JPH0789041B2 - Shape measuring instruments - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a shape measuring machine, and more specifically, to a moving member in which a supporting member that swingably supports an arm having a stylus at one end is movable. The present invention relates to a shape measuring machine which is displaceably supported and prevents the stylus from being damaged due to displacement of the support member when the stylus is engaged with a deep groove or the like.

[Background technology]

Various shape measuring machines have been devised as a device for measuring the surface shape of an object to be measured, and among these shape measuring machines,
For example, there is one as shown in FIG.

That is, in FIG. 7, the shape measuring machine 210 has a base 211.
On the base 211, an object to be measured W having an uneven surface shape is placed, and columns 212 are provided upright. A feed screw shaft (not shown) is provided in the column 212 along the longitudinal direction, and a handle 213 is provided at the tip of the feed screw shaft. An elevating member 214 is screwed onto the feed screw shaft, and a swinging means 215 is attached to the elevating member 214.
By rotating in the direction, the swinging means 215 is displaced in the arrow Y direction via the elevating member 214. Further, a handle 216 is attached to one end of the elevating member 214, and by rotating the handle 216 in the direction of arrow P, the swinging means 215 swings in the direction of arrow Q with respect to the elevating member 214. Has been done.

The rocking means 215 includes a box 217 and a box 217.
And a box 219 as a moving member that is movably arranged in the direction of the arrow X via a connecting tool 218 and swings integrally with the box 217. A base 221 is provided, and an arm 222 that rotates about the support 221 in the direction of arrow R is disposed on the support 221.
A stylus 223 capable of contacting the object to be measured W is attached to one end of the arm 222, and a balance weight 224 is attached to the other end so that the position thereof can be changed. By adjusting
The stylus 223 comes into contact with the surface of the object to be measured W with a slight contact force.

A differential transformer 225 is provided in the box body 219. The differential transformer 225 includes a core 226 protruding from an arm 222, and the core 226 has a coil 227 attached to the box body 219. Are separated from each other by a predetermined distance.

When the shape of the object to be measured W is measured by the shape measuring machine 210 configured as described above, the box 219 is moved in the arrow X direction while the stylus 223 is in contact with the surface of the object to be measured W. . With this movement, the stylus 223 is displaced according to the surface shape of the object W to be measured. This displacement is a differential transformer 225
And the displacement amount of the box body 219 in the X direction are detected to measure the surface shape of the object W to be measured.

In this case, for example, the stylus 223 is placed on the surface of the object to be measured W.
If a groove (not shown) that substantially matches the shape of the stylus 223 is provided, the stylus 223 may fit into the groove and damage the stylus 223.

Therefore, as a mechanism to prevent damage to the stylus 223,
As shown in FIG. 8, a support member 2 which is a separate body from the box body 219.
31 is provided, a support base 221 that swingably supports the middle of the arm 222 is attached to the support member 231, and the support member 231 to which the support base 221 is attached is attached to a pair of leaf springs 232.
There has been proposed an improved shape measuring machine having a mechanism for elastically supporting the box body 219 via the.

[Problems to be Solved by the Invention]

However, in this improved shape measuring instrument, when the stylus 223 is displaced in the direction of the arrow X when the object W has a smooth flat surface without grooves or the like, the stylus 223 and the object W are engaged with each other. The support member 231 is displaced in the horizontal and vertical directions in parallel link by the force of the force and the action of the leaf spring 232. Therefore, the arm 222 is displaced while the tip of the stylus 223 moves a minute distance.

Therefore, in the structure in which the support member 231 is suspended by the pair of leaf springs 232 as described above, compared with the case where the support base 221 is directly fixed to the box body 219 as shown in FIG. The inconvenience arises that the accuracy decreases.

Further, as shown by the chain double-dashed line in FIG. 7, when measuring the object to be measured W having an inclined surface shape, the swinging means is arranged so that the moving direction of the box body 219 coincides with this inclining direction. twenty one
When the box 219 is displaced along with 5 in the direction of arrow Q, the arm
222, the support base 221, the support member 231, etc., the leaf spring 2 due to its own weight.
32 will bend. Therefore, the stylus 223 cannot be set at a desired position, and as a result, it is difficult to perform precise measurement of the object W to be measured.

An object of the present invention is to provide a shape measuring machine capable of always measuring the surface shape of an object to be measured accurately without lowering the measurement accuracy even if the measuring machine is tilted.

[Means for Solving the Problems]

According to the present invention, a support unit formed separately from a moving member composed of a box or the like is movably supported by the moving member via an urging means, and between the supporting unit and the moving member. Holding means for preventing the bending of the biasing means, and clamp means for fixing the displacement of the supporting unit between the moving member and the supporting unit.

Here, the holding means is provided on either one of the support unit and the moving member along the displacement direction of the support unit, and has a clamp rod having a V groove in the middle, and is engaged with the V groove of the clamp rod. Roller pair and a pair of leaf springs that are provided on the other of the support unit and the moving member and constantly urge the roller pair toward the center of the clamp rod.

Further, the clamp means includes a hollow clamp holder into which a part of the support unit is inserted and which can hold the support unit, and a convex space portion into which a part of the clamp holder is inserted. It is preferable that it is configured to include a clamp knob that is formed and operates the clamp holder to grip the support unit.

Further, in the case where the clamp means includes a clamp holder and a clamp knob, the clamp holder has a truncated cone shape and is divided into a plurality of deformable distal end portions, and the distal end portion is integrated with the distal end portion. And a first peripheral surface provided with a female screw portion to be screwed into the screw portion of the clamp holder, It is preferable that the clamp holder is configured to include a second peripheral surface having a tapered surface that is engaged with a truncated cone shape of the tip end portion of the clamp holder.

[Action]

In the present invention thus configured, in order to measure the object to be measured, the stylus is brought into contact with the surface of the object to be measured and the moving member is displaced in a predetermined direction in the same manner as a general shape measuring machine. Do it.

If the moving member is tilted during this measurement,
Although the biasing means bends and the support unit and thus the arm tries to be displaced, the bending of the biasing means is prevented by the holding means. That is, since the roller pair of the holding means is engaged with the V groove of the clamp rod, the urging means is prevented from being bent more than necessary. Therefore, it is possible to prevent the measurement accuracy from deteriorating due to the deflection of the biasing means. Further, during the measurement, when the stylus is engaged with a groove or the like of the object to be measured and cannot be displaced, an excessive force acts on the holding means. In this case, the roller pair is disengaged from the V groove and the biasing means is bent,
The stylus tip is prevented from being deformed or damaged.

Further, when there is no risk of the stylus engaging with the object to be measured and being damaged, or when the shape measuring machine is transported, the supporting unit is completely fixed to the moving member by the clamp means. As a result, more accurate measurement can be ensured and a failure due to the displacement of the support unit during transportation can be prevented.

〔Example〕

The shape measuring machine according to the present invention will now be described in detail with reference to the accompanying drawings.

First, referring to FIG. 1, a schematic structure of an embodiment of the present invention will be described.

In FIG. 1, the shape measuring machine 1 according to the present embodiment includes a box body 10 as a moving member, and the box body 10 has a feed screw shaft 121 via a connector 11 having a nut member (not shown) built therein.
And is displaced in the arrow X direction as the feed screw shaft 121 rotates.

Inside the box body 10, a pair of left and right prismatic brackets 12, which are paired to the left and right, are hung from the front and rear of the box body, two pairs in total. A support unit 30 is supported on each of the brackets 12 via plate springs 15 as biasing means so as to be displaceable in the X direction, which is the displacement direction of the box body 10.

The support unit 30 is a bottom plate connected to the plate spring 15.
The bottom plate 31 includes a pair of front and rear support bases 32 provided upright on the bottom plate 31, and the arm 40 is mounted on the support bases 32 via a bearing member 33.
The middle of is supported swingably. A stylus 48 that abuts on the surface of the object to be measured W is projected from one end of the arm 40, and a balance weight 50 is attached to the other end so that the fixed position can be changed. Thus, by adjusting the fixed position of the balance weight 50, the arm 40 is set to be slightly heavier on the stylus 48 side, and the stylus 48 can be brought into contact with the surface of the object to be measured W with a slight biasing force. Has become.

A core 61 is provided in the middle of the arm 40, and the core 61 is inserted into a coil 62 attached to the bottom plate 31 of the support unit 30. These core 61 and coil 62
Thus, the differential transformer 60 as a displacement detecting means is configured, and the swing displacement amount of the arm 40 in the direction of the arrow G, and further the displacement amount of the stylus 48 can be detected.

A clamp rod 72 is attached to one end of the bottom plate 31 substantially horizontally via an attachment member 71. A V groove 72A is formed in the middle of the clamp rod 72, and a roller pair 74 rotatably supported by a leaf spring 73 is engaged with the V groove 72A. These leaf springs 73 are attached to the lower end portion of the bracket 13 hanging from the upper wall of the box body 10.

Here, the holding member 70 is configured by the mounting member 71, the clamp rod 72 having the V groove 72A, the leaf spring 73, and the roller pair 74. Therefore, the holding means 70 is provided between the support unit 30 and the box body 10 which is a moving member, and has a V groove.
By the engagement of the 72A and the roller pair 74, the bottom plate 31 of the support unit 30 is freely displaced, that is, a leaf spring as an urging means.
When the stylus 48 is engaged with the groove or the like of the object to be measured W and a force larger than the force at the time of normal measurement acts on the arm 40 and then the bottom plate 31 while restricting (preventing) the deflection of the V groove 15,
The engagement between 72A and the roller pair 74 is disengaged, the displacement of the bottom plate 31 is allowed, and the stylus 48 is prevented from being damaged.

The lower end of the bracket 13 is provided with a clamp means 80 that allows the tip of a clamp rod 72 protruding through the bracket 13 to be fixed and opened. Thus, when the shape of the object to be measured W is not likely to be damaged due to the engagement with the stylus 48, the clamp rod 72 is fixed by the clamp means 80, and the leaf spring of the support unit 30 is fixed. No displacement caused by 15 at all,
The accuracy of the measurement can be ensured.

Next, a more detailed and specific configuration of this embodiment will be described with reference to FIGS. 2 to 6.

FIG. 2 shows the overall configuration of this embodiment.

In FIG. 2, the shape measuring machine 1 according to the present embodiment includes a base 2, and the base 2 measures the object to be measured fixing means 90 for holding the object to be measured W and the surface shape of the object to be measured W. A measurement unit 110 including the box body 10 and an operation unit 5 having various buttons for displacing and driving the box body 10 which is a part of the measurement unit 110 are arranged.

The object fixing means 90 is a base 91 fixed to the base 2.
On this base 91, a cross movement table 92 composed of two tables (only one is shown in the drawing) movable in the X direction or the Y direction in the drawing is arranged. Handles 93 and 94 are provided on two side surfaces of the cross movement table 92 which are orthogonal to each other. When one of the handles 93 is rotated in the arrow A direction, the cross movement table 92 is moved to the arrow X. Direction, and the other handle 94 is rotated in the direction of arrow B,
92 is configured to be displaced in the arrow Y direction.

A substantially disk-shaped fixed base 95 is disposed on the cross movement table 92, and rotors 96 and 97 are attached to the fixed base 95. These rotors 96 and 97 are respectively indicated by arrows C.
When rotated in the direction, the fixed base 95 is displaceable in the directions of arrows X and Y.

A turntable 98 and a vise stand 99 are integrally provided on the fixed table 95, and a substantially L-shaped clamp bar 101 mounted on the turntable 98 is rotated in the direction of arrow D ₁ . Then, the turntable 98 and the vise base 99 are rotatable in the direction of arrow D with respect to the fixed base 95. In addition, the handle 10 provided on the vise base 99
When 2 is rotated in the direction of arrow B, the pair of trapezoidal blocks 103 and 104 provided on the vise base 99 are displaced in the directions of arrow Y and in the opposite directions, respectively, and these trapezoidal blocks are moved.
The object to be measured W can be held or released by 103 and 104.

The measuring unit 110 includes a support base 111 provided on the base 2, and a columnar body 112 is erected on the support base 111. A ball screw shaft 113 is rotatably provided in the cylindrical body 112 along its longitudinal direction, and a handle 114 is attached to the upper end of the ball screw shaft 113. When it is rotated in the D direction, the ball screw shaft 113 also rotates with the rotation. Further, a nut member 115 is screwed onto the ball screw shaft 113, and the nut member 115 is provided so as to surround the cylindrical body 112, and the protruding portion 116 is vertically movable on the cylindrical body 112. The holding plate 117 is fixed via.

On the holding plate 117, a drive detection device 120 that displaces and drives the box body 10 as the moving member in the direction of the arrow X, and that detects the displacement amount, is mounted so that the mounting angle can be adjusted, that is, can be tilted. Further, the holding plate 117 is provided with an angle adjusting mechanism 130 for tilting and displacing the drive detection device 120.

The angle adjusting mechanism 130 includes a prism body 131.
A scale plate engraved with a scale 132 indicating the tilt angle on the 131
133 is installed. Further, a handle 134 is provided on the upper part of the prism 131, and by rotating the handle 134 in the arrow D direction, the drive detection device 120 can be inclined in the arrow E direction by a predetermined inclination angle. There is. At this time, the inclination angle θ of the drive detection device 120 is determined by the horizontal line (θ = 0
The angle can be tilted counterclockwise by an inclination angle θ ₁ and clockwise by an inclination angle θ ₂ . These inclination angles θ ₁ and θ ₂ are preferably θ ₁ = θ ₂ = 10 °.

A transparent plate 122 is attached to the drive detection device 120, and a reference line 123 made of a red line is engraved on the transparent plate 122. The inclination angle of the drive detection device 120 is defined as the reference line 123. It is configured to display with the scale 132. Further, a moving means (not shown) for displacing the box body 10 as a moving member in the direction of the arrow X is provided in the drive detecting device 120, and a part of this moving means is shown in FIG. A screw shaft 121 is included, and the connecting tool 11 of the box body 10 is screwed onto the feed screw shaft 121.

The box body 10 has four prismatic brackets 1 described in the schematic configuration diagram of FIG. 1 and as shown in FIGS. 3 and 4.
2 and the support unit 30 via the leaf spring 15 as the urging means.
The bottom plate 31 is supported, and the deformation preventing members 16 for preventing the plate spring 15 from being deformed more than necessary are fixed to both sides of the plate spring 15 that suspends the bottom plate 31.

An arm 40, which is swingably supported via a bearing member 33 on a support base 32 provided upright on the bottom plate 31, includes a center member 41 supported by the bearing member 33, and left and right sides of the center member 41, respectively. A first arm 42 and a second arm 43 that are respectively inserted and fixed in the bored holes 41A and 41B, and eccentric to the first arm 42 via a rotating member 44 at the tip of the first arm 42, and 180
A third arm 45 which is reversibly attached is attached to the third arm 45, and a stylus 48 is detachably attached to the third arm 45. Further, the center member 41 has a pivot shaft.
The pivot shaft 34 is supported by a ball bearing 35 while the protrusion 34 is provided. Here, the bearing member 33 is constituted by the pivot shaft 34 and the ball bearing 35.

A photo interrupter 141 is fixed to the central member 41, and a tip of a T-shaped light shielding plate 142 fixed to the upper inner wall of the box body 10 is inserted into a slit 141A of the photo interrupter 141. As a result, the bottom plate 31 of the support unit 30 is displaced with respect to the box body 10 in the arrow X direction,
When the photo interrupter 141 together with the arm 40 is displaced in the X direction by a predetermined amount or more, the light blocking plate 142 is disengaged from the photo interrupter 141, so that it is detected that the arm 40 is displaced by a predetermined amount or more. Based on this detection signal, the drive by the drive detection device 120 is stopped as needed.

Further, a core 61 of the differential transformer 60 is fixed on the central member 41 via a bracket 63, and the core 61 is inserted in a coil 62 fixed to the bottom plate 31 of the support unit 30.

On the left end side of the box body 10 in FIGS. 3 and 4, a rocking regulation means 150 for regulating the rocking range of the arm 40 is provided. The swing restricting means 150 includes a substantially inverted L-shaped fixing plate 151 fixed to the upper inner wall of the box body 10, and a substantially lateral T-shaped holding plate 152 is fixed to the lower portion of the fixing plate 151. A guide bar 153 is inserted through the central convex portion 152A of the holding plate 152 so as to be vertically movable. This guide bar 153 has
Two coil springs 154 are externally mounted, and these coil springs 154 are provided with a central convex portion 152A of the holding plate 152 and a spring bearing 1 fixed above and below the guide bar 153.
Interposed between 55 and. This allows the guide bar 15
Reference numeral 3 indicates a so-called floating (floating), which is stopped at a predetermined position with respect to the holding plate 152 and is supported in a vertically movable state.
It is supported.

At both ends of the guide bar 153, substantially L-shaped mounting members 156 are provided.
The fixing pieces 157 are fixedly attached, and the restriction pieces 157 for adjusting the swinging range of the first arm 42 are attached to the tips of these attachment members 156 so as to be adjustable in position with a predetermined gap therebetween. Also,
A bending plate 158 is fixed to each of the mounting members 156,
Three photointerrupters 159, 161 and 162, one above the other, are arranged in a box so as to surround the ends of the folding plate 158.
It is arranged on the 10 side. As a result, the first arm 42 swings by a predetermined amount or more and comes into contact with one of the upper and lower regulating pieces 157,
Attach the mounting member 156 and the guide bar 153 to the coil spring 154.
When the bending plate 158 is disengaged from the photo interrupters 159, 161, 162, the regulation piece 157, and thus the swing of the first arm 42 by a predetermined amount or more, is detected, and the drive detection device 12
It is set to stop 0.

In FIGS. 3 and 4, a bracket 13 is fixed to the inside of the right side of the box body 10, and a motor 21 and a motor 13 are fixed to the bracket 13.
A limit mounting plate 23 for mounting a limit switch 22 for detecting the origin position of 21, a holding means 70 for preventing the leaf spring 15 from bending and the like, and a clamp rod 72 of the holding means 70.
Clamping means 80 for fixing is provided.

A disc 25 is fixed to an output shaft 24 (see FIG. 4) of the motor 21, and the first and second pins 26, 26 are provided at one end of the disc 25 and in the same plane in the vertical direction. 27 are attached respectively. The tip of an L-shaped lifting rod 28 for vertically swinging the second arm 43 is arranged between the first and second pins 26 and 27, and the base end of the lifting rod 28 is , Is fixed to the second arm 43.

As a result, the operating piece 22A of the limit switch 22 moves to the disk 25
At the origin position shown in the figure, which is engaged with the U groove 25A provided on the peripheral surface of the lifting rod 28,
Is located and the lifting rod 28 is not in contact with any of the pins 26, 27, the second arm 43 is freely swingable. When the motor 21 is driven in the direction of arrow F ₁ so that the upper first pin 26 moves downward,
Pin 26 forcibly pushes down the lifting rod 28,
It is designed to swing around the stylus 48 side around 33.

On the other hand, when the motor 21 is driven in the direction of the arrow F ₂ so that the lower second pin 27 moves upward, contrary to the above, the stylus 48 side of the arm 40 swings in the direction in which it is forcibly lowered. It is supposed to do.

The balance weight is provided on the right end side of the second arm 43.
50 is mounted so that its position can be adjusted. The balance weight 50 includes an elongated first weight 52 which can be fixed to the second arm 43 by a bolt 51, and the first weight 52.
And a second weight 54 which is slidable on the first weight 52 and can be fixed to the first weight 52 by a bolt 53.
By adjusting the position of the first weight 52 with the second weight 54 fixed to the first weight 52,
40 large balance adjustments, while the first weight
By adjusting the position of the second weight 54 with the second arm 43 fixed to the second arm 43, a fine balance adjustment of the arm 40 can be performed.

The holding means 70 and the clamp means 80 are provided below the motor 21. At this time, the holding means 70 and the clamping means 80 appear below the motor 21 in FIG. 4, but the drawing is complicated when they are overlapped, and therefore the holding means 70 and the clamping means 80 are shown in FIG. Are not shown.

The holding means 70 is, as shown in FIGS. 5 and 6, a clamp rod which is attached to an attachment member 71 arranged on the bottom plate 31 via an elastic support plate 75 composed of two leaf springs. 72
A roller pair 74 rotatably supported by a leaf spring 73 screwed to the bracket 13 via a rotary shaft 76 is engaged with the V groove 72A of the clamp rod 72.
This causes these roller pairs 74 to move to the clamp rod 72.
It is engaged with the V groove 72A by utilizing the elastic force of the leaf spring 73. That is, the leaf spring 73 is configured to constantly urge the roller pair 74 toward the center of the clamp rod 72, and when an axial force of a predetermined value or more is applied to the clamp rod 72, the roller pair 74 is moved. The clamp rod 72 rotates and disengages from the V-groove 72A and moves axially of the clamp rod 72, that is, the support unit
The movement of the bottom plate 31 of 30 in the X direction is allowed.

The bracket 13 is provided with a clamp means 80. This clamping means 80 is a bracket with a bolt 81.
The clamp holder 82 includes a hollow clamp holder 82 which is fixed to 13 and allows the clamp rod 72 to be inserted therethrough. The clamp holder 82 has a distal end portion 83 having a hollow truncated cone shape and a cylindrical body.
84 and 84 are integrally formed. The tip
A plurality of, for example, four notch grooves 83A are defined in the 83 at intervals of 90 °, and the tip end portion 83 has a so-called collet chuck shape.

On the other hand, a male screw portion 84A is formed on a part of the cylindrical body 84,
A clamp knob 85 is screwed onto the male screw portion 84A. A space portion 86 having a convex cross section is defined at one end of the clamp knob 85, and the space portion 86 includes the first peripheral surface 87 and the second peripheral surface 87.
The first peripheral surface 87 is provided with a female screw portion 87A, and the female screw portion 87A is provided with a clamp holder 82.
It is adapted to be screwed into the male screw portion 84A of. Further, a taper surface 88A is formed on the second peripheral surface 88 on the side of the first peripheral surface 87, and by rotating the clamp knob 85 in the directions of the arrows F ₁ and F ₂ , the taper surface 88A becomes a truncated cone. Shaped tip 83
It is formed so that the distal end portion 83 can be deformed inwardly by being slidably contacted with or separated from each other and further rotated in the same direction in the slidable contact state, and the clamp rod 72 can be pressed and fixed by the distal end portion 83. . At this time, before the deformation of the tip portion 83,
Of course, the clamp rod 72 and the clamp holder 82 are in a state of being separated from each other by a predetermined distance. Further, a rotary grip portion 89 is integrally provided on the outer circumference of the other end of the clamp knob 85, and the rotary grip portion 89 is projected from the box body 10 and can be operated by a finger from the outside of the box body 10. .

Next, the operation of this embodiment will be described.

First, the object to be measured W is placed on the vise base 99, and the handle 102
When is rotated in the direction of arrow B ₁ , the object to be measured W is held between the pair of trapezoidal blocks 103 and 104. After this,
The handles 93 and 94 are rotated in the directions of arrows A and B to move the cross movement table 92 to a desired position.

Next, when the handle 114 of the measuring unit 110 is rotated in the direction of the arrow D ₂ , the ball screw shaft 113 is also rotated in accordance with this rotation, and the drive detection device via the nut member 115, the protrusion 116 and the holding plate 117. 120 is raised. After the drive detection device 120 is lifted by a predetermined amount, the rotation operation is stopped. Further, the handle 134 of the angle adjusting mechanism 130 is rotated in the direction of the arrow D ₂ , and when the drive detection device 120 is tilted by an angle corresponding to the tilt angle of the measured object W, the rotation is stopped.

After that, the drive detector 120 is lowered to the position where the stylus 48 contacts the surface of the object W to be measured, and the balance weight 5
By the action of 0, the stylus 48 is adjusted to come into contact with the object to be measured W at a desired pressure. At this time, the clamp rod
Since the roller pair 74 is engaged with the V groove 72A of 72, the four leaf springs 15 do not bend more than necessary. Also, the box 10
Is driven most by the drive of the drive detection device 120 in the arrow X ₁ direction in the figure.

In this state, the operation unit 5 is operated to drive the drive detection device 12
When the moving means (not shown) of 0 is driven to displace the box body 10 in the direction of the arrow X ₂ contrary to the above, the stylus 48 is displaced along the surface shape of the object to be measured W, and this displacement is It is detected by the differential transformer 60. From the detected value of the differential transformer 60 and the feed amount of the drive detection device 120 in the arrow X ₂ direction, the shape of the object W to be measured in a predetermined cross section is measured. When the measurement of this one cross section is completed, the displacement is stopped.

After that, when the motor 21 in the box body 10 is rotated in the direction of arrow F ₁ , the disk 25 is also rotated along with this rotation, whereby
The upper first pin 26 comes into contact with the elevating rod 28 to displace the elevating rod 28 downward. As a result, the second arm 43 is displaced downward, and with this displacement, the first and third arms 42, 45 are raised about the support base 32, and the stylus 48 is finally measured. Separate from the object W. At this time, one handle 94 of the cross movement table 92 is rotated in the direction of the arrow B _{1 to} move the object to be measured W in the direction of the arrow Y ₁ by a minute distance, and then the operating unit 5 is operated again to move the box body 10 into position. Arrow
The stylus 48 is moved forward in the X ₁ direction to position the stylus 48 on the measurement surface of the measured object W at a cross-sectional position different from the above, and the motor 21 is slowly rotated in the F ₂ direction to move the stylus.
Gently bring 48 into contact with the measurement surface. The driving of the motor 21 in the direction of arrow F ₂ is performed until the operating piece 22A of the limit switch 22 is engaged with the U groove 25A of the disk 25.

In this state, move the box 10 again in the direction of the arrow X ₂ and
By repeating the above steps, all the surface shapes of the object W to be measured are measured.

In the measurement, for example, if a groove (not shown) which substantially coincides with the stylus 48 is present on the object to be measured W, the stylus 48 engages with the groove and stops there, while the box body 10 is displaced as it is. When both of them are displaced in this way, the roller pair 74 of the holding means 70 in the box body 10 is removed while rotating from the V groove 72A, and the box body 10 and the support unit 30 are relatively displaced in the arrow X direction. As a result, the photo interrupter 141 fixed to the central member 41 of the arm 40 is moved relative to the box 10 by the arrow X.
_It is moved in _one direction and a signal is emitted. This signal is transmitted to a motor (not shown) that rotates the feed screw shaft 121 in the drive detection device 120, so that this motor is stopped and that the holding means 70 is activated, such as a buzzer (not shown).
Be informed. Therefore, the tip shape of the stylus 48 is not deformed.

Further, when measuring the surface shape of the object to be measured W, if there is no large unevenness in the surface shape, the rotary grip portion 89 of the clamp knob 85 is rotated in the direction of the arrow F ₁ for more precise measurement. . As a result, the tapered surface 88A is brought into sliding contact with the peripheral surface of the truncated cone-shaped tip portion 83, the tip portion 83 is deformed inward, and the clamp rod 72 is pressed and fixed. The rotation operation of the clamp knob 85 stops the rotation operation when a predetermined pressing force is applied to the clamp rod 72.

When the clamp rod 72 is fixed to the tip end portion 83 of the clamp holder 82 in this manner and the above steps are repeated for measurement, the leaf spring 15 supporting the support unit 30 does not bend at all, so that it is more precise. You can measure.

According to this embodiment as described above, there are the following effects.

That is, the support unit 30 that holds the arm 40 is a box body.
Since the box body 10 is tilted at a predetermined angle, the bottom stand 31 of the support unit 30 is provided with a support base 32, an arm 40, a differential transformer 60, etc. As a result, the four leaf springs 15 tend to bend due to their weight. However, in this embodiment, the holding means 70 is provided, and the roller pair 74 of the holding means 70 is connected to the clamp rod 72.
Since it is engaged with the V groove 72A, the leaf spring 15 is prevented from being bent more than necessary. This allows the stylus 48
Can be brought into contact with the object to be measured W at a desired position, and as a result, the surface shape of the object to be measured W can be accurately measured.

Further, during measurement, if the stylus 48 is engaged with a groove (not shown) of the object to be measured W or the like and cannot be displaced,
Since an excessive force acts on the holding means 70, in this case, the roller pair 74 is disengaged from the V groove 72A and the leaf spring 15 is bent, so that it is possible to prevent the tip of the stylus 48 from being deformed or damaged. The effect that becomes is also obtained. At this time, when the amount of bending of the leaf spring 15 increases, the amount of relative displacement between the box body 10 and the center member 41 of the arm 40 increases, and this displacement is detected by the photo interrupter 141. As a result, driving of the box body 10 by the drive detection device 120 is stopped, and damage to the stylus 48 or the like is more completely prevented.

Further, when there is no large unevenness in the surface shape of the object to be measured W, the rotary grip portion 89 of the clamp knob 85 constituting the clamp means 80 can be rotated in the direction of the arrow F ₁ to rotate the clamp rod.
72 is firmly fixed by the tip 83 of clamp holder 82, so stylus 48
Does not displace a minute distance in the direction of the arrow X, and as a result, an effect that more precise measurement is possible is obtained.

Although the present invention has been described with reference to the preferred embodiments, the present invention is not limited to these embodiments, and various improvements and design changes can be made without departing from the scope of the present invention. Of course.

For example, the leaf spring 15 as an urging unit that supports the support unit 30 may be a wire spring, a coil spring, or the like, and in short, may be a member that holds the support unit 30 with a predetermined urging force. Further, the arm 40 includes the central member 41, the first, second, and third members.
The present invention is not limited to the arm 42, 43, 45 and the like, but may be a single rod-shaped member. Further, the bearing member 33 that holds the arm 40 swingably is not necessarily limited to the pivot bearing type, but may be a radial bearing or the like.

Further, the holding means 70 is not limited to the one constituted by the clamp rod 72 provided on the support unit 30 side, the roller pair 74 provided on the box body 10 side, etc., but the clamp rod 72 is a box member that is a moving member. The roller pair 74 may be provided on the support unit 30 side on the 10 side. In short, the holding means 70 may be any one that is provided between the support unit 30 and the box body 10 that is the moving member and that can prevent the leaf spring 15 as the urging means from bending.

Further, the moving member does not necessarily have to be the box body 10, and its shape or the like does not matter, but it is possible to prevent interference with other members by incorporating the support unit 30 or the like as the box body 10 and to improve the appearance. Has the advantage of being good.

Further, the clamp means 80 is not limited to the configuration of the above-described embodiment, and the bottom plate 31 of the support unit 30 is directly fixed to the box body 10, or the like.
Other configurations may be used, in short, the support unit 30 may be replaced by the box 10
As long as it can be fixed (clamped) to the support unit 30, its position with respect to the support unit 30 does not matter.

Furthermore, the idea of the present invention can be applied to a shape measuring machine in which the drive detection device 120 is tilted by about ± 45 °.

〔The invention's effect〕

According to the present invention as described above, since the holding means of the biasing means for supporting the support unit is provided, even when the arm having the stylus is used in a tilted state, it is possible to prevent the adverse effect due to the tilting. . Further, the provision of the clamp means for the support unit has an effect that more precise measurement can be performed.

[Brief description of drawings]

FIG. 1 is a sectional view showing a schematic structure of a main part of an embodiment of the present invention, and FIG. 2 is a perspective view showing an entire structure of the present embodiment.
FIG. 3 is a longitudinal sectional view showing the inside of the box of the present embodiment, FIG. 4 is a transverse sectional view of the same, FIG. 5 is a sectional view taken along the line VV of FIG. 3, and FIG. FIG. 7 is an exploded perspective view showing portions of the holding means and the clamping means of the example, FIG. 7 is a front view showing the entire configuration of a conventional example, and FIG. 1 ... Shape measuring machine, 5 ... Operation part, 10 ... Box body as moving member, 15 ... Leaf spring as biasing means, 30 ... Support unit, 40 ... Arm, 48 ... Stylus, 50 ... Balance weight, 60 ... Differential transformer as displacement detecting means, 70 ... Holding means, 72 ... Clamp rod, 72A ...
... V groove, 73 ... leaf spring, 74 ... roller pair, 80 ... clamping means, 82 ... clamp holder, 83 ... tip part, 83A ...
… Notched groove, 84 …… Cylinder, 84A …… Male screw part, 85 …… Clamp knob, 86 …… Space part, 87 …… First peripheral surface, 87A…
… Female thread, 88 …… Second circumferential surface, 88A… Tapered surface, 90…
… Measures fixing means, 110 …… Measurement part, 120 …… Drive detector, 130 …… Angle adjustment mechanism, W …… Measures.

Claims (3)

[Claims] 1. An arm is swingably supported by a moving member, and the stylus attached to one end of the arm is brought into contact with an object to be measured with a predetermined pressure to move the moving member substantially in a predetermined direction. By linearly displacing, the stylus is displaced along the surface shape of the object to be measured and the arm is rocked, and the rocking of the arm is detected by the displacement detecting means to measure the surface shape of the object to be measured. In the shape measuring machine, a support unit that is movably supported by the moving member in the displacement direction of the moving member via urging means and that swingably supports the arm, the supporting unit and the moving member. Holding means for preventing the deflection of the biasing means and permitting the deflection of the biasing means when a force larger than the force at the time of normal measurement is applied to the stylus; A clamp unit that is provided between the moving member and the support unit and that fixes the support unit to the moving member to prevent displacement of the support unit; and the holding unit is one of the support unit and the moving member. A clamp rod provided along the displacement direction of the support unit and having a V groove in the middle, a roller pair engaged with the V groove of the clamp rod, and provided on the other of the support unit and the moving member. A shape measuring machine comprising: a pair of leaf springs that constantly urge the roller pair toward the center of the clamp rod. 2. The shape measuring machine according to claim 1, wherein said clamp means has a hollow clamp holder into which a part of said support unit is inserted and which can hold said support unit, and the clamp holder. A shape measuring machine comprising: a convex space into which a part is inserted; and a clamp knob for operating the clamp holder to grip the support unit. 3. The shape measuring machine according to claim 2, wherein the clump holder has a truncated cone shape and is divided into a plurality of deformable distal end portions, and is integrally formed with the distal end portion. And a cylindrical body provided with a male screw portion, and the clamp knob is
A first peripheral surface provided with a female screw portion to be screwed into the male screw portion of the clamp holder, and a second peripheral surface having a tapered surface engaged with the truncated cone shape of the tip end portion of the clamp holder. A shape measuring machine characterized by being configured.