JPH0789746B2 - Surface wave motor - Google Patents
Surface wave motorInfo
- Publication number
- JPH0789746B2 JPH0789746B2 JP61221468A JP22146886A JPH0789746B2 JP H0789746 B2 JPH0789746 B2 JP H0789746B2 JP 61221468 A JP61221468 A JP 61221468A JP 22146886 A JP22146886 A JP 22146886A JP H0789746 B2 JPH0789746 B2 JP H0789746B2
- Authority
- JP
- Japan
- Prior art keywords
- stator
- elastic body
- vibrating
- piezoelectric element
- wave motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
- H02N2/163—Motors with ring stator
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【発明の詳細な説明】 「産業上の利用分野」 本発明は、圧電素子および該圧電素子により励振される
弾性体から成る固定子と、該固定子に圧接され、該固定
子に生じる超音波振動の表面進行波によって該固定子の
面上を移動する弾性体である移動子とから成る表面波モ
ータに関する。TECHNICAL FIELD The present invention relates to a stator composed of a piezoelectric element and an elastic body excited by the piezoelectric element, and an ultrasonic wave generated in the stator by pressure contact with the stator. The present invention relates to a surface wave motor including a moving element that is an elastic body that moves on the surface of the stator by a surface traveling wave of vibration.
「従来の技術」 超音波振動を利用した表面波モータは、振動源である固
定子の振動を妨げないようにする種々の支持固定の仕方
が工夫されており、従来の技術としては次のようなもの
がある。“Prior Art” Surface acoustic wave motors that utilize ultrasonic vibration are devised in various ways to support and fix them so as not to interfere with the vibration of the stator that is the vibration source. There is something like this.
(1)固定子の駆動面(回転子が圧接される面)と反対
側の面にフェルト等の緩衝材を設けて支持する。(1) A cushioning material such as felt is provided and supported on the surface opposite to the drive surface (the surface on which the rotor is pressed) of the stator.
(2)固定子横断面における中立軸上で固定子の内周側
あるいは外周側に複数の補助振動部材あるいはフランジ
を設けて支持する。(2) A plurality of auxiliary vibration members or flanges are provided and supported on the inner peripheral side or outer peripheral side of the stator on the neutral axis in the cross section of the stator.
「発明が解決しようとする問題点」 しかしながら(1)の方法で固定子を支持する場合、固
定子を構成する弾性体(通常の金属材料)の弾性係数が
圧電素子と同等から3倍程度あるため、固定子横断面に
おける撓みの中立軸は固定子の厚さ方向のほぼ中央に位
置し、圧電素子の振動振幅と駆動面の振動振幅はほぼ等
しい状態であり、したがって、圧電素子面(駆動面と反
対側の面)にフェルト等の緩衝材を接着等で固定すると
圧電素子の振動を妨げることになり、駆動面の振幅も減
少してしまいモータの駆動効率を低下させてしまうとい
う問題があった。また、固定子がフェルト等と回転子の
間で厚み方向に加圧されることも振幅減少の原因となっ
ている。[Problems to be Solved by the Invention] However, when the stator is supported by the method (1), the elastic coefficient (ordinary metal material) of the stator has an elastic coefficient about three times that of the piezoelectric element. Therefore, the neutral axis of flexure in the cross section of the stator is located approximately in the center in the thickness direction of the stator, and the vibration amplitude of the piezoelectric element and the vibration amplitude of the driving surface are almost equal. If a cushioning material such as felt is fixed to the surface (opposite to the surface) by adhesion or the like, the vibration of the piezoelectric element is hindered, and the amplitude of the drive surface is also reduced, which reduces the drive efficiency of the motor. there were. Further, the fact that the stator is pressed in the thickness direction between the felt or the like and the rotor also causes a decrease in the amplitude.
また、(2)のように複数の補助振動部材やフランジを
設けて支持する場合、支持する目的では剛性を高くする
べきであるが、剛性が高いと支持によるエネルギー損失
が大きくなる。そこで、支持による損失を減らし、支持
を行うように補助振動部材あるいはフランジを設けると
その形状は厚さが薄く幅の狭い補助振動部材を多数設け
るか厚さの極めて薄いフランジにするしかなくなる。し
たがって支持による損失を減らすには補助振動部材ある
いはフランジの製造は難しくそして高価なものになって
しまうという問題があった。Further, when a plurality of auxiliary vibration members and flanges are provided and supported as in (2), the rigidity should be increased for the purpose of supporting, but if the rigidity is high, the energy loss due to the support increases. Therefore, when the auxiliary vibration member or the flange is provided so as to reduce the loss due to the support and to perform the support, the shape of the auxiliary vibration member is only thin and the width thereof is narrow, or the flange is extremely thin. Therefore, it is difficult and expensive to manufacture the auxiliary vibration member or the flange in order to reduce the loss due to the support.
また、駆動面の振幅を大きくするために駆動面に深い溝
を多数設ける構造もあるが、この構造でも損失上の利点
と構造上の複雑さやコストとが相反するという上述の問
題があった。Further, there is also a structure in which a large number of deep grooves are provided on the driving surface in order to increase the amplitude of the driving surface, but this structure also has the above-mentioned problem that the advantage of loss and the structural complexity and cost conflict with each other.
本発明はこれらの問題を解決し、回転子あるいは固定子
を確実に支持することができ、支持による損失が少な
く、駆動面の振幅を大きくすることができ、かつコスト
的にも優れた超音波振動を利用した表面波モータを提供
することを目的としている。The present invention solves these problems and can reliably support the rotor or the stator, the loss due to the support is small, the amplitude of the driving surface can be increased, and the ultrasonic wave is excellent in cost. The object is to provide a surface wave motor that utilizes vibration.
「問題点を解決するための手段」 かかる目的を達成するための本発明の要旨とするところ
は、 圧電素子および該圧電素子により励振される弾性体から
成る固定子と、該固定子に圧接され、該固定子に生じる
超音波振動の表面進行波によって該固定子の面上を移動
する弾性体である移動子とから成る表面波モータにおい
て、 前記両弾性体の少なくとも一方を合成樹脂材料にて形成
し、該一方の弾性体は、他方の弾性体が圧接される面を
有する振動部と、該振動部から延在する支持部と、さら
に該支持部の外周に設けられた被保持部とを一体成形し
て成ることを特徴とする表面波モータに存する。“Means for Solving Problems” The gist of the present invention for achieving the above object is to provide a stator formed of a piezoelectric element and an elastic body excited by the piezoelectric element, and press-contacted to the stator. A surface wave motor comprising a moving body which is an elastic body that moves on the surface of the stator by a surface traveling wave of ultrasonic vibration generated in the stator, wherein at least one of the elastic bodies is made of a synthetic resin material. The one elastic body includes a vibrating portion having a surface against which the other elastic body is pressed, a supporting portion extending from the vibrating portion, and a held portion provided on the outer periphery of the supporting portion. The present invention resides in a surface wave motor characterized by being integrally molded.
「作用」 弾性体の振動部はそれから周方向に延在するよう一体成
形された支持部により支持されており、支持されている
部位は振動時の撓みの中立軸の近傍であり、振動部は最
低の損失で確実に支持されながら超音波振動し、回転子
が回動される。"Operation" The vibrating part of the elastic body is supported by the support part integrally formed so as to extend in the circumferential direction from the vibrating part. The supported part is in the vicinity of the neutral axis of flexure during vibration, and the vibrating part is The rotor is rotated while vibrating ultrasonically while being reliably supported with the minimum loss.
このような構造でも、合成樹脂材料にて形成してあるの
で、振動部と支持部と被保持部とを一体成形して低コス
トで製造することができる。Even with such a structure, since it is formed of a synthetic resin material, the vibrating portion, the supporting portion, and the held portion can be integrally molded and manufactured at low cost.
「実施例」 以下、図面に基づき本発明の各種実施例を説明する。[Examples] Hereinafter, various examples of the present invention will be described with reference to the drawings.
第1図は本発明の第1実施例に係る表面波モータの固定
子の斜視図を示し、第2図は、第1図の固定子とそれに
より回転される回転子との断面図を示している。1 is a perspective view of a stator of a surface acoustic wave motor according to a first embodiment of the present invention, and FIG. 2 is a sectional view of the stator of FIG. 1 and a rotor rotated by the stator. ing.
固定子10は、圧電素子15と、圧電素子15によって励振さ
れるリング状弾性体20とで構成され、また回転子50はリ
ング状弾性体51とライニング材52とで構成されている。The stator 10 is composed of a piezoelectric element 15 and a ring-shaped elastic body 20 excited by the piezoelectric element 15, and the rotor 50 is composed of a ring-shaped elastic body 51 and a lining material 52.
そしてリング状弾性体20は、圧電素子15によって励振さ
れる振動部25と、振動部25の外周に延在する支持部30
と、支持部30の外周に設けられた被保持部40とより成
る。この被保持部40は、表面波モータを取付ける位置に
対してリング状弾性体20を位置決めして保持するもので
ある。このリング状弾性体20は、エンジニアリングプラ
スチック等の合成樹脂材料で一体成形されており、好ま
しくは、動作上適切な低弾性率を有するものが望まし
い。The ring-shaped elastic body 20 includes a vibrating portion 25 excited by the piezoelectric element 15 and a supporting portion 30 extending on the outer periphery of the vibrating portion 25.
And a held portion 40 provided on the outer periphery of the support portion 30. The held portion 40 positions and holds the ring-shaped elastic body 20 with respect to the position where the surface acoustic wave motor is mounted. The ring-shaped elastic body 20 is integrally molded with a synthetic resin material such as engineering plastic, and preferably has a low elastic modulus suitable for operation.
圧電素子15はリング状弾性体20の振動部25に接着固定あ
るいはリング状弾性体20を一体成形する時に同時に成形
され固定されている。後者の場合、従来の接着工程を除
くことが可能となる。The piezoelectric element 15 is bonded and fixed to the vibrating portion 25 of the ring-shaped elastic body 20 or is molded and fixed at the same time when the ring-shaped elastic body 20 is integrally molded. In the latter case, it becomes possible to omit the conventional bonding step.
前記のように動作上適切な低弾性率を有するものが望ま
しいので、本実施例におけるリング状弾性体20の弾性率
は圧電素子15の弾性率に比べて1/10程度に、密度は1/5
程度に、従来の金属等の弾性率に比べて1/20程度、そし
て密度は1/5程度に設定してある。As described above, it is desirable to have a low elastic modulus suitable for operation. Therefore, the elastic modulus of the ring-shaped elastic body 20 in this embodiment is about 1/10 of the elastic modulus of the piezoelectric element 15, and the density is 1 /. Five
In comparison, the elastic modulus of conventional metals is set to about 1/20, and the density is set to about 1/5.
金属あるいは圧電素子15に比べて弾性率および密度が小
さい材料を用いてある場合、固定子10の形状は従来の形
状に比べて、内,外径は従来と同じとすると、リング状
弾性体20の厚さで2倍程度厚くなる。また、固定子10の
屈曲振動の中立軸は金属材料を用いた場合の従来は固定
子10の厚さのほぼ中央(1/2)であったのに対し、圧電
素子15に極めて近い所に位置させることができる。When a metal or a material having a smaller elastic modulus and density than that of the piezoelectric element 15 is used, assuming that the shape of the stator 10 is the same as the conventional shape in terms of inner and outer diameters, the ring-shaped elastic body 20 Is about twice as thick. In addition, the neutral axis of bending vibration of the stator 10 was approximately the center (1/2) of the thickness of the stator 10 in the case of using a metal material in the past, but it is very close to the piezoelectric element 15. Can be located.
支持部30は、振動部25を支持する条件が振動部25の円周
方向のどの位置でも同一条件となるよう振動部25の外周
の全周に延在する薄板状に形成されており、振動部25の
外周面の厚みの略中央部、すなわち振動部25の振動時の
撓みにおける中立軸で振動部25に接続していて、圧電素
子15の面では支持しないようにしている。The support portion 30 is formed in a thin plate shape extending over the entire outer circumference of the vibrating portion 25 so that the condition for supporting the vibrating portion 25 is the same at any position in the circumferential direction of the vibrating portion 25. The outer peripheral surface of the portion 25 is connected to the vibrating portion 25 at a substantially central portion of the thickness thereof, that is, a neutral axis in bending of the vibrating portion 25 during vibration, and is not supported by the surface of the piezoelectric element 15.
被保持部40は支持部30の外周に枠状に成形され、取り付
け対象、例えばレンズ鏡筒に形成された嵌合溝に位置決
めして嵌め込まれるものである。The held portion 40 is formed into a frame shape on the outer periphery of the support portion 30, and is positioned and fitted into a fitting target, for example, a fitting groove formed in the lens barrel.
次に作用を説明する。Next, the operation will be described.
圧電素子15に所定の周波数の電圧をかけると、それによ
り振動部25と圧電素子15が一体で屈曲振動し、振動部25
の表面(駆動面)の質点がだ円運動の変位をする。この
表面に圧接されている回転子50はこのだ円運動によって
固定子10に対して相対的に回転し、回転力が得られる。When a voltage having a predetermined frequency is applied to the piezoelectric element 15, the vibrating section 25 and the piezoelectric element 15 integrally bend and vibrate, and the vibrating section 25
The mass point on the surface (driving surface) of the is displaced by the elliptical motion. The rotor 50 pressed against this surface rotates relative to the stator 10 by this elliptical motion, and a rotational force is obtained.
支持部30は、薄板状に形成してあるので、それ自体が変
位しやすく、かつ最も悪影響を受けにくい中立軸で振動
部25に接続しているので、振動部25の振動を妨げること
がない。全周で振動部25を支持しているので、確実に保
持しているとともに、変位の偏在が生じない。Since the support portion 30 is formed in a thin plate shape, the support portion 30 is easily displaced and connected to the vibrating portion 25 by the neutral shaft that is least affected, so that the vibrating portion 25 is not disturbed. . Since the vibrating portion 25 is supported on the entire circumference, the vibrating portion 25 is securely held, and uneven distribution of displacement does not occur.
本実施例では、リング状弾性体20に低弾性率を有する材
料を用いてあるので、金属材料を用いた場合より、圧電
素子15の同一たわみ量(変形量)に対して固定子10の駆
動面で得られる変形量は数倍大きくなる。変形量が大き
くなると駆動面質点のだ円運動も大きくなるため表面波
モータとしての出力が大きくなる。In the present embodiment, since the ring-shaped elastic body 20 is made of a material having a low elastic modulus, the stator 10 is driven with respect to the same deflection amount (deformation amount) of the piezoelectric element 15 as compared with the case of using a metal material. The amount of deformation obtained on the surface is several times larger. When the amount of deformation increases, the elliptic motion of the surface mass of the driving surface also increases, and the output of the surface wave motor increases.
第3図は第2実施例を示しており、支持部30に支持部の
剛性を低減させるための穴部31を設けたものである。FIG. 3 shows a second embodiment, in which the supporting portion 30 is provided with a hole 31 for reducing the rigidity of the supporting portion.
したがって、支持部30は振動部25の振動の中立軸上全周
に接続する内周フランジ32、穴部31と穴部31の間に形成
されたリブ部33、さらに内周フランジ32と対称的に被保
持部40に接続する外周フランジ34により構成されてい
る。Therefore, the support part 30 is symmetrical with the inner peripheral flange 32 connected to the entire circumference on the neutral axis of the vibration of the vibrating part 25, the rib part 33 formed between the hole part 31 and the hole part 31, and the inner peripheral flange 32. The outer peripheral flange 34 is connected to the held portion 40.
内周フランジ32が振動部の全周に設けられているのは、
振動部25を支持する際、振動部25の拘束条件が周方向の
どの部分でも変わらないようにするためである。複数の
穴部31を設け、内周フランジ32、リブ部33、外周フラン
ジ34を一平面で形成するようにしたから、支持部30の曲
げに対する剛性が低下し、振動部25がより拘束されずに
振動することができる。The inner peripheral flange 32 is provided all around the vibrating part
This is because when the vibrating portion 25 is supported, the constraint condition of the vibrating portion 25 does not change at any portion in the circumferential direction. Since the plurality of hole portions 31 are provided and the inner peripheral flange 32, the rib portion 33, and the outer peripheral flange 34 are formed in one plane, the rigidity of the support portion 30 against bending is reduced, and the vibrating portion 25 is less restrained. Can vibrate.
リブ部33と穴部31の寸法は、不図示の回転子に外部負荷
(回転力)が加わり、固定子10、つまり振動部25に負荷
(回転力)が加わった場合に、被保持部40に対して振動
部25が位置ずれを起こしてしまわないように設定されて
いる。穴部31は他の部位より一層薄くした薄肉部で形成
してもよい。The rib portion 33 and the hole portion 31 have such dimensions that when the external load (rotational force) is applied to the rotor (not shown) and the load (rotational force) is applied to the stator 10, that is, the vibrating portion 25, the held portion 40 However, the vibrating unit 25 is set so as not to be displaced. The hole 31 may be formed as a thin portion that is thinner than other portions.
なお、被保持部40は、固定子10をレンズ鏡筒、モータの
ハウジング等に固定するためのものであって、固定子10
の固定方法によって被保持部40の形状を設定すればよ
く、図に示した円環状でなくてもよい。The held portion 40 is for fixing the stator 10 to a lens barrel, a motor housing, etc.
It suffices to set the shape of the held portion 40 by the fixing method described above, and the shape does not have to be the annular shape shown in the figure.
以上では、表面波モータの固定子を説明してきたが、回
転子についても同様のことが説明できる。この場合、上
述で圧電素子と説明した部分はライニング材となり被保
持部を回転子の回転力を取り出すために用いればよい。
また、表面波モータの構成によっては被保持部の形状お
よび位置を変えて回転子を形成すれば良い。The stator of the surface wave motor has been described above, but the same can be explained for the rotor. In this case, the portion described as the piezoelectric element above serves as a lining material, and the held portion may be used to extract the rotational force of the rotor.
Further, depending on the configuration of the surface acoustic wave motor, the shape and position of the held portion may be changed to form the rotor.
いずれにせよ、回転子を構成する振動部、支持部、そし
て被保持部は、合成樹脂材料にて一体成形で作成でき、
振動部と支持部の位置関係は固定子の場合と同じであ
る。In any case, the vibrating part, the supporting part, and the held part that make up the rotor can be made of synthetic resin material by integral molding,
The positional relationship between the vibrating part and the supporting part is the same as that of the stator.
「発明の効果」 本発明に係る表面波モータによれば、両弾性体の少なく
とも一方が合成樹脂材料であるため、金属等を用いた場
合と同等の入力エネルギーでも超音波振動の振幅をより
大きくすることができ、その結果、表面波モータの効率
を向上させることができる。[Advantage of the Invention] According to the surface acoustic wave motor of the present invention, since at least one of both elastic bodies is a synthetic resin material, the amplitude of ultrasonic vibration can be made larger even with the same input energy as when using a metal or the like. As a result, the efficiency of the surface acoustic wave motor can be improved.
また、振動部、支持部、被保持部が合成樹脂材料で一体
成形されているので、目的を達成するために複雑な形状
になっても容易に成形することができ、コストを低減す
ることができる。In addition, since the vibrating portion, the supporting portion, and the held portion are integrally molded with the synthetic resin material, the vibrating portion, the supporting portion, and the held portion can be easily molded even if they have a complicated shape to achieve the purpose, and the cost can be reduced. it can.
また、実施例によれば、固定子は振動部、支持部、被保
持部が低弾性材料にて一体成形されている為に、支持部
の剛性を下げても(駆動効率を低下させない為)、従来
の金属性の固定子に比べてその形状が薄肉形状となら
ず、支持部が表面波モータの組込み時等で損傷を受ける
ことがない。Further, according to the embodiment, since the vibrating portion, the supporting portion, and the held portion are integrally formed of the low elastic material in the stator, even if the rigidity of the supporting portion is reduced (the driving efficiency is not reduced). As compared with the conventional metallic stator, the shape thereof is not thin and the supporting portion is not damaged when the surface wave motor is assembled.
そして、支持部の剛性を下げるために支持部に穴部を設
ける場合も、振動部、支持部、被保持部を一体成形で加
工できるので、穴あけ等の加工が必要なく、安価に作成
することができるという利点がある。Even when a hole is provided in the support to reduce the rigidity of the support, the vibrating part, the support, and the held part can be machined by integral molding. The advantage is that
第1図および第2図は本発明の第1実施例を示してお
り、第1図は固定子の斜視図、第2図は固定子及び回転
子の横断面図、第3図は第2実施例に係る固定子の平面
図である。 10……固定子、15……圧電素子 20……リング状弾性体、25……振動部 30……支持部、31……穴部 32……内周フランジ、33……リブ部 34……外周フランジ、40……被保持部 50……回転子1 and 2 show a first embodiment of the present invention. FIG. 1 is a perspective view of a stator, FIG. 2 is a cross sectional view of a stator and a rotor, and FIG. It is a top view of the stator concerning an example. 10 ...... Stator, 15 ...... Piezoelectric element 20 ...... Ring-shaped elastic body, 25 ...... Vibrating part 30 ...... Support part, 31 ...... Hole part 32 ...... Inner peripheral flange, 33 ...... Rib part 34 ...... Peripheral flange, 40 ... Held part 50 ... Rotor
Claims (2)
る弾性体から成る固定子と、該固定子に圧接され、該固
定子に生じる超音波振動の表面進行波によって該固定子
の面上を移動する弾性体である移動子とから成る表面波
モータにおいて、 前記両弾性体の少なくとも一方を合成樹脂材料にて形成
し、該一方の弾性体は、他方の弾性体が圧接される面を
有する振動部と、該振動部から延在する支持部と、さら
に該支持部の外周に設けられた被保持部とを一体成形し
て成ることを特徴とする表面波モータ。1. A stator composed of a piezoelectric element and an elastic body excited by the piezoelectric element, and a surface traveling wave of ultrasonic vibration generated in the stator, which is pressed against the stator, to move the surface of the stator. In a surface wave motor including a moving element that is a moving elastic body, at least one of the two elastic bodies is formed of a synthetic resin material, and the one elastic body has a surface against which the other elastic body is pressed. A surface acoustic wave motor comprising a vibrating portion, a support portion extending from the vibrating portion, and a held portion provided on the outer periphery of the support portion, which are integrally molded.
あるいは薄肉部を設けたことを特徴とする特許請求の範
囲第1項記載の表面波モータ。2. The surface wave motor according to claim 1, wherein the support portion is provided with a hole or a thin portion for adjusting the rigidity thereof.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61221468A JPH0789746B2 (en) | 1986-09-19 | 1986-09-19 | Surface wave motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61221468A JPH0789746B2 (en) | 1986-09-19 | 1986-09-19 | Surface wave motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6377385A JPS6377385A (en) | 1988-04-07 |
| JPH0789746B2 true JPH0789746B2 (en) | 1995-09-27 |
Family
ID=16767186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61221468A Expired - Fee Related JPH0789746B2 (en) | 1986-09-19 | 1986-09-19 | Surface wave motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0789746B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014084184A1 (en) | 2012-11-29 | 2014-06-05 | 株式会社ダイセル | Elastic body for actuator, and piezoelectric actuator |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5066884A (en) * | 1989-02-10 | 1991-11-19 | Nikon Corporation | Ultrasonic motor having high drive efficiency |
-
1986
- 1986-09-19 JP JP61221468A patent/JPH0789746B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014084184A1 (en) | 2012-11-29 | 2014-06-05 | 株式会社ダイセル | Elastic body for actuator, and piezoelectric actuator |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6377385A (en) | 1988-04-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |