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JPH0791079B2 - Method for manufacturing glass base material for optical fiber - Google Patents
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JPH0791079B2 - Method for manufacturing glass base material for optical fiber - Google Patents

Method for manufacturing glass base material for optical fiber

Info

Publication number
JPH0791079B2
JPH0791079B2 JP61021130A JP2113086A JPH0791079B2 JP H0791079 B2 JPH0791079 B2 JP H0791079B2 JP 61021130 A JP61021130 A JP 61021130A JP 2113086 A JP2113086 A JP 2113086A JP H0791079 B2 JPH0791079 B2 JP H0791079B2
Authority
JP
Japan
Prior art keywords
glass
fine particles
optical fiber
base material
glass fine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP61021130A
Other languages
Japanese (ja)
Other versions
JPS62182126A (en
Inventor
達男 斎藤
毅 京極
透 桑原
洋一 石黒
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP61021130A priority Critical patent/JPH0791079B2/en
Publication of JPS62182126A publication Critical patent/JPS62182126A/en
Publication of JPH0791079B2 publication Critical patent/JPH0791079B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01446Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00Type of glass produced
    • C03B2201/06Doped silica-based glasses
    • C03B2201/08Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant
    • C03B2201/12Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant doped with fluorine

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Thermal Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、気相軸付け法(VAD法)による光フアイバ用
ガラス母材の製造において、ガラス微粒子体の不均一な
密度分布に帰因する屈折率分布の乱れを効果的に減少せ
しめる光フアイバ用ガラス母材の製造方法を提案するも
のである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial field of use] The present invention is attributed to the non-uniform density distribution of glass microparticles in the production of glass preforms for optical fibers by the vapor phase axial attachment method (VAD method). The present invention proposes a method for manufacturing a glass preform for optical fibers, which effectively reduces the disorder of the refractive index distribution.

〔従来の技術〕[Conventional technology]

VAD法による光フアイバ用ガラス母材の製造において、
ガラス微粒子体を得るのに複数のガラス微粒子合成用バ
ーナーを使用する方法が一般に知られている。具体的に
は、単一モード光フアイバ用ガラス微粒子体あるいは多
モード光フアイバ用ガラス微粒子体において、コア部と
ジヤケツト部を同時に合成する方法として応用されてい
る。
In the manufacture of optical fiber glass preform by VAD method,
A method of using a plurality of burners for synthesizing glass fine particles to obtain glass fine particles is generally known. Specifically, it is applied as a method for simultaneously synthesizing a core part and a jacket part in a glass fine particle body for a single mode optical fiber or a glass fine particle body for a multimode optical fiber.

第1図は、VAD法による単一モード光フアイバ用ガラス
微粒子体の製造方法の一例を模式的に示したものであ
る。コア・バーナー1よりSiCl4,GeCl4,H2,Ar及びO2
を流し、クラツドバーナー2及び3よりSiCl4,H2,Ar及
びO2等を流して、ガラス微粒子体4を製造する。得られ
たガラス微粒子体4に対し、この後に屈折率を変化せし
める目的で添加処理(例えば、弗素化合物雰囲中での加
熱処理等)あるいは脱水処理(例えば、塩素化合物雰囲
気中での加熱処理等)を行い、更に高温に加熱すること
で焼結・透明ガラス化し、光フアイバ用ガラス母材を得
る。
FIG. 1 schematically shows an example of a method for producing glass fine particles for a single mode optical fiber by the VAD method. SiCl 4 than the core burner 1, GeCl 4, H 2, flowing Ar and O 2 or the like, and from the class each time the burner 2 and 3 flowed SiCl 4, H 2, Ar, and O 2, etc., producing the glass particles member 4 To do. After that, addition treatment (for example, heat treatment in a fluorine compound atmosphere) or dehydration treatment (for example, heat treatment in a chlorine compound atmosphere) is performed on the obtained glass fine particles 4 for the purpose of changing the refractive index. ) Is performed and further heated to a high temperature to sinter and become transparent vitreous to obtain a glass preform for optical fibers.

〔発明が解決しようとする問題点〕[Problems to be solved by the invention]

しかし、上記方法では、以下に述べる様な不具合が生じ
ていた。VAD法では、複数本のバーナーを使用してガラ
ス微粒子体を得る為に、該ガラス微粒子体の密度は半径
方向で不均一な分布を示す。例えば後述する実施例及び
比較例において第1図の構成により得たガラス微粒子体
の半径方向における密度分布は、第2図に示す如くであ
り、各バーナーにて形成される温度分布に対応し、半径
方向に不均一な分布を有している。
However, the above method has the following problems. In the VAD method, since glass fine particles are obtained using a plurality of burners, the density of the glass fine particles shows a non-uniform distribution in the radial direction. For example, the density distribution in the radial direction of the glass fine particles obtained by the constitution of FIG. 1 in Examples and Comparative Examples described later is as shown in FIG. 2, and corresponds to the temperature distribution formed by each burner, It has a non-uniform distribution in the radial direction.

このように不均一な密度分布を有するガラス微粒子体に
対し、そのまま添加処理を行うならば、密度分布に対応
した不均一な添加がなされる。また、脱水処理において
も微量の塩素化合物がガラス微粒子体に添加される訳で
あるが、この場合も密度分布に対応した不均一な添加が
なされる。
If the glass microparticles having such a non-uniform density distribution are subjected to the addition treatment as they are, non-uniform addition corresponding to the density distribution is performed. Further, even in the dehydration treatment, a small amount of chlorine compound is added to the glass fine particles, but in this case as well, it is added unevenly corresponding to the density distribution.

これら不均一な添加もしくは脱水処理により、光フアイ
バ用ガラス母材の屈折率分布は起伏を伴い、乱れ、最終
的には光フアイバの伝送特性例えば分散、しや断周波数
などに悪影響をもたらす結果となる。
Due to these non-uniform additions or dehydration treatments, the refractive index distribution of the glass base material for optical fibers is undulated and disturbed, and finally the transmission characteristics of the optical fiber, such as dispersion and fracturing frequency, are adversely affected. Become.

本発明は、以上の様な不具合点を一挙に解決する方法を
提案するものである。
The present invention proposes a method for solving the above-mentioned problems all at once.

〔問題点を解決するための手段〕[Means for solving problems]

本発明者らは、光フアイバ用ガラス母材の半径方向にお
ける屈折率分布の乱れを最少限とする為に、ガラス微粒
子体の前述のような密度分布不均一を改善することを考
え、このためにはガラス微粒子体の脱水処理の前に非反
応性ガス雰囲気中での加熱処理(以下、予備加熱処理と
呼ぶ)を実施するのが有効である事を見出し、本発明に
到達した。
The present inventors have considered to improve the above-mentioned non-uniform density distribution of the glass fine particles in order to minimize the disorder of the refractive index distribution in the radial direction of the optical fiber glass preform, and therefore It was found that it is effective to carry out a heat treatment (hereinafter referred to as a preliminary heat treatment) in a non-reactive gas atmosphere before the dehydration treatment of the glass fine particles, and arrived at the present invention.

すなわち本発明はVAD法により得られたガラス微粒子体
を、非反応性ガス雰囲気中で該ガラス微粒子体の焼結温
度以下で熱処理して密度を調整した後、Cl2又は塩素化
合物を含む雰囲気中で熱処理し、更に高温に加熱して透
明化することを特徴とする光フアイバ用ガラス母材の製
造方法である。
That is, the present invention, the glass fine particles obtained by the VAD method, after heat treatment in a non-reactive gas atmosphere below the sintering temperature of the glass fine particles to adjust the density, in an atmosphere containing Cl 2 or a chlorine compound It is a method for producing a glass preform for optical fibers, which is characterized in that it is heat-treated at 1, and further heated to a high temperature to make it transparent.

本発明の特に好ましい実施態様としては、非反応性ガス
がN2,O2,He,Arのいずれか1種又は2種以上の混合ガス
である上記方法が挙げられる。
A particularly preferred embodiment of the present invention is the above method in which the non-reactive gas is any one of N 2 , O 2 , He and Ar or a mixed gas of two or more thereof.

本発明における予備加熱処理は、ガラスの焼結温度以下
で例えばN2,O2,He,Arの単独もしくは混合の非反応性ガ
ス雰囲気中にて行うが、これはこのような条件とした炉
中に保持するか、通過させればよい。この予備加熱処理
はガラス微粒子の密度分布の均一化のために行うのであ
つて、この目的がはたされ、かつ焼結しない温度範囲で
あればよく、1例を挙げれば1250℃以上1500℃以下であ
る。なお、ガラス微粒子体の焼結温度の下限は約1500℃
である。
Furnace preheating treatment in the present invention, for example, N 2 or less sintering temperature of the glass, O 2, the He, is carried out in a non-reactive gas atmosphere in alone or in combination of Ar, which is where such a condition Hold it inside or let it pass. This pre-heating treatment is carried out in order to make the density distribution of the glass fine particles uniform, so long as it is a temperature range where this purpose is met and sintering is not performed. One example is 1250 ° C or higher and 1500 ° C or lower. Is. The lower limit of the sintering temperature of the glass fine particles is about 1500 ° C.
Is.

次に脱水処理を行うが、この場合の温度その他の条件は
脱水程度その他により大幅に異なるので一概に限定する
ことはできないが、例えば脱水処理ではCl2を含むガス
雰囲気中にて、800℃以上に保たれた炉中に保持するか
通過させる、等の条件が挙げられる。
Then performing dehydration treatment, but can not be unconditionally limited because the temperature and other conditions differ significantly by other about dehydration in this case, for example, dehydration by a gas atmosphere containing Cl 2 at, 800 ° C. or higher Conditions such as holding or passing through a furnace kept at.

以上の処理の後、さらに高温にして焼結透明ガラス化処
理を行うと、均一な屈折率分布を有する光フアイバ用母
材を得ることができる。
After the above-mentioned treatments, the sintered transparent vitrification treatment is performed at a higher temperature to obtain a preform for optical fibers having a uniform refractive index distribution.

〔実施例〕〔Example〕

参考例 第1図の構成により、コアバーナ1からSiCl4,H2,Ar,及
びO2を流し、クラツドバーナー2及び3からはSiCl4,
H2,Ar及びO2を流して、コア部がGeO25重量%−SiO295重
量%のガラス、クラツド部がSiO2100重量%のガラスか
らなるガラス微粒子体(直径130mm、長さ650mm)を製造
した。このガラス微粒子体の密度分布は第2図に示すと
おりであつた。得られたガラス微粒子体をHe(流量5
/min)の雰囲気中にて1450℃に保たれた炉の中を10mm/m
inの速度で通過させて予備加熱処理した後、該ガラス微
粒子体を、SF6(流量100ml/min)、He(流量5/min)
の雰囲気中にて、1000℃に保たれた炉の中を10mm/minの
速度で通過させ、然る後He(流量10/min)の雰囲気中
にて、1650℃に保たれた炉の中を10mm/minの速度で通過
させる事で光フアイバ用ガラス母材を得た。
Reference Example With the configuration shown in FIG. 1, SiCl 4 , H 2 , Ar, and O 2 are made to flow from the core burner 1, and SiCl 4 ,
By flowing H 2, Ar and O 2, soot glass body core portion GeO 2 5 wt% -SiO 2 95 wt% of the glass, is Kuratsudo portion made of glass of SiO 2 100 wt% (diameter 130 mm, length 650mm ) Was manufactured. The density distribution of the glass fine particles was as shown in FIG. The obtained glass fine particles were put into He (flow rate 5
10mm / m in a furnace kept at 1450 ℃ in an atmosphere of
After passing through at a speed of in and pre-heat treatment, the glass fine particles were subjected to SF 6 (flow rate 100 ml / min), He (flow rate 5 / min)
In a furnace kept at 1000 ° C at a speed of 10 mm / min, and then in a furnace kept at 1650 ° C in an atmosphere of He (flow rate 10 / min). Was passed at a speed of 10 mm / min to obtain a glass preform for optical fibers.

この光フアイバ用ガラス母材の屈折率分布は、第3図の
曲線a(実線)で示す如くであり、添加処理前の予備加
熱処理により、次に述べる予備加熱処理をしない場合に
比してガラス微粒子体の密度分布の変化量が低減され、
均一な添加が実現できた。
The refractive index distribution of the glass preform for optical fibers is as shown by the curve a (solid line) in FIG. 3, and the preheating treatment before the addition treatment is more effective than the case where the preheating treatment described below is not performed. The amount of change in the density distribution of the glass particles is reduced,
A uniform addition was achieved.

参考比較例 比較例と同一条件にて製造した第2図の密度分布を有す
るガラス微粒子体について、予備加熱処理を行わなかつ
た以外は比較例と同様に処理して、光フアイバ用ガラス
母材を得た。
Reference Comparative Example The glass microparticles having the density distribution shown in FIG. 2 produced under the same conditions as in the comparative example were treated in the same manner as in the comparative example except that the preheating treatment was not performed, and the glass preform for optical fiber was prepared. Obtained.

該光フアイバ用ガラス母材の屈折率分布は第3図の曲線
b(点線)で示す如くであり、クラツド部のガラス微粒
子の密度分布とほぼ対応して起伏を伴い、乱れていた。
The refractive index distribution of the glass base material for optical fibers is as shown by the curve b (dotted line) in FIG. 3, and it was disturbed with undulations almost corresponding to the density distribution of the glass particles in the cladding.

実施例1 参考例と同一条件にて製造した第2図の密度分布を有す
るガラス微粒子体についてHe(流量5/min)の雰囲気
中にて、1450℃に保たれた炉の中を、10mm/minの速度で
通過させて予備加熱処理した後、Cl2(流量200ml/mi
n)、He(流量5/min)の雰囲気中にて、1070℃に保
たれた炉の中を10mm/minの速度で通過させ、然る後He
(流量10/min)の雰囲気中にて1650℃に保たれた炉の
中を10mm/minの速度で通過せしめる事で、光フアイバ用
ガラス母材とした。
Example 1 About the glass fine particles having the density distribution shown in FIG. 2 manufactured under the same conditions as in the reference example, 10 mm / g in a furnace kept at 1450 ° C. in an atmosphere of He (flow rate 5 / min). After passing through at a speed of min for preheat treatment, Cl 2 (flow rate 200 ml / mi
n), He (flow rate 5 / min), at a speed of 10 mm / min through a furnace maintained at 1070 ° C, and then He
A glass base material for optical fibers was obtained by passing the material through a furnace maintained at 1650 ° C in a (flow rate of 10 / min) atmosphere at a speed of 10 mm / min.

該光フアイバ用ガラス母材の屈折率分布は、第4図に曲
線c(実線)で示す如く、脱水処理前の予備加熱処理に
よりガラス微粒子体の密度分布の変化量が低減され、Cl
2の添加による屈折率のゆらぎが低減できた。
The refractive index distribution of the glass base material for optical fibers is shown by a curve c (solid line) in FIG. 4, in which the amount of change in the density distribution of the glass fine particles is reduced by the preheating treatment before the dehydration treatment.
The fluctuation of the refractive index could be reduced by adding 2 .

比較例1 参考例と同一条件にて製造した第2図の密度分布を有す
るガラス微粒子体について、予備加熱処理を行わなかつ
た以外は実施例1と同様の処理を行い光フアイバ用ガラ
ス母材を得た。
Comparative Example 1 A glass preform for optical fibers was prepared by the same process as in Example 1 except that the glass fine particles having the density distribution shown in FIG. 2 manufactured under the same conditions as in the reference example were not preheated. Obtained.

該光フアイバ用ガラス母材の屈折率分布は、第4図のに
曲線d(破線)で示す如く、クラツド部のガラス微粒子
の密度分布に対応してCl2が添加された事により、揺ら
ぎを生じている。
The refractive index distribution of the glass base material for optical fibers shows fluctuations due to the addition of Cl 2 corresponding to the density distribution of the glass particles in the cladding, as shown by the curve d (broken line) in FIG. Has occurred.

以上の実施例及び比較例から明らかなように、VAD法に
より複数本バーナーを用いて得たガラス微粒子体におけ
る、不均一な密度分布に由来する透明化後のガラス母材
中の屈折率分布の乱れは、本発明の予備加熱処理によ
り、大幅に低減することが可能である。
As is clear from the above examples and comparative examples, in the glass fine particles obtained by using a plurality of burners by the VAD method, of the refractive index distribution in the glass preform after transparency derived from the non-uniform density distribution The turbulence can be significantly reduced by the preheating treatment of the present invention.

〔発明の効果〕 本発明は、VAD法によつて得られるガラス微粒子体を、
非反応性ガス雰囲気中において、高温に保たれた炉の中
に保有するか、もしくは通過させて、予備加熱処理を行
うことで密度分布を均一化し、然る後脱水処理、更に焼
結・透明ガラス化処理を行う事で均一な屈折率分布を有
する光フアイバ用ガラス母材を得られる、簡単で優れた
方法である。
[Effect of the invention] The present invention is a glass fine particle obtained by the VAD method,
In a non-reactive gas atmosphere, hold or let it pass through a furnace kept at a high temperature to perform a pre-heating treatment to make the density distribution uniform, and then dehydration treatment, then sintering / transparency This is a simple and excellent method for obtaining a glass preform for optical fibers having a uniform refractive index distribution by performing vitrification treatment.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明の実施例、比較例におけるVAD法による
ガラス微粒子体を得る方法を説明するための模式図、 第2図は本発明の実施例・比較列にて用いたガラス微粒
子体の半径方向における密度分布を示すグラフ、 第3図及び第4図は光フアイバ用ガラス母材の正規化半
径(r/ro)における屈折率分布を示すグラフである。 第3図;参考例(曲線a)および参考比較例(曲線b)
にて得た光フアイバ母材の場合を示す。 第4図;実施例1(曲線c)および比較例1(曲線d)
にて得た光フアイバ母材の場合を示す。
FIG. 1 is a schematic diagram for explaining a method for obtaining glass microparticles by the VAD method in Examples and Comparative Examples of the present invention, and FIG. 2 is a graph of glass microparticles used in Examples and Comparative columns of the present invention. 3 is a graph showing a density distribution in the radial direction, and FIGS. 3 and 4 are graphs showing a refractive index distribution at a normalized radius (r / ro) of a glass preform for optical fibers. FIG. 3; Reference example (curve a) and reference comparative example (curve b)
The case of the optical fiber base material obtained in 1. is shown. FIG. 4; Example 1 (curve c) and Comparative Example 1 (curve d)
The case of the optical fiber base material obtained in 1. is shown.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】VAD法により得られたガラス微粒子体を、
非反応性ガス雰囲気中で該ガラス微粒子体の焼結温度以
下で熱処理して密度を調整した後、Cl2又は塩素化合物
を含む雰囲気中で熱処理し、更に高温に加熱して透明化
することを特徴とする光フアイバ用ガラス母材の製造方
法。
1. A glass fine particle obtained by the VAD method,
After heat treatment at a temperature not higher than the sintering temperature of the glass fine particles in a non-reactive gas atmosphere to adjust the density, heat treatment is performed in an atmosphere containing Cl 2 or a chlorine compound, and further heating to a high temperature to make it transparent. A method for producing a glass base material for an optical fiber, which is characterized.
【請求項2】該非反応性ガスが、N2,O2,He,Arのいずれ
か、または、これらの混合ガスである特許請求の範囲第
(1)項に記載の光フアイバ用ガラス母材の製造方法。
2. The glass preform for optical fibers according to claim 1, wherein the non-reactive gas is any one of N 2 , O 2 , He and Ar, or a mixed gas thereof. Manufacturing method.
JP61021130A 1986-02-04 1986-02-04 Method for manufacturing glass base material for optical fiber Expired - Fee Related JPH0791079B2 (en)

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JP61021130A JPH0791079B2 (en) 1986-02-04 1986-02-04 Method for manufacturing glass base material for optical fiber

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Application Number Priority Date Filing Date Title
JP61021130A JPH0791079B2 (en) 1986-02-04 1986-02-04 Method for manufacturing glass base material for optical fiber

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JPS62182126A JPS62182126A (en) 1987-08-10
JPH0791079B2 true JPH0791079B2 (en) 1995-10-04

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE59102740D1 (en) * 1990-12-21 1994-10-06 Kabelmetal Electro Gmbh Method of making an optical fiber preform.

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0653590B2 (en) * 1985-10-18 1994-07-20 住友電気工業株式会社 Method for producing fluorine-containing transparent quartz glass body

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JPS62182126A (en) 1987-08-10

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