JPH0814891B2 - Disk substrate cleaning device - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a disk substrate cleaning device, for example, a disk substrate for cleaning a disk-shaped substrate such as a magnetic disk substrate or an optical disk substrate. The present invention relates to a cleaning device.

[Conventional technology]

In recent years, the demand for magnetic disks and optical disks has increased rapidly with the development of computers and audio equipment, and along with this, stable supply of high-quality magnetic disks and optical disks has been required.

For example, disk materials such as magnetic disk materials (substrate) have deposits from the processing process, so the surface and inner and outer peripheral surfaces are efficiently cleaned in a multifaceted manner without causing scratches on the plate surface. Need to be sent to the subsequent process. For that purpose, it is necessary to uniformly wash the entire surface of the disc substrate to eliminate unevenness in washing, and it is also very important to perform drying after washing quickly and surely. That is, when the drying is not performed quickly and reliably, the cleaning liquid adheres or flows for a long time, and this portion is likely to remain as a stain, resulting in a reduction in the cleaning effect of the cleaning process.

Conventionally, as a method for cleaning such a substrate, for example, JP-A-61-8734, JP-A-61-8735, and JP-A-63-8
6177, JP 1-1182, JP 1-105376, JP 63-81379, JP 1-888, JP 1-211185 In addition, a method of washing the substrates one by one by hand and naturally drying them, a method of using ultrasonic cleaning or brush cleaning with a robot hand in combination with solvent vapor drying, and the like have been used.

[Problems to be Solved by the Invention]

In the case of hand washing, not only is it inefficient and difficult to wash and dry uniformly, but there are problems such as damage to the disk substrate and contamination due to contact with the human body.

In addition, ultrasonic cleaning is more efficient than hand cleaning and can easily deal with changing the size of the disk substrate, but has a problem that the cleaning effect is not excellent.

Further, the method of sequentially cleaning by tact feeding (beat feeding) to each cleaning step by a robot hand has a long tact time and a long time required to cope with a size change, which is not suitable for mass production. was there.

Furthermore, the cleaning method in which a high-pressure spray is applied to the disk substrate has a problem that the cleaning effect is not excellent and dust is adhered to the disk substrate by generating dust from the plunger in the pressure pump. It was

Generally, the cleaning method for removing contaminants is as described above.
Dissolving power, surface activity, chemical reaction force, physical force (friction force,
Ultrasonic waves, stirring, etc. are used (Fujii, Kakuda; Journal of Precision Engineering, 54 , 1835 (1988), Tsuchihashi; Journal of Precision Engineering,
54 , 1840 (1988), the most effective method for cleaning a disk substrate is to use a mechanical force such as rubbing with a brush. For this reason, most of the commercially available cleaning devices use the brush cleaning method. For example, Japanese Patent Laid-Open No. 1-
1182, JP 61-8734, JP 61-8735, JP 63
-81379 as published in each publication and equipment manufacturer's catalog. As a structure of such an apparatus, the disk substrate is chucked on the spindle, or is put in a cassette to fix the substrate and a brush is applied to the surface of the substrate for cleaning while rotating the substrate and the brush. In this case, only one kind of brush, such as a ring brush, is provided for the apparatus (for example, Japanese Patent Laid-Open No. 1-1182). In this method, the direction of the brush contact with the surface of the disk substrate is constant, and there are cases where contaminants can be easily removed and cases where it is difficult to remove them, and the cleaning effect does not improve. There is a problem in that the brush comes into contact with the brush for a certain period of time, and the contaminants once taken into the brush may stain the surface of the substrate again near the end of the cleaning time and cannot be removed.

Further, the brush cleaning and the transfer between the spindles are different processes, and therefore, there is a problem that the total time of the cleaning process becomes longer accordingly.

On the other hand, when cleaning with a brush,
When the brush comes into contact, the disk substrate may be displaced from the transport path due to the rotational force of the brush or the like, or only the substrate may be sent forward without being sufficiently cleaned. As a result, as shown in FIG. 12, it is necessary to install, before and after the cleaning brush, a pressing roller for the disk substrate that prevents the substrate from moving due to the brush rotating force. In the figure, reference numeral (101) is a pressing roller, (102) is a conveying roller, and (103) is a pressing roller drive motor.

As described above, there is a problem that the work is not advanced unless a driving force is applied to the pressing roller (101) as in the case of the carrying roller (102). For this reason, it is necessary to drive the transfer roller (102) and also to transmit the driving force to the pressing roller (101) located above the transfer roller (102). Further, the rotation of the transfer roller (102) should be synchronized. It is necessary to use a complicated mechanism as a device.

Furthermore, in the conventional cleaning device, a spray for spraying water for rinsing is provided on the upper part of both sides of the disk substrate. In this method, it is possible to clearly determine the cleaning part and the non-cleaning part, the cleaned substrate surface and the uncleaned substrate surface. However, there is a problem that the rinse water and the contaminated water are mixed and the effect of the rinse is not sufficiently enhanced, and the contaminated water remains on the surface of the cleaned disc substrate. It was

Next, there is a spin drying method as a drying method, but when rotating at a high speed, a difference in peripheral speed occurs between the inner circumference and the outer circumference, and the cleaning liquid is likely to remain on the inner circumference side, or stains remain on the disk substrate surface, or high speed. There are problems such as dust adhering to the disk substrate surface due to the dust being wound up during rotation.

Although Freon is the most used solvent vapor drying method at present, regulations around the world have decided that it will be completely abolished by the year 2000, and it is not possible to obtain it or to use it. There was a problem that it was banned.

Alcohols (eg isopropyl alcohol (IP
The steam drying method using steam of A) has the advantage that it can be used irrespective of CFC regulations, but it has a low flash point and a high risk of explosion, so it cannot be used unless the explosion-proof equipment is enhanced, and the equipment cost is high. There were problems such as being expensive. In addition, a fire extinguishing facility often uses a compound that is subject to the same regulation as CFCs called halon, and there is a problem that the fire extinguishing facility cannot be installed with an inexpensive compound in the future.

The present invention is intended to solve all of the above problems, and the cleaning of the disk substrate is
Clean evenly and remove 2 contaminants from the brush.
Of the disk substrate, and the direction and speed of the disk substrate transfer are as specified, and the drying is done uniformly and without dust re-adhesion. An object of the present invention is to provide a disk substrate cleaning apparatus that does not use chemicals, does not require explosion-proof and fire-proof devices, and is simple and simple in processing time and processing time.

[Means for solving the problem]

A disk substrate cleaning device according to the present invention is
According to the invention, a transport roller for transporting a disk substrate in a horizontal direction, a side surface cleaning brush for cleaning a hole side surface and an outer peripheral surface of the disk substrate, a surface cleaning brush for cleaning the surface of the disk substrate, and a spray nozzle for spray cleaning. And a pure water for immersing and cleaning the disk substrate, a pure water tank and an ultrasonic cleaning device, and a drying device for immersing the disk substrate in the above pure water with its surface vertical and then drying while immersing the disk substrate. Further, in the second aspect of the invention, a pressing roller made of a sponge roll that freely rotates in contact with the transport roller is provided above the transport roller before and after the portion having the surface cleaning brush. According to the third aspect of the present invention, the disk substrates are provided between the cleaning brush and the drying device, and the disk substrates are sequentially stacked with a gap therebetween. At the same time, a cassette provided with a turning device configured to convert the mounted state of the accommodated disc substrate from the horizontal direction to the vertical direction is provided, and the disc substrate being accommodated in the cassette is provided. It is kept in a wet state.

[Action]

Since the present invention is configured as described above,
According to the invention, the disk substrate is conveyed horizontally, and in the middle of the cleaning, the outer peripheral surface, the hole side surface, and the front and back surfaces are cleaned by individual brushes and spray cleaning is performed. It does not require the use of regulated chemicals because it is effective and reliable, and the drying is done purely, and since it is pulled up vertically, there is no unevenness in drying.

According to the second aspect of the invention, even when the disc substrate is sandwiched between the transport roller and the pressing roller made of a sponge roll, the transport roller and the pressing roller are in contact with each other in the non-sandwiched portion. Therefore, the pressing roller, which is a sponge roll, can rotate in synchronism with the rotation of the conveying roller, and does not require a special synchronous rotation device.

Further, according to the third aspect of the invention, when a predetermined number of disk substrates are stored in the cassette, the cassette rotates, so that the mounted state of the disk substrates can be quickly changed, and the wet state is maintained during that time. No uneven drying occurs.

〔Example〕

Hereinafter, the present invention will be described with reference to the drawings showing one embodiment.

FIG. 1 is a schematic block diagram for explaining the entire embodiment of the disk substrate cleaning apparatus by function unit.

In the drawing, reference numeral (1) is a function insertion portion, (2) is a spray cleaning portion, (3) is a brush scrub cleaning portion having a side surface cleaning brush for cleaning the inner surface and outer peripheral surface of the hole,
(4) to (8) are surface cleaning parts equipped with surface cleaning brushes for cleaning both front and back surfaces of the disk substrate, (9) are spray cleaning parts equipped with spray nozzles for spray cleaning, and (10) are disk substrates. Substrate storage cassettes that are sequentially stacked at intervals and are rotated so that the disk substrate surface turns from horizontal to vertical when a predetermined number of them are accommodated. (11) is an ultrasonic cleaning unit for cleaning with an ultrasonic device. , (12) is a high-temperature pure water immersion pull-up and drying section for immersing a disk substrate in high-temperature pure water, pulling it up and drying it, and (13) is a substrate removing section.
Further, (21) is a disk substrate.

The washing and drying work by these devices is performed in the following order. That is, (1) substrate insertion (2) spray cleaning (3) hole inner side and outer peripheral surface brush scrub cleaning (4) disk brush surface cleaning (5) roll brush surface cleaning (6) disk brush surface cleaning (7) roll brush surface Cleaning (8) Roll brush surface cleaning (9) Spray cleaning (10) Disc substrate storage and cassette rotation (11) Ultrasonic cleaning (12) High temperature ultrapure water immersion / pulling dry (13) Substrate removal Next, each of the above steps, and the configuration and operation thereof will be described.

(1) Board Insertion Section FIG. 2 is a perspective view showing the structure of the board insertion section of FIG.

It has a space for placing a dirty disc substrate (21) on a transport roller (22) for horizontal transport, and a lift table (23) for placing the disc substrate (21) on the transport roller (22) by a transport tact. ing.

FIG. 3 is a structural perspective view showing a driving structure of the transport roller of FIG. As shown in the figure, the transport roller (22) includes a drive shaft (25) to which a driving force is transmitted from a drive motor (24) by an O-ring or a belt (26), and an O-ring or a belt (26). It is connected and driven by. This requires only one drive motor,
It is easy to synchronize the rotation of all the transport rollers (22).

In addition, the lift table (23) is
It moves up and down by a motor (not shown). When descending and placing the disk substrate (21) on the transfer roller (22),
The transport roller (22) stops rotating.

The disk substrate (21) thus placed horizontally on the carrying roller (22) is transferred to the next step by the rotation of the carrying roller (22).

(2) Spray Cleaning Section FIG. 4 is a structural perspective view showing the structure of the spray cleaning section in FIG.

A spray nozzle (27) provided for the purpose of washing away the dirt adhering to the disk substrate (21) as much as possible before entering the brush scrub cleaning step in the subsequent step.
It is equipped with a spray cleaning section having both sides.

The arrow P indicates the direction in which the disc substrate (21) is conveyed.

(3) Brush Scrub Cleaning of Inner Side and Outer Surface of Hole FIG. 5 is a perspective view showing the structure of the cleaning section of the inner and outer surfaces of the hole shown in FIG.

As shown in the figure, after stopping the disk substrate (21) sent from the spray cleaning section with the stopper (28), it is lifted with the lifting table (29) and the outer periphery is chucked with the disk substrate chuck (30). Disc board (21)
The inside surface and outer peripheral surface of the hole are scrubbed with a PVA sponge brush (31).

The sponge brush (31) is rotated by the brush rotating motor (32), and the disk substrate (21) is rotated accordingly.

The disk substrate chuck (30) is moved by the air cylinder (33).

The sponge brush (31) is provided with a detergent dropping pipe or a spray pipe (not shown) so that the detergent can be dropped or water can be sprayed.

(4) Disk brush surface cleaning unit FIGS. 6A and 6B are perspective views showing the structure of the surface cleaning unit shown in FIG.

In the figure, (34) is the disk brush shown in FIG. 6C, (35) is the same roll brush, (37) is a drive shaft for transmitting driving force, (38) is a belt, and (27) is a spray. It is a nozzle.

Further, FIG. 7 shows the disk brush (3
FIG. 4 is a structural perspective view showing in detail the mechanism of the cleaning unit by 4), in which (36) is a driving force motor, and the driving force of this driving motor (36) is the belt (38), the driving shaft ( 3
7) and transmitted to the disc brush (34) provided on the disc brush shaft (34a). According to this structure, the upper and lower brushes can be driven simultaneously, so that only one drive motor is required.

Both sides (upper and lower surfaces) of the disk substrate (21) that has been cleaned and sent on the inner and outer surfaces of the hole by inner and outer scrubbing.
Is scrubbed by its end face (34b) by the rotation of a special vertical brush or disk brush (34) shown in FIG. 6C.

The material of the disk brush (34) can be changed depending on the kind of the adhered abrasive, the kind of dirt and the like.
For example, wire materials such as nylon, polypropylene, horsehair,
A foam material such as polyvinyl alcohol (PVA sponge brush (for example, product name: Bellclean: made by Kanebo)), a plastic foam material such as urethane, and the like are used.

The disc brush (34) can clean the upper and lower surfaces of the disc substrate (21) evenly, and water is sprayed onto the disc substrate (21) from the upper and lower parts by a spray nozzle, whereby the disc brush It is possible to effectively remove the removed abrasive and dirt.

It is also possible to provide a detergent drip pipe so that a detergent can also be used.

(5) Roll brush surface cleaning section The roll brush surface cleaning section is intended to wash away the suspended dirt and the like by removing the adhered abrasives and dirt by the disk brush surface cleaning section in the previous step. Figure
The cleaning unit has a cylindrical roll brush (35) as shown in A and B.

In FIG. 8A, in the roll brush (35), the driving force is transmitted from the drive motor (36) to the roll brush shaft (35a) through the drive shaft (37) and the belt (38), and the upper and lower roll brushes (35). Rotates, and the cylindrical surface (35b) cleans the disk substrate (21). The roll brush (35) has a spray nozzle (2
Water is always sprayed from 7).

The material of the roll brush (35) can be changed depending on the type of abrasive, the type of dirt, and the like. For example nylon,
Wire materials such as polypropylene, horsehair, and foamed plastic materials such as polyvinyl alcohol (PVA sponge brush) and urethane are used.

As shown in FIGS. 6A and 6B, water is sprayed onto the roll brush (35) and the disc substrate (21) from above and below by a spray nozzle to remove dirt by the rotating force of the roll brush (35). It can be effectively removed by the synergistic effect with.

A pressing roller for pressing the disk substrate (21) is provided on the transport roller (22) before and after the disk brush surface cleaning section and the roll brush surface cleaning section, and a sponge is used as the pressing roller. Therefore, even if the disc substrate (21), which is a work, is inserted between the pressing roller and the transport roller (22), the sponge corresponding to the thickness of the disc substrate (21) is dented, and the disc substrate (21) The portion of the pressing roller which is not in contact with is in contact with the carrying roller (22) located in the lower part, and the driving force is transmitted from the carrying roller (22) to give the driving force to the pressing roller. FIG. 8C shows a portion where the pressing roller configured in this way is provided. In the figure, reference numeral (22a) is the above-mentioned pressing roller, and as shown in the figure, the disc brush (34) and roll brush (3
It is provided on the upper part of the carrying roller (22) before and after 5) so as to be freely rotatable in contact with the carrying roller (22). The pressing roller (22a) is composed of a sponge roller.

Since the presser roller (22a) is configured in this way, the disc substrate (2) mounted on the transport roller (22) is
1) is conveyed horizontally, passes between the pressing roller (22a) and the conveying roller (22), and reaches the portion of the disk brush (34) or the roll brush (35). At this time, the pressing roller (22a) in the portion where the disc substrate (21) is inserted
Since it is made of sponge, it is dented as shown in FIG. 8D, but the other part of the pressing roller (22a) comes into contact with the lower conveying roller (22) in its original state. ing. Therefore, the driving force of the carrying roller (22) is transmitted to the pressing roller (22a), so that the disc substrate (21) is pressed by the pressing roller (22a) and the carrying roller (22).
Even if it is inserted between the
The a) rotates following the rotation of the transfer roller (22) and does not hinder the transfer of the disk substrate (21). Furthermore, since the presser roller (22a) is made of sponge,
Since the contact resistance is high, the disk substrate (21) can be carried while being held by the disk substrate (21) without being affected by the rotating force of the disk brush (34) and the roller brush (35).

In this embodiment, the material of the sponge of the pressing roller (22a) is a polyvinyl alcohol (abbreviated as PVA) type porous elastic body (trade name: Bellclean; manufactured by Kanebo), but other materials are used. A sponge material such as urethane may be used, and the same effect as that of the above-described embodiment is obtained.

(6) Disc brush surface cleaning unit This has the same configuration and operation as the above (4) Disc brush surface cleaning unit.

(7), (8) Roll brush surface cleaning section This has the same configuration and operation as the above (5) roll brush surface cleaning section.

(9) Spray cleaning part (7), (8) After the dirt is finally removed by the roll brush surface cleaning part, as shown in FIG. ) Spray pure water (27a) on the upper and lower surfaces to replace the cleaning water used in the previous step that is attached to the disk substrate (21).
The surface of the disk substrate (21) is cleaned. in this case,
The pure water (27a) to be sprayed is configured to be jetted by being supplied with water from a water supply source (not shown) in a direction opposite to the traveling direction of the disk substrate (21).

At this time, by installing a sensor and an electromagnetic valve, a mechanism that ejects water only when the disc substrate (21) reaches the corresponding location, or a valve that is the water supply source opens, and water is always ejected from the spray nozzle. The mechanism etc. can be selected.

(10) Housing of Disk Substrate in Cassette and Rotation of Cassette FIG. 10 is a block diagram of a rotating device in which the disk substrate (21) of FIG. 1 is accommodated in the cassette and rotated.

In the figure, reference numeral (39) is a cassette for accommodating the disk substrate (21), (40) is a lifting motor for vertically driving the cassette (39), and (41) is air for rotating the cassette (39). A cylinder, (42) is a spray nozzle that sprays water onto the disk substrate (21) when the disk substrate (21) is horizontally mounted, and (43) is when the disk substrate (21) is vertically mounted. Spray nozzle, (44),
Reference numeral (45) is a sensor for detecting a disk substrate, and reference numeral (46) is a rotating device for rotating the cassette (39) by the operation of the cylinder (41).

Next, the operation will be described. A disk substrate (21) that has been horizontally mounted on a transfer roller (22) and has been transferred.
Are first stored in the uppermost stage of the cassette (39).

When the sensor (44) detects that the cassette (39) is stored, the cassette (39) moves up by one disk substrate at a predetermined pitch. At that time, the cylinder (41) and the rotating device integrated with the cassette. (46) also rises and prepares for the accommodation of the next disk substrate (21). Meanwhile, the spray nozzle (42) constantly sprays water on the disk substrate (21).

Thus, when the disk substrates (21) having the maximum storage capacity are stored in the lowermost stage, the sensor (45) detects that the disk substrate (21) has reached the ascending end, whereby the air cylinder (41) operates and rotates. The device (46) rotates the cassette (39) 90 ° about the device as a fulcrum, and the disc substrate (2
1) is converted from the horizontal state to the vertical state. During this time, the disk substrate (21) is sprayed with pure water by the spray nozzles (42) and (43) to prevent it from drying, and waits until it is carried to the next step.

In the above embodiment, the case where the rotating cassette (39) is raised after the disc substrate (21) is housed has been described.
The disk substrate (21) may be lowered after being housed, and the same effect as that of the above-described embodiment is obtained.

In the above embodiment, the case where the spray is used to prevent the disk substrate (21) from drying has been described.
In addition, a method of immersing the disk substrate (21) in water or a method of spraying water without spraying may be used, and the same effect as that of the above-described embodiment is obtained.

(11) Ultrasonic cleaning unit After the disc substrate is housed in the cassette and the cassette (39) is rotated so that the surface of the disc substrate (21) becomes vertical, the disc arm (42) is moved by the transfer arm (42).
Only 1) is suspended and ultrasonically oscillated according to a known method while being immersed in a pure water tank for ultrasonic cleaning.

(12) High-temperature pure water immersion / pull-up / drying section FIG. 11A is a schematic configuration perspective view of the high-temperature pure water immersion-pulling-drying section in FIG.

After the ultrasonic cleaning is completed, the disk substrate (21) is hung and transferred again using the disk holder (43) shown in, for example, FIGS. 11B and C under the transfer arm (42). It is immersed in high temperature pure water stored in the pure water tank (44), for example, ultrapure water at 50 to 95 ° C., immersed for a certain period of time, and then gently pulled up vertically. In this process, the disc substrate (21) is dried. The pure water heated by the heater (46) controlled by the temperature control system (45) is supplied to the pure water tank (44).

As for the temperature of the high temperature pure water, it takes time to dry the disk substrate if the temperature is 50 ° C. or lower, and it is difficult to maintain a constant temperature at 95 ° C. or higher and bubbles are generated in the pure water. It is not suitable because it causes unevenness of drying of the disk substrate surface. That is, the temperature range is 50 to 95
It may be in the range of ° C. Further, the appropriate temperature range may be a range that is easily controlled and is a temperature at which the disk substrate is easily dried.

Furthermore, in this embodiment, the disc holder (43)
Although the shape shown in FIGS. 11B and 11C is shown, the shape is not limited to this, and any shape that does not increase the contact portion with the disk substrate (21) may be used.

(13) Substrate unloading section The dried disc substrate (21) is used for the transfer arm (42).
Thus, the substrate is transferred to the substrate unloading section and stored in the cassette of the substrate unloading section.

The disk substrate cleaning apparatus of the present invention is configured and operates as described above, and its experimental example is as follows.

A 3.5-inch magnetic disk substrate was cleaned by a disk substrate cleaning apparatus according to an embodiment of the present invention, and the contact angle of the disk substrate surface and the number of attached dusts were examined.

The contact angle was examined by dropping pure water on the substrate surface and measuring the relationship between the water droplet and the angle formed by the disk substrate from the side. In this case, the smaller the contact angle, the higher the cleanliness of the disk substrate surface. The number of adhered dusts was measured by using a device that operates a laser beam and evaluates the reflected light.

The same evaluation, including the conventional Freon vapor drying step, by a conventional cleaning device that chucks the disk substrate on the spindle to perform cleaning, was carried out on the 3.5-inch magnetic disk substrate on which the disk brush alone or the roll brush alone was cleaned, The above-mentioned device according to the present invention was compared and examined.

 The results are summarized in the table.

According to this, the contact angle on the surface of the disk substrate according to the above-mentioned example is much smaller than that of the one cleaned and dried by the conventional apparatus, which is 10 degrees or less, which is difficult to measure. It can be seen that is greatly improved in this example.

Also, the number of adhered dust is drastically reduced as compared with that of the conventional apparatus, and the effect of the disc substrate cleaning apparatus according to the present invention is remarkable.

Further, in the conventional example, the dispersion of each measured value is large, and it is difficult to obtain reproducibility. The cause is considered to be the effect of recontamination from the brush. On the other hand, in the cleaning results of the above-described embodiment according to the present invention, the measured values are obtained with good stability as shown in the table, and the effect of recontamination of the disk substrate by the brush or cleaning water can be eliminated.

Further, in this embodiment, the disc substrate (21) is placed on the transport roller (22) and is cleaned while being transported, so that the processing speed is 100 to 200 sheets / hour or more. Although the value of this processing capacity is not much different from that of the conventional mass production cleaning apparatus, it is one of the great effects of the present invention that the cleaning effect shown above and the processing speed can be realized. is there.

In the above example, (1) substrate insertion (2) spray cleaning (3) hole inner and outer surface brush scrub cleaning (4) disk brush surface cleaning (5) roll brush surface cleaning (6) disk brush surface cleaning ( 7) Roll brush surface cleaning (8) Roll brush surface cleaning (9) Spray cleaning (10) Disc substrate accommodation and cassette rotation (11) Ultrasonic cleaning (12)
The cleaning apparatus having the steps of high temperature ultrapure water immersion / pull-drying (13) substrate removal has been described, but the order of the steps (2) to (11) is arbitrary to some extent, for example, ultrasonic cleaning. Can be installed in the previous steps (2) to (4), the type of brush can be exchanged, or the number of brush cleanings can be increased or decreased from 5 times. The point is that the disk substrate (21) is contaminated. It is possible to assemble the process according to the degree, and even in that case,
The same effect as the above-mentioned practical example is produced.

Although the drive transmission mechanism system is shown in the figure, it is sufficient if the target brush, roller, etc. can be driven by other mechanism systems,
The same effect as that of the above embodiment is obtained.

Further, in the above embodiment, an example in which the disc substrate is horizontally conveyed is described, but other vertical conveyance, conveyance by an inner circumference chuck or outer circumference chuck, conveyance of a plurality of sheets by a cassette, or the like may be used. It has the same effect as the example.

〔The invention's effect〕

As described above, the disk substrate cleaning apparatus according to the present invention is, in the first invention, a transportation roller for horizontally transporting the disk substrate and a side surface cleaning for cleaning the hole side surface and the outer peripheral surface of the disk substrate. A brush, a surface cleaning brush for cleaning the surface of the disc substrate, a spray nozzle for spray cleaning, and pure water for immersing and cleaning the disk substrate,
The present invention further comprises a deionized water tank and an ultrasonic cleaning device, and a drying device which dries the disk substrate in the deionized water with its surface vertical and dries it while pulling it up. According to the third aspect of the invention, a pressing roll made of a sponge roll that freely rotates in contact with the transportation roller is provided above the transportation roller before and after the portion provided with the surface cleaning brush. That is, it is provided between the cleaning brush and the drying device, and the disk substrates are stacked one on top of the other with a space therebetween, and the mounting state of the disk substrates accommodated inside is changed from the horizontal direction to the vertical direction. The present invention is provided with the cassette provided with the rotating device configured as described above, and holds the disk substrate in the cassette in a wet state.

Therefore, according to the first invention, the contact between the disc substrate and the cleaning brush can be held down in the required minimum time for uniform cleaning, there is no concern that contaminants will adhere again, and the cleaning effect is improved, and finally the pure cleaning is performed. Since it is soaked in water and pulled up to dry, there are few particles adhering when dried, the degree of cleaning of the disk substrate surface is improved, and there is no need to use regulated items, explosion-proof or fire-proof equipment. Since the cleaning is performed during transportation, the device itself is simple, the distinction between the cleaning part and the rinse part is clear, and the processing time is shortened.
According to the second aspect of the invention, even when the disc substrate is being washed by the washing brush, the pressing roll is driven in contact with the transporting roller at a portion other than the disc substrate contact portion,
Therefore, a special drive means for the pressing roller is not required, and moreover, the transport speed and the transport direction of the disc substrate can be maintained at a predetermined level. Further, in the third aspect of the invention, the drying is uniform and contamination is not caused. There is an effect that there is no re-adhesion of the object, and the device for changing the direction of the surface of the disk substrate from horizontal to vertical is relatively simple and the time required for this conversion can be obtained in a short time. are doing.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram of an arrangement of respective components of a disk substrate cleaning apparatus according to an embodiment of the present invention, FIG. 2 is a perspective view showing a configuration of a substrate insertion portion of FIG. 1, and FIG. 3 is FIG. FIG. 4 is a structural perspective view showing the drive structure of the transport roller of FIG. 4, FIG. 4 is a structural perspective view showing the structure of the spray cleaning section of FIG. 1, and FIG.
FIG. 6A is a configuration perspective view showing the configuration of the inner surface and outer peripheral surface and the outer peripheral surface cleaning section, FIG. 6A is a configuration perspective view showing the configuration of the surface cleaning section by the disc brush in FIG. 1, and FIG. FIG. 6C is a perspective view showing the configuration of the surface cleaning section using a roll brush in the figure, FIG. 6C is a perspective view showing the outer shape of the disc brush shown in FIG. 6A, and FIG. 7 is a detailed perspective view showing the configuration of FIG. 6A.
FIG. A is a detailed perspective view of the configuration of FIG. 6B, and FIG. 8B is FIG. 8A.
8C is a perspective view showing the outer shape of the roll brush, FIG. 8C is a side view showing the relationship between the carrying roller, the pressing roller, the disc brush and the roll brush of FIG. 1, and FIG. 8D is the carrying roller and the pressing roller of FIG. 8C. Fig. 9 is a state diagram of the pressing roller when the disc substrate is inserted between the disc substrate, and Fig. 9, Fig. 9 is a configuration explanatory diagram of the spray cleaning unit in Fig. 1, and Fig. 10 is a cassette for accommodating the disc substrate in Fig. 1 and its elevation. , A schematic side view showing a rotated state, Fig. 11A
Is a perspective view of a schematic configuration of the pure water immersion pulling-up and drying section of FIG.
11B is a partial front view of the disc holder of FIG. 11A, FIG.
FIG. C is a side view of FIG. 1B, and FIG. 12 is a configuration perspective view showing a pressing roller driving device in a conventional disk substrate cleaning device. (1) …… Board insertion part, (2) …… Spray cleaning part,
(3) …… Brush scrubbing area on the inner and outer surface of the hole,
(4) …… Disk brush surface cleaning section, (5) …… Roll brush cleaning section, (6) …… Disk brush surface cleaning section, (7) …… Roll brush cleaning section, (8) …… Roll brush cleaning section Section, (9) …… Spray cleaning section, (10) ……
Accommodating the disc substrate in the cassette and rotating the cassette,
(11) …… Ultrasonic cleaning part, (12) …… High temperature pure water dipping / pulling up and drying part, (13) …… Substrate unloading part, (21) …… Disk substrate, (22) …… Transport roller, (27) …… Spray nozzle, (31) …… Sponge brush, (34) …… Disk brush, (35) …… Roll brush, (39) …… Cassette, (44) …… Pure water tank. In each drawing, the same reference numerals indicate the same or corresponding parts.

Continuation of the front page (56) References Japanese Patent Laid-Open No. 2-14443 (JP, A) Actually open 61-68318 (JP, U) Actually open 62-69891 (JP, U)

Claims (9)

[Claims] 1. A transport roller for horizontally transporting a disk substrate, a side surface cleaning brush for cleaning the hole side surface and outer peripheral surface of the disk substrate, a surface cleaning brush for cleaning the surface of the disk substrate, and a spray cleaning roller. It has a spray nozzle, pure water for immersing and cleaning the disk substrate, a pure water tank, and an ultrasonic cleaning device, and a drying device for immersing the disk substrate in the pure water with its surface vertical and then drying it while pulling it up. An apparatus for cleaning a disk substrate, comprising: 2. The disk substrate cleaning apparatus according to claim 1, wherein the surface cleaning brush for the disk substrate is provided on the upper and lower surfaces of the disk substrate in the middle of the carrying roller. 3. A brush for cleaning the surface of a disk substrate, wherein the brush is configured to bring an end surface of the rotating cylindrical brush into contact with the disk substrate, and the cylindrical surface of the rotating cylindrical brush serves as the disk substrate. The cleaning apparatus for a disk substrate according to claim 2, comprising two types of brushes, which are brushes configured to come into contact with each other. 4. A spray nozzle for spray cleaning is provided above and below a disk substrate which is being transported horizontally, and is set so as to spray in a direction opposite to the traveling direction of the disk substrate. Claim 1st
Item 5. A disk substrate cleaning device according to any one of items 1 to 3. 5. The pure water for immersing the disk substrate is 50 to 95 ° C.
The cleaning apparatus for a disk substrate according to any one of claims 1 to 4, which is pure water. 6. The drying device has a suspending device configured so that the dipping of the disc substrate in pure water and the vertical pulling up can be performed by suspending the disc substrate while being locked in the hole of the disc substrate. The cleaning apparatus for a disk substrate according to any one of claims 1 to 5, wherein 7. A disc substrate cleaning device comprising a transport roller for transporting a disc substrate in a horizontal direction and a surface cleaning brush for cleaning the surface of the disc substrate in the middle of the transport roller. A disc substrate cleaning apparatus, wherein a pressing roller made of a sponge roll which is in contact with the transport roller and freely rotates is provided above and below the transport roller provided with the surface cleaning brush. 8. A transport roller for transporting a disk substrate in a horizontal direction, a side surface and a surface cleaning brush for cleaning the inner side surface, the outer peripheral surface and the surface of the hole of the disk substrate, and the surface of the disk substrate vertical in pure water. A cleaning device for a disk substrate having a drying device for immersing and pulling it in to dry it, the cleaning device being provided between the cleaning brush and the drying device, and sequentially stacking the disk substrates with a gap therebetween. And a cassette provided with a turning device configured to convert the mounted state of the stored disk substrate from the horizontal direction to the vertical direction, and A disk substrate cleaning device, characterized in that the disk substrate is held in a wet state. 9. An apparatus for holding a disk substrate in a cassette in a wet state, before and after the cassette is rotated so as to convert the mounted state of the disk substrate from a horizontal direction to a vertical direction, 9. The cleaning apparatus for a disk substrate according to claim 8, which is a drying prevention spray that sprays water from two or more directions so that water is applied to the surface.