JPH081940B2 - Fine pattern structure and manufacturing method thereof - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) In the present invention, the ratio of plate thickness to hole diameter or slit width, that is, plate thickness / hole diameter or plate thickness / slit width (hereinafter referred to as aspect ratio) is 1 The present invention relates to a fine pattern structure having larger holes or slits and a manufacturing method thereof.

(Prior Art) Conventionally, structures having fine slits or holes, particularly metal structures, have been used in, for example, lead frames for LSI packages, various masks, and the like. Techniques for increasing the wiring density by using a stepped structure are disclosed in JP-A-58-90752, JP-A-60-92646, JP-A-60-103652, JP-A-60-107848, and JP-A-60-20.
It is known from JP-A-6144, JP-A-60-227457, and JP-A-62-81739. In addition, those manufacturing methods are generally manufactured by using a pressing process or an etching method, but it is difficult to form holes or slits having a large aspect ratio by such a manufacturing method. It was Therefore, when forming a hole or slit having a large aspect ratio, a processing method such as ion milling processing or laser processing is used.

Further, as disclosed in Japanese Patent Laid-Open No. 51-40869, there is also known a technique for obtaining a structure having a predetermined thickness by reducing the plate thickness and stacking a plurality of plates processed into the same shape. .

(Problems to be Solved by the Invention) However, in the above-described plate-shaped fine pattern structure, it is extremely difficult to accurately determine the relative positions of the plurality of plates, and therefore highly accurate dimensions can be obtained. In addition, since the thickness of the target structure is determined by stacking multiple plates, if the structure has a portion where thickness accuracy is required, the initial thickness of the plate However, there is a drawback that accuracy cannot be obtained. Particularly, in the lead frame, the thickness of the lead frame also increases the amount of sealing with resin or ceramics. However, in that case, the heat dissipation characteristic is deteriorated accordingly.

Further, in the above-described ion milling processing, laser processing, etc., the processing speed is slow, and damage to a portion where the removal of the workpiece is not desired may occur. There is a drawback that expensive processing equipment is required. In addition, when the plate thickness is reduced to reduce the aspect ratio, the strength of the formed structure is reduced, the uniformity of the plate thickness is reduced due to wrinkles, etc., and its handling becomes difficult, etc. The above problem was caused, and there were many defects in terms of product structure and process.

Also, in the method of stacking a plurality of plates processed into the same shape by reducing the plate thickness described above, it is extremely difficult to accurately determine the alignment between the relative positions of the plurality of plates, In the case where the thickness of the target structure is determined by stacking multiple plates because high-precision dimensions cannot be obtained, and there is a portion where thickness accuracy is required in the structure, However, there was a drawback that the initial plate thickness accuracy could not be obtained.

Here, the present invention has been made in the background of the above circumstances, the problem to be solved is a simple process and equipment, good hole and slit large aspect ratio It is to realize a fine pattern structure that can be formed with dimensional accuracy and a manufacturing method thereof.

(Means for Solving the Problem) According to the present invention, in order to solve the problem, at least one sheet-shaped member is formed on at least a part of a portion to which at least another sheet-shaped member is fitted. A fine patterned structure composed of a plurality of sheet-like members having a thinned portion is made into its gist, and while a plurality of sheet-like members are each processed into a predetermined shape, At least one of the sheet-shaped members
A thin portion is formed on a predetermined portion of the sheet, and a part of another sheet-shaped member is fitted and overlapped on the thin portion to regulate the relative position of each of the plurality of sheet-shaped members. Then, a method of manufacturing a fine pattern structure characterized by forming a pattern structure having slits or holes with a large aspect ratio is also the subject of the invention.

That is, in the present invention, for example, first,
A plurality of sheet-shaped members, preferably metal sheet members, are formed into respective predetermined outer shapes taking into consideration the shape of the target plate-shaped fine pattern structure. The forming means at this time is not limited by the target structure, and a known method such as a press forming method or an ultrasonic processing method can be used, but the photolithography technique is particularly preferable. An etching method using a mask or the like made of a patterned etching resistant material formed by a precision printing technique is advantageously adopted because it is difficult to leave a strain on the base material and high precision processing can be performed.

Next, a part (predetermined portion) of at least one sheet-shaped member is removed to form a predetermined thin portion. Incidentally, when forming such a thin portion, it is not necessary to provide all of the thin portions corresponding to the fitted portion on one sheet, while only a part of the fitted portion is the thin portion in one sheet, Even if the thin portion corresponding to the other fitting portion is provided on another sheet,
It doesn't matter at all. Further, in forming the thin portion, for the etching treatment that is advantageously adopted, various known etching methods such as wet etching and dry etching are appropriately selected, and the thin portion having a target thickness is formed. As described above, the etching conditions are selected. At this time, the non-etching portion of the sheet-shaped member is appropriately masked with an etching resistant material patterned by photolithography, precision printing or the like. In this way, a part (predetermined thickness part) in the thickness direction of the sheet
A method to form a thin portion by etching away only
This is called half etching.

Incidentally, when the etching method is also used to form the outer shape of the sheet-shaped member, only one surface where the portion where the half etching is desired to be performed is masked with an etching resistant material, and the etching is performed. It is possible to simultaneously form the outer shape and form the thin portion by half etching. Contrary to the above description, it is also possible to carry out a molding operation of the outer shape of the sheet-shaped member after performing half etching on a predetermined portion of the sheet-shaped member.

Further, in the present invention, the number of the sheet-shaped members in which the thin portion is formed may be one, but more preferably,
A plurality of sheet-shaped members in which a thin portion is formed is adopted, and it is also possible to combine a plurality of sheet-shaped members such that the thin portions overlap each other.

Further, in the present invention, it is also possible to suitably employ that the thickness of the thin portion formed on each of the sheet-shaped members is two or more different thicknesses. That is, for example, when two sheet-shaped members are combined to form one plate-shaped fine pattern structure, each of the first and second sheet-shaped members has a thickness of 1/3 of the sheet thickness. A first thin portion having a second thin portion having a thickness of 2/3 of the sheet thickness, a first thin portion of the first sheet-like member and a second thin sheet-like member of The second thin portion and the second thin portion of the first sheet-shaped member and the first thin portion of the second sheet-shaped member can be combined so as to overlap each other.

The fine pattern structure of the present invention may be used as it is, but if necessary, it may be fixed and used by an adhesive agent, spot welding, ultrasonic welding or the like so that the respective sheet-shaped members are not separated. I can. Further, when the structure composed of a plurality of sheets in the plate thickness direction in the overlapping portion is not preferable, the structure in which the overlapping portion is formed by the thin portion of the pattern portion other than the portion in which the overlapping is not preferable, Alternatively, a discarding pattern portion is formed on each sheet-like member, an overlapping portion using a thin portion is formed in the discarding pattern portion, the plate-shaped fine pattern structure is incorporated into a desired portion, and then the discarding portion is discarded. A configuration capable of removing the pattern portion may also be used. In addition, it is not necessary to make the entire overlapped portion a thin portion, and the thin portion may be provided in a portion where a part of the sheet is bent or curved. Further, it is preferable to provide a thin portion in a portion where alignment or coplanarization is desired.

(Operation) According to the manufacturing method of the present invention, as described above,
When the thin part is formed by half etching, compared to conventional mechanical processing methods such as press processing, it is difficult to leave distortion in the base material, high-precision processing is possible, and the processing thickness can be controlled. It has many advantages such as being easy, no burrs and swelling of surplus, and relatively simple process and equipment.

Further, in the structure according to the present invention, the relative positions of the plurality of sheet-shaped members can be accurately regulated by overlapping the thin portion and a part of another sheet-shaped member in a fitting form. Further, it is possible to advantageously form a plate-shaped fine pattern structure having a pattern in which holes or slits having a large aspect ratio are formed in a predetermined portion, which is difficult to process with one sheet-shaped member. is there.

Further, in the plate-shaped fine pattern structure obtained by combining a plurality of sheet-shaped members so that the thin portions of the plurality of sheet-shaped members overlap each other, the plate thickness is the sheet thickness of the sheet-shaped member. Can be made to be substantially the same, and by this, it becomes possible to make it the same plane as the portion not overlapped.

Furthermore, in the present invention, the thin portion formed on each of the sheet-shaped members is formed to have two or more different thicknesses, so that the target plate-shaped fine pattern structure can be formed. The fitting structure of the first and second thin portions can be adopted without increasing the plate thickness.

(Examples) Hereinafter, some examples of the present invention will be shown to clarify the present invention more specifically. However, the present invention imposes some restrictions by the description of such examples. It goes without saying that you don't receive anything.

In addition, in addition to the following examples, the present invention, in addition to the above-described specific description, various changes, corrections, and modifications based on the knowledge of those skilled in the art without departing from the spirit of the present invention. It should be understood that improvements can be made.

First, an embodiment of the structure according to the present invention is shown in FIG.
~ (G), and one embodiment of a method for producing the same is
As shown in Figures (a)-(g), where:
Reference numeral 2 denotes a first polymer sheet piece having a comb-like outer shape as shown in FIGS. 1 (a) and 1 (b) by an etching method using a single metal sheet, and a predetermined portion thereof. Sheet thickness by etching (non-etched part 2b
Thin portion 2a having a thickness of ½ of the thickness) is formed. Further, another metal sheet having the same thickness is used to form the second polymer sheet piece 4 having the shape shown in FIGS. A thin portion 4a having a thickness of 1/2 of the sheet thickness (thickness of the non-etched portion 4b) is formed on the. Then, these first and second polymerized sheet pieces 2 and 4 have thin portions 2 respectively.
The target structure having slits 8 with a minute width as shown in FIGS. 1 (e), (f) and (g) by being fitted by restricting the relative position by a, 4a.
10 is constructed.

As is clear from FIG. 1 (g), in this embodiment, the total thickness of the plate-shaped fine pattern structure 10 obtained is about 1.5 times the thickness of one metal sheet. ing.

Another example of the structure obtained according to the present invention is shown in FIGS. 2 (e) to (g), and an example of a method for producing the same is shown in FIGS. 2 (a) to (g). ,It is shown.
In this embodiment, the outer shapes of the two metal-made polymer sheet pieces 12 and 14 used are the same as those in the above-mentioned embodiment, but in the first and second polymer sheet pieces 12 and 14, The first thin portions 12a and 14a and the second thin portions 12b and 14b having different etching thicknesses are respectively formed in the overlapping portion. Incidentally, these first thin portions 12a, 14a
Is the thickness of the overlapped sheet pieces 12, 14, that is, the non-etched portion 1
The thickness is 1/3 of the thickness of 2c and 14c, and the second thin portion 12
The thickness of b and 14b is set to 2/3.

Then, by overlapping and superimposing two superposed sheet pieces so that the first thin portion on one side and the second thin portion on the other side are overlapped, a slit 18 having a target fine width is provided. The structure 20 is obtained.
In this case, the total thickness of the structure 20 is obtained as a thickness substantially the same as the thickness of one metal sheet, as is apparent from FIG. 2 (g).

In addition, each (b) in FIG. 1 and FIG. 2 described above,
(D), (f) and (g) are BB cross sections in (a), (c) and (e) of FIGS. 1 and 2, respectively.
It is a figure which shows the DD cross section, the FF cross section, and the GG cross section.

Further, FIGS. 3 (a) to 3 (c) show an embodiment of the structure according to the present invention and the method for manufacturing the same, in which the thin portion is formed only on one polymer sheet piece. Here, first, one metal sheet is processed by an etching method to realize a shape as shown in FIG. 3 (a), and a predetermined portion of the metal sheet is etched to obtain a sheet thickness. The first polymerized sheet piece 22 is manufactured by forming the thin portion 22a having a thickness of 1/2. In addition, in the overlapped sheet piece 22, 23 is a rectangular hole for forming a target slit. Then, a second polymerized sheet piece 24 having a shape as shown in FIG. 3 (b) obtained by processing another metal sheet is applied to the first polymerized sheet piece 22 with respect to the first polymerized sheet piece 22. The second overlapped sheet piece 24 is assembled so as to be fitted to the thin portion 22a formed on the overlapped sheet piece 22 and has a slit 28 having a fine width as shown in FIG. 3 (c). The structure 26 is formed. That is, the slit 28 is the first superposed sheet piece 22.
By arranging the strip portions 25 of the second overlapping sheet piece 24 in the rectangular holes 23, the strip portions 25 are formed on the left and right sides of the strip portion 25.

Furthermore, FIGS. 4 (a) to (c) show a further different embodiment of the present invention, in which the first and second polymerized sheet pieces 32, 34 are each one sheet. It is produced by subjecting the metal sheet of 1. to etching. And those polymerized sheet pieces 32,3
4, a plurality of large holes 36, thin portions 32a and 34a that are half the sheet thickness by etching, and unetched portions 32b and 34b are formed.

And these first and second polymerized sheet pieces 32, 34
By combining the thin portions 32a and 34a so that they are fitted to each other, as shown in FIG. 4 (c), a plate-shaped fine pattern structure 40 having fine holes 38 at predetermined positions.
Is formed.

Further, FIGS. 5 (a) to (h) show a further preferred embodiment of the present invention, in which the relative position is regulated by the thin portion and the non-etched portions are fitted together to finally The target structure is produced by regulating the relative position of each of the parts forming the non-etched part.

More specifically, in this embodiment, a slit 45 and a thin portion 46 are formed in each of the two stainless steel plates 42, 44 by etching. In this slit 45, both end portions in contact with the thin portion 46 are narrower than the central slit wide portion 45a, in other words, a narrow portion having substantially the same width as the wide portion 48b of the non-etched portion 48. It is said to be 45b. In addition, the non-etched portion 48 is the narrow portion in the center.
It is composed of 48a and wide portions 48b, 48b at both ends thereof. The plate thickness of these two stainless steel plates 42, 44 is 75.
μm, slit 45 width 220 μm, slit pitch 3
The thickness of the thin portion 46 is half that of the non-etched portion 48.

Therefore, these two plates 42 and 44 are cut into their slits 4
As shown in FIG. 5 (e), a structure 50 having a slit 52 with a fine width is formed by overlapping the narrow width portion 45b of 5 so that the wide width portion 48b of the non-etched portion 48 is fitted.
Is preferably obtained.

(Effect of the invention) As is apparent from the above description, according to the present invention, a plate-shaped fine pattern structure having holes or slits with high dimensional accuracy and a large aspect ratio is provided, and It is a lead frame, various masks,
The present invention has great industrial significance in that it can be suitably used for circuit boards, various electrodes, terminals, connectors, various filters, and the like.

[Brief description of drawings]

1 (a) to (g) are explanatory views conceptually showing one example of a structure and a method for manufacturing the same according to the present invention,
(A), (c) and (e) are plan views of the first and second polymerized sheet pieces and the superposed structure, respectively (b),
(D), (f) and (g) are explanatory views showing BB section, DD section, FF section and GG section in (a), (c) and (e), respectively. . 2 (a) to (g) are explanatory views showing another embodiment of the present invention, wherein (a), (c) and (e) are first and second polymerized sheet pieces, respectively. And a plan view of the superposed structures, (b), (d), (f) and (g) are BB cross section, DD cross section and F in (a), (c) and (e), respectively. It is explanatory drawing which shows -F cross section and GG cross section. Furthermore, FIGS. 3 (a) to 3 (c) are explanatory views conceptually showing an example of a structure and a method for manufacturing the same according to the present invention having a structure in which a thin portion is formed only on one metal sheet. In addition, (a) and (b) are plan views of the first and second polymerized sheet pieces, respectively, and (c) is a plan view of the superposed structures. Furthermore, FIGS. 4 (a) to 4 (c) are explanatory views conceptually showing an example of a structure having holes having a large aspect ratio according to the present invention and a method for manufacturing the structure, and FIGS. b) is a plan view of the first and second superposed sheet pieces,
FIG. 7C is a plan view of the superposed structures. 5 (a) and 5 (d) are plan view explanatory views showing two plates according to still another embodiment of the present invention, and FIGS. 5 (b) and 5 (c) are respectively. 5A and 5B are cross-sectional views taken along the line B-B and the line C-C in FIG. 5A, respectively, and FIGS. 5E to 5H are shown in FIGS. It is explanatory drawing which shows the structure obtained by combining two plates, (e) is the plane explanatory view, (f)-.
(H) is the FF cross section in (e), G-, respectively.
It is a G section and a HH section explanatory view. 2,12,22,32: First polymerized sheet piece 4,14,24,34: Second polymerized sheet piece 2a, 4a, 22a, 32a, 34a: Thin portion 12a, 14a: First thin portion 12b , 14b: Second thin part 8,18,28,52: Slit 10,20,26,40,50: Structure 36: Large hole, 38: Small hole 42,44: Stainless steel plate 46: Thin part, 48 : Non-etched part

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Takao Segawa 1-5-1 Taito, Taito-ku, Tokyo Toppan Printing Co., Ltd. (56) Reference JP-A-57-63201 (JP, A) JP-A-SHO 63-153746 (JP, A)

Claims (7)

[Claims] 1. A pattern structure for realizing a desired shape pattern by stacking a plurality of sheet-shaped members, wherein the sheet-shaped member has a shape pattern defined by slits or holes having a predetermined aspect ratio. The sheet-like member has a fitting portion formed by providing a thin portion at least at a part of the overlapping portion, and the fitting portion has a sheet-like overlapping shape. A slit or hole formed from a member is uniquely defined, and a plate-like pattern defined by a slit or hole having an aspect ratio larger than that of the slit or hole of the sheet-shaped member is provided. Structure. 2. A pattern structure for realizing a desired shape pattern by stacking a plurality of sheet-shaped members, wherein the sheet-shaped member has a shape pattern defined by slits or holes having a predetermined aspect ratio. The sheet-shaped member has a fitting portion configured by providing a thin portion at least at a part of the overlapping portion, and the sheet-shaped member is formed by overlapping the sheet-shaped members. The interference part of the sheet-shaped member uniquely defines a slit or hole formed by the sheet-shaped members that are overlapped with each other, and thus is defined by a slit or hole having an aspect ratio larger than that of the sheet-shaped member. A patterned structure having a shaped pattern. 3. The pattern structure according to claim 1, wherein the pattern structure is a lead frame. 4. The method for producing a patterned structure according to claim 1, wherein a method of adjusting the thickness of a part of the sheet-shaped member in the plate thickness direction is an etching treatment. . 5. A thinned portion is formed on each of the plurality of sheet-shaped members, and the thinned portions of the respective sheet-shaped members are overlapped with each other so that the thickness of the pattern structure can be adjusted to the sheet thickness of each sheet-shaped member. 5. The method for manufacturing a patterned structure according to claim 4, wherein the pattern structure is substantially equal to. 6. Each of the plurality of sheet-shaped members is provided with two or more kinds of thin-walled portions having different thicknesses, and the thin-walled portion having a relatively large thickness is relatively thinned with respect to the other sheet-shaped members. The method for manufacturing a patterned structure according to claim 5, wherein the thin structure is overlapped with the thin part. 7. The method for manufacturing a patterned structure according to claim 4, wherein the sheet-shaped member is a metal sheet.