JPH0789470B2 - Image display tube manufacturing method - Google Patents
Image display tube manufacturing methodInfo
- Publication number
- JPH0789470B2 JPH0789470B2 JP28992685A JP28992685A JPH0789470B2 JP H0789470 B2 JPH0789470 B2 JP H0789470B2 JP 28992685 A JP28992685 A JP 28992685A JP 28992685 A JP28992685 A JP 28992685A JP H0789470 B2 JPH0789470 B2 JP H0789470B2
- Authority
- JP
- Japan
- Prior art keywords
- image display
- display tube
- gas
- vacuum
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 238000010438 heat treatment Methods 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 10
- 238000007789 sealing Methods 0.000 description 7
- 238000007872 degassing Methods 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000009125 cardiac resynchronization therapy Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
Landscapes
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は画像表示装置に使用される平板画像表示管の製
造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a flat panel image display tube used in an image display device.
従来の技術 近年、平板画像表示装置がさかんに開発されており、液
晶ディスプレイ（LCD）、エレクトロルミネッセンスデ
ィスプレイ（EL）、発光ダイオードディスプレイ（LE
D）などが市場に登場しているが、輝度、解像度、フル
カラー化の点でカラーブラウン管に劣っている。これら
の問題点を解消したのが、熱陰極を利用した平板テレビ
で、画質、フルカラー化の点で充分ブラウン管に筆適す
るところまで開発がすすんでいる。2. Description of the Related Art In recent years, flat panel image display devices have been actively developed, and liquid crystal displays (LCD), electroluminescence displays (EL), light emitting diode displays (LE) have been developed.
Although D) and others have appeared on the market, they are inferior to color CRTs in terms of brightness, resolution, and full colorization. To solve these problems, flat panel TVs that use hot cathodes are being developed to the extent that they are suitable for CRTs in terms of image quality and full color.
この種の平板画像表示管の構造を、第２図を参照しなが
ら説明する。本平板画像表示管は、熱電子放射を利用し
たもので、約650℃に加熱された線状熱陰極21から放射
された電子は、集束電極22により集束され垂直偏向電極
23により垂直方向に16段に偏向される（16段/cm）。垂
直に偏向した電子ビームは、変調電極24により輝度に応
じてビーム量を制限され、水平偏向電極25により水平方
向に偏向される（６段/mm）。そして、RGBの螢光体をス
トライプ状に塗布したアノード26に10kVで加速して、衝
突、発光させるのである。The structure of this type of flat image display tube will be described with reference to FIG. This flat panel image display tube uses thermionic emission, and the electrons emitted from the linear hot cathode 21 heated to about 650 ° C. are focused by a focusing electrode 22 and a vertical deflection electrode.
It is vertically deflected by 23 to 16 steps (16 steps / cm). The electron beam deflected vertically is limited in beam amount by the modulation electrode 24 according to the brightness, and is deflected in the horizontal direction by the horizontal deflection electrode 25 (6 steps / mm). Then, the anode 26 coated with stripes of RGB phosphors is accelerated at 10 kV to collide and emit light.
この画像表示管の製造工程を以下で、第３図，第４図を
使って説明する。まず、第２図に示した平板状電極群を
組み立て、第３図の真空外囲器31a,31b中に組み込む。
次に電気炉により450℃に加熱し、封着部材32を溶融し
て、封着を行なう。ここで真空外囲器31a,31bは軟質ガ
ラス（熱膨脹係数100.5×10-7）を、また封着部材とし
ては、熱膨脹係数のマッチングをとるために95〜100×1
0-7のフリット（例えば、岩城硝子社製IWF−029）を用
いる。封着工程終了後、排気管33から、真空ポンプを用
いて排気し、約10-5Torr程度の圧力に保持しつつ、300
℃迄加熱して、真空外囲器3a,3b内部の脱ガスを行な
う。この排気、加熱の工程をあわせてベーキング工程と
いう。ベーキング工程終了後、真空外囲器31a,31b内部
の線状熱陰極21の熱分解を行なう。熱電子放射源として
は、（Ba,Sr,Ca）CO3を真空中において約1000℃に加熱
して（Ba,Sr,Ca）Ｏに分解したものを用いる。そして加
熱分解終了後、排気管33を加熱して封じ切り、平板画像
表示管が完成する。The manufacturing process of this image display tube will be described below with reference to FIGS. 3 and 4. First, the flat electrode group shown in FIG. 2 is assembled and incorporated into the vacuum envelopes 31a and 31b shown in FIG.
Next, it is heated to 450 ° C. in an electric furnace to melt the sealing member 32 and perform sealing. Here, the vacuum envelopes 31a and 31b are made of soft glass (coefficient of thermal expansion 100.5 × 10 −7 ), and the sealing member is 95 to 100 × 1 in order to match the coefficient of thermal expansion.
0 -7 frit (e.g., manufactured by Iwaki Glass IWF-029) is used. After the sealing process is completed, the exhaust pipe 33 is evacuated using a vacuum pump to maintain the pressure at about 10 -5 Torr and
After heating up to ℃, the inside of the vacuum envelopes 3a and 3b is degassed. The process of exhausting and heating is collectively called a baking process. After the baking process is completed, the linear hot cathode 21 inside the vacuum envelopes 31a and 31b is pyrolyzed. As the thermionic emission source, a source obtained by heating (Ba, Sr, Ca) CO 3 to about 1000 ° C. in a vacuum to decompose it into (Ba, Sr, Ca) O is used. After the thermal decomposition is completed, the exhaust pipe 33 is heated and sealed to complete the flat panel image display tube.
発明が解決しようとする問題点 本画像表示管のベーキング工程は、300℃がピークにな
るように加熱し、所要時間は約10時間である。一方、従
来のブラウン管では、ピーク温度が約400℃、所要時間
が約３〜４時間であり、本画像表示管と比較すると、ピ
ーク温度で約100℃、所要時間で６〜７時間の差があ
る。この所要時間の差は、本画像表示管の場合、平板電
極及びそれらを支えている枠体などの金属、セラミック
などが、ブラウン管と較べ多量に入っており、空間に対
する密度も５倍以上高く、また真空外囲器のガラスの厚
さも1.5倍ほど厚いため、ブラウン管と同じスピードで
加熱すると、真空外囲器内外の温度差が大きくなり、真
空外囲器が破損してしまうためである。また、封着部材
として使用しているフリットの軟化点は約370℃あるた
め、真空外囲器を300℃以上加熱する場合、温度コント
ロールがむずかしく、真空外囲器が破損することがあ
る。このような真空外囲器の破損に加え、真空外囲器表
面の温度が300℃に到達しても、内部は270℃程度しか上
がらず、封じ切り後発生する残留ガスにより真空度が悪
くなり、寿命が劣化する可能性があるという問題点を有
していた。Problems to be Solved by the Invention In the baking process of the present image display tube, heating is performed so that the peak temperature is 300 ° C., and the required time is about 10 hours. On the other hand, the conventional cathode ray tube has a peak temperature of about 400 ° C. and a required time of about 3 to 4 hours. Compared with this image display tube, the peak temperature is about 100 ° C. and the required time is 6 to 7 hours. is there. In the case of the present image display tube, the difference in the required time is that the plate electrodes and the metal such as the frame supporting them and ceramics are contained in a large amount as compared with the cathode ray tube, and the density with respect to the space is more than 5 times higher Also, because the glass thickness of the vacuum envelope is about 1.5 times thicker, heating at the same speed as the cathode ray tube increases the temperature difference between the inside and the outside of the vacuum envelope, and the vacuum envelope is damaged. Further, since the frit used as the sealing member has a softening point of about 370 ° C., when the vacuum envelope is heated to 300 ° C. or more, temperature control becomes difficult and the vacuum envelope may be damaged. In addition to such damage to the vacuum envelope, even if the temperature of the surface of the vacuum envelope reaches 300 ° C, the internal temperature rises only about 270 ° C and the degree of vacuum deteriorates due to residual gas generated after sealing. However, there is a problem that the life may deteriorate.
本発明は上記問題点に鑑み、従来に較べ短時間の脱ガス
工程で、真空外囲器を破損せず、長寿命の画像表示管の
製造方法を提供するものである。In view of the above problems, the present invention provides a method of manufacturing a long-life image display tube that does not damage a vacuum envelope in a degassing process in a shorter time than conventional ones.
問題点を解決するための手段 上記問題点を解決するために、本発明の画像表示管の製
造方法は、電離気体を画像表示管内に導入し、電極に電
圧をかけ、電極に電離気体を加速、衝突させつつ、外部
から画像表示管を加熱するという構成を備えたものであ
る。Means for Solving the Problems In order to solve the above problems, the method for producing an image display tube of the present invention is to introduce an ionized gas into the image display tube, apply a voltage to the electrodes, and accelerate the ionized gas to the electrodes. The image display tube is heated from the outside while causing the collision.
作用 本発明は、画像表示管内に導入された電離気体を、加速
して電極に衝突させることにより、電極表面に吸着され
ている気体を離脱させ、封じ切り後、圧力上昇の原因と
なる気体を排気してしまう。それに加え、電離気体の圧
力，電極電圧をコントロールすることにより、電極に流
れ込む電流で電極を加熱し、同時に画像表示管外部から
も加熱することによって、真空外囲器内外に発生する温
度差をセーブして、従来より速いスピードで加熱でき、
かつ真空外囲器の破損も発生しなくなる。Effect The present invention accelerates the ionized gas introduced into the image display tube to collide with the electrode to release the gas adsorbed on the electrode surface, and after sealing off the gas causing the pressure increase. I will exhaust it. In addition to that, by controlling the pressure of the ionized gas and the electrode voltage, the electrode is heated by the current flowing into the electrode, and at the same time it is also heated from outside the image display tube, saving the temperature difference generated inside and outside the vacuum envelope. And can be heated at a faster speed than before,
Moreover, the vacuum envelope is not damaged.
実施例 以下本発明の一実施例の画像表示管の製造方法につい
て、図面を参照しながら説明する。Example A method of manufacturing an image display tube according to an example of the present invention will be described below with reference to the drawings.
第１図は、本発明の実施例における画像表示管の製造方
法の脱ガス工程を示す概念図である。FIG. 1 is a conceptual diagram showing a degassing step of a method for manufacturing an image display tube according to an embodiment of the present invention.
第１図において１は画像表示管の真空外囲器で、内部に
電極群が設けてあるが、ここでは簡単のため２枚に略し
てある。この真空外囲器１内に、Ar+３を排気管４から
導入する。Ar+３はAr5をバルブ６を通じて導入し、排気
管の途中に巻いてある高周波コイル７（本実施例では周
波数13.56MHzを用いた。）により電離させる。ここで、
真空度のコントロールは、ニードルバルブ８により行な
い、５×10-2Torrに保持した。電極2a,2bには−100Vの
電圧が印加されており、排気管４から導入されたAr+３
は加速され電極2a,2b表面に衝突する。この衝突によ
り、電極2a,2b表面に吸着しているH2Oを主とする気体分
子は、はじき出され、電極2a,2bの表面は洗浄化され
る。しかしAr+３を電極2a,2bに加速、衝突させただけで
は、真空外囲器１に吸着している気体分子は表面を離脱
しない。そこで上述のシステムを電気炉９に組み込み、
同時に外部から加熱することにより、真空外囲器１内全
体の脱ガスを行なう。そして、加熱、放電洗浄を続け
て、温度が300℃に到達した段階でニードルバルブ８を
閉め、バルブ６をディフュージョンポンプ10に切り換
え、真空外囲器１を真空排気し10-5Torr以下の真空度に
し、従来例と同様の工程をとる。あるいは、このディフ
ュージョンポンプ10による真空排気の工程を、昇温中に
２〜３回放電洗浄と交互に繰り返した方が、より一層脱
ガス効果が上がることは言うまでもない。In FIG. 1, reference numeral 1 is a vacuum envelope of the image display tube, and an electrode group is provided inside, but for simplicity, it is omitted here to be two. Ar + 3 is introduced into the vacuum envelope 1 through the exhaust pipe 4. Ar + 3 is introduced by introducing Ar 5 through a valve 6 and ionizing it by a high frequency coil 7 (a frequency of 13.56 MHz is used in this embodiment) wound in the middle of an exhaust pipe. here,
The degree of vacuum was controlled by the needle valve 8 and maintained at 5 × 10 -2 Torr. A voltage of -100V is applied to the electrodes 2a and 2b, and Ar + 3 introduced from the exhaust pipe 4
Is accelerated and collides with the surfaces of the electrodes 2a and 2b. By this collision, gas molecules mainly containing H 2 O adsorbed on the surfaces of the electrodes 2a and 2b are repelled, and the surfaces of the electrodes 2a and 2b are cleaned. However, only by accelerating and colliding Ar + 3 with the electrodes 2a and 2b, the gas molecules adsorbed in the vacuum envelope 1 do not leave the surface. Therefore, the above system was installed in the electric furnace 9,
At the same time, by heating from the outside, the entire inside of the vacuum envelope 1 is degassed. Then, heating and discharge cleaning are continued, and when the temperature reaches 300 ° C, the needle valve 8 is closed, the valve 6 is switched to the diffusion pump 10, and the vacuum envelope 1 is evacuated to a vacuum of 10 -5 Torr or less. The same steps as in the conventional example are taken. Alternatively, it is needless to say that the degassing effect is further enhanced by repeating the process of vacuum evacuation by the diffusion pump 10 with the discharge cleaning 2-3 times while the temperature is rising.
この電離気体の加速衝突するときのエネルギーは数eV〜
数100eV（この実施例では100ev）で、温度換算で、1eV
104Ｋであることから、電極の洗浄効果が上がるた
め、加熱温度が300℃でも、従来よりも格段と放出ガス
量が減少した。The energy of this ionized gas in an accelerated collision is several eV ~
Several hundred eV (100 ev in this example), 1 eV in terms of temperature
Since it is 10 4 K, the cleaning effect of the electrode is improved, so that even when the heating temperature is 300 ° C, the amount of released gas is remarkably reduced as compared with the conventional case.
また、電極2a,2bにAr+が加速、衝突し、電流が流れるこ
とにより熱が発生する。従来、外部からのみ加熱してい
た時は、真空外囲器１の内外の温度差が大きくならない
ように加熱しなければいけなかったため、ベーキング工
程で10時間以上費やされていたが、本実施例では内部か
らも発熱するため、加熱スピードを上げることができる
ようになり、ベーキング所要時間が半分以下になった。Further, Ar + is accelerated and collides with the electrodes 2a and 2b, and a current flows, so that heat is generated. Conventionally, when heating only from the outside, it was necessary to heat so that the temperature difference between the inside and outside of the vacuum envelope 1 did not become large, so it took 10 hours or more in the baking process, but this implementation In the example, heat is generated from the inside as well, so the heating speed can be increased, and the required baking time has been halved.
発明の効果 以上のように本発明は、電離した気体を画像表示管中に
導入し、中に設けてある電極群に電圧を印加し、電離気
体を電極に加圧衝突させる装置を、画像表示管を加熱す
る炉に設けることにより、従来の半分の所要時間でベー
キング工程を行なえ、かつ高真空、長寿命の画像表示管
を製造することができる。As described above, the present invention introduces an ionized gas into the image display tube, applies a voltage to the electrode group provided therein, and causes the ionized gas to collide with the electrode under pressure. By providing the tube in a furnace for heating, the baking step can be performed in half the time required by the conventional method, and a high-vacuum, long-life image display tube can be manufactured.
第１図は本発明による画像表示管の製造方法を用いるた
めの画像表示管の脱ガス装置の側断面図、第２図は画像
表示管内部の斜視図、第３図は画像表示管の真空外囲器
の斜視図である。 １……真空外囲器、２……電極、３……Ar+、４……排
気管、５……Ar、７……高周波コイル、９……電気炉。FIG. 1 is a side sectional view of a degassing device for an image display tube for using the method for manufacturing an image display tube according to the present invention, FIG. 2 is a perspective view of the inside of the image display tube, and FIG. 3 is a vacuum of the image display tube. It is a perspective view of an envelope. 1 ... vacuum envelope, 2 ... electrode, 3 ... Ar + , 4 ... exhaust pipe, 5 ... Ar, 7 ... high frequency coil, 9 ... electric furnace.
Claims (7)
に電極群を収納配置した真空外囲器に、前記排気管から
電離した気体を導入し、前記電極群に電圧をかけ、前記
電離気体を加速、衝突させ、前記真空外囲器内を洗浄す
ることを特徴とする画像表示管の製造方法。1. An ionization gas is introduced from the exhaust pipe into a vacuum envelope having at least one exhaust pipe and in which an electrode group is housed and arranged, a voltage is applied to the electrode group, and the ionization is performed. A method of manufacturing an image display tube, comprising accelerating and colliding gas to clean the inside of the vacuum envelope.
しめた電離手段によって、前記排気管を通過中において
前記電離手段によって電離されて、真空外囲器に導入さ
れることを特徴とする特許請求の範囲第１項記載の画像
表示管の製造方法。2. The ionized gas is ionized by the ionizing means provided in the exhaust pipe while being passed through the exhaust pipe, and introduced into the vacuum envelope. A method of manufacturing an image display tube according to claim 1.
範囲において、気体を電離させることを特徴とする特許
請求の範囲第１項記載の画像表示管の製造方法。3. The method for producing an image display tube according to claim 1, wherein the gas is ionized in the image display tube within a pressure range of 1 to 1 × 10 −5 Torr.
に加速、衝突させる工程を連続または断続的に行うこと
を特徴とする特許請求の範囲第１項記載の画像表示管の
製造方法。4. The method for producing an image display tube according to claim 1, wherein the step of accelerating and colliding the ionized gas with the electrode group is carried out continuously or intermittently in the image display tube.
に加速、衝突させる工程中、または休止中、外部から真
空外囲器を加熱することを特徴とする特許請求の範囲第
１項記載の画像表示管の製造方法。5. The vacuum envelope is heated from the outside during the step of accelerating and colliding the ionized gas with the electrode group in the image display tube, or during rest. Image display tube manufacturing method.
気体を電極群に加速、衝突させる工程終了後に、真空排
気することを特徴とする特許請求の範囲第１項記載の画
像表示管の製造方法。6. The manufacturing method of an image display tube according to claim 1, wherein in the step of heating the image display tube, the step of accelerating and colliding the ionized gas with the electrode group is completed, and then vacuum evacuation is performed. Method.
に加速、衝突させる工程中、少なくとも１回真空排気を
行うことを特徴とする特許請求の範囲第１項記載の画像
表示管の製造方法。7. The method of manufacturing an image display tube according to claim 1, wherein the vacuum evacuation is performed at least once during the step of accelerating and colliding the ionized gas with the electrode group in the image display tube. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28992685A JPH0789470B2 (en) | 1985-12-23 | 1985-12-23 | Image display tube manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28992685A JPH0789470B2 (en) | 1985-12-23 | 1985-12-23 | Image display tube manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62147631A JPS62147631A (en) | 1987-07-01 |
| JPH0789470B2 true JPH0789470B2 (en) | 1995-09-27 |
Family
ID=17749547
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28992685A Expired - Fee Related JPH0789470B2 (en) | 1985-12-23 | 1985-12-23 | Image display tube manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0789470B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2832510B2 (en) * | 1994-05-10 | 1998-12-09 | 双葉電子工業株式会社 | Display device manufacturing method |
-
1985
- 1985-12-23 JP JP28992685A patent/JPH0789470B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62147631A (en) | 1987-07-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7326097B2 (en) | Method and apparatus for manufacturing image displaying apparatus | |
| US6129603A (en) | Low temperature glass frit sealing for thin computer displays | |
| US3743879A (en) | Cold cathode display panel having a multiplicity of gas cells | |
| US6827621B1 (en) | Method and apparatus for manufacturing flat image display device | |
| US7112353B2 (en) | Film deposition apparatus and film deposition method | |
| US3899636A (en) | High brightness gas discharge display device | |
| US6414429B2 (en) | Faceplates having scrubbed cathodoluminescent layers for field emission displays | |
| JPH0789470B2 (en) | Image display tube manufacturing method | |
| JP2727224B2 (en) | Method of manufacturing image display device | |
| JP2992901B2 (en) | Method of manufacturing image display device | |
| JP3454499B2 (en) | Method of manufacturing image display device | |
| JP3062023B2 (en) | Vacuum envelope and image display device | |
| JP4235058B2 (en) | Manufacturing method of display device | |
| JP3639762B2 (en) | Image forming apparatus manufacturing apparatus | |
| JPH1064429A (en) | Method of manufacturing image display device | |
| JPH02270250A (en) | Electron tube manufacturing method | |
| KR20020040259A (en) | Field emission display | |
| KR20050004371A (en) | Field emission device and manufacturing method thereof | |
| JP2005332698A (en) | Image forming apparatus and manufacturing method | |
| KR20040067034A (en) | Field emission display and method for fabricating thereof | |
| WO2000052728A1 (en) | Air-tight device, electron beam device, and image forming device | |
| JPH0668799A (en) | Manufacture of display device | |
| JP2009076285A (en) | Manufacturing method and manufacturing device of vacuum device | |
| JPH11317155A (en) | Image forming apparatus and method of manufacturing electron beam generator | |
| WO2007114440A1 (en) | Method for manufacturing image display |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |