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JPH0813708B2 - Ceramic member for joining with metal member - Google Patents
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JPH0813708B2 - Ceramic member for joining with metal member - Google Patents

Ceramic member for joining with metal member

Info

Publication number
JPH0813708B2
JPH0813708B2 JP62284998A JP28499887A JPH0813708B2 JP H0813708 B2 JPH0813708 B2 JP H0813708B2 JP 62284998 A JP62284998 A JP 62284998A JP 28499887 A JP28499887 A JP 28499887A JP H0813708 B2 JPH0813708 B2 JP H0813708B2
Authority
JP
Japan
Prior art keywords
diameter
sintering
weight
ceramic
ceramic member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62284998A
Other languages
Japanese (ja)
Other versions
JPH01126280A (en
Inventor
光雄 桑原
輝興 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honda Motor Co Ltd
Original Assignee
Honda Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honda Motor Co Ltd filed Critical Honda Motor Co Ltd
Priority to JP62284998A priority Critical patent/JPH0813708B2/en
Publication of JPH01126280A publication Critical patent/JPH01126280A/en
Publication of JPH0813708B2 publication Critical patent/JPH0813708B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B38/00Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
    • C04B38/0051Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof characterised by the pore size, pore shape or kind of porosity

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Porous Artificial Stone Or Porous Ceramic Products (AREA)
  • Ceramic Products (AREA)

Description

【発明の詳細な説明】 A.発明の目的 (1) 産業上の利用分野 本発明は金属部材と接合されるセラミック部材に関す
る。
DETAILED DESCRIPTION OF THE INVENTION A. Object of the Invention (1) Field of Industrial Application The present invention relates to a ceramic member joined to a metal member.

(2) 従来の技術 従来、この種セラミック部材として、金属部材との接
合面を構成する表層部に、前記接合面に開口する多数の
凹部を形成し、それら凹部に、金属部材の鋳造時その金
属部材の一部を充填するようにしたものが知られている
(特開昭61-259865号公報参照)。
(2) Conventional Technology Conventionally, as this type of ceramic member, a large number of recesses that open to the joint surface are formed in a surface layer portion that constitutes a joint surface with a metal member, and these recesses are used during casting of the metal member. It is known that a metal member is partially filled (see Japanese Patent Laid-Open No. 61-259865).

(3) 発明が解決しようとする問題点 しかしながら前記セラミック部材を用いた金属部材と
の接合体においては、両部材の接合部で熱伝導率、熱膨
脹率、電気伝導度等の物理的性質および引張強さ、衝撃
値、疲れ強さ等の機械的性質が急激に変化するため、前
記接合体が長期に亘って繰返し荷重を受けたり、また厳
しい熱サイクル下で使用されると、接合部が破壊起点と
なって接合体の耐久性が著しく損なわれるという問題が
ある。
(3) Problems to be Solved by the Invention However, in the joined body with the metal member using the ceramic member, physical properties such as thermal conductivity, thermal expansion coefficient, and electrical conductivity, and tensile strength are obtained at the joint portion of both members. Mechanical properties such as strength, impact value and fatigue strength change rapidly, so if the joint is subjected to repeated loading for a long period of time or used under severe thermal cycles, the joint will break. There is a problem that it becomes a starting point and the durability of the bonded body is significantly impaired.

本発明は前記に鑑み、耐久性の優れた前記接合体を得
ることのできる前記セラミック部材を提供することを目
的とする。
In view of the above, it is an object of the present invention to provide the ceramic member that can obtain the joined body having excellent durability.

B.発明の構成 (1) 問題点を解決するための手段 本発明は、金属部材と接合されるセラミック部材にお
いて、前記金属部材の一部を充填される無数の微細な気
孔を備えた三次元網目構造を有し、前記気孔の直径を前
記金属部材との接合面から離れるに従って漸次小さくな
るようにしたことを特徴とする。
B. Configuration of the Invention (1) Means for Solving the Problems The present invention relates to a ceramic member joined to a metal member, and a three-dimensional structure including innumerable fine pores filling a part of the metal member. It is characterized in that it has a mesh structure and the diameter of the pores becomes gradually smaller as it goes away from the joint surface with the metal member.

(2) 作用 セラミック部材において前記のように気孔の直径に勾
配をもたせると、それら気孔に金属部材の一部を充填し
てその金属部材とセラミック部材とを接合したとき、両
部材の接合部では、セラミックと金属との複合化に伴い
セラミック部材の接合面から接合部全体に亘って物理的
性質および機械的性質が或勾配をもって変化することに
なるので、それら性質の急激な変化に伴う耐久性の劣化
を防止することができる。
(2) Action When the diameter of the pores is made to have a gradient in the ceramic member as described above, when these pores are filled with a part of the metal member and the metal member and the ceramic member are joined, As the composite of ceramic and metal changes, the physical and mechanical properties of the ceramic member from the joint surface to the entire joint will change with a certain gradient. Can be prevented from deteriorating.

(3) 実施例 本発明に係る無数の微細な気孔を備えた三次元網目構
造を有するセラミック部材は次の工程を経て製造され
る。即ち、セラミック粉末に、酸により溶出し得る粉末
状気孔形成物質、必要に応じて気孔形成物質の溶出処理
を促進する添加剤および焼結助剤粉末を分散させた混合
粉末を用いて成形体を得る工程、成形体に焼結処理を施
して焼結体を得る工程および焼結体に溶出処理を施して
溶融固化後の前記気孔形成物質を溶出する工程である。
(3) Example A ceramic member having a three-dimensional network structure with innumerable fine pores according to the present invention is manufactured through the following steps. That is, a molded body is formed by using a mixed powder in which a powdery pore-forming substance that can be eluted with an acid, an additive that accelerates the elution treatment of the pore-forming substance, and a sintering aid powder are dispersed in the ceramic powder. These are a step of obtaining, a step of subjecting the molded body to a sintering treatment to obtain a sintered body, and a step of subjecting the sintered body to an elution treatment to dissolve the pore-forming substance after melting and solidification.

セラミック粉末としては、直径10μm以下のSi3N4、Si
C、ZrO2、Al2O3、サイアロン等の単独粉末およびこれらの
混合粉末が該当する。
As the ceramic powder, Si 3 N 4 , Si having a diameter of 10 μm or less can be used.
Single powders of C, ZrO 2 , Al 2 O 3 , sialon, etc., and mixed powders thereof are applicable.

焼結助剤粉末は、セラミック粉末の焼結性を向上させ
るために必要に応じて用いられるが、この種粉末として
は、直径0.1〜5μmのAl2O3、Y2O3、MgO、SiO2、CeO2等の
単独粉末およびこれらの混合粉末が該当する。
The sintering aid powder is used as necessary to improve the sinterability of the ceramic powder. As the seed powder, Al 2 O 3 , Y 2 O 3 , MgO, SiO having a diameter of 0.1 to 5 μm are used. 2 , single powders such as CeO 2 and mixed powders thereof are applicable.

酸により溶出し得る粉末状気孔形成物質は、焼結体に
積極的に微細な気孔を形成して所定の気孔率を持つ三次
元網目構造のセラミック部材を得るために用いられ、こ
の種物質としては以下のものが該当する。
A powdery pore-forming substance that can be eluted by an acid is used to positively form fine pores in a sintered body to obtain a ceramic member having a three-dimensional network structure with a predetermined porosity. The following applies.

SiO2 24〜33重量% B2O3 30〜50重量% Al2O3 2〜15重量% MgO 2〜15重量% K2O 20重量%以下 Na2O 10〜40重量% の各粉末を混合し、その混合粉末に、必要に応じ BaO 3重量%以下 MoO2 3重量%以下 CeO3 3重量%以下 から選択される少なくとも一種の粉末を添加して、溶
融、粉砕の各工程を経て得られた直径0.1〜100μmのガ
ラス質粉末である。
SiO 2 24 to 33 wt% B 2 O 3 30 to 50 wt% Al 2 O 3 2 to 15 wt% MgO 2 to 15 wt% K 2 O 20 wt% or less Na 2 O 10 to 40 wt% powders After mixing, at least one powder selected from BaO 3% by weight or less, MoO 2 3% by weight or less and CeO 3 3% by weight or less is added to the mixed powder, and the mixture is obtained through melting and crushing steps. It is a vitreous powder having a diameter of 0.1 to 100 μm.

前記のように各粉末の配合量を限定する理由は、前記
配合量を逸脱すると、気孔形成物質に結晶が析出して不
均一組織となり、酸による溶出が不可能になるからであ
る。また本発明では、後述するように焼結処理における
気孔形成物質の溶融、流動による気孔の直径変化を狙っ
ているので、焼結処理温度、例えば800〜1400℃におい
て、気孔形成物質より生じた流動体が所定の粘度、例え
ば0.1〜20cPをもつ必要があり、そのためにも各粉末の
配合量は前記のように限定される。
The reason for limiting the blending amount of each powder as described above is that if the blending amount is deviated from the above, the crystals are deposited on the pore-forming substance to form a non-uniform structure, and elution with acid becomes impossible. Further, in the present invention, as will be described later, melting of the pore-forming material in the sintering process, since it is aimed at the change in the diameter of the pores due to the flow, at the sintering treatment temperature, for example, 800 ~ 1400 ℃, the flow generated from the pore-forming material It is necessary for the body to have a predetermined viscosity, for example 0.1 to 20 cP, and for this reason the compounding amount of each powder is limited as described above.

前記気孔形成物質、したがってその物質の溶融固化に
より生じた気孔形成成分の溶出処理を促進する添加剤と
しては、ホウ素系化合物およびリン酸系化合物から選択
される少なくとも一種が用いられる。この場合、ホウ素
系化合物にはホウ酸ナトリウム、ホウ酸アンモニウム等
のホウ酸塩、無水ホウ酸(B2O3)等が包含され、またリ
ン酸系化合物にはヘキサメタリン酸ナトリウム、酸性メ
タリン酸ナトリウム等のメタリン酸塩、オルトリン酸、
無水リン酸(P2O5)等が包含される。
At least one selected from a boron compound and a phosphoric acid compound is used as an additive that accelerates the elution treatment of the pore-forming substance, and thus the pore-forming component produced by melting and solidifying the substance. In this case, the boron-based compound includes sodium borate, borate such as ammonium borate, boric anhydride (B 2 O 3 ), and the like, and the phosphoric acid-based compound includes sodium hexametaphosphate and sodium acid metaphosphate. Metaphosphate, orthophosphoric acid, etc.
Phosphoric anhydride (P 2 O 5 ) and the like are included.

この添加剤は、セラミック粉末の焼結プロセスにはほ
とんど関与することはなく、したがって焼結体中に存在
して気孔形成成分の酸による溶出処理を促進する機能を
果し、その後焼結体中より気孔形成成分と共に溶出され
る。
This additive has almost no involvement in the sintering process of the ceramic powder, and therefore, it exists in the sintered body and functions to accelerate the elution treatment of the pore-forming component with acid, and thereafter, to the sintered body. It is more eluted with the pore-forming component.

なお、セラミック部材の強度向上を狙ってアルミナ繊
維、炭化ケイ素繊維(ウイスカを含む)、窒化ケイ素繊
維、炭素繊維等を配合することもある。
Alumina fibers, silicon carbide fibers (including whiskers), silicon nitride fibers, carbon fibers, etc. may be blended in order to improve the strength of the ceramic member.

前記セラミック粉末、焼結助剤粉末、気孔形成物質お
よび添加剤の配合量は、 セラミック粉末 20〜90重量% 焼結助剤粉末 15重量%以下 気孔形成物質 5〜50重量% 添加剤 40重量%以下 である。
The compounding amount of the ceramic powder, the sintering aid powder, the pore-forming substance and the additive is as follows: Ceramic powder 20 to 90% by weight Sintering aid powder 15% by weight or less Pore forming substance 5 to 50% by weight Additive 40% by weight It is as follows.

焼結助剤粉末の配合量を前記のように限定する理由
は、それを15重量%を上回って配合しても、セラミック
粉末の焼結性にはそれ程変化が現れないからである。
The reason for limiting the blending amount of the sintering aid powder as described above is that even if the blending amount exceeds 15% by weight, the sinterability of the ceramic powder does not change so much.

また気孔形成物質の配合量は、セラミック部材の、目
標とする気孔率によって異なるもので、前記配合量にて
気孔率を20〜70%に調節することが可能である。
Further, the compounding amount of the pore forming substance varies depending on the target porosity of the ceramic member, and the porosity can be adjusted to 20 to 70% by the compounding amount.

さらに添加剤は、セラミック部材とアルミニウム合
金、鋼等よりなる金属部材とを接合する際に、相互の拡
散性を良好にすると共にセラミック部材に対する金属の
接触角を小さくしてその濡れ性を大幅に改善し接合強度
を高める効果を有するので、この効果を狙う場合には添
加剤をやゝ過剰に配合して前記溶出処理後もセラミック
部材の気孔内面に薄膜状に残留させる。このときの添加
剤の配合量は5〜30重量%が適当である。
Further, the additive improves the mutual diffusibility when joining the ceramic member and the metal member made of aluminum alloy, steel, etc., and also reduces the contact angle of the metal with respect to the ceramic member to significantly improve its wettability. Since it has the effect of improving and increasing the bonding strength, if this effect is aimed at, an additive is added in a slight excess so that it remains as a thin film on the inner surface of the pores of the ceramic member even after the elution treatment. At this time, the blending amount of the additive is suitably 5 to 30% by weight.

前記セラミック粉末、焼結助剤粉末、気孔形成物質お
よび添加剤よりなる混合粉末を用いて成形体を得る場合
は、スリップキャスティング法、加圧成形法、射出成形
法等の各種成形法が用いられる。この場合、成形圧力は
50〜150MPaが適当である。
When a molded product is obtained by using a mixed powder composed of the ceramic powder, the sintering aid powder, the pore-forming substance and the additive, various molding methods such as a slip casting method, a pressure molding method and an injection molding method are used. . In this case, the molding pressure is
50 to 150 MPa is suitable.

前記成形体の焼結に当っては、その成形体を1500〜22
00℃に0.5〜2時間保持して1回の焼結処理でセラミッ
ク成分の焼結を完了する1段焼結法か、または成形体を
800〜1400℃に0.5〜2時間保持する1次焼結処理および
1500〜2200℃に0.5〜2時間保持する2次焼結処理を経
てセラミック成分の焼結を完了する2段焼結法が採用さ
れる。1段焼結法を採用した場合は、その焼結処理後前
記溶出処理が行われるのは当然であるが、2段焼結法を
採用した場合には1次焼結処理後または2次焼結処理後
前記溶出処理が行われる。
When sintering the molded body, the molded body is 1500 to 22
A one-step sintering method that completes the sintering of the ceramic component by holding it at 00 ° C for 0.5 to 2 hours in one sintering process, or
Primary sintering process of holding at 800-1400 ℃ for 0.5-2 hours and
A two-stage sintering method is adopted in which the sintering of the ceramic components is completed through a secondary sintering treatment in which the temperature is maintained at 1500 to 2200 ° C for 0.5 to 2 hours. When the one-stage sintering method is adopted, the elution treatment is naturally performed after the sintering treatment, but when the two-stage sintering method is adopted, the primary sintering treatment or the secondary sintering treatment is performed. After the binding treatment, the elution treatment is performed.

前記1次焼結処理後の焼結体は適当な硬度を有するの
で、その焼結体にレース加工等の機械加工を施すことが
可能である。この場合、機械加工により生じた欠陥を、
次工程の溶出処理が持つ化学研摩的作用により除去する
ことができる。
Since the sintered body after the primary sintering process has an appropriate hardness, it is possible to subject the sintered body to mechanical processing such as lace processing. In this case, the defects caused by machining are
It can be removed by the chemical polishing action of the elution treatment in the next step.

前記溶出処理に用いられる酸は、HCl、NHO3、HF等の単
一酸またはこれらの混酸が主として用いられ、場合によ
っては前記酸にCH3COOH、HCOOH等のカルボン酸といった
有機酸が少量添加される。溶出処理は焼結体を酸溶液中
に所定時間浸漬することにより行われる。その際、酸溶
液を流通させながらそれに8〜24MHzの超音波振動を付
与すると、酸溶液がセラミック成分、気孔形成成分およ
び焼結助剤成分に行渡り、また前記添加剤の溶出処理促
進作用もあって短時間のうちに気孔形成成分ならびにセ
ラミック成分および焼結助剤成分に含まれた不純物の溶
出処理を完了することができる。
The acid used in the elution treatment is mainly a single acid such as HCl, NHO 3 or HF, or a mixed acid thereof, and in some cases, a small amount of an organic acid such as carboxylic acid such as CH 3 COOH or HCOOH is added to the acid. To be done. The elution treatment is performed by immersing the sintered body in an acid solution for a predetermined time. At that time, when ultrasonic vibration of 8 to 24 MHz is applied to the acid solution while flowing, the acid solution spreads to the ceramic component, the pore-forming component and the sintering aid component, and also has the action of promoting the elution treatment of the additive. The elution treatment of impurities contained in the pore-forming component and the ceramic component and the sintering aid component can be completed within a short time.

前記焼結体に対する溶出処理によって、無数の微細な
気孔を備えた三次元網目構造を有するセラミック部材が
得られる。
By the elution treatment on the sintered body, a ceramic member having a three-dimensional network structure having innumerable fine pores can be obtained.

このセラミック部材の気孔の直径は、焼結処理時焼結
炉内で下向きとなる端面側で最も大きく、その端面から
離れるに従って漸次小さくなるようになっている。
The diameter of the pores of this ceramic member is the largest on the end face side facing downward in the sintering furnace during the sintering process, and gradually decreases as the distance from the end face increases.

これは次の理由によるものと思われる。 This is probably due to the following reasons.

即ち、焼結処理において、成形体、したがってガラス
質の気孔形成物質の温度が略1000〜1200℃に達すると、
その物質が溶融して所定の粘度を持つ流動体となる。そ
して流動体の重力による下降、それに伴うセラミック成
分の上昇による組織の再配列、流動体の下降によりセラ
ミック成分間に生じた微細間隙の毛管作用による流動体
の再上昇等が生じ、これにより焼結体内において気孔形
成成分の濃度が前記端面側で高く、その端面から離れる
に従って漸次低くなる。
That is, in the sintering process, when the temperature of the molded body, and hence the glassy pore-forming substance, reaches approximately 1000 to 1200 ° C.,
The substance melts into a fluid with a predetermined viscosity. Then, the fluid descends due to gravity, the rearrangement of the tissue due to the rise of the ceramic component accompanying it, and the re-elevation of the fluid due to the capillary action of the fine gaps generated between the ceramic components due to the descending of the fluid, which causes sintering. The concentration of the pore-forming component in the body is high on the end face side, and gradually decreases as the distance from the end face increases.

このような状態の焼結体に前記溶出処理を施せば、前
記のように直径に勾配を付された気孔を形成することが
できる。
By subjecting the sintered body in such a state to the elution treatment, it is possible to form pores having a gradient in diameter as described above.

第1図(a)は本発明に係るセラミック部材1を示
し、そのセラミック部材1は窒化ケイ素より構成され、
縦10mm、横10mm、長さ25mmの角柱状をなす。第1図
(b)は前記セラミック部材1の一端面1aからの長さ方
向の距離と気孔の最大直径および気孔率との関係を示
す。線x1が気孔の最大直径に、また線x2が気孔率にそれ
ぞれ該当する。
FIG. 1 (a) shows a ceramic member 1 according to the present invention, which ceramic member 1 is made of silicon nitride,
It has a prismatic shape with a length of 10 mm, a width of 10 mm, and a length of 25 mm. FIG. 1 (b) shows the relationship between the lengthwise distance from the one end face 1a of the ceramic member 1, the maximum diameter of the pores, and the porosity. The line x 1 corresponds to the maximum pore diameter, and the line x 2 corresponds to the porosity.

第1図(a),(b)より、セラミック部材1の他端
面1b側で気孔の直径および気孔率が最も大きく、その他
端面1bから離れるに従って気孔の直径が漸次小さくなる
ことが判る。
From FIGS. 1 (a) and 1 (b), it can be seen that the diameter and porosity of the pores are the largest on the side of the other end surface 1b of the ceramic member 1, and the diameter of the pores gradually decreases with distance from the other end surface 1b.

第2図は前記セラミック部材における気孔率と曲げ強
さとの関係を示す。
FIG. 2 shows the relationship between the porosity and bending strength of the ceramic member.

前記手法により得られたセラミック部材は、金属部材
との接合に当り、その気孔の直径が大きい側に存する端
面(第1図(a)では他端面1b)が接合面となる。
When the ceramic member obtained by the above method is joined to a metal member, the end face (the other end face 1b in FIG. 1 (a)) on the side where the pore diameter is large serves as the joint face.

前記流動体は、セラミック部材の強度低下の原因とな
る不純物を巻込んで下降するので、不純物を除去する機
能も有する。
The fluid also has a function of removing impurities because it entrains impurities that cause a decrease in strength of the ceramic member and descends.

なお、セラミック部材に対する金属部材の濡れ性の向
上を狙って、セラミック部材の気孔内面に、Ti、Cu、A
g、B等の薄膜を化学蒸着(CVD)等により形成すること
は有効である。
In addition, in order to improve the wettability of the metal member with respect to the ceramic member, Ti, Cu, A
It is effective to form thin films such as g and B by chemical vapor deposition (CVD) or the like.

〔実施例I〕[Example I]

第3図は内燃機関用シリンダヘッド2を示し、そのシ
リンダヘッド2は金属部材としてのシリンダヘッド本体
3と、そのシリンダヘッド本体3に接合されたセラミッ
ク部材としての吸、排気用バルブシート41,42とを備え
ている。
Figure 3 shows the internal combustion engine cylinder head 2, a cylinder head main body 3 as the cylinder head 2 is a metal member, absorption of the ceramic member joined to the cylinder head body 3, the exhaust valve seat 4 1, It has 4 2 and.

両バルブシート41,42の材質、製法は同じであり、そ
れらは各部の寸法を若干異にするだけなので、吸気用バ
ルブシート41の製造について説明する。
Both the valve seat 4 1, 4 2 of material, manufacturing method are the same, they since only different from slightly the size of each part, illustrates the preparation of the intake valve seat 4 1.

気孔形成物質として、 SiO2 28.0重量% B2O3 37.6重量% Al2O3 4.6重量% MgO 3.2重量% K2O 6.5重量% Na2O 20.1重量% を用いてガラス質粉末を得る。As a pore-forming substance, SiO 2 28.0 wt% B 2 O 3 37.6 wt% Al 2 O 3 4.6 wt% MgO 3.2 wt% K 2 O 6.5 wt% Na 2 O 2 0.1 wt% is used to obtain a glassy powder.

窒化ケイ素粉末 57.5重量% 最大直径10μm、平均直径0.7μm 気孔形成物質 40重量% 直径44μm以下のもの30重量%および直径44〜150μ
mのもの10重量% 焼結助剤粉末 2.5重量% 最大直径1μm、平均直径0.2μmのAl2O31.0重量%
および最大直径2μm、平均直径0.4μmのY2O31.5重量
% に、有機系ワックス、分散剤等を加え十分に混合して混
合粉末を得、この混合粉末を用いて金型による加圧成形
法を適用し、成形圧力100MPaにて第4図に示す外径a=
30mm、内径b=19mm、長さc=5mmの環状成形体5を得
る。
Silicon nitride powder 57.5% by weight Maximum diameter 10 μm, average diameter 0.7 μm Pore forming substance 40% by weight Diameter 44 μm or less 30% by weight and diameter 44 to 150 μm
10% by weight of sintering aid powder 2.5% by weight Al 2 O 3 with a maximum diameter of 1 μm and an average diameter of 0.2 μm 1.0% by weight
And 1.5% by weight of Y 2 O 3 having a maximum diameter of 2 μm and an average diameter of 0.4 μm, an organic wax, a dispersant, etc. are added and mixed sufficiently to obtain a mixed powder, and the mixed powder is used for pressure molding by a die. Method, and the molding pressure is 100MPa, the outer diameter a =
An annular molded body 5 of 30 mm, inner diameter b = 19 mm, and length c = 5 mm is obtained.

成形体5を乾燥した後、その一方の環状端面5bを下方
に向けて焼結炉の基台上に載置し、N2流通量30ml/min、
650℃、1時間の条件の下で成形体5に有機成分除去処
理を施す。
After the molded body 5 is dried, it is placed on the base of the sintering furnace with one annular end surface 5b facing downward, and the N 2 flow rate is 30 ml / min.
The molded body 5 is subjected to an organic component removal treatment under the condition of 650 ° C. for 1 hour.

引続き、N2流通量30ml/min、1200℃、2時間の条件の
下で成形体5に1次焼結処理を施して焼結体を得る。こ
の焼結体の線収縮率は3%である。
Subsequently, the molded body 5 is subjected to primary sintering treatment under the conditions of N 2 flow rate of 30 ml / min, 1200 ° C. for 2 hours to obtain a sintered body. The linear shrinkage of this sintered body is 3%.

焼結体を、4規定HNO3および0.2%HFよりなる酸溶液
中に浸漬し、その酸溶液に16MHzの超音波振動を付与し
ながら15分間保持して気孔形成成分、不純物および過剰
の焼結助剤成分を溶出して三次元網目構造を有するバル
ブシート41を得る。
The sintered body is dipped in an acid solution consisting of 4N HNO 3 and 0.2% HF and kept for 15 minutes while applying 16 MHz ultrasonic vibration to the acid solution to sinter the pore-forming components, impurities and excess sintering. obtaining a valve seat 4 1 having a three-dimensional network structure by eluting the auxiliary component.

前記バルブシート41に十分洗浄処理を施した後乾燥
し、次いで前記バルブシート41に1700℃、1時間の条件
下で2次焼結処理を施して高度に焼結が進行したバルブ
シート41を得る。これを第1のバルブシートとする。
The valve seat 4 1 is thoroughly washed and then dried, and then the valve seat 4 1 is subjected to a secondary sintering treatment at 1700 ° C. for 1 hour to highly sinter the valve seat 4 1. Get one . This is the first valve seat.

前記同様の1次焼結処理後の焼結体に前記同様の2次
焼結処理を施し、次いで2次焼結処理後の焼結体に前記
同様の酸溶出処理を施して第2のバルブシートを得る。
The same secondary sintering treatment as described above is performed on the sintered body after the primary sintering treatment similar to the above, and the acid elution treatment similar to the above is performed on the sintered body after the secondary sintering treatment to generate the second valve. Get the sheet.

前記第1,第2のバルブシートの二次元的な気孔率およ
び気孔の最大直径は表Iの通りである。気孔直径の測定
は光学顕微鏡、走査型電子顕微鏡(SEM)を用いて行わ
れる。表Iにおいて、4a,4bは両バルブシートの環状端
面で、4aは前記成形体5の一方の環状端面5aに、4bは他
方の環状端面5bにそれぞれ対応する。したがって両バル
ブシートの一方の環状端面4b側において気孔の直径が最
大となる。
The two-dimensional porosity and maximum pore diameter of the first and second valve seats are shown in Table I. The pore diameter is measured by using an optical microscope and a scanning electron microscope (SEM). In Table I, 4a and 4b are annular end faces of both valve seats, 4a corresponds to one annular end face 5a of the molded body 5, and 4b corresponds to the other annular end face 5b. Therefore, the diameter of the pore becomes maximum on the side of one annular end surface 4b of both valve seats.

なお、第1のバルブシートにおいて、酸溶出処理後の
一方の環状端面4aにおける気孔の最大直径は104μm、
また他方の環状端面4bにおける気孔の最大直径は140μ
mである。
In the first valve seat, the maximum diameter of the pores on the one annular end surface 4a after the acid elution treatment is 104 μm,
The maximum diameter of the pores on the other annular end surface 4b is 140μ.
m.

両バルブシートを切断してその切断面における気孔の
直径変化を調べたところ、一方の環状端面4bから他方の
環状端面4aに至るに従ってその直径が漸次小さくなって
いることが確認されている。
When both valve seats were cut and the change in the diameter of the pores in the cut surface was examined, it was confirmed that the diameter gradually decreased from one annular end surface 4b to the other annular end surface 4a.

次いで、両バルブシート41および排気用バルブシート
42に所定の機械加工を施した後それらを800℃に予熱
し、また吸、排気側においてそれらの環状端面4bを吸、
排気ポート6,7側にそれぞれ向けてそれらバルブシート4
1,42を鋳型に設置し、アルミニウム合金(JIS AC4C)の
溶湯温度700℃、溶湯の充填圧200kg/cm2の条件の下で前
記シリンダヘッド2を鋳造したところ、各バルブシート
41,42の気孔にアルミニウム合金が十分に充填されてい
ることが確認されている。
Then, both the valve seat 4 1 and the exhaust valve seat
4 2 those subjected to predetermined machining preheated to 800 ° C., also absorption, their annular end face 4b in the exhaust side intake,
Those valve seats 4 facing the exhaust ports 6 and 7 respectively
1, 4 2 was placed in a mold, molten metal temperature 700 ° C. of the aluminum alloy (JIS AC4C), were cast the cylinder head 2 under the conditions of filling pressure 200 kg / cm 2 for the molten metal, each valve seat
4 1, 4 2 of the aluminum alloy into the pores that have been confirmed to be sufficiently filled.

前記のように、両バルブシート41,42における気孔の
直径に勾配をもたせると、シリンダヘッド本体3と各バ
ルブシート41,42との接合部、この実施例ではバルブシ
ート41,42全体において、セラミックスとアルミニウム
合金との複合化に伴い環状端面4bから環状端面4aに向け
て物理的性質および機械的性質が或勾配をもって変化す
るので、それらの性質の急激な変化に伴う耐久性の劣化
を防止することができる。
As described above, Allowing a gradient in pore diameter in both the valve seat 4 1, 4 2, the joint between the cylinder head main body 3 and each valve seat 4 1, 4 2, valve seat 4 1 In this example, in 4 2 whole, since physical and mechanical properties change with a certain gradient toward the annular end surface 4b due to complexation with the ceramic and the aluminum alloy into the annular end face 4a, durability due to abrupt changes in their properties It is possible to prevent deterioration of sex.

〔実施例II〕Example II

第5図は内燃機関用ロッカアーム8を示し、そのロッ
カアーム8は金属部材としてのロッカアーム本体9と、
そのロッカアーム本体9に接合されたセラミック部材と
してのスリッパ面構成体10とよりなる。
FIG. 5 shows a rocker arm 8 for an internal combustion engine. The rocker arm 8 includes a rocker arm body 9 as a metal member,
The rocker arm body 9 is joined to the slipper surface forming body 10 as a ceramic member.

スリッパ面構成体10の製造は以下の通りである。 The manufacture of the slipper surface structure 10 is as follows.

気孔形成物質として、 SiO2 27.8重量% B2O3 37.6重量% Al2O2 5.2重量% MgO 8.0重量% K2O 4.8重量% Na2O 14.8重量% BaO 1.0重量% その他 0.8重量% を用いて、ガラス質粉末を得る。このガラス質粉末の10
00〜1200℃における粘度は0.6〜2.4cPで、比重は約4.5
である。
SiO 2 27.8% by weight B 2 O 3 37.6% by weight Al 2 O 2 5.2% by weight MgO 8.0% by weight K 2 O 4.8% by weight Na 2 O 14.8% by weight BaO 1.0% by weight Other 0.8% by weight was used as a pore forming substance. To obtain a glassy powder. 10 of this vitreous powder
Viscosity at 00-1200 ℃ is 0.6-2.4cP, specific gravity is about 4.5
Is.

窒化ケイ素粉末 64重量% 最大直径5μm、平均直径0.4μm 気孔形成物質 30重量% 最大直径20μm、平均直径2〜3μm 焼結助剤粉末 6重量% 最大直径1μm、平均直径0.4μmのAl2O32重量%お
よび最大直径0.1〜2.0μm、平均直径0.5μmのY2O3
重量% に有機系ワックス、分散剤等を加え十分に混合して混合
粉末を得、この混合粉末を用いて金型による加圧成形法
を適用し、成形圧力100MPaにて第6図に示すスリッパ面
11aを有する本体11およびその本体11と一体の接合凸部1
2を備えた成形体13を得る。
Silicon nitride powder 64% by weight Maximum diameter 5 μm, average diameter 0.4 μm Pore forming substance 30% by weight Maximum diameter 20 μm, average diameter 2-3 μm Sintering aid powder 6% by weight Maximum diameter 1 μm, average diameter 0.4 μm Al 2 O 3 2% by weight and Y 2 O 3 4 having a maximum diameter of 0.1 to 2.0 μm and an average diameter of 0.5 μm
An organic wax, a dispersant, etc. are added to the weight% and sufficiently mixed to obtain a mixed powder, and a pressure molding method using a mold is applied using this mixed powder, and the slipper shown in FIG. 6 is applied at a molding pressure of 100 MPa. surface
A main body 11 having 11a and a joining convex portion 1 integrated with the main body 11
A molded body 13 having 2 is obtained.

成形体13を乾燥した後、650℃、2時間の条件の下で
成形体13に有機成分除去処理を施す。
After the molded body 13 is dried, the molded body 13 is subjected to an organic component removal treatment under the conditions of 650 ° C. and 2 hours.

成形体13を、その接合凸部12を下方に向けて焼結炉の
基台上に載置し、N2流通量30ml/min、0.4Torr、650℃ま
での昇温速度10℃/min、1200℃までの昇温速度15℃/mi
n、1200℃にて2時間保持の条件の下で成形体13に1次
焼結処理を施して焼結体を得る。
The molded body 13 is placed on the base of the sintering furnace with the joint protrusion 12 facing downward, and the N 2 flow rate is 30 ml / min, 0.4 Torr, and the heating rate up to 650 ° C. is 10 ° C./min. Temperature rising rate up to 1200 ℃ 15 ℃ / mi
The molded body 13 is subjected to a primary sintering treatment under the condition of being kept at n and 1200 ° C. for 2 hours to obtain a sintered body.

焼結体を、25%HNO3および0.1%HFよりなる酸溶液中
に浸漬し、その酸溶液に12MHzの超音波振動を付与しな
がら20分間保持して気孔形成成分、不純物および過剰の
焼結助剤成分を溶出して三次元網目構造を有するスリッ
パ面構成体10を得る。
The sintered body is dipped in an acid solution consisting of 25% HNO 3 and 0.1% HF and kept for 20 minutes while applying 12 MHz ultrasonic vibration to the acid solution to sinter the pore-forming components, impurities and excess sintering. The auxiliary component is eluted to obtain a slipper surface constituting body 10 having a three-dimensional network structure.

前記スリッパ面構成体10に十分洗浄処理を施した後乾
燥し、次いで前記スリッパ面構成体10にN2雰囲気下、50
0bar、1700℃、2時間の条件の下で2次焼結処理を施し
て高度に焼結が進行したスリッパ面構成体10を得る。
The slipper surface constituting body 10 is sufficiently washed and then dried, and then the slipper surface constituting body 10 is subjected to a N 2 atmosphere of 50.
Secondary sintering treatment is performed under the conditions of 0 bar, 1700 ° C. and 2 hours to obtain the slipper surface structure body 10 in which sintering has advanced to a high degree.

前記スリッパ面構成体10を10%HNO3よりなる酸溶液中
に浸漬して2次焼結処理による目詰りを除去する。
The slipper surface structure 10 is immersed in an acid solution containing 10% HNO 3 to remove the clogging caused by the secondary sintering treatment.

前記スリッパ面構成体10の二次元的な気孔率および気
孔の最大直径は表IIの通りである。表IIにおいて、12a
は接合凸部12の端面を示す。
Table II shows the two-dimensional porosity and maximum pore diameter of the slipper surface structure 10. In Table II, 12a
Indicates the end face of the joining convex portion 12.

スリッパ面構成体10を切断してその切断面における気
孔の直径変化を調べたところ端面12aからスリッパ面11a
に至るに従ってその直径が漸次小さくなっており、また
本体11の外周部は殻状緻密層より構成されていることが
確認されている。
When the change in the diameter of the pores in the cut surface of the slipper face structure body 10 was examined, the end face 12a to the slipper face 11a were examined.
It has been confirmed that the diameter gradually becomes smaller as it reaches, and that the outer peripheral portion of the main body 11 is composed of a shell-like dense layer.

次いで第7図に示すように上型14および下型15よりな
る金型に、アルミニウム合金(6061合金)を用いて鋳造
されたロッカアーム本体9を設置してそのロッカアーム
本体9のスリッパ面構成体用接合区域9aを高周波加熱法
により略700℃に加熱する。またスリッパ面構成体10を1
000℃に予熱してその接合凸部12を加圧部材16により前
記接合区域9aに圧力100kg/cm2にて押込み、スリッパ面
構成体10をロッカアーム本体9に接合して第5図のロッ
カアーム8を得る。
Next, as shown in FIG. 7, a rocker arm body 9 cast from an aluminum alloy (6061 alloy) is installed in a die consisting of an upper die 14 and a lower die 15, and the rocker arm body 9 is used for the slipper surface constituting body. The joining area 9a is heated to about 700 ° C. by the high frequency heating method. In addition, slipper surface structure 10
After preheating to 000 ° C., the joining convex portion 12 is pushed into the joining area 9a by the pressing member 16 at a pressure of 100 kg / cm 2 , the slipper surface forming body 10 is joined to the rocker arm body 9, and the rocker arm 8 of FIG. To get

前記ロッカアーム8において、その切断面を観察した
ところ各気孔にはアルミニウム合金が充填されているこ
とが判明している。
Observation of the cut surface of the rocker arm 8 reveals that each pore is filled with an aluminum alloy.

前記のように高周波加熱および押圧接合を採用する
と、接合作業時間を短縮する上に有効である。
The use of high frequency heating and pressure bonding as described above is effective in shortening the bonding work time.

〔実施例III〕(Example III)

第8図はセラミック部材としてのタービン羽根車17
と、金属部材としての回転軸18との接合体19を示す。
FIG. 8 shows a turbine impeller 17 as a ceramic member.
And a joined body 19 of the rotating shaft 18 as a metal member.

タービン羽根車17の製造は以下の通りである。 The turbine impeller 17 is manufactured as follows.

実施例IIと同様の混合粉末、即ち窒化ケイ素粉末、気
孔形成物質、焼結助剤粉末、有機系ワックス、分散剤等
を混合したものを用いてスリップキャスティング法を適
用し、成形圧力0.03MPaにてタービン羽根車17と同一形
状、即ち、第9図(a)に示す羽根部20およびその羽根
部20と一体の接合軸部21を備えた成形体を得る。
The same mixed powder as in Example II, that is, a silicon nitride powder, a pore-forming substance, a sintering aid powder, an organic wax, a slip casting method using a mixture of a dispersant, etc., to a molding pressure of 0.03 MPa. As a result, a molded body having the same shape as the turbine impeller 17, ie, the blade portion 20 shown in FIG. 9A and the joint shaft portion 21 integral with the blade portion 20 is obtained.

前記成形体に実施例IIと同様の、乾燥、有機成分除
去、1次焼結、酸溶出、2次焼結、目詰り除去の各処理
を施して、三次元網目構造を有するタービン羽根車17を
得る。前記1次焼結処理において、成形体はその接合軸
部12を下方に向けた状態で焼結炉に設置される。
A turbine impeller 17 having a three-dimensional mesh structure is formed by subjecting the molded body to the same drying, removal of organic components, primary sintering, acid elution, secondary sintering and removal of clogging as in Example II. To get In the primary sintering process, the molded body is placed in a sintering furnace with the joint shaft portion 12 facing downward.

前記タービン羽根車17において、羽根部20の端面20a
から接合軸部21の端面21aまでの距離と気孔率および気
孔の最大直径との関係は第9図(b)の通りである。線
x2が気孔の最大直径に、また線x3が気孔率にそれぞれ該
当する。
In the turbine impeller 17, the end surface 20a of the blade portion 20
The relationship between the distance from to the end surface 21a of the joining shaft portion 21 and the porosity and the maximum diameter of the pores is as shown in FIG. 9 (b). line
x 2 is the maximum diameter of the pores and line x 3 is the porosity.

第9図(a)の各長さにおいて、a=10mm、b=25m
m、c=13mm、d=42mmである。
In each length of Fig. 9 (a), a = 10mm, b = 25m
m, c = 13 mm, d = 42 mm.

第9図(b)より接合軸部21の端面21aから羽根部20
の端面20aに至るに従ってその気孔の直径が漸次小さく
なることが明らかであり、特に、羽根部20では緻密化が
進行している。
From FIG. 9 (b), from the end surface 21a of the joining shaft portion 21 to the blade portion 20.
It is clear that the diameter of the pores gradually decreases toward the end face 20a of the blade, and in particular, the densification of the blade portion 20 progresses.

次いで第10図に示すようにタービン羽根車17の接合軸
部21を1200℃以上に加熱した後、羽根部20の端面20a側
端部を固定の支持台23に当て、また接合軸部21を左右二
つ割の金型24により挟着する。
Next, as shown in FIG. 10, after the joining shaft portion 21 of the turbine impeller 17 is heated to 1200 ° C. or higher, the end surface 20a side end portion of the blade portion 20 is brought into contact with the fixed support base 23, and the joining shaft portion 21 is also attached. It is sandwiched by the left and right half molds 24.

鋼製回転軸(機械構造用炭素鋼、SACM645)18を高周
波加熱コイル25中を通して1350℃に加熱し、その回転軸
18を加圧部材26により接合軸部21に圧力50kg/cm2にて押
込み、回転軸18をタービン羽根車17に接合して第8図の
接合体19を得る。
A steel rotary shaft (carbon steel for machine structure, SACM645) 18 is heated to 1350 ° C through a high frequency heating coil 25, and the rotary shaft is heated.
18 is pushed into the joint shaft portion 21 by the pressure member 26 at a pressure of 50 kg / cm 2 , the rotary shaft 18 is joined to the turbine impeller 17, and the joined body 19 of FIG. 8 is obtained.

前記接合体19において、その切断面を観察したところ
接合軸部21の各気孔には鋼が充填されていることが判明
している。そして接合軸部21と鋼とが複合した接合部19
aでは、破壊靱性値(KIC)13〜15(平均15)、曲げ強さ
50〜70kg/cm2(平均58kg/cm2)といった高い値を示す。
Observation of the cut surface of the bonded body 19 reveals that the pores of the bonded shaft portion 21 are filled with steel. Then, the joint portion 19 in which the joint shaft portion 21 and the steel are combined
In a, fracture toughness value (K IC ) 13 to 15 (average 15), bending strength
It shows a high value of 50 to 70 kg / cm 2 (average 58 kg / cm 2 ).

このように接合部19aの軸方向長さを長くし、また気
孔の直径変化により明確な接合界面の発生を回避する
と、応力集中箇所を無くす上に有効である。
In this way, it is effective to eliminate stress concentration points by increasing the axial length of the joint portion 19a and avoiding the occurrence of a clear joint interface due to changes in the diameter of the pores.

その上、接合部19はセラミックスと鋼との複合体であ
るから熱伝導性が良く、したがって厳しい熱サイクル下
での耐久性に優れている。
In addition, since the joint portion 19 is a composite of ceramics and steel, it has good thermal conductivity, and therefore has excellent durability under severe thermal cycles.

〔実施例IV〕Example IV

前記実施例IIと同様のスリッパ面構成体10の他の製造
例について説明する。
Another example of manufacturing the slipper surface structure 10 similar to that of Example II will be described.

窒化ケイ素粉末 37重量部 最大直径10μm、平均直径1μmのものを重量比で6:
4に混合した粉末 実施例IIと同材質の気孔形成物質 55重量部 直径150〜250μmのもの10重量部、直径100〜150μm
のもの10重量部、直径44〜100μmのもの15重量部、お
よび直径44μm以下のもの20重量部 焼結助剤粉末 3重量部 平均直径0.4μmのAl2O31重量部および平均直径0.4
μmのY2O32重量部 ホウ酸アンモニウム 5重量部 に、有機系ワックス、分散剤等を加え十分に混合して混
合粉末を得、この混合粉末を用いて金型による加圧成形
法を適用し、成形圧力100MPaにて第6図と同様にスリッ
パ面11aを有する本体11およびその本体11と一体の接合
凸部12を備えた成形体13を得る。
Silicon nitride powder 37 parts by weight Maximum diameter 10 μm, average diameter 1 μm weight ratio 6:
Powder mixed with No. 4 Pore forming substance of the same material as in Example II 55 parts by weight 10 parts by weight having a diameter of 150 to 250 μm, diameter 100 to 150 μm
10 parts by weight, 15 parts by weight having a diameter of 44 to 100 μm, and 20 parts by weight having a diameter of 44 μm or less Sintering aid powder 3 parts by weight Al 2 O 3 having an average diameter of 0.4 μm 1 part by weight and an average diameter of 0.4
μm Y 2 O 3 2 parts by weight Ammonium borate 5 parts by weight, organic wax, dispersant, etc. were added and mixed well to obtain a mixed powder, and a pressure molding method using a mold was performed using this mixed powder. When applied, a molding body 13 having a main body 11 having a slipper surface 11a and a joint projection 12 integral with the main body 11 is obtained at a molding pressure of 100 MPa as in FIG.

成形体13を乾燥した後、その接合凸部12を下方に向け
て焼結炉の基台上に載置し、N2流通量30ml/min、650
℃、1時間の条件の下で成形体13に有機成分除去処理を
施す。
After the molded body 13 is dried, the joining convex portion 12 is placed downward on the base of the sintering furnace, and the N 2 flow rate is 30 ml / min, 650.
The molded body 13 is subjected to an organic component removal treatment under the condition of 1 ° C. for 1 hour.

引続き、N2流通量30ml/min、1200℃、2時間の条件の
下で成形体13に1次焼結処理を施して焼結体を得る。
Subsequently, the molded body 13 is subjected to primary sintering treatment under the conditions of N 2 flow rate of 30 ml / min, 1200 ° C. for 2 hours to obtain a sintered body.

焼結体を15%HNO3および0.3%HFよりなる酸溶液中に
浸漬し、その酸溶液に16MHzの超音波振動を付与しなが
ら15分間保持して気孔形成成分、不純物および過剰の焼
結助剤成分を溶出して三次元網目構造を有するスリッパ
面構成体10を得る。
The sintered body is dipped in an acid solution consisting of 15% HNO 3 and 0.3% HF, and the acid solution is kept for 15 minutes while being subjected to ultrasonic vibration of 16 MHz to maintain pore-forming components, impurities and excess sintering aid. The agent component is eluted to obtain a slipper surface constituting body 10 having a three-dimensional network structure.

前記スリッパ面構成体10に十分洗浄処理を施した後乾
燥し、次いで前記スリッパ面構成体10に1700℃、2時間
の条件下で2次焼結処理を施して高度に焼結が進行した
スリッパ面構成体10を得る。
The slipper surface structure 10 is sufficiently washed and then dried, and then the slipper surface structure 10 is subjected to a secondary sintering treatment at 1700 ° C. for 2 hours to highly sinter the slipper. The surface structure 10 is obtained.

前記スリッパ面構成体10を10%HNO3よりなる酸溶液中
に浸漬して2次焼結処理による目詰りを除去する。これ
を第1のスリッパ面構成体とする。
The slipper surface structure 10 is immersed in an acid solution containing 10% HNO 3 to remove the clogging caused by the secondary sintering treatment. This is the first slipper surface structure.

前記同様の1次焼結処理後の焼結体に前記同様の2次
焼結処理を施し、次いで2次焼結処理後の焼結体に前記
同様の25%HNO3および0.3%HFよりなる酸溶液を用いて
前記同様の酸溶出処理を施して第2のスリッパ面構成体
を得る。
The same sintered body after the primary sintering treatment is subjected to the same secondary sintering treatment as the above, and then the sintered body after the secondary sintering treatment is composed of the same 25% HNO 3 and 0.3% HF. The same acid elution treatment is performed using an acid solution to obtain a second slipper surface structure.

前記第1,第2のスリッパ面構成体の二次元的な気孔率
および気孔の最大直径は表IIIの通りである。表IIIにお
いて、12aは接合凸部12の端面である。
The two-dimensional porosity and the maximum diameter of the pores of the first and second slipper surface constituting bodies are shown in Table III. In Table III, 12a is the end face of the joint protrusion 12.

なお、第1のスリッパ面構成体において、酸溶出処理
後の端面12aにおける気孔の最大直径は270μm、またス
リッパ面11aにおける気孔の最大直径は30μmである。
In the first slipper surface structure, the maximum diameter of the pores on the end surface 12a after the acid elution treatment is 270 μm, and the maximum diameter of the pores on the slipper surface 11a is 30 μm.

両スリッパ面構成体を切断してその切断面における気
孔の直径変化を調べたところ端面12aからスリッパ面11a
に至るに従ってその直径が漸次小さくなっており、また
本体11の外周部は殻状緻密層より構成されていることが
確認されている。
The slipper surface structure was cut and the change in the diameter of the pores in the cut surface was examined.
It has been confirmed that the diameter gradually becomes smaller as it reaches, and that the outer peripheral portion of the main body 11 is composed of a shell-like dense layer.

〔実施例V〕[Example V]

直方体状セラミック部材の製法について説明する。 A method for manufacturing the rectangular parallelepiped ceramic member will be described.

窒化ケイ素粉末 99重量% 最大直径4μm、平均直径0.7μm 焼結助剤粉末 1重量% 平均直径0.4μmのAl2O3および平均直径0.5μmのY2O
3を各0.5重量% を混合して基材とする。
Silicon nitride powder 99% by weight Maximum diameter 4 μm, average diameter 0.7 μm Sintering aid powder 1% by weight Al 2 O 3 with average diameter 0.4 μm and Y 2 O with average diameter 0.5 μm
0.5% by weight of 3 is mixed to form a base material.

基材 50重量% 実施例IIと同材質の気孔形成物質 40重量% 最大直径44μm、平均直径約20μm ホウ酸アンモニウム 10重量% に有機系ワックス、分散剤等を加え十分に混合して混合
粉末を得、この混合粉末を用いて金型による乾式加圧成
形法を適用し、成形圧力100MPaにて第11図に示す縦12m
m、横14mmm、高さ85mmの直方体状成形体27を得る。
Base material 50% by weight Pore forming material of the same material as in Example II 40% by weight Maximum diameter 44 μm, average diameter about 20 μm Ammonium borate 10% by weight, organic wax, dispersant, etc. are added and mixed well to form a mixed powder. Using this mixed powder, a dry pressure molding method using a mold was applied, and the molding pressure was 100 MPa and the vertical length was 12 m as shown in FIG.
A rectangular parallelepiped shaped body 27 having m, a width of 14 mm and a height of 85 mm is obtained.

成形体27を乾燥した後、その一方の端面mを下方に向
けて成形体27を焼結炉内に設置された箱体内の窒化ケイ
素粉末内に立設し、N2流通量30ml/min、0.6Torr、650
℃、1時間の条件の下で成形体27に有機成分除去処理を
施す。
After drying the molded body 27, the molded body 27 was erected in the silicon nitride powder inside the box installed in the sintering furnace with one end face m facing downward, and the N 2 flow rate was 30 ml / min. 0.6Torr, 650
The molded body 27 is subjected to an organic component removing treatment under the condition of 1 ° C. and 1 hour.

引続き、N2流通量30ml/min、0.6Torr、1700℃、1時
間の条件の下で成形体27に1次焼結法による焼結処理を
施して焼結体を得る。この焼結体の線収縮率は平均7%
である。
Subsequently, the compact 27 is subjected to a sintering treatment by the primary sintering method under the conditions of N 2 flow rate of 30 ml / min, 0.6 Torr, 1700 ° C. and 1 hour to obtain a sintered body. The average linear shrinkage of this sintered body is 7%
Is.

焼結体を25%HNO3および0.3%HFよりなる酸溶液中に
浸漬し、その酸溶液に12MHzの超音波振動を付与しなが
ら20分間保持して気孔形成成分、不純物および過剰の焼
結助剤成分を溶出して三次元網目構造を有する直方体セ
ラミック部材Aを得る。
The sintered body is dipped in an acid solution consisting of 25% HNO 3 and 0.3% HF, and the acid solution is kept for 20 minutes while applying ultrasonic vibration of 12 MHz to hold pore forming components, impurities and excess sintering aid. The agent component is eluted to obtain a rectangular parallelepiped ceramic member A having a three-dimensional network structure.

前記同様の成形体27をその端面mを下方に向けて焼結
炉内に設置された焼結窒化ケイ素板上に立設し、前記同
様に有機成分除去、焼結および酸溶出の各処理を行って
セラミック部材Bを得る。
The molded body 27 similar to the above is erected on the sintered silicon nitride plate installed in the sintering furnace with the end face m facing downward, and the organic component removal, the sintering and the acid elution are processed in the same manner as described above. Then, the ceramic member B is obtained.

さらにそのセラミック部材Bに、N2雰囲気下、気圧50
0bar、1700℃、1時間のHIP処理を施して高度に焼結の
進行したセラミック部材Cを得る。
Further, the ceramic member B is placed under an atmosphere of N 2 under an atmospheric pressure of 50.
HIP treatment is performed at 0 bar and 1700 ° C. for 1 hour to obtain a ceramic member C that has been highly sintered.

表IVは前記セラミック部材A,B,Cの気孔の最大直径変
化を示す。表IV中、d〜mは第11図に示す各位置に対応
し、d,mは1次焼結処理時における成形体27の両端面に
対応し、d−e間は5mm、e−f間、f−g間……k−
l間、l−m間はそれぞれ10mmである。
Table IV shows changes in the maximum diameter of the pores of the ceramic members A, B, and C. In Table IV, d to m correspond to the positions shown in FIG. 11, d and m correspond to both end faces of the compact 27 during the primary sintering process, and the distance between d and e is 5 mm and e to f. , F-g ... k-
The distance between 1 and the distance between 1 and m is 10 mm.

〔実施例VI〕 前記バルブシート41,42に対応する環状セラミック部
材の製法について説明する。
The preparation of EXAMPLE VI] the valve seat 4 1, 4 2 in corresponding annular ceramic member is described.

気孔形成物質として、 SiO2 27.3重量% B2O3 39.8重量% Al2O3 6.1重量% MgO 4.5重量% K2O 4.6重量% Na2O 13.2重量% BaO 2.0重量% MoO2 0.2重量% CeO3 2.3重量% を用いてガラス質粉末を得る。As a pore-forming substance, SiO 2 27.3 wt% B 2 O 3 39.8 wt% Al 2 O 3 6.1 wt% MgO 4.5 wt% K 2 O 4.6 wt% Na 2 O 13.2 wt% BaO 2.0 wt% MoO 2 0.2 wt% CeO 3 2.3% by weight is used to obtain a glassy powder.

窒化ケイ素粉末 47重量% 最大直径4μm、平均直径0.5μm 気孔形成物質 40重量% 平均直径10μm 焼結助剤粉末 1.0重量% 直径0.1〜1.0μm、平均直径0.4μmのAl2O3および直
径0.1〜2.0μm、平均直径0.5μmのY2O3を各0.5重量% ホウ酸アンモニウム 10重量% ホウ化チタン粉末 2重量% に、有機系ワックス、分散剤等を加え十分に混合して混
合粉末を得、この混合粉末を用いて金型による加圧成形
法を適用し、成形圧力100MPaにて第12図に示す環状成形
体28を得る。成形体28の寸法は次の通りである。即ち、
一方の環状端面28aの外径n=34.1mm、その内径p=22.
7mm、他方の環状端面28bの外径g=21.1mm、その内径r
=31.6mmである。
Silicon nitride powder 47% by weight Maximum diameter 4 μm, average diameter 0.5 μm Pore forming substance 40% by weight Average diameter 10 μm Sintering aid powder 1.0% by weight Al 2 O 3 with diameter 0.1-1.0 μm, average diameter 0.4 μm and diameter 0.1- Y 2 O 3 having a diameter of 2.0 μm and an average diameter of 0.5 μm is added to 0.5% by weight of each, 10% by weight of ammonium borate and 2% by weight of titanium boride powder, and an organic wax, a dispersant and the like are sufficiently mixed to obtain a mixed powder. A pressure molding method using a die is applied using this mixed powder to obtain an annular molded body 28 shown in FIG. 12 at a molding pressure of 100 MPa. The dimensions of the molded body 28 are as follows. That is,
The outer diameter n of one annular end face 28a is n = 34.1 mm, and the inner diameter p is 22.
7mm, outer diameter g of the other annular end surface 28b = 21.1mm, inner diameter r
= 31.6 mm.

成形体28を乾燥した後、その一方の環状端面28aを上
向きにして焼結炉の基台上に載置し、N2流通量30ml/mi
n、1時間の条件の下で成形体28に有機成分除去処理を
施す。
After the molded body 28 was dried, it was placed on the base of the sintering furnace with its one annular end surface 28a facing upward, and the N 2 flow rate of 30 ml / mi.
Under the condition of 1 hour, the molded body 28 is subjected to the organic component removal treatment.

引続き、N2流通量30ml/min、0.6Torr、1200℃、2時
間の条件の下で成形体28に1次焼結処理を施して焼結体
を得る。
Subsequently, the compact 28 is subjected to primary sintering treatment under the conditions of N 2 flow rate of 30 ml / min, 0.6 Torr, 1200 ° C., and 2 hours to obtain a sintered body.

焼結体を、4規定HNO3および0.1%HFよりなる酸溶液
中に浸漬し、その酸溶液に16MHzの超音波振動を付与し
ながら15分間保持して気孔形成成分、不純物および過剰
の焼結助剤成分を溶出し、三次元網目構造を有する環状
セラミック部材を得る。
The sintered body was dipped in an acid solution consisting of 4N HNO 3 and 0.1% HF and kept for 15 minutes while applying 16 MHz ultrasonic vibration to the acid solution to sinter pore-forming components, impurities and excess sintering. The auxiliary component is eluted to obtain an annular ceramic member having a three-dimensional network structure.

前記セラミック部材に十分洗浄処理を施した後乾燥
し、次いで500気圧、1750℃、1時間の条件下でHIP処理
による2次焼結処理を施して高度に焼結が進行したセラ
ミック部材を得る。これを第1のセラミック部材とす
る。
The ceramic member is sufficiently washed and then dried, and then subjected to secondary sintering by HIP treatment under the conditions of 500 atm, 1750 ° C. for 1 hour to obtain a highly sintered ceramic member. This is the first ceramic member.

前記同様の1次焼結処理後の焼結体に前記同様の2次
焼結処理を施し、次いで2次焼結処理後の焼結体に前記
同様の酸溶出処理を施して第2のセラミック部材を得
る。
The same secondary sintering treatment as described above is applied to the sintered body after the primary sintering treatment similar to the above, and the acid elution treatment similar to the above is performed to the sintered body after the secondary sintering treatment to obtain the second ceramic. Get the members.

前記第1および第2のセラミック部材における外径お
よび内径の寸法変化および全線収縮率は表Vの通りであ
る。
Table V shows the dimensional changes of the outer diameter and the inner diameter and the total linear shrinkage in the first and second ceramic members.

前記窒化ケイ素粉末に代えて、それと同量の炭化ケイ
素粉末(最大直径2μm、平均直径0.4μm)を用い、
他の配合材およびそれらの配合量を前記と同一にして前
記と同一方法により第1および第2のセラミック部材を
得る。たゞし、第1および第2の焼結処理における温度
は、それぞれ1200,1750℃である。
Instead of the silicon nitride powder, the same amount of silicon carbide powder (maximum diameter 2 μm, average diameter 0.4 μm) was used.
The other compounding materials and their compounding amounts are made the same as above, and the first and second ceramic members are obtained by the same method as described above. However, the temperatures in the first and second sintering processes are 1200 and 1750 ° C., respectively.

前記第1および第2のセラミック部材の外径、内径の
寸法変化および全線収縮率が表VIの通りである。
Table VI shows the dimensional changes in the outer diameter and the inner diameter of the first and second ceramic members and the total linear shrinkage rate.

表V、VIにおいて、窒化ケイ素製セラミック部材に比
べて炭化ケイ素製セラミック部材の方が線収縮率が小さ
いのは、焼結温度が低いことによる。
In Tables V and VI, the linear shrinkage rate of the silicon carbide ceramic member is smaller than that of the silicon nitride ceramic member because the sintering temperature is low.

また気孔形成物質の粘度は極めて低く、1cP程度であ
る。
The viscosity of the pore-forming substance is extremely low, about 1 cP.

前記各セラミック部材に前記同様の酸溶出処理を施し
てそれらの目詰りを除去し、次いで十分に水洗した後乾
燥する。
Each of the ceramic members is subjected to the same acid elution treatment as described above to remove the clogging thereof, then washed thoroughly with water and then dried.

その後、各セラミック部材を800℃に予熱して金型に
設置し、Al-Si合金を用いて、溶湯温度760℃、溶湯の充
填圧200kg/cm2の条件の下で鋳造を行い、セラミック−
アルミニウム合金の複合体を得る。
After that, each ceramic member was preheated to 800 ° C. and placed in a mold, casting was performed using an Al-Si alloy under the conditions of a molten metal temperature of 760 ° C. and a molten metal filling pressure of 200 kg / cm 2 , and a ceramic-
An aluminum alloy composite is obtained.

前記複合体の表面および切断面を光学顕微鏡、走査型
電子顕微鏡等により観察したところ次の結果を得た。
When the surface and the cut surface of the composite were observed with an optical microscope, a scanning electron microscope, etc., the following results were obtained.

窒化ケイ素製セラミック部材において、その線収縮率
の大きい一方の環状端面28a側では気孔の最大直径は0.5
μm以下と微細であるが、線収縮率の小さい他方の環状
端面28b側では気孔の最大直径は40μm程度と大きく、
また気孔の直径は他方の環状端面28bから離れるに従っ
て漸次小さくなっている。
In the silicon nitride ceramic member, the maximum diameter of the pores is 0.5 on the side of one annular end surface 28a having a large linear shrinkage.
Although it is as fine as less than μm, the maximum diameter of the pores is as large as about 40 μm on the side of the other annular end surface 28b having a small linear shrinkage ratio,
Further, the diameter of the pores gradually decreases with increasing distance from the other annular end surface 28b.

このようなセラミック部材ではその他方の環状端面28
bが金属部材との接合面となる。
In such a ceramic member, the other annular end surface 28
b is the joint surface with the metal member.

炭化ケイ素製セラミック部材においては、前記窒化ケ
イ素製のものゝように気孔の直径変化が明確ではない
が、線収縮率の変化に伴い、気孔の直径は下部環状端面
から離れるに従って漸次小さくなる傾向にある。
In the silicon carbide ceramic member, the change in pore diameter is not clear, unlike the one made of silicon nitride described above, but the pore diameter tends to gradually decrease with distance from the lower annular end face as the linear shrinkage rate changes. is there.

C.発明の効果 本発明によれば、セラミック部材における気孔の直径
に前記のように勾配をもたせたので、それら気孔に金属
部材の一部を充填してその金属部材とセラミック部材と
を接合したとき、両部材の接合部では物理的性質および
機械的性質も或勾配をもって変化することになり、これ
により接合部における前記両性質の変化を緩和して接合
部の耐久性を大幅に向上させることができる。
C. Effect of the Invention According to the present invention, since the diameter of the pores in the ceramic member has a gradient as described above, a part of the metal member is filled into the pores to join the metal member and the ceramic member. At this time, the physical properties and mechanical properties of the joints of both members will also change with a certain gradient, thereby alleviating the changes in the two properties at the joints and greatly improving the durability of the joints. You can

【図面の簡単な説明】[Brief description of drawings]

第1図(a)はセラミック部材の断面図、第1図(b)
はセラミック部材の一端面からの距離と気孔の最大直径
および気孔率との関係を示すグラフ、第2図は気孔率と
曲げ強さとの関係を示すグラフ、第3図はシリンダヘッ
ドの断面図、第4図はバルブシート用成形体の斜視図、
第5図はロッカアームの断面図、第6図はスリッパ面構
成体用成形体の断面図、第7図は接合作業を示す断面
図、第8図はタービン羽根車と回転軸との接合体の正面
図、第9図(a)はタービン羽根車の断面図、第9図
(b)は羽根部の端面から接合軸部の端面までの距離と
気孔の最大直径および気孔率との関係を示すグラフ、第
10図は接合作業を示す断面図、第11図は直方体状成形体
の斜視図、第12図は環状成形体の断面図である。 1……セラミック部材、3,9,18……金属部材としてのシ
リンダヘッド本体、ロッカアーム本体、回転軸、41,42,
10,17……セラミック部材としての吸気用バルブシー
ト、排気用バルブシート、スリッパ面構成体、タービン
羽根車
FIG. 1 (a) is a sectional view of a ceramic member, and FIG. 1 (b).
Is a graph showing the relationship between the distance from one end surface of the ceramic member and the maximum diameter of the pores and the porosity, FIG. 2 is a graph showing the relationship between the porosity and the bending strength, and FIG. 3 is a sectional view of the cylinder head. FIG. 4 is a perspective view of a molded body for a valve seat,
FIG. 5 is a sectional view of a rocker arm, FIG. 6 is a sectional view of a molded body for a slipper surface forming body, FIG. 7 is a sectional view showing a joining work, and FIG. 8 is a joined body of a turbine impeller and a rotary shaft. A front view, FIG. 9 (a) is a cross-sectional view of a turbine impeller, and FIG. 9 (b) shows the relationship between the distance from the end surface of the blade portion to the end surface of the joining shaft portion, the maximum diameter of the pores, and the porosity. Graph, number
FIG. 10 is a sectional view showing a joining operation, FIG. 11 is a perspective view of a rectangular parallelepiped shaped body, and FIG. 12 is a sectional view of an annular shaped body. 1 ... Ceramic member, 3,9,18 ... Cylinder head body as metal member, rocker arm body, rotating shaft, 4 1 , 4 2 ,
10, 17 ... Intake valve seat, exhaust valve seat, slipper surface structure, turbine impeller as a ceramic member

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】金属部材と接合されるセラミック部材にお
いて、前記金属部材の一部を充填される無数の微細な気
孔を備えた三次元網目構造を有し、前記気孔の直径を前
記金属部材との接合面から離れるに従って漸次小さくな
るようにしたことを特徴とする、金属部材との接合用セ
ラミック部材。
1. A ceramic member joined to a metal member, which has a three-dimensional mesh structure including innumerable fine pores filling a part of the metal member, and the diameter of the pores is the same as that of the metal member. A ceramic member for joining with a metal member, wherein the ceramic member is gradually reduced with increasing distance from the joining surface.
JP62284998A 1987-11-11 1987-11-11 Ceramic member for joining with metal member Expired - Lifetime JPH0813708B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62284998A JPH0813708B2 (en) 1987-11-11 1987-11-11 Ceramic member for joining with metal member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62284998A JPH0813708B2 (en) 1987-11-11 1987-11-11 Ceramic member for joining with metal member

Publications (2)

Publication Number Publication Date
JPH01126280A JPH01126280A (en) 1989-05-18
JPH0813708B2 true JPH0813708B2 (en) 1996-02-14

Family

ID=17685821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62284998A Expired - Lifetime JPH0813708B2 (en) 1987-11-11 1987-11-11 Ceramic member for joining with metal member

Country Status (1)

Country Link
JP (1) JPH0813708B2 (en)

Also Published As

Publication number Publication date
JPH01126280A (en) 1989-05-18

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