JPH0821263B2 - Dielectric porcelain composition - Google Patents
Dielectric porcelain compositionInfo
- Publication number
- JPH0821263B2 JPH0821263B2 JP62135252A JP13525287A JPH0821263B2 JP H0821263 B2 JPH0821263 B2 JP H0821263B2 JP 62135252 A JP62135252 A JP 62135252A JP 13525287 A JP13525287 A JP 13525287A JP H0821263 B2 JPH0821263 B2 JP H0821263B2
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- Prior art keywords
- composition
- dielectric
- temperature
- firing
- resistivity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Compositions Of Oxide Ceramics (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Inorganic Insulating Materials (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は1080℃以下で焼成される高誘電率系誘電体磁
器組成物に関し、特に低酸素分圧雰囲気で焼成でき高い
抵抗率の得られる組成物に関する。TECHNICAL FIELD The present invention relates to a high-dielectric-constant dielectric ceramic composition that is fired at 1080 ° C. or lower, and in particular, a composition that can be fired in a low oxygen partial pressure atmosphere to obtain high resistivity. Regarding
従来の技術 近年セラミックコンデンサにおいては素子の小型化、
大容量化への要求から積層型セラミックコンデンサが急
速に普及しつつある。積層型セラミックコンデンサは内
部電極とセラミックを一体焼成する工程によって通常製
造される。従来より高誘電率系のセラミックコンデンサ
材料にはチタン酸バリウム系の材料が用いられてきた
が、焼成温度が1300℃程度と高いため、内部電極材料と
してはPt,Pdなどの高価な金属を用いる必要があった。2. Description of the Related Art In recent years, in ceramic capacitors, miniaturization of elements,
Due to the demand for larger capacity, multilayer ceramic capacitors are rapidly becoming popular. Multilayer ceramic capacitors are usually manufactured by a process of integrally firing internal electrodes and ceramics. Conventionally, barium titanate-based materials have been used for high-dielectric-constant ceramic capacitor materials, but since the firing temperature is as high as 1300 ° C, expensive metals such as Pt and Pd are used as internal electrode materials. There was a need.
これに対し発明者らはすでに1080℃以下、低酸素分圧
雰囲気で焼成でき銅または銅を主成分とする合金などの
安価な卑金属材料を内部電極として使用できる、(Pba
Meb)(Mg1/3Nb2/3)xTiy O 2+a+b(MeはCa,Ba,S
r)で表される誘電体磁器組成物を提案している。この
組成物は低温度で焼成でき、低酸素分圧下で焼成した
際、高い抵抗率を有し、銅または銅を主成分とする合金
を内部電極とした積層コンデンサ素子に用いることがで
きる。 On the other hand, the inventors have already reduced the oxygen partial pressure below 1080 ° C.
Such as copper or copper-based alloys that can be fired in an atmosphere
Inexpensive base metal materials can be used as internal electrodes, (Pba
Meb) (Mg1/3Nb2/3) XTiy O 2 + a + b (Me is Ca, Ba, S
A dielectric porcelain composition represented by r) is proposed. this
The composition can be fired at low temperature and fired under low oxygen partial pressure
In this case, copper or an alloy containing copper as a main component has a high resistivity.
Can be used for a multilayer capacitor element with
Wear.
いっぽう上に述べたセラミック積層コンデンサ素子の
製造工程においては焼成時に内部電極である銅もしくは
銅を主成分とする合金が酸化せず誘電体セラミックが還
元して低抵抗化しない酸素分圧下での焼成が必要とされ
る。この酸素分圧の制御においては焼成温度が高いほど
最適条件を得るためのガス混合比の制御が困難になる。
このため、誘電体セラミックにたいしてはより低い温度
で焼成できかつ高い抵抗率を有する組成物が求められて
いた。On the other hand, in the above-mentioned manufacturing process of the ceramic multilayer capacitor element, the internal electrode such as copper or an alloy containing copper as a main component is not oxidized during firing and the dielectric ceramic is not reduced to reduce the resistance. Is required. In controlling the oxygen partial pressure, the higher the firing temperature, the more difficult it becomes to control the gas mixture ratio for obtaining the optimum conditions.
Therefore, there has been a demand for a composition which can be fired at a lower temperature and has a high resistivity for the dielectric ceramic.
発明が解決しようとする問題点 (Pba Meb)(Mg1/3Nb2/3)xTiy O2+a+b(MeはC
a,Ba,Sr)で表される誘電体磁器組成物において、誘電
特性を損なわず焼成温度をより低くし抵抗率の高い誘電
体磁器組成物を提供することを目的とする。Problems to be Solved by the Invention (Pb a Me b ) (Mg 1/3 Nb 2/3 ) xTiy O 2 + a + b (Me is C
In the dielectric ceramic composition represented by a, Ba, Sr), the object is to provide a dielectric ceramic composition having a lower firing temperature and a higher resistivity without impairing the dielectric properties.
問題点を解決するための手段 (Pba Meb)(Mg1/3Nb2/3)xTiy O2+a+b(MeはCa,
Ba,Sr)で表される誘電体磁器組成物(ただしx+y=
1)に対し、副成分として銅酸化物をCu2O換算で0.03〜
0.65重量%含有する組成物とする。Means for solving problems (Pb a Me b ) (Mg 1/3 Nb 2/3 ) xTiy O 2+ a + b (Me is Ca,
Ba, Sr) dielectric ceramic composition (provided that x + y =
In contrast to 1), copper oxide is added as a sub-component in the range of 0.03 to Cu 2 O equivalent.
The composition contains 0.65% by weight.
作用 本発明の誘電体磁器組成物の系において、副成分を含
まない組成物に対し副成分を含む組成物は低い温度で焼
結し誘電率の低下は少なく、誘電損失の増大も小さく、
かつ抵抗率は同等ないし向上する。In the system of the dielectric porcelain composition of the present invention, the composition containing the accessory component with respect to the composition containing no accessory component is sintered at a low temperature, the decrease in the dielectric constant is small, and the increase in the dielectric loss is small,
And the resistivity is equal to or improved.
実施例 出発原料としては、化学的に高純度なPbO,MgO,Nb2O5,
TiO2,CaCO3,BaCO3,SrCO3,Cu2Oを用いた。これらを純度
補正をおこなったうえで所定量を秤量し、ジルコニア製
玉石を用い純水を溶媒としボールミルで17時間湿式混合
した。これを吸引ろ過して水分の大半を分離した後乾燥
し、その後ライカイ機で充分解砕した後粉体量の5wt%
の水分を加え、直径60mm高さ約50mmの円柱状に成形圧力
500kg/cm2で成形した。これをアルミナルツボ中に入れ
同質のフタをし、680℃〜760℃で2時間仮焼した。次に
仮焼物をアルミナ乳鉢で粗砕し、さらにジルコニア製玉
石を用い純水を溶媒としてボールミルで17時間粉砕し、
これを吸引ろ過し水分の大半を分離した後乾燥した。以
上の仮焼,粉砕,乾燥を数回くりかえした後この粉末に
ポリビニルアルコール6wt%水溶液を粉体量の6wt%加
え、32メッシュふるいを通して造粒し、成形圧力1000kg
/cm2で成形した。成形物は空気中で700℃まで昇温し1
時間保持しポリビルアルコール分をバーンアウトした。
これを上述の仮焼粉を体積の1/3程度敷きつめた上に200
メッシュMgO粉を約1mm敷いたマグネシヤ磁器容器に移
し、同質のフタをし、管状電気炉の炉心管内に挿入し、
炉心管内をロータリーポンプで脱気したのちN2-H2-H2O
混合ガスで置換し、焼成温度での酸素分圧(Po2)が1.0
x10-8atmになるようN2とH2ガスの混合比を調節しながら
混合ガスを流し所定温度まで400℃/hrで昇温し2時間保
持後400℃/hrで降温した。炉心管内のPo2は挿入した安
定化ジルコニア酸素センサーにより測定した。第1図に
焼成時のマグネシヤ磁器容器の構造を、第2図に炉心管
内部をそれぞれ断面図で示す。Example As a starting material, chemically high-purity PbO, MgO, Nb 2 O 5 ,
TiO 2 , CaCO 3 , BaCO 3 , SrCO 3 and Cu 2 O were used. These were subjected to purity correction, then weighed a predetermined amount, and wet mixed with a zirconia cobblestone using pure water as a solvent in a ball mill for 17 hours. This is suction filtered to remove most of the water content, then dried and then charged and decomposed with a Lykai machine.
Add water to form a cylinder with a diameter of 60 mm and a height of about 50 mm.
It was molded at 500 kg / cm 2 . This was placed in an alumina crucible, covered with the same material, and calcined at 680 ° C to 760 ° C for 2 hours. Next, the calcined product is roughly crushed in an alumina mortar, and further crushed in a ball mill for 17 hours using pure water as a solvent using zirconia boulders,
This was suction filtered to separate most of the water content and then dried. After repeating the above calcination, crushing, and drying several times, add 6 wt% of polyvinyl alcohol 6 wt% aqueous solution to this powder, granulate through a 32 mesh sieve, molding pressure 1000 kg
Molded at / cm 2 . Molded product is heated up to 700 ℃ in air 1
Hold the time and burn out the polyvinyl alcohol.
Place the above calcined powder on top of about 1/3 of the volume and put 200
Move the mesh MgO powder to a magnesia porcelain container laid with about 1 mm, put a lid of the same quality, and insert it into the core tube of the tubular electric furnace,
After degassing the inside of the core tube with a rotary pump, N 2 -H 2 -H 2 O
Oxygen partial pressure (Po 2 ) at the firing temperature is 1.0 by replacing with mixed gas.
The mixed gas was flowed while adjusting the mixing ratio of N 2 and H 2 gas to be x10 −8 atm, the temperature was raised to a predetermined temperature at 400 ° C./hr, the temperature was held for 2 hours, and then the temperature was lowered at 400 ° C./hr. Po 2 in the core tube was measured by a stabilized zirconia oxygen sensor inserted. FIG. 1 shows the structure of the magnesium porcelain container at the time of firing, and FIG. 2 shows the inside of the core tube in a sectional view.
第1図において1はマグネシア容器であり、その上部
はマグネシア容器蓋2で封じた。マグネシア容器1の下
部には仮焼粉3を配置し、その上にマグネシア粉4を配
置した。さらにその上に試料5を配置した。In FIG. 1, reference numeral 1 is a magnesia container, and the upper part thereof is sealed with a magnesia container lid 2. A calcined powder 3 was placed at the bottom of the magnesia container 1, and a magnesia powder 4 was placed thereon. Furthermore, the sample 5 was arranged on it.
第2図のように準備されたマグネシア容器1を第3図
のように炉心管6内に配置した。7は安定化ジルコニア
酸素センサーである。The magnesia container 1 prepared as shown in FIG. 2 was placed in the core tube 6 as shown in FIG. 7 is a stabilized zirconia oxygen sensor.
焼成物は厚さ1mmの板状に切断し、両面にCr-Auを蒸着
し、誘電率、tanδを、1kHz、1V/mmの電界下で測定し
た。また抵抗率は、1kV/mmの電圧を印加後1分値から求
めた。The fired product was cut into a plate with a thickness of 1 mm, Cr-Au was vapor-deposited on both sides, and the dielectric constant and tan δ were measured under an electric field of 1 kHz and 1 V / mm. The resistivity was calculated from the value of 1 minute after applying a voltage of 1 kV / mm.
なお焼成温度は焼成物の密度がもっとも大きくなる温
度とした。The firing temperature was the temperature at which the density of the fired product was the highest.
表1に本発明の組成範囲および周辺組成の成分、(a,
b,x,y,は、(PbaMeb)(Mg1/3Nb2/3)xTiy O2+a+bの
値)低酸素分圧雰囲気で焼成したときの焼成温度、誘電
率、誘電率の温度変化率(20℃に対する)、tanδ、抵
抗率、密度を示した。Table 1 shows the components of the composition range and peripheral composition of the present invention, (a,
b, x, y, are (Pb a Me b ) (Mg 1/3 Nb 2/3 ) xTiy O 2+ a + b values) Firing temperature, dielectric constant, dielectric constant when firing in a low oxygen partial pressure atmosphere The temperature change rate (at 20 ° C), tan δ, resistivity, and density were shown.
発明範囲外の組成物では、a+bが1.010より小さい
と副成分として銅酸化物を添加しても、焼成温度が1080
℃より高くなるか、1080℃より焼成温度が低くなるまで
銅酸化物を添加すると誘電率が低下する、もしくは抵抗
率が低下する難点を有しており、1.250より大きくなる
と誘電率および抵抗率が低下する難点を有する。副成分
の銅酸化物が0.03wt%より小さいと焼成温度低下の改善
効果が現れず、0.65wt%より大きくなると誘電特性とく
に誘電率と抵抗率の低下が大きくなる。またxが限定の
範囲外の組成物はキュリー点が室温から大きくはずれ誘
電率が低くなる、もしくは誘電率の温度変化率が大きな
る難点を有している。特許請求の範囲内の組成物では前
記の問題がいずれも克服されている。 In the composition outside the scope of the invention, when a + b is less than 1.010, the firing temperature is 1080 even if copper oxide is added as a subcomponent.
When copper oxide is added until the temperature becomes higher than ℃ or the firing temperature becomes lower than 1080 ℃, the dielectric constant decreases, or the resistivity decreases, and when it exceeds 1.50, the dielectric constant and the resistivity decrease. Has the drawback of diminishing. If the copper oxide as an accessory component is less than 0.03 wt%, the effect of improving the firing temperature will not be improved, and if it is more than 0.65 wt%, the dielectric properties, particularly the dielectric constant and the resistivity will be significantly reduced. Further, a composition in which x is out of the limited range has a problem that the Curie point is largely deviated from room temperature and the dielectric constant is lowered, or the temperature change rate of the dielectric constant is large. Compositions within the scope of the claims overcome all of the above problems.
なお焼成雰囲気として選択した低酸素分圧雰囲気Po2;
1.0x10-8atmは、焼成温度における銅の平衡酸素分圧よ
り低く金属はほとんど酸化しないと考えられる。The low oxygen partial pressure atmosphere Po 2 selected as the firing atmosphere;
1.0x10 -8 atm is lower than the equilibrium oxygen partial pressure of copper at the firing temperature, and it is considered that the metal is hardly oxidized.
発明の効果 本発明によれば、低酸素分圧雰囲気1080℃以下の焼成
で積層コンデンサ素子として高信頼性を得るためのチ密
で抵抗率の高い焼結体が得られ、とくに本発明の副成分
の添加により焼成温度が低下し焼成時の酸素分圧の制御
が容易になる。このため内部電極としてCuなどの卑金属
材料を用いた積層コンデンサ素子に本発明の組成物を用
いた場合、電気的特性を損なうことなく、より安定な製
造条件で素子が製造でき、量産性が向上する。EFFECTS OF THE INVENTION According to the present invention, it is possible to obtain a dense and high-resistivity sintered body for obtaining high reliability as a multilayer capacitor element by firing at a low oxygen partial pressure atmosphere of 1080 ° C. or less. The addition of the components lowers the firing temperature and facilitates control of the oxygen partial pressure during firing. Therefore, when the composition of the present invention is used for a multilayer capacitor element using a base metal material such as Cu as an internal electrode, the element can be manufactured under more stable manufacturing conditions without impairing the electrical characteristics, and mass productivity is improved. To do.
第1図は焼成時に磁器を入れるマグネシヤ容器の断面
図,第2図は焼成時の炉心管内の断面図を示す。 1……マグネシヤ容器、2……マグネシヤ容器蓋、3…
…仮焼粉、4……マグネシア粉、5……試料、6……炉
心管、7……安定化ジルコニア酸素センサー。FIG. 1 is a cross-sectional view of a magnesia container in which porcelain is placed during firing, and FIG. 2 is a cross-sectional view of the inside of a furnace core tube during firing. 1 ... Magnesia container, 2 ... Magnesia container lid, 3 ...
... Calcination powder, 4 ... Magnesia powder, 5 ... Sample, 6 ... Reactor tube, 7 ... Stabilized zirconia oxygen sensor.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 加藤 純一 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (72)発明者 三原 敏弘 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (56)参考文献 特開 昭62−96357(JP,A) 特開 昭55−121959(JP,A) 特開 昭56−2690(JP,A) ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Junichi Kato 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. (72) Toshihiro Mihara, 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. 56) References JP-A-62-96357 (JP, A) JP-A-55-121959 (JP, A) JP-A-56-2690 (JP, A)
Claims (1)
表され、MeはCa,Ba,Srからなる群から選ばれた少なくと
も一種の元素からなり、 x+y=1.00 0.001≦ b ≦0.225 1.010≦a+b≦1.250 0.650≦ x ≦0.960 の範囲内にある組成物に対し、副成分として、銅酸化物
をCu2O換算で副成分合計の重量%で、0.03〜0.65%含有
することを特徴とする誘電体磁器組成物。1. A compound represented by (Pba Meb) (Mg 1/3 Nb 2/3 ) xTiyO 2 + a + b , wherein Me is at least one element selected from the group consisting of Ca, Ba and Sr, x + y = 1.00 0.001 ≤ b ≤ 0.225 1.010 ≤ a + b ≤ 1.250 0.650 ≤ x ≤ 0.960 For the composition within the range of copper oxide as a sub-component, it is 0.03% by weight of the sub-components in terms of Cu 2 O. A dielectric porcelain composition characterized by containing ~ 0.65%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62135252A JPH0821263B2 (en) | 1987-05-29 | 1987-05-29 | Dielectric porcelain composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62135252A JPH0821263B2 (en) | 1987-05-29 | 1987-05-29 | Dielectric porcelain composition |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63299006A JPS63299006A (en) | 1988-12-06 |
| JPH0821263B2 true JPH0821263B2 (en) | 1996-03-04 |
Family
ID=15147365
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62135252A Expired - Lifetime JPH0821263B2 (en) | 1987-05-29 | 1987-05-29 | Dielectric porcelain composition |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0821263B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02172106A (en) * | 1988-12-23 | 1990-07-03 | Tdk Corp | Material with composition for dielectric ceramic, dielectric ceramic sintered member and multilayer wiring board |
-
1987
- 1987-05-29 JP JP62135252A patent/JPH0821263B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63299006A (en) | 1988-12-06 |
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