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JPH0794982B2 - Positioning device - Google Patents
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JPH0794982B2 - Positioning device - Google Patents

Positioning device

Info

Publication number
JPH0794982B2
JPH0794982B2 JP14444489A JP14444489A JPH0794982B2 JP H0794982 B2 JPH0794982 B2 JP H0794982B2 JP 14444489 A JP14444489 A JP 14444489A JP 14444489 A JP14444489 A JP 14444489A JP H0794982 B2 JPH0794982 B2 JP H0794982B2
Authority
JP
Japan
Prior art keywords
measured
surface roughness
rotating body
measuring means
roughness measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP14444489A
Other languages
Japanese (ja)
Other versions
JPH039209A (en
Inventor
千尋 丸茂
洋一 戸井田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP14444489A priority Critical patent/JPH0794982B2/en
Publication of JPH039209A publication Critical patent/JPH039209A/en
Publication of JPH0794982B2 publication Critical patent/JPH0794982B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】 [産業上の利用分野] この発明は位置決め装置、特に回転体の表面粗さを測定
する際に、被測定回転体と表面粗さ測定手段との相対位
置を位置決めする位置決め装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention positions a relative position between a rotating body to be measured and surface roughness measuring means, particularly when measuring the surface roughness of a rotating body. The present invention relates to a positioning device.

[従来の技術] 円柱、円筒体、球体といった回転体の回転方向の表面粗
さを測定する際には、表面粗さ(凹凸)検出の方向が被
測定回転体の向心軸方向と一致するように、被測定回転
体と表面粗さ測定手段との相対位置を位置決めすること
が大切である。
[Prior Art] When measuring the surface roughness in the rotation direction of a rotating body such as a cylinder, a cylinder, or a sphere, the direction of surface roughness (irregularity) detection matches the centripetal axis direction of the measured rotating body. Thus, it is important to position the relative position between the rotating body to be measured and the surface roughness measuring means.

被測定回転体と表面粗さ測定手段との相対位置は、従
来、次のようにして行なわれていた。
Conventionally, the relative position between the rotating body to be measured and the surface roughness measuring means has been performed as follows.

まず最初に凹凸検出の方向と被測定回転体の向心軸とが
ほぼ一致していると考えられる状態で被測定回転体と表
面粗さ測定手段との相対位置を位置決めする。
First, the relative position between the rotating body to be measured and the surface roughness measuring means is positioned in a state in which it is considered that the direction of the unevenness detection and the centripetal axis of the rotating body to be measured are substantially aligned.

次に前記凹凸検出方向と直交する方向に、表面粗さ測定
手段と被測定回転体との相対位置を移動させ、その移動
の際に測定して得られる静止状態の被測定回転体の検出
器に対応する部位の面高さに基づいて、測定手段による
表面粗さ検出の方向と被測定回転体の向心方向とが一致
する、もしくは一致した状態に極めて近い状態を求める
ことによって、被測定回転体と表面粗さ測定手段との相
対位置を決めるのである。
Next, the relative position of the surface roughness measuring means and the rotating body to be measured is moved in a direction orthogonal to the unevenness detecting direction, and the detector of the rotating body to be measured in a stationary state obtained by measurement during the movement. Based on the surface height of the part corresponding to, the direction of the surface roughness detection by the measuring means and the centripetal direction of the rotating body to be measured match or are extremely close to The relative position between the rotating body and the surface roughness measuring means is determined.

[発明が解決しようとする課題] 従来の被測定回転体と表面粗さ測定手段との相対位置の
位置決めでは、基本的に手作業であり、位置決めの施行
に多くの時間や手間がかかり、短時間で簡単に位置決め
状態を得るには熟練を要するという問題がある。又、測
定が接触式の場合では試行が多いと被測定回転体をその
多い分だけ傷つけて、真の被測定表面粗さを得ることが
できなくなる場合があるという問題がある。
[Problems to be Solved by the Invention] In the conventional positioning of the relative position between the rotating body to be measured and the surface roughness measuring means, it is basically a manual work, and it takes a lot of time and labor to carry out the positioning, which is short. There is a problem that skill is required to easily obtain the positioning state in time. Further, in the case of contact type measurement, if many trials are made, there is a problem that the measured rotating body may be damaged by that much and the true measured surface roughness may not be obtained.

この発明は前記従来技術の課題に鑑みなされたものであ
り、その目的は被測定回転体と表面粗さ測定手段との相
対位置の位置決めを熟練を必要とせずに簡便に短時間で
おこない得る位置決め装置を提供することにある。
The present invention has been made in view of the above-mentioned problems of the prior art, and an object thereof is to perform positioning of relative positions of a rotating body to be measured and surface roughness measuring means simply and in a short time without requiring skill. To provide a device.

[課題を解決するための手段] 前記目的を達成するために本発明にかかる位置決め装置
は、移動手段と、記憶手段と、演算手段と、制御部とを
備える。
[Means for Solving the Problems] In order to achieve the above object, a positioning device according to the present invention includes a moving unit, a storage unit, a computing unit, and a control unit.

そして、前記移動手段は、被測定回転体の回転軸及び前
記表面粗さ測定手段による凹凸検出方向軸と直交する方
向に前記表面粗さ測定手段を移動させ得る。
The moving means can move the surface roughness measuring means in a direction orthogonal to the rotation axis of the rotating body to be measured and the unevenness detection direction axis of the surface roughness measuring means.

まち、記憶手段は、被測定回転体の平均的な半径Rと、
その被測定回転体の表面粗さのレンジdとに基づき、式
により算出される移動距離x0、 x0>(2R・d)1/2 及び前記表面粗さ測定手段の検出部に対応する被測定回
転体の部位の面高さを記憶する。
The storage means stores the average radius R of the rotating body to be measured,
Corresponding to the moving distances x 0 , x 0 > (2R · d) 1/2 calculated by the formula based on the range d of the surface roughness of the rotating body to be measured and the detecting portion of the surface roughness measuring means. The surface height of the portion of the rotating body to be measured is stored.

演算手段は、その記憶部に記憶されている面高さと表面
粗さ測定手段が測定する被測定回転体の面高さの比較を
おこなう。
The calculation means compares the surface height stored in the storage unit with the surface height of the measured rotating body measured by the surface roughness measuring means.

制御部は、被測定回転体と表面粗さ測定手段とがある特
定の相対位置に位置決めされてその際の面高さが測定さ
れると、前記特定の相対位置から被測定回転体と表面粗
さ測定手段との相対位置を前記特定距離x0だけ移動さ
せ、続いてその移動の後の面高さが測定されるとその連
続する二つの相対位置におけるそれぞれの面高さを演算
部が比較し、被測定回転体と表面粗さ測定手段との連続
する二つの相対位置における前ステップの面高さが後ス
テップの面高さよりも高いもしくは等しくなるまで移動
手段及び演算部にそれぞれ繰返して作動をおこなわすた
めの制御信号を出力し、前ステップの面高さが後ステッ
プの面高さよりも高いもしくは等しくなったならば移動
手段の移動距離を前記特定距離より短いものにし且つ移
動方向を反転させて相対位置の移動と面高さの比較を繰
返し、被測定回転体と表面粗さ測定手段との連続する二
つの相対位置において、前後ステップの各面高さの比較
結果に基づき面高さがより高い相対位置をとり得るよう
に、移動手段及び演算手段にそれぞれ制御信号を出力す
る。
When the control unit is positioned at a specific relative position between the measured rotary body and the surface roughness measuring means and the surface height at that time is measured, the measured rotary body and the surface roughness are measured from the specific relative position. When the relative position with respect to the measuring means is moved by the specific distance x 0 , and the surface height after the movement is subsequently measured, the arithmetic unit compares the respective surface heights at the two continuous relative positions. However, the moving means and the computing unit are repeatedly operated until the surface height of the preceding step at two consecutive relative positions of the rotating body to be measured and the surface roughness measuring means becomes higher than or equal to the surface height of the succeeding step. When the surface height of the previous step is higher than or equal to the surface height of the subsequent step, the moving distance of the moving means is made shorter than the specific distance and the moving direction is reversed. Let me The movement of the pair position and the comparison of the surface height are repeated, and the surface height becomes higher based on the comparison result of the surface heights of the front and rear steps at two consecutive relative positions of the rotating body to be measured and the surface roughness measuring means. Control signals are output to the moving means and the calculating means so that a high relative position can be obtained.

尚、被測定回転体と表面粗さ測定手段との相対位置を移
動させる際の特定距離は、被測定回転体の平均的な半径
と表面粗さのレンジとの積を二倍し、その値を二分の一
乗して得られる値より実質的に僅かに大きい値とある
が、実質的に僅かに大きいとは被測定回転体の平均的な
半径と表面粗さのレンジとの積を二倍した値を二分の一
乗して得られる値が不等号のみが成立つ臨界的な値であ
ることを意味する。
The specific distance when moving the relative position between the measured rotating body and the surface roughness measuring means is obtained by doubling the product of the average radius of the measured rotating body and the range of the surface roughness, and the value thereof. Is a value that is substantially slightly larger than the value obtained by halving, but is substantially slightly larger than twice the product of the average radius of the measured rotating body and the range of surface roughness. It means that the value obtained by halving the above value is a critical value where only the inequality sign holds.

[作用] すなわち本発明にかかる位置決め装置は、まず最初に移
動手段を作動させて被測定回転体と表面粗さ測定手段と
の相対位置を特定距離だけづつ相対移動させることによ
って、被測定回転体と表面粗さ測定手段との連続する二
つの相対位置において検出した場合の、前ステップの面
高さが後ステップの面高さよりも高いもしくは等しくな
る状態を得る。
[Operation] That is, in the positioning device according to the present invention, first, the moving means is actuated to move the relative position between the rotating body to be measured and the surface roughness measuring means relative to each other by a specific distance, whereby the rotating body to be measured is moved. The surface height of the front step is higher or equal to the surface height of the rear step when detected at two consecutive relative positions of the surface roughness measuring means and the surface roughness measuring means.

次に、相対移動方向を逆転させて同様の操作を行なう。
この際に、移動距離は前記特定距離よりも短くする。
Next, the relative movement direction is reversed and the same operation is performed.
At this time, the moving distance is set shorter than the specific distance.

例えば被測定回転体の表面粗さ測定を行なう場合、一般
に表面粗さは表面粗さ測定装置の検出部の鉛直方向への
振動として把握することができる。従って、検出部の鉛
直方向軸と被測定回転体の向心軸とを一致させるために
は、被測定回転体の最も高い表面位置と検出部の検出位
置とを一致させればよい。
For example, when measuring the surface roughness of a rotating body to be measured, generally, the surface roughness can be grasped as a vibration in the vertical direction of the detection unit of the surface roughness measuring device. Therefore, in order to make the vertical axis of the detection unit and the centripetal axis of the rotating body to be measured coincide, the highest surface position of the rotating body to be measured and the detection position of the detecting unit may be made to coincide with each other.

そこで、本発明者らは被測定回転体の最も高い表面位置
を自動的に探索するため、次のような手法を採った。
Therefore, the present inventors have adopted the following method in order to automatically search for the highest surface position of the rotating body to be measured.

すなわち、図5に示すように被測定回転体7の鉛直向心
軸(Y軸)を探索するため、まず図中の位置の表面高
さH1を表面粗さ測定装置自体の検出部にて測定する。次
に、図中左方向に検出部を距離x0だけ移動させ、の位
置で表面高さH2を測定する。この際、H2>H1であるか
ら、鉛直向心軸(Y軸)は更に左方向にあることがわか
る。そこで、更に検出位置を左方向に更に距離x0移動
し、の位置で表面高さH3を測定する。この際、H3<H2
であるから、鉛直向心軸(Y軸)は通り過ぎてしまって
いる。
That is, as shown in FIG. 5, in order to search the vertical axis (Y axis) of the rotating body to be measured 7, first, the surface height H 1 at the position in the figure is detected by the detection unit of the surface roughness measuring device itself. taking measurement. Next, the detector is moved leftward in the figure by a distance x 0 , and the surface height H 2 is measured at the position. At this time, since H 2 > H 1 , it can be seen that the vertical axis (Y-axis) is further to the left. Therefore, the detection position is further moved to the left by a distance x 0 , and the surface height H 3 is measured at the position. At this time, H 3 <H 2
Therefore, the vertical axis (Y-axis) has passed.

そこで、今度は前記距離x0より小さいx1だけ右方向に表
面高さ検出位置を移動させ、位置で表面高さH4を測定
し、前記表面高さH3との比較を行なう。この後、表面高
さ検出位置の移動方向を右方向、移動距離をx1として、
前記同様に操作する。
Therefore, this time, the surface height detection position is moved rightward by x 1 smaller than the distance x 0 , the surface height H 4 is measured at the position, and the comparison with the surface height H 3 is performed. After that, the moving direction of the surface height detection position is to the right and the moving distance is x 1 ,
Operate in the same manner as above.

このように、向心軸を通り過ぎる毎に表面高さ検出位置
の移動方向を反転させ、更に徐々に移動距離xを小さく
して行くことで、検出部を徐々に鉛直向心軸近傍にもっ
て行くことができる。
In this way, the moving direction x of the surface height detection position is reversed every time the center axis is passed, and the moving distance x is further gradually reduced, so that the detection unit is gradually brought close to the vertical center axis. be able to.

ここで、単純に考えれば、例えば表面高さ位置を位置
から連続的に左方向に走査し、その極大高さ位置を求め
ることで、鉛直向心軸と一致するようにも考えられる。
しかしながら、実際には被測定回転体に表面粗さが存在
するため、該表面粗さの凹凸の凸位置を極大値として検
出してしまう場合があるため、このような連続高さ位置
測定に基づく鉛直向心軸探索は現実的でない。
Here, from a simple point of view, for example, the surface height position may be continuously scanned from the position in the left direction, and the maximum height position may be obtained so as to match the vertical axis.
However, in reality, since there is surface roughness on the rotating body to be measured, the convex position of the unevenness of the surface roughness may be detected as the maximum value. Therefore, it is based on such continuous height position measurement. Vertical axis search is not practical.

そこで、前述したように本発明においては距離xを隔て
て段階的に表面高さ測定位置を移動させている。
Therefore, as described above, in the present invention, the surface height measurement position is moved stepwise at a distance x.

ところで、被測定回転体の向心軸に表面粗さ測定装置の
検出方向がより近い位置となるように相対位置の移動を
おこなう際に、移動の距離xが大き過ぎて表面粗さ測定
手段の検出方向が被測定回転体の向心軸の位置を越えて
移動前に比べて向心軸からあまり遠い位置となっては移
動そのものが意味を持たないことになるから、移動の距
離は小さいのが望ましい。
By the way, when the relative position is moved so that the detection direction of the surface roughness measuring device is closer to the centripetal axis of the rotating body to be measured, the movement distance x is too large and the surface roughness measuring means If the detection direction exceeds the position of the centripetal axis of the rotating body to be measured and is far away from the centripetal axis compared to before the movement, the movement itself has no meaning, so the movement distance is small. Is desirable.

ところが移動距離xを当初より小さくしすぎると、前述
した表面粗さに基づく凸位置を(最高点)鉛直向心軸位
置と判断してしまうおそれがある。
However, if the moving distance x is made too small from the initial value, the convex position based on the surface roughness described above may be determined to be the (maximum point) vertical center axis position.

そこで、本発明者らは更に移動距離xの特定に検討を進
めた。
Therefore, the present inventors have further studied to identify the moving distance x.

すなわち、第5図に示すように、被測定回転体の鉛直向
心軸と該回転体の表面の交差位置を原点O:座標(0,0)
とし、半径Rの被測定回転体の断面図を考えた場合、該
被測定回転体の表面座標(x,y)は、 {x,(R2−x21/2−R} で表される。
That is, as shown in FIG. 5, the intersection of the vertical axis of the rotating body to be measured and the surface of the rotating body is defined as the origin O: coordinate (0,0).
Then, when considering a sectional view of the rotating body under measurement having a radius R, the surface coordinates (x, y) of the rotating body under measurement are represented by {x, (R 2 −x 2 ) 1/2 −R}. To be done.

しかしながら、表面粗さが存在するため、更に第4図に
示すように表面粗さのレンジdを考慮しなければならな
い。
However, since there is surface roughness, the range d of surface roughness must be taken into consideration as shown in FIG.

同図より明らかなように、前記半径Rの回転体は平均円
C1として把握され、表面粗さの凸部を結んだ円は半径が
d/2だけ大きい外周円C2として、また表面粗さの凹部を
結んだ円は半径がd/2だけ小さい内周円C3としてそれぞ
れ把握される。
As is clear from the figure, the rotating body with the radius R is the average circle.
Be understood as C 1, a circle connecting the convex portions of the surface roughness is the radius
The outer circle C 2 is larger by d / 2, and the circle connecting the concave portions of the surface roughness is grasped as the inner circle C 3 whose radius is smaller by d / 2.

従って、外周円の表面座標位置は、 [x,{(R+d/2)−x21/2−R] また、内周円の表面座標位置は、 [x,{(R−d/2)−x21/2−R] としてそれぞれ表現される。Thus, the surface coordinates of the outer circumferential circle, [x, {(R + d / 2) 2 -x 2} 1/2 -R] Further, the surface coordinate position of the inner circumference is, [x, {(R- d / 2) 2− x 2 } 1 / 2− R], respectively.

そして、前記特定移動距離x0が表面粗さに基づく凹凸の
影響を受けない範囲に設定されるためには、次のように
決定される必要がある。
Then, in order to set the specific movement distance x 0 in a range that is not affected by the unevenness based on the surface roughness, it is necessary to determine as follows.

すなわち、第4図に示すように被測定回転体7aの平均半
径がRであって、且つ表面粗さのレンジがdであり、加
えて表面粗さの検出方向が上下方向である際に、被測定
回転体7aの回転の中心から最も内側に位置する点 P[x,{(R−d/2)−x21/2−R] から、被測定回転体7aの回転の中心から最も外側に位置
し、しかも被測定回転体7aの上下方向に伸びる向心軸y
に対して点Pより遠い位置にある点 Q[X+x0,{(R+d/2)−(x+x01/2
R] を想定する。
That is, as shown in FIG. 4, when the average radius of the measured rotating body 7a is R, the range of the surface roughness is d, and the detection direction of the surface roughness is the vertical direction, P point located innermost from the center of rotation of the measured rotating body 7a [x, {(R- d / 2) 2 -x 2} 1/2 -R] from the rotation of the measured rotating body 7a center Of the centripetal axis y that is located on the outermost side from the
Point located far from the point P with respect to Q [X + x 0, { (R + d / 2) 2 - (x + x 0) 2} 1/2 -
R] is assumed.

そして、点P及び点Qの表面高さを測定した場合に、点
Pの方が点Qより鉛直向心軸Yに近いにもかかわらず、
点Pの高さ位置が点Qの高さ位置より低くなると、適当
な向心軸探索が行なわれなくなる。
When the surface heights of the points P and Q are measured, the point P is closer to the vertical axis Y than the point Q,
When the height position of the point P becomes lower than the height position of the point Q, an appropriate centripetal axis search cannot be performed.

そこで、表面粗さに基づく凹凸にかかわらず点Pの高さ
が点Qの高さより高くなる特定距離x0(>0)を考えて
みる。この関係を、不等式であらわすと、次式が得られ
る。
Therefore, consider a specific distance x 0 (> 0) at which the height of the point P is higher than the height of the point Q regardless of the unevenness based on the surface roughness. If this relation is expressed by an inequality, the following equation is obtained.

{(R−d/2)−x21/2−R〉{(R+d/2) −(x+x01/2−R この不等式を特定距離x0について解くと、 x0>−x+{x2+2R・d}1/2(x〉0) が得られる。 {(R-d / 2) 2 -x 2} 1/2 -R> - Solving for {(R + d / 2) 2 (x + x 0) 2} 1/2 -R certain distance x 0 of this inequality, x 0 > −x + {x 2 + 2R · d} 1/2 (x> 0) is obtained.

ここで、f(x)={2R・d+x21/2−xと定義する
と、次式を得る。
Here, if f (x) = {2R · d + x 2 ) 1/2 −x is defined, the following equation is obtained.

x0〉f(x) 又、f(x)の増減を調べるために両辺を微分して、次
式を得る。
x 0 > f (x) Further, in order to check the increase / decrease of f (x), both sides are differentiated to obtain the following equation.

f′(x)=x/{2R・d+x21/2−1 ところで、x〈{2R・d+x21/2であることよりx/{2
R・d+x21/2〈1であり、全てのxに対してf′
(x)は常に負であることよりf(x)は減少関数であ
る。よって、点Pが少なくとも向心軸y上にある場合ま
でを高低差判定の要請範囲とするならば、f(x)はx
=0の場合に臨界的に最大値をとることになる。従っ
て、求めるx0の最小値については、次の関係を得る。
f ′ (x) = x / {2R · d + x 2 } 1/2 −1 By the way, since x <{2R · d + x 2 } 1/2 , x / {2
R · d + x 2 } 1/2 <1 and f ′ for all x
Since (x) is always negative, f (x) is a decreasing function. Therefore, if the required range for the height difference determination is at least until the point P is on the centripetal axis y, f (x) is x
When = 0, the maximum value is taken critically. Therefore, for the minimum value of x 0 to be obtained, the following relation is obtained.

x0〉f(0)={2R・d}1/2 つまり、求める距離x0は、臨界的に{2R・d}1/2をと
るのが妥当となる。
x 0 > f (0) = {2R · d} 1/2 That is, it is appropriate that the obtained distance x 0 is critically set to {2R · d} 1/2 .

加えて、特定距離x0は、予め被測定回転体の半径及び表
面粗さのレンジが例えば経験等によって知られている場
合では、その知られている二つの値から適当と考えられ
る値を想定して与えることができる。又、被測定回転体
の表面粗さのレンジの凡その値を上記表面粗さ測定手段
によって、被測定回転体の半径をノギスやマイクロメー
タといった測長機器によってそれぞれ求め、求めた値に
基づいて特定距離を与えることができる。
In addition, when the range of the radius and surface roughness of the rotating body to be measured is known in advance, for example, the specific distance x 0 is assumed to be a value considered appropriate from the two known values. Can be given. Further, the approximate value of the range of the surface roughness of the measured rotating body is obtained by the surface roughness measuring means, and the radius of the measured rotating body is obtained by a length measuring device such as a caliper or a micrometer, and based on the obtained value. A specific distance can be given.

又、移動距離が特定距離よりも短い値である第二の移動
プロセス以降においては、具体的には、その短い移動距
離の値として特定距離を二分の一ずつ減少させた値であ
って、且つ少なくとも各移動プロセスの最初の移動の方
向が、前段階移動プロセスの最後の移動の方向と逆方向
である移動が挙げられる。つまり、第二の移動プロセス
の最初の移動距離を特定距離の二分の一とし、それ以降
の移動プロセスの移動距離を順次に二分の一ずつ減少さ
せた値とし、しかも移動プロセスが変わるたびに移動の
方向が逆になるのである。
In addition, after the second movement process in which the movement distance is a value shorter than the specific distance, specifically, it is a value obtained by reducing the specific distance by half as the value of the short movement distance, and At least a movement in which the direction of the first movement of each movement process is opposite to the direction of the last movement of the preceding movement process. In other words, the first movement distance of the second movement process is set to half the specified distance, the movement distance of the movement process after that is decreased by one half, and the movement distance is changed every time the movement process changes. The direction of is reversed.

ところで、第一の移動ステップにおける最後の移動及び
最後から二番目の移動によって得られる二つの相対位置
の間に検出方向が向心方向と一致する相対位置があるか
ら、第二の移動ステップの移動によって検出方向が向心
方向により近い状態となる被測定回転体と表面粗さ測定
手段との相対位置をとることができる。
By the way, since there is a relative position where the detection direction matches the centripetal direction between the two relative positions obtained by the last movement and the penultimate movement in the first movement step, the movement of the second movement step Thus, the relative position between the rotating body to be measured and the surface roughness measuring means in which the detection direction is closer to the centripetal direction can be obtained.

移動手段は、まず最初に被測定回転体と表面粗さ測定装
置との相対位置を特定距離ずつだけ移動することによっ
て、その相対位置に表面粗さ測定装置の検出方向が向心
方向と一致する相対位置を間に挟む連続する二つの相対
位置を取らせ、然る後に前記特定距離よりも短い距離で
相対位置を移動することによって、面高さのより高い相
対位置を取らせる。
The moving means first moves the relative position between the rotating body to be measured and the surface roughness measuring device by a specific distance so that the detection direction of the surface roughness measuring device coincides with the centripetal direction at the relative position. Two continuous relative positions sandwiching the relative position therebetween are taken, and then the relative position is moved by a distance shorter than the specific distance, whereby a relative position having a higher surface height is obtained.

[実施例] この発明を、第1〜3図に示す実施例に基づき詳述す
る。しかし、この実施例によって、この発明が限定され
るものではない。
[Embodiment] The present invention will be described in detail based on an embodiment shown in Figs. However, the present invention is not limited to the embodiments.

位置決め装置1は第1図に示すように、表面粗さ測定装
置2に組込まれている。
The positioning device 1 is incorporated in the surface roughness measuring device 2 as shown in FIG.

表面粗さ測定装置2は、接触タイプの表面粗さ測定手段
3と、表面粗さ測定手段3を水平前後方向である矢印A
方向に移動させ得る移動手段4と、移動手段4を上下方
向である矢印B方向にスライドさせ得るスライド手段5
と、表面粗さ測定手段3が検出する値を所定の形に演算
表示する演算表示手段6と、表面粗さ測定手段3に対し
て被測定回転体7の被測定部位が連続的に移動するよう
に被測定回転体である球体7を回転駆動するための回転
駆動手段8と、基台9とを備えて構成されている。
The surface roughness measuring device 2 includes a contact-type surface roughness measuring means 3 and an arrow A which indicates the surface roughness measuring means 3 in a horizontal front-back direction.
Moving means 4 that can move in the direction, and sliding means 5 that can slide the moving means 4 in the direction of arrow B, which is the vertical direction.
And a calculation display means 6 for calculating and displaying a value detected by the surface roughness measuring means 3 in a predetermined form, and a measured portion of the measured rotating body 7 continuously moves with respect to the surface roughness measuring means 3. As described above, the rotational driving means 8 for rotationally driving the sphere 7, which is the rotating body to be measured, and the base 9 are provided.

表面粗さ測定手段3は、回転駆動手段8によって回転駆
動されている被測定回転体7がその回転の中心軸にそっ
て揺動する際に、球体7に当接する二つのスキッド(図
示省略)がその揺動に追従するように、表面粗さ測定手
段本体10に対して揺動可能で前記二つのスキッドを保持
するノーズピース11が備えられている。
The surface roughness measuring means 3 has two skids (not shown) that come into contact with the spherical body 7 when the measured rotating body 7 rotationally driven by the rotational driving means 8 swings along the central axis of the rotation. In order to follow the swing, the nosepiece 11 which is swingable with respect to the surface roughness measuring means main body 10 and holds the two skids is provided.

移動手段4は、出力モータ12と出力モータ12で作動する
ボールネジ13と、ガイド部材14と、ボールネジ13のナッ
ト側に連結され、且つガイド部材14に案内されて矢印A
方向に移動するスライダ15と、スライダ15に一体化し表
面粗さ測定手段3を保持するホルダ16とが備えられてい
る。
The moving means 4 is connected to the output motor 12 and the ball screw 13 that operates with the output motor 12, the guide member 14, and the nut side of the ball screw 13, and is guided by the guide member 14 so that the arrow A
A slider 15 that moves in the direction and a holder 16 that is integrated with the slider 15 and holds the surface roughness measuring means 3 are provided.

スライド手段5は、基台9に垂直上方に立設された支柱
17と、支柱17の上下方向(矢印B方向)にスライドする
リフト18と、リフト18をスライドさせるための出力モー
タ19及びボールネジ20とを備えて構成されている。
The slide means 5 is a column that is erected vertically upward on the base 9.
17, a lift 18 that slides in the vertical direction (direction of arrow B) of the support column 17, an output motor 19 for sliding the lift 18, and a ball screw 20.

演算表示手段6には、演算部21と、制御部22と、記憶部
23と、液晶表示部24及びプリンタ25が備えられている。
記憶部23には、移動手段4の移動する距離が記憶され
る。演算表示手段6の上面には、操作パネル26が配設さ
れている。
The calculation display means 6 includes a calculation unit 21, a control unit 22, and a storage unit.
23, a liquid crystal display unit 24, and a printer 25.
The storage unit 23 stores the moving distance of the moving unit 4. An operation panel 26 is provided on the upper surface of the calculation display means 6.

回転駆動手段8は、出力モータ27と、被測定回転体を載
置支持して回転するローラ28,29と、出力モータ27の回
転駆動をローラ28,29に摩擦伝動によって伝える摩擦伝
動手段(図示省略)を備えて構成されている。30は、被
測定回転体が球体である際にその球体を所定位置で回転
させるためのクビレ部である。
The rotation driving means 8 includes an output motor 27, rollers 28 and 29 that rotate by mounting and supporting a rotating body to be measured, and friction transmission means that transmits the rotation drive of the output motor 27 to the rollers 28 and 29 by friction transmission. (Omitted). Reference numeral 30 denotes a constriction portion for rotating the sphere to be measured at a predetermined position when the rotator to be measured is a sphere.

以下において、位置決め装置1を用いて、球体7に対す
る表面粗さ測定手段3の相対位置を決める位置決め方法
を説明する。
A positioning method for determining the relative position of the surface roughness measuring means 3 with respect to the sphere 7 using the positioning device 1 will be described below.

まず、球体7を、回転駆動手段8のローラ28とローラ29
のクビレ部30に載置する。この状態で球体7を装置した
回転駆動手段8を、ローラ28,29の軸方向と表面粗さ測
定手段3の伸長方向とが直交し、且つ表面粗さ測定手段
3の検出部(図示省略)が球体7のほぼ頂点の上方に位
置するように位置決めする。
First, the sphere 7 is moved to the roller 28 and the roller 29 of the rotation driving means 8.
Place it on the constriction section 30 of. In this state, the rotation driving means 8 equipped with the sphere 7 is arranged such that the axial directions of the rollers 28 and 29 and the extending direction of the surface roughness measuring means 3 are orthogonal to each other, and the detecting portion of the surface roughness measuring means 3 (not shown). Are positioned so that they are located substantially above the apex of the sphere 7.

次に、操作パネル26を操作して、表面粗さ測定装置2の
作動をスタートさせる。このスタートによって、制御部
22が出力モータ19に出力開始のための制御信号を、移動
手段4に移動方向が矢印A方向後方(第2図において、
矢印A右方向)になるための制御信号をそれぞれ送る。
出力モータ19の出力によってスライド手段5が作動し、
移動手段4に保持されている表面粗さ測定手段3は矢印
B方向下方にスライドする。スライドして下降して来た
表面粗さ測定手段3の検出部が球体7に接触すると、表
面粗さ測定手段3はこの接触したことを検出信号で演算
部21を介して制御部22に送り、その検出信号を受けた制
御部22は出力モータ19に出力停止の制御信号を送る。制
御信号を受けてスライド手段5が停止すると、測定者は
方面粗さ測定手段3の検出方向が鉛直方向となるように
表面粗さ測定手段3の高さ位置を調整する。ここで、表
面粗さ測定手段3の矢印B方向の位置は決められた状態
になる。又、この時、表面粗さ測定手段3の検出部は球
体7に接触しているが、表面粗さ測定手段3がこの接触
している球体7の部位の第一の面高さを検出(測定)す
る。
Next, the operation panel 26 is operated to start the operation of the surface roughness measuring device 2. By this start, the control unit
22 outputs a control signal for starting output to the output motor 19, and the moving means 4 moves backward in the direction of arrow A (in FIG. 2,
A control signal for turning to the right direction of arrow A) is sent.
The slide means 5 is activated by the output of the output motor 19,
The surface roughness measuring means 3 held by the moving means 4 slides downward in the direction of arrow B. When the detecting portion of the surface roughness measuring means 3 which has slid down and comes into contact with the sphere 7, the surface roughness measuring means 3 sends this contact to the control portion 22 via the arithmetic portion 21 as a detection signal. Upon receiving the detection signal, the control unit 22 sends a control signal for stopping the output to the output motor 19. When the slide means 5 is stopped in response to the control signal, the measurer adjusts the height position of the surface roughness measuring means 3 so that the detection direction of the surface roughness measuring means 3 becomes the vertical direction. Here, the position of the surface roughness measuring means 3 in the arrow B direction is in a fixed state. Further, at this time, the detecting portion of the surface roughness measuring means 3 is in contact with the sphere 7, but the surface roughness measuring means 3 detects the first surface height of the part of the sphere 7 in contact therewith ( taking measurement.

尚、表面粗さ測定手段3が矢印B方向に位置決めされた
際に、検出結果が表面粗さ測定手段3の検出可能なレン
ジ外にある場合には、制御部22は液晶表示部24にオーバ
ーレンジの表示をするための制御信号を送る。液晶表示
部24にオーバーレンジの表示がでると、制御部22は演算
部21、記憶部23及び移動手段4に作動ストップの制御信
号を送る。一方、測定者はスライド手段5を作動させ、
その後表面粗さ測定手段3と回転駆動手段8との矢印A
方向の相対位置を調節して表面粗さ測定手段3がオーバ
ーレンジとならない位置に位置決めし、表面粗さ測定装
置2を再スタートさせる。
Incidentally, when the surface roughness measuring means 3 is positioned in the direction of the arrow B and the detection result is outside the detectable range of the surface roughness measuring means 3, the control section 22 is over the liquid crystal display section 24. Sends a control signal to display the range. When the liquid crystal display section 24 displays an overrange indication, the control section 22 sends a control signal for stopping the operation to the calculation section 21, the storage section 23 and the moving means 4. On the other hand, the measurer actuates the slide means 5,
After that, the arrow A between the surface roughness measuring means 3 and the rotation driving means 8
The relative position of the direction is adjusted to position the surface roughness measuring means 3 at a position where it does not become overrange, and the surface roughness measuring device 2 is restarted.

表面粗さ測定手段3が検出した球体7面高さが検出可能
なレンジ内にある場合には、制御部22は、記憶部23が第
一の面高さを記憶するための制御信号を、演算部21及び
記憶部23に出力する。
When the surface height of the sphere 7 detected by the surface roughness measuring means 3 is within a detectable range, the control unit 22 sends a control signal for the storage unit 23 to store the first surface height, It is output to the calculation unit 21 and the storage unit 23.

続いて、制御部22が、表面粗さ測定手段3を矢印A方向
後方(第2図において、矢印A右方向)に第一の特定距
離だけ移動させるための制御信号を、移動手段4の出力
モータ12に送る。尚、第一の特定距離とは、球体7の平
均的な半径と球体7の表面粗さのレンジとの積を二倍
し、その値を二分の一乗して得られる値より実質的に僅
かに大きな値である。
Subsequently, the control unit 22 outputs a control signal for moving the surface roughness measuring unit 3 backward in the arrow A direction (rightward direction of arrow A in FIG. 2) by a first specific distance, which is output from the moving unit 4. Send to the motor 12. The first specific distance is substantially smaller than the value obtained by doubling the product of the average radius of the sphere 7 and the range of the surface roughness of the sphere 7 and halving the value. Is a large value.

移動手段4が移動すると制御部22は、記憶部23がその移
動の回数、つまり出力モータ12の出力回数を記憶するた
めの制御信号を、記憶部23に送る。
When the moving unit 4 moves, the control unit 22 sends to the storage unit 23 a control signal for the storage unit 23 to store the number of times of movement, that is, the number of times the output motor 12 has output.

制御信号に基づく移動手段4の作動により表面粗さ測定
手段3が矢印A方向後方に第一の特定距離だけ移動する
と、表面粗さ測定手段3の検出部がこの移動後に接触す
る球体7の部位の第二の面高さを測定し、更に制御部22
の作動によってその測定で得られた第二の面高さは演算
部21に送られる。
When the surface roughness measuring means 3 is moved backward by the first specific distance in the direction of arrow A by the operation of the moving means 4 based on the control signal, the part of the sphere 7 with which the detecting portion of the surface roughness measuring means 3 comes into contact after this movement. The second surface height of the
The second surface height obtained by the measurement is sent to the calculation unit 21.

ここで、演算部21は第一の面高さと第二の面高さを比較
し、その比較結果を信号で制御部22に送る。
Here, the calculation unit 21 compares the first surface height with the second surface height, and sends the comparison result as a signal to the control unit 22.

制御部22は、演算部21からの比較結果に基づき、第二の
面高さが第一の面高さより高い場合には検出値が検出可
能なレンジ内にあるか否かを判断するステップ以降を繰
返させるための制御信号を出力する。他方、第一の面高
さが第二の面高さより高いもしくは等しい場合には、表
面粗さ測定手段3の移動方向を反転、つまり矢印A方向
前方(第二図において、矢印A左方向)に移動させるた
めの制御信号を移動手段4に送り、続いて移動手段4の
作動回数を確認するための制御信号を記憶部23に送る。
The control unit 22, based on the comparison result from the calculation unit 21, in the case where the second surface height is higher than the first surface height, the step of determining whether or not the detected value is within the detectable range Output a control signal for repeating. On the other hand, when the first surface height is higher than or equal to the second surface height, the moving direction of the surface roughness measuring means 3 is reversed, that is, the arrow A direction forward (the arrow A left direction in FIG. 2). To the moving means 4, and then to the storage unit 23, a control signal for confirming the number of times the moving means 4 has been operated.

ここで、移動手段4の作動回数が1であるならば、制御
部22は、検出値が検出可能なレンジ内にあるか否かを判
断するステップ以降を繰返させるための制御信号を、移
動手段4、演算部21及び記憶部23に送る。他方、移動手
段4の作動回数が2以上ならば、表面粗さ測定手段3を
前記特定距離の半分の距離である第二の特定距離だけ移
動させるための制御信号を、移動手段4に送る。
Here, if the number of operations of the moving means 4 is 1, the control unit 22 sends a control signal for repeating the steps after the step of determining whether or not the detected value is within the detectable range to the moving means. 4, sent to the calculation unit 21 and the storage unit 23. On the other hand, if the number of times of movement of the moving means 4 is 2 or more, a control signal for moving the surface roughness measuring means 3 by a second specific distance which is half the specific distance is sent to the moving means 4.

移動手段4が表面粗さ測定手段3を第二の特定距離だけ
移動すると、表面粗さ測定手段3はその状態に対応する
被測定回転体7の面高さを測定し、その値を演算部21に
送る。ここで制御部22は、この送られて来た値と、第二
の特定距離だけ移動する前の被測定回転体7の面高さと
を比較させるための制御信号を、演算部21に送る。
When the moving means 4 moves the surface roughness measuring means 3 by the second specific distance, the surface roughness measuring means 3 measures the surface height of the rotating body to be measured 7 corresponding to the state and calculates the value. Send to 21. Here, the control unit 22 sends a control signal for comparing the sent value with the surface height of the measured rotating body 7 before moving by the second specific distance to the computing unit 21.

そこで、表面粗さ測定手段3が第二の移動距離だけ移動
した後の面高さが移動する前の面高さより高い場合に
は、検出値が検出可能なレンジ内にあるか否かを判断す
るステップ以降を繰返させるための制御信号を、制御部
22が移動手段4、演算部21及び記憶部23に送る。他方、
表面粗さ測定手段3が第二の移動距離だけ移動する前の
面高さが移動した後の面高さより高い、もしくは等しい
場合には、被測定回転体7と表面粗さ測定手段3との相
対位置の位置決めが終了したことを表示させるための制
御信号を、制御部22が演算表示手段6の液晶表示部24に
送る。
Therefore, when the surface height after the surface roughness measuring means 3 has moved by the second movement distance is higher than the surface height before the movement, it is judged whether or not the detected value is within the detectable range. The control signal for repeating the steps after
22 sends it to the moving means 4, the calculation unit 21, and the storage unit 23. On the other hand,
When the surface height before the surface roughness measuring means 3 moves by the second moving distance is higher than or equal to the surface height after moving, the measured rotating body 7 and the surface roughness measuring means 3 are The control unit 22 sends a control signal for displaying that the positioning of the relative position is completed to the liquid crystal display unit 24 of the calculation display unit 6.

以上の作動によって、表面粗さ測定手段3の検出方向が
球体7の向心軸と一致、もしくは一致していると言って
よいほど近傍となる表面粗さ測定手段3と球体7との相
対位置が得られる。
By the above operation, the relative position between the surface roughness measuring means 3 and the spherical body 7 becomes so close that the detection direction of the surface roughness measuring means 3 coincides with or is coincident with the centripetal axis of the spherical body 7. Is obtained.

そうして、この相対位置の位置決めにおいても、熟練を
必要とせず簡便におこなうことができる。又、球体7を
必要以上にトレースすることはなく、元の表面性状をよ
り保つことが可能になっている。
Thus, the positioning of the relative position can be easily performed without requiring any skill. Further, the sphere 7 is not traced more than necessary, and the original surface texture can be maintained more.

上記の実施例において、表面粗さ測定装置2では表面粗
さ測定手段3が接触タイプのものであるが、この発明は
非接触タイプのものであってもよい。
In the above embodiment, the surface roughness measuring device 2 of the surface roughness measuring device 2 is of the contact type, but the present invention may be of the non-contact type.

又、位置決め装置1では、第二の移動プロセス以降は移
動手段4の移動距離を二分の一ずつ減少させる構成にな
っているが、例えば十分の一ずつ減少させるといったよ
うに他の値であってもよい。
Further, in the positioning device 1, after the second moving process, the moving distance of the moving means 4 is reduced by one half, but it may be set to another value such as one tenth. Good.

加えて、実施例では被測定回転体が球体であるが、他に
円筒、丸棒、円柱といったものであってもよい。
In addition, although the rotating body to be measured is a sphere in the embodiment, it may be a cylinder, a round bar, or a cylinder.

[発明の効果] この発明によれば、検出方向を被測定回転体の向心軸に
一致させる、もしくは一致していると言ってよいほどに
近い位置とさせ得るように被測定回転体と表面粗さ測定
装置との相対位置を移動して位置決めする際に、その相
対位置の移動を特定の距離だけづつおこなわせる構成と
したことにより、熟練を必要とせずに簡便に目的とする
相対位置を得ることができるという効果が得られてい
る。
EFFECT OF THE INVENTION According to the present invention, the rotating body to be measured and the surface are arranged so that the detection direction can be aligned with the centripetal axis of the rotating body to be measured, or can be positioned so close as to be in agreement. When moving and positioning the relative position with the roughness measuring device, the relative position is moved by a specific distance so that the desired relative position can be easily obtained without requiring any skill. The effect that it can be obtained is obtained.

又、表面粗さ測定手段が接触タイプの場合では、被測定
回転体を必要以上にトレースすることがないから、その
被測定回転体を必要以上に傷つけることがなく測定後に
おいても表面性状をよく保たせるという効果が得られ
る。
Further, when the surface roughness measuring means is a contact type, the rotating body to be measured is not traced more than necessary, so that the rotating body to be measured is not scratched more than necessary and the surface quality is well maintained even after the measurement. The effect of keeping it is obtained.

【図面の簡単な説明】[Brief description of drawings]

第1図はこの発明の位置決め装置の実施例の一部切り欠
を含む斜視図、 第2図はこの実施例の構成説明図、 第3図はこの実施例の作動を説明するフローチャート、 第4図はこの発明の特定距離の由来を示す構成説明図、 第5図はこの発明における向心軸探索機構の説明図であ
る。 1……位置決め装置、 2……表面粗さ測定装置、3……表面粗さ測定手段、 4……移動手段、5……スライド手段、 6……演算表示部、7……球体(被測定回転体) 8……回転駆動手段、21……演算部、 22……制御部、23……記憶部。
FIG. 1 is a perspective view including a partial cutout of an embodiment of a positioning device of the present invention, FIG. 2 is a configuration explanatory view of this embodiment, FIG. 3 is a flow chart for explaining the operation of this embodiment, and FIG. FIG. 5 is an explanatory diagram showing the origin of the specific distance according to the present invention, and FIG. 5 is an explanatory diagram of the centripetal axis search mechanism according to the present invention. 1 ... Positioning device, 2 ... Surface roughness measuring device, 3 ... Surface roughness measuring means, 4 ... Movement means, 5 ... Sliding means, 6 ... Calculation display section, 7 ... Sphere (measurement target) Rotating body) 8 ... Rotation driving means, 21 ... Calculation section, 22 ... Control section, 23 ... Storage section.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】被測定回転体を回転させつつ、その表面粗
さを測定する際に、被測定回転体と表面粗さ測定手段と
の相対位置を位置決めする位置決め装置において、 前記被測定回転体の回転軸及び前記表面粗さ測定手段に
よる凹凸検出方向軸と直交する方向に前記表面粗さ測定
手段を移動させ得る移動手段と、 被測定回転体の平均的な半径Rと、その被測定回転体の
表面粗さのレンジdとに基づき、式により算出される移
動距離x0、 x0>(2R・d)1/2 及び前記表面粗さ測定手段の検出部に対応する被測定回
転体の部位の面高さを記憶する記憶手段と、 その記憶部に記憶されている面高さと表面粗さ測定手段
が測定する被測定回転体の面高さの比較をおこなう演算
手段と、 被測定回転体と表面粗さ測定手段とがある特定の相対位
置に位置決めされてその際の面高さが測定されると、前
記特定の相対位置から被測定回転体と表面粗さ測定手段
との相対位置を前記特定距離x0だけ移動させ、続いてそ
の移動の後の面高さが測定されるとその連続する二つの
相対位置におけるそれぞれの面高さを演算部が比較し、
被測定回転体と表面粗さ測定手段との連続する二つの相
対位置における前ステップの面高さが後ステップの面高
さよりも高いもしくは等しくなるまで移動手段及び演算
部にそれぞれ繰返して作動をおこなわすための制御信号
を出力し、前ステップの面高さが後ステップの面高さよ
りも高いもしくは等しくなったならば移動手段の移動距
離を前記特定距離より短いものにし且つ移動方向を反転
させて相対位置の移動と面高さの比較を繰返し、被測定
回転体と表面粗さ測定手段との連続する二つの相対位置
において、前後ステップの各面高さの比較結果に基づき
面高さがより高い相対位置をとり得るように、移動手段
及び演算手段にそれぞれ制御信号を出力する制御部を備
えてなる位置決め装置。
1. A positioning device for positioning the relative position between a rotating body to be measured and a surface roughness measuring means when measuring the surface roughness of the rotating body to be measured while rotating the rotating body to be measured. A moving means capable of moving the surface roughness measuring means in a direction orthogonal to the rotation axis of and the axis for detecting unevenness by the surface roughness measuring means; an average radius R of the rotating body to be measured; The moving distances x 0 , x 0 > (2R · d) 1/2 calculated by the formula based on the surface roughness range d of the body and the rotating body to be measured corresponding to the detecting portion of the surface roughness measuring means. The storage means for storing the surface height of the part of the, the calculation means for comparing the surface height stored in the storage part with the surface height of the measured rotating body measured by the surface roughness measuring means, Position the rotating body and the surface roughness measuring means at a specific relative position When the surface height at that time is measured, the relative position between the rotating body to be measured and the surface roughness measuring means is moved from the specific relative position by the specific distance x 0 , and subsequently, after the movement. When the surface height of is measured, the arithmetic unit compares the respective surface heights at two consecutive relative positions,
The moving means and the computing section are repeatedly operated until the surface height of the preceding step at two consecutive relative positions of the rotating body to be measured and the surface roughness measuring means becomes higher than or equal to the surface height of the succeeding step. If the surface height of the front step is higher than or equal to the surface height of the rear step, the moving distance of the moving means is made shorter than the specific distance and the moving direction is reversed. By repeating the movement of the relative position and the comparison of the surface height, the surface height becomes higher based on the comparison result of the surface heights of the front and rear steps at two consecutive relative positions of the measured rotating body and the surface roughness measuring means. A positioning device provided with a control unit that outputs a control signal to each of the moving unit and the calculating unit so that a high relative position can be obtained.
JP14444489A 1989-06-07 1989-06-07 Positioning device Expired - Fee Related JPH0794982B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14444489A JPH0794982B2 (en) 1989-06-07 1989-06-07 Positioning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14444489A JPH0794982B2 (en) 1989-06-07 1989-06-07 Positioning device

Publications (2)

Publication Number Publication Date
JPH039209A JPH039209A (en) 1991-01-17
JPH0794982B2 true JPH0794982B2 (en) 1995-10-11

Family

ID=15362366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14444489A Expired - Fee Related JPH0794982B2 (en) 1989-06-07 1989-06-07 Positioning device

Country Status (1)

Country Link
JP (1) JPH0794982B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016080436A (en) * 2014-10-14 2016-05-16 日本精工株式会社 Surface texture measuring device
JP6428667B2 (en) * 2016-02-12 2018-11-28 トヨタ自動車株式会社 Reference plane position measurement method

Also Published As

Publication number Publication date
JPH039209A (en) 1991-01-17

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