できる。 （ｅ）加工痕の数、位置、深さ、幅及び形状等を任意に
選定でき、空気ベアリング面を直接研磨加工して平面形
状を制御する場合に比べて、加工作業が極めて容易であ
り、しかもｎｍ領域の微小範囲で容易に制御し得る磁気
ヘッド装置を提供できる。As described above, according to the present invention, the following effects can be obtained. (A) It is possible to provide the magnetic head in which the flatness of the air bearing surface of the slider is controlled by utilizing the difference in processing strain generated between the portion having the processing mark and the portion having no processing mark. (B) Change the plane shape of the air bearing surface to the direction of the machining mark,
It is possible to provide a magnetic head having a high degree of freedom of control, which can be controlled in either a convex surface or a concave surface depending on the selection of the number, position, depth, width and shape. (C) A magnetic head that is extremely easy as compared with the case where the planar shape is controlled by directly polishing the air bearing surface, and that the planar shape of the air bearing surface can be easily controlled in a minute range of nm range. it can. (D) Since the direction, number, position, depth, width, shape, etc. of the processing marks do not change with time, it is possible to provide a magnetic head device in which the planar shape of the air bearing surface does not change with time. (E) The number, position, depth, width, shape, etc. of the machining marks can be arbitrarily selected, and the machining work is extremely easy as compared with the case where the air bearing surface is directly ground to control the planar shape. Moreover, it is possible to provide a magnetic head device that can be easily controlled in a minute range in the nm range.
【図１】本発明に係る磁気ヘッドの斜視図である。FIG. 1 is a perspective view of a magnetic head according to the present invention.
【図２】図１のＡ２−Ａ２線上における部分拡大断面図
である。FIG. 2 is a partially enlarged cross-sectional view taken along the line A2-A2 of FIG.
【図３】他の実施例における部分拡大断面図である。FIG. 3 is a partially enlarged cross-sectional view of another embodiment.
【図４】本発明に係る磁気ヘッドの別の実施例を示す斜
視図である。FIG. 4 is a perspective view showing another embodiment of the magnetic head according to the present invention.
【図５】本発明に係る磁気ヘッドの更に別の実施例を示
す斜視図である。FIG. 5 is a perspective view showing still another embodiment of the magnetic head according to the present invention.
【図６】本発明に係る磁気ヘッドの更に別の実施例を示
す斜視図である。FIG. 6 is a perspective view showing still another embodiment of the magnetic head according to the present invention.
【図７】本発明に係る磁気ヘッドの更に別の実施例を示
す斜視図である。FIG. 7 is a perspective view showing still another embodiment of the magnetic head according to the present invention.
【図８】本発明に係る磁気ヘッドの更に別の実施例を示
す斜視図である。FIG. 8 is a perspective view showing still another embodiment of the magnetic head according to the present invention.
【図９】加工痕本数と空気ベアリング面の平面形状制御
との関係を示す実測データである。FIG. 9 is actual measurement data showing the relationship between the number of processing marks and the plane shape control of the air bearing surface.
【図１０】加工痕本数と空気ベアリング面の平面形状制
御との関係を示す別の実測データである。FIG. 10 is another actual measurement data showing the relationship between the number of processing marks and the plane shape control of the air bearing surface.
１ スライダ １１、１２ 空気ベアリング面 ２ 磁気変換素子 ３１〜３ｎ 加工痕 DESCRIPTION OF SYMBOLS 1 Slider 11, 12 Air bearing surface 2 Magnetic conversion element 31-3n Processing mark
Claims (7)
と、前記空気ベアリング面よりも低い底面を有する溝と
を有し、前記溝の前記底面、または、前記媒体対向面と
向き合う反対側の面の少なくとも一方に、加工歪みを誘
発して前記空気ベアリング面の平面形状を制御する加工
痕を有する磁気ヘッド。1. A magnetic head having a slider, wherein the slider has an air bearing surface on a medium facing surface side.
If, having <br/> a groove having a lower bottom surface than the air bearing surface, the bottom surface of the groove or, at least one of the opposite surface facing the said bearing surface, induced a processing strain
A magnetic head having a machining mark that is emitted to control the planar shape of the air bearing surface .
本以上備えられ、それぞれが前記スライダの長さ方向に
沿って配置されており、前記加工痕は前記空気ベアリン
グ面の間の媒体対向面上に設けられている 請求項１に記載の磁気ヘッド。2. The air bearing surfaces are spaced apart by 2
The magnetic head according to claim 1, wherein the magnetic head is provided in a number of two or more, each of which is arranged along a length direction of the slider, and the processing mark is provided on a medium facing surface between the air bearing surfaces.
られている 請求項２または３に記載の磁気ヘッド。Wherein said trace of processing is the magnetic head according to claim 2 or 3 are provided a plurality of spaced apart.
変換素子を有しており、前記加工痕は前記長さ方向と交
差する方向に設けられている 請求項３または４ に記載の磁気ヘッド。 5. The slider is magnetic on one end side in the length direction.
It has a conversion element, and the processing mark intersects with the length direction.
The magnetic head according to claim 3 , wherein the magnetic heads are provided in different directions .
変換素子を有しており、前記加工痕は前記長さ方向に沿
って設けられている 請求項３または４に記載の磁気ヘッド。6. The slider has a magnetic conversion element on one end side in the lengthwise direction, and the machining mark extends along the lengthwise direction .
The magnetic head according to claim 3 or 4 provided me.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19077694A JPH0782631B2 (en) | 1994-08-12 | 1994-08-12 | Magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19077694A JPH0782631B2 (en) | 1994-08-12 | 1994-08-12 | Magnetic head |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4164392A Division JPH0724096B2 (en) | 1992-05-29 | 1992-05-29 | Magnetic head processing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07153050A JPH07153050A (en) | 1995-06-16 |
| JPH0782631B2 true JPH0782631B2 (en) | 1995-09-06 |
Family
ID=16263544
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19077694A Expired - Fee Related JPH0782631B2 (en) | 1994-08-12 | 1994-08-12 | Magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0782631B2 (en) |
-
1994
- 1994-08-12 JP JP19077694A patent/JPH0782631B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07153050A (en) | 1995-06-16 |
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