JPH0786454B2 - Scattered light detector of particle size distribution measuring device - Google Patents
Scattered light detector of particle size distribution measuring deviceInfo
- Publication number
- JPH0786454B2 JPH0786454B2 JP62335935A JP33593587A JPH0786454B2 JP H0786454 B2 JPH0786454 B2 JP H0786454B2 JP 62335935 A JP62335935 A JP 62335935A JP 33593587 A JP33593587 A JP 33593587A JP H0786454 B2 JPH0786454 B2 JP H0786454B2
- Authority
- JP
- Japan
- Prior art keywords
- particle size
- scattered light
- size distribution
- light
- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Description
【発明の詳細な説明】 (産業上の利用分野) この発明は,たとえば媒体中に分散された粒子群に光を
照射し,粒子群からの散乱光(回折光)を検出して粒子
群の粒度分布を測定する装置に好適な散乱光検出器に関
する。DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention irradiates a particle group dispersed in a medium with light, detects scattered light (diffracted light) from the particle group, and detects the particle group. The present invention relates to a scattered light detector suitable for an apparatus for measuring particle size distribution.
(従来の技術) 粒度分布の測定には光散乱法がよく用いられる。光散乱
法では,被測定粒子群に単色光(レーザ光)を照射し,
粒子からの散乱光の強度をいくつかの散乱角について測
定して,この測定値からFraunhofer回折法(平均粒径数
μm〜数十μmの粗い粒子),またはMie散乱法(微小
粒子)により統計的演算処理を施し,粒度分布が求めら
れる。(Prior Art) A light scattering method is often used for measuring the particle size distribution. In the light scattering method, the particle group to be measured is irradiated with monochromatic light (laser light),
The intensity of scattered light from the particles was measured for several scattering angles, and the measured values were used for statistics by the Fraunhofer diffraction method (coarse particles with an average particle size of several μm to several tens of μm) or the Mie scattering method (fine particles). The particle size distribution is obtained by performing a mathematical calculation process.
この散乱光の強度をいくつかの散乱角について測定する
ための検出器として,ホトダイオード等の受光素子を複
数個リング状に組み合わせたリングデテクタがある(特
開昭62−100637号)。このリングデテクタは散乱光強度
の角度分布を瞬間的に高感度かつ高精度に検出できる特
徴を有している。As a detector for measuring the intensity of this scattered light at several scattering angles, there is a ring detector in which a plurality of light receiving elements such as photodiodes are combined in a ring shape (JP-A-62-100637). This ring detector has a feature that the angular distribution of scattered light intensity can be instantaneously detected with high sensitivity and high accuracy.
(発明が解決しようとする問題点) しかし,リングデテクタではクロストークの問題から各
受光素子は適当なギャップ(不感体)をもって配置され
ており,他方受光素子の幅を極端に小さくすると感度が
低下し,またリード線が取り付けられなくなるので,配
列できるリング状受光素子数には,必然的に,特に中心
部分において限度がある。このことは中心部分における
検出精度,感度の低下をもたらし,粒度分布の測定にお
いては比較的粒子径の大きい測定の場合に測定誤差を生
じる。粒子からの回折光の角度は粒子径に関連し,粒子
径が大きい程回折角度が小さくなるためである。(Problems to be solved by the invention) However, in the ring detector, each photodetector is arranged with an appropriate gap (insensitive body) due to the problem of crosstalk. On the other hand, if the width of the photodetector is made extremely small, the sensitivity decreases. In addition, since the lead wires cannot be attached, the number of ring-shaped light receiving elements that can be arranged is necessarily limited, especially in the central portion. This causes a decrease in detection accuracy and sensitivity in the central portion, and causes a measurement error in the measurement of the particle size distribution when the particle size is relatively large. This is because the angle of the diffracted light from the particles is related to the particle diameter, and the larger the particle diameter, the smaller the diffraction angle.
(問題点を解決するための手段) この発明は,上述の問題点を解決するために改良された
ものであって,リングデテクタを少なくとも2分割し,
互いに他方側のギャップを一方側の受光素子がカバーす
るようにずらせて組み合わせた粒度分布測定装置の散乱
光検出器である。(Means for Solving Problems) The present invention has been improved in order to solve the above problems, in which a ring detector is divided into at least two,
It is a scattered light detector of a particle size distribution measuring device in which the gaps on the other side are shifted and combined so that the light receiving elements on the one side cover each other.
(作用) この発明の粒度分布測定装置の散乱光検出器によれば,
各角度に配列された受光素子数を実質的に増加すること
になり,各角度方向から散乱する散乱光強度を高精度に
検出することができる。(Operation) According to the scattered light detector of the particle size distribution measuring device of the present invention,
Since the number of light receiving elements arranged at each angle is substantially increased, the intensity of scattered light scattered from each angle direction can be detected with high accuracy.
(実施例) 以下,この発明の粒度分布測定装置の散乱光検出器を図
面の実施例により説明する。(Example) Hereinafter, the scattered light detector of the particle size distribution measuring apparatus of the present invention will be described with reference to the accompanying drawings.
第1図は,この発明の粒度分布測定装置の散乱光検出器
の基本構成を示すもので,リングデテクタ5は同一ウェ
ハ上に異なる曲率を有する円弧状のホトダイオードP1〜
Pnを同心状に適当な幅のギャップG1〜Gnをもって複数個
配列したものであるが,これを分割し,互いに他方側の
各ギャップG(通常数10μm)と一方側の各ホトダイオ
ードP(通常数10μm)が重なるようにずらせる。この
ようにすることによって,他方側の各ギャップG部分に
散乱する光も一方側の各ホトダイオードPで検出され,
測定点数が倍増されることになる。FIG. 1 shows a basic configuration of a scattered light detector of a particle size distribution measuring device of the present invention, in which a ring detector 5 has arc-shaped photodiodes P 1 to P 1 ... having different curvatures on the same wafer.
A plurality of Pn are arranged concentrically with gaps G 1 to Gn having an appropriate width. These are divided and each gap G on the other side (usually several tens of μm) and each photodiode P on the one side (usually Slide several tens of μm) so that they overlap. By doing so, the light scattered in each gap G on the other side is also detected by each photodiode P on the one side,
The number of measurement points will be doubled.
第2図はこの発明の粒度分布測定装置の散乱光検出器
を,レーザ光回折を利用した粒度分布測定装置に適用し
た実施例の構成を示すもので,レーザ光源1からの出力
ビームはコリメータ2を介してフローセル3に照射され
る。フローセル3内には,粒子群が希釈液中に分散飛し
ょう状態で存在しており,照射されたレーザ光はこの各
粒子の大きさに応じた角度で回折する。この回折光は集
光用のレンズ4により,このレンズ4の焦点位置に置か
れたリングデテクタ5上に回折像を結ぶ。FIG. 2 shows the configuration of an embodiment in which the scattered light detector of the particle size distribution measuring device of the present invention is applied to a particle size distribution measuring device utilizing laser light diffraction. The output beam from the laser light source 1 is a collimator 2 The flow cell 3 is irradiated with light. In the flow cell 3, particles are present in a state of being dispersed and dispersed in the diluting solution, and the irradiated laser light is diffracted at an angle according to the size of each particle. This diffracted light forms a diffracted image on the ring detector 5 placed at the focal position of the lens 4 by the condenser lens 4.
リングデテクタ5の各ホトダイオードPからの出力はマ
ルチプレクサ6を介してそれぞれのホトダイオードに対
応して設けられたアンプ7…7に導かれ,A−D変換器8
によりデジタル化された後,マイクロコンピュータに採
り込まれる。The output from each photodiode P of the ring detector 5 is led via a multiplexer 6 to an amplifier 7 ... 7 provided corresponding to each photodiode, and an A-D converter 8
It is digitized by and then incorporated into a microcomputer.
マイクロコンピュータはCPU9,ROM10,RAM11等を備えてお
り,キーボード12およびCRT13が接続されている。CPU9
は,ROM10に書き込まれたプログラムにより,公知の算法
によってRAM11内に格納されているリングデテクタ5の
各ホトダイオードPへの入射光強度に基づいて,フロー
セル3内の粒子群の粒度分布を求めることができ,その
結果はCRT12に表示される。The microcomputer includes a CPU 9, ROM 10, RAM 11, etc., and is connected with a keyboard 12 and a CRT 13. CPU9
Can calculate the particle size distribution of the particle group in the flow cell 3 based on the intensity of light incident on each photodiode P of the ring detector 5 stored in the RAM 11 by a program written in the ROM 10 by a known method. Yes, the result is displayed on CRT12.
(発明の効果) この発明の粒度分布測定装置の散乱光検出器によれば,
クロストークによる影響を除去しうるギャップを有し,
かつ受光素子の幅をリード線の取り付けが困難になる程
極端に小さくすることもなく,配列しうる受光素子数を
実質上大幅に増加させることができ,比較的大きな粒子
径の粒度分布の測定の場合にも高精度,高感度の測定が
可能となる。(Effect of the Invention) According to the scattered light detector of the particle size distribution measuring apparatus of the present invention,
Has a gap that can eliminate the effects of crosstalk,
Moreover, the number of light-receiving elements that can be arranged can be increased substantially without making the width of the light-receiving element extremely small enough to make it difficult to attach a lead wire. In the case of, it is possible to measure with high accuracy and high sensitivity.
第1図はこの発明の粒度分布測定装置の散乱光検出器の
基本構成を示す図,第2図はこの発明の粒度分布測定装
置の散乱光検出器をレーザ光回折粒度分布測定装置に適
用した実施例を示す図である。 図中,1はレーザ光源,3はフローセル,5はリングデテク
タ,Pはホトダイオード,Gはギャップである。FIG. 1 is a diagram showing a basic structure of a scattered light detector of a particle size distribution measuring device of the present invention, and FIG. 2 is a diagram showing a scattered light detector of the particle size distribution measuring device of the present invention applied to a laser light diffraction particle size distribution measuring device. It is a figure which shows an Example. In the figure, 1 is a laser light source, 3 is a flow cell, 5 is a ring detector, P is a photodiode, and G is a gap.
Claims (1)
の散乱光の強度をいくつかの散乱角について、複数個の
受光素子を適当なギャップをもって同心円状に配置して
なるリングデテクタにより測定し、この測定値から粒度
分布を求める粒度分測定装置の散乱光検出器において、 前記リングデテクタを少なくとも2分割し、互いに他方
側のギャップと一方側の受光素子が重なるようにずらせ
て組み合わせたことを特徴とする粒度分測定装置の散乱
光検出器。1. A ring detector comprising a group of particles to be measured irradiated with monochromatic light, and a plurality of light receiving elements arranged concentrically with an appropriate gap for the intensity of scattered light from the particles at several scattering angles. In the scattered light detector of the particle size measuring device, the ring detector is divided into at least two parts, and the gaps on the other side and the light receiving elements on the one side are shifted so that they are overlapped with each other. A scattered light detector for a particle size analyzer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62335935A JPH0786454B2 (en) | 1987-12-29 | 1987-12-29 | Scattered light detector of particle size distribution measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62335935A JPH0786454B2 (en) | 1987-12-29 | 1987-12-29 | Scattered light detector of particle size distribution measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01174937A JPH01174937A (en) | 1989-07-11 |
| JPH0786454B2 true JPH0786454B2 (en) | 1995-09-20 |
Family
ID=18293990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62335935A Expired - Lifetime JPH0786454B2 (en) | 1987-12-29 | 1987-12-29 | Scattered light detector of particle size distribution measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0786454B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4593144B2 (en) * | 2004-03-26 | 2010-12-08 | 浜松ホトニクス株式会社 | Method and apparatus for determining atomization conditions, and method and apparatus for producing fine particles |
| JP5532981B2 (en) | 2010-02-03 | 2014-06-25 | 日本電気株式会社 | Network management device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61144406U (en) * | 1985-02-28 | 1986-09-06 | ||
| DE3616144A1 (en) * | 1986-05-14 | 1987-11-19 | Heidenhain Gmbh Dr Johannes | PHOTOELECTRICAL MEASURING DEVICE |
| JPS62267606A (en) * | 1986-05-16 | 1987-11-20 | Shinetsu Eng Kk | Measuring method for interference fringe |
-
1987
- 1987-12-29 JP JP62335935A patent/JPH0786454B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01174937A (en) | 1989-07-11 |
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