JPH0810213B2 - Carbon dioxide sensor - Google Patents
Carbon dioxide sensorInfo
- Publication number
- JPH0810213B2 JPH0810213B2 JP63035772A JP3577288A JPH0810213B2 JP H0810213 B2 JPH0810213 B2 JP H0810213B2 JP 63035772 A JP63035772 A JP 63035772A JP 3577288 A JP3577288 A JP 3577288A JP H0810213 B2 JPH0810213 B2 JP H0810213B2
- Authority
- JP
- Japan
- Prior art keywords
- gas sensing
- carbon dioxide
- gas
- heated
- sensing unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
【発明の詳細な説明】 産業上の利用分野 本発明は、施設園芸,環境衛生,防災用,工業用など
の炭酸ガス濃度を計測あるいは制御する場所に使用する
イオン導電体を用いた構造の固体電解質型炭酸ガスセン
サに関するものである。TECHNICAL FIELD The present invention relates to a solid structure having an ionic conductor used in a place where carbon dioxide concentration is measured or controlled for facility horticulture, environmental hygiene, disaster prevention, industrial use and the like. The present invention relates to an electrolyte type carbon dioxide gas sensor.
従来の技術 近年、空調,農畜産分野を中心に炭酸ガスセンサに対
するニーズが高まり、種々のガスセンサが開発,実用化
が進められているが、その信頼性に多くの課題が残され
ている。特に、水蒸気,塩分粒子,タバコ煙,油煙etc
が存在する汚染環境に対する耐久性が懸案となってい
る。2. Description of the Related Art In recent years, there has been an increasing need for carbon dioxide sensors mainly in the fields of air conditioning and agriculture and livestock, and various gas sensors have been developed and put into practical use, but many problems remain in their reliability. Especially, water vapor, salt particles, cigarette smoke, oil smoke, etc.
Durability to the polluted environment where is present is a concern.
以下、第4図および第5図を参照しながら、上述した
従来の炭酸ガスセンサの例について説明する。Hereinafter, an example of the conventional carbon dioxide gas sensor described above will be described with reference to FIGS. 4 and 5.
図において、イオン導電体としての薄板状のNASICON
板(ナトリウムイオン伝導体セラミックス)11は、その
両端に電圧信号取り出し用の1対の電極12a,12bを備
え、さらに、その電極12a,12bのいずれか一方の一部、
あるいは全部に炭酸ナトリウム13が付着され、ガス感知
部1を構成している。NASICONの組成は、Na1+XZr2SiXP
3-XO12、(0≦X≦3)である。In the figure, thin plate NASICON as an ion conductor
The plate (sodium ion conductor ceramics) 11 is provided with a pair of electrodes 12a, 12b for extracting a voltage signal at both ends thereof, and further, a part of one of the electrodes 12a, 12b,
Alternatively, sodium carbonate 13 is attached to all of them to form the gas sensing unit 1. The composition of NASICON is Na 1 + X Zr 2 Si X P
3-X O 12 , (0 ≦ X ≦ 3).
ガス感知部1は、片面下部に加熱用ヒータ2を備え、
1対の電極から引出したリード線3a,3b、および加熱用
ヒータから引出した2本のリード線5a,5bを介して、下
部の台座6に固定されている。リード線3a,3bおよびリ
ードえ5a,5b、それぞれ信号出力用、および電圧印加用
で、台座6を貫通している。The gas sensing unit 1 includes a heater 2 for heating at the lower part of one side,
It is fixed to the lower pedestal 6 via lead wires 3a and 3b drawn from a pair of electrodes and two lead wires 5a and 5b drawn from a heater for heating. The lead wires 3a and 3b and the lead wires 5a and 5b are for signal output and voltage application, respectively, and penetrate the pedestal 6.
プロテクタ4bは、内包するガス感知部1、ヒータ2、
リード線3a,3b,5a,5bを機械的損傷から保護するととも
に、測定雰囲気と接触を良くするために、ステンレス製
の金網で構成され、台座6に固定されている。The protector 4b includes a gas detector 1, a heater 2,
In order to protect the lead wires 3a, 3b, 5a, 5b from mechanical damage and to improve the contact with the measurement atmosphere, they are made of stainless wire mesh and are fixed to the base 6.
上記構成において、まず、ガス感知部1をヒータ2に
より測定温度に加熱し、外部の雰囲気と接触させる。雰
囲気中の炭酸ガスは、プロテクタ4bの透孔を介して、拡
散あるいは対流によりガス感知部1に到達し、その際の
炭酸ガス濃度に応じて電極12a,12bに起電力を発生させ
る。この起電力を、電極12a,12bよりリード線3を介し
て取り出して、雰囲気中の炭酸ガス濃度を電気的に検出
していた。In the above configuration, first, the gas sensing unit 1 is heated to the measurement temperature by the heater 2 and brought into contact with the outside atmosphere. The carbon dioxide gas in the atmosphere reaches the gas sensing portion 1 by diffusion or convection through the through hole of the protector 4b, and causes electromotive force to be generated in the electrodes 12a, 12b according to the carbon dioxide concentration at that time. This electromotive force was taken out from the electrodes 12a and 12b through the lead wire 3 to electrically detect the carbon dioxide concentration in the atmosphere.
発明が解決しようとする課題 しかしながら、上記のような構成では以下のような課
題を有していた。すなわち、測定雰囲気が高湿環境ある
いは結露が生じやすい状態の場合で、炭酸ガスセンサが
非加熱状態のとき、ガス感知部の金属炭酸塩は、個有の
吸湿作用や水溶性によって、それぞれ、水和物や水素化
物を形成したり、結露水に溶けて溶出して電極から脱離
したりして素子が劣化し、再生不能となることがあっ
た。DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention However, the above configuration has the following problems. That is, when the measurement atmosphere is in a high humidity environment or in a state where dew condensation is likely to occur, and when the carbon dioxide sensor is in an unheated state, the metal carbonate of the gas sensing portion is hydrated by its own hygroscopic action and water solubility. In some cases, elements or hydrides are formed, or the elements are dissolved in dew condensation water to be eluted and detached from the electrodes, which deteriorates the element and makes regeneration impossible.
本発明は上記課題を解決するもので、第1の目的は、
ガス感知部が非加熱時、高湿度環境に暴露されても高い
信頼性を有する炭酸ガスセンサを提供するものである。The present invention solves the above problems, and a first object is to
It is intended to provide a carbon dioxide sensor having high reliability even when exposed to a high humidity environment when the gas sensing unit is not heated.
第2の目的はガス感知部が非加熱時、結露環境に暴露
されても高い信頼性を有する炭酸ガスセンサを提供する
ものである。A second object is to provide a carbon dioxide sensor having high reliability even when exposed to a dew condensation environment when the gas sensing part is not heated.
課題を解決するための手段 この目的を達成するために本発明の第1の手段の炭酸
ガスセンサは、1対の電極層を備え金属炭酸塩を構成し
うる金属イオンに対して導電性を有するイオン導電体
と、前記イオン導電体のいずれか一方の電極層の一部あ
るいは全部を覆う形状で炭酸ガスと解離平衡を形成し得
る金属炭酸塩で構成されるガス感知部と、前記ガス感知
部を測定温度に加熱するために設けられた加熱部と、前
記ガス感知部および加熱部を内包し、かつ前記ガス感知
部の加熱時に開き非加熱時に閉じるよう形成した開閉口
を有する筐体部とを設けて構成したものである。Means for Solving the Problems In order to achieve this object, a carbon dioxide gas sensor according to the first means of the present invention is an ion having a pair of electrode layers and having conductivity with respect to a metal ion capable of forming a metal carbonate. A gas sensing unit composed of a conductor and a metal carbonate capable of forming dissociation equilibrium with carbon dioxide in a shape that covers a part or all of one of the electrode layers of the ionic conductor; and the gas sensing unit. A heating unit provided for heating to a measurement temperature; and a casing unit including the gas sensing unit and the heating unit and having an opening / closing port formed to open when the gas sensing unit is heated and to close when the gas sensing unit is not heated. It is provided and configured.
この目的を達成するために第2の手段は、上記手段に
加え筐体部にガス感知部の金属炭酸塩に吸着した水分を
除去する吸湿部を内蔵構成したものである。In order to achieve this object, in addition to the above-mentioned means, the second means has a structure in which a moisture absorption part for removing the water adsorbed by the metal carbonate of the gas sensing part is built in the housing part.
作用 この構成により第1の作用はガス感知部が非加熱状態
の場合、筐体部の開閉口が閉じることによって、雰囲気
の水分がしゃ断され、ガス感知部の金属炭酸塩は吸湿を
まぬがれることができる。一方、加熱状態の場合は、金
属炭酸塩の水和物,水素化物が完全に熱分解される温度
にガス感知部を保持することによって、吸湿,結露によ
る素子劣化はまぬがれる。Action With this configuration, the first action is that when the gas sensing unit is in an unheated state, the moisture in the atmosphere is shut off by closing the opening / closing port of the housing, and the metal carbonate of the gas sensing unit is prevented from absorbing moisture. it can. On the other hand, in the heated state, the element deterioration due to moisture absorption and dew condensation can be avoided by keeping the gas sensing part at a temperature at which the metal carbonate hydrate and hydride are completely thermally decomposed.
この構成による第2の作用は高湿雰囲気下で本センサ
が加熱状態から非加熱状態に転移した際、筐体部の開閉
口が“開”の状態から“閉”状態になったとき、筐体部
内に閉じこめられた水分を吸湿剤に吸着してしまうた
め、たとえ、その後、雰囲気の温度降下しても、筐体部
内は結露状態にはなり難くなる。The second effect of this configuration is that when the sensor changes from a heated state to a non-heated state in a high-humidity atmosphere, when the opening / closing port of the casing changes from the “open” state to the “closed” state, Since the moisture trapped in the body is adsorbed by the hygroscopic agent, even if the temperature of the atmosphere is lowered thereafter, the inside of the housing is unlikely to be in a dew condensation state.
実 施 例 実施例1 以下、本発明の第1の実施例について、第1図および
第2図の図面を参照しながら説明する。Example 1 Hereinafter, a first example of the present invention will be described with reference to the drawings of FIGS. 1 and 2.
第1図は本発明1の一実施例の炭酸ガスセンサの構成
を示すものである。第1図において、ガス感知部1、ヒ
ータ2,リード線3a,3b,5a,5b、台座6は従来例で説明し
た第4図および第5図の構成と同じものであるので、同
一符号をつけて詳細は省略する。FIG. 1 shows the configuration of a carbon dioxide gas sensor according to an embodiment of the present invention 1. In FIG. 1, the gas sensing unit 1, the heater 2, the lead wires 3a, 3b, 5a, 5b, and the pedestal 6 have the same configurations as those shown in FIGS. Attach it and omit the details.
プロテクタ4aは、ガス感知部1、ヒータ2を内包した
有底円筒状の筐体で、円筒部分に開閉口7を形成し、ガ
ス感知部1を外部雰囲気と直接接触させている。開閉口
7を閉じる扉の駆動部は熱的に形状変化する材料の形状
記憶合金で形成され(図示せず)温度が上昇すればスプ
リングが縮み開口する。従って開閉口7は、加熱,冷却
によりその開口面積を変化させ、第2図(a)のごと
く、ガス感知部を測定温度に加熱されたとき全開とな
り、ヒータ2の加熱を中止し冷却されて測定雰囲気温度
になると第2図(b)のごとく全閉する。The protector 4a is a bottomed cylindrical housing that contains the gas sensing unit 1 and the heater 2, and has an opening / closing port 7 formed in the cylindrical portion to directly contact the gas sensing unit 1 with the external atmosphere. The drive part of the door that closes the opening / closing port 7 is formed of a shape memory alloy of a material that changes its shape thermally (not shown), and the spring contracts and opens when the temperature rises. Therefore, the opening / closing port 7 has its opening area changed by heating and cooling, and as shown in FIG. 2 (a), when the gas sensing part is heated to the measurement temperature, it is fully opened, and the heating of the heater 2 is stopped and cooled. When the measured ambient temperature is reached, it is fully closed as shown in FIG.
以上のように構成された炭酸ガスセンサについて、以
下その動作について説明する。The operation of the carbon dioxide sensor configured as described above will be described below.
上記構成において、リード線3a,3bを介してヒータに
所定の電圧を印加し、ガス感知部1を測定温度に加熱す
る。すると、開閉口7は全開し、ガス感知部1は開閉口
7を通じて外部の雰囲気と接触し、炭酸ガスを検知す
る。この場合、測定雰囲気が高湿度環境であっても、測
定温度を、第4図に示した炭酸ナトリウム13の水和物や
水素化物が完全に熱分解される450℃以上に設定してお
けば、素子の劣化がまぬがれる。In the above structure, a predetermined voltage is applied to the heater via the lead wires 3a and 3b to heat the gas sensing unit 1 to the measurement temperature. Then, the opening / closing port 7 is fully opened, and the gas sensing unit 1 comes into contact with the external atmosphere through the opening / closing port 7 to detect carbon dioxide gas. In this case, even if the measurement atmosphere is a high humidity environment, if the measurement temperature is set to 450 ° C. or higher at which the hydrate or hydride of sodium carbonate 13 shown in FIG. 4 is completely pyrolyzed. , Element deterioration is prevented.
一方、ガス感知部が非加熱状態になった場合、開閉口
7は全閉になり、雰囲気と完全にしゃ断され、炭酸ナト
リウム13の吸湿が抑制される。したがって、その水和
物,水素化物の形成が軽減され素子の劣化が免れる。こ
のように、いずれの状態にしろ炭酸ナトリウム13は、雰
囲気の水分に起因した水和物、水素化物への転化を軽減
することができる。On the other hand, when the gas sensing unit is in the non-heated state, the opening / closing port 7 is fully closed, completely shut off from the atmosphere, and the moisture absorption of the sodium carbonate 13 is suppressed. Therefore, the formation of the hydrate or hydride is reduced, and deterioration of the device is avoided. In this way, in any state, sodium carbonate 13 can reduce the conversion into hydrates and hydrides due to moisture in the atmosphere.
以上のように、プロテクタ4aに設けられた開閉口7
が、加熱時に開き、非加熱に閉じるため、ガス感知部
は、非加熱時には常に外部の雰囲気としゃ断されてい
る。したがって、ガス感知部の炭酸ナトリウム13の吸湿
によるガス感知部劣化を防止できる。As described above, the opening / closing port 7 provided in the protector 4a
However, since it opens when heated and closes when not heated, the gas sensing portion is always cut off from the outside atmosphere when not heated. Therefore, it is possible to prevent deterioration of the gas sensing unit due to moisture absorption of sodium carbonate 13 in the gas sensing unit.
実施例2 以下本発明の第2の一実施例について、第3図にもと
づき説明する。Second Embodiment A second embodiment of the present invention will be described below with reference to FIG.
図において、ガス感知部1、ヒータ2、リード線3a,3
b,5a,5b、プロテクタ4a,開閉口7,台座6は第1図の構成
と同じものであるので、同一符号をつけて詳細は省略す
る。板状に形成され台座6の上部に配設固定されたシリ
カゲル8は、ガス感知部が加熱状態から非加熱状態に移
ったとき、プロテクタ4a内に残留した水分を吸着し、プ
ロテクタ4a内を低湿状態に保持するためのもので、吸湿
性を良くするため、多くの透孔が設けてある。In the figure, the gas sensing unit 1, the heater 2, the lead wires 3a, 3
Since b, 5a, 5b, protector 4a, opening / closing port 7, and pedestal 6 are the same as those in FIG. 1, the same reference numerals are given and their details are omitted. The silica gel 8 formed in a plate shape and arranged and fixed on the upper portion of the pedestal 6 adsorbs the moisture remaining in the protector 4a when the gas sensing portion is changed from the heated state to the non-heated state, and the inside of the protector 4a has low humidity. It is for keeping the state, and many through holes are provided to improve hygroscopicity.
以上のように構成された炭酸ガスセンサについてその
動作について説明する。The operation of the carbon dioxide sensor configured as described above will be described.
上記構成において、炭酸ガスセンサの加熱時の炭酸ガ
ス検知動作は、実施例1と同様なのでここでは詳細は省
略する。In the above configuration, the carbon dioxide gas detecting operation during heating of the carbon dioxide gas sensor is the same as that in the first embodiment, and therefore its details are omitted here.
一方、ヒータ2の電源がOFFとなり、ガス感知部が加
熱状態から非加熱状態に移り、それに伴って開閉口7が
閉じられ、プロテクタ4内に雰囲気の水分が一部閉じ込
みられる。こうした状態で雰囲気温度が降下して、プロ
テクタ4a内が結露状態となる場合が考えられる。このよ
うな場合でも、プロテクタ4a内のシリカゲル8が、この
残留水分を吸湿してしまうため、ガス感知部1は結露を
免れる。On the other hand, the power source of the heater 2 is turned off, the gas sensing portion is moved from the heating state to the non-heating state, the opening / closing port 7 is closed accordingly, and the moisture in the atmosphere is partially trapped in the protector 4. In such a state, the ambient temperature may drop and the protector 4a may be dewed. Even in such a case, the silica gel 8 in the protector 4a absorbs the residual moisture, so that the gas sensing unit 1 can avoid dew condensation.
以上のように、プロテクタ4a内にシリカゲル8が設け
られているため、ガス感知部が非加熱状態のときに残留
した水分を吸湿するため、プロテクタ内の露点温度を低
下させることとなり、雰囲気温度が降下しても、結露状
態を生じ難くすることができ、結露による素子の劣化を
防止できる。As described above, since the silica gel 8 is provided in the protector 4a, it absorbs residual moisture when the gas sensing unit is in the non-heated state, which lowers the dew point temperature in the protector and the ambient temperature It is possible to make it difficult for the dew condensation state to occur even when it is lowered, and to prevent deterioration of the element due to dew condensation.
発明の効果 以上の実施例の説明からも明らかなように本発明によ
れば、筐体部に設けられた開閉口が、ガス感知部を測定
時加熱したとき開き、非加熱の場合は閉じるため、ガス
感知部は、非加熱時には常に外部の雰囲気としゃ断され
ている。したがって、ガス感知部の金属炭酸塩が吸湿に
よって生ずる劣化を防止できる。EFFECTS OF THE INVENTION As is clear from the above description of the embodiments, according to the present invention, the opening / closing port provided in the housing opens when the gas sensing unit is heated during measurement, and closes when not heated. The gas sensing unit is always shut off from the outside atmosphere when it is not heated. Therefore, it is possible to prevent the metal carbonate of the gas sensing portion from being deteriorated due to moisture absorption.
また、筐体内に吸湿部を設けたため、ガス感知部が非
加熱状態のとき、残留した水分を吸湿するため、筐体部
内の露点温度を低下させることゝなり、雰囲気温度が降
下しても、結露を生じることなくしたがって、素子の劣
化を防止することができ実用上大きな効果を生じる。Further, since the moisture absorption section is provided in the housing, when the gas sensing section is in the non-heated state, it absorbs residual moisture, which lowers the dew point temperature in the housing, and even if the ambient temperature drops, Therefore, it is possible to prevent the element from deteriorating without causing dew condensation, and to produce a great effect in practical use.
第1図は本発明の一実施例の炭酸ガスセンサの構成を示
す一部破断側面図、第2図a,bは同炭酸ガスの加熱・非
加熱時の開閉口の開閉動作図、第3図は本発明の他の実
施例の炭酸ガスセンサの構成を示す一部破断側面図、第
4図は炭酸ガスセンサのガス感知部の縦断面図、第5図
は従来の炭酸ガスセンサの一部破断側面図である。 1……ガス感知部、2……ヒータ、3a,3b……リード
線、4a……プロテクタ、5a,5b……リード線、6……台
座、7……開閉口、8……シリカゲル、11……NASICON
板、12a,12b……電極、13……炭酸ナトリウム。FIG. 1 is a partially cutaway side view showing the configuration of a carbon dioxide sensor according to an embodiment of the present invention, and FIGS. 2a and 2b are opening / closing operation diagrams of the opening / closing port when the carbon dioxide is heated or not heated, and FIG. FIG. 4 is a partially cutaway side view showing the configuration of a carbon dioxide sensor of another embodiment of the present invention, FIG. 4 is a vertical sectional view of a gas sensing portion of the carbon dioxide gas sensor, and FIG. 5 is a partially cutaway side view of a conventional carbon dioxide sensor. Is. 1 ... Gas sensing part, 2 ... Heater, 3a, 3b ... Lead wire, 4a ... Protector, 5a, 5b ... Lead wire, 6 ... Pedestal, 7 ... Open / close port, 8 ... Silica gel, 11 ...... NASICON
Plates, 12a, 12b ... Electrodes, 13 ... Sodium carbonate.
Claims (2)
成しうる金属イオンに対して導電性を有するイオン伝導
体と、前記イオン伝導体のいずれか一方の電極層の一部
あるいは全部を覆う形状で炭酸ガスと解離平衡を形成し
うる金属炭酸塩で構成されるガス感知部と、前記ガス感
知部を測定温度に加熱する加熱部と、前記ガス感知部お
よび加熱部を内包し、かつ前記ガス感知部の加熱時に開
き非加熱時に、閉じるよう形成した開閉口を有する筐体
部とを備えた炭酸ガスセンサ。1. An ion conductor having a pair of electrode layers at both ends and having conductivity with respect to metal ions capable of forming a metal carbonate, and a part of one of the electrode layers of the ion conductor or A gas sensing part composed of a metal carbonate capable of forming a dissociation equilibrium with carbon dioxide in a shape covering the whole, a heating part heating the gas sensing part to a measurement temperature, and including the gas sensing part and the heating part. And a case part having an opening / closing opening formed so as to close when the gas sensing part is opened and not heated.
した水分を除去する吸湿部を内蔵された特許請求の範囲
第1項記載の炭酸ガスセンサ。2. The carbon dioxide gas sensor according to claim 1, further comprising a moisture absorption unit for removing moisture adsorbed on the metal carbonate of the gas detection unit, in the housing unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63035772A JPH0810213B2 (en) | 1988-02-18 | 1988-02-18 | Carbon dioxide sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63035772A JPH0810213B2 (en) | 1988-02-18 | 1988-02-18 | Carbon dioxide sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01210861A JPH01210861A (en) | 1989-08-24 |
| JPH0810213B2 true JPH0810213B2 (en) | 1996-01-31 |
Family
ID=12451169
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63035772A Expired - Fee Related JPH0810213B2 (en) | 1988-02-18 | 1988-02-18 | Carbon dioxide sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0810213B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180135258A (en) * | 2017-06-12 | 2018-12-20 | 한국세라믹기술원 | Sensor for sensing multi-gas and method for manufacturing the same |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0327347U (en) * | 1989-07-25 | 1991-03-19 | ||
| JPH0327348U (en) * | 1989-07-25 | 1991-03-19 | ||
| JPH0422861A (en) * | 1990-05-17 | 1992-01-27 | Matsushita Seiko Co Ltd | Gaseous carbon dioxide detector |
| JP2600482B2 (en) * | 1990-07-20 | 1997-04-16 | 三菱電機株式会社 | Carbon dioxide sensor |
| JPH04184250A (en) * | 1990-11-19 | 1992-07-01 | Matsushita Seiko Co Ltd | Carbon dioxide sensor |
| JP2667300B2 (en) * | 1991-04-17 | 1997-10-27 | 松下精工株式会社 | Carbon dioxide sensor |
| CN115561398B (en) * | 2022-09-22 | 2023-07-18 | 北京中电伊川测控技术有限公司 | Industrial SO resistance 2 Corrosion nitrogen-oxygen sensor |
-
1988
- 1988-02-18 JP JP63035772A patent/JPH0810213B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180135258A (en) * | 2017-06-12 | 2018-12-20 | 한국세라믹기술원 | Sensor for sensing multi-gas and method for manufacturing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01210861A (en) | 1989-08-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |