JPH0782933B2 - Superconducting magnet - Google Patents
Superconducting magnetInfo
- Publication number
- JPH0782933B2 JPH0782933B2 JP1010675A JP1067589A JPH0782933B2 JP H0782933 B2 JPH0782933 B2 JP H0782933B2 JP 1010675 A JP1010675 A JP 1010675A JP 1067589 A JP1067589 A JP 1067589A JP H0782933 B2 JPH0782933 B2 JP H0782933B2
- Authority
- JP
- Japan
- Prior art keywords
- superconducting
- coil
- superconducting magnet
- current distribution
- cos
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Particle Accelerators (AREA)
Description
【発明の詳細な説明】 [産業上の利用分野] この発明は、電子蓄積リングにおけるビーム偏向用の超
電導マグネットに関する。The present invention relates to a superconducting magnet for beam deflection in an electron storage ring.
[従来の技術] 電子蓄積リングの真空ダクト内を周回する電子ビームに
対し偏向電磁石で偏向させるとき、ビーム軌道の接線方
向に、赤外線からX線の領域にわたる放射光が放出され
る。この放射光は、極めて強力でかつ指向性が良いこと
から、集積回路における微細パターンの焼き付け等の産
業用途での利用価値が高い。2. Description of the Related Art When an electron beam circulating in a vacuum duct of an electron storage ring is deflected by a deflecting electromagnet, radiant light from an infrared ray to an X-ray region is emitted in a tangential direction of a beam orbit. Since this emitted light is extremely strong and has a good directivity, it has a high utility value in industrial applications such as printing of a fine pattern in an integrated circuit.
このような電子蓄積リングにおける偏向用マグネットに
超電導マグネットを用いた例としては、特公昭61−2274
00号公報に開示されていて、この種の装置では、超電導
マグネットによる発生磁場に所定の勾配が得られるよう
に、放射光取出口のスリット幅及び超電導マグネットの
巻線の配列を調整している。発生磁場の勾配nは、 で定義され、r0はビームの軌道半径、Bは磁束密度であ
る。An example of using a superconducting magnet as a deflection magnet in such an electron storage ring is described in Japanese Examined Patent Publication No. 61-2274.
In this type of device, the slit width of the radiant light outlet and the arrangement of the windings of the superconducting magnet are adjusted so that a predetermined gradient can be obtained in the magnetic field generated by the superconducting magnet. . The gradient n of the generated magnetic field is Where r 0 is the beam radius and B is the magnetic flux density.
[発明が解決しようとする課題] 従って、一旦、超電導マグネットの巻線を所望の配列に
形成してしまえば、上記勾配nの値は固定され、任意の
値に調整できないといった問題点があった。[Problems to be Solved by the Invention] Therefore, once the windings of the superconducting magnets are formed in a desired arrangement, the value of the gradient n is fixed and cannot be adjusted to an arbitrary value. .
この発明は、上述した問題点をなくすためになされたも
のであり、発生磁場の勾配を調整可能とした超電導マグ
ネットを提供することを目的とする。The present invention has been made to eliminate the above-mentioned problems, and an object thereof is to provide a superconducting magnet capable of adjusting the gradient of a generated magnetic field.
[課題を解決するための手段] この発明の超電導マグネットは、電子蓄積リングに用い
るビーム偏向用の超電導マグネットであって、cosθ形
電流分布の巻線配列の超電導コイルと、cos2θ形電流分
布の巻線配列の超電導コイルとを組み合わせたことを特
徴とする。[Means for Solving the Problems] A superconducting magnet according to the present invention is a beam-deflecting superconducting magnet used in an electron storage ring, and includes a superconducting coil having a winding arrangement of cos θ type current distribution and a coil of cos 2 θ type current distribution. It is characterized in that it is combined with a superconducting coil of a line array.
[作用] 第1図に示すように、cosθ形電流分布の二極コイル1
と、cos2θ形電流分布の四極コイル2との2組のコイル
を、電子蓄積リングのビームダクト3の外周に設けてい
る。二極コイル1による電流分布を第4図に示してい
る。図中、斜線の領域の断面積がその角度での電流値を
示し、水平方向の電流分布を増すために、第1図のごと
く、二極コイル1は水平方向で2層巻となっている。こ
こで、ある角度θでの電流値がcosθに比例することか
ら、このような電流分布をcosθ形電流分布と称してい
る。又、cos2θ形電流分布をなす四極コイルは、第5図
に示すような電流値を示し、ある角度θでの電流値がco
s2θに比例している。このように2組のコイルを組み合
わせたことにより、発生磁場の調整が容易となり、請求
項(2)に記載のごとく、各コイル1,2への通電電流を
個別に、もしくは一方のみを制御することにより、ビー
ムダクト3内には所望の勾配になる磁場分布が得られ
る。尚、コイルの形状から、第1図では二極コイル1を
四極コイル2の外側に配したが、特にこの構造に限定さ
れない。[Operation] As shown in FIG. 1, a two-pole coil 1 having a cos θ type current distribution
, And a quadrupole coil 2 having a cos 2 θ type current distribution, are provided on the outer circumference of the beam duct 3 of the electron storage ring. The current distribution by the two-pole coil 1 is shown in FIG. In the figure, the cross-sectional area of the shaded area shows the current value at that angle, and in order to increase the current distribution in the horizontal direction, the two-pole coil 1 is wound in two layers in the horizontal direction as shown in FIG. . Here, since the current value at a certain angle θ is proportional to cos θ, such a current distribution is called a cos θ type current distribution. In addition, the quadrupole coil having the cos2θ type current distribution shows the current value as shown in FIG. 5, and the current value at a certain angle θ is co
It is proportional to s2θ. By combining two sets of coils in this way, it becomes easy to adjust the generated magnetic field, and as described in claim (2), the current supplied to each coil 1 and 2 is controlled individually or only one of them is controlled. As a result, a magnetic field distribution having a desired gradient can be obtained in the beam duct 3. Although the two-pole coil 1 is arranged outside the four-pole coil 2 in FIG. 1 because of the shape of the coil, it is not particularly limited to this structure.
[実施例] 以下この発明の一実施例を第2図及び第3図を参照して
説明する。第2図は、電子蓄積リングにおける偏向マグ
ネットを切断してその端面より眺めた断面図、第3図
は、電子蓄積リングにおける偏向マグネットの周方向に
沿って切断したときの断面図である。[Embodiment] An embodiment of the present invention will be described below with reference to FIGS. 2 and 3. FIG. 2 is a cross-sectional view of the deflection magnet in the electron storage ring as seen from the end face thereof, and FIG. 3 is a cross-sectional view taken along the circumferential direction of the deflection magnet in the electron storage ring.
3は、電子蓄積リングにおけるビームダクトを示してい
る。四極コイル2(2a,2b,2c,2d)は、ビームダクト3
の外周に設けられた絶縁物よりなる巻芯4に巻回され、
更に、この四極コイル2の外周には、コイル冷却用の冷
却チャンネル5を挟んで、絶縁物よりなる巻芯6と7と
が2層に設けられ、それぞれの巻芯6,7に二極コイル1
が巻回される。その際、二極コイル1と、四極コイル2
とは第1図のように、同心で各々の水平レベルが同じに
なるように設けられる。二極コイル1の外周には更に冷
却チャンネル8が設けられ、そして、最後に、二極及び
四極のコイル1,2の電磁力による線材の変形を防止する
ために、冷却チャンネル8の外周を包囲するように、断
面が半円状の補強カラー9a,9bが設けられ、双方の補強
カラー9a,9bは、ボルト及びナット10により一体となる
ように締め付けられる。尚、補強カラー9a,9bに複数に
設けられた小穴11は、冷却チャンネル8内の冷媒のコン
ダクタンスを良くするために設けられたものである。
又、第3図におけるビームポート12はSOR光取出口であ
り、Qは、ビーム軌道を示している。3 shows a beam duct in the electron storage ring. The four-pole coil 2 (2a, 2b, 2c, 2d) is the beam duct 3
Is wound around a winding core 4 made of an insulating material provided on the outer periphery of
Further, two winding cores 6 and 7 made of an insulating material are provided in two layers on the outer circumference of the four-pole coil 2 with a cooling channel 5 for cooling the coil sandwiched between the winding cores 6 and 7. 1
Is wound. At that time, the two-pole coil 1 and the four-pole coil 2
And, as shown in FIG. 1, they are concentrically provided so that each horizontal level is the same. A cooling channel 8 is further provided on the outer periphery of the two-pole coil 1, and finally, the outer periphery of the cooling channel 8 is surrounded to prevent the wire rod from being deformed by the electromagnetic force of the two-pole and four-pole coils 1 and 2. As described above, the reinforcing collars 9a and 9b having a semicircular cross section are provided, and the reinforcing collars 9a and 9b are fastened together by the bolt and the nut 10 so as to be integrated. The plurality of small holes 11 provided in the reinforcing collars 9a and 9b are provided to improve the conductance of the refrigerant in the cooling channel 8.
Further, the beam port 12 in FIG. 3 is the SOR light extraction port, and Q indicates the beam orbit.
上記二極コイル1と、四極コイル2とに対し、それぞれ
個別の電源(不図示)を備え、各コイル1,2への通電電
流が個別に制御される。Separate power supplies (not shown) are provided for the two-pole coil 1 and the four-pole coil 2, respectively, and the currents supplied to the coils 1 and 2 are individually controlled.
このように、2組のコイル1,2への通電電流を制御する
ことにより、ビームダクト3内に合成磁場により所望の
勾配nを得ることができる。又、超電導マグネットの寸
法誤差等に伴う磁場分布の誤差を適切に補正することも
できる。In this way, by controlling the currents supplied to the two sets of coils 1 and 2, it is possible to obtain a desired gradient n with the combined magnetic field in the beam duct 3. Further, it is possible to appropriately correct the error in the magnetic field distribution due to the dimensional error of the superconducting magnet.
[発明の効果] 以上説明したように、この発明は、2組のコイルを設け
たので、発生磁場の調整が容易となり、例えば、少なく
とも一方のコイルへの通電電流制御することにより、ビ
ームダクト内に所望の合成磁場による勾配nを得ること
ができ、超電導マグネットの寸法等に伴う磁場分布の誤
差を適切に補正することができる。[Effects of the Invention] As described above, according to the present invention, since two sets of coils are provided, it is easy to adjust the generated magnetic field. For example, by controlling the energization current to at least one coil, Moreover, it is possible to obtain the desired gradient n due to the combined magnetic field, and it is possible to appropriately correct the error in the magnetic field distribution due to the size of the superconducting magnet.
第1図はこの発明の超電導マグネットの構成を示すため
の断面図、第2図は、この発明の一実施例を示す超電導
マグネットを、電子蓄積リングにおける偏向マグネット
を切断して端面から眺めた断面図、第3図は、第2図に
おける超電導マグネットを、電子蓄積リングの周方向に
切断したときの断面図、第4図は、cosθ形巻き線コイ
ルの電流分布を示した図、第5図は、cos2θ形巻き線コ
イルの電流分布を示した図である。 1…二極コイル、2…四極コイル、3…ビームダクト、
4,6,7…巻芯、5,8…冷却チャンネル、9a,9b…補強カラ
ー、10…ボルト及びナット。FIG. 1 is a cross-sectional view showing the structure of a superconducting magnet of the present invention, and FIG. 2 is a cross-sectional view of a superconducting magnet showing an embodiment of the present invention as seen from an end face of a deflection magnet in an electron storage ring. 3 and 4 are cross-sectional views of the superconducting magnet shown in FIG. 2 taken in the circumferential direction of the electron storage ring, and FIG. 4 is a view showing the current distribution of the cos θ type winding coil, and FIG. FIG. 6 is a diagram showing a current distribution of a cos2θ type winding coil. 1 ... 2-pole coil, 2 ... quadrupole coil, 3 ... beam duct,
4,6,7 ... cores, 5,8 ... cooling channels, 9a, 9b ... reinforcement collars, 10 ... bolts and nuts.
Claims (3)
電導マグネットであって、cosθ形電流分布の巻線配列
の超電導コイルと、cos2θ形電流分布の巻線配列の超電
導コイルとを組み合わせたことを特徴とする超電導マグ
ネット。1. A superconducting magnet for beam deflection used in an electron storage ring, comprising a combination of a superconducting coil having a winding arrangement of cos θ type current distribution and a superconducting coil having a winding arrangement of cos 2 θ type current distribution. Characteristic superconducting magnet.
して、少なくとも一方の超電導コイルへの通電電流値を
変えることにより、所望の磁場分布を得る請求項(1)
記載の超電導マグネット。2. A desired magnetic field distribution is obtained by using two power sources for the two superconducting coils and changing a value of a current flowing through at least one of the superconducting coils.
The superconducting magnet described.
θ形電流分布の超電導コイルの内側に配した請求項
(1)もしくは(2)記載の超電導マグネット。3. A superconducting coil having a cos2θ type current distribution is
The superconducting magnet according to claim 1, which is arranged inside a superconducting coil having a θ-shaped current distribution.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1010675A JPH0782933B2 (en) | 1989-01-19 | 1989-01-19 | Superconducting magnet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1010675A JPH0782933B2 (en) | 1989-01-19 | 1989-01-19 | Superconducting magnet |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02191305A JPH02191305A (en) | 1990-07-27 |
| JPH0782933B2 true JPH0782933B2 (en) | 1995-09-06 |
Family
ID=11756835
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1010675A Expired - Lifetime JPH0782933B2 (en) | 1989-01-19 | 1989-01-19 | Superconducting magnet |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0782933B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6063883B2 (en) * | 2014-02-19 | 2017-01-18 | 株式会社東芝 | Superconducting magnet device and charged particle accelerator |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0740484B2 (en) * | 1983-12-23 | 1995-05-01 | 株式会社島津製作所 | Magnetic field scanning mass spectrometer |
| DE3511282C1 (en) * | 1985-03-28 | 1986-08-21 | Brown, Boveri & Cie Ag, 6800 Mannheim | Superconducting magnet system for particle accelerators of a synchrotron radiation source |
-
1989
- 1989-01-19 JP JP1010675A patent/JPH0782933B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02191305A (en) | 1990-07-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH04273409A (en) | Superconducting magnet device and particle accelerator using the superconducting magnet device | |
| US9728371B2 (en) | Ion beam scanner for an ion implanter | |
| KR20180120603A (en) | Compact deflecting magnet | |
| US10726986B2 (en) | Apparatus and method for magnetic field compression using a toroid coil structure | |
| JPH0782933B2 (en) | Superconducting magnet | |
| US7619375B2 (en) | Electromagnetic wave generating device | |
| US20020074524A1 (en) | Magnetically shielded electromagnetic lens assemblies for charged-particle-beam microlithography systems | |
| US3354337A (en) | Convergence magnet pole shoes | |
| JP7249906B2 (en) | Superconducting coil and superconducting magnet device | |
| JP2511990B2 (en) | Deflection magnet and its excitation device | |
| JP3867668B2 (en) | Bending electromagnet, charged particle transport path, and circular accelerator | |
| US4538127A (en) | Magnetic quadripole | |
| US4107582A (en) | Character selector for a shaped beam cathode ray tube | |
| KR930000388B1 (en) | Cathode ray tube display | |
| JPS61216410A (en) | Core type uniform field magnetic | |
| JP2569928B2 (en) | Quadrupole magnet | |
| JP3482546B2 (en) | Deflection yoke device | |
| JP2757401B2 (en) | Deflection device | |
| JPH09190779A (en) | Balance coil | |
| JPH0345888B2 (en) | ||
| JPH07153620A (en) | Cylindrical permanent magnet magnetic field generator for generating uniform axial magnetic field | |
| JPH0753280Y2 (en) | Bending electromagnet for SOR device | |
| JPS63224230A (en) | X-ray exposure device | |
| JPH04345800A (en) | Deflecting electromagnet | |
| KR0147040B1 (en) | 6pole electromagnet of accelerator |