JPH0795612B2 - Laser device - Google Patents
Laser deviceInfo
- Publication number
- JPH0795612B2 JPH0795612B2 JP5190886A JP5190886A JPH0795612B2 JP H0795612 B2 JPH0795612 B2 JP H0795612B2 JP 5190886 A JP5190886 A JP 5190886A JP 5190886 A JP5190886 A JP 5190886A JP H0795612 B2 JPH0795612 B2 JP H0795612B2
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- laser
- aperture
- opening
- receiving plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 この発明はレーザ装置，とくにレーザビームの位置検出
の高性能化に関するものである。Description: TECHNICAL FIELD The present invention relates to a laser device, and more particularly to improving the performance of laser beam position detection.
第８図（ａ）は例えば特開昭59−195894号明細書に記載
の従来のレーザ装置を示す概略構成図，第８図（ｂ）は
そのレーザビーム位置検出手段を示す正面図，及び第８
図（ｃ）は第８図（ｂ）のＣ−Ｃ線に沿つた縦断面図で
ある。第８図（ａ）において，（１）は高電圧の電源，
（２）（３）は相対向して配置される電極，（４）は各
電極（２）（３）間に発生される放電，（５）は部分反
射ミラー，（６）は全反射ミラー，（７）は部分反射ミ
ラー（５）の近傍に配設されるモードセレクシヨン用の
アパーチヤで，レーザビームの位置検出手段を構成す
る。（８）はレーザ媒質ガスのガス流であり，紙面と直
角の方向に流れている。（９）は発生されるレーザビー
ムである。また，第８図（ｂ）（ｃ）において（70）は
上記アパーチヤ（７）を構成するアパーチヤ部材であ
り，その中心であるレーザビームの光軸上に円形の開口
部（71）が設けられている。またアパーチヤ部材（70）
には，開口部（71）の外周に直径方向に延出する溝部
（72）が形成され，この溝部（72）内には温度検出素子
である熱電対（73）が設けられている。（74）はアパー
チヤ部材（70）を冷却するために，このアパーチヤ部材
（70）内の通路（75）を流通する冷却水で，第８図
（ｃ）に矢印で示されている流れとなる。FIG. 8 (a) is a schematic configuration diagram showing a conventional laser device described in, for example, Japanese Patent Laid-Open No. 59-195894, FIG. 8 (b) is a front view showing the laser beam position detecting means, and FIG. 8
FIG. 8C is a vertical cross-sectional view taken along the line CC of FIG. 8B. In FIG. 8 (a), (1) is a high-voltage power supply,
(2) and (3) are electrodes arranged to face each other, (4) is discharge generated between the electrodes (2) and (3), (5) is a partial reflection mirror, and (6) is a total reflection mirror. , (7) are apertures for mode selection which are arranged in the vicinity of the partial reflection mirror (5), and constitute laser beam position detecting means. (8) is a gas flow of the laser medium gas, which flows in a direction perpendicular to the paper surface. (9) is the generated laser beam. Further, in FIGS. 8 (b) and 8 (c), (70) is an aperture member constituting the aperture (7), and a circular opening (71) is provided on the optical axis of the laser beam which is the center thereof. ing. Aperture member (70)
A groove (72) extending in the diametrical direction is formed on the outer periphery of the opening (71), and a thermocouple (73) as a temperature detecting element is provided in the groove (72). Reference numeral (74) is cooling water flowing through the passage (75) in the aperture member (70) for cooling the aperture member (70), and has a flow indicated by an arrow in FIG. 8 (c). .
次に上記第８図の動作について説明する。まず，各電極
（２），（３）間に電源（１）から高電圧を印加し，各
電極（２），（３）間に放電（４）を発生させる。一
方，各電極（２），（３）間にレーザ媒質ガスのガス流
（８）を流し，レーザ媒質ガスを上記放電（４）によつ
て励起することによりレーザ光を生成させる。放電
（４）をはさんで部分反射ミラー（５）と全反射ミラー
（６）とを相対向して配置し，光共振器を構成し，また
部分反射ミラー（５）の近傍に円形の開口部（71）を有
するアパーチヤ（７）を配設すれば，円形のレーザビー
ム（９）を外部に取り出すことができる。この場合，部
分反射ミラー（５）と全反射ミラー（６）との相互の対
向位置の調整，すなわちアライメントが不良であれば，
レーザビーム（９）のモードの対称性が崩れ，このた
め，アパーチヤ部材（70）における各部分に温度分布が
生じる。そこで，アパーチヤ部材（70）に設けられてい
る熱電対（73）からの出力が均一になる様に，各部分反
射ミラー（５）と全反射ミラー（６）との相互の対向位
置を調整する手段，例えば上記各ミラー（５），（６）
の角度を調整する手段により，適宜に調整することによ
り，レーザ光路を適正なものとしてレーザビームの光軸
からのずれを正し，対称性の良好なモードのレーザビー
ム（９）を発生させることが可能となる。ここで，冷却
水（74）は，アパーチヤ部材（70）の温度レベル上昇を
抑制するために流されるものである。Next, the operation of FIG. 8 will be described. First, a high voltage is applied from the power source (1) between the electrodes (2) and (3) to generate a discharge (4) between the electrodes (2) and (3). On the other hand, a gas flow (8) of the laser medium gas is caused to flow between the electrodes (2) and (3), and the laser medium gas is excited by the discharge (4) to generate laser light. The partial reflection mirror (5) and the total reflection mirror (6) are arranged to face each other across the discharge (4) to form an optical resonator, and a circular opening is provided in the vicinity of the partial reflection mirror (5). By disposing the aperture (7) having the portion (71), the circular laser beam (9) can be extracted to the outside. In this case, if the adjustment of the mutually opposing positions of the partial reflection mirror (5) and the total reflection mirror (6), that is, the alignment is defective,
The mode symmetry of the laser beam (9) is broken, which causes a temperature distribution in each part of the aperture member (70). Therefore, the mutually opposing positions of the partial reflection mirrors (5) and the total reflection mirrors (6) are adjusted so that the output from the thermocouple (73) provided on the aperture member (70) becomes uniform. Means, for example each of the above mirrors (5), (6)
By appropriately adjusting the angle of the laser beam, the laser beam path is made proper, the deviation from the optical axis of the laser beam is corrected, and the laser beam (9) having a good symmetry mode is generated. Is possible. Here, the cooling water (74) is made to flow in order to suppress a rise in the temperature level of the aperture member (70).
かかる従来のレーザ装置は，レーザビーム位置検出手段
として，アパーチヤ部材（70）の温度上昇を検出する手
段を用いているため，一般に数秒の応答時間を要すると
共に，アパーチヤ部材（70）の温度レベル上昇抑制のた
め，該アパーチヤ部材（70）の冷却を行う必要がある。
又，周囲雰囲気への熱拡散の影響を受け，正確な温度検
出が行えず，レーザビーム位置検出精度が悪いと共に，
アパーチヤ部材（70）がその構造上大型化され，レーザ
ビーム品質に対し何らかの悪影響を与えるという種々の
不都合があつた。Since such a conventional laser device uses a means for detecting the temperature rise of the aperture member (70) as a laser beam position detecting means, it generally requires a response time of several seconds and a temperature level rise of the aperture member (70). In order to suppress it, it is necessary to cool the aperture member (70).
Also, due to the influence of thermal diffusion to the surrounding atmosphere, accurate temperature detection cannot be performed, and the laser beam position detection accuracy is poor,
The aperture member (70) has a large size due to its structure, which causes various inconveniences such that the laser beam quality is adversely affected.
この発明は上記のような問題点を解消するためになされ
たもので，応答時間の早く，高精度でコンパクトな位置
検出手段を備えたレーザ装置を得ることを目的とする。The present invention has been made to solve the above problems, and an object of the present invention is to obtain a laser device having a highly accurate and compact position detecting means with a fast response time.
この発明に係わるレーザ装置は、少なくとも４個以上の
レーザビーム受光板をレーザビームの光路内で、アパー
チャの開口部外周より外側にアパーチャから独立して設
け、各受光板の温度を測定するレーザビーム位置検出手
段を備えたものである。The laser device according to the present invention is provided with at least four laser beam receiving plates, which are provided outside the outer circumference of the aperture opening in the optical path of the laser beam, independently of the apertures, and measure the temperature of each receiving plate. The position detecting means is provided.
この発明におけるレーザビーム位置検出手段は各々独立
した複数個の受光板によりレーザビームを受光し，各受
光板の温度を計測して，その出力の変化によりレーザビ
ーム位置の変化を検出する。The laser beam position detecting means in the present invention receives a laser beam by a plurality of independent light receiving plates, measures the temperature of each light receiving plate, and detects the change in the laser beam position by the change in the output.
以下，この発明の一実施例を図について説明する。第１
図（ａ）はこの発明の一実施例によるレーザ装置を示す
概略構成図，第１図（ｂ）はそのレーザビーム位置検出
手段部分を示す正面図，及び第１図（ｃ）は第１図
（ｂ）のＣ−Ｃ線に沿つた縦断面図である。図におい
て，（77）は部分反射ミラー（５）の近傍に配設される
モードセレクシヨン用のアパーチヤ，（71）はその開口
部，（10）はレーザビームの光路内の，開口部（71）外
周より外側に設けられた複数個のレーザビーム受光板で
あり，例えばセラミツクよりなる。（11）は各受光板
（10）の温度を測定する温度センサーであり，例えば熱
電対よりなる。そして受光板（10）及び温度センサー
（11）によりレーザビーム位置検出手段を構成する。ま
た（91）は受光板（10）へ入射するレーザビームであ
る。An embodiment of the present invention will be described below with reference to the drawings. First
FIG. 1 (a) is a schematic configuration diagram showing a laser device according to an embodiment of the present invention, FIG. 1 (b) is a front view showing the laser beam position detecting means portion, and FIG. 1 (c) is FIG. It is a longitudinal cross-sectional view along the CC line of (b). In the figure, (77) is an aperture for mode selection arranged near the partial reflection mirror (5), (71) is its opening, and (10) is an opening (71) in the optical path of the laser beam. ) A plurality of laser beam receiving plates provided on the outer side of the outer circumference, and made of, for example, ceramics. Reference numeral (11) is a temperature sensor for measuring the temperature of each light receiving plate (10), and is composed of, for example, a thermocouple. The light receiving plate (10) and the temperature sensor (11) constitute a laser beam position detecting means. Further, (91) is a laser beam incident on the light receiving plate (10).
次に動作について説明する。Next, the operation will be described.
各電極（２），（３）間に電源（１）から高電圧を印加
し，各電極（２），（３）間に放電（４）を発生させ
る。一方，各電極（２），（３）間にレーザ媒質ガスの
ガス流（８）を流し，レーザ媒質ガスを上記の放電
（４）によつて励起する。A high voltage is applied from the power source (1) between the electrodes (2) and (3) to generate a discharge (4) between the electrodes (2) and (3). On the other hand, a gas flow (8) of the laser medium gas is caused to flow between the electrodes (2) and (3), and the laser medium gas is excited by the above-mentioned discharge (4).
ミラー（５），（６）間を往復する光は，放電（４）に
より励起されたレーザ媒質により増幅され，一定以上の
強度になると部分反射ミラー（５）よりレーザビーム
（９）として外部に出射する。共振器ミラー（５），
（６）の間には開口部（71）をもつアパーチヤ（77）が
挿入され，ビームの外径の規制をおこなつている。アパ
ーチヤ（77）の開口部（71）によりはし切りされたレー
ザビームは，レーザ媒質により増幅され，レーザミラー
（６）に反射されて開口部外周上の受光板（10）にレー
ザビーム（91）として入射する。The light that reciprocates between the mirrors (5) and (6) is amplified by the laser medium excited by the discharge (4), and when the intensity exceeds a certain level, the partial reflection mirror (5) outputs the laser beam (9) to the outside. Emit. Resonator mirror (5),
An aperture (77) having an opening (71) is inserted between (6) to regulate the outer diameter of the beam. The laser beam cut off by the aperture (71) of the aperture (77) is amplified by the laser medium, is reflected by the laser mirror (6), and is reflected on the light receiving plate (10) on the periphery of the aperture by the laser beam (91). ).
レーザビームが一般にもちいられている軸対称な，ガウ
シアンモード（強度分布が径方向に正規分布しているも
の）とすると，レーザビームの中心軸と開口部（71）の
中心軸とが一致していれば，開口部（71）と同軸上に軸
対称に設置された同一の受光面積の受光板（10）には同
一の強度のレーザビームが入射し，したがつて各温度セ
ンサー（11）の出力は同一となる。しかし，何らかの外
因でレーザミラーの角度がずれ，レーザビームの中心軸
と開口部の中心軸とがずれた場合には，各温度センサー
の出力に差が生じ，レーザビームの強度分布の対称性が
悪化する。例えば，上方向にずれると，開口部上側に設
置された受光板が強く加熱され，その温度上昇により，
光軸，即ちレーザビームの中心軸の動きを検出できる。
第２図に示すものは，実際に500WのCO2レーザをもちい
て行なつた実験例を示す。受光板（10）は円板で直径2m
mのSuSの板，温度センサー（11）はCAの熱電対である。When the laser beam is in the axisymmetric Gaussian mode (in which the intensity distribution is normally distributed in the radial direction), which is commonly used, the central axis of the laser beam and the central axis of the opening (71) coincide. Then, the laser beam of the same intensity is incident on the light-receiving plate (10) having the same light-receiving area and arranged axially symmetrically with the opening (71), and accordingly, the temperature sensor (11) of each temperature sensor (11). The output will be the same. However, if the angle of the laser mirror deviates for some reason and the central axis of the laser beam deviates from the central axis of the aperture, there will be a difference in the output of each temperature sensor, and the symmetry of the intensity distribution of the laser beam will change. Getting worse. For example, if it shifts upward, the light receiving plate installed above the opening will be heated strongly, and the temperature rise will cause
The movement of the optical axis, that is, the central axis of the laser beam can be detected.
The one shown in Fig. 2 shows an example of an experiment actually carried out using a 500 W CO 2 laser. The light receiving plate (10) is a disc and has a diameter of 2 m.
The mS SuS plate and temperature sensor (11) are CA thermocouples.
縦軸には上下に設けた温度センサーの出力差から計算さ
れた受光板の温度差を，横軸には開口部の中心軸とレー
ザビームの中心軸との上下方向のずれ量を示す。The vertical axis shows the temperature difference of the light receiving plate calculated from the output difference of the temperature sensors provided above and below, and the horizontal axis shows the vertical shift amount between the central axis of the aperture and the central axis of the laser beam.
開口部（71）の中心軸とレーザビームの光軸とがずれる
と，レーザビームモードの強度分布に異方性を生じるた
め，上記温度差が零となるようにレーザミラー（５）又
は（６），もしくは両方を調整すれば，常に軸対称な強
度分布をもつレーザビームが得られる。When the center axis of the opening (71) and the optical axis of the laser beam are deviated, anisotropy occurs in the intensity distribution of the laser beam mode, so that the laser mirror (5) or (6) is adjusted so that the temperature difference becomes zero. ) Or both are adjusted to obtain a laser beam with an axially symmetrical intensity distribution.
なお，上記実施例では，受光板に温度センサーがはりつ
いた形状のものを示したが，第３図に示すように温度セ
ンサーが受光板に被覆された構造としてもよい。また第
４図に示すように受光板（10）のレーザビーム入射面に
レーザ吸収膜（100）をコーテイングすればその吸収率
は一定のため，受光板への入熱が一定となりさらに安定
に検出できる。In the above embodiment, the light receiving plate has the temperature sensor attached thereto, but the light receiving plate may be covered with the temperature sensor as shown in FIG. Also, as shown in Fig. 4, if the laser absorption film (100) is coated on the laser beam incident surface of the light receiving plate (10), the absorption rate will be constant, so the heat input to the light receiving plate will be constant and detection will be more stable. it can.
また，上記実施例では受光板は各々同一の受光面積を有
していたが，軸対称以外の強度分布をもつレーザビーム
を発生させる場合には第５図に示すように各受光板の面
積を変えて，各受光板への入光量が一定になるようにし
てもよいし，第６図に示すように各センサーの，中心軸
からの距離を変えてもよい。Further, in the above-mentioned embodiment, the light receiving plates have the same light receiving area. However, when a laser beam having an intensity distribution other than the axial symmetry is generated, the area of each light receiving plate is changed as shown in FIG. Alternatively, the amount of light incident on each light receiving plate may be constant, or the distance from the central axis of each sensor may be changed as shown in FIG.
また，検出する位置も，第７図（ａ）（ｂ）（ｃ）のご
とくレーザビームの光路内の各所考えられる。Further, the positions to be detected can be considered in various places in the optical path of the laser beam as shown in FIGS.
さらに，本分では放電により励起されるガスレーザを例
にとり説明したが，ガスレーザにかぎらず，レーザ媒質
と共振器ミラーとをもつレーザ装置であれば任意に適用
できる。Further, in the present description, a gas laser excited by discharge is described as an example, but the present invention is not limited to the gas laser, and any laser device having a laser medium and a resonator mirror can be arbitrarily applied.
また温度センサーとしては，シース熱電対，白金測温
体，サーミスタ，セラミツク封いん白金測温体等が使え
る。As the temperature sensor, sheath thermocouple, platinum temperature sensor, thermistor, ceramic sealed platinum temperature sensor can be used.
以上のように、この発明によればレーザビームの光路内
の、アパーチャの開口部外周より外側に少なくとも４個
以上のレーザビーム受光板をアパーチャから独立して設
け、各受光板の温度を測定するレーザビーム位置検出手
段を設けたので、応答速度が速く、精度が高くコンパク
トなものが得られるという効果がある。As described above, according to the present invention, at least four laser beam receiving plates are provided outside the outer periphery of the aperture opening in the optical path of the laser beam, independently of the apertures, and the temperature of each light receiving plate is measured. Since the laser beam position detecting means is provided, there is an effect that a quick response speed, high accuracy and compact size can be obtained.
第１図（ａ）はこの発明の一実施例によるレーザ装置を
示す概略構成図，第１図（ｂ）及び（ｃ）は各々この発
明の一実施例に係る位置検出手段を示す正面図及び縦断
面図，第２図はこの発明の一実施例に係る位置検出手段
における，軸ずれに対する温度センサーの差出力の変化
を示す特性図，第３図，第４図（ａ）及び（ｂ）は各々
この発明の他の実施例に係る位置検出手段を示す正面図
及び縦断面図，第５図及び第６図は各々この発明の他の
実施例に係る位置検出手段を示す正面図，第７図
（ａ），（ｂ）及び（ｃ）は各々この発明の他の実施例
によるレーザ装置を示す要部構成図，並びに第８図
（ａ）は従来のレーザ装置を示す構成図，第８図（ｂ）
及び（ｃ）は各々従来の位置検出手段を示す正面図及び
縦断面図である。 図において、（１）は電源，（２）（３）は電極，
（５）は部分反射ミラー，（６）は全反射ミラー，（7
1）は開口部，（77）はアパーチヤ，（９）はレーザビ
ーム，（10）はレーザビーム受光板，（11）は温度セン
サー，（100）はレーザ吸収膜である。 なお，図中，同一符号は同一又は相当部分を示す。FIG. 1 (a) is a schematic configuration diagram showing a laser device according to one embodiment of the present invention, and FIGS. 1 (b) and (c) are front views showing a position detecting means according to one embodiment of the present invention, respectively. FIG. 2 is a longitudinal sectional view, and FIG. 2 is a characteristic diagram showing changes in the differential output of the temperature sensor with respect to the axis deviation in the position detecting means according to the embodiment of the present invention, FIG. 3, FIG. Is a front view and a longitudinal sectional view showing a position detecting means according to another embodiment of the present invention, and FIGS. 5 and 6 are front views showing a position detecting means according to another embodiment of the present invention. 7 (a), (b) and (c) are main part configuration diagrams showing a laser device according to another embodiment of the present invention, and FIG. 8 (a) is a configuration diagram showing a conventional laser device. 8 (b)
And (c) are respectively a front view and a vertical sectional view showing a conventional position detecting means. In the figure, (1) is a power source, (2) and (3) are electrodes,
(5) is a partial reflection mirror, (6) is a total reflection mirror, (7
1) is an opening, (77) is an aperture, (9) is a laser beam, (10) is a laser beam receiving plate, (11) is a temperature sensor, and (100) is a laser absorption film. In the drawings, the same reference numerals indicate the same or corresponding parts.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭60−115273（ＪＰ，Ａ) 実開 昭59−62876（ＪＰ，Ｕ) 実開 昭58−115716（ＪＰ，Ｕ) ─────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-60-115273 (JP, A) Actually opened 59-62876 (JP, U) Actually opened 58-115716 (JP, U)
Claims (4)
口部を有するアパーチャにより外径を規制して外部に取
り出すものにおいて、上記レーザビームの光路内に配設
され、上記開口部外周より外側に上記アパーチャから独
立した状態で設けられた少なくとも４個以上のレーザビ
ーム受光板と、上記各レーザビーム受光板の温度を測定
する温度センサーとからなるレーザビーム位置検出手段
を備えたことを特徴とするレーザ装置。1. A laser beam generated in an optical resonator, wherein the laser beam is extracted to the outside with an outer diameter restricted by an aperture having an opening. The laser beam is arranged in the optical path of the laser beam, and the outer periphery of the opening is provided. Laser beam position detecting means including at least four laser beam receiving plates provided outside the aperture independently of the aperture and a temperature sensor for measuring the temperature of each of the laser beam receiving plates are provided. And laser equipment.
にレーザ吸収膜を形成したことを特徴とする請求項１記
載のレーザ装置。2. A laser device according to claim 1, wherein a laser absorbing film is formed on a laser beam incident surface of the laser beam receiving plate.
は同一の受光面積を有し、開口部と同軸上に配設されて
いることを特徴とする請求項１または２記載のレーザ装
置。3. The laser device according to claim 1, wherein at least four laser beam receiving plates have the same light receiving area and are arranged coaxially with the opening.
していることを特徴とする請求項１ないし３記載のレー
ザ装置。4. The laser device according to claim 1, wherein the laser beam receiving plate covers the temperature sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5190886A JPH0795612B2 (en) | 1986-03-10 | 1986-03-10 | Laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5190886A JPH0795612B2 (en) | 1986-03-10 | 1986-03-10 | Laser device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62209881A JPS62209881A (en) | 1987-09-16 |
| JPH0795612B2 true JPH0795612B2 (en) | 1995-10-11 |
Family
ID=12899974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5190886A Expired - Lifetime JPH0795612B2 (en) | 1986-03-10 | 1986-03-10 | Laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0795612B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6785319B1 (en) | 1999-01-06 | 2004-08-31 | Komatsu Ltd. | Ultraviolet laser device |
-
1986
- 1986-03-10 JP JP5190886A patent/JPH0795612B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62209881A (en) | 1987-09-16 |
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