JPH0782984B2 - Sample fixing device - Google Patents

Description

Description: TECHNICAL FIELD [0001] The present invention relates to a sample fixing device in a charged beam drawing apparatus, and more particularly, to a sample fixing device capable of accurately clamping samples of different sizes with one type of fixing device. Regarding the device.

[Prior Art] A sample fixing device in a conventional charged beam drawing apparatus is
When the size of the sample is different, a sample holder corresponding to the size is required, and the clamping force corresponding to the size of the sample is applied and fixed at three points or four points around the sample. Therefore, a sample holder is required for each type of sample size, resulting in high cost and poor workability. Furthermore, when the sample is large, the clamping force per location is large because it is fixed by three-point or four-point support, so a large surface pressure acts on the resist surface of the sample and the resist peels off, degrading the product quality. At the same time, the peeled resist adheres to the other side or scatters around, which causes dust on the sample surface.

[Object of the Invention] The present invention eliminates such drawbacks, and its object is to:
A sample fixing device with low cost and resist peeling is provided by fixing samples of various sizes with one type of sample holder and applying uniform clamping force regardless of sample size. To do.

[Points of the Invention] A sample fixing device according to the present invention includes a main body on which a sample is placed, a member mounted so as to be movable in one direction through a guide or a groove provided on the main body, and a sample placing on the main body. A plurality of clamp bars rotatably attached to the member so as to extend along the surface and at a right angle to the moving direction of the member and to have a position facing the sample mounting surface and a position apart from the sample mounting surface. In order to press the sample, a plurality of clamp bars are arranged on each of the plurality of clamp bars, and the pressing mechanism is provided.

[Embodiment of the Invention] An embodiment of the present invention will be described below with reference to Figs. 1 to 4. The sample 12 is placed on the upper surface of the main body 13 of the sample holder 11, that is, the sample mounting surface, and two sets of guide supports 14 are attached to the anti-sample mounting surface of the main body 13 by screws (not shown). Guides 15 are attached to the guide supports 14 so as to be parallel to each other. Two clamp bar receiving plates 16 are movably inserted into the guide 15, and a pin 17 is fulcrum at the end extending at a right angle from one end of the clamp bar receiving plate 16 toward the sample mounting surface side of the main body 13. As described above, one end of the clamp bar 18 is rotatably engaged. Clamp bar support plate
A presser foot 20 is rotatably attached to the other end of the pin 16 by a pin 19, and the presser foot 20 is formed so as to be engageable with a groove 21 formed at the other end of the clamp bar 18, and by a large-diameter head at the tip. The clamp bar 18 is adapted to be held in the clamp position.

The clamp bar 18 is provided with a plurality of pressing mechanisms 26 for pressing and fixing the sample 12 at appropriate intervals, the details of which will be described with reference to FIG. The clamp bar 18 is provided with a plurality of stepped holes 27 of large and small diameters.
A clamp pin 28 is slidably inserted into the small diameter portion of 27, and one end of the clamp pin 28 on the sample 12 side has a large diameter, and the large diameter portion and the stepped portion of the stepped hole 27 are connected to each other. A spring 29 is provided between them, and when the clamp pin 28 is constantly biased downward and the clamp pin 28 faces the sample 12, the sample 12 is pressed and fixed as shown on the right side of FIG. Clamp pin
A stopper 30 is screwed to the other side of 28 to limit the downward stroke of the clamp pin 28 in FIG. 4, and when there is no sample 12 as shown on the left side of FIG. Is formed so as not to come into contact with.

When the sample 12 is fixed to the sample holder 11 having such a structure, the two clamp bars 18 in FIG. 1 are positioned in the left-right direction according to the size of the sample 12, and then the presser foot is shown in FIG. After removing 20 and rotating the two clan bars 18 about 90 ° in the counterclockwise direction to place the sample 12 on the main body 13,
The sample 12 is automatically clamped by rotating the clamp bar 18 clockwise and setting the presser foot 20. Fig. 1 shows the case where a sample 12 of almost the maximum size is clamped, and when the size is smaller than this, one clamp bar 18 or two clamp bars 18 are respectively placed inside depending on the size. It corresponds by moving to.

FIG. 5 shows a case where two slender samples 12A are placed horizontally and clamped, and FIG. 6 shows a case where two slender samples 12B are placed vertically and clamped. In the illustrated example, Although the pressing mechanism 26 is provided in two rows in the central clamp bar 18A, two similar ones to the normal clamp bar 18 provided on the left and right may be used. In this way, the clamp bars 18, 18A can be added or replaced as appropriate with the clamp bar receiving plate 16 or by providing a spare clamp bar receiving plate 16. It is preferable that it be detachably attached to 13.

7 and 8 show another embodiment of the present invention. In the first embodiment described above, the spring 29 of the pressing mechanism 26 is used.
Was a coil spring, but in this example, a leaf spring 32 is used. That is, in the pressing mechanism 30, the clamp pin 31 having a large diameter on the lower end is inserted into the plurality of holes of the clamp bar 18, and the other end of the clamp pin 31 is a screw. The other side of the leaf spring 32 having one side fixed to the clamp bar 18 is inserted and fixed by the nut 33. In this method, since the leaf spring 32 itself functions as a stopper, the clamp pin 31 does not contact the main body 13 even when the clamp pin 31 does not face the sample 12.

FIG. 9 also shows another embodiment of the present invention. Instead of the guide 15 and the clamp bar receiving plate 16 of the above-mentioned embodiment, the main body 13 is used.
A groove 36 is formed on both side surfaces of A, and a roller 39 rotatably supported by a shaft 38 fixed to a roller support 37 rolls in the groove 36. One end of the roller support 37 is engaged with one end of a clamp bar 18 which is rotatable around the pin 17 as a fulcrum, and the other end of the clamp bar 18 is engaged with a holding fitting 20 (not shown) (see FIG. 2). What is done is the same as the above-mentioned embodiment. In this example, the plurality of clamp bars 18 are moved by rollers 39 with respect to the main body 13A. The main body 13A has a groove 36
Is different from the main body 13 only in that it is formed and is thick.

FIG. 10 also shows another embodiment of the present invention. This example is an example in which the main body 13 of the above-described embodiment is prevented from being formed by receiving a bending moment by the pressing force of the pressing mechanism 26. Guide supports 41 are attached to four end portions on both sides of the main body 13, and guides 15 are arranged in parallel and fixed to the guide supports 41, and clamp bar receiving plates 42 are movably inserted into both guides 15. One end (lower side in the figure) of the clamp bar receiving plate 42 is engaged with one end of a clamp bar 18 which is rotatable about the pin 17, and the other end of the clamp bar 18 is clamped by a pin 43 which can be freely taken in and out. It is fixed to the bar receiving plate 42.

The clamp bar receiving plate 42 is provided with a plurality of backup mechanisms 44 having substantially the same pressing force as that of the pressing mechanism 26 at the same position where the pressing mechanism 26 of the clan bar 18 is provided. In the figure, the upper and lower two pressing mechanisms 26 are not facing the sample 12 and are not in contact with the main body 13, but the backup mechanism 44 is in full contact with the main body 13. Therefore, although not shown, it is preferable that when the clamp pin of the backup mechanism 44 is rotated by 90 ° and retracted, it is stopped at that position so that the pressing force does not work.

In addition, in the above-described embodiments, all of the clamp bars 18, 18
A, the presser foot 21, and the clamp bar receiving plate 42 to which the backup mechanism 44 is attached are all movable along the guide 15. However, one set is fixed near the ends of the books 13 and 13A. It may be installed in.

[Advantages of the Invention] As described above, the sample fixing device of the present invention is
A plurality of pressing mechanisms are provided on a plurality of clamp bars movable with respect to the main body on which the sample is placed, and the sample is fixed to the main body by the pressing mechanism. Therefore, since it suffices to move the clamp bar to a position suitable for the size of the sample with respect to samples of various sizes, one sample holder can fix various samples, and the cost can be reduced. Further, the sample fixing has an advantage that the resist is not peeled off because the clamping force is dispersed in a plurality of places without being concentrated.

[Brief description of drawings]

1 to 4 show an embodiment of the present invention, FIG. 1 is a plan view, FIG. 2 is a two-direction arrow view of FIG. 1, and FIG.
FIG. 4 is a detailed enlarged sectional view of the pressing mechanism, FIGS. 5 and 6 are plan views showing different usage states, and FIGS. 7 and 8 are other embodiments of the present invention. FIG. 7 shows a partial sectional view, FIG. 8 shows a partial plan view, FIG. 9 and FIG. 10 show another embodiment of the present invention having different shapes, and FIG. 9 shows a partial side view. , FIG. 10 is a side view. 12 …… Sample, 13, 13A …… Main body, 15 …… Guide, 16,37 ……
Member, 18 …… Clamp bar, 26 …… Pressing mechanism, 36 …… Groove, 44
...... Backup mechanism.

Claims (4)

[Claims] 1. A main body for mounting a sample, a member movably mounted in one direction of the main body via a guide or a groove provided in the main body, and a member along a sample mounting surface of the main body, A plurality of clamp bars that extend at right angles to the moving direction of the member and have one end rotatably attached to the member or the main body so as to take a position facing the sample mounting surface and a position separated from the sample mounting surface. A plurality of pressing mechanisms arranged in each of the plurality of clamp bars for pressing the sample, and a part of the plurality of pressing mechanisms facing the sample when fixing the sample, or A sample fixing device that uses the entire pressing mechanism. 2. The sample fixing device according to claim 1, wherein the feeding amount is limited so that the clamp pin of the pressing mechanism not facing the sample does not come into contact with the main body. Sample fixing device. 3. The sample fixing device according to claim 1, wherein the clamp bar is removable from the member or the main body. 4. A main body on which a sample is placed, a member movably attached to the main body via a guide or groove provided in the main body, and a member along a sample mounting surface of the main body, A plurality of clamp bars that extend at right angles to the moving direction of the member and have one end rotatably attached to the member or the main body so as to take a position facing the sample mounting surface and a position separated from the sample mounting surface. A pressing mechanism arranged in a plurality of arrangements on each of the plurality of clamp bars for pressing the sample, and a pressing mechanism for pressing the sample mounting surface side of the main body provided on the member or the main body. A sample fixing device comprising a plurality of backup mechanisms having substantially the same pressing pressure.