JPH0795503B2 - Method of manufacturing polarizable electrodes - Google Patents
Method of manufacturing polarizable electrodesInfo
- Publication number
- JPH0795503B2 JPH0795503B2 JP62156842A JP15684287A JPH0795503B2 JP H0795503 B2 JPH0795503 B2 JP H0795503B2 JP 62156842 A JP62156842 A JP 62156842A JP 15684287 A JP15684287 A JP 15684287A JP H0795503 B2 JPH0795503 B2 JP H0795503B2
- Authority
- JP
- Japan
- Prior art keywords
- carbon
- activated carbon
- polarizable electrode
- producing
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 57
- 229910052799 carbon Inorganic materials 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 13
- 239000007789 gas Substances 0.000 claims description 10
- 238000010884 ion-beam technique Methods 0.000 claims description 8
- 230000004913 activation Effects 0.000 claims description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 239000011203 carbon fibre reinforced carbon Substances 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 4
- 239000000835 fiber Substances 0.000 claims description 4
- 238000007750 plasma spraying Methods 0.000 claims description 4
- 238000002294 plasma sputter deposition Methods 0.000 claims description 4
- 230000003213 activating effect Effects 0.000 claims description 3
- 229910021529 ammonia Inorganic materials 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- 229910052735 hafnium Inorganic materials 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
- 229910052758 niobium Inorganic materials 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 229910052715 tantalum Inorganic materials 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 229910052726 zirconium Inorganic materials 0.000 claims 1
- 239000003990 capacitor Substances 0.000 description 14
- 239000000758 substrate Substances 0.000 description 7
- 238000001994 activation Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 125000000524 functional group Chemical group 0.000 description 5
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical class C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 5
- 230000002378 acidificating effect Effects 0.000 description 3
- 125000004432 carbon atom Chemical group C* 0.000 description 3
- 239000008151 electrolyte solution Substances 0.000 description 3
- 239000005011 phenolic resin Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000002759 woven fabric Substances 0.000 description 3
- 229920000049 Carbon (fiber) Polymers 0.000 description 2
- 239000004917 carbon fiber Substances 0.000 description 2
- 239000003575 carbonaceous material Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 125000004430 oxygen atom Chemical group O* 0.000 description 2
- URUVJWFOTZHETH-UHFFFAOYSA-M 4-methyl-1,3-dioxolan-2-one;tetraethylazanium;perchlorate Chemical compound [O-]Cl(=O)(=O)=O.CC1COC(=O)O1.CC[N+](CC)(CC)CC URUVJWFOTZHETH-UHFFFAOYSA-M 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 125000000686 lactone group Chemical group 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 description 1
- 238000001552 radio frequency sputter deposition Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- WGHUNMFFLAMBJD-UHFFFAOYSA-M tetraethylazanium;perchlorate Chemical compound [O-]Cl(=O)(=O)=O.CC[N+](CC)(CC)CC WGHUNMFFLAMBJD-UHFFFAOYSA-M 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/13—Energy storage using capacitors
Landscapes
- Battery Electrode And Active Subsutance (AREA)
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
- Electric Double-Layer Capacitors Or The Like (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、電気二重層キャパシタ，二次電池，エレクト
ロクロミックディスプレイ、などに用いる分極性電極の
製造方法に関するものである。Description: TECHNICAL FIELD The present invention relates to a method for producing a polarizable electrode used in an electric double layer capacitor, a secondary battery, an electrochromic display, and the like.
従来の技術 電気二重層キャパシタなどに用いられる分極性電極とし
ての活性炭は、比表面積が大きなことが第１条件として
あげられる。この目的で従来おがくずを水蒸気賦活した
活性炭粉末や、フェノール樹脂系繊維を炭化賦活した活
性炭繊維、などが用いられている。これらの賦活はその
ほとんどが800〜1500℃の高温化で水蒸気,CO2,炭化水素
などを賦活ガスとして用いて行っている。2. Description of the Related Art The first condition is that activated carbon as a polarizable electrode used in an electric double layer capacitor has a large specific surface area. For this purpose, conventionally, activated carbon powder in which sawdust is activated by steam, activated carbon fiber in which phenol resin fibers are activated by carbonization, and the like have been used. Most of these activations are carried out at high temperatures of 800 to 1500 ℃ using steam, CO 2 , hydrocarbons, etc. as the activation gas.
また活性炭の表面に蓄積される電気二重層容量の取出し
を効率的に行うために、プラズマ溶射法によりAl集電層
を形成する技術も開発されている。第３図は、このよう
な電気二重層キャパシタの一例の断面構造図であり、活
性炭繊維より成る分極性電極100、この上のプラズマ溶
射により形成されたAl集電極101,セパレータ102,金属ケ
ース103,104およびガスケットリング105から成る。分極
性電極100およびセパレータ102にはテトラエチルアンモ
ニウムパークロレートをプロピレンカーボネートに溶解
した電解液が含浸されている。Further, in order to efficiently take out the electric double layer capacity accumulated on the surface of activated carbon, a technique of forming an Al current collecting layer by a plasma spraying method has been developed. FIG. 3 is a cross-sectional structural view of an example of such an electric double layer capacitor, which is a polarizable electrode 100 made of activated carbon fiber, an Al collector electrode 101, a separator 102, a metal case 103, 104 formed by plasma spraying on the polarizable electrode 100. And gasket ring 105. The polarizable electrode 100 and the separator 102 are impregnated with an electrolytic solution in which tetraethylammonium perchlorate is dissolved in propylene carbonate.
発明が解決しようとする問題点 従来、活性炭を得るためには、前述のように、800〜150
0℃の高温下でH2Oなどの酸素を含有する酸化性ガスを炭
素粉末，炭素繊維に反応させていた。この時の反応は式
１に示すものである。Problems to be Solved by the Invention Conventionally, in order to obtain activated carbon, as described above, 800 to 150
Oxygen-containing oxidizing gas such as H 2 O was reacted with carbon powder and carbon fibers at a high temperature of 0 ° C. The reaction at this time is shown in Formula 1.
すなわち、高温下で水蒸気ガス中の酸素原子が炭素と反
応して自らはCO,H2ガスとなり、炭素はCn-1となってい
くことにより表面に微細な細孔を形成し多孔質化し、比
表面積が1000〜2500m2/gの活性炭を得ていた。ところ
で、このようにして得られた活性炭の表面には、第４図
に見られるように炭素原子のほかにカルボキシ基，フェ
ノール系水酸基，ラクトン基，などの形で酸素原子が存
在することはまぬがれないことだった。この量は、酸性
官能基の濃度としては炭素1g当たり1mmole以下であり非
常に小さな値であるが、これを電気二重層キャパシタな
どの分極性電極として用いた時、このサイトが電解液と
の反応活性点となり、電解液の分解を促進することがあ
った。このため、キャパシタの漏れ電流，耐圧向上の点
でこのような酸性官能基の存在は好しいものではなかっ
た。 That is, at high temperature, oxygen atoms in water vapor gas react with carbon to become CO, H 2 gas, and carbon becomes C n-1 to form fine pores on the surface and become porous. , Activated carbon with a specific surface area of 1000 to 2500 m 2 / g was obtained. By the way, on the surface of the activated carbon thus obtained, oxygen atoms in the form of carboxy group, phenolic hydroxyl group, lactone group, etc. in addition to carbon atoms should be present as shown in FIG. It wasn't. This amount is a very small value as the concentration of acidic functional groups is 1 mmole or less per 1 g of carbon, but when this is used as a polarizable electrode such as an electric double layer capacitor, this site reacts with the electrolytic solution. It may become an active point and accelerate the decomposition of the electrolytic solution. Therefore, the presence of such an acidic functional group is not preferable from the viewpoint of improving the leakage current and withstand voltage of the capacitor.
さらに、上で述べたような高温下での固一気反応では式
１の進行による炭素表面の高多孔質化には限界があり、
出発原料にもよるが、比表面積で2700m2/g程度までが限
界であった。キャパシタの容量などは、活性炭の比表面
積の値が直接正比例するために、これをさらに高くする
ことが、キャパシタ高容量化のために望まれる。Furthermore, in the solid-gas reaction at a high temperature as described above, there is a limit to the increase in the porosity of the carbon surface due to the progress of Formula 1,
Although it depends on the starting material, the specific surface area was limited to about 2700 m 2 / g. The capacitance of the capacitor is directly proportional to the value of the specific surface area of the activated carbon, and therefore it is desired to further increase the capacitance in order to increase the capacitance of the capacitor.
問題点を解決するための手段 本発明は、このような従来の問題を解決するために、炭
素または活性炭の表面をイオンビーム照射、もしくはプ
ラズマスパッタリングすることによって活性化すること
を特徴とする分極性電極の製造方法に関するものであ
る。Means for Solving the Problems In order to solve such conventional problems, the present invention is characterized by activating the surface of carbon or activated carbon by ion beam irradiation or plasma sputtering. The present invention relates to a method for manufacturing an electrode.
作用 本発明によれば、表面の酸素濃度が非常に低く、比表面
積が従来の活性炭より高い活性炭を得ることができ、こ
れを分極性電極として用いた電気二重層キャパシタの容
量，内部抵抗，漏れ電流などの特性を大巾に改善するこ
とができる。Effects According to the present invention, it is possible to obtain activated carbon having a very low surface oxygen concentration and a higher specific surface area than conventional activated carbon, and the capacitance, internal resistance and leakage of an electric double layer capacitor using the activated carbon as a polarizable electrode. The characteristics such as current can be greatly improved.
実 施 例 本発明の具体的な実施例を述べる前に、本発明の基本的
な内容について図面に従って説明する。EXAMPLES Before describing specific examples of the present invention, basic contents of the present invention will be described with reference to the drawings.
第１図は、本発明に用いる炭素の活性化のための装置の
一例である。ロータリーポンプ1,拡散ポンプ２で排気さ
れた反応室３の中に、処理用試料を置くための導電性電
極４と陽極５との相対向している。ガス導入孔６から導
入されたArガスにより反応室内の真空度は10-2〜10-3to
rrに保たれ、マッチングボックス7,RF電源８によりベル
ジャー内にArプラズマ９が発生する。処理試料10はこの
Arプラズマ９の中にさらされる。11,12は冷却水であ
る。この時、加速されたAr+によって炭素表面はたたか
れ、原子の飛行エネルギの交換によって表面炭素原子が
炭素基体から放出されこの部分にぬけ穴ができて炭素が
多孔質化していく。この経過は、炭素をスパッタリング
のターゲット材として用いることと同等である。この図
ではRF2型グロー放電型高周波スパッタの方法を示して
いるが、直流スパッタ，マグネトロンRFスパッタなどに
よるプラズマ中に炭素材料をさらしてもよい。さらに、
加速したイオンビーム（例えばAr+イオンビーム）を衝
突させても良い。第２図は、本発明の炭素が活性化する
過程を模式的に示したものである。すなわち、炭素基体
15にArイオン16が衝突し表面炭素原子17が基体15から放
出され、ここにぬけ穴が生じ、これがくり返されること
によって基体15の表面が多孔質化していく。この時用い
る炭素基体15は炭素でも良いし、従来の水蒸気賦活法な
どで得られた活性炭素でもよい。特に後者の場合は、表
面の酸性官能基の除去も多孔質化と同時に起きる。FIG. 1 is an example of an apparatus for activating carbon used in the present invention. In the reaction chamber 3 evacuated by the rotary pump 1 and the diffusion pump 2, a conductive electrode 4 for placing a processing sample and an anode 5 face each other. The vacuum degree in the reaction chamber is 10 -2 to 10 -3 to due to the Ar gas introduced from the gas introduction hole 6.
The plasma is kept at rr and Ar plasma 9 is generated in the bell jar by the matching box 7 and the RF power source 8. This is the processed sample 10.
It is exposed to Ar plasma 9. 11 and 12 are cooling water. At this time, the carbon surface is hit by the accelerated Ar + , the surface carbon atoms are released from the carbon substrate by the exchange of the flight energy of the atoms, and holes are formed in this portion to make the carbon porous. This process is equivalent to using carbon as a sputtering target material. Although this figure shows the method of RF2 type glow discharge type high frequency sputtering, the carbon material may be exposed to plasma by DC sputtering, magnetron RF sputtering or the like. further,
The accelerated ion beam (for example, Ar + ion beam) may be collided. FIG. 2 schematically shows the process of carbon activation of the present invention. That is, the carbon substrate
Ar ions 16 collide with 15 and carbon atoms 17 on the surface are released from the substrate 15, and voids are formed here. By repeating this, the surface of the substrate 15 becomes porous. The carbon substrate 15 used at this time may be carbon or activated carbon obtained by a conventional steam activation method or the like. Particularly in the latter case, the removal of the acidic functional group on the surface occurs at the same time as the porosification.
次に本発明の具体的な実施例について述べる。Next, specific examples of the present invention will be described.
（実施例−１） 炭素化したフェノール樹脂系繊維（直径10μm,炭素含有
率95％）から成る織布（日付140g/m2）を第１図に示す
装置によって処理する。処理時間は30分、処理した織布
の片面にプラズマ溶射法により厚さ100μｍのアルミニ
ウム層を形成する。セパレータ電解液（テトラエチルア
ンモニウムパークロレートのプロピレンカーボネート溶
液1mol/）を用いて第 図に示すキャパシタを試作す
る。電極の直径は5mmである。Example-1 A woven fabric (date 140 g / m 2 ) made of carbonized phenol resin fiber (diameter 10 μm, carbon content 95%) is treated by the apparatus shown in FIG. The treatment time is 30 minutes, and an aluminum layer having a thickness of 100 μm is formed on one side of the treated woven fabric by plasma spraying. A prototype of the capacitor shown in Fig. 1 is made using the separator electrolyte (tetraethylammonium perchlorate propylene carbonate solution 1 mol /). The electrode diameter is 5 mm.
（実施例−２） 活性炭化したフェノール樹脂系繊維（直径10μm,炭素含
有率94％，比表面積2000m2/g）からなる織布（日付140g
/m2）を実施例−１と同じ方法で処理し、同じく実施例
−１と同じキャパシタを試作する。(Example-2) Woven fabric made of activated carbonized phenol resin fiber (diameter 10 μm, carbon content 94%, specific surface area 2000 m 2 / g) (date 140 g)
/ m 2 ) is treated in the same manner as in Example-1, and the same capacitor as in Example-1 is prototyped.
（比較例−１） 実施例−１で本発明の処理をしない炭素繊維を電極に用
いる。(Comparative example-1) In Example-1, the carbon fiber which does not process this invention is used for an electrode.
（比較例−２） 実施例−２で本発明の処理をしない活性炭素繊維を電極
に用いる。(Comparative example-2) In Example-2, the activated carbon fiber which does not process this invention is used for an electrode.
以上のキャパシタの特性を表に示す。The characteristics of the above capacitors are shown in the table.
本実施例ではArスパッタリングのみについて示したがイ
オンビーム法でも同等の効果が得られ、用いる気体は酸
素，アンモニア,CF4などのガスが適する。酸素を用いた
時は、炭素表面が若干酸化され、官能基減少の効果は得
られないが、高比表面積化は達成される。 In this embodiment, only Ar sputtering is shown, but the same effect can be obtained by the ion beam method, and gases such as oxygen, ammonia and CF 4 are suitable for use. When oxygen is used, the carbon surface is slightly oxidized and the effect of reducing the functional groups cannot be obtained, but a high specific surface area is achieved.
炭素基体として、粉末，板，焼結体，グラファイト，ア
モルファス炭素、いずれも適用可能である。As the carbon substrate, any of powder, plate, sintered body, graphite and amorphous carbon can be applied.
炭素材を用いた例として電気二重層キャパシタについて
述べたが、二次電池，エレクトロクロミックディスプレ
ーの分極性電極への適用効果も大きい。Although an electric double layer capacitor has been described as an example using a carbon material, it has a great effect of being applied to a polarizable electrode of a secondary battery or an electrochromic display.
発明の効果 本発明によれば、プラズマ雰囲気，イオンビーム照射な
どの減圧雰囲気中で炭素が活性化されるため、従来の高
温水蒸気賦活法によるものと異った全く新しい活性炭が
得られ、これを用いたキャパシタなどの特性を大巾に改
善することが可能になる。EFFECTS OF THE INVENTION According to the present invention, since carbon is activated in a reduced pressure atmosphere such as a plasma atmosphere or ion beam irradiation, a completely new activated carbon different from that obtained by the conventional high temperature steam activation method can be obtained. It is possible to greatly improve the characteristics of the capacitors used.
第１図は本発明に用いる炭素基材処理装置の一例を示す
図、第２図は本発明処理の原理を示す模式図、第３図は
活性炭繊維分極性電極を用いたコイン型キャパシタの断
面構造図、第４図は炭素の表面官能基を模式的に示す図
である。 １……ロータリーポンプ、２……拡散ポンプ、３……反
応室、４……電極、５……陽極、６……ガス導入口、７
……スイッチングボックス、８……RF電源、９……Arプ
ラズマ、10……処理試料。FIG. 1 is a diagram showing an example of a carbon substrate treatment apparatus used in the present invention, FIG. 2 is a schematic diagram showing the principle of the treatment of the present invention, and FIG. 3 is a cross section of a coin-type capacitor using an activated carbon fiber polarizable electrode. Structural drawing, FIG. 4 is a view schematically showing surface functional groups of carbon. 1 ... Rotary pump, 2 ... Diffusion pump, 3 ... Reaction chamber, 4 ... Electrode, 5 ... Anode, 6 ... Gas inlet, 7
...... Switching box, 8 ... RF power supply, 9 ... Ar plasma, 10 ... Processed sample.
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｈ０１Ｍ 4/04 Ａ 4/58 (56)参考文献 特開 昭61−44705（ＪＰ，Ａ) 特開 昭60−201635（ＪＰ，Ａ) 特開 昭60−100662（ＪＰ，Ａ) 特開 昭62−246262（ＪＰ，Ａ)─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Internal reference number FI Technical indication location H01M 4/04 A 4/58 (56) References JP-A-61-44705 (JP, A) Special features Kai 60-201635 (JP, A) JP 60-100662 (JP, A) JP 62-246262 (JP, A)
Claims (5)
射、もしくはプラズマスパッタリングすることによって
活性化することを特徴とする分極性電極の製造方法。1. A method for producing a polarizable electrode, which comprises activating a surface of carbon or activated carbon by ion beam irradiation or plasma sputtering.
多孔質成型体のいずれかの形状を有することを特徴とす
る特許請求の範囲第１項記載の分極性電極の製造方法。2. Carbon or activated carbon is used for plates, sheets, fibers,
The method for producing a polarizable electrode according to claim 1, wherein the method has a shape of a porous molded body.
タリングが、窒素,Arなどの不活性ガス中でなされるこ
とを特徴とする特許請求の範囲第１項記載の分極性電極
の製造方法。3. The method for producing a polarizable electrode according to claim 1, wherein the ion beam irradiation or plasma sputtering is performed in an inert gas such as nitrogen or Ar.
タリングが、酸素，アンモニア,CF4などの活性ガス中で
なされることを特徴とする特許請求の範囲第１項記載の
分極性電極の製造方法。4. The method for producing a polarizable electrode according to claim 1, wherein the ion beam irradiation or the plasma sputtering is performed in an active gas such as oxygen, ammonia or CF 4 .
l,Ti,Nb,Hf,Zr,Taのいずれかを炭素または活性炭の表面
に形成することを特徴とする特許請求の範囲第１項記載
の分極性電極の製造方法。5. After activation, A by plasma spraying method
The method for producing a polarizable electrode according to claim 1, wherein any one of l, Ti, Nb, Hf, Zr, and Ta is formed on the surface of carbon or activated carbon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62156842A JPH0795503B2 (en) | 1987-06-24 | 1987-06-24 | Method of manufacturing polarizable electrodes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62156842A JPH0795503B2 (en) | 1987-06-24 | 1987-06-24 | Method of manufacturing polarizable electrodes |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPS641221A JPS641221A (en) | 1989-01-05 |
| JPH011221A JPH011221A (en) | 1989-01-05 |
| JPH0795503B2 true JPH0795503B2 (en) | 1995-10-11 |
Family
ID=15636564
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62156842A Expired - Fee Related JPH0795503B2 (en) | 1987-06-24 | 1987-06-24 | Method of manufacturing polarizable electrodes |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0795503B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3967603B2 (en) * | 2001-07-10 | 2007-08-29 | 株式会社クラレ | Activated carbon, manufacturing method thereof, and polarizable electrode for electric double layer capacitor |
| CN108121126B (en) * | 2017-12-14 | 2020-05-29 | 江苏晟泰高新材料有限公司 | Device integrating electrochromic and electric double-layer capacitor structure and carving tool processing method thereof |
| CN108169975B (en) * | 2017-12-14 | 2020-05-29 | 江苏晟泰高新材料有限公司 | Device integrating electrochromic and electric double-layer capacitor structure and laser processing method thereof |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3335623A1 (en) * | 1983-09-30 | 1985-04-11 | Siemens AG, 1000 Berlin und 8000 München | METHOD FOR PRODUCING A CARBON-CONTAINING LAYER, CARBON-CONTAINING LAYER, USE OF A CARBON-CONTAINING LAYER, AND APPARATUS FOR CARRYING OUT A CARBON-PRODUCTING METHOD |
| JPH0666259B2 (en) * | 1984-03-27 | 1994-08-24 | 松下電器産業株式会社 | Method for producing hard carbon coating film |
| JPS6144705A (en) * | 1984-08-09 | 1986-03-04 | Toshiba Corp | Method for forming electrically conductive carbon film |
-
1987
- 1987-06-24 JP JP62156842A patent/JPH0795503B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS641221A (en) | 1989-01-05 |
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