JPH0788557B2 - Method for manufacturing aluminum foil for electrolytic capacitor electrode - Google Patents
Method for manufacturing aluminum foil for electrolytic capacitor electrodeInfo
- Publication number
- JPH0788557B2 JPH0788557B2 JP3079316A JP7931691A JPH0788557B2 JP H0788557 B2 JPH0788557 B2 JP H0788557B2 JP 3079316 A JP3079316 A JP 3079316A JP 7931691 A JP7931691 A JP 7931691A JP H0788557 B2 JPH0788557 B2 JP H0788557B2
- Authority
- JP
- Japan
- Prior art keywords
- aluminum foil
- etching
- atmosphere
- temperature
- temperature heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000011888 foil Substances 0.000 title claims description 45
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title claims description 32
- 229910052782 aluminium Inorganic materials 0.000 title claims description 32
- 239000003990 capacitor Substances 0.000 title claims description 9
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 238000000034 method Methods 0.000 title description 5
- 238000010438 heat treatment Methods 0.000 claims description 38
- 238000005096 rolling process Methods 0.000 claims description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 230000001590 oxidative effect Effects 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 5
- 238000005530 etching Methods 0.000 description 35
- 230000007547 defect Effects 0.000 description 9
- 230000002950 deficient Effects 0.000 description 6
- 239000010410 layer Substances 0.000 description 6
- 239000002344 surface layer Substances 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 238000003486 chemical etching Methods 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000005238 degreasing Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 241001676573 Minium Species 0.000 description 1
- 235000010678 Paulownia tomentosa Nutrition 0.000 description 1
- 240000002834 Paulownia tomentosa Species 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000000866 electrolytic etching Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- -1 low temperature Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Metal Rolling (AREA)
Description
【０００１】[0001]
【産業上の利用分野】この発明は電解コンデンサ電極用
アルミニウム箔の製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an aluminum foil for electrolytic capacitor electrodes.
【０００２】なお、この明細書において「アルミニウ
ム」の語はその合金を含む意味で用いる。In this specification, the term "aluminum" is used to include its alloy.
【０００３】[0003]
【従来の技術】アルミニウム電解コンデンサ用電極材と
して一般に用いられるアルミニウム箔には、その実効面
積を拡大して単位面積当りの静電容量を増大するため、
通常電気化学的あるいは化学的エッチング処理が施され
る。2. Description of the Related Art Aluminum foil, which is generally used as an electrode material for aluminum electrolytic capacitors, has a large effective area to increase the capacitance per unit area.
Usually, electrochemical or chemical etching treatment is performed.
【０００４】しかし、箔を単にエッチング処理するのみ
では十分な静電容量が得られない。このため、一般的に
は箔圧延後の最終焼鈍工程において、立方体方位を多く
有する集合組織にして箔のエッチング特性を向上させる
べく、４５０℃程度以上の高温加熱処理が施されている
が、昨今の電解コンデンサの高静電容量化の要求に対し
て十分な満足を与えるものではなかった。However, a sufficient capacitance cannot be obtained by simply etching the foil. For this reason, generally, in the final annealing step after foil rolling, a high temperature heat treatment of about 450 ° C. or more is performed in order to improve the etching characteristics of the foil by forming a texture having many cubic orientations, but recently It did not give sufficient satisfaction to the requirement for high capacitance of the electrolytic capacitor.
【０００５】この発明は、かかる事情に鑑みてなされた
ものであって、エッチング性能に優れひいては高静電容
量を得ることのできる電解コンデンサ電極用アルミニウ
ム箔の提供を目的とするものである。The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an aluminum foil for an electrolytic capacitor electrode which is excellent in etching performance and thus can obtain a high electrostatic capacity.
【０００６】[0006]
【課題を解決するための手段】上記目的を達成するため
に、発明者は鋭意研究の結果、箔圧延後エッチング前に
アルミニウム箔に対し条件を各種に変えた低温、中温、
高温の各加熱工程を実施することで、エッチングにおい
て箔表面に多数のエッチングピットを均一に形成するこ
とができ、ひいては大きな静電容量を得ることができる
ことを見出し、この発明を完成しえたものである。In order to achieve the above-mentioned object, the inventors of the present invention have earnestly studied and, as a result, after the foil rolling and before the etching, various conditions were changed for the aluminum foil, such as low temperature, medium temperature,
By carrying out each heating process at a high temperature, it is possible to form a large number of etching pits uniformly on the foil surface in etching, and it is possible to obtain a large electrostatic capacity, and it has been completed the present invention. is there.
【０００７】即ちこの発明は、箔圧延後のアルミニウム
箔に、温度：２０〜１００℃、雰囲気１kg中の水分量：
０．００５〜０．４kg、時間：１分〜５００時間の条件
で低温加熱を行う工程と、温度：１００〜３５０℃、雰
囲気１kg中の水分量：０．０５kg以下、雰囲気中の酸素
濃度：３０％以下、時間：１分〜５０時間の条件で中温
加熱を行う工程と、温度：４５０〜５８０℃、雰囲気：
１×１０-3Ｔｏｒｒ以下の真空あるいは無酸化雰囲気、
時間：１０分〜５０時間の条件で高温加熱を行う工程と
を順次的に実施することを特徴とする電解コンデンサ電
極用アルミニウム箔の製造方法を要旨とする。That is, according to the present invention, the aluminum foil after the foil is rolled has a temperature of 20 to 100 ° C. and a moisture content in 1 kg of atmosphere:
0.005 to 0.4 kg, between time: a step of performing a low-temperature heating in the conditions of 1 minute to 500 hours, temperature: 100 to 350 ° C., the water content in the tung <br/>囲気1 kg: 0.05 kg Hereinafter , a step of performing medium temperature heating under the conditions of oxygen concentration in the atmosphere: 30% or less, time: 1 minute to 50 hours, temperature: 450 to 580 ° C, atmosphere:
Vacuum or non-oxidizing atmosphere of 1 × 10 -3 Torr or less,
Time: 10 minutes to 50 hours The step of performing high temperature heating is sequentially carried out, and a method of manufacturing an aluminum foil for electrolytic capacitor electrodes is characterized.
【０００８】箔圧延後要すれば脱脂洗浄したのちに最初
に施す低温加熱工程は、アルミニウム箔表面に水和酸化
皮膜を形成することを目的として実施するものである。
このために加熱条件を上記に設定しなければならない。
即ち、加熱温度が２０℃未満、雰囲気１kg中の水分量が
０．００５kg未満、処理時間が１分未満では酸化皮膜の
形成が進行せず、十分な水和酸化皮膜の形成が実質上不
可能となる。一方、加熱温度が１００℃を超え、雰囲気
１kg中の水分量が０．４kgを超え、処理時間が５００時
間を超えても水和皮膜の形成効果が飽和し、エネルギの
無駄を招く。特に好ましい加熱条件は、温度：３０〜８
０℃、雰囲気１kg中の水分量：０．０１〜０．２kg、時
間：１〜１００時間である。After the foil rolling, if necessary, after degreasing and cleaning, the first low temperature heating step is carried out for the purpose of forming a hydrated oxide film on the surface of the aluminum foil.
Therefore, the heating condition must be set as above.
That is, when the heating temperature is less than 20 ° C., the amount of water in 1 kg of atmosphere is less than 0.005 kg , and the treatment time is less than 1 minute, the formation of an oxide film does not proceed, and it is practically impossible to form a sufficient hydrated oxide film. Becomes On the other hand, the heating temperature exceeds 100 ° C and the atmosphere
Moisture content exceeded the 0.4 kg in 1 kg, processing time be greater than 500 hours to saturate the effect of forming hydrated film, leading to waste of energy. Particularly preferable heating conditions are temperature: 30 to 8
The temperature is 0 ° C., the amount of water in 1 kg of atmosphere is 0.01 to 0.2 kg , and the time is 1 to 100 hours.
【０００９】上記低温加熱工程で形成される水和酸化皮
膜は、可及的均一に形成されるのが静電容量をさらに増
大しうる点で望ましい。このために、箔圧延後低温加熱
前にアルミニウム箔表面層の除去工程を実施しておくこ
とが推奨される。即ち、箔圧延後のアルミニウム箔表面
には油分や圧延途中で形成される不均質な酸化皮膜が存
在する。またアルミニウム箔の表面近傍には、圧延によ
る変質層や圧延時のロールコーティング等による汚染層
が不均一に存在する。これらの不均質層が次いで行う低
温加熱工程での水和酸化皮膜の不均一性をもらたす原因
となる。従って、低温加熱工程において均一な酸化皮膜
の形成を促進すべく、上記不均一層の除去を行うのが望
ましい。除去の具体的手段は特に限定するものではな
い。一例としてアルカリ洗浄、酸洗浄等の洗浄除去方法
やイオンビームエッチング等のドライエッチングによる
方法を挙げうる。表面層の除去は、その目的のためには
これを０．１ｎｍ以上に亘って行うのが良く、特に好ま
しくは２ｎｍ以上とするのが良い。上限は特にないが１
００ｎｍ程度で表面層除去の効果が飽和するため、それ
を超える除去は無益である。It is desirable that the hydrated oxide film formed in the low temperature heating step is formed as uniformly as possible from the viewpoint that the capacitance can be further increased. For this reason, it is recommended to carry out the step of removing the aluminum foil surface layer after the foil rolling and before the low temperature heating. That is, oil content and a heterogeneous oxide film formed during rolling exist on the surface of the aluminum foil after the foil is rolled. Further, near the surface of the aluminum foil, an altered layer due to rolling and a contaminated layer due to roll coating during rolling exist nonuniformly. These heterogeneous layers cause non-uniformity of the hydrated oxide film in the subsequent low temperature heating step. Therefore, it is desirable to remove the non-uniform layer in order to promote the formation of a uniform oxide film in the low temperature heating step. The specific means of removal is not particularly limited. As an example, a cleaning removal method such as alkali cleaning or acid cleaning or a dry etching method such as ion beam etching can be used. For the purpose, the removal of the surface layer is preferably performed over 0.1 nm or more, particularly preferably 2 nm or more. There is no particular upper limit, but 1
Since the effect of removing the surface layer is saturated at about 00 nm, removal beyond that is useless.
【００１０】前記低温加熱工程の次に施す中温加熱工程
の目的の１つは、前記低温加熱工程で形成された水和酸
化皮膜中の水分を脱離させることにより皮膜上にエッチ
ングピットの核となる多数の欠陥を形成することにあ
る。また他の目的は、該欠陥部以外は耐エッチング性を
持たせるために更に酸化を促進し皮膜を成長させること
にある。しかし、１００℃未満の温度、０．０５kgを超
える雰囲気１kg中の水分量、１分未満の処理時間では、
酸化皮膜中の水分脱離作用及び欠陥部以外の酸化促進作
用に乏しく、中温加熱の目的を達成できない。一方、温
度が３５０℃を超え、雰囲気中の酸素濃度が３０％を超
え、処理時間が５０時間を超えると過度に酸化が促進さ
れて皮膜欠陥が消え、ひいてはエッチングの際に微細均
一なエッチングピットの形成が困難となり高静電容量を
得られない。従って中温加熱は、温度：１００〜３５０
℃、雰囲気１kg中の水分量：０．０５kg以下、雰囲気中
の酸素濃度：３０％以下、時間：１分〜５０時間の条件
で行わなければならない。特に好ましい加熱条件は、温
度：１５０〜２５０℃、雰囲気１kg中の水分量：０．０
１kg以下、雰囲気中の酸素濃度：２０％以下、処理時
間：１〜２０時間である。One of the purposes of the medium-temperature heating step performed after the low-temperature heating step is to eliminate the water in the hydrated oxide film formed in the low-temperature heating step to form nuclei of etching pits on the film. To form a large number of defects. Another object is to further promote oxidation to grow a film in order to provide etching resistance except for the defective portion. However, at a temperature of less than 100 ° C. , a moisture content of 1 kg of an atmosphere exceeding 0.05 kg, and a treatment time of less than 1 minute,
The action of desorbing water in the oxide film and the action of promoting oxidation other than the defective portion are poor, and the purpose of heating at medium temperature cannot be achieved. On the other hand, when the temperature exceeds 350 ° C., the oxygen concentration in the atmosphere exceeds 30%, and the treatment time exceeds 50 hours, the oxidation is excessively promoted to eliminate the film defects, and eventually the fine uniform etching pits are formed during etching. Formation becomes difficult, and high capacitance cannot be obtained. Therefore, medium temperature heating is performed at a temperature of 100 to 350.
C., water content in atmosphere 1 kg : 0.05 kg or less , oxygen concentration in atmosphere: 30% or less, time: 1 minute to 50 hours. Particularly preferable heating conditions are temperature: 150 to 250 ° C., water content in atmosphere 1 kg : 0.0
1 kg or less, oxygen concentration in the atmosphere: 20% or less, treatment time: 1 to 20 hours.
【００１１】次に実施する高温加熱（焼鈍）工程は、ア
ルミニウム箔の組織を立方体方位を多く有する集合組織
にしてエッチング特性を向上させることを主目的とする
ものである。而して、この高温加熱処理においてさらに
酸化皮膜が形成されると、皮膜が厚くなりすぎて中温加
熱工程までの工程で形成された皮膜欠陥が消去され、エ
ッチングの際に十分なエッチングピットを形成すること
ができなくなる。従って、この高温加熱工程は酸化皮膜
の成長を可及的抑制しつつ行う必要があり、このために
温度：４５０〜５８０℃、雰囲気：１×１０-3Ｔｏｒｒ
以下の真空あるいは不活性ガス等の無酸化性雰囲気、時
間：１０分〜５０時間の条件に設定して行わなければな
らない。即ち、温度が５８０℃を超え、処理時間が５０
時間を超え、あるいは酸化性雰囲気では酸化皮膜が成長
して皮膜表面に形成されていた欠陥部分が消えてしま
う。一方、温度が４５０℃未満、時間が１０分未満では
アルミニウム箔の立方体方位を多くすることができず、
高温加熱の目的を達成できない。特に好ましい加熱条件
は、温度：４６０〜５４０℃、雰囲気圧：１×１０-4Ｔ
ｏｒｒ以下の真空あるいはＮ2 ガス、Ａｒガス等の無酸
化雰囲気、処理時間：１〜２０時間である。The high temperature heating (annealing) step to be carried out next has the main purpose of improving the etching characteristics by making the texture of the aluminum foil a texture having many cubic orientations. When an oxide film is further formed in this high temperature heat treatment, the film becomes too thick and the film defects formed in the steps up to the intermediate temperature heating step are erased, forming a sufficient etching pit during etching. Can not do. Therefore, it is necessary to perform this high-temperature heating process while suppressing the growth of the oxide film as much as possible. For this reason, temperature: 450 to 580 ° C., atmosphere: 1 × 10 −3 Torr
The following non-oxidizing atmosphere, such as vacuum or inert gas, and time: 10 minutes to 50 hours must be set. That is, the temperature exceeds 580 ° C and the processing time is 50
Over time or in an oxidizing atmosphere, the oxide film grows and the defective portion formed on the film surface disappears. On the other hand, if the temperature is less than 450 ° C. and the time is less than 10 minutes, the cubic orientation of the aluminum foil cannot be increased,
The purpose of high temperature heating cannot be achieved. Particularly preferable heating conditions are temperature: 460 to 540 ° C., atmospheric pressure: 1 × 10 −4 T
Vacuum or or less or non-oxidizing atmosphere of N2 gas, Ar gas, etc., processing time: 1 to 20 hours.
【００１２】上記により製作したアルミニウム箔は、そ
の表面酸化皮膜にエッチング核となる多数の欠陥を有す
るとともに欠陥以外の部分は酸化膜が厚く成長して耐エ
ッチング性を有する状態となっており、かつアルミニウ
ム箔自体の組織もエッチング特性に優れた立方体方位の
多い組織となっている。かかるアルミニウム箔をその後
電気化学的あるいは化学的エッチング処理したのち、電
解コンデンサ電極材として使用する。このエッチングに
より、酸化皮膜に形成された欠陥部分がエッチング核と
して集中的に浸食される結果、アルミニウム箔の組織自
体がエッチング特性に優れた組織となっていることとも
相俟って、深くて太い多数のエッチングピットが形成さ
れる。The aluminum foil manufactured as described above has a large number of defects which become etching nuclei in the surface oxide film, and the oxide film grows thick at the portions other than the defects to have etching resistance. The structure of the aluminum foil itself is also a structure with many cubic orientations, which has excellent etching characteristics. The aluminum foil is then subjected to an electrochemical or chemical etching treatment and then used as an electrode material for electrolytic capacitors. Due to this etching, the defective portions formed in the oxide film are intensively eroded as etching nuclei. As a result, the structure of the aluminum foil itself has a structure excellent in etching characteristics, which is deep and thick. A large number of etching pits are formed.
【００１３】なお、この発明に用いるアルミニウム箔
は、その製造工程についてはこれを限定するものではな
く、圧延工程の途中において中間焼鈍されたものであっ
ても良い。The aluminum foil used in the present invention is not limited to the manufacturing process thereof, and may be annealed in the middle of the rolling process.
【００１４】[0014]
【実施例】純度９９．９９％Ａｌからなる厚さ１００μ
ｍのアルミニウム箔を複数枚用意した。そして、これら
箔を脱脂洗浄したのち、Ｎｏ８〜１５の箔については表
面層の除去工程を実施しＮｏ１〜７、１６〜１８の箔に
ついては実施することなく、いずれについても低温加熱
工程、中温加熱工程、高温加熱工程を順次的に実施し
た。表面層の除去処理条件や各加熱工程の条件は表１に
示すように各種に変えて行った。[Example] A thickness of 99.99% purity Al having a thickness of 100 μm
A plurality of aluminum foils of m were prepared. Then, after degreasing and cleaning these foils, the surface layer removing step is performed for the No. 8 to 15 foils and not to the No. 1 to 7 and 16 to 18 foils. The process and the high temperature heating process were sequentially performed. The conditions for removing the surface layer and the conditions for each heating step were changed as shown in Table 1.
【００１５】上記により得た各アルミニウム箔を、３％
塩酸水溶液（８５℃）中で電流密度を直流１０A/dm2 と
し、３分間電解エッチング処理したのち、さらに同じ液
で１０分間化学エッチング処理した。そして、その後５
％硼酸浴中で３５０Ｖに化成処理したのち、各箔の静電
容量を測定した。その結果を表１に示す。なお静電容量
は比較例Ｎｏ１６の静電容量を１００として指数表示し
た。3% of each aluminum foil obtained as described above
The current density was set to DC 10 A / dm 2 in a hydrochloric acid aqueous solution (85 ° C.), electrolytic etching treatment was performed for 3 minutes, and then chemical etching treatment was performed using the same solution for 10 minutes. And then 5
After performing chemical conversion treatment at 350 V in a% boric acid bath, the capacitance of each foil was measured. The results are shown in Table 1. In addition, the electrostatic capacity is expressed as an index with the electrostatic capacity of Comparative Example No. 16 being 100.
【００１６】[0016]
【表１】 上記表１の結果からわかるように、本発明実施品は多数
のエッチングピットを形成しえて密度の大きいエッチン
グ状態となっているため、大きな静電容量を確実に得る
ことができるものであった。[Table 1] As can be seen from the results of Table 1 above, since the product of the present invention was in an etching state in which a large number of etching pits were formed and the density was high, a large capacitance could be reliably obtained.
【００１７】[0017]
【作用】低温加熱工程においてアルミニウム箔表面に水
和酸化皮膜が形成される。次に実施する中温加熱工程に
おいて、前記低温加熱工程で形成された水和酸化皮膜中
の水分が脱離することにより皮膜上にエッチングピット
の核となる多数の欠陥が形成される。かつ、該欠陥部以
外は更に酸化が促進され皮膜が成長して耐エッチング性
を有するものとなる。次に施す高温加熱により、酸化皮
膜の成長を可及的抑制して中温加熱工程までに形成され
た皮膜欠陥の消去を防止しつつ、アルミニウム箔の組織
を立方体方位を多く有する集合組織にしてエッチング特
性をさらに向上させる。こうして製作したアルミニウム
箔は、その表面酸化皮膜にエッチング核となる多数の欠
陥を有するとともに、欠陥以外の部分は酸化膜が厚く成
長して耐エッチング性を有する状態となっており、かつ
アルミニウム箔自体の組織もエッチング特性に優れた立
方体方位の多い組織となっている。かかるアルミニウム
箔を電気化学的あるいは化学的エッチング処理すること
により、酸化皮膜に形成された欠陥部分がエッチング核
として集中的に浸食される結果、アルミニウム箔の組織
自体がエッチング特性に優れた組織となっていることと
も相俟って、深くて太い多数のエッチングピットが形成
される。[Function] A hydrated oxide film is formed on the surface of the aluminum foil in the low temperature heating step. In the medium-temperature heating step to be carried out next, the moisture in the hydrated oxide film formed in the low-temperature heating step is desorbed to form a large number of defects as nuclei of etching pits on the film. In addition, oxidation is further promoted in areas other than the defective portion, and the film grows to have etching resistance. The next high-temperature heating suppresses the growth of the oxide film as much as possible to prevent the film defects formed up to the medium-temperature heating process from being erased, while etching the aluminum foil structure into a texture structure with many cubic orientations. Further improve the characteristics. The aluminum foil produced in this manner has a large number of defects in the surface oxide film which serve as etching nuclei, and the oxide film grows thickly at portions other than the defects to have etching resistance, and the aluminum foil itself. The structure is also a structure with many cubic orientations that is excellent in etching characteristics. By electrochemically or chemically etching such an aluminum foil, the defective portions formed in the oxide film are intensively eroded as etching nuclei, so that the structure of the aluminum foil itself becomes a structure having excellent etching characteristics. Along with this, a large number of deep and thick etching pits are formed.
【００１８】また、低温加熱前にアルミニウム箔表面層
の除去工程を実施しておくことで、アルミニウム箔表面
の油分や圧延途中で形成される不均質な酸化皮膜、さら
には圧延による変質層や圧延時のロールコーティング等
による汚染層等が除去され、低温加熱工程において均一
な酸化皮膜の形成が促進され、ひいては静電容量の更な
る増大が図られる。Further, by performing the step of removing the surface layer of the aluminum foil before the low temperature heating, the oil content on the surface of the aluminum foil, the non-uniform oxide film formed during the rolling, and the deteriorated layer or the rolling The contamination layer and the like due to roll coating at that time are removed, formation of a uniform oxide film is promoted in the low temperature heating step, and further the electrostatic capacity is further increased.
【００１９】[0019]
【発明の効果】この発明は上述の次第であるから、エッ
チング性能に優れ多数のエッチングピットを形成しえて
拡面率ひいては静電容量の大きな電解コンデンサ電極箔
を確実にかつ安定して提供することができる。Since the present invention is as described above, it is possible to reliably and stably provide an electrolytic capacitor electrode foil having excellent etching performance, forming a large number of etching pits, and having a large surface area ratio and a large electrostatic capacity. You can
───────────────────────────────────────────────────── フロントページの続き (72)発明者 田村 喬 大阪府堺市海山町６丁224番地 昭和アル ミニウム株式会社内 (72)発明者 御所名 健司 大阪府堺市海山町６丁224番地 昭和アル ミニウム株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Takashi Tamura, 6-224, Kaiyamacho, Sakai City, Osaka Prefecture, Showa Alminium Co., Ltd. (72) Inventor, Kenji Gosho, 6-224, Kaiyamacho, Sakai City, Osaka Prefecture Minium Corporation
Claims (1)
０〜１００℃、雰囲気１kg中の水分量：０．００５〜
０．４kg、時間：１分〜５００時間の条件で低温加熱を
行う工程と、 温度：１００〜３５０℃、雰囲気１kg中の水分量：０．
０５kg以下、雰囲気中の酸素濃度：３０％以下、時間：
１分〜５０時間の条件で中温加熱を行う工程と、 温
度：４５０〜５８０℃、雰囲気：１×１０-3Ｔｏｒｒ以
下の真空あるいは無酸化雰囲気、時間：１０分〜５０時
間の条件で高温加熱を行う工程とを順次的に実施するこ
とを特徴とする電解コンデンサ電極用アルミニウム箔の
製造方法。1. The aluminum foil after the foil rolling has a temperature of 2
0-100 ° C, water content in atmosphere 1 kg : 0.005-
0.4 kg, between time: a step of performing a low-temperature heating in the conditions of 1 minute to 500 hours, temperature: 100 to 350 ° C., the water content in the atmosphere 1 kg: 0.
05 kg or less , oxygen concentration in atmosphere: 30% or less, time:
Step of performing medium temperature heating under the condition of 1 minute to 50 hours, and temperature: 450 to 580 ° C., atmosphere: high temperature heating under the condition of vacuum or non-oxidizing atmosphere of 1 × 10 −3 Torr or less, time: 10 minutes to 50 hours The method for producing an aluminum foil for an electrolytic capacitor electrode, which comprises sequentially performing the steps of:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3079316A JPH0788557B2 (en) | 1991-04-11 | 1991-04-11 | Method for manufacturing aluminum foil for electrolytic capacitor electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3079316A JPH0788557B2 (en) | 1991-04-11 | 1991-04-11 | Method for manufacturing aluminum foil for electrolytic capacitor electrode |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04311550A JPH04311550A (en) | 1992-11-04 |
| JPH0788557B2 true JPH0788557B2 (en) | 1995-09-27 |
Family
ID=13686466
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3079316A Expired - Lifetime JPH0788557B2 (en) | 1991-04-11 | 1991-04-11 | Method for manufacturing aluminum foil for electrolytic capacitor electrode |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0788557B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005078751A1 (en) * | 2004-02-17 | 2005-08-25 | Showa Denko K.K. | Method of manufacturing aluminum material for electrolytic capacitor electrodes, aluminum material for electrolytic capacitor electrodes, anode material for aluminum electrolytic capacitors, and aluminum electrolytic capacitors |
| CN117079979A (en) * | 2022-05-09 | 2023-11-17 | 四川万邦电子科技有限公司 | A heat treatment method for improving the specific volume of formed foil |
-
1991
- 1991-04-11 JP JP3079316A patent/JPH0788557B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04311550A (en) | 1992-11-04 |
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