JPH0813184B2 - Linear motor - Google Patents
Linear motorInfo
- Publication number
- JPH0813184B2 JPH0813184B2 JP60164630A JP16463085A JPH0813184B2 JP H0813184 B2 JPH0813184 B2 JP H0813184B2 JP 60164630 A JP60164630 A JP 60164630A JP 16463085 A JP16463085 A JP 16463085A JP H0813184 B2 JPH0813184 B2 JP H0813184B2
- Authority
- JP
- Japan
- Prior art keywords
- coil
- flat
- flat coils
- magnetic gap
- linear motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
- Linear Motors (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、一定の磁気空隙を有するように配置した永
久磁石の間を、複数の偏平コイルが移動できるようにし
たリニアモータに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a linear motor in which a plurality of flat coils can be moved between permanent magnets arranged so as to have a constant magnetic gap.
従来の技術 従来、一定の磁気空隙を有するように配置した永久磁
石の間に、2つの偏平コイルを設け、2つの偏平コイル
に順次、電流を印加することにより、偏平コイルを移動
できるようにしたリニアモータがある(特公昭58−4910
0)。この場合、巻枠にコイルを巻いて1つの偏平コイ
ルを形成し、これを2つ重ねたものを可動コイル組立体
として使用している。2. Description of the Related Art Conventionally, two flat coils are provided between permanent magnets arranged so as to have a constant magnetic gap, and the flat coils can be moved by sequentially applying an electric current to the two flat coils. There is a linear motor (Japanese Patent Publication No. 58-4910)
0). In this case, one flat coil is formed by winding a coil around a winding frame, and two flat coils are used as a movable coil assembly.
発明が解決しようとする問題点 従来のリニアモータのように、偏平コイルを2つ重ね
て可動コイルとした場合、一対の永久磁石の間の磁気空
隙を大きくしなければならず、そのため装置が大型化し
てしまう。また一対の永久磁石間の巾が大きくなること
により、磁力の大きな永久磁石を使用しなければ可動コ
イルに大きな移動力を生じさせることができないという
問題があった。特に3つ以上の偏平コイルから可動コイ
ルを形成しようとすると、上記事項はますます問題とな
る。Problems to be Solved by the Invention When two flat coils are overlapped to form a movable coil as in a conventional linear motor, a magnetic gap between a pair of permanent magnets must be increased, which results in a large device. Will turn into. Further, since the width between the pair of permanent magnets becomes large, there is a problem that a large moving force cannot be generated in the moving coil unless a permanent magnet having a large magnetic force is used. In particular, when trying to form a moving coil from three or more flat coils, the above matters become more and more problematic.
そこで本発明は、磁気空隙を小間隔とするとともに、
単位磁石当りのコイル巻数を多くして大きな移動力が得
られるようにすることを目的とする。Therefore, in the present invention, the magnetic gap is made small, and
The object is to increase the number of coil turns per unit magnet so that a large moving force can be obtained.
問題点を解決するための手段 上記目的を達成した本発明は、一定の磁気空隙をあけ
た一対の永久磁石を順次逆極となるようにかつ異極が対
向するようにヨーク上に一列に並べて磁気空隙路を形成
し、磁気空隙路に2つの永久磁石にまたがる大きさの扁
平コイルを複数設け、各扁平コイルに順次電流を印加す
ることにより扁平コイルを磁気空隙路に沿って移動でき
るようにしたリニアモータであって、空洞部を有しかつ
永久磁石の巾の1/3のコイル巾を有する第1、第2、第
3の3つの扁平コイルが、実質的に1つの扁平コイルの
コイル巾だけ磁気空隙路に沿って順次ずらされるととも
に、各扁平コイルが磁気空隙路内では同一平面上となる
ように1枚の合成樹脂板に設けられていることを特徴と
する。Means for Solving the Problems According to the present invention which has achieved the above object, a pair of permanent magnets having a constant magnetic gap are sequentially arranged in a row on a yoke so as to have opposite poles and opposite poles face each other. A magnetic gap path is formed, a plurality of flat coils having a size that spans two permanent magnets are provided in the magnetic gap path, and the flat coil can be moved along the magnetic gap path by sequentially applying current to each flat coil. In the linear motor, the first, second, and third flat coils having a hollow portion and having a coil width of 1/3 of the width of a permanent magnet are substantially one flat coil. It is characterized in that they are sequentially displaced along the magnetic gap path by the width, and that each flat coil is provided on one synthetic resin plate so as to be on the same plane in the magnetic gap path.
本発明のリニアモータを実施例に対応する第1〜3図
により説明する。The linear motor of the present invention will be described with reference to FIGS.
一定の磁気空隙1をあけて一対の永久磁石2a、2bを複
数順次逆極となるように一列に並べて磁気空隙路3を形
成し、この磁気空隙路に可動コイル6を設ける。A magnetic gap path 3 is formed by arranging a pair of permanent magnets 2a and 2b in a line so as to sequentially have opposite poles with a constant magnetic gap 1 provided, and a movable coil 6 is provided in this magnetic gap path.
可動コイル6は、合成樹脂板10の両面に偏平コイルを
設けて互いに連続した一組の偏平コイル6a、6b、6cを複
数組設ける。各組の偏平コイルは、磁気空隙路3に沿っ
て偏平コイルのコイル巾だけ順次ずらして配置する。そ
して、各組の偏平コイル6a、6b、6cは、磁気空隙路3か
ら外部に出た部分は互いに重なるが、磁気空隙路3内で
は同一平面上に配置され、磁気空隙路を形成する一対の
永久磁石間の間隙を小さく形成する。各組の偏平コイル
6a、6b、6cは2つの永久磁石2a、2bにまたがる大きさと
され、各組の偏平コイルは順次電流が印加されるように
なっている。The movable coil 6 is provided with flat coils on both surfaces of a synthetic resin plate 10, and a plurality of sets of continuous flat coils 6a, 6b, 6c are provided. The flat coils of each set are arranged along the magnetic air gap path 3 while being sequentially shifted by the coil width of the flat coils. The flat coils 6a, 6b, and 6c of each set are arranged on the same plane in the magnetic air gap path 3 although the portions of the flattened coils 6a, 6b, and 6c that are outside the magnetic air gap path 3 overlap with each other. Form a small gap between the permanent magnets. Flat coil of each set
6a, 6b and 6c are sized to extend over the two permanent magnets 2a and 2b, and a current is sequentially applied to the flat coils of each set.
作用 上記手段のリニアモータの作用を第8図A、B、Cに
より説明する。Action The action of the linear motor of the above means will be described with reference to FIGS.
初めに偏平コイル6a、6bに互いに逆向きの電流を印加
すると、偏平コイル6a、6bに第8図Aの矢印イの方向に
力が作用して可動コイル6が移動し、偏平コイル6aが2
番目の永久磁石2bの中央まで移動するとその位置を検出
して、偏平コイル6a、6bへの電流印加から、偏平コイル
6b、6cへの電流印加に切変わる。なお、偏平コイル6b、
6cでの電流の向きは6a、6bの場合と同様に逆向きであ
る。First, when the flat coils 6a and 6b are applied with currents in opposite directions to each other, a force acts on the flat coils 6a and 6b in the direction of arrow A in FIG.
When it moves to the center of the second permanent magnet 2b, its position is detected, and the flat coil
Switching to current application to 6b and 6c. The flat coil 6b,
The direction of the current in 6c is the opposite direction as in 6a and 6b.
この切換えにより、偏平コイル6a、6bに第8図Bの矢
印イの方向に力が作用して可動コイル6が第8図Cの状
態まで移動する。この後、さらに可動コイルの偏平コイ
ル6a、6bと偏平コイル6b、6cとに順次切換えて電流を繰
返し印加すれば、可動コイル6を移動できる。By this switching, a force acts on the flat coils 6a and 6b in the direction of arrow A in FIG. 8B, and the movable coil 6 moves to the state of FIG. 8C. After that, the movable coil 6 can be moved by sequentially switching between the flat coils 6a and 6b and the flat coils 6b and 6c of the movable coil and repeatedly applying a current.
実施例 本発明のリニアモータの実施例を第1〜7図により説
明する。Embodiment An embodiment of the linear motor of the present invention will be described with reference to FIGS.
一定の磁気空隙1をあけた一対の永久磁石2a、2bが、
順次逆極となるようにかつ異極が対向するように一列に
配置されて、磁気空隙路3が形成される。各永久磁石2
a、2bは、一定の大きさであって、上ヨーク4とセンタ
ーヨーク5とに取付けられ、磁気空隙路3に可動コイル
6が移動可能に設けられる。A pair of permanent magnets 2a, 2b with a constant magnetic gap 1
The magnetic air gap paths 3 are formed by arranging in a row so that the opposite poles are sequentially opposite and the opposite poles face each other. Each permanent magnet 2
a and 2b have a fixed size, are attached to the upper yoke 4 and the center yoke 5, and the movable coil 6 is movably provided in the magnetic gap path 3.
一つの磁気空隙路3に1つの可動コイル6を設けれ
ば、この可動コイルを移動できるアクチュエータになる
が、本実施例では、可動コイル6を2個所で移動させる
ため、センターヨーク5と下ヨーク7との間にもう一対
の永久磁石2a、2bが上ヨーク側とは逆極となるように順
次配列され、これら一対の永久磁石の間の磁気空隙路3
に可動コイル6が配置される。上ヨーク4とセンターヨ
ーク5と下ヨーク7との端部にサイドヨーク8が設けら
れて、磁気回路が形成される。また上下2つの可動コイ
ル6は、磁気空隙路3での移動が図示を省略した装置に
より案内され、各永久磁石の磁気空隙1から外に突出し
た部分に移動されるべき物体が取付けられる。If one movable coil 6 is provided in one magnetic air gap path 3, the movable coil can be moved. However, in this embodiment, since the movable coil 6 is moved in two places, the center yoke 5 and the lower yoke 5 are moved. Another pair of permanent magnets 2a and 2b are sequentially arranged between the pair of permanent magnets 7 and 7 so as to have opposite polarities to the side of the upper yoke, and a magnetic gap path 3 between these pair of permanent magnets is formed.
The movable coil 6 is arranged in the. Side yokes 8 are provided at the ends of the upper yoke 4, the center yoke 5, and the lower yoke 7 to form a magnetic circuit. The upper and lower movable coils 6 are guided by a device (not shown) for movement in the magnetic air gap path 3, and an object to be moved is attached to a portion of each permanent magnet projecting outward from the magnetic air gap 1.
可動コイル6は、第4図に示すガラスエポキシ等の1
枚の合成樹脂板10に3組の偏平コイル6a、6b、6cを設け
たものである。一組の偏平コイルは、合成樹脂板10の両
面に設けた偏平コイルを互いに連結したものであり、こ
の偏平コイルの磁気空隙路3の方向の大きさは前記永久
磁石2a、2bの2つにまたがる大きさとされる。3組の偏
平コイル6a、6b、6cは、実質的に1つの扁平コイルのコ
イル巾だけ磁気空隙路3に沿って順次ずらして配置され
る。そして3組の偏平コイルは磁気空隙路3から外に突
出した部分では重なるが、磁気空隙路3内では扁平コイ
ルの中央の空洞部にコイル部分が入って同一平面上に位
置するように配置される(第2、5、6、7図)。The moving coil 6 is made of glass epoxy or the like shown in FIG.
A set of three flat coils 6a, 6b, 6c is provided on a single synthetic resin plate 10. One set of flat coils is formed by connecting flat coils provided on both sides of a synthetic resin plate 10 to each other. The size of the flat coil in the direction of the magnetic air gap 3 is the same as that of the permanent magnets 2a and 2b. The size is straddled. The three sets of flat coils 6a, 6b, 6c are sequentially arranged along the magnetic gap path 3 by substantially the coil width of one flat coil. The three sets of flat coils are overlapped with each other in a portion projecting outward from the magnetic air gap passage 3, but in the magnetic air gap passage 3 are arranged so that the coil portion enters the central hollow portion of the flat coil and is located on the same plane. (Figs. 2, 5, 6, 7).
各偏平コイル6a、6b、6cは、磁気空隙1における磁極
極性が順次逆向きになるのに追従して順次逆向きに電流
が流れるように電源側に接続される。本実施例の場合、
偏平コイル6a、6bへの電流印加と、偏平コイル6b、6cへ
の電流印加とが順次切換えられる。なお、各偏平コイル
への電流印加の切換えは、偏平コイル6a、6b、6cが順
次、各永久磁石2a、2bの中央に位置したときを、図示を
省略した公知の磁気検出素子あるいは光学的位置検出素
子を使用して検出し、その検出信号に基ずいてなされ
る。The flat coils 6a, 6b, 6c are connected to the power source side so that currents sequentially flow in the opposite directions following the magnetic pole polarities in the magnetic gap 1 which are sequentially reversed. In the case of this embodiment,
The current application to the flat coils 6a and 6b and the current application to the flat coils 6b and 6c are sequentially switched. It should be noted that the switching of the current application to each flat coil is carried out when the flat coils 6a, 6b, 6c are sequentially located at the center of each permanent magnet 2a, 2b, and a known magnetic detection element or optical position not shown The detection is performed using the detection element, and is performed based on the detection signal.
上記実施例の可動コイル6は、3つの偏平コイルを順
次コイル巾だけずらして合成樹脂板10に設けたが、3つ
に限るものではなく、また合成樹脂板の片面へのみ複数
の偏平コイルを設けるようにしてもよい。In the movable coil 6 of the above embodiment, three flat coils are provided on the synthetic resin plate 10 by sequentially shifting the flat coils by the coil width, but the number is not limited to three, and a plurality of flat coils may be provided on only one side of the synthetic resin plate. It may be provided.
発明の効果 本発明のリニアモータは、可動コイルを形成する複数
組の偏平コイルがコイル巾だけ磁気空隙路に沿ってずら
して配置されるので、単位磁石長さ当りのコイル巻数が
多くなり、可動コイルに大きな移動力を生じさせること
ができる。また可動コイルの各偏平コイルは、磁気空隙
路内では同一平面上に配置されるので、磁気空隙は小さ
いままでよく、可動コイルに効率よく大きな移動力を生
じさせられ、しかも装置が大きくなることもない。EFFECTS OF THE INVENTION In the linear motor of the present invention, since a plurality of sets of flat coils forming the movable coil are arranged along the magnetic gap path by being displaced by the coil width, the number of coil turns per unit magnet length is increased and the movable coil is movable. A large moving force can be generated in the coil. Further, since the flat coils of the moving coil are arranged on the same plane in the magnetic air gap path, the magnetic air gap can be kept small, the moving coil can be efficiently generated with a large moving force, and the device becomes large. Nor.
【図面の簡単な説明】 第1図は本発明のリニアモータの正面の部分断面図、第
2図はリニアモータの可動コイル部分の平面図、第3図
はリニアモータの側面断面図、第4図は可動コイルを示
すもので第2図のA−A線断面図、第5図は同じく第2
図のB−B線断面図、第6図は同じく第2図のC−C線
断面図、第7図は同じく第2図のD−D線断面図、第8
図A、B、Cはリニアモータの作用を示す説明図であ
る。 1;磁気空隙、2a、2b;永久磁石 3;磁気空隙路、6;可動コイル 6a、6b、6c;偏平コイル 10;合成樹脂板BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a partial front sectional view of a linear motor of the present invention, FIG. 2 is a plan view of a movable coil portion of the linear motor, FIG. 3 is a side sectional view of the linear motor, and FIG. The drawing shows a movable coil, which is a sectional view taken along the line AA of FIG. 2, and FIG.
6 is a sectional view taken along the line CC of FIG. 2, FIG. 7 is a sectional view taken along the line DD of FIG. 2, and FIG.
FIGS. A, B, and C are explanatory views showing the operation of the linear motor. 1; Magnetic air gap, 2a, 2b; Permanent magnet 3; Magnetic air gap path, 6; Moving coil 6a, 6b, 6c; Flat coil 10; Synthetic resin plate
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭61−15556(JP,A) 特開 昭59−122359(JP,A) 特開 昭60−11653(JP,A) 実開 昭57−189285(JP,U) 実開 昭59−179481(JP,U) ─────────────────────────────────────────────────── ─── Continuation of the front page (56) Reference JP-A-61-15556 (JP, A) JP-A-59-122359 (JP, A) JP-A-60-11653 (JP, A) Actual development Sho-57- 189285 (JP, U) Actual development Sho 59-179481 (JP, U)
Claims (1)
順次逆極となるようにかつ異極が対向するようにヨーク
上に一列に並べて磁気空隙路を形成し、磁気空隙路に2
つの永久磁石にまたがる大きさの扁平コイルを複数設
け、各扁平コイルに順次電流を印加することにより扁平
コイルを磁気空隙路に沿って移動できるようにしたリニ
アモータであって、空洞部を有しかつ永久磁石の巾の1/
3のコイル巾を有する第1、第2、第3の3つの扁平コ
イルが、実質的に1つの扁平コイルのコイル巾だけ磁気
空隙路に沿って順次ずらされるとともに、各扁平コイル
が磁気空隙路内では同一平面上となるように1枚の合成
樹脂板に設けられていることを特徴とするリニアモー
タ。1. A pair of permanent magnets having a constant magnetic gap are sequentially arranged in a row on a yoke so that opposite poles are opposite to each other and opposite poles face each other to form a magnetic gap path.
A linear motor that has a plurality of flat coils sized to span one permanent magnet and that can move the flat coils along the magnetic gap path by sequentially applying current to each flat coil. And 1 / the width of the permanent magnet
The first, second, and third flat coils having a coil width of 3 are sequentially displaced along the magnetic gap path by substantially the coil width of one flat coil, and each flat coil has a magnetic gap path. A linear motor, which is provided on a single synthetic resin plate so as to be on the same plane inside.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60164630A JPH0813184B2 (en) | 1985-07-25 | 1985-07-25 | Linear motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60164630A JPH0813184B2 (en) | 1985-07-25 | 1985-07-25 | Linear motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6225861A JPS6225861A (en) | 1987-02-03 |
| JPH0813184B2 true JPH0813184B2 (en) | 1996-02-07 |
Family
ID=15796850
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60164630A Expired - Lifetime JPH0813184B2 (en) | 1985-07-25 | 1985-07-25 | Linear motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0813184B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0746895B2 (en) * | 1989-04-28 | 1995-05-17 | トヨタ車体株式会社 | Brushless DC linear motor |
| JPH08214529A (en) * | 1995-10-26 | 1996-08-20 | Hitachi Metals Ltd | Linear motor |
| WO2003071660A2 (en) | 2002-02-19 | 2003-08-28 | Parker-Hannifin Corporation | Linear motor with magnet rail support |
| US11303175B2 (en) | 2016-02-12 | 2022-04-12 | Asml Netherlands B.V. | Multiphase linear motor, multiphase planar motor, stage, lithographic apparatus and device manufacturing method |
| CN108604853B (en) * | 2016-02-12 | 2020-12-11 | Asml荷兰有限公司 | Polyphase linear motor, polyphase planar motor, platform, lithography apparatus and device manufacturing method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59122359A (en) * | 1982-12-27 | 1984-07-14 | Takahashi Yoshiteru | Dc linear motor with dc generator |
| JPS59179481U (en) * | 1983-05-19 | 1984-11-30 | トヨタ車体株式会社 | Moving coil type linear motor |
-
1985
- 1985-07-25 JP JP60164630A patent/JPH0813184B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6225861A (en) | 1987-02-03 |
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Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
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