JPH0810960B2 - Ultrasonic probe - Google Patents
Ultrasonic probeInfo
- Publication number
- JPH0810960B2 JPH0810960B2 JP7547888A JP7547888A JPH0810960B2 JP H0810960 B2 JPH0810960 B2 JP H0810960B2 JP 7547888 A JP7547888 A JP 7547888A JP 7547888 A JP7547888 A JP 7547888A JP H0810960 B2 JPH0810960 B2 JP H0810960B2
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic probe
- acoustic
- matching layer
- acoustic matching
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Apparatus For Radiation Diagnosis (AREA)
- Transducers For Ultrasonic Waves (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は超音波探触子を利用分野とし、特に音響整合
層による指向特性への影響を防止した超音波探触子に関
する。DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention has a field of application of ultrasonic probes, and particularly relates to an ultrasonic probe in which the influence of an acoustic matching layer on directional characteristics is prevented.
（発明の背景） 超音波探触子は例えば医用、鉱工業用等の診断装置及
び探傷装置に超音波送受波源として有用される。近年で
は、電子走査による例えばセクタ方式やリニア方式等の
診断装置が普及し、医用等で顕著な効果を示している。
そして、このような診断装置には圧電片の複数個を並べ
た所謂配列型の超音波探触子が利用される。(Background of the Invention) An ultrasonic probe is useful as an ultrasonic transmission / reception source in diagnostic devices and flaw detectors for medical and industrial applications, for example. In recent years, for example, a sector type or linear type diagnostic device using electronic scanning has become widespread, and has shown remarkable effects in medical and other fields.
A so-called array type ultrasonic probe in which a plurality of piezoelectric pieces are arranged is used for such a diagnostic device.
（従来技術） 第３図はこの種の超音波探触子を説明する図である。(Prior Art) FIG. 3 is a diagram for explaining an ultrasonic probe of this type.
複数個の圧電片１はそれぞれ例えばジルコン酸チタン
酸鉛（以下、PZTとする）からなり、両主面に厚み振動
を励起する電極２を形成する。一方の主面側はバッキン
グ材３上に固着される。他方の主面側は連続した音響整
合層４を取着して超音波送受波面とする。音響整合層４
は各圧電片１と図示しない被検出体との音響インピーダ
ンスを整合させ、超音波エネルギーの伝搬損失を最小に
する。例えばPZTの音響インピーダンスは約30×106kg/m
2・sec、被検出体を人体とするとその値はは約1.5×106
kg/m2・secで、音響整合層は約４×106kg/m2・secに設
定される。通常では、この値を満足するものとしてエポ
キシ樹脂が選定される。そして、伝搬損失を更に少なく
する場合には、音響整合層４を多層構造として送受波効
率を高める。例えば、第１と第２の音響整合層4a,4bを
積層して音響インピーダンスを被検出体に向って徐々に
小さくする「第３図（ｂ）」。なお、各圧電片１間には
例えばシリコン樹脂等の充填材を埋設して音響的結合を
防止して強度を高める。Each of the plurality of piezoelectric pieces 1 is made of, for example, lead zirconate titanate (hereinafter referred to as PZT), and electrodes 2 for exciting thickness vibration are formed on both main surfaces. One main surface side is fixed on the backing material 3. On the other main surface side, a continuous acoustic matching layer 4 is attached to form an ultrasonic wave transmitting / receiving surface. Acoustic matching layer 4
Matches the acoustic impedance of each piezoelectric piece 1 and the object to be detected (not shown) to minimize the propagation loss of ultrasonic energy. For example, the acoustic impedance of PZT is about 30 × 10 6 kg / m
2・ sec, the value is about 1.5 × 10 6
At kg / m 2 · sec, the acoustic matching layer is set to about 4 × 10 6 kg / m 2 · sec. Usually, the epoxy resin is selected so as to satisfy this value. When the propagation loss is further reduced, the acoustic matching layer 4 has a multi-layered structure to enhance the transmission / reception efficiency. For example, the first and second acoustic matching layers 4a and 4b are laminated to gradually reduce the acoustic impedance toward the object to be detected "FIG. 3 (b)". A filler such as a silicone resin is embedded between the piezoelectric pieces 1 to prevent acoustic coupling and increase the strength.
そして、このようなものでは、例えば電極２に図示し
ないリード線を接続して各圧電片１を遅延動作し、超音
波を扇状に送受波する所謂セクタ駆動して図示しない診
断装置本体により被検出体の疾患部の状況を映像化して
診断する。In such a structure, for example, a lead wire (not shown) is connected to the electrode 2 to delay each piezoelectric piece 1, and a so-called sector drive for transmitting and receiving ultrasonic waves in a fan shape is performed to be detected by a diagnostic device main body (not shown). The situation of the diseased part of the body is visualized and diagnosed.
（従来技術の問題点） しかしながら、上記構成の超音波探触子では、音響整
合層４は各圧電片上に連続して形成されるため、音響整
合層４を媒介して各圧電片１間で音響的な相互干渉を引
き起こす。そして、相互干渉は例えばセクタ駆動したと
きに指向特性を劣化させる。(Problems of Prior Art) However, in the ultrasonic probe having the above-described configuration, since the acoustic matching layer 4 is continuously formed on each piezoelectric piece, the acoustic matching layer 4 is interposed between the piezoelectric pieces 1. Causes acoustic mutual interference. Then, the mutual interference deteriorates the directional characteristic when, for example, sector driving is performed.
第４図はこのことを明確にする本発明者等の実験によ
る指向特性図である。なお、この実験は音響整合層４を
連続する二層構造とした場合「前第３図（ｂ）」であ
る。すなわち、送受波面に対して垂直方向（ｐ）の放射
レベルを0dBとすると、例えば±30度領域では−15dBと
してそれ以降にサイドロブを発生する「第４図曲線
（イ）」。FIG. 4 is a directional characteristic diagram based on an experiment conducted by the present inventors to clarify this fact. This experiment is “Previous FIG. 3 (b)” when the acoustic matching layer 4 has a continuous two-layer structure. That is, assuming that the radiation level in the vertical direction (p) with respect to the wave transmission / reception surface is 0 dB, for example, in the range of ± 30 degrees, the side lobe is generated after -15 dB "curve in FIG. 4".
従って、このような場合は、超音波の波面を不均一と
して点音源からの送受波とならず、超音波の送受波領域
を狭めて広範囲の診断ができなくなる。Therefore, in such a case, the wavefront of the ultrasonic wave is made non-uniform and the transmission / reception from the point sound source is not performed, and the ultrasonic wave transmission / reception area is narrowed, so that a wide range diagnosis cannot be performed.
なお、エポキシ樹脂からなる音響整合層４を独立分離
し、指向特性を維持するようにしたものがある「第３図
（ｃ）」。この場合には、垂直方向（ｐ）に対して±30
度の領域では−2dBとしてサイドロブの発生を抑止する
「第４図曲線（ロ）」。すなわち、連続した音響整合層
の場合に比較してその指向特性を改善する。しかし、こ
のようなものでは、音響整合層４が独立しているため、
特に多層構造としたときは各圧電片１に対する付着強度
の低下や位置づれ等の製造上の問題があった。Note that there is one in which the acoustic matching layer 4 made of an epoxy resin is independently separated so as to maintain the directional characteristics [FIG. 3 (c)]. In this case, ± 30 with respect to the vertical direction (p)
In the degree region, it is set to -2 dB to suppress the occurrence of side lobes "Curve 4 (b)". That is, the directional characteristics are improved as compared with the case of a continuous acoustic matching layer. However, in such a structure, since the acoustic matching layer 4 is independent,
In particular, when a multilayer structure is used, there are manufacturing problems such as a decrease in adhesion strength to each piezoelectric piece 1 and misalignment.
（発明の目的） 本発明は、指向特性を良好として作業性の良好な配列
型の超音波探触子を提供することを目的とする。(Object of the Invention) An object of the present invention is to provide an array type ultrasonic probe having good directional characteristics and good workability.
（解決手段） 本発明は、複数個を配列した圧電片の一方の主面に連
続して形成する音響整合層を0.5〜2.0dB/mm・MHzの音響
材から形成したことを解決手段とする。以下、本発明の
実施例を説明する。(Solution) The present invention is to solve the problem that an acoustic matching layer continuously formed on one main surface of a plurality of arranged piezoelectric pieces is made of an acoustic material of 0.5 to 2.0 dB / mm · MHz. . Examples of the present invention will be described below.
（実施例） 第１図は本発明の一実施例を説明する超音波探触子の図
である。なお、前実施例図と同一部分には同番号を付与
して説明する。(Embodiment) FIG. 1 is a diagram of an ultrasonic probe for explaining an embodiment of the present invention. The same parts as those in the previous embodiment are denoted by the same reference numerals and described.
超音波探触子は、前従来例同様にバッキング材３上に
PZTからなる複数個の圧電片１を配列してなる。圧電片
１の両主面には厚み振動を励起２する電極を形成し、送
受波面側に多層構造とする第１と第２の音響整合層6a,6
bをを例えばコーティングにより取着する。第１音響整
合層6aは各圧電片１上に独立分離し、例えば音響インピ
ーダンスを約７×106kg/m2・secとしたエポキシ樹脂
で、その厚みを1/4波長とする。第２音響整合層6bは第
１音響整合層6a上に連続し、音響インピーダンスを約２
×106kg/m2・secとしたポリウレタン樹脂で、その厚み
を1/4波長とする。そして、このポリウレタン樹脂は、
横方向への音響エネルギーの漏れを防止する。すなわ
ち、ポリウレタン樹脂は高減衰量の音響材として作用
し、各圧電片間の相互干渉を少なくする。なお、各圧電
片１間及び第１音響整合層6a間には前述した充填材５を
埋設する。The ultrasonic probe is placed on the backing material 3 as in the previous conventional example.
A plurality of piezoelectric pieces 1 made of PZT are arranged. Electrodes that excite thickness vibration 2 are formed on both main surfaces of the piezoelectric piece 1, and first and second acoustic matching layers 6a, 6 having a multi-layer structure on the transmitting / receiving surface side.
Attach b by, for example, coating. The first acoustic matching layer 6a is independently separated on each piezoelectric piece 1, and is, for example, an epoxy resin having an acoustic impedance of about 7 × 10 6 kg / m 2 · sec, and its thickness is 1/4 wavelength. The second acoustic matching layer 6b is continuous with the first acoustic matching layer 6a and has an acoustic impedance of about 2
A polyurethane resin with a weight of × 10 6 kg / m 2 · sec and a thickness of 1/4 wavelength. And this polyurethane resin is
Prevents lateral leakage of acoustic energy. That is, the polyurethane resin acts as a high-attenuation acoustic material and reduces mutual interference between the piezoelectric pieces. The above-mentioned filling material 5 is embedded between the piezoelectric pieces 1 and between the first acoustic matching layers 6a.
第２図はこの構成の超音波探触子をセクタ駆動した場
合の指向特性図である。この図から明らかなように、垂
直方向（ｐ）を0dBとすると、±30度領域では約3dBの減
衰に止める。すなわち、音響整合層をエポキシ樹脂とし
て連続した場合「第３図（ｂ）」と分離独立した場合
「第３図（ｃ）」との中間値を得る。そして、±30度以
降でのサイドロブの発生を抑止する。FIG. 2 is a directional characteristic diagram when the ultrasonic probe of this configuration is sector-driven. As is clear from this figure, assuming that the vertical direction (p) is 0 dB, the attenuation is about 3 dB in the ± 30 degree region. That is, an intermediate value is obtained between "Fig. 3 (b)" when the acoustic matching layer is continuously made of epoxy resin and "Fig. 3 (c)" when the acoustic matching layer is separated and independent. Then, the occurrence of side lobe after ± 30 degrees is suppressed.
従って、このようなものでは、超音波の波面を均一に
して点音源からの送受波に近接し、超音波の送受波領域
を大きくして広範囲の診断を行え得る。また、第２音響
整合層6bは連続するため、第１音響整合層6aに対する付
着強度を高めて位置づれ等も起こすことなく作業性を良
好とする。Therefore, in such a case, the ultrasonic wave front can be made uniform, and the ultrasonic wave can be transmitted and received from the point sound source, and the ultrasonic wave transmission and reception area can be increased to perform a wide range diagnosis. Further, since the second acoustic matching layer 6b is continuous, the adhesion strength with respect to the first acoustic matching layer 6a is increased and the workability is improved without causing misalignment.
（他の事項） なお、上記実施例では音響整合層を二層構造として一
層目を分離独立したが、一層目、二層目とも連続した高
減衰量の音響材としても、又高減衰量の音響材材による
連続した一層構造としてもよい。また、各圧電片１及び
第１音響整合層６間には充填材５を埋設したが、単に空
隙としてもよい。また、高減衰量の音響材としてポリウ
レタン樹脂を示したが、減衰量を0.5〜2.0dB/mm・MHz材
料とした音響材であればよいことは勿論である。また、
超音波探触子をセクタ駆動としたが、リニア駆動であっ
ても、更には圧電片を曲面上に配列したものでも適用さ
れる。(Other Matters) Although the acoustic matching layer has a two-layer structure and the first layer is separated and independent in the above-mentioned embodiment, both the first layer and the second layer may be continuous acoustic materials with high attenuation, A continuous single layer structure made of an acoustic material may be used. Although the filler 5 is embedded between each piezoelectric piece 1 and the first acoustic matching layer 6, it may be simply a void. Further, although the polyurethane resin is shown as the acoustic material having a high attenuation amount, it goes without saying that an acoustic material having an attenuation amount of 0.5 to 2.0 dB / mm · MHz may be used. Also,
Although the ultrasonic probe is sector-driven, it may be linear-driven or even piezoelectric elements arranged on a curved surface.
（発明の効果） 本発明は、複数個を配列した圧電片の一方の主面に連
続して形成する音響整合層を0.5〜2.0dB/mm・MHzの音響
材から形成したので、指向特性を良好として作業性の良
好な配列型の超音波探触子を提供できる。(Effect of the invention) Since the present invention forms the acoustic matching layer continuously formed on one main surface of the piezoelectric piece in which a plurality of piezoelectric elements are arranged from the acoustic material of 0.5 to 2.0 dB / mm · MHz, It is possible to provide an array-type ultrasonic probe having good workability.
第１図は本発明の一実施例を説明する超音波探触子の断
面図、第２図は同実施例の効果を説明する指向特性図で
ある。 第３図（ａ）（ｂ）（ｃ）は従来例を説明する超音波探
触子の断面図、第４図は同従来例の指向特性図である。 １……圧電片、２……電極、３……バッキング材、４、
６……音響整合層、５……充填材、．FIG. 1 is a sectional view of an ultrasonic probe for explaining an embodiment of the present invention, and FIG. 2 is a directional characteristic diagram for explaining the effect of the embodiment. 3 (a), (b) and (c) are cross-sectional views of an ultrasonic probe for explaining a conventional example, and FIG. 4 is a directional characteristic diagram of the conventional example. 1 ... Piezoelectric piece, 2 ... Electrode, 3 ... Backing material, 4,
6 ... Acoustic matching layer, 5 ... Filler ,.
Claims (4)
響整合層を連続して取着した超音波探触子において、前
記音響整合層を減衰量0.5〜2.0dB/mm・MHzの音響材から
形成したことを特徴とする超音波探触子。1. An ultrasonic probe in which an acoustic matching layer is continuously attached to one main surface of a piezoelectric piece having a plurality of arranged piezoelectric pieces, and the acoustic matching layer has an attenuation of 0.5 to 2.0 dB / mm · MHz. An ultrasonic probe characterized by being formed from the acoustic material of.
割独立した第１音響整合層と連続した第２音響整合層と
を積層した超音波探触子において、前記第２音響整合層
を減衰量0.5〜2.0dB/mm・MHzの音響材から形成したこと
を特徴とする超音波探触子。2. An ultrasonic probe in which a first acoustic matching layer that is divided and independent and a second acoustic matching layer that is continuous are laminated on one main surface of a piezoelectric piece in which a plurality of piezoelectric elements are arranged, and the second acoustic matching layer is provided. An ultrasonic probe in which a layer is formed of an acoustic material having an attenuation of 0.5 to 2.0 dB / mm · MHz.
である特許請求の範囲第１項記又は第２項記載の超音波
探触子。3. The ultrasonic probe according to claim 1 or 2, wherein the high attenuation acoustic material is a polyurethane resin.
求の範囲第１項又は第２項記載の超音波探触子。4. The ultrasonic probe according to claim 1, wherein the acoustic material with high attenuation is rubber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7547888A JPH0810960B2 (en) | 1988-03-29 | 1988-03-29 | Ultrasonic probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7547888A JPH0810960B2 (en) | 1988-03-29 | 1988-03-29 | Ultrasonic probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01246999A JPH01246999A (en) | 1989-10-02 |
| JPH0810960B2 true JPH0810960B2 (en) | 1996-01-31 |
Family
ID=13577445
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7547888A Expired - Fee Related JPH0810960B2 (en) | 1988-03-29 | 1988-03-29 | Ultrasonic probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0810960B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03296658A (en) * | 1990-04-16 | 1991-12-27 | Tokimec Inc | Ultrasonic probe |
-
1988
- 1988-03-29 JP JP7547888A patent/JPH0810960B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01246999A (en) | 1989-10-02 |
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