JPH0818844B2 - Method for manufacturing base material for optical fiber - Google Patents
Method for manufacturing base material for optical fiberInfo
- Publication number
- JPH0818844B2 JPH0818844B2 JP23627087A JP23627087A JPH0818844B2 JP H0818844 B2 JPH0818844 B2 JP H0818844B2 JP 23627087 A JP23627087 A JP 23627087A JP 23627087 A JP23627087 A JP 23627087A JP H0818844 B2 JPH0818844 B2 JP H0818844B2
- Authority
- JP
- Japan
- Prior art keywords
- glass rod
- glass
- base material
- optical fiber
- rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000463 material Substances 0.000 title claims description 17
- 239000013307 optical fiber Substances 0.000 title claims description 13
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 238000000034 method Methods 0.000 title description 9
- 239000011521 glass Substances 0.000 claims description 66
- 239000010419 fine particle Substances 0.000 claims description 8
- 238000003486 chemical etching Methods 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 9
- 239000002245 particle Substances 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 5
- 239000000428 dust Substances 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 229910003902 SiCl 4 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 230000002194 synthesizing effect Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/0148—Means for heating preforms during or immediately prior to deposition
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01486—Means for supporting, rotating or translating the preforms being formed, e.g. lathes
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は光フアイバ用母材の製造方法に関する。TECHNICAL FIELD The present invention relates to a method for producing a base material for optical fibers.
光フアイバ用母材の製造方法としてはVAD法、MCVD
法、OVPO法などがある。VAD method and MCVD are used as the manufacturing method of the base material for optical fiber.
Law, OVPO law, etc.
OVPO法は、円柱状または円筒状のガラス棒をバーナと
相対的に移動する間に、ガラス棒に対してSiCl4などの
ガラス原料を上記バーナから酸水素炎とともに吹き出
し、火炎中の加水分解により生成するガラス微粒子をガ
ラス棒の外周に堆積させるものである。OVPO method, while the cylindrical or cylindrical glass rod is moved relatively to the burner, a glass raw material such as SiCl 4 is blown out from the burner together with an oxyhydrogen flame to the glass rod by hydrolysis in the flame. The generated glass particles are deposited on the outer circumference of the glass rod.
このように外付けを終了した光フアイバ母材は脱水、
透明化工程を経て、線引きにより光フアイバが製造され
る。The optical fiber base material that has been externally attached is dehydrated,
An optical fiber is manufactured by drawing through a transparentizing process.
特開昭62−70243号公報には、引上軸の回転チヤツク
にガラス棒の上端を支持し、回転しながら引上げる間に
ガラス棒の外周にガラス微粒子を堆積するもので、該堆
積工程に先立ち、ガラス棒の光フアイバとしての有効部
分の両端もしくは両端に近い部分の振れ回り量を修正す
る方法が記載されている。即ち、修正位置に引上軸の軸
芯と精度よく一致させたチヤツク等の修正治具を配置
し、修正治具の直上にハンドバーナを置いてガラス棒を
加熱硬化させながら修正治具によりガラス棒の振れ回り
量を少なく修正するものである。修正後はこれらを取り
除き、ガラス微粒子の堆積を行なう。In Japanese Patent Laid-Open No. 62-70243, the upper end of a glass rod is supported by a rotary chuck of a pulling shaft, and glass particles are deposited on the outer periphery of the glass rod while the glass rod is being pulled while rotating. Prior to that, a method of correcting the whirling amount at both ends or a portion close to both ends of an effective portion of the glass rod as an optical fiber is described. In other words, place a repair jig such as a chuck that accurately matches the axis of the pulling shaft at the repair position, place a hand burner directly above the repair jig, and heat-harden the glass rod while the glass is repaired by the repair jig. The amount of whirling of the rod is corrected to a small amount. After the correction, these are removed and glass fine particles are deposited.
上記の方法は、ガラス微粒子の堆積工程においてガラ
ス棒の軸芯を保つものではない。仮に、上記修正治具を
付けたままガラス棒を回転させ、引上げながらガラス微
粒子を堆積すれば軸芯の振れ回りを防ぐことができる
が、光フアイバとしての有効部分も直接接触することに
なり、ガラス棒表面にキズやゴミを付着するおそれがあ
る。そのようなキズやゴミは光フアイバの欠陥の原因と
なる。The above method does not maintain the axis of the glass rod in the step of depositing the glass particles. If the glass rod is rotated while the correction jig is attached and glass particles are deposited while being pulled up, whirling of the shaft center can be prevented, but the effective portion as an optical fiber also comes into direct contact. There is a risk of scratches and dust adhering to the surface of the glass rod. Such scratches and dust cause defects in the optical fiber.
そこで、本発明は、上記の欠点を解消し、ガラス棒の
下方を機械的な接触を介して軸芯の振れ回りを防止しな
がら、ガラス微粒子を堆積するガラス棒表面を清浄化し
て光フアイバ用母材中にキズやゴミを持ち込まないよう
にした該母材の製造方法を提供しようとするものであ
る。Therefore, the present invention solves the above-mentioned drawbacks, and prevents the whirling of the shaft core through mechanical contact below the glass rod, while cleaning the surface of the glass rod on which glass particles are deposited to clean the surface of the glass rod. An object of the present invention is to provide a method for producing a base material, which prevents scratches and dust from being introduced into the base material.
本発明は円柱状または円筒状のガラス棒の上端を回転
軸上に固定し、これを回転しながら上方に移動する間に
上記ガラス棒の外周にガラス微粒子を堆積する光フアイ
バ用母材の製造方法において、ガラス棒の下方を機械的
な接触を介して回転及び移動可能に支持し、かつ、該支
持手段の直上のガラス棒表面に化学エツチングガスを吹
き付け、機械的接触にともなうキズ等を除いた後に、ガ
ラス微粒子を堆積することを特徴とする光フアイバ用母
材の製造方法である。INDUSTRIAL APPLICABILITY The present invention manufactures a base material for optical fibers in which the upper end of a cylindrical or cylindrical glass rod is fixed on a rotating shaft and glass fine particles are deposited on the outer periphery of the glass rod while moving upward while rotating the glass rod. In the method, a lower portion of a glass rod is rotatably and movably supported through mechanical contact, and a chemical etching gas is sprayed on the surface of the glass rod directly above the supporting means to remove scratches and the like caused by mechanical contact. After that, it is a method for producing a base material for optical fibers, which comprises depositing glass fine particles.
第１図は本発明の実施状況を説明するための図であ
り、第２図はガラス棒下方の機械的支持手段を例示した
断面図である。FIG. 1 is a view for explaining an embodiment of the present invention, and FIG. 2 is a cross-sectional view illustrating a mechanical support means below a glass rod.
第１図の装置では、ガラス棒１は引上軸に結合した回
転チヤツク２により上端が支持され、反応容器３を上下
に貫通するように配置される。反応容器３内下方には、
ガラス原料と酸素−水素ガスを供給してガラス微粒子を
合成するための合成用バーナ４を設け、該バーナに対向
する位置に排気管５を設ける。反応容器３外下方には、
ガラス棒１表面の清浄化処理室６を付設し、該処理室６
にはガラス棒１表面に化学エツチングガスを吹き付ける
ためのノズル７及び該ノズル７に対向して排気管８を設
ける。該処理室６の外にはガラス棒の振れ回り防止用の
機械的支持手段９を付設する。該支持手段の具体例を第
２図にみると、同図（ａ）は２つ割り型のチヤツク11で
ガラス棒１を支持するものであり、同図（ｂ）は２つの
ローラ12で同様に支持するものである。これらの支持手
段は引上軸の軸芯と正確に一致するように固定されたも
ので、ガラス棒１はこの支持手段の中で回転し、摺動し
て引上げ可能に支持される。なお支持手段は上記の機能
を備えていればよく、第２図のものに限定されるもので
はない。これらの支持手段はガラス棒と直接接触する面
をテフロン、カーボン等の材料で構成することにより、
キズの発生をできるだけ抑制することが好ましい。In the apparatus shown in FIG. 1, the glass rod 1 has its upper end supported by a rotary chuck 2 connected to a pulling shaft, and is arranged so as to vertically penetrate a reaction vessel 3. In the lower part of the reaction vessel 3,
A synthesis burner 4 for synthesizing glass fine particles by supplying a glass raw material and oxygen-hydrogen gas is provided, and an exhaust pipe 5 is provided at a position facing the burner. Below the outside of the reaction vessel 3,
A cleaning treatment chamber 6 for the surface of the glass rod 1 is attached, and the treatment chamber 6 is attached.
Is provided with a nozzle 7 for spraying a chemical etching gas onto the surface of the glass rod 1 and an exhaust pipe 8 facing the nozzle 7. Outside the processing chamber 6, a mechanical supporting means 9 for preventing whirling of the glass rod is attached. A concrete example of the supporting means is shown in FIG. 2 (a) in which the glass rod 1 is supported by a split type chuck 11, and FIG. 2 (b) is similar in the case of two rollers 12. To support. These supporting means are fixed so as to be exactly aligned with the axis of the pulling shaft, and the glass rod 1 is rotated in the supporting means and slidably supported so as to be able to be pulled up. The support means is not limited to the one shown in FIG. 2 as long as it has the above-mentioned function. These supporting means are made of a material such as Teflon or carbon for the surface that directly contacts the glass rod,
It is preferable to suppress the generation of scratches as much as possible.
次に、多孔質母材の製造手順を説明する。第１図
（ａ）は、製造初期を示すもので、ガラス棒１を回転チ
ヤツク２により回転させながら、合成ガスをバーナ４よ
り供給し、酸水素炎中で合成されたガラス微粒子をガラ
ス棒１の表面に堆積し、多孔質母材10を形成する。多孔
質母材10を所定直径にまで成長させながら徐々にガラス
棒１を上方に引上げる。ところで、ガラス棒１の下方の
支持手段は、できるだけキズの発生を回避するように設
計されているものの、完全に回避することは不可能であ
る。そこで、該支持手段に接触したガラス棒は上記引上
げにより清浄化処理室６に導入され、ノズル７により噴
出される化学エッチングガスによりガラス棒表面のキズ
やゴミを除き、清浄化した後反応容器３内に移され、ガ
ラス微粒子の堆積がなされる。第１図（ｂ）は堆積工程
の終期を示すものであり、ガラス棒１の外周に円筒状の
多孔質母材10が形成された状態を示したものである。Next, a procedure for manufacturing the porous base material will be described. FIG. 1 (a) shows an early stage of manufacturing, in which the glass rod 1 is rotated by the rotary chuck 2 while the synthetic gas is supplied from the burner 4 so that the glass fine particles synthesized in the oxyhydrogen flame are mixed with the glass rod 1. Is deposited on the surface of to form the porous base material 10. The glass rod 1 is gradually pulled upward while the porous base material 10 is grown to a predetermined diameter. By the way, the supporting means below the glass rod 1 is designed to avoid the occurrence of scratches as much as possible, but it is impossible to avoid it completely. Therefore, the glass rod in contact with the supporting means is introduced into the cleaning treatment chamber 6 by the above-mentioned pulling, and scratches and dust on the surface of the glass rod are removed by the chemical etching gas ejected from the nozzle 7, and the reaction container 3 is cleaned. It is moved to the inside and the glass particles are deposited. FIG. 1 (b) shows the final stage of the deposition process, and shows the state in which the cylindrical porous base material 10 is formed on the outer periphery of the glass rod 1.
なお、化学エツチングガスとしては、SF6,F2,CCl2F2,
C2F6,CF4,HF等を用いることができる。また、上記ガス
の分解を容易にするために必要に応じて加熱しつつエツ
チングガスを供給することもできる。このときのガラス
棒の温度は1000℃程度であり、ガラスの軟化点よりもか
なり低くい。As the chemical etching gas, SF 6 , F 2 , CCl 2 F 2 ,
C 2 F 6 , CF 4 , HF or the like can be used. Further, in order to facilitate the decomposition of the above gas, the etching gas can be supplied while being heated if necessary. At this time, the temperature of the glass rod is about 1000 ° C, which is considerably lower than the softening point of the glass.
第１図の装置を用いて直径15mmの石英ガラスロツドの
表面にガラス微粒子を堆積させた。下方の支持は第２図
（ａ）に示した２つ割り型のテフロン製のチヤツクを用
いた。ガラス微粒子合成用バーナにSiCl4を１／分、H
2を40／分、O2を40／分で供給しながら、上方に80m
m/時の移動速度で引上げた。この間、エツチングノズル
かあは、HFを100C.C./分で供給を続けた。得られた多孔
質母材を脱水し、透明一体化したところ、気泡の全くな
い高品質なガラスを得ることができた。Glass fine particles were deposited on the surface of a quartz glass rod having a diameter of 15 mm by using the apparatus shown in FIG. For the lower support, a Teflon chuck of the two-divided type shown in FIG. 2 (a) was used. Add 1 / min of SiCl 4 and H to the burner for synthesizing glass particles.
80m upward while supplying 2 at 40 / min and O 2 at 40 / min
It was pulled up at a moving speed of m / hour. During this period, the etching nozzle was continuously supplied with HF at 100 C.C./min. When the obtained porous base material was dehydrated and transparently integrated, high-quality glass without any bubbles could be obtained.
比較のために、エツチングガス用ノズルからガスの供
給を止めた点を除き、上記実施例と同じ製造条件で多孔
質母材を作り、透明一体化したところ、当初の石英ガラ
スロツド表面付近に全長にわたり微少気泡が多数発生し
ていた。For comparison, except that the supply of gas from the etching gas nozzle was stopped, a porous preform was made under the same manufacturing conditions as in the above example, and transparent integration was performed, and the entire length was near the original quartz glass rod surface. Many minute bubbles were generated.
本発明は上記構成を採用することにより、ガラス棒の
下方を機械的接触を介して振れ回りを防止しながら、該
接触にともなうガラス棒表面のキズ等を除いた反応容器
内で多孔質母材を形成することができるので、ガラス棒
が偏芯することもなく、かつ、ガラス棒表面にキズ等の
欠陥を有しない良質の光フアイバ母材を形成することが
できる。The present invention, by adopting the above-mentioned structure, prevents whirling underneath the glass rod through mechanical contact, and removes the scratches and the like on the surface of the glass rod due to the contact to form a porous base material in the reaction vessel. Since the glass rod can be formed, it is possible to form a high-quality optical fiber preform that does not cause eccentricity of the glass rod and has no defects such as scratches on the surface of the glass rod.
第１図（ａ）（ｂ）は本発明の実施手順を説明するため
の図であり、第２図（ａ）（ｂ）はその際使用するガラ
ス棒支持手段の例を示した図である。1 (a) and 1 (b) are views for explaining the procedure for carrying out the present invention, and FIGS. 2 (a) and 2 (b) are views showing an example of the glass rod supporting means used at that time. .
Claims (1)
転軸上に固定し、これを回転しながら上方に移動する間
に上記ガラス棒の外周にガラス微粒子を堆積する光フア
イバ用母材の製造方法において、ガラス棒の下方を機械
的な接触を介して回転及び移動可能に支持し、かつ、該
支持手段の直上のガラス棒表面に化学エツチングガスを
吹き付け機械的接触にともなうキズ等を除いた後に、ガ
ラス微粒子を堆積することを特徴とする光フアイバ用母
材の製造方法。1. A base material for an optical fiber, wherein the upper end of a cylindrical or cylindrical glass rod is fixed on a rotating shaft, and glass fine particles are deposited on the outer periphery of the glass rod while moving upward while rotating the glass rod. In the manufacturing method of, the lower portion of the glass rod is rotatably and movably supported through mechanical contact, and chemical etching gas is blown to the surface of the glass rod directly above the supporting means to prevent scratches and the like caused by mechanical contact. A method for producing a base material for optical fibers, which comprises depositing glass fine particles after the removal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23627087A JPH0818844B2 (en) | 1987-09-22 | 1987-09-22 | Method for manufacturing base material for optical fiber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23627087A JPH0818844B2 (en) | 1987-09-22 | 1987-09-22 | Method for manufacturing base material for optical fiber |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6479033A JPS6479033A (en) | 1989-03-24 |
| JPH0818844B2 true JPH0818844B2 (en) | 1996-02-28 |
Family
ID=16998293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23627087A Expired - Fee Related JPH0818844B2 (en) | 1987-09-22 | 1987-09-22 | Method for manufacturing base material for optical fiber |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0818844B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2125508C (en) * | 1993-06-16 | 2004-06-08 | Shinji Ishikawa | Process for producing glass preform for optical fiber |
-
1987
- 1987-09-22 JP JP23627087A patent/JPH0818844B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6479033A (en) | 1989-03-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |