JPH0792051B2 - Neutral particle injector - Google Patents
Neutral particle injectorInfo
- Publication number
- JPH0792051B2 JPH0792051B2 JP23994786A JP23994786A JPH0792051B2 JP H0792051 B2 JPH0792051 B2 JP H0792051B2 JP 23994786 A JP23994786 A JP 23994786A JP 23994786 A JP23994786 A JP 23994786A JP H0792051 B2 JPH0792051 B2 JP H0792051B2
- Authority
- JP
- Japan
- Prior art keywords
- cryopump
- chamber
- regeneration
- ion source
- neutral particle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Electron Tubes For Measurement (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、制御熱核融合反応装置に用いられる中性粒子
入射装置に係り、特に排気運転と再生運転を同時に行え
るよう複数のクライオポンプ室を備えた中性粒子入射装
置に関する。Description: TECHNICAL FIELD The present invention relates to a neutral particle injection device used in a controlled thermonuclear fusion reactor, and more particularly, to a plurality of cryopump chambers so that exhaust operation and regeneration operation can be performed simultaneously. The present invention relates to a neutral particle injector.
第４図に基づいて従来例を説明する。この種従来例とし
て特開昭61−34364号公報等が挙げられる。真空容器１
にイオン源２が取り付けられており、イオンを作るため
イオン源２にはバルブ３を介して水素ガス（又は重水素
ガス）が供給される。イオン源２からのビームを中性化
するため中性化室４が該イオン源２に連設されている。
この中性化室４にはイオンと共に水素ガスも流入する。
ここで中性化されたビームはプラズマ室５へ入射され
る。ところで、真空容器１内は中性化されたビームを効
率良くプラズマ室へ入射するために低圧でなけばならな
い。イオン源２を駆動している間は中性化室４から水素
ガスが真空容器１内に流入する。そこで、クライオポン
プ９を設けて水素ガスを排気し低圧状態を保持してい
る。A conventional example will be described with reference to FIG. As a conventional example of this kind, there is, for example, JP-A-61-34364. Vacuum container 1
An ion source 2 is attached to the ion source 2, and hydrogen gas (or deuterium gas) is supplied to the ion source 2 through a valve 3 to generate ions. A neutralization chamber 4 is connected to the ion source 2 in order to neutralize the beam from the ion source 2.
Hydrogen gas flows into the neutralization chamber 4 together with the ions.
The neutralized beam is incident on the plasma chamber 5. By the way, the inside of the vacuum chamber 1 must be at a low pressure in order to efficiently enter the neutralized beam into the plasma chamber. While driving the ion source 2, hydrogen gas flows from the neutralization chamber 4 into the vacuum container 1. Therefore, a cryopump 9 is provided to exhaust hydrogen gas and maintain a low pressure state.
クライオポンプ９は、イオン源２側及びプラズマ室５の
各クライオポンプ室7,8内にそれぞれ設けられている。
このクライオポンプ室7,8は再生弁10を介して真空容器
１内と連通されている。通常、真空排気を効率良く行な
うため真空容器１内にはイオン源２側とプラズマ室５側
とを仕切り、ビーム通路部分が開口されている仕切板６
が設けられ差動排気されるようになつている。The cryopump 9 is provided in each of the cryopump chambers 7 and 8 of the ion source 2 side and the plasma chamber 5, respectively.
The cryopump chambers 7 and 8 are in communication with the inside of the vacuum container 1 via a regeneration valve 10. Usually, in order to efficiently perform vacuum evacuation, the partition plate 6 that partitions the ion source 2 side and the plasma chamber 5 side in the vacuum container 1 and has a beam passage portion opened.
Is provided for differential exhaust.
イオン源２を連続又は長時間運転するとクライオポンプ
９に凝縮したガス量が増加する。所定量まで凝縮される
と再生弁10が閉成され、該クライオポンプ９が再生運転
に切り変わる。この再生運転は、クライオポンプ９の温
度を上げて、凝縮した水素を再びガス化し図示しないタ
ーボ分子ポンプ等で排気するというものである。排気運
転状態からこの再生運転状態へ切り換わるときの凝縮ガ
ス量（前述の所定量）は、再生運転時に再びガス化され
たときのクライオポンプ室7,8内における水素ガスの爆
発限界圧力との関係で定められる。When the ion source 2 is operated continuously or for a long time, the amount of gas condensed in the cryopump 9 increases. When condensed to a predetermined amount, the regeneration valve 10 is closed and the cryopump 9 is switched to regeneration operation. In this regeneration operation, the temperature of the cryopump 9 is raised so that condensed hydrogen is gasified again and exhausted by a turbo molecular pump or the like (not shown). The amount of condensed gas when switching from the exhaust operation state to this regeneration operation state (the above-mentioned predetermined amount) is the explosive limit pressure of hydrogen gas in the cryopump chambers 7 and 8 when gasified again during regeneration operation. Determined by the relationship.
第５図乃至第９図は、クライオポンプ９の排気運転と再
生運転とを同時継続して中性粒子入射装置を連続運転し
ている状態を示すものである。イオン源２側とプラズマ
室５側にそれぞれ４室ずつ設けられたクライオポンプ室
7,8のうち、１室は再生運転、他の３室は排気運転さ
れ、再生運転室が第５図から第９図へと順次切り換わ
る。FIG. 5 to FIG. 9 show a state in which the exhaust operation and the regeneration operation of the cryopump 9 are simultaneously continued to continuously operate the neutral particle injection device. Four cryopump chambers are provided on each of the ion source 2 side and the plasma chamber 5 side.
Among 7,8, one room is operated for regeneration, the other three rooms are operated for exhaust, and the regeneration room is switched from FIG. 5 to FIG. 9 in sequence.
ところが、イオン源２側のクライオポンプ室７に流入す
るガス量は他方のクライオポンプ室８に流入するガス量
より多いにもかかわらず、その容積は両者同一であつた
ため、クライオポンプ室７の方は他方より短時間で再生
運転に切り換えられていた。このように再生時間が各ク
ライオポンプ室7,8で異なるため、その制御が複雑にな
ると共に再生用の付属設備の容量も大型化しなければな
らずスペース及び経済性の点で問題があつた。However, even though the amount of gas flowing into the cryopump chamber 7 on the ion source 2 side is larger than the amount of gas flowing into the other cryopump chamber 8, both volumes are the same, so the cryopump chamber 7 is the same. Was switched to regeneration operation in a shorter time than the other. As described above, since the regeneration times are different in the cryopump chambers 7 and 8, the control becomes complicated and the capacity of the auxiliary equipment for regeneration must be increased, which causes problems in space and economy.
本発明の目的は、再生運転時間をすべてのクライオポン
プ室で同一にしてその制御を単純化でき再生用付属設備
も小容量のもので足りる中性粒子入射装置を提供せんと
するものである。It is an object of the present invention to provide a neutral particle injection device in which the regeneration operation time is the same in all cryopump chambers and the control thereof can be simplified, and the auxiliary equipment for regeneration has a small capacity.
本発明は、イオン源側のクライオポンプ室の容積をその
再生周期がプラズマ室側のクライオポンプ室の再生周期
と同じになる大きさに形成することにより、イオン源側
のクライオポンプ室の再生周期を長くして小容量の再生
用付属設備での再生を可能にし、またその再生制御を容
易にしたものである。According to the present invention, the volume of the cryopump chamber on the ion source side is set to a size such that the regeneration cycle is the same as the regeneration cycle of the cryopump chamber on the plasma chamber side. This makes it possible to reproduce by a small amount of auxiliary equipment for reproduction, and facilitates the reproduction control.
第１図は本発明に係る中性粒子入射装置の構成図を示
す。イオン源２側のクライオポンプ室７の容積は他方の
クライオポンプ室８より大きく形成されている。その大
きさは、クライオポンプ室７の再生周期が他方のクライ
オポンプ室８の再生周期と同じになる大きさである。以
下、その容積の定め方を第２図に基づいて説明する。FIG. 1 shows a block diagram of a neutral particle injector according to the present invention. The volume of the cryopump chamber 7 on the ion source 2 side is larger than that of the other cryopump chamber 8. The size is such that the regeneration cycle of the cryopump chamber 7 becomes the same as the regeneration cycle of the other cryopump chamber 8. Hereinafter, how to determine the volume will be described with reference to FIG.
中性化室４から水素ガスがガス量にしてQA真空容器１内
に流入する。この内、クライオポンプ室７でQ1が凝縮
し、仕切板６を通過してQB＝QA−Q1が流れ、クライオポ
ンプ室８にQ2が凝縮し、プラズマ室５へQ3が流れる。ク
ライオポンプ室7,8の各容積をV1,V2とすると、ある時間
Ｔの間に凝縮した水素をクライオポンプ室の再生弁10を
閉成して再生するとき、凝縮していた水素が再びガス化
したクライオポンプ室7,8の各圧力P1,P2は となる。ここで、N1,N2は排気運転中クライオポンプ室
の数であり、本図ではN1＝N2＝３である。この圧力P1,P
2が水素ガスの爆発限界となるPCより小さい値であるこ
とが必要である。P1,P2がPCになるまでの時間をT1,T2と
すると となる。従来はV1とV2等しかつたため、Q1＜Q2の関係か
らT1＜T2であつた。本発明ではT1がT2と等しくなるよう
にV1を定めるものである。従つて となる。同図ではN1＝N2であるため、 となり、各ガス量Q1,Q2を測定することによりV1を定め
ることができる。N1≠N2のときは前式によりV1を求め
る。第３図に示した実施例がこの場合に相当し、N1＝3,
N2＝１である。同図においては仕切板６はなく、真空容
器が大径部1aと小径部1bとからなる。その他の構成は第
１図と同様なので説明は省略する。Hydrogen gas from the neutralization chamber 4 flows into the Q A vacuum container 1 in a gas amount. Among, Q 1 is condensed in the cryopump chamber 7, Q B = Q A -Q 1 flows through the partition plate 6, Q 2 is condensed in the cryopump chamber 8, the Q 3 into the plasma chamber 5 Flowing. Assuming that the volumes of the cryopump chambers 7 and 8 are V 1 and V 2 , when the condensed hydrogen during a certain time T is regenerated by closing the regeneration valve 10 of the cryopump chamber, the condensed hydrogen is The pressures P 1 and P 2 in the re-gasified cryopump chambers 7 and 8 are Becomes Here, N 1 and N 2 are the numbers of the cryopump chambers during the exhaust operation, and N 1 = N 2 = 3 in this figure. This pressure P 1 , P
2 is required to be P C value less than the explosion limit of hydrogen gas. If the time until P 1 , P 2 becomes P C is T 1 , T 2 Becomes In the past, V 1 and V 2 were equal, so T 1 <T 2 because of the relationship of Q 1 <Q 2 . In the present invention, V 1 is determined so that T 1 is equal to T 2 . Therefore Becomes Since N 1 = N 2 in the figure, Therefore, V 1 can be determined by measuring the gas amounts Q 1 and Q 2 . When N 1 ≠ N 2 , V 1 is calculated by the previous equation. The embodiment shown in FIG. 3 corresponds to this case, N 1 = 3,
N 2 = 1. In the figure, the partition plate 6 is not provided, and the vacuum container is composed of a large diameter portion 1a and a small diameter portion 1b. The other structure is similar to that of FIG.
次に作用を第２図に基づいて説明する。各クライオポン
プ室7,8のうち、それぞれ一室が再生運転、他の三室が
排気運転の状態にある。Q1＞Q2であるためクライオポン
プ室７内のクライオポンプ９に凝縮するガス量は、同一
時間ではクライオポンプ室８内のクライオポンプ９に凝
縮するガス量よりも多くなる。しかしV1をV2より大きく
形成してあるため、再生時に水素が再ガス化した状態に
おけるクライオポンプ室７内の圧力P1はPCにまでは達し
ない。従つて、爆発のおそれがなく、しかも再生周期が
同一であることにより、その制御が単純となる。Next, the operation will be described with reference to FIG. Of the cryopump chambers 7 and 8, one is in a regenerating operation and the other three are in an exhaust operation. Since Q 1 > Q 2 , the amount of gas condensed in the cryopump 9 in the cryopump chamber 7 is larger than the amount of gas condensed in the cryopump 9 in the cryopump chamber 8 at the same time. However, since V 1 is formed larger than V 2 , the pressure P 1 in the cryopump chamber 7 in the state where hydrogen is regasified during regeneration does not reach P C. Therefore, there is no danger of explosion and the control is simple because the regeneration cycle is the same.
本発明によれば、ガスが多く流入するイオン源側のクラ
イオポンプ室の容積をプラズマ室側のクライオポンプ室
の容積より大きくすると共に、その大きさを両ポンプ室
の再生周期が同一となるように形成したので、装置全体
の再生運転の制御を単純化することができ、しかも再生
時における同ポンプ室内の圧力をその容積の増加により
水素ガスの爆発限界値以下に保てるため、爆発のおそれ
はない。更に、クライオポンプ室の再生周期が長くなる
ため再生用の付属設備の能力を増加させる必要がなく、
スペース的にも経済的にも改善することができる。According to the present invention, the volume of the cryopump chamber on the ion source side into which a large amount of gas flows is made larger than the volume of the cryopump chamber on the plasma chamber side, and the size is set so that the regeneration cycles of both pump chambers are the same. Since it is formed in a simple manner, it is possible to simplify the control of the regeneration operation of the entire device, and since the pressure inside the pump chamber during regeneration can be kept below the explosion limit value of hydrogen gas by increasing its volume, there is no danger of explosion. Absent. Furthermore, since the regeneration cycle of the cryopump chamber becomes longer, it is not necessary to increase the capacity of auxiliary equipment for regeneration,
It can be improved both in space and economically.
第１図は本発明に係る中性粒子入射装置の構成図、第２
図はクライオポンプの容積の定め方を説明するための説
明図、第３図は本発明の他実施例を示す構成図、第４図
は従来の中性子入射装置を示す構成図、第５図乃至第９
図は再生運転と排気運転を同時継続して中性粒子入射装
置を連続運転している状態を示す説明図である。 １……真空容器、２……イオン源、５……プラズマ室、
7,8……クライオポンプ室、９……クライオポンプ、10
……再生弁。FIG. 1 is a block diagram of a neutral particle injector according to the present invention, and FIG.
FIG. 4 is an explanatory diagram for explaining how to determine the volume of the cryopump, FIG. 3 is a configuration diagram showing another embodiment of the present invention, FIG. 4 is a configuration diagram showing a conventional neutron injection device, and FIGS. 9th
The figure is an explanatory view showing a state in which the neutral particle injection device is continuously operated by simultaneously continuing the regeneration operation and the exhaust operation. 1 ... vacuum container, 2 ... ion source, 5 ... plasma chamber,
7,8 ...... Cryopumps room, 9 ...... Cryopumps, 10
...... Regeneration valve.
Claims (1)
が真空容器のイオン源側及びプラズマ室側に再生弁を介
してそれぞれ複数個ずつ設けられ前記イオン源側のクラ
イオポンプ室に他方よりガス量が多く流入する中性粒子
入射装置において、前記イオン源側のクライオポンプ室
の容積をその再生周期が他方のクライオポンプ室の再生
周期と同じになる大きさに形成したことを特徴とする中
性粒子入射装置。1. A plurality of cryopump chambers each having a cryopump are provided on the ion source side and the plasma chamber side of a vacuum container via a regeneration valve, and the cryopump chamber on the ion source side has a larger gas amount than the other. In the inflowing neutral particle injection device, the volume of the cryopump chamber on the side of the ion source is formed to have a size such that its regeneration cycle is the same as the regeneration cycle of the other cryopump chamber. apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23994786A JPH0792051B2 (en) | 1986-10-08 | 1986-10-08 | Neutral particle injector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23994786A JPH0792051B2 (en) | 1986-10-08 | 1986-10-08 | Neutral particle injector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6394089A JPS6394089A (en) | 1988-04-25 |
| JPH0792051B2 true JPH0792051B2 (en) | 1995-10-09 |
Family
ID=17052189
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23994786A Expired - Fee Related JPH0792051B2 (en) | 1986-10-08 | 1986-10-08 | Neutral particle injector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0792051B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4722569B2 (en) * | 2005-06-02 | 2011-07-13 | 本田技研工業株式会社 | Fuel cell vehicle |
-
1986
- 1986-10-08 JP JP23994786A patent/JPH0792051B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6394089A (en) | 1988-04-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |