JPH0798664B2 - Manufacturing method of fine powder for producing pyroelectric porcelain for infrared sensor - Google Patents
Manufacturing method of fine powder for producing pyroelectric porcelain for infrared sensorInfo
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- JPH0798664B2 JPH0798664B2 JP61086260A JP8626086A JPH0798664B2 JP H0798664 B2 JPH0798664 B2 JP H0798664B2 JP 61086260 A JP61086260 A JP 61086260A JP 8626086 A JP8626086 A JP 8626086A JP H0798664 B2 JPH0798664 B2 JP H0798664B2
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Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、赤外線センサー用焦電材料として用いられ
る、チタン酸ジルコン酸鉛−ニオブ酸マンガン酸鉛(以
下、「PZT−PMnN」という)系焼結体の製造に好適であ
るPZT−PMnN系微粉末の製法に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a lead zirconate titanate-lead niobate manganate (hereinafter referred to as "PZT-PMnN") system used as a pyroelectric material for infrared sensors. The present invention relates to a method for producing a PZT-PMnN-based fine powder suitable for producing a sintered body.
冷却装置を必要としない熱型赤外線センサーのうちで、
焦電体磁器を用いたものが最も性能が良く、使用も簡単
であるため注目されているが、その中でもPZT−PMnN系
の焦電体磁器は、チタン酸ジルコン酸鉛(以下、「PZ
T」という)のみからなる系のものと比べて、電圧感度
(Rv)において優れている。Of the thermal infrared sensors that do not require a cooling device,
The one using the pyroelectric porcelain has been attracting attention because it has the best performance and is easy to use. Among them, the PZT-PMnN type pyroelectric porcelain is the lead zirconate titanate (hereinafter referred to as "PZ
It is superior in voltage sensitivity (Rv) to that of a system consisting only of "T").
このような焦電体磁器を製造する方法として、従来、各
成分元素の酸化物の粉末を所要組成に混合し仮焼した
後、粉砕、成形し、成形物を常圧で焼結する方法が知ら
れている。しかし、この方法で焼結に供される粉末は、
平均粒径が数μm以上と大きいため焼結性が低く、その
結果、常圧焼結で得られる焼結体は焼結密度が低く焦電
体磁器として要求される焦電特性は不十分なものとな
る。焼結性を向上させるために粉末にリチウムなどの焼
結助剤を添加して常圧焼結したり、あるいはホットプレ
スにより焼結するという対策がとられるが、焼結助剤は
不純物となって得られる磁器の焦電特性を低下させると
いう弊害があり、またホットプレスには高価で大規模な
装置を必要とするという問題がある。As a method for producing such a pyroelectric porcelain, conventionally, a method of mixing powders of oxides of the respective component elements to a required composition, calcining, crushing, molding, and sintering the molded product under normal pressure has been known. Are known. However, the powder used for sintering by this method is
Since the average particle size is as large as several μm or more, the sinterability is low. As a result, the sintered body obtained by pressureless sintering has a low sintering density and the pyroelectric properties required for a pyroelectric ceramic are insufficient. Will be things. In order to improve sinterability, it is possible to add a sintering aid such as lithium to the powder and sinter under normal pressure or sinter by hot pressing.However, the sintering aid becomes an impurity. There is a problem that the pyroelectric characteristics of the porcelain obtained as a result are degraded, and there is a problem that the hot press requires an expensive and large-scale device.
そこで、焼結助剤を用いず、しかも通常の常圧焼結法に
より緻密で優れた焦電特性を有する焦電体磁器を得るこ
とができる易焼結性PZT−PMnN系微粉末が望まれてい
る。近年、そのような微粉末の製法として、各成分元素
の化合物を所要組成で溶解した溶液から全成分元素を同
時に沈殿(共沈)させ、得られた沈殿物を仮焼する方法
(共沈法)が提案されている。Therefore, an easily sinterable PZT-PMnN-based fine powder that can obtain a pyroelectric ceramic having a dense and excellent pyroelectric property by a normal atmospheric pressure sintering method without using a sintering aid is desired. ing. In recent years, as a method for producing such fine powder, a method of simultaneously precipitating (coprecipitating) all the constituent elements from a solution in which a compound of each constituent element is dissolved in a required composition and calcining the obtained precipitate (coprecipitation method) ) Is proposed.
しかし、上記の共沈法の場合、一つの沈殿形成液に対す
る各元素の沈殿形成能(例えば、一定pHにおける各元素
の沈殿物の溶解度積)が異なるため必ずしも仕込み組成
と同一組成の沈殿微粒子が得られるとは限らず、また、
沈殿の形成時に凝集して2次粒子を形成し易く、その結
果焼結性は向上するがなお不十分であるという問題があ
る。さらに、チタンの原料化合物としては安価な四塩化
チタンの使用が望まれるが、四塩化チタンが溶解してで
きる塩素イオンは鉛と反応して白色沈殿を形成するため
鉛化合物と同時に使用することができず、そのかわりに
高価な硝酸チタンを使用しなければならないという問題
もある。However, in the case of the above coprecipitation method, the precipitation forming ability of each element with respect to one precipitation forming liquid (for example, the solubility product of the precipitate of each element at a constant pH) is different, so that the precipitation fine particles of the same composition as the charged composition are not necessarily formed. Not always obtained,
When precipitates are formed, they tend to aggregate to form secondary particles, and as a result, the sinterability is improved but there is still a problem. Furthermore, it is desirable to use inexpensive titanium tetrachloride as a raw material compound of titanium, but since chlorine ions formed by dissolution of titanium tetrachloride react with lead to form a white precipitate, it can be used at the same time as a lead compound. However, there is a problem that expensive titanium nitrate must be used instead.
そこで本発明の目的は、焼結助剤を用いずに常圧焼結法
により緻密で優れた焦電特性を有する磁器を製造し得る
易焼結性PZT−PMnN系赤外線センサー用焦電体磁器製造
用微粉末の製法であって、しかも目的組成の微粉末を容
易に製造し得る方法を提供することにある。Therefore, an object of the present invention is to manufacture a porcelain having a dense and excellent pyroelectric property by an atmospheric pressure sintering method without using a sintering aid, and an easily-sinterable PZT-PMnN-based pyroelectric ceramics for infrared sensor. It is an object of the present invention to provide a method for producing fine powder for production, which is capable of easily producing fine powder having a target composition.
本発明は、前記従来技術の問題点を解決するものとし
て、 一般式: (1−A)PbZrxTi(1−x)O3−APbMnyNb(1−y)O
3 〔ただし、式中、A、xおよびyはそれぞれ、0.01≦A
≦0.3、0.54≦x≦0.95、0.25≦y≦0.55である。〕で
表わされる組成を有するチタン酸ジルコン酸鉛−ニオブ
酸マンガン酸鉛系赤外線センサー用焦電体磁器製造用微
粉末の製法であって、 鉛、ジルコニウム、チタン、マンガンおよびニオブから
選ばれる1〜4種の元素を含む溶液から、前記1〜4種
の元素を含む沈殿物を生成させ、 次に、得られた沈殿物を分散させた状態で、前記5種の
元素のうち残る4〜1種の少なくとも1種の元素を含む
溶液から該4〜1種の少なくとも1種の元素を含む沈殿
物を生成させる操作を必要回数行なって前記5種の元素
をすべて沈殿させ、 次に、得られた前記5種の元素を含む沈殿物を仮焼する
ことからなるチタン酸ジルコン酸鉛−ニオブ酸マンガン
酸鉛系赤外線センサー用焦電体磁器製造用微粉末の製法
を提供するものである。The present invention, as to solve the problems of the prior art, the general formula: (1-A) PbZr x Ti (1-x) O 3 -APbMn y Nb (1-y) O
3 [wherein A, x and y are each 0.01 ≦ A
≦ 0.3, 0.54 ≦ x ≦ 0.95, 0.25 ≦ y ≦ 0.55. ] A method for producing fine powder for producing pyroelectric porcelain for a lead zirconate titanate-lead niobate manganate-based infrared sensor having a composition represented by: 1 to 5 selected from lead, zirconium, titanium, manganese and niobium. A precipitate containing the 1 to 4 elements is generated from a solution containing the 4 elements, and then the remaining 4 to 1 of the 5 elements are dispersed in a state where the obtained precipitate is dispersed. The solution containing at least one element of at least one species to produce a precipitate containing at least one element of at least one of four to one to precipitate all of the five elements, Another object of the present invention is to provide a method for producing fine powder for producing pyroelectric ceramics for a lead zirconate titanate-lead niobate lead manganate-based infrared sensor, which comprises calcining a precipitate containing the above five elements.
前記一般式において、A、x、およびyはそれぞれ、0.
01≦A≦0.3、0.54≦x≦0.95および0.25≦y≦0.55の
範囲となるように微粉末を製造する必要がある。A、x
およびyのいずれか一つでも上記の範囲外であると、微
粉末を焼結させることで得られる磁器の電圧感度は不十
分となる。また、マンガン酸ニオブ酸鉛の割合を過度に
大きくすると得られる磁器の焦電係数は大きくなるが、
その比誘電率も増加する結果、電圧感度はあまり向上し
ない。In the general formula, A, x, and y are each 0.
It is necessary to manufacture the fine powder so that the ranges of 01 ≦ A ≦ 0.3, 0.54 ≦ x ≦ 0.95 and 0.25 ≦ y ≦ 0.55 are satisfied. A, x
If either one of y and y is out of the above range, the voltage sensitivity of the porcelain obtained by sintering the fine powder becomes insufficient. Also, if the proportion of lead niobate manganate is excessively increased, the pyroelectric coefficient of the porcelain obtained is increased,
As a result of the relative permittivity also increasing, the voltage sensitivity is not so improved.
本発明の製法は、沈殿を形成する際に鉛、ジルコニウ
ム、チタン、マンガンおよびニオブの5種の元素を同時
に沈殿(共沈)させず、沈殿形成を2段階以上に分けて
行う方法(以下、「多段湿式法」という)を用いる。こ
の方法は、沈殿させる元素の順序、一つの段階で共沈さ
せる元素の組み合わせ、沈殿形成の段階数などを必要に
応じて選択することにより多くの変法が考えられるが、
そのいくつかを具体的に挙げるとこれら5種の元素のう
ち、第1段目で1種の元素を沈殿させ第2段目で残る4
種の元素を共沈させる方法、その逆に、第1段目で4種
の元素を共沈させ、第2段目で残る4種のうち1種を沈
殿させ、第3段目で残る3種を共沈させる方法、5種の
元素ごとに5段階に分けて順次沈殿形成を行なわせる方
法などがある。さらには、1元素を複数の段階に分けて
沈殿形成をさせることで、6段階以上の沈殿形成を行う
方法も挙げられる。通常は、2〜5段に分けて行うのが
一般的である。The production method of the present invention is a method of performing precipitation formation in two or more steps without precipitating (coprecipitation) the five elements of lead, zirconium, titanium, manganese, and niobium simultaneously when forming the precipitation (hereinafter, "Multi-stage wet method") is used. This method can be modified in many ways by selecting the order of elements to be precipitated, the combination of elements to be coprecipitated in one step, the number of steps of precipitation formation, etc.,
To give some specific examples, among these five elements, one element is precipitated in the first step and remains in the second step.
Method of coprecipitating seed elements, conversely, coprecipitating 4 kinds of elements in the first step, precipitating 1 out of 4 kinds remaining in the 2nd step, and remaining 3 in the 3rd step There is a method of coprecipitating seeds, a method of sequentially forming precipitates in five steps for each of the five elements, and the like. Furthermore, a method of performing precipitation formation in 6 or more steps by dividing one element into a plurality of steps to form the precipitation is also included. Usually, it is general to carry out in 2 to 5 steps.
本発明の製法に原料として用いることができる、Pb,Zr,
Mn,NbおよびTiの化合物としては、例えば、これら元素
のオキシ塩化物、炭酸塩、オキシ硝酸塩、硫酸塩、硝酸
塩、酢酸塩、ギ酸塩、シュウ酸塩等の有機酸もしくは無
機酸の塩類、水酸化物、塩化物、酸化物などが挙げられ
るが、特にこれらに制限されるものではない。Can be used as a raw material in the production method of the present invention, Pb, Zr,
Examples of compounds of Mn, Nb and Ti include salts of organic or inorganic acids such as oxychlorides, carbonates, oxynitrates, sulfates, nitrates, acetates, formates and oxalates of these elements, and water. Examples thereof include oxides, chlorides, and oxides, but are not particularly limited thereto.
これらの化合物を含む溶液を調製する溶媒としては、通
常、水、アルコール、これらの混合液が用いられるが、
これらに限定されるものではない。これら溶媒に可溶で
ない場合は鉱酸を添加して可溶化してもよい。As a solvent for preparing a solution containing these compounds, water, alcohol, or a mixed solution thereof is usually used.
It is not limited to these. If it is not soluble in these solvents, mineral acid may be added to solubilize it.
本発明は多段湿式法を採用するため、従来の共沈法では
相性が悪いため用いることができなかった化合物でも組
合わせて使用することができる。例えば、前述の四塩化
チタンでも、TiとPbの沈殿を別段階で行なうようにすれ
ば使用することができる。Since the present invention employs a multi-stage wet method, compounds that could not be used because of poor compatibility in the conventional coprecipitation method can be used in combination. For example, the above-mentioned titanium tetrachloride can also be used if precipitation of Ti and Pb is carried out in separate steps.
沈殿の形成は、原料化合物を含む水溶液を過剰量の沈殿
形成液に混合することにより行なうのがよい。用いられ
る沈殿形成液としては、例えばアンモニア、炭酸アンモ
ニウム、苛性アルカリ、炭酸ナトリウム、シュウ酸、シ
ュウ酸アンモニウム及びオキシンやアミンなどの有機試
薬などの溶液が挙げられる。これらから選定すればよ
い。The formation of the precipitate is preferably performed by mixing an aqueous solution containing the raw material compound with an excessive amount of the precipitate forming liquid. Examples of the precipitate-forming liquid used include solutions of ammonia, ammonium carbonate, caustic alkali, sodium carbonate, oxalic acid, ammonium oxalate, and organic reagents such as oxines and amines. You can select from these.
ある段階の沈殿形成と次の段階の沈殿形成に用いる沈殿
形成液が同じ場合には、前の段階の沈殿形成で得られた
沈殿物を含む溶液にそのまま次の段階で沈殿させようと
する元素を含む溶液を混合すればよく、この場合沈殿形
成液は既に過剰量添加済みであるから場合によっては改
めて添加する必要はない。また、次の段階の沈殿形成液
が前の段階の沈殿形成液と異なり、しかも前の段階で用
いた沈殿形成液が次の段階では存在しない方が望ましい
場合などには、前の段階の沈殿形成後、沈殿物を洗浄し
た後、溶媒または次の段階で沈殿させる元素を含む水溶
液に分散させた状態で次の段階の沈殿形成を実施すれば
よい。When the precipitate forming solution used in one step is the same as the precipitate forming solution used in the next step, the element containing the precipitate obtained in the previous step is used as it is in the next step. It suffices to mix the solution containing the above. In this case, since the precipitate forming solution has already been added in an excessive amount, there is no need to add it again depending on the case. In addition, if the precipitate-forming solution of the next step is different from the precipitate-forming solution of the previous step, and it is desirable that the precipitate-forming solution used in the previous step does not exist in the next step, the precipitate of the previous step is used. After the formation, the precipitate may be washed, and then the precipitation in the next step may be carried out in a state of being dispersed in a solvent or an aqueous solution containing an element to be precipitated in the next step.
沈殿物を溶媒または溶液中に分散させる方法は特に限定
されず、例えば、通常の撹拌機による撹拌、超音波を作
用させる方法などが挙げられる。The method of dispersing the precipitate in a solvent or solution is not particularly limited, and examples thereof include stirring with a normal stirrer and a method of applying ultrasonic waves.
得られた沈殿は、洗浄、乾燥後に次の仮焼に供される
が、洗浄はエタノール等のアルコール類を用いることが
望ましく、これにより乾燥、仮焼における凝集を一層抑
制することができる。The obtained precipitate is subjected to the subsequent calcination after washing and drying, and it is desirable to use alcohols such as ethanol for the washing, whereby aggregation during drying and calcination can be further suppressed.
得られた沈殿物の仮焼は、空気中もしくは酸素中におい
て550〜750℃、好ましくは600〜700℃において行なう。
仮焼時間は、大体1〜2時間でよい。The obtained precipitate is calcined in air or oxygen at 550 to 750 ° C, preferably 600 to 700 ° C.
The calcination time may be about 1-2 hours.
この仮焼によりPMnNがPZTに固溶した均一なPZT−PMnNの
微粉末が得られ、それらは2次粒子の生成が少なく、平
均粒径は通常1μm未満と微細なものであるため極めて
易焼結性である。仮焼の温度が550℃未満では固相反応
が完了しないためPbTiO3,PbZrO3,MnOおよびNb2O5の相が
共存した状態となる。また仮焼の温度が750℃を超える
と粒成長が顕著になり易焼結性の微粉末を得ることがで
きない。By this calcination, a uniform PZT-PMnN fine powder in which PMnN is solid-dissolved in PZT can be obtained. They have few secondary particles, and the average particle size is usually less than 1 μm. It is connected. If the calcination temperature is less than 550 ° C, the solid-phase reaction is not completed, and the phases of PbTiO 3 , PbZrO 3 , MnO, and Nb 2 O 5 coexist. Further, if the calcination temperature exceeds 750 ° C., grain growth becomes remarkable and easily sinterable fine powder cannot be obtained.
こうして得られた本発明のPMnN−PZT系微粉末を用いて
焼結体を製造するには、該微粉末を好ましくは粉砕後、
成形し、成形物を1000〜1200℃で焼結すればよく、焼結
の雰囲気としては、空気、酸素あるいはこれらに酸化鉛
蒸気を含めた雰囲気などが挙げられるが、酸化鉛蒸気を
含む酸素中が好ましい。焼結法は常圧焼結および加圧焼
結のいずれでもよいが、常圧焼結で十分である。In order to produce a sintered body using the PMnN-PZT-based fine powder of the present invention thus obtained, preferably after pulverizing the fine powder,
It suffices to mold and sinter the molded product at 1000 to 1200 ° C. The atmosphere for sintering includes air, oxygen, or an atmosphere containing lead oxide vapor in these, but in oxygen containing lead oxide vapor. Is preferred. The sintering method may be either pressureless sintering or pressure sintering, but pressureless sintering is sufficient.
以下、本発明を実施例により説明する。 Hereinafter, the present invention will be described with reference to examples.
実施例1 一般式: (1−A)PbZrxTi(1−x)O3−APbMnyNb(1−y)O
3 において、A=0.033、x=0.661およびy=0.342で表
わされる組成を有する磁器を製造するために所定量のオ
キシ硝酸ジルコニウム(ZrO(NO3)2)、塩化チタン
(TiCl4)、塩化マンガン(MnCl2)および塩化ニオブ
(NbCl5)を溶解させた水溶液をそれぞれ調製した。こ
れらの水溶液を5N(規定)アンモニア水中に、撹拌しな
がら、同時に滴下し、ジルコニウム、チタン、マンガン
およびニオブの各元素の沈殿物を形成させて、この沈殿
物を30分間撹拌して十分に沈殿物を形成させたのち、さ
らにその溶液を撹拌しながら所定量の硝酸鉛(Pb(N
O3)2)を含む水溶液を滴下して30分間さらに撹拌し、
ジルコニウム、チタン、マンガン、ニオブおよび鉛の共
沈殿物を得た。この共沈殿物を約1時間放置したのち、
濾過し、水そしてイソプロピルアルコールで洗浄した
後、真空乾燥し、得られた微粉末を600℃で1時間仮焼
した。Example 1 General formula: (1-A) PbZr x Ti (1-x) O 3 -APbMn y Nb (1-y) O
3 , a predetermined amount of zirconium oxynitrate (ZrO (NO 3 ) 2 ), titanium chloride (TiCl 4 ), manganese chloride for producing a porcelain having a composition represented by A = 0.033, x = 0.661 and y = 0.342. An aqueous solution in which (MnCl 2 ) and niobium chloride (NbCl 5 ) were dissolved was prepared. These aqueous solutions were simultaneously dropped into 5N (normal) ammonia water while stirring to form precipitates of zirconium, titanium, manganese, and niobium elements, and the precipitates were stirred for 30 minutes to sufficiently precipitate them. After the substance is formed, a predetermined amount of lead nitrate (Pb (N
An aqueous solution containing O 3 ) 2 ) was added dropwise, and the mixture was further stirred for 30 minutes,
A coprecipitate of zirconium, titanium, manganese, niobium and lead was obtained. After leaving this coprecipitate for about 1 hour,
After filtering, washing with water and isopropyl alcohol, vacuum drying was performed, and the obtained fine powder was calcined at 600 ° C. for 1 hour.
こうして得られた本発明の製法による微粉末について、
それを焼結してできる焼結体の性能を測定するため次の
様な操作を施した。Regarding the fine powder thus obtained according to the production method of the present invention,
The following operations were performed in order to measure the performance of a sintered body formed by sintering it.
前記の微粉末をボールミルで粉砕後、2t/cm2で成形し、
この成形物をPbO蒸気で飽和した酸素中、1200℃、常圧
で12時間焼結した。After pulverizing the fine powder with a ball mill, it is molded at 2 t / cm 2 ,
This molded product was sintered in oxygen saturated with PbO vapor at 1200 ° C. and normal pressure for 12 hours.
得られた焼結体の焼結密度の測定を行った後、焼結体を
1mm厚に研磨し、Agペーストを焼き付けた後、100℃のシ
リコーンオイル中で、1時間、50kV/cmの電場において
分極処理した。分極処理後の試料の焦電係数、比抵抗を
測定し、また、焼結体を2.7×4×0.1mmのチップに加工
し電極を蒸着させた後、その素子の1Hzにおける電圧感
度を測定した。それらの結果を表1に示す。After measuring the sintered density of the obtained sintered body,
After polishing to a thickness of 1 mm and baking the Ag paste, polarization treatment was performed in silicone oil at 100 ° C. for 1 hour in an electric field of 50 kV / cm. The pyroelectric coefficient and the specific resistance of the sample after the polarization treatment were measured, and the sintered body was processed into a chip of 2.7 × 4 × 0.1 mm to deposit an electrode, and then the voltage sensitivity of the device at 1 Hz was measured. . The results are shown in Table 1.
実施例2〜7 前記実施例1で示した一般式におけるA、xおよびyが
表1に示した値となる組成の磁器が得られるように各原
料化合物の溶液を調製した以外は、実施例1と同様な操
作を施して微粉末を得、さらに焼結して焼結体を得、そ
の焼結密度および焦電係数等の測定を行った。各実施例
におけるそれらの測定結果を表1に示す。Examples 2 to 7 Examples except that a solution of each raw material compound was prepared so that a porcelain having a composition in which A, x and y in the general formula shown in Example 1 have the values shown in Table 1 was obtained. Fine powder was obtained by performing the same operation as in 1, and further sintered to obtain a sintered body, and the sintered density, pyroelectric coefficient and the like were measured. Table 1 shows the measurement results thereof in each example.
比較例 前記一般式において、A=0.1、x=0.650およびy=0.
333で表わされる組成を有する磁器を製造するために、
所定量のPbO,ZrO2,TiO2,MnOおよびNb2O5の各酸化物粉末
をボールミルで混合し、800℃で仮焼した。こうして得
られた粉末から製造される焼結体の性能を測定するため
に、その粉末を成形し、成形物を1200℃で常圧で焼結
し、得られた磁器について実施例1と同様にして焼結密
度および焦電係数等を測定した。それらの測定結果を表
1に示す。Comparative Example In the above general formula, A = 0.1, x = 0.650 and y = 0.
In order to produce a porcelain having the composition represented by 333,
A predetermined amount of each oxide powder of PbO, ZrO 2 , TiO 2 , MnO and Nb 2 O 5 was mixed in a ball mill and calcined at 800 ° C. In order to measure the performance of a sintered body produced from the powder thus obtained, the powder was molded, the molded product was sintered at 1200 ° C. under normal pressure, and the obtained porcelain was processed in the same manner as in Example 1. The sintered density and pyroelectric coefficient were measured. Table 1 shows the measurement results.
〔発明の効果〕 本発明の製法により得られるPZT−PMnN系赤外線センサ
ー用焦電体磁器製造用微粉末は通常平均粒径がサブミク
ロンオーダーで2次粒子の生成も少ないため、易焼結性
が優れている。比較的低温における常圧焼結により緻密
なPZT−PMnN系赤外線センサー用焦電体磁器製造用微粉
末を製造することができ、得られた磁器は焦電特性の優
れたものであり、圧電体としても有用である。また、本
発明の製法は、目的組成を有するPZT−PMnN系赤外線セ
ンサー用焦電体磁器製造用微粉末を容易に製造すること
ができる。 [Effects of the Invention] The fine powder for producing a PZT-PMnN-based infrared sensor for pyroelectric porcelain obtained by the production method of the present invention usually has an average particle size of submicron order and few secondary particles are formed. Is excellent. It is possible to produce a fine powder for the production of PZT-PMnN-based infrared sensor pyroelectric ceramics by pressureless sintering at a relatively low temperature, and the obtained ceramics have excellent pyroelectric characteristics. Is also useful as Further, according to the production method of the present invention, it is possible to easily produce a fine powder having a desired composition for producing a PZT-PMnN-based infrared sensor pyroelectric ceramics.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭59−47784(JP,A) 特開 昭61−53113(JP,A) 特公 昭60−22453(JP,B1) ─────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-59-47784 (JP, A) JP-A-61-53113 (JP, A) JP-B-60-22453 (JP, B1)
Claims (1)
3 〔ただし、式中、A、xおよびyはそれぞれ、0.01≦A
≦0.3、0.54≦x≦0.95、0.25≦y≦0.55である。〕で
表わされる組成を有するチタン酸ジルコン酸鉛−ニオブ
酸マンガン酸鉛系赤外線センサー用焦電体磁器製造用微
粉末の製法であって、 鉛、ジルコニウム、チタン、マンガンおよびニオブから
選ばれる1〜4種の元素を含む溶液から、前記1〜4種
の元素を含む沈澱物を生成させ、 次に、得られた沈澱物を分散させた状態で、前記5種の
元素のうち残る4〜1種の少なくとも1種の元素を含む
溶液から該4〜1種の少なくとも1種の元素を含む沈澱
物を生成させる操作を必要回数行なって前記5種の元素
をすべて沈澱させ、 次に、得られた前記5種の元素を含む沈澱物を仮焼する
ことからなるチタン酸ジルコン酸鉛−ニオブ酸マンガン
酸鉛系赤外線センサー用焦電体磁器製造用微粉末の製
法。1. A general formula: (1-A) PbZr x Ti (1-x) O 3 -APbMn y Nb (1-y) O
3 [wherein A, x and y are each 0.01 ≦ A
≦ 0.3, 0.54 ≦ x ≦ 0.95, 0.25 ≦ y ≦ 0.55. ] A method for producing fine powder for producing pyroelectric porcelain for a lead zirconate titanate-lead niobate manganate-based infrared sensor having a composition represented by: 1 to 5 selected from lead, zirconium, titanium, manganese and niobium. A precipitate containing the 1 to 4 elements is produced from a solution containing the 4 elements, and the obtained precipitate is dispersed in the remaining 4 to 1 of the 5 elements. The solution containing at least one element of at least one species to form a precipitate containing the at least one element of at least one of four to one to precipitate all of the five elements, and A method for producing fine powder for producing pyroelectric ceramics for lead zirconate titanate-lead niobate manganate-based infrared sensors, which comprises calcination of a precipitate containing the above five elements.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61086260A JPH0798664B2 (en) | 1986-04-14 | 1986-04-14 | Manufacturing method of fine powder for producing pyroelectric porcelain for infrared sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61086260A JPH0798664B2 (en) | 1986-04-14 | 1986-04-14 | Manufacturing method of fine powder for producing pyroelectric porcelain for infrared sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62241826A JPS62241826A (en) | 1987-10-22 |
| JPH0798664B2 true JPH0798664B2 (en) | 1995-10-25 |
Family
ID=13881849
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61086260A Expired - Lifetime JPH0798664B2 (en) | 1986-04-14 | 1986-04-14 | Manufacturing method of fine powder for producing pyroelectric porcelain for infrared sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0798664B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1983462B (en) * | 2002-10-24 | 2010-11-03 | 精工爱普生株式会社 | Method for fabricating ferroelectric film and ferroelectric capacitor |
| JP3791614B2 (en) | 2002-10-24 | 2006-06-28 | セイコーエプソン株式会社 | Ferroelectric film, ferroelectric memory device, piezoelectric element, semiconductor element, piezoelectric actuator, liquid ejecting head, and printer |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5947784A (en) * | 1982-09-10 | 1984-03-17 | Hitachi Medical Corp | Piezoelectric ceramic composition |
| JPS6022453A (en) * | 1983-07-19 | 1985-02-04 | Seiko Epson Corp | Dc motor |
| JPS6153113A (en) * | 1984-08-18 | 1986-03-17 | Natl Inst For Res In Inorg Mater | Method for producing raw material powder of easily sinterable perovskite and its solid solution by wet method |
-
1986
- 1986-04-14 JP JP61086260A patent/JPH0798664B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62241826A (en) | 1987-10-22 |
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