JPH0795120B2 - Multilayer film mirror - Google Patents
Multilayer film mirrorInfo
- Publication number
- JPH0795120B2 JPH0795120B2 JP17543487A JP17543487A JPH0795120B2 JP H0795120 B2 JPH0795120 B2 JP H0795120B2 JP 17543487 A JP17543487 A JP 17543487A JP 17543487 A JP17543487 A JP 17543487A JP H0795120 B2 JPH0795120 B2 JP H0795120B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- refractive index
- absorption
- hydrocarbon
- multilayer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Optical Elements Other Than Lenses (AREA)
Description
【発明の詳細な説明】 「産業上の利用分野」 この発明は主としてソフトＸ線領域に用いられ、屈折率
が低い第１膜と、屈折率が高い第２膜とを交互に積み重
ねた多層膜反射鏡に関する。DETAILED DESCRIPTION OF THE INVENTION "Industrial field of application" The present invention is mainly used in a soft X-ray region and is a multilayer film in which a first film having a low refractive index and a second film having a high refractive index are alternately stacked. Regarding reflectors.
「従来の技術」 従来のソフトＸ線領域に用いる多層膜反射鏡は、タング
ステン、モリブデンなどの重元素の低屈折率の第１膜
と、カーボン、シリコンなどの軽元素の高屈折率の第２
膜とを反射率が極大を持つように交互に積層して製作さ
れていた。この材料にソフトＸ線に対する吸収が無けれ
ば積層数を多くすることにより反射率を100％に近付け
ることができる。しかし実際には物質はソフトＸ線に対
し吸収を持っており、そのため積層数が増加するに従
い、吸収が増え、ある値以上に反射率を上げることがで
きない。“Prior Art” Conventional multilayer film reflecting mirrors used in the soft X-ray region include a first film having a low refractive index of a heavy element such as tungsten and molybdenum and a second film having a high refractive index of a light element such as carbon and silicon.
It was manufactured by alternately laminating the film and the film so as to have the maximum reflectance. If this material does not absorb soft X-rays, the reflectance can be brought close to 100% by increasing the number of layers. However, in reality, the substance has an absorption for soft X-rays, so that the absorption increases as the number of stacked layers increases, and the reflectance cannot be increased above a certain value.
この発明の目的はＸ線の吸収を少なくして積層数を増や
し、高い反射率を得ることを可能とする多層膜反射鏡を
提供することにある。An object of the present invention is to provide a multilayer-film reflective mirror that can reduce the absorption of X-rays, increase the number of laminated layers, and obtain a high reflectance.
「問題点を解決するための手段」 この発明によれば屈折率が低い第１膜と、屈折率が高い
第２膜とを交互に積層した多層膜反射鏡において、その
第２膜として炭化水素の膜が用いられる。つまりこの発
明ではＸ線吸収の少ない水素を積極的に膜に取込むた
め、炭化水素膜が用いられ、多層膜全体のＸ線の吸収が
減少し、それだけ積層数を増やすことができ、従って高
い反射率が得られる。[Means for Solving the Problems] According to the present invention, in a multilayer-film reflective mirror in which a first film having a low refractive index and a second film having a high refractive index are alternately laminated, a hydrocarbon is used as the second film. Membranes are used. That is, in the present invention, since hydrogen having a small X-ray absorption is positively taken into the film, the hydrocarbon film is used, the X-ray absorption of the entire multilayer film is reduced, and the number of laminated layers can be increased accordingly, which is high. The reflectance is obtained.
「実施例」 第１図にこの発明による多層膜反射鏡の実施例を示す。
基板11上に低屈折率の第１膜12と高屈折率の第２膜13と
が交互に積層される。基板11としては、通常研摩性の良
さ、熱伝導率の高さなどの点からシリコンあるいは炭化
シリコンなどが用いられる。第１膜12、第２膜13の各膜
厚は、屈折率ｎと膜厚ｄとの積である光学膜厚ndがλ/4
（λは使用Ｘ線波長）となるようにされてある。[Embodiment] FIG. 1 shows an embodiment of the multilayer-film reflective mirror according to the present invention.
First films 12 having a low refractive index and second films 13 having a high refractive index are alternately laminated on a substrate 11. As the substrate 11, silicon, silicon carbide, or the like is usually used from the viewpoints of good polishability and high thermal conductivity. The film thicknesses of the first film 12 and the second film 13 are such that the optical film thickness nd, which is the product of the refractive index n and the film thickness d, is λ / 4.
(Λ is the used X-ray wavelength).
この発明では、高屈折率の第２膜13として炭化水素膜と
され、低屈折率の第１膜12には従来と同様の重元素が用
いられる。つまり物質のＸ線に対する吸収は元素の質量
が増大する程大きい、従って吸収を少なくするためには
軽元素で膜を構成することが望ましい、しかいし第１膜
12と第２膜13とに屈折率の差を出すために低屈折率側の
第１膜12をタングステン、モリブデン、レニウムなどの
重元素で構成せざるを得ない、そこで高屈折率側の第２
膜13をなるべく軽元素で構成させる。最も軽い水素はそ
れだけで常温に膜状にすることはできない。これらの点
よりこの発明では先に述べたように第２膜13を炭化水素
膜とする。この炭化水素膜は通常高屈折率、低吸収層と
して用いられるカーボン膜よりも更に軽く、低吸収を期
待できる。このような炭化水素の第２膜13としては具体
的にはポリパラキシレンのようなものを真空蒸着により
膜として形成する、プラズマ重合などにより形成された
炭化水素膜は安定であって更に好ましい。In the present invention, the second film 13 having a high refractive index is a hydrocarbon film, and the first film 12 having a low refractive index uses the same heavy element as in the conventional case. That is, the absorption of X-rays by a substance increases as the mass of the element increases. Therefore, in order to reduce the absorption, it is desirable to form the film with a light element.
In order to provide a difference in refractive index between the second film 13 and the second film 13, the first film 12 on the low refractive index side must be composed of a heavy element such as tungsten, molybdenum, or rhenium. Two
The film 13 is composed of light elements as much as possible. The lightest hydrogen cannot be formed into a film at room temperature by itself. From these points, in the present invention, the second film 13 is a hydrocarbon film as described above. This hydrocarbon film is lighter than a carbon film which is usually used as a high refractive index and low absorption layer, and low absorption can be expected. As the second film 13 of such a hydrocarbon, specifically, a hydrocarbon film formed by plasma polymerization or the like, which is formed by vacuum evaporation of a material such as polyparaxylene, is more preferable because it is stable.
第２図に多層膜反射鏡の作成装置例を示す。この例は真
空蒸着法により作成する場合であって、真空容器21は排
気系22により通常10-6〜10-7torr程度まで真空引きされ
る、条件によっては10-10〜10-11torr程度とされること
もある。るつぼ23にタングステン、レニウム、モリブデ
ンなどの重元素の物質24が容れられ、るつぼ25には軽元
素の物質としてパリレン−Ｎ 26が容れられてある。これらるつぼ23,25内の各物質24,
26に電子銃27から電子ビーム28,29が入射されてそれぞ
れ加熱され、これら物質24,26がそれぞれ蒸発物質31,32
として蒸発される。るつぼ23,25上にはシャッタ34,35が
開閉自在に配され、蒸発物質31と、蒸発物質32とが基板
35に交互に蒸着される。基板35の横に水晶振動式膜厚計
36が配されている。波長100ÅのソフトＸ線用の直入反
射鏡を想定して物質24としてタングステンを用いる場合
は、このタングステンの第１膜の厚さは約26Åとされ、
パリレンの第２膜の厚さは約25Åとされる。この第１膜
と第２膜とが基板35に交互に積層される。FIG. 2 shows an example of an apparatus for producing a multilayer-film reflective mirror. This example is a case where it is created by the vacuum deposition method, and the vacuum container 21 is usually evacuated to about 10 -6 to 10 -7 torr by the exhaust system 22, depending on the condition, about 10 -10 to 10 -11 torr. It is sometimes said that. The crucible 23 contains a substance 24 of a heavy element such as tungsten, rhenium, and molybdenum, and the crucible 25 contains a substance of parylene-N as a substance of a light element. 26 is contained. Each substance 24 in these crucibles 23, 25,
Electron beams 28 and 29 are made incident on an electron gun 27 and are heated to 26, and these substances 24 and 26 are vaporized substances 31 and 32, respectively.
Is evaporated as. Shutters 34, 35 are arranged on the crucibles 23, 25 so that the shutters 34, 35 can be freely opened and closed.
Alternately deposited on 35. Quartz vibration type film thickness meter beside the substrate 35
36 are arranged. When tungsten is used as the substance 24 assuming a direct-reflection mirror for a soft X-ray having a wavelength of 100 Å, the thickness of the first film of this tungsten is about 26 Å,
The thickness of the second film of parylene is about 25Å. The first film and the second film are alternately laminated on the substrate 35.
「発明の効果」 以上述べたようにこの発明によれば第２膜として炭化水
素膜が用いられているため、光の吸収が少なく、それだ
け積層数を多くすることができ、高反射率のものが得ら
れる。上記例のように炭化水素膜としてパリレン−Ｎを
用いた場合は、100Å程度の波長のＸ線に対し、従来の
カーボンに比べ約40％の吸収減少となった。[Advantages of the Invention] As described above, according to the present invention, since the hydrocarbon film is used as the second film, light absorption is small, and the number of laminated layers can be increased accordingly, and high reflectance can be obtained. Is obtained. When parylene-N was used as the hydrocarbon film as in the above example, the absorption reduction with respect to X-rays having a wavelength of about 100 Å was about 40% compared to conventional carbon.
第１図はこの発明による多層膜反射鏡の例を示す断面
図、第２図は成膜装置の例を示す正面図である。FIG. 1 is a sectional view showing an example of a multilayer film reflecting mirror according to the present invention, and FIG. 2 is a front view showing an example of a film forming apparatus.
Claims (1)
屈折率が高い第２膜とを交互に積み重ねた多層膜反射鏡
において、 上記第２膜は炭化水素の膜からなることを特徴とする多
層膜反射鏡。1. A multilayer-film reflective mirror in which a first film having a low refractive index and a second film having a higher refractive index than the first film are alternately stacked, wherein the second film is a hydrocarbon film. A multi-layered film reflecting mirror.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17543487A JPH0795120B2 (en) | 1987-07-13 | 1987-07-13 | Multilayer film mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17543487A JPH0795120B2 (en) | 1987-07-13 | 1987-07-13 | Multilayer film mirror |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6418098A JPS6418098A (en) | 1989-01-20 |
| JPH0795120B2 true JPH0795120B2 (en) | 1995-10-11 |
Family
ID=15996030
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17543487A Expired - Fee Related JPH0795120B2 (en) | 1987-07-13 | 1987-07-13 | Multilayer film mirror |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0795120B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0627225B2 (en) * | 1986-03-14 | 1994-04-13 | 三菱電線工業株式会社 | Flame-retardant resin composition |
| TWI267704B (en) * | 1999-07-02 | 2006-12-01 | Asml Netherlands Bv | Capping layer for EUV optical elements |
-
1987
- 1987-07-13 JP JP17543487A patent/JPH0795120B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6418098A (en) | 1989-01-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |