JPH0791137B2 - Oxidation resistant carbon fiber reinforced carbon material - Google Patents
Oxidation resistant carbon fiber reinforced carbon materialInfo
- Publication number
- JPH0791137B2 JPH0791137B2 JP3025643A JP2564391A JPH0791137B2 JP H0791137 B2 JPH0791137 B2 JP H0791137B2 JP 3025643 A JP3025643 A JP 3025643A JP 2564391 A JP2564391 A JP 2564391A JP H0791137 B2 JPH0791137 B2 JP H0791137B2
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- coating layer
- coating
- sic
- base material
- carbon fiber
- Prior art date
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Description
【0001】[0001]
【産業上の利用分野】本発明は、高温酸化雰囲気下にお
いて高度の酸化抵抗性を示す組織の炭素繊維強化炭素材
(以下「C/C材」という。)に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a carbon fiber reinforced carbon material (hereinafter referred to as "C / C material") having a structure showing a high degree of oxidation resistance in a high temperature oxidizing atmosphere.
【0002】[0002]
【従来の技術】C/C材は、卓越した比強度、比弾性率
を有するうえに優れた耐熱性および化学的安定性を備え
ているため、航空宇宙用をはじめ多くの分野で構造材料
として有用されているが、この材料には易酸化性という
炭素材固有の材質的な欠点があり、これが汎用性を阻害
する最大のネックとなっている。このため、C/C材の
表面に耐酸化性の被覆を施して改質化する試みが従来か
らおこなわれており、例えばZrO2 、Al2 O3 、S
iC、Si3 N4 等のセラミックス系物質によって被覆
処理する方法が提案されている。しかし、SiC被覆層
を除いては、使用時の熱サイクルで被覆界面に層間剥離
や亀裂が生じ、酸化の進行を十分に阻止する機能が発揮
されない。2. Description of the Related Art C / C materials have excellent specific strength and specific elastic modulus, and also have excellent heat resistance and chemical stability, so that they are used as structural materials in many fields including aerospace applications. Although useful, this material has a material defect unique to carbon materials, that is, it is easily oxidized, and this is the biggest bottleneck to its versatility. For this reason, attempts have conventionally been made to modify the surface of the C / C material by applying an oxidation resistant coating, for example, ZrO 2 , Al 2 O 3 and S.
A method of coating with a ceramic material such as iC or Si 3 N 4 has been proposed. However, except for the SiC coating layer, delamination and cracks occur at the coating interface during the thermal cycle during use, and the function of sufficiently preventing the progress of oxidation is not exhibited.
【0003】従来、C/C基材の表面にSiCの被覆を
施す方法として、気相反応により生成するSiCを直接
沈着させるCVD法(化学的気相蒸着法)と、基材の炭
素を反応源に利用して珪素成分と反応させることにより
SiCに転化させるコンバージョン法が知られている。
ところが、前者のCVD法を適用して形成したSiC被
覆層は、基材との界面が明確に分離している関係で、熱
衝撃を与えると相互の熱膨張差によって層間剥離現象が
起こり易い。このため、高温域での十分な耐酸化性は望
めない。これに対し、後者のコンバージョン法による場
合には基材の表層部が連続組織としてSiC層を形成す
る傾斜機能材質となるため界面剥離を生じることはない
が、CVD法に比べて緻密性に劣るうえ、反応時、被覆
層に微小なクラックが発生する問題がある。Conventionally, as a method for coating the surface of a C / C base material with SiC, a CVD method (chemical vapor deposition method) for directly depositing SiC produced by a vapor phase reaction and a carbon of the base material are reacted. A conversion method is known in which a source is used to react with a silicon component to convert it into SiC.
However, in the SiC coating layer formed by applying the former CVD method, the interface with the substrate is clearly separated, so that when a thermal shock is applied, a delamination phenomenon is likely to occur due to a mutual thermal expansion difference. Therefore, sufficient oxidation resistance in the high temperature range cannot be expected. On the other hand, in the latter conversion method, the surface layer portion of the base material is a functionally graded material that forms the SiC layer as a continuous structure, so interface peeling does not occur, but it is less dense than the CVD method. In addition, there is a problem that minute cracks are generated in the coating layer during the reaction.
【0004】このような問題点の解消を図るため、本発
明者らは既にC/C基材面にSiO接触によるコンバー
ジョン法で第1のSiC被膜を形成し、さらにその表面
をアモルファスSiCが析出するような条件でCVD法
による第2のSiC被覆層を形成する耐酸化処理法(特
願平2−114872号) 、更にこれを改良して第2の被覆層
を減圧加熱下でハロゲン化有機珪素化合物を基材組織に
間欠的に充填して還元熱分解させるパルスCVI法を用
いて形成する耐酸化処理法(特願平2−150640号) を開
発した。In order to solve such a problem, the present inventors have already formed a first SiC coating on the surface of a C / C substrate by a conversion method by contacting with SiO, and further depositing amorphous SiC on the surface. The oxidation resistance treatment method of forming a second SiC coating layer by the CVD method under the following conditions (Japanese Patent Application No. 2-114872), and by further improving this method, the second coating layer is halogenated organic under reduced pressure heating. An oxidation resistant treatment method (Japanese Patent Application No. 2-150640) has been developed, which is formed by using a pulse CVI method in which a silicon compound is intermittently filled in a base material structure and reductively pyrolyzed.
【0005】[0005]
【発明が解決しようとする課題】前記の耐酸化処理法の
うち、特に後者の方法を施すと各パルス毎に飽和度の高
い反応ガスが基材の任意部位へ侵入するため、第1層に
発生した微細クラックの内部にアモルファス質または微
細多結晶質のSiCを円滑に析出することができ、よっ
てC/C材の耐酸化性を大幅に向上させることができ
る。しかしながら、詳細に組織調査をおこなうと第1被
覆層面に析出させた第2被覆層のSiCにも微小な亀裂
が発生しており、完全な耐酸化性を付与するためにはこ
の亀裂を目詰めした組織とする必要が認められた。Among the above-mentioned oxidation resistant treatment methods, particularly when the latter method is applied, the reaction gas having a high degree of saturation enters each portion of the substrate at each pulse, so that the first layer is formed. Amorphous or fine polycrystalline SiC can be smoothly deposited inside the generated fine cracks, and thus the oxidation resistance of the C / C material can be significantly improved. However, a detailed microscopic investigation revealed that minute cracks were also formed in the SiC of the second coating layer deposited on the surface of the first coating layer, and these cracks were clogged in order to impart complete oxidation resistance. It was recognized that it was necessary to establish the organization.
【0006】したがって、本発明の目的は、先行技術を
更に改良を加えて一層高度な耐酸化性を具備した被覆組
織性状のC/C材を提供することにある。Therefore, it is an object of the present invention to provide a C / C material having a coating structure property which is further improved from the prior art and has higher oxidation resistance.
【0007】[0007]
【課題を解決するための手段】上記の目的を達成するた
めの本発明による耐酸化性C/C材は、炭素繊維強化炭
素材の基材面に、傾斜機能を有する多結晶質のSiC被
膜からなる第1被覆層、アモルファス質または微細多結
晶質のSiC被膜からなる第2被覆層、およびB2 O3
−SiO2 ガラス被膜からなる第3被覆層が積層形成さ
れてなることを構成上の特徴としている。The oxidation resistant C / C material according to the present invention for achieving the above object is a polycrystalline SiC coating having a gradient function on the surface of a base material of a carbon fiber reinforced carbon material. A first coating layer composed of, a second coating layer composed of an amorphous or fine polycrystalline SiC coating, and B 2 O 3
A structural feature is that a third coating layer made of a —SiO 2 glass coating is laminated.
【0008】基材となるC/Cは、炭素繊維の織布、フ
エルト、トウなどの強化繊維に炭化残留率の高いマトリ
ックス樹脂液を含浸または塗布して積層成形したのち、
硬化および焼成炭化処理する常用の方法で製造されたも
のが使用され、特に材料の限定はない。したがって、通
常、強化材の炭素繊維にはポリアクリロニトリル系、レ
ーヨン系、ピッチ系など各種のものが、またマトリック
ス樹脂としてフェノール系、フラン系その他炭化性の良
好な液状熱硬化性樹脂を用いたものが対象となる。The C / C as the base material is obtained by impregnating or applying a matrix resin liquid having a high carbonization residual ratio to reinforcing fibers such as carbon fiber woven cloth, felt, and tow, and then laminating the same.
What was manufactured by the conventional method of hardening and baking and carbonizing is used, and there is no particular limitation on the material. Therefore, usually, various carbon fibers such as polyacrylonitrile-based, rayon-based, and pitch-based carbon fibers are used as the reinforcing material, and phenol-based, furan-based, and other liquid thermosetting resins having good carbonization properties are used as the matrix resin. Is the target.
【0009】第1被覆層は、C/C基材の表層部が外面
に向かうに従って次第にSiCの組織化が進む傾斜機能
性状の多結晶質SiC被膜で、適切な膜厚は 100〜300
μm の範囲である。膜厚が 100μm 未満では良好な傾斜
機能組織が形成されず、300 μm を越える層形成は最早
不要である。The first coating layer is a functionally graded polycrystalline SiC coating in which SiC is gradually organized as the surface layer portion of the C / C base material goes to the outer surface, and an appropriate thickness is 100 to 300.
It is in the μm range. If the film thickness is less than 100 μm, a good functionally graded structure is not formed, and layer formation exceeding 300 μm is no longer necessary.
【0010】第2被覆層は、第1被覆層におけるSiC
組織の微細なクラックや空隙を充填封止するためのアモ
ルファス質または微細多結晶質のSiC被膜で、好適な
膜厚は10〜50μm の範囲である。10μm を下廻る膜厚で
は前記の充填封止効果が不十分となり、50μm を越える
膜厚は不要となる。The second coating layer is SiC in the first coating layer.
Amorphous or fine polycrystalline SiC film for filling and sealing fine cracks and voids in the structure, and the preferable film thickness is in the range of 10 to 50 μm. With a film thickness of less than 10 μm, the above-mentioned filling and sealing effect becomes insufficient, and a film thickness of more than 50 μm becomes unnecessary.
【0011】第3被覆層は、第2被覆層の生じる微小な
亀裂を目詰めするために形成されるもので、B2 O3 と
SiO2 の複合ガラス質の被膜で構成される。好適な膜
厚は5〜20μm の範囲で、これを下廻ると耐酸化性改善
効果が有効に達成されず、20μm を越える膜厚は不要で
ある。The third coating layer is formed to fill the minute cracks generated in the second coating layer, and is composed of a composite vitreous coating of B 2 O 3 and SiO 2 . A suitable film thickness is in the range of 5 to 20 μm, and if it is less than this, the effect of improving the oxidation resistance is not effectively achieved, and a film thickness exceeding 20 μm is unnecessary.
【0012】上記の積層構成を備える耐酸化性C/C材
は、下記にようにして製造することができる。第1被覆
層は、SiO2 粉末とSiもしくはC粉末を混合して密
閉加熱系に収納し、系内にC/C基材をセットして加熱
処理する工程により形成される。加熱段階でSiO2 が
還元され、生成したSiOガスがC/C基材を構成する
炭素と反応して表層部をSiCに転化する。この際、S
iOガスの濃度、反応温度、反応時間等を制御すること
によって基材のC層と被覆層のSiCが界面で連続的に
変化する傾斜機能を備える組織状態が形成される。The oxidation resistant C / C material having the above-mentioned laminated structure can be manufactured as follows. The first coating layer is formed by a step of mixing SiO 2 powder and Si or C powder, housing the mixture in a closed heating system, setting a C / C base material in the system, and performing heat treatment. SiO 2 is reduced in the heating step, and the generated SiO gas reacts with the carbon constituting the C / C base material to convert the surface layer portion into SiC. At this time, S
By controlling the concentration of the iO gas, the reaction temperature, the reaction time, etc., a tissue state having a gradient function in which the C layer of the base material and the SiC of the coating layer continuously change at the interface is formed.
【0013】第2被覆層の形成は、ハロゲン化有機珪素
化合物を水素ガスに同伴させながら石英反応室内で加熱
されているC/C基材にガス状態で接触させる操作を短
周期で間欠的に反復するパルスCVI工程によっておこ
なわれる。適切な反応条件は、ハロゲン化有機珪素化合
物としてトリクロロメチルシラン(CH3SiCl3)を用い、水
素ガスとのモル比(CH3SiCl3)が0.01〜0.05になるように
混合して 900〜1100℃に加熱されたC/C基材がセット
されている減圧状態の反応室に秒間隔で間欠的な導入・
停止を繰り返すことである。The formation of the second coating layer is carried out by intermittently making a short period of operation in which the halogenated organosilicon compound is brought into contact with the C / C base material heated in the quartz reaction chamber in a gaseous state while being accompanied by hydrogen gas. This is done by a repeating pulse CVI process. Appropriate reaction conditions are trichloromethylsilane (CH 3 SiCl 3 ) as a halogenated organosilicon compound, mixed so that the molar ratio with hydrogen gas (CH 3 SiCl 3 ) is 0.01 to 0.05, and 900 to 1100. Intermittently introduced into the reaction chamber under reduced pressure where the C / C substrate heated to ℃ is set at intervals of seconds.
To stop repeatedly.
【0014】第3被覆層のB2 O3 −SiO2 ガラス被
膜は、B(OC12H27)3およびSi(OC2 H5)4 を第
2被覆層面に真空含浸し、500 ℃熱処理する方法によっ
て形成される。この際、B2 O3 ガラスはB(OC12H
27)3を直接に真空含浸することにより形成することがで
きるが、SiO2 ガラスはSi(OC2 H5)4 を予めp
H1〜2に調整して加水分解重合したから真空含浸する
ことが好ましい。また、被覆順序として先にSiO2 ガ
ラスを被覆してからB2 O3 ガラスを被覆することが好
結果を与える。The B 2 O 3 --SiO 2 glass coating of the third coating layer is obtained by vacuum impregnating the surface of the second coating layer with B (OC 12 H 27 ) 3 and Si (OC 2 H 5 ) 4 and heat treating at 500 ° C. Formed by the method. At this time, the B 2 O 3 glass is B (OC 12 H
27 ) 3 can be formed by direct vacuum impregnation of SiO 2 glass, but SiO 2 glass has Si (OC 2 H 5 ) 4 p.
It is preferable to carry out vacuum impregnation since it is adjusted to H1-2 and hydrolyzed and polymerized. It is also preferable to coat the SiO 2 glass first and then the B 2 O 3 glass as the coating order.
【0015】[0015]
【作用】本発明において、傾斜機能を有する多結晶質の
SiC被膜からなる第1被覆層はC/C基材の表面に緻
密で密着性の高い厚膜として形成され、アモルファス質
または微細多結晶質のSiC被膜からなる第2被覆層は
前記第1被覆層の微小な空隙(ピンホール)やクラック
等を充填封止するとともに、全表面を薄膜状の緻密層と
して被覆する。そして、B2 O3 −SiO2 ガラス被膜
からなる第3被覆層は、第2被覆層に発生した微細なク
ラックを目詰めして被覆層の無孔構造化を確実なものと
する。このような3段階における積層被覆の各機能が総
合的に作用して、C/C基材の全表面に酸化雰囲気下で
の高温使用に耐える高耐酸化性能が付与される。In the present invention, the first coating layer composed of a polycrystalline SiC coating having a gradient function is formed as a dense and highly adherent thick film on the surface of the C / C substrate, and is amorphous or fine polycrystalline. The second coating layer made of a high quality SiC coating fills and seals minute voids (pinholes), cracks and the like of the first coating layer, and covers the entire surface as a thin film-like dense layer. Then, the third coating layer made of the B 2 O 3 —SiO 2 glass coating closes the fine cracks generated in the second coating layer to ensure the non-porous structure of the coating layer. The functions of the laminated coating in these three stages act comprehensively to impart high oxidation resistance to the entire surface of the C / C substrate, which can withstand high temperature use in an oxidizing atmosphere.
【0016】[0016]
【実施例】以下、本発明の実施例を比較例と対比して説
明する。 実施例 (1) C/C基材の作製 ポリアクリロニトリル系高弾性タイプの平織炭素繊維布
をフェノール樹脂初期縮合物からなるマトリックス樹脂
液に浸漬して含浸処理したのち、14枚積層してモール
ドに入れ、加熱温度110 ℃、適用圧力20kg/cm2の条件で
複合成形した。成形体を250 ℃の温度に加熱して完全に
硬化したのち、窒素雰囲気に保持された焼成炉に移し、
5℃/hr の昇温速度で2000℃まで上昇し5時間保持して
焼成炭化した。ついで、得られたC/C材にフェノール
樹脂液を真空加圧下に含浸し、前記と同様の2000℃焼成
処理を3回反復して二次元配向型のC/C基材を作製し
た。EXAMPLES Examples of the present invention will be described below in comparison with comparative examples. Example (1) Preparation of C / C base material A polyacrylonitrile-based high-elasticity type plain woven carbon fiber cloth was immersed in a matrix resin solution composed of a phenol resin initial condensation product for impregnation treatment, and then 14 sheets were laminated to form a mold. Then, the composite was molded under the conditions of a heating temperature of 110 ° C. and an applied pressure of 20 kg / cm 2 . After heating the molded body to a temperature of 250 ° C to completely cure it, transfer it to a firing furnace kept in a nitrogen atmosphere,
The temperature was raised to 2000 ° C. at a temperature rising rate of 5 ° C./hr, and the temperature was maintained for 5 hours for carbonization by firing. Then, the obtained C / C material was impregnated with a phenol resin solution under vacuum pressure, and the same 2000 ° C. baking treatment as described above was repeated three times to produce a two-dimensional orientation type C / C substrate.
【0017】(2) 第1被覆層の形成 SiO2 粉末とSi粉末をモル比2:1の配合比率にな
るように混合し、混合粉末を黒鉛ルツボに入れ上部にC
/C基材(幅30mm、長さ50mm、厚さ5mm) をセットし
た。この黒鉛ルツボを電気炉に移し、内部をArガスで
十分に置換したのち50℃/hr の速度で1850℃まで昇温さ
せ、2 時間保持してC/C基材の表層部に傾斜機能を有
するSiCの第1被覆層を形成した。形成されたSiC
被覆層の厚さは約 200μm であったが、その表面に幅10
μm 程度の亀裂が所々に発生していることが認められ
た。(2) Formation of first coating layer SiO 2 powder and Si powder are mixed in a molar ratio of 2: 1 and the mixed powder is put in a graphite crucible and C is added on top.
/ C base material (width 30 mm, length 50 mm, thickness 5 mm) was set. The graphite crucible was transferred to an electric furnace, the inside was sufficiently replaced with Ar gas, the temperature was raised to 1850 ° C. at a rate of 50 ° C./hr, and the temperature was maintained for 2 hours so that the surface layer of the C / C base material had a gradient function. A first coating layer of SiC having was formed. SiC formed
The thickness of the coating was about 200 μm, but the width of the coating was 10 μm.
It was confirmed that cracks of about μm were generated in some places.
【0018】(3) 第2被覆層の形成 第1被覆層を形成したC/C基材をパルスCVI装置の
石英反応管内に設置し管内をArガスで十分に置換した
のち高周波誘導加熱によりC/C基材の温度を1000℃に
上昇した。ついで、真空ポンプにより反応管内を2秒で
2Torr以下に減圧し、直ちにトリクロロメチルシラン(C
H3SiCl3)とH2 の混合ガス(モル比5:100)を1秒間で
720Torr になるように導入し1秒間保持した。この管内
減圧、反応ガス導入および保持の操作を3000回繰り返
し、厚さ20μm のアモルファス質または微細多結晶質S
iCの第二被覆層を形成した。形成した第2被覆層に
は、幅 0.5〜1.0 μm の微細なクラックが新たに発生し
た。(3) Formation of second coating layer The C / C substrate on which the first coating layer was formed was placed in a quartz reaction tube of a pulse CVI device, the inside of the tube was sufficiently replaced with Ar gas, and then C by high frequency induction heating. The temperature of the / C substrate was raised to 1000 ° C. Then, the pressure inside the reaction tube was reduced to 2 Torr or less in 2 seconds by a vacuum pump, and trichloromethylsilane (C
H 3 SiCl 3 ) and H 2 mixed gas (molar ratio 5: 100) in 1 second
It was introduced at 720 Torr and held for 1 second. The operation of decompressing the inside of the tube, introducing the reaction gas and holding the same is repeated 3000 times to obtain an amorphous or fine polycrystalline S having a thickness of 20 μm.
A second coating layer of iC was formed. Newly formed fine cracks having a width of 0.5 to 1.0 μm were formed in the formed second coating layer.
【0019】(4) 第3被覆層の形成 第2被覆層を形成したC/C基材を真空デシケータに入
れ、真空ポンプで1Torr以下に減圧したのち、Si(O
C2 H5)4 1モルに対し7モル量のエタノールを加え、
11モルの水と0.03モルのHClを混合してpH1.5 で加
水分解重合させた液を2Torrの減圧下に注入した。C/
C基材が完全に浸漬するまで液を注入し1時間保持し
た。ついで、C/C基材をデシケータから取り出し、空
気雰囲気の電気炉に移して10℃/min. の昇温速度で500
℃まで加熱し、この温度に30分間保持してSiO2 ガラ
スの被膜を形成した。(4) Formation of third coating layer The C / C base material on which the second coating layer is formed is placed in a vacuum desiccator and the pressure is reduced to 1 Torr or less by a vacuum pump, and then Si (O) is added.
7 mol of ethanol was added to 1 mol of C 2 H 5 ) 4 ,
A solution obtained by mixing 11 mol of water and 0.03 mol of HCl and performing hydrolysis polymerization at pH 1.5 was injected under a reduced pressure of 2 Torr. C /
The liquid was injected and kept for 1 hour until the C substrate was completely immersed. Then, the C / C base material was taken out from the desiccator, transferred to an electric furnace in an air atmosphere, and heated at a heating rate of 10 ° C / min.
It was heated to 0 ° C. and kept at this temperature for 30 minutes to form a film of SiO 2 glass.
【0020】SiO2 ガラス被覆を形成したC/C基材
を真空デシケータに入れ、1Torr以下に減圧したのち、
B(OC12H27)3を2Torr以下の減圧下に注入しC/C
基材が浸漬した状態で1時間保持した。C/C基材をデ
シケータから取り出し、室温空気中で2時間風乾したの
ち、空気雰囲気に保持された電気炉に移し500 ℃で30分
間加熱してB2 O3 ガラスの被膜を形成した。このよう
にして全面にB2 O3 −SiO2 ガラス被膜からなる第
3被覆層を形成した。The C / C substrate on which the SiO 2 glass coating was formed was placed in a vacuum desiccator and the pressure was reduced to 1 Torr or less.
Inject B (OC 12 H 27 ) 3 under reduced pressure of 2 Torr or less to C / C
The substrate was kept immersed for 1 hour. The C / C substrate was taken out of the desiccator, air-dried in room temperature air for 2 hours, transferred to an electric furnace maintained in an air atmosphere, and heated at 500 ° C. for 30 minutes to form a B 2 O 3 glass film. In this way, a third coating layer made of a B 2 O 3 —SiO 2 glass coating film was formed on the entire surface.
【0021】(5) 耐酸化性の評価 上記の3段階被覆を施したC/C基材を空気雰囲気に保
持された電気炉に入れ、500 ℃の温度に30分保持したの
ち常温まで自然冷却した。この工程を 500〜1500℃まで
の 100℃毎におこない、最終的なC/C基材の酸化によ
る重量減少率を測定した。その結果を表1に示した。(5) Evaluation of oxidation resistance The C / C base material coated with the above three-stage coating was placed in an electric furnace maintained in an air atmosphere, kept at a temperature of 500 ° C. for 30 minutes, and then naturally cooled to room temperature. did. This step was carried out every 100 ° C. from 500 to 1500 ° C., and the final weight loss rate of the C / C substrate due to oxidation was measured. The results are shown in Table 1.
【0022】比較例1 実施例の第1被覆層のみを形成したC/C基材につき、
同一条件による耐酸化性の評価をおこない、結果を表1
に併載した。Comparative Example 1 With respect to the C / C substrate having only the first coating layer of the example,
The oxidation resistance was evaluated under the same conditions, and the results are shown in Table 1.
It was also published in.
【0023】比較例2 実施例の第2被覆層までのSiC被膜を形成したC/C
基材につき、同一条件による耐酸化性の評価をおこな
い、結果を表1に示した。Comparative Example 2 C / C with SiC coating formed up to the second coating layer of Example
The base material was evaluated for oxidation resistance under the same conditions, and the results are shown in Table 1.
【0024】比較例3 実施例の同一条件で第1被覆層を形成し、これを常圧に
保持された反応管に設置して1000℃に加熱したのちトリ
クロロメチルシラン(CH3SiCl3)とH2 の混合反応ガス(
モル比5:100)を導入する通常のCVD処理により膜厚
20μm のSiC被膜を形成した。このようにして2段階
被覆形成したC/C基材につき実施例と同一条件による
耐酸化性の評価をおこない、結果を表1に併載した。COMPARATIVE EXAMPLE 3 A first coating layer was formed under the same conditions as in Example, placed in a reaction tube kept at atmospheric pressure, heated to 1000 ° C. and then treated with trichloromethylsilane (CH 3 SiCl 3 ). H 2 mixed reaction gas (
The film thickness is increased by a normal CVD process that introduces a molar ratio of 5: 100).
A 20 μm SiC film was formed. With respect to the C / C base material thus formed by two-step coating, the oxidation resistance was evaluated under the same conditions as in the examples, and the results are also shown in Table 1.
【0025】 [0025]
【0026】表1の結果から、本発明の実施例によるC
/C基材は高度の耐酸化性を備えることが認められる。
これに対し、第1被覆層のみの比較例1では高い酸化消
耗が発生する。第2被覆層までを形成した比較例2では
かなり耐酸化性は改善されているが、第2被覆層に微小
なクラックが存在するため実施例に比べて耐酸化性は減
少している。また、第2被覆工程を通常のCVD法でお
こなった比較例3では第1被覆層のクラック目詰め機能
が不十分となるため、耐酸化性の改善効果は少ない。From the results of Table 1, C according to the embodiment of the present invention
It is recognized that the / C substrate has a high degree of oxidation resistance.
On the other hand, in Comparative Example 1 including only the first coating layer, high oxidative consumption occurs. In Comparative Example 2 in which the second coating layer was formed, the oxidation resistance was considerably improved, but the oxidation resistance was reduced as compared to the Examples because of the presence of minute cracks in the second coating layer. Further, in Comparative Example 3 in which the second coating process is performed by the normal CVD method, the crack filling function of the first coating layer becomes insufficient, and therefore the effect of improving the oxidation resistance is small.
【0027】[0027]
【発明の効果】以上のとおり、本発明によれば表面に傾
斜機能を有する多結晶質のSiC第1被覆層、アモルフ
ァス質または微細多結晶質のSiC第2被覆層、および
B2 O3 −SiO2 ガラス被膜の第3被覆層が積層形成
された高度の耐酸化性を備えるC/C基材を提供するこ
とが可能となる。したがって、高温酸化雰囲気の過酷な
条件に晒される構造部材用途に適用して安定性能の確
保、耐久寿命の延長化などの効果が発揮される。As described above, according to the present invention, a polycrystalline SiC first coating layer having a surface gradient function, an amorphous or fine polycrystalline SiC second coating layer, and B 2 O 3-. It is possible to provide a C / C base material having a high degree of oxidation resistance in which a third coating layer of a SiO 2 glass coating is laminated. Therefore, when applied to structural member applications exposed to the severe conditions of a high temperature oxidizing atmosphere, effects such as securing stable performance and extending durable life are exhibited.
Claims (2)
能を有する多結晶質のSiC被膜からなる第1被覆層、
アモルファス質または微細多結晶質のSiC被膜からな
る第2被覆層、およびB2 O3 −SiO2 ガラス被膜か
らなる第3被覆層が積層形成されてなることを特徴とす
る耐酸化性炭素繊維強化炭素材。1. A first coating layer made of a polycrystalline SiC coating having a gradient function, on a substrate surface of a carbon fiber reinforced carbon material,
The second coating layer made of SiC film amorphous substance or micro polycrystalline, and B 2 O 3 -SiO 2 third coating layer oxidation-resistant carbon fiber, characterized in that formed by stacking formed of glass film reinforced Carbon material.
2被覆層の膜厚が10〜50μm 、第3被覆層の膜厚が5〜
20μm である請求項1記載の耐酸化性炭素繊維強化炭素
材。2. The first coating layer has a thickness of 100 to 300 μm, the second coating layer has a thickness of 10 to 50 μm, and the third coating layer has a thickness of 5 to 5.
The oxidation resistant carbon fiber reinforced carbon material according to claim 1, having a thickness of 20 μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3025643A JPH0791137B2 (en) | 1991-01-25 | 1991-01-25 | Oxidation resistant carbon fiber reinforced carbon material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3025643A JPH0791137B2 (en) | 1991-01-25 | 1991-01-25 | Oxidation resistant carbon fiber reinforced carbon material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04243989A JPH04243989A (en) | 1992-09-01 |
| JPH0791137B2 true JPH0791137B2 (en) | 1995-10-04 |
Family
ID=12171517
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3025643A Expired - Fee Related JPH0791137B2 (en) | 1991-01-25 | 1991-01-25 | Oxidation resistant carbon fiber reinforced carbon material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0791137B2 (en) |
-
1991
- 1991-01-25 JP JP3025643A patent/JPH0791137B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04243989A (en) | 1992-09-01 |
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