JPH0814510B2 - Spectroscopic device - Google Patents
Spectroscopic deviceInfo
- Publication number
- JPH0814510B2 JPH0814510B2 JP62012687A JP1268787A JPH0814510B2 JP H0814510 B2 JPH0814510 B2 JP H0814510B2 JP 62012687 A JP62012687 A JP 62012687A JP 1268787 A JP1268787 A JP 1268787A JP H0814510 B2 JPH0814510 B2 JP H0814510B2
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- JP
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- Prior art keywords
- light
- birefringence
- control means
- optical fiber
- measured
- Prior art date
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Description
【発明の詳細な説明】 〈産業上の利用分野〉 本発明はフーリエ分光法の原理を用いた分光装置に関
し,さらに詳しくは光に複屈折を与えるように構成した
分光装置の構造と特性の改善に関する。Description: TECHNICAL FIELD The present invention relates to a spectroscopic device using the principle of Fourier spectroscopy, and more particularly, to improvement in structure and characteristics of a spectroscopic device configured to give birefringence to light. Regarding
〈従来の技術〉 従来,この種の分光装置としては第2図〜第4図に示
すものが知られている。<Prior Art> Conventionally, as this type of spectroscopic device, one shown in FIGS. 2 to 4 has been known.
第2図に示す装置は,入射スリット11から入射した光
を凹面鏡12で平行光線束とし,回析格子13に入射させ,
透過光あるいは回析光を凹面鏡14で結像させるものであ
る。In the device shown in FIG. 2, the light incident from the entrance slit 11 is converted into a parallel light flux by the concave mirror 12 and is incident on the diffraction grating 13.
The transmitted light or the diffracted light is imaged by the concave mirror 14.
第3図に示す装置は,2光線束干渉計を用いたフーリエ
分光法の原理に基づく分光装置で,入射スリット21から
入射した光をレンズ22で平行光線とし,この平行光をハ
ーフミラー23で2光線束と,各光線束をそれぞれ反射鏡
24,25で反射させ,これらの各反射光をレンズ26を介し
てスリット27に入射させるものである。この装置におい
て,反射鏡24,25のいずれか一方を矢印に示す方向に動
かし,2光線束の光路差を変化させると,スリット27を通
った光を受光する受光素子28から得られる信号のインタ
ーフェログラムが入射した光のスペクトル分布のフーリ
エ変換となることから,この逆変換を行って,元のスペ
クトル分布を知るようにしたものである。The device shown in FIG. 3 is a spectroscopic device based on the principle of Fourier spectroscopy using a two-beam interferometer. The light incident from the entrance slit 21 is made into a parallel light by a lens 22, and this parallel light is made by a half mirror 23. Two ray bundles and each ray bundle is a reflecting mirror
The reflected light is reflected by 24 and 25, and these reflected lights are made incident on the slit 27 through the lens 26. In this device, when either one of the reflecting mirrors 24 and 25 is moved in the direction shown by the arrow to change the optical path difference between the two ray bundles, the signal interface obtained from the light receiving element 28 receiving the light passing through the slit 27 is changed. Since the ferrogram is the Fourier transform of the spectral distribution of the incident light, this inverse transformation is performed so that the original spectral distribution can be known.
また,第4図に示した装置は複屈折の波長依存性を利
用したフーリエ分光装置である。偏光子32と検光子33の
間に2枚の複屈折性結晶板31a,31bを楔状にして重ね,
相互に滑動させて厚さd1を変えることにより常光線と異
常光線の間に位相差を与える様にしたものである。The device shown in FIG. 4 is a Fourier spectroscopy device that utilizes the wavelength dependence of birefringence. Between the polarizer 32 and the analyzer 33, two birefringent crystal plates 31a and 31b are stacked in a wedge shape,
It is designed to give a phase difference between the ordinary ray and the extraordinary ray by sliding the layers and changing the thickness d 1 .
〈発明が解決しようとする問題点〉 しかしながら,上記従来の構成において第2図に示す
ものは,分解能を上げる為には,受光側のスリットを細
くする必要があり,分解能と精度とを同時に向上させる
のは難しいという問題がある。また,第3図に示すもの
は第2図に比較すれば入射スリットを必要とせず,受光
素子に入る光の全スペクトルを同時に測定することが出
来,光量も多いためS/Nが良好であり,波長精度が高い
等の長所がある半面,光路差を変えるために反射鏡を動
かす必要があり,その機械的精度が要求されるとともに
小形化が困難であり,振動等に弱いという問題がある。
また,第4図に示すものは,大きな位相差を与えるのが
難しく高い分解能が得られないという欠点がある。<Problems to be Solved by the Invention> However, in the conventional configuration shown in FIG. 2, in order to improve the resolution, the slit on the light receiving side needs to be thin, and the resolution and the accuracy are improved at the same time. There is a problem that it is difficult to let them do it. Compared to Fig. 2, the one shown in Fig. 3 does not require an entrance slit and can simultaneously measure the whole spectrum of the light entering the light receiving element. Since the amount of light is large, the S / N ratio is good. However, on the other hand, it has advantages such as high wavelength accuracy, but it is necessary to move the reflecting mirror to change the optical path difference, mechanical accuracy is required, miniaturization is difficult, and vibration is weak. .
Further, the one shown in FIG. 4 has a drawback that it is difficult to give a large phase difference and a high resolution cannot be obtained.
本発明は上記従来技術の問題点に鑑みて成されたもの
で,機械的精度を要する構成部品が不要で,振動に強
く,小形化,集積化が可能であり分解能および精度の良
好な分光装置を実現することを目的とする。The present invention has been made in view of the above-mentioned problems of the prior art. It does not require components that require mechanical precision, is resistant to vibration, and can be downsized and integrated. The spectroscopic device has good resolution and precision. The purpose is to realize.
〈問題点を解決するための手段〉 上記問題点を解決するための本発明の構成は、基準波
長光源からの出力光を入射して直線偏波成分を取出す第
1の偏波分離素子と,被測定光を入射して直線偏波成分
を取出す第2の偏波分離素子と,前記第1,第2の偏波分
離素子からの出力光を合流させる光合波器と,光ファイ
バをループ状に複数回巻き回して形成されその巻き回し
た光ファイバに前記光合波器からの出力光を入力して前
記巻き回した個所を光の進行方向に対して直角方向に任
意の角度で回動させることにより光に連続的に複屈折量
の変化を与える複屈折量制御手段と,この複屈折量制御
手段からの出力光を基準波長光源からの光と被測定光か
らの光に分離する分波器と,この分波器からのそれぞれ
の出力光から直線偏波成分を取出す第3および第4の偏
波分離素子と,これら第3,第4の偏波分離素子からの出
力光をそれぞれ受光し電気信号に変換する第1,第2の光
電変換素子と,これら光電変換素子からの出力を入力
し,前記複屈折制御手段により連続的に変化させたとき
の基準光の複屈折量の変化を基準として,前記被測定光
の複屈折量の変化量からフーリエ分光法によりスペクト
ル分布を求める演算制御部を具備したことを特徴とする
ものである。<Means for Solving the Problems> The configuration of the present invention for solving the above problems includes a first polarization separation element for extracting output light from a reference wavelength light source and extracting a linear polarization component, A second polarization demultiplexing element that receives the light to be measured and extracts a linear polarization component, an optical multiplexer that combines the output light from the first and second polarization demultiplexing elements, and an optical fiber in a loop shape. The output light from the optical multiplexer is input to the wound optical fiber which is formed by winding a plurality of times into the wound optical fiber, and the wound portion is rotated at an arbitrary angle in a direction perpendicular to the traveling direction of the light. The birefringence amount control means for continuously changing the birefringence amount to the light, and the demultiplexing for separating the output light from the birefringence amount control means into the light from the reference wavelength light source and the light from the measured light And a third component for extracting linearly polarized components from the respective output lights from this demultiplexer And a fourth polarization separation element, and first and second photoelectric conversion elements that receive the output light from the third and fourth polarization separation elements and convert them into electric signals, respectively. Is input and the birefringence amount of the reference light is changed continuously by the birefringence control means, and the spectrum distribution is calculated from the change amount of the birefringence amount of the measured light by Fourier spectroscopy. It is characterized by comprising an arithmetic control unit for obtaining
〈実施例〉 第1図は本発明の分光装置の一実施例を示す構成説明
図である。<Embodiment> FIG. 1 is a structural explanatory view showing an embodiment of a spectroscopic device of the present invention.
図において,41はλ0の波長のレーザを出力する基準
波長光源であり,42aはそのレーザを入力し直線偏波成分
を取出す第1の偏波分離素子(例えば偏光ビーム、スプ
リッタ)である。42bはλ1〜λ2の被測定波長Aを入
射してその直線波長を取出す第2の偏波分離素子であ
り,これら第1,第2の偏波分離素子からの出力光は光フ
ァイバ60を介して光合波器(例えば融着形光カプラ,ダ
イクロイックミラー等)43に導かれる。この光合波器か
らの出力は光ファイバ60を介して光分波器44に入射する
が,その光ファイバは途中がループ状に複数回巻き回さ
れ,複屈折量制御手段を構成している。なお、このルー
プ状の光ファイバは図示しない回動手段を含むものであ
り、光ファイバがねじ切れない程度に例えばある位置か
ら360度回動したら逆向きに回動される。光ファイバは
ループ状に巻き回すことによりその内部に異方性が生じ
「波長板」と同様の役割をする。このループ状の光ファ
イバを矢印B−B′(光の進行方向に直角)方向に回動
させることによりその回動角に応じて導波する光の複屈
折量が変化する。この変化の度合は光の波長にほぼ逆比
例することが知られている(この複屈折量制御手段の理
論は後に説明する)。In the figure, 41 is a reference wavelength light source that outputs a laser having a wavelength of λ 0 , and 42a is a first polarization separation element (for example, a polarization beam or a splitter) that inputs the laser and extracts a linear polarization component. Reference numeral 42b is a second polarization separation element for injecting the measured wavelength A of λ 1 to λ 2 and extracting its linear wavelength. The output light from these first and second polarization separation elements is the optical fiber 60. It is guided to an optical multiplexer (for example, a fusion type optical coupler, a dichroic mirror, etc.) 43 via. The output from the optical multiplexer is incident on the optical demultiplexer 44 via the optical fiber 60, and the optical fiber is wound in a loop a plurality of times to form a birefringence amount control means. The loop-shaped optical fiber includes a rotation means (not shown), and is rotated in the opposite direction when the optical fiber is rotated 360 degrees from a certain position to the extent that the optical fiber is not twisted. When the optical fiber is wound in a loop shape, anisotropy occurs inside the optical fiber, and the optical fiber plays a role similar to that of the “wave plate”. By rotating this loop-shaped optical fiber in the direction of arrow BB '(right angle to the traveling direction of light), the birefringence amount of guided light changes according to the rotation angle. It is known that the degree of this change is almost inversely proportional to the wavelength of light (the theory of this birefringence control means will be described later).
光分波器44は,複屈折量制御手段45からの光を基準波
長光源からのレーザλ0の光と被測定光λ1〜λ2の光
に分離し,これら分離された出力光は第3,第4の偏波分
離素子42c,42dにそれぞれ入射して直線偏波成分のみが
取出される。この偏波分離素子からの出力光はそれぞれ
第1,第2の光電変換素子46a,46bに入射され電気信号に
変換された後,増幅器50a,A/D変換器50b,計算機50c等か
らなる演算制御部50へ入力される。増幅器50aは第2の
光電変換素子46bからの被測定光の電気信号を増幅し,A/
D変換器50bに出力する。通常、複屈折制御手段において
は、光ファイバの温度変化や振動、光ファイバ自体の経
時変化などの原因により、複屈折量と回動角度(B−
B′方向)との再現性は保証されない。ここでは、第1
の光電変換素子46aの信号を基準信号として用いる。即
ち、A/D変換器50bでの被測定光のデジタル信号化に際
し、波長が既知である基準波長の信号をサンプリング
(クロック)信号として用いる。このことは波長が既知
である基準信号の複屈折量を基準として被測定波長の光
を測定していることになるので上記のような問題は生じ
ない。このクロック信号でサンプリングされた被測定光
の信号は計算機に送出され、計算機はスペクトラム演算
を行う。The optical demultiplexer 44 separates the light from the birefringence amount control means 45 into the light of the laser λ 0 and the light of the measured light λ 1 to λ 2 from the reference wavelength light source, and the separated output light is the first light. Only the linearly polarized component is extracted by being incident on the third and fourth polarization separation elements 42c and 42d. The output light from this polarization separation element is incident on the first and second photoelectric conversion elements 46a and 46b, respectively, and after being converted into an electric signal, an operation including an amplifier 50a, an A / D converter 50b, a computer 50c, etc. Input to the control unit 50. The amplifier 50a amplifies the electric signal of the measured light from the second photoelectric conversion element 46b, and
Output to D converter 50b. Usually, in the birefringence control means, the birefringence amount and the rotation angle (B-
Reproducibility with B'direction) is not guaranteed. Here, the first
The signal of the photoelectric conversion element 46a is used as a reference signal. That is, when the measured light is converted into a digital signal by the A / D converter 50b, a signal of a reference wavelength whose wavelength is known is used as a sampling (clock) signal. This means that the light of the wavelength to be measured is measured with the birefringence amount of the reference signal having a known wavelength as a reference, so that the above problem does not occur. The signal of the measured light sampled by this clock signal is sent to the computer, and the computer performs spectrum calculation.
次に光ファイバをループ状に巻き回した複屈折制御手
段の動作について説明する。Next, the operation of the birefringence control means in which the optical fiber is wound in a loop will be described.
光ファイバをループにした際に生ずる複屈折δη(ra
d)は次式により与えられる。Birefringence δ η (ra
d) is given by the following equation.
δη=(2π)2ar2N/(Rλ) … r;光ファイバの半径 N;巻き数 R;光ファイバの曲げ半径 λ;波長 a;光ファイバの材料,構造等により決まる定数 なお,上記式は雑誌「ELECTRONICS LETTERS 25th S
eptember 1980 Vol.16」に記載された公知の式である。δ η = (2π) 2 ar 2 N / (Rλ) ... r; radius of optical fiber N; number of turns R; bending radius of optical fiber λ; wavelength a; constant determined by material and structure of optical fiber The ceremony is the magazine "ELECTRONICS LETTERS 25th S
eptember 1980 Vol. 16 ”is a known formula.
式から分るように複屈折δηは波長λに反比例す
る。しかし,実際には複屈折δηが波長λに正確には反
比例しない場合もあるのでδηとλの関係は実験により
求めておくほうが望ましい。As can be seen from the equation, the birefringence δ η is inversely proportional to the wavelength λ. However, in practice, the birefringence δ η may not be exactly inversely proportional to the wavelength λ, so the relationship between δ η and λ should be determined experimentally.
ここで,式を変形して Δ=λδη={(2π)2ar2N}/R とし,被測定光のスペクトル分布をBυとする(υは波
数を示すもので波長の逆数である)。δηを連続的に変
化させて得られる光出力(λ1〜λ2側の光電変換素
子)はδη=υΔを用いて次式により与えられる。Here, by modifying the equation as Δ = λδ η = {(2π ) 2 ar 2 N} / R, is (upsilon and the spectral distribution of the light to be measured B upsilon is the reciprocal of the wavelength shows the wavenumber ). Light obtained the [delta] eta by continuously changing the output (photoelectric conversion element of lambda 1 to [lambda] 2 side) is given by the following equation using the δ η = υΔ.
(この式では,入射側と出力側の偏波分離素子は同じ向
きとした。逆向きの場合も2式の{ }の中は変るが結
論は同様となる) 式においてΔ=0とおくと この3式を用いて式から直流分を引いた変化分 得られる。式から明らなようにI(Δ)はスペクトル
分布B(υ)のフーリエ変換となっている。したがって
逆フーリエ変換の関係から となる。従ってI(Δ)をフーリエ変換すれば,光源の
スペクトル分布を求めることが出来る。 (In this equation, the polarization separation elements on the incident side and the output side are in the same direction. In the case of the opposite direction, the same is true although the values in {} of the two equations change.) If Δ = 0 in the equation The change amount obtained by subtracting the direct current component from the formula using these three formulas can get. As is clear from the equation, I (Δ) is the Fourier transform of the spectral distribution B (υ). Therefore, from the relationship of the inverse Fourier transform Becomes Therefore, the Fourier distribution of I (Δ) can be used to obtain the spectral distribution of the light source.
実際にΔを無限にとることは不可能なので式の積分
区間は有限になるが,これらは,FFT演算で一般に行なわ
れる「窓関数を掛ける」等の処理で誤差の少ない演算を
実行することが出来る。なお,波長の関係として,基準
光λ0は被測定光の範囲外にあるものとする。Since it is impossible to take Δ to infinity, the integral interval of the equation is finite. However, for these, it is possible to execute operations with few errors by processing such as "multiply window function" that is generally performed in FFT operations. I can. Note that the reference light λ 0 is outside the range of the measured light in terms of wavelength.
〈発明の効果〉 以上,実施例とともに具体的に説明したように本発明
によれば, (1)干渉計を用いたフーリエ分光器のような機械精度
を要する部品が不要であり,光が光ファイバ,その他構
成部品の外に出射することなく光電変換素子に達するの
で振動に強い。<Effects of the Invention> According to the present invention as specifically described above with reference to the embodiments, (1) a component such as a Fourier spectrometer using an interferometer that requires mechanical accuracy is not required, and the light is It is strong against vibration because it reaches the photoelectric conversion element without exiting the fiber or other components.
(2)干渉計が不要なため構造がシンプルとなり小形化
が可能である。(2) Since the interferometer is not required, the structure is simple and can be downsized.
(3)ファイバループの巻き数,巻き径等を適当に選択
することにより,複屈折量を自由に選択することが出
来,第3図に示した結晶を使用したものに比較して制約
がない。(3) The birefringence amount can be freely selected by appropriately selecting the number of windings and the winding diameter of the fiber loop, and there is no restriction as compared with the one using the crystal shown in FIG. .
(4)S/Nが良く,波長が正確なのでフーリエ分光法の
メリットを充分に生かすことが出来る。(4) The S / N is good and the wavelength is accurate, so the advantages of Fourier spectroscopy can be fully utilized.
第1図は本発明の一実施例を示す構成説明図,第2図は
複屈折量制御手段の他の実施例を示す正面図,第3図〜
第4図は従来例を示す図である。 41……基準波長光源,42a〜42d……第1〜第4の偏波分
離素子,43……光合波器,44……光分波器,45……複屈折
量制御手段,46a,46b……第1,第2の光電変換素子,47…
…コリメータレンズ,50……演算制御部。FIG. 1 is a structural explanatory view showing one embodiment of the present invention, FIG. 2 is a front view showing another embodiment of the birefringence amount control means, and FIGS.
FIG. 4 is a diagram showing a conventional example. 41 ... Reference wavelength light source, 42a to 42d ... First to fourth polarization separation elements, 43 ... Optical multiplexer, 44 ... Optical demultiplexer, 45 ... Birefringence amount control means, 46a, 46b ...... First and second photoelectric conversion elements, 47 ...
… Collimator lens, 50… Calculation controller.
Claims (1)
偏波成分を取出す第1の偏波分離素子と,被測定光を入
射して直線偏波成分を取出す第2の偏波分離素子と,前
記第1,第2の偏波分離素子からの出力光を合流させる光
合波器と,光ファイバをループ状に複数回巻き回して形
成されその巻き回した光ファイバに前記光合波器からの
出力光を入力して前記巻き回した個所を光の進行方向に
対して直角方向に任意の角度で回動させることにより光
に連続的に複屈折量の変化を与える複屈折量制御手段
と,この複屈折量制御手段からの出力光を基準波長光源
からの光と被測定光からの光に分離する分波器と,この
分波器からのそれぞれの出力光から直線偏波成分を取出
す第3および第4の偏波分離素子と,これら第3,第4の
偏波分離素子からの出力光をそれぞれ受光し電気信号に
変換する第1,第2の光電変換素子と,これら光電変換素
子からの出力を入力し,前記複屈折制御手段により連続
的に変化させたときの基準光の複屈折量の変化を基準と
して,前記被測定光の複屈折量の変化量からフーリエ分
光法によりスペクトル分布を求める演算制御部を具備し
たことを特徴とする分光装置。1. A first polarization demultiplexing element for injecting output light from a reference wavelength light source to extract a linear polarization component, and a second polarization demultiplexing element for injecting light to be measured and extracting a linear polarization component. An element, an optical multiplexer for merging output light from the first and second polarization separation elements, and an optical multiplexer formed by winding an optical fiber a plurality of times in a loop shape, and the optical multiplexer on the wound optical fiber. Birefringence amount control means for continuously changing the birefringence amount of light by inputting the output light from the device and rotating the wound portion at an arbitrary angle in a direction perpendicular to the traveling direction of the light. And a demultiplexer for separating the output light from the birefringence control means into light from the reference wavelength light source and light from the measured light, and a linear polarization component from each output light from this demultiplexer. The third and fourth polarization separation elements to be extracted and the outputs from these third and fourth polarization separation elements The first and second photoelectric conversion elements that receive the incident light and convert them into electric signals, and the outputs of these photoelectric conversion elements are input, and the reference light of the reference light when continuously changed by the birefringence control means is input. A spectroscopic device comprising an arithmetic control unit that obtains a spectral distribution by Fourier spectroscopy from the change amount of the birefringence amount of the light to be measured based on the change amount of the birefringence amount.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62012687A JPH0814510B2 (en) | 1987-01-22 | 1987-01-22 | Spectroscopic device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62012687A JPH0814510B2 (en) | 1987-01-22 | 1987-01-22 | Spectroscopic device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63180826A JPS63180826A (en) | 1988-07-25 |
| JPH0814510B2 true JPH0814510B2 (en) | 1996-02-14 |
Family
ID=11812287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62012687A Expired - Lifetime JPH0814510B2 (en) | 1987-01-22 | 1987-01-22 | Spectroscopic device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0814510B2 (en) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5234235B2 (en) * | 1971-11-16 | 1977-09-02 | ||
| JPS58100721A (en) * | 1981-12-11 | 1983-06-15 | Kiyomi Sakai | Fourier conversion type infrared spectrophotometer |
| JPS61259225A (en) * | 1985-05-14 | 1986-11-17 | Nippon Telegr & Teleph Corp <Ntt> | Polarization plane rotating device |
-
1987
- 1987-01-22 JP JP62012687A patent/JPH0814510B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63180826A (en) | 1988-07-25 |
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