JPH0782963B2 - Manufacturing method of laminated ceramics - Google Patents
Manufacturing method of laminated ceramicsInfo
- Publication number
- JPH0782963B2 JPH0782963B2 JP61126066A JP12606686A JPH0782963B2 JP H0782963 B2 JPH0782963 B2 JP H0782963B2 JP 61126066 A JP61126066 A JP 61126066A JP 12606686 A JP12606686 A JP 12606686A JP H0782963 B2 JPH0782963 B2 JP H0782963B2
- Authority
- JP
- Japan
- Prior art keywords
- laminated
- ceramics
- ceramic
- ceramic green
- laminate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Laminated Bodies (AREA)
- Ceramic Capacitors (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明はエレクトロニクス機器に使用される積層型の各
種セラミックスに利用される積層型セラミックスの製造
方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a laminated ceramics used for various laminated ceramics used in electronic equipment.
従来の技術 エレクトロニクス機器の急激な進歩により使用されるエ
レクトロニクスセラミックス製品も多様化，高度化して
きた。特に最近では、エレクトロニクス機器の小型化・
低電圧化が進み、これらに対応して、電極間距離が短く
積層構造を特徴とする例えば積層セラミックコンデン
サ，積層型チップバリスタ，積層型圧電体などの積層型
セラミックスが非常に多く使用されるようになってき
た。Conventional technology Due to the rapid progress of electronic equipment, electronic ceramic products used have become diversified and sophisticated. Especially recently, miniaturization of electronic equipment
In response to the progress of lower voltage, it seems that multi-layer ceramics such as multi-layer ceramic capacitors, multi-layer chip varistors, multi-layer piezoelectric bodies, etc., which have a short inter-electrode distance and have a multi-layer structure, are used very much. Has become.
これらの積層型セラミックスは、セラミック粉末と有機
物からなるセラミックグリーンシートに白金，パラジウ
ム，銀などの高温で安定な貴金属と有機物からなる電極
ペーストを塗布し、これらをくり返し行い積層構造とす
るもので、その後、大気中で有機物を300〜500℃で除去
し、さらに1200〜1400℃でセラミックスを焼結させる方
法で得られるものである。These laminated ceramics are ceramic green sheets made of ceramic powder and an organic substance, coated with an electrode paste made of an organic substance and a noble metal that is stable at high temperature such as platinum, palladium, silver, etc., and these are repeated to form a laminated structure. After that, organic substances are removed at 300 to 500 ° C. in the air, and the ceramics are sintered at 1200 to 1400 ° C.
発明が解決しようとする問題点 しかし、上述したように積層型セラミックスはセラミッ
クグリーンシート，電極ペースト中に多量の有機物が複
有されている。このため、大気中で有機物を分解させる
と、電極間の有機物が完全に分解されずにガスとして残
留し、焼結後にデラミネーションとなる。このデラミネ
ーションの発生は、セラミックスの電気的特性を著しく
低下させ、性能，信頼性の面で大きな問題となってい
る。このことは、「工業用材料，第33巻，第４号のP30
〜34の積層チップバリスタ、及びエレクトロ・セラミッ
クス,1976年，冬号P38〜40のセラミックコンデンサ（積
層セラミックキャパシタ）」でも報告されている。However, as described above, in the laminated ceramics, a large amount of organic substances are contained in the ceramic green sheet and the electrode paste. Therefore, when the organic matter is decomposed in the atmosphere, the organic matter between the electrodes is not completely decomposed and remains as a gas, which causes delamination after sintering. The occurrence of this delamination remarkably deteriorates the electrical characteristics of ceramics, which is a serious problem in terms of performance and reliability. This means "P30 of Industrial Materials, Vol. 33, No. 4"
~ 34 multilayer chip varistor and electro-ceramics, 1976, winter issue P38-40 ceramic capacitors (multilayer ceramic capacitors) ".
そこで本発明は、デラミネーションのない積層型セラミ
ックスを提供することを目的とするものである。Therefore, an object of the present invention is to provide a laminated ceramics without delamination.
問題点を解決するための手段 この目的を達成するために本発明は、セラミックグリー
ンシート上に内部電極となる貴金属ペーストを印刷し、
次にこのグリーンシートを積層して積層体を形成し、次
にこの積層体を酸素分圧が０〜10％でかつAr,He,N2の内
いずれか一種以上よりなる不活性ガス中で前記積層体中
の有機物を除去し、その後前記積層体を大気中で焼結さ
せるものである。Means for Solving the Problems In order to achieve this object, the present invention prints a precious metal paste to be an internal electrode on a ceramic green sheet,
Next, the green sheets are laminated to form a laminated body, and the laminated body is then placed in an inert gas having an oxygen partial pressure of 0 to 10% and at least one of Ar, He and N 2. Organic substances in the laminate are removed, and then the laminate is sintered in the atmosphere.
作用 この構成によれば、セラミックグリーンシート，貴金属
電極ペースト中の有機物を酸素分圧が０〜10％の不活性
ガス中で除去することにより、有機物の分解がゆるやか
になるとともに、デラミネーションの原因となっていた
分解ガスが残留せずに有機物を除去できることが可能と
なり、積層体の内部にデラミネーションがなく良好なも
のが得られる。Function According to this configuration, by removing the organic matter in the ceramic green sheet and the noble metal electrode paste in the inert gas with an oxygen partial pressure of 0 to 10%, the decomposition of the organic matter becomes slow and the cause of delamination occurs. It becomes possible to remove the organic substances without leaving the decomposed gas that had become the above, and it is possible to obtain a good product without delamination inside the laminate.
実施例 以下、実施例に基づいて本発明を説明する。Examples Hereinafter, the present invention will be described based on Examples.
まず、セラミック粉末（BaTiO3を主成分とする高誘電体
材料）100重量部，ポリビニルブチラール樹脂10重量
部，ジオクチルフタレート10重量部，トルエン15重量
部，トリクロルエタン22重量部を加えてスラリー化す
る。このスラリーをドクターブレートを使って50μのセ
ラミックグリーンシートを得た。このセラミックグリー
ンシートを70×100mmの大きさに切断し、内部電極ペー
スト（パラジウム50wt％，有機樹脂10wt％，有機溶剤40
wt％）をEIA規格の12タイプ（幅1mm,長さ2mm）の印刷パ
ターンを用いて印刷し、積層数が15層のくし型構造と
し、500kg/cm2の圧力をかけ電極とセラミックグリーン
シートとを一体化させる。これを細かく切断して12タイ
プのセラミックグリーンチップ（積層セラミックコンデ
ンサ用グリーンチップ）を造る。この断面図を第１図に
示し、１はセラミックグリーンシート、２は内部電極ペ
ーストである。このグリーンチップを用い、下記に示す
第１表のガス及び酸素分圧のもとで、第２図に示す昇温
カーブで有機物を除去した。その後、これを大気中で12
50℃−２時間で焼成した（昇降温速度200℃/hr）。そし
て、各々の焼結体を20ケずつ取出し、焼結体の両端に銀
ペーストを塗布し800℃で焼付を行って積層セラミック
コンデンサを作製し、静電容量，誘電体損質，絶縁抵抗
の電気的特性を測定した。次に、焼結体の断面を観察し
デラミネーションを有無を調べた。その結果を第１表に
併せて示す。First, 100 parts by weight of ceramic powder (high dielectric material containing BaTiO 3 as a main component), 10 parts by weight of polyvinyl butyral resin, 10 parts by weight of dioctyl phthalate, 15 parts by weight of toluene, and 22 parts by weight of trichloroethane are added to form a slurry. . A 50 μm ceramic green sheet was obtained from this slurry using a doctor blade. This ceramic green sheet is cut into a size of 70 x 100 mm, and the internal electrode paste (palladium 50 wt%, organic resin 10 wt%, organic solvent 40
wt%) is printed using 12 types of EIA standard (width 1 mm, length 2 mm) printing pattern to make a comb structure with 15 layers, and 500 kg / cm 2 of pressure is applied to electrodes and ceramic green sheets. Combine with. This is finely cut to make 12 types of ceramic green chips (green chips for laminated ceramic capacitors). This sectional view is shown in FIG. 1, where 1 is a ceramic green sheet and 2 is an internal electrode paste. Using this green chip, under the gas and oxygen partial pressures shown in Table 1 below, organic substances were removed according to the temperature rising curve shown in FIG. Then, in the atmosphere,
Firing was carried out at 50 ° C for 2 hours (temperature rising / falling rate 200 ° C / hr). Then, 20 pieces of each sintered body are taken out, silver paste is applied to both ends of the sintered body, and baking is performed at 800 ° C. to manufacture a monolithic ceramic capacitor. The electrical characteristics were measured. Next, the cross section of the sintered body was observed to check the presence or absence of delamination. The results are also shown in Table 1.
上記第１表のように不活性ガスを用いた本発明の焼結体
は、静電容量，誘電体損失，絶縁抵抗がともに向上し、
さらにデラミネーションもなくなった。次に、本発明で
酸素分圧を０〜10％としたのは、10％を越えると酸化雰
囲気状態となり不活性雰囲気にならず、デラミネーショ
ンが発生するからである。また、不活性ガスはAr,He,N2
を混合して用いても良いものである。 As shown in Table 1 above, the sintered body of the present invention using an inert gas has improved capacitance, dielectric loss, and insulation resistance.
Furthermore, delamination is gone. Next, the oxygen partial pressure is set to 0 to 10% in the present invention because if it exceeds 10%, an oxidizing atmosphere is created and an inert atmosphere is not formed, and delamination occurs. In addition, the inert gas is Ar, He, N 2
May be mixed and used.
発明の効果 本発明によれば、積層体の内部にデラミネーションのな
いセラミックスを得ることができ、実施例の積層セラミ
ックコンデンサのほか、積層チップバリスタ，積層体圧
電体，積層型NTC（負特性）サーミスタ，積層型PTC（正
特性）サーミスタ、及びそのほかセラミックスの内部に
貴金属ペーストを有するものの製造方法として応用でき
る。今後、益々エレクトロニクス機器の小型化，低電圧
化に伴って、積層型のセラミックスは望まれてくる中
で、本発明のもたらす産業的価値は大なるものである。EFFECTS OF THE INVENTION According to the present invention, it is possible to obtain ceramics without delamination inside a laminated body, and in addition to the laminated ceramic capacitor of the embodiment, laminated chip varistor, laminated piezoelectric body, laminated NTC (negative characteristic). It can be applied as a method for manufacturing thermistors, laminated PTC (positive characteristic) thermistors, and other ceramics containing precious metal paste. In the future, as the electronic devices become smaller and the voltage becomes lower, multilayer ceramics are desired, and the industrial value provided by the present invention is great.
第１図は本発明方法を説明するためのセラミックス積層
体の断面図、第２図は本発明方法を説明するための有機
物の除去温度のスケジュールを示す図である。 １……セラミックグリーンシート、２……印刷した内部
電極ペースト。FIG. 1 is a cross-sectional view of a ceramic laminate for explaining the method of the present invention, and FIG. 2 is a diagram showing a schedule of organic substance removal temperatures for explaining the method of the present invention. 1 ... Ceramic green sheet, 2 ... Printed internal electrode paste.
Claims (1)
なる貴金属ペーストを印刷し、次にこのグリーンシート
を積層して積層体を形成し、次にこの積層体を酸素分圧
が０〜10％でかつAr,He,N2の内いずれか一種以上よりな
る不活性ガス中で前記積層体中の有機物を除去し、その
後前記積層体を大気中で焼結させる積層型セラミックス
の製造方法。1. A ceramic green sheet is printed with a noble metal paste to be an internal electrode, and then the green sheets are laminated to form a laminated body, and then the laminated body is formed at an oxygen partial pressure of 0 to 10%. A method for producing a laminated ceramics, in which an organic substance in the laminate is removed in an inert gas containing at least one of Ar, He and N 2 and then the laminate is sintered in the atmosphere.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61126066A JPH0782963B2 (en) | 1986-05-30 | 1986-05-30 | Manufacturing method of laminated ceramics |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61126066A JPH0782963B2 (en) | 1986-05-30 | 1986-05-30 | Manufacturing method of laminated ceramics |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62282427A JPS62282427A (en) | 1987-12-08 |
| JPH0782963B2 true JPH0782963B2 (en) | 1995-09-06 |
Family
ID=14925776
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61126066A Expired - Lifetime JPH0782963B2 (en) | 1986-05-30 | 1986-05-30 | Manufacturing method of laminated ceramics |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0782963B2 (en) |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54148263A (en) * | 1978-05-12 | 1979-11-20 | Nippon Electric Co | Electrode material and method of producing same |
| JPS5717468A (en) * | 1980-06-30 | 1982-01-29 | Toyota Motor Co Ltd | Manufacture of ceramic sintered body |
| JPS608992B2 (en) * | 1980-09-03 | 1985-03-07 | 株式会社村田製作所 | Pretreatment method for ceramic molded bodies |
| JPS57139916A (en) * | 1981-02-23 | 1982-08-30 | Matsushita Electric Industrial Co Ltd | Method of producing laminated ceramic condenser |
| JPS60176296A (en) * | 1984-02-23 | 1985-09-10 | 松下電器産業株式会社 | Method of producing glazed resistance element interal multilayer substrate |
| JPS60160192A (en) * | 1983-10-12 | 1985-08-21 | 日立粉末冶金株式会社 | Method for manufacturing hybrid integrated circuit board |
| JPS6167214A (en) * | 1984-09-10 | 1986-04-07 | 日本電気株式会社 | Method of producing laminated ceramic condenser |
| JPS62106612A (en) * | 1985-11-05 | 1987-05-18 | 東光株式会社 | Manufacture of laminated electronic parts |
-
1986
- 1986-05-30 JP JP61126066A patent/JPH0782963B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62282427A (en) | 1987-12-08 |
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