JPH0816647B2 - Particle counter - Google Patents
Particle counterInfo
- Publication number
- JPH0816647B2 JPH0816647B2 JP2137467A JP13746790A JPH0816647B2 JP H0816647 B2 JPH0816647 B2 JP H0816647B2 JP 2137467 A JP2137467 A JP 2137467A JP 13746790 A JP13746790 A JP 13746790A JP H0816647 B2 JPH0816647 B2 JP H0816647B2
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- Prior art keywords
- flow rate
- fluid
- gas
- optical cell
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は微粒子計に関し、例えば気体中の微粒子を検
出する微粒子計に適用し得る。DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to a fine particle meter, and can be applied to, for example, a fine particle meter for detecting fine particles in a gas.
本発明は、微粒子計において、流路部を密閉箱で密閉
することにより、安全に所望の流体中の微粒子を測定す
ることができる。INDUSTRIAL APPLICABILITY The present invention can safely measure fine particles in a desired fluid by sealing the flow path part in a fine particle meter in a closed box.
従来、この種の微粒子計において、例えば石英ガラス
等の透明部材で流体の流路（以下光学セルと呼ぶ）を形
成し、当該光学セル内を流れる流体中の微粒子の濃度及
び粒径を光学的手法を用いて測定し得るようになされた
ものがある。Conventionally, in this type of fine particle meter, a fluid passage (hereinafter referred to as an optical cell) is formed by a transparent member such as quartz glass, and the concentration and particle diameter of the fine particles in the fluid flowing in the optical cell are optically determined. There are some that are designed to be measurable using a method.
すなわち光学セル内に流体を流した状態で、当該光学
セルに光ビームを照射する。That is, the optical cell is irradiated with a light beam while the fluid is flowing in the optical cell.
このようにすれば、光学セルの透過光及び散乱光にお
いては、流体中の微粒子の粒径に応じて光量が変化す
る。With this configuration, the amount of light transmitted through the optical cell and scattered light changes depending on the particle size of the fine particles in the fluid.
従つて当該透過光又は散乱光の光量を検出することに
より、高い精度で流体中の微粒子を測定することができ
る。Therefore, by detecting the light amount of the transmitted light or the scattered light, the fine particles in the fluid can be measured with high accuracy.
ところで、この種の微粒子計でアルシン（AsO3）、ホ
スフイン（PH3）等の有毒ガスや、シラン（SiH4）のよ
うな反応性の高い気体中の微粒子を測定したい場合があ
る。By the way, you may want to measure fine particles in toxic gases such as arsine (A s O 3 ) and phosphine (PH 3 ) or highly reactive gases such as silane (S i H 4 ) with this type of fine particle meter. is there.
ところが光学セルにおいては、被測定対象の異常加圧
や衝撃により破損する場合があり、この場合被測定対象
の気体が漏れ出し、重大な事故につながるおそれがあつ
た。However, the optical cell may be damaged by abnormal pressurization or impact of the object to be measured, in which case the gas of the object to be measured may leak out, which may lead to a serious accident.
本発明は以上の点を考慮してなされたもので、種々の
気体中の微粒子を安全に測定することができる微粒子計
を提案しようとするものである。The present invention has been made in consideration of the above points, and is intended to propose a fine particle meter capable of safely measuring fine particles in various gases.
かかる課題を解決するため本発明においては、光学セ
ル６内に測定対象となる流体を導入し、照明光学系７に
より当該流体に光ビームを照射し、光ビームの透過光又
は散乱光を受光光学系11で受光し、透過光量又は散乱光
量に応じて当該受光光学系11から送出される検出信号に
基づいて流体中の微粒子を検出する微粒子計１におい
て、光学セル７、照明光学系７及び受光光学系11を密閉
する密閉箱40と、光学セル７に流入する流体の流量を測
定し、当該流量に応じた第１の流量検出信号を送出する
第１の流量計24と、光学セル７から排出される流体の流
量を測定し、当該流量に応じた第２の流量検出信号を送
出する第２の流量計30と、第１の流量計24の上流側に設
けられ、外部からの信号によつて光学セル７に通じる流
体の流路を開閉動作する電磁バルブ22と、第１及び第２
の流量検出信号を比較し、第１の流量検出信号が第２の
流量検出信号より大きいとき、電磁バルブ22を閉動作さ
せる信号を送出するリーク検出器32とを設けるようにす
る。In order to solve such a problem, in the present invention, a fluid to be measured is introduced into the optical cell 6, and the illumination optical system 7 irradiates the fluid with a light beam, and the transmitted light or scattered light of the light beam is received by an optical receiver. In the fine particle meter 1 which receives the light by the system 11 and detects the fine particles in the fluid based on the detection signal sent from the light receiving optical system 11 according to the transmitted light amount or the scattered light amount, the optical cell 7, the illumination optical system 7 and the light receiving device From the sealed box 40 that seals the optical system 11, the first flow meter 24 that measures the flow rate of the fluid flowing into the optical cell 7 and sends the first flow rate detection signal corresponding to the flow rate, and the optical cell 7 The second flow meter 30 which measures the flow rate of the discharged fluid and sends out the second flow rate detection signal corresponding to the flow rate, and the first flow meter 24 are provided on the upstream side, and are used as signals from the outside. Therefore, the electric power for opening and closing the flow path of the fluid leading to the optical cell 7 A valve 22, first and second
And a leak detector 32 for sending a signal for closing the electromagnetic valve 22 when the first flow rate detection signal is larger than the second flow rate detection signal.
流体の流路を形成する流路部20を密閉箱40で密閉する
と共に、リール発生時電磁バルブを閉動作させることに
より、密閉箱40から外部への流体の流出を確実に防止す
ることができる。By closing the flow path portion 20 forming the flow path of the fluid with the closed box 40 and closing the electromagnetic valve when the reel is generated, it is possible to reliably prevent the fluid from flowing out from the closed box 40 to the outside. .
以下図面について、本発明の一実施例を詳述する。 An embodiment of the present invention will be described in detail with reference to the drawings.
第２図において、１は全体として微粒子計を示し、レ
ーザ光源２から射出された光ビームLA1をレンズ４を介
して光学セル６に照射することにより、レーザ光源２、
レンズ４で照明光学系７を構成し、被測定対象に光ビー
ムLA1を照射する。In FIG. 2, reference numeral 1 denotes a fine particle meter as a whole, and by irradiating the optical cell 6 through the lens 4 with the light beam LA1 emitted from the laser light source 2, the laser light source 2,
The lens 4 constitutes the illumination optical system 7, and the object to be measured is irradiated with the light beam LA1.
光ビームLA1の光軸上には、光学セル６を間に挟んで
遮光板でなる光トラツプ８が配置され、光学セル６を透
過する直進光を遮光する。On the optical axis of the light beam LA1, an optical trap 8 made of a light shielding plate is arranged with the optical cell 6 sandwiched therebetween, and blocks the straight light passing through the optical cell 6.
さらに微粒子計１は、光学セル６で散乱された散乱光
LA2のみ選択的にレンズ10を介して受光素子12に集光
し、これにより光トラツプ８、レンズ10及び受光素子12
で散乱光LA2を受光する受光光学系11を構成する。Further, the fine particle meter 1 uses the scattered light scattered by the optical cell 6.
Only LA2 is selectively focused on the light receiving element 12 via the lens 10, and thus the optical trap 8, the lens 10 and the light receiving element 12 are collected.
Constitutes a light receiving optical system 11 for receiving the scattered light LA2.
これにより微粒子計１において、受光素子12の出力信
号を所定の信号処理回路で処理することにより、光学セ
ル６内を流れる気体の微粒子を測定し得るようになされ
ている。Thus, in the fine particle meter 1, the output signal of the light receiving element 12 is processed by a predetermined signal processing circuit to measure fine particles of gas flowing in the optical cell 6.
ここで光学セル６は石英ガラスで形成され、第１図に
示すように、導入部16及び排出部18と共に流路部20を形
成するようになされている。Here, the optical cell 6 is made of quartz glass and, as shown in FIG. 1, forms a flow passage portion 20 together with the introduction portion 16 and the discharge portion 18.
すなわち流路部20は、それぞれＯリングを間に挟ん
で、導入部16及び排出部18で両端から押圧した状態で光
学セル６を保持し、これにより導入部16から被測定対象
を導入して気体流を形成し、当該気体を排出部18から排
出するようになされている。That is, the flow path portion 20 holds the optical cell 6 in a state of being pressed from both ends by the introduction portion 16 and the discharge portion 18 with the O-ring sandwiched therebetween, whereby the measurement target is introduced from the introduction portion 16. A gas flow is formed and the gas is discharged from the discharge part 18.
すなわち導入部16は、ステンレス製の管状部材でな
り、バルブ22、流量検出器24、導入導管26を順次介して
被測定対象の気体を導入し、光学セル６に供給する。That is, the introduction part 16 is made of a stainless steel tubular member, and introduces the gas to be measured into the optical cell 6 through the valve 22, the flow rate detector 24, and the introduction conduit 26 in this order.
排出部18は、導入部16と同様にステンレス製の管状部
材でなり、光学セル６から流入する被測定対象の気体を
排出導管28、流量検出器30を介して送出する。The discharge part 18 is a tubular member made of stainless steel similarly to the introduction part 16, and discharges the gas to be measured flowing from the optical cell 6 through the discharge conduit 28 and the flow rate detector 30.
流量検出器24及び30は、当該流量検出器24及び30を通
過する気体の流量を検出し、当該検出結果をリーク検出
器32に出力する。The flow rate detectors 24 and 30 detect the flow rate of the gas passing through the flow rate detectors 24 and 30, and output the detection result to the leak detector 32.
従つて、リーク検出器32においては、流量検出器24及
び30の検出結果に基づいて、微粒子計１に流入する気体
の流量と、微粒子計１から排出される気体の流量を検出
し得、これにより光学セル６が破損した場合等の気体の
リークを検出することができる。Therefore, the leak detector 32 can detect the flow rate of the gas flowing into the fine particle meter 1 and the flow rate of the gas discharged from the fine particle meter 1 based on the detection results of the flow rate detectors 24 and 30. This makes it possible to detect a gas leak such as when the optical cell 6 is damaged.
リーク検出器32は、気体のリークが検出されると、バ
ルブ開閉器34に制御信号を出力し、これによりバルブ22
を閉制御して気体の供給を停止し、引き続き気体がリー
クしないようにする。When a leak of gas is detected, the leak detector 32 outputs a control signal to the valve switch 34, which causes the valve 22 to open.
Is closed to stop the gas supply and prevent the gas from leaking continuously.
さらにこの実施例において、流路部20は、照明光学系
７、受光光学系11と共にステンレス製の密閉箱40で密閉
され、これによりリークしてもリークした気体が外部に
流出しないようになされている。Further, in this embodiment, the flow path portion 20 is sealed together with the illumination optical system 7 and the light receiving optical system 11 by the stainless steel closed box 40, so that even if leaked, the leaked gas does not flow out. There is.
すなわち密閉箱40は、導入導管42を介して不活性ガス
でなる窒素ガスを導入し得るようになされ、これにより
被測定対象の気体を外部から二重に密閉すると共に、当
該密閉箱40内を窒素ガスでパージし得るようになされて
いる。That is, the sealed box 40 is configured to be able to introduce a nitrogen gas composed of an inert gas through the introduction conduit 42, thereby double sealing the gas to be measured from the outside, and the inside of the sealed box 40. It can be purged with nitrogen gas.
従つて、例えばホスフインのように、毒性の強い気体
が流路部20からリークしても、当該密閉箱40で外部への
リークを防止し得、これにより重大な人身事故の発生を
有効に回避することができる。Therefore, even if a highly toxic gas such as phosphine leaks from the flow path portion 20, the sealed box 40 can prevent the leak to the outside, thereby effectively avoiding the occurrence of a serious personal injury. be able to.
さらにシランガスのように、反応性の高い気体が流路
部20からリークしても、窒素ガスでパージすることによ
り、当該気体の反応、引火を防止し得、爆発事故等の発
生を有効に回避することができる。Furthermore, even if a highly reactive gas such as silane gas leaks from the flow path 20, by purging with nitrogen gas, the reaction and ignition of the gas can be prevented, and the occurrence of an explosion accident, etc. can be effectively avoided. can do.
さらに密閉箱40は、排出導管44を介して、リークした
気体を例えばスクラバ等の処理システム系に排出し得る
ようになされ、これにより毒性の強い気体等を安全に処
理し得るようになされている。Further, the closed box 40 is configured so that the leaked gas can be discharged to a processing system system such as a scrubber via a discharge conduit 44, and thereby a highly toxic gas or the like can be safely processed. .
かくして密閉箱40で流路部20を密閉することにより、
被測定対象の気体を外部から二重に密閉すると共に、当
該密閉箱40内を窒素ガスでパージし得、光学セル６が破
損した場合でも、事故の発生を有効に回避することがで
きる。Thus, by sealing the flow path 20 with the sealed box 40,
The gas to be measured can be double sealed from the outside, and the inside of the sealed box 40 can be purged with nitrogen gas, so that even if the optical cell 6 is damaged, the occurrence of an accident can be effectively avoided.
さらに光学セル６が破損した場合に限らず、光学セル
６、導入部16及び排出部18の接続部分から気体が漏れ出
した場合も、事故の発生を有効に回避することができ
る。Furthermore, not only when the optical cell 6 is damaged, but also when gas leaks from the connecting portion of the optical cell 6, the introduction part 16 and the discharge part 18, the occurrence of an accident can be effectively avoided.
従つてその分安全に被測定対象の微粒子を測定するこ
とができる。Therefore, the fine particles to be measured can be safely measured accordingly.
以上の構成において、被測定対象でなる気体を導入部
16から導入した後、光学セル６を通して排出部18から排
出する。In the above configuration, the gas to be measured is introduced into the introduction part.
After being introduced from 16, it is discharged from the discharge part 18 through the optical cell 6.
このとき密閉箱40で流路部20全体を密閉し、密閉箱40
内を窒素ガスでパージすることにより、流路部20から毒
性の強い気体がリークしても、外部への流出を防止し
得、人身事故等の発生を未然に防止することができる。At this time, the entire flow path section 20 is hermetically sealed with the hermetically sealed box 40.
By purging the inside with nitrogen gas, even if a highly toxic gas leaks from the flow path portion 20, it can be prevented from flowing out, and the occurrence of a personal injury or the like can be prevented.
さらに、反応性の高い気体がリークした場合でも、気
体の反応、引火を防止し得、爆発事故等の発生を有効に
回避することができる。Furthermore, even if a highly reactive gas leaks, the reaction and ignition of the gas can be prevented, and the occurrence of an explosion accident or the like can be effectively avoided.
以上の構成によれば、流路部20を密閉箱40で密閉する
ことにより、被測定対象の気体を外部から二重に密閉す
ると共に、当該密閉箱40内を窒素ガスでパージし得、流
路部20から被測定対象の気体がリークした場合でも、事
故の発生を有効に回避することができる。According to the above configuration, by sealing the flow path unit 20 with the sealed box 40, the gas to be measured is double sealed from the outside, and the inside of the sealed box 40 can be purged with nitrogen gas, Even if the gas to be measured leaks from the road portion 20, the occurrence of an accident can be effectively avoided.
従つて、その分安全に微粒子を測定することができ
る。Therefore, the fine particles can be safely measured accordingly.
なお上述の実施例においては、窒素ガスで密閉箱40内
をパージする場合について述べたが、本発明はこれに限
らず、アルゴンガス等の不活性ガスで満たすようにして
もよい。Although the case where the inside of the closed box 40 is purged with nitrogen gas has been described in the above embodiment, the present invention is not limited to this, and may be filled with an inert gas such as argon gas.
さらに被測定対象の気体が空気と反応しない気体の場
合、密閉箱40内を空気で密閉するようにしてもよい。Furthermore, when the gas to be measured is a gas that does not react with air, the inside of the closed box 40 may be closed with air.
さらに上述の実施例においては、石英ガラスで光学セ
ルを形成した場合について述べたが、本発明はこれに限
らず、コランダム、サフアイヤ等の透明部材で形成する
場合に広く適用することができる。Further, in the above-mentioned embodiments, the case where the optical cell is formed of quartz glass has been described, but the present invention is not limited to this, and can be widely applied to the case of forming the transparent member such as corundum and sapphire.
さらに上述の実施例においては、ステンレス材で導入
部16、排出部18、密閉箱40を形成する場合について述べ
たが、本発明はこれに限らず、例えばアルミ合金、イン
コネルなどの材料で形成する場合に広く適用することが
できる。Further, in the above-described embodiment, the case where the introduction part 16, the discharge part 18, and the closed box 40 are formed of stainless steel has been described, but the present invention is not limited to this, and is formed of a material such as an aluminum alloy or Inconel. It can be widely applied in cases.
さらに上述の実施例においては、気体中の微粒子を測
定する場合について述べたが、本発明はこれに限らず、
気体、液体でなる流体中の微粒子を測定する場合に広く
適用することができる。Furthermore, in the above-mentioned embodiment, the case of measuring fine particles in a gas is described, but the present invention is not limited to this,
It can be widely applied when measuring fine particles in a fluid composed of gas or liquid.
すなわち、半導体プロセスで用いられる材料ガスのう
ちトリメチルガリウムやトリメチルアルミニウムなどの
有害金属、トリクロルシランなどは、常温では液体であ
る。That is, among the material gases used in the semiconductor process, harmful metals such as trimethylgallium and trimethylaluminum, and trichlorosilane are liquid at room temperature.
従つてこのような高い反応性を有する試料の微粒子を
検出する場合、窒素ガスで密閉箱40内をパージすること
により、安全に微粒子を測定することができる。Therefore, when detecting fine particles of a sample having such high reactivity, the fine particles can be safely measured by purging the inside of the closed box 40 with nitrogen gas.
さらに上述の実施例においては、散乱光LA2の光量を
検出する微粒子計に本発明を適用した場合について述べ
たが、本発明はこれに限らず、透過量の光量を検出する
微粒子計、さらには回折光を検出する微粒子にも広く適
用することができる。Furthermore, in the above-mentioned embodiment, the case where the present invention is applied to the fine particle meter for detecting the light amount of the scattered light LA2 is described, but the present invention is not limited to this, and the fine particle meter for detecting the light amount of the transmitted amount, further, It can also be widely applied to fine particles that detect diffracted light.
上述のように本発明によれば、光学セル、照明光学系
及び受光光学系でなる流路部を密閉箱内に密閉すると共
に、光学セルの流入側及び流出側位置に設けた第１及び
第２の流量計の検出出力を比較することによつて流路部
におけるリークの発生を検出したとき、第１の流量計の
上流側に設けた電磁バルブを閉動作させることにより、
密閉箱内へのその後の被測定対象のリークをさせないよ
うにし、その結果測定対象である流体を密閉箱から外部
に流出させないようにしながら当該流体内の微粒子を一
段と安全に測定することができるようにし得る。As described above, according to the present invention, the flow path portion including the optical cell, the illumination optical system, and the light receiving optical system is sealed in the closed box, and the first and the first positions are provided at the inflow side and the outflow side positions of the optical cell. When the occurrence of a leak in the flow path portion is detected by comparing the detection outputs of the second flow meter, by closing the electromagnetic valve provided on the upstream side of the first flow meter,
Prevent the subsequent leakage of the measured object into the closed box, and as a result, prevent the fluid to be measured from flowing out of the closed box so that the particles in the fluid can be measured more safely. You can
第１図は本発明の一実施例による微粒子計を示す略線
図、第２図はその測定系の概略を示す略線図である。 １……微粒子計、６……光学セル、７……照明光学系、
11……受光光学系、16……導入部、18……排出部、20…
…流路部。FIG. 1 is a schematic diagram showing a fine particle meter according to an embodiment of the present invention, and FIG. 2 is a schematic diagram showing an outline of a measuring system thereof. 1 ... Particle meter, 6 ... Optical cell, 7 ... Illumination optical system,
11 ... Receiving optical system, 16 ... Introducing section, 18 ... Ejecting section, 20 ...
… Flow path.
Claims (1)
し、照明光学系により当該流体に光ビームを照射し、上
記光ビームの透過光又は散乱光を受光光学系で受光し、
透過光量又は散乱光量に応じて当該受光光学系から送出
される検出信号に基づいて上記流体中の微粒子を検出す
る微粒子計において、 上記光学セル、上記照明光学系及び上記受光光学系を密
閉する密閉箱と、 上記光学セルに流入する上記流体の流量を測定し、当該
流量に応じた第１の流量検出信号を送出する第１の流量
計と、 上記光学セルから排出される上記流体の流量を測定し、
当該流量に応じた第２の流量検出信号を送出する第２の
流量計と、 上記第１の流量計の上流側に設けられ、外部からの信号
によつて上記光学セルに通じる上記流体の流路を開閉動
作する電磁バルブと、 上記第１及び第２の流量検出信号を比較し、上記第１の
流量検出信号が上記第２の流量検出信号より大きいと
き、上記電磁バルブを閉動作させる信号を送出するリー
ク検出器と を具えることを特徴とする微粒子計。1. A fluid to be measured is introduced into an optical cell, an illumination optical system irradiates the fluid with a light beam, and transmitted light or scattered light of the light beam is received by a light receiving optical system,
In a fine particle meter that detects fine particles in the fluid based on a detection signal sent from the light receiving optical system according to the amount of transmitted light or scattered light, a hermetically sealing the optical cell, the illumination optical system, and the light receiving optical system. A box, a first flow meter that measures the flow rate of the fluid flowing into the optical cell, and sends out a first flow rate detection signal corresponding to the flow rate, and a flow rate of the fluid discharged from the optical cell. Measure
A second flow meter that sends out a second flow rate detection signal corresponding to the flow rate, and a flow of the fluid that is provided upstream of the first flow meter and that communicates with the optical cell by a signal from the outside. A signal that compares the electromagnetic valve that opens and closes the passage with the first and second flow rate detection signals, and closes the electromagnetic valve when the first flow rate detection signal is greater than the second flow rate detection signal. A particle detector comprising: a leak detector for transmitting
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2137467A JPH0816647B2 (en) | 1990-05-28 | 1990-05-28 | Particle counter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2137467A JPH0816647B2 (en) | 1990-05-28 | 1990-05-28 | Particle counter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0431741A JPH0431741A (en) | 1992-02-03 |
| JPH0816647B2 true JPH0816647B2 (en) | 1996-02-21 |
Family
ID=15199291
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2137467A Expired - Fee Related JPH0816647B2 (en) | 1990-05-28 | 1990-05-28 | Particle counter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0816647B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115791542A (en) * | 2022-10-13 | 2023-03-14 | 邯郸钢铁集团有限责任公司 | Method and device for externally arranging particle size meter flowmeter |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5551749U (en) * | 1978-10-04 | 1980-04-05 |
-
1990
- 1990-05-28 JP JP2137467A patent/JPH0816647B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0431741A (en) | 1992-02-03 |
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