JPH0821736B2 - Total internal reflection type solid-state laser device - Google Patents
Total internal reflection type solid-state laser deviceInfo
- Publication number
- JPH0821736B2 JPH0821736B2 JP61063471A JP6347186A JPH0821736B2 JP H0821736 B2 JPH0821736 B2 JP H0821736B2 JP 61063471 A JP61063471 A JP 61063471A JP 6347186 A JP6347186 A JP 6347186A JP H0821736 B2 JPH0821736 B2 JP H0821736B2
- Authority
- JP
- Japan
- Prior art keywords
- laser
- type solid
- laser beam
- reflection type
- total internal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/0602—Crystal lasers or glass lasers
- H01S3/0606—Crystal lasers or glass lasers with polygonal cross-section, e.g. slab, prism
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/025—Constructional details of solid state lasers, e.g. housings or mountings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/0619—Coatings, e.g. AR, HR, passivation layer
- H01S3/0625—Coatings on surfaces other than the end-faces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/08095—Zig-zag travelling beam through the active medium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/0915—Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light
- H01S3/092—Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light of flash lamp
- H01S3/093—Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light of flash lamp focusing or directing the excitation energy into the active medium
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 この発明は内部全反射型固体レーザ装置、とくにその
レーザ本体の構成に関するものである。The present invention relates to a total internal reflection type solid-state laser device, and more particularly to the structure of its laser body.
第３図は例えばレーザー研究第13巻第３号（1985）P.
32に示された従来の内部全反射型固体レーザ装置を示す
断面図であり、図において、（１）は互いに平行な２枚
の光学的な平滑面（11a）（11b）を有し、断面がほぼ矩
形の固体レーザ本体、（２）は上記レーザ本体（１）の
サポート、（３）は内側仕切板、（４）は外側仕切板で
ある。固体レーザ本体（１）と内側仕切板（３）よりな
る空間（５）には、内側仕切板（３）を介して、内側仕
切板（３）と外側仕切板（４）よりなる空間（６）を流
れている冷却剤へ、レーザ本体（１）からの熱を伝える
ためのガスが充填されている。なお、この従来例では空
間（５）には、空間（６）を流れる冷却剤と異なるガス
が充填されているが、上記ガスは上記冷却剤と同一であ
つてもよく、また充填されるのみでなく流れていてもよ
い。Fig. 3 shows, for example, Laser Research Vol. 13, No. 3, (1985) P.
FIG. 33 is a cross-sectional view showing the conventional total internal reflection type solid-state laser device shown in 32, in which (1) has two optically smooth surfaces (11a) and (11b) parallel to each other, and Is a substantially rectangular solid laser body, (2) is a support for the laser body (1), (3) is an inner partition plate, and (4) is an outer partition plate. In the space (5) composed of the solid-state laser body (1) and the inner partition plate (3), the space (6) composed of the inner partition plate (3) and the outer partition plate (4) is provided via the inner partition plate (3). ) Is filled with a gas for transmitting heat from the laser main body (1). In this prior art example, the space (5) is filled with a gas different from the coolant flowing in the space (6), but the gas may be the same as the coolant, or only filled. It may be flowing instead.
次に動作について説明する。レーザ本体（１）は、第
３図に示されていない励起装置例えばキセノンフラツシ
ユランプと、上記フラツシユランプの発光を効果的にレ
ーザ本体（１）の平滑面（11a）および（11b）の少なく
とも一方に照射するための反射装置によって励起され
る。励起されたレーザ本体（１）は、第４図に示すよう
に、レーザ本体（１）をはさんで設置された部分反射鏡
（7a）と全反射鏡（7b）からなるレーザ共振器によりレ
ーザビームを生ずる。生じたレーザビームはレーザ共振
器内を往復し、その一部が部分反射鏡（7a）からレーザ
共振器の外にレーザビーム（8b）として取り出される。
このときレーザ本体（１）内を往復するレーザビーム
（8a）は、レーザ本体（１）の互いに平行な光学的平滑
面（11a）（11b）間を複数回、内部全反射しながら進
む。周知の如く、レーザビーム（8a）が、面（11a）あ
るいは面（11b）で内部全反射すると、第５図に示す面
（11a）あるいは面（11b）からの全反射レーザビーム
（81a）の位相は、上記面への入射レーザビーム（81b）
の位相から不連続に変化する。位相の変化量は、レーザ
ビームのＰ成分が であり、ｓ成分が である。Next, the operation will be described. The laser body (1) is a pumping device not shown in FIG. 3, such as a xenon flash lamp, and the smooth surface (11a) and (11b) of the laser body (1) for effectively emitting light from the flash lamp. Excited by a reflector for illuminating at least one. The excited laser body (1) is, as shown in FIG. 4, a laser resonator composed of a partial reflection mirror (7a) and a total reflection mirror (7b) placed across the laser body (1). Produce a beam. The generated laser beam reciprocates in the laser resonator, and a part of the laser beam is extracted from the partial reflection mirror (7a) to the outside of the laser resonator as a laser beam (8b).
At this time, the laser beam (8a) reciprocating in the laser body (1) travels between the mutually parallel optically smooth surfaces (11a) and (11b) of the laser body (1) a plurality of times while undergoing total internal reflection. As is well known, when the laser beam (8a) undergoes total internal reflection on the surface (11a) or the surface (11b), the total reflection laser beam (81a) from the surface (11a) or the surface (11b) shown in FIG. Phase is the laser beam incident on the above surface (81b)
Changes from the phase of to discontinuous. The amount of change in phase depends on the P component of the laser beam. And the s component is Is.
ただし、ｎはレーザ本体（１）を形成する物質の屈折
率、ｎ′は面（11a）あるいは面（11b）の外側を流れる
冷却剤、あるいは充填ガスの屈折率であり、θはレーザ
ビーム（81）の入射角あるいは全反射角である。Here, n is the refractive index of the substance forming the laser body (1), n'is the refractive index of the coolant or the filling gas flowing outside the surface (11a) or the surface (11b), and θ is the laser beam ( 81) is the angle of incidence or total reflection.
レーザ本体（１）内を往復するレーザビーム（8a）は
内部全反射を行う度に上記した位相変化を受けることに
なる。The laser beam (8a) that reciprocates in the laser body (1) undergoes the above-described phase change each time total internal reflection is performed.
従来の内部全反射型固体レーザ装置は以上のように構
成されているので、面（11a）あるいは面（11b）の外側
に、屈折率ｎ′の冷却剤と、屈折率ｎ″のサポート
（２）が存在する。従つて、第６図に示すように、上記
面の外側に上記冷却剤が存在する位置に入射したレーザ
ビーム（81b）の全反射レーザビーム（81a）が受ける位
相変化量と、上記面の外側に上記サポート（２）が存在
する位置に入射したレーザビーム（82b）の全反射レー
ザビーム（82a）が受ける位相変化量とは異なってい
る。このため、上記レーザビーム（82a）はレーザ共振
器による共振条件を満足しなくなり、その結果レーザ発
振が行なわれず、発振ビーム（8b）のビームパターンか
ら、上記サポート（２）の巾に対応する部分のみビーム
が欠落する等の問題点があつた。Since the conventional total internal reflection type solid-state laser device is configured as described above, a coolant having a refractive index n ′ and a support (2) having a refractive index n ″ are provided outside the surface (11a) or the surface (11b). Therefore, as shown in Fig. 6, the phase change amount received by the total reflection laser beam (81a) of the laser beam (81b) incident on the position where the coolant exists outside the surface and , The phase change amount received by the totally reflected laser beam (82a) of the laser beam (82b) incident on the position where the support (2) exists outside the surface is different from that of the laser beam (82a). ) Does not satisfy the resonance condition of the laser resonator, as a result, laser oscillation is not performed, and the beam pattern of the oscillating beam (8b) lacks only the beam corresponding to the width of the support (2). There was a point.
この発明は上記のような問題点を解消するためになさ
れたもので、レーザ共振条件を満足しない部分を完全に
除去でき、ビームパターンの欠落部分の無い高品質レー
ザビームを効率良く提供できる装置を得ることを目的と
する。The present invention has been made in order to solve the above problems, and provides an apparatus capable of completely removing a portion that does not satisfy the laser resonance condition and efficiently providing a high-quality laser beam having no beam pattern missing portion. The purpose is to get.
この発明に係る内部全反射型固体レーザ装置はレーザ
本体の平滑面を、レーザ本体（１）を形成する物質の屈
折率よりも小さい屈折率を有する物質でコーティングし
たものである。The total internal reflection type solid-state laser device according to the present invention is one in which the smooth surface of the laser body is coated with a substance having a refractive index smaller than that of the substance forming the laser body (1).
この発明における内部全反射型固体レーザ装置は、レ
ーザ本体の平滑面が一様にコーテイングされているた
め、コーテイング膜外側の屈折率が局所的に変化して
も、レーザ本体内部で全反射するレーザビームは、同一
量の位相変化しか受けない。The internal total reflection type solid-state laser device according to the present invention has a laser body in which the smooth surface is uniformly coated. Therefore, even if the refractive index on the outside of the coating film locally changes, the laser is totally reflected inside the laser body. The beam experiences only the same amount of phase change.
以下、この発明の実施例を図について説明する。第１
図はこの発明の一実施例による内部全反射型固体レーザ
装置を示す断面図であり、図において、（１）はネオジ
ム（Nd）をドープしたGGG（Gd3Ga5O12）結晶（屈折率1.
95）よりなるレーザ本体、（15a）（15b）はレーザ本体
（１）の平滑面（11a）（11b）上にコーテイングされた
コーテイング膜であり、レーザ本体（１）を形成する物
質の屈折率よりも小さい屈折率を有する物質で形成され
ており、例えば0.2μｍ以上の厚さのSiO2膜（屈折率1.
5）である。Embodiments of the present invention will be described below with reference to the drawings. First
FIG. 1 is a sectional view showing an internal total reflection type solid-state laser device according to an embodiment of the present invention. In the figure, (1) is a neodymium (Nd) -doped GGG (Gd 3 Ga 5 O 12 ) crystal (refractive index 1.
95) is a laser body, and (15a) and (15b) are coating films coated on the smooth surfaces (11a) and (11b) of the laser body (1), and the refractive index of the substance forming the laser body (1). It is formed of a substance having a smaller refractive index than, for example, a SiO 2 film with a thickness of 0.2 μm or more (refractive index 1.
5).
次に動作について説明する。 Next, the operation will be described.
第１図に図示されていない励起装置により励起された
レーザ本体（１）は、第１図に図示されていない共振器
によりレーザビームを生ずる。生じたレーザビームはレ
ーザ本体（１）の互いに平行な光学的平滑面（11a）お
よび（11b）で複数回の内部全反射を行なう。上面の面
（11a）および（11b）の外側にはコーテイング膜（15
a）および（15b）が存在するため、第２図に示すよう
に、コーテイング膜（15a）あるいは（15b）の外側にサ
ポート（２）がある位置で全反射したレーザビーム（82
a）の入射レーザビーム（82b）との不連続な位相変化量
は、コーテイング膜（15a）あるいは（15b）の外側にサ
ポート（２）がない位置で全反射したレーザビーム（81
a）の入射レーザビーム（81b）との不連続な位相変化量
と全く同一である。従って、面（11a）（11b）で全反射
するレーザビームは全て共振器（７）による共振条件を
満足する。このため、レーザ本体（１）は有効に利用さ
れ、共振器の部分反射鏡（7a）から出射するレーザビー
ム（8b）の一部が欠落することなく、品質の良いレーザ
ビームを得ることができる。A laser body (1) pumped by a pumping device not shown in FIG. 1 produces a laser beam by means of a resonator not shown in FIG. The generated laser beam undergoes total internal reflection a plurality of times on the mutually parallel optically smooth surfaces (11a) and (11b) of the laser body (1). Outside the upper surfaces (11a) and (11b), a coating film (15
Since a) and (15b) exist, the laser beam (82) totally reflected at the position where the support (2) is located outside the coating film (15a) or (15b) as shown in FIG.
The amount of phase change discontinuous with the incident laser beam (82b) in (a) is due to the total reflection of the laser beam (81) at the position where the support (2) is not located outside the coating film (15a) or (15b).
This is exactly the same as the amount of phase change discontinuous with the incident laser beam (81b) in a). Therefore, the laser beams totally reflected by the surfaces (11a) and (11b) all satisfy the resonance condition of the resonator (7). Therefore, the laser body (1) is effectively used, and a high-quality laser beam can be obtained without a part of the laser beam (8b) emitted from the partial reflection mirror (7a) of the resonator being lost. .
なお、コーテイング膜（15a）（15b）としては、Sio2
の他、MgF2（屈折率1.4）でもよい。As the coating film (15a) (15b), Sio 2
Alternatively, MgF 2 (refractive index 1.4) may be used.
また、上記実施例では、コーテイング膜（15a）ある
いは（15b）は単層膜であるが、上記単層膜上に励起装
置からの励起光の上記単層膜による反射損失を防止する
ための反射防止膜を設けた多層コーテイング膜でも良
い。例えば、平滑面（11a）（11b）上にPbF2（屈折率1.
7）を設け、この上にSiO2を設けたものでもよい。Further, in the above-mentioned embodiment, the coating film (15a) or (15b) is a single layer film, but a reflection for preventing the reflection loss of the excitation light from the excitation device on the single layer film by the single layer film. It may be a multi-layer coating film provided with a protective film. For example, on a smooth surface (11a) (11b), PbF 2 (refractive index 1.
7) may be provided and SiO 2 may be provided thereon.
また、レーザ本体（１）としては、上記のGGG結晶の
他、レーザガラスで構成されたものでもよい。The laser body (1) may be made of laser glass in addition to the GGG crystal.
以上のように、この発明によれば、内部全反射型固体
レーザ装置のレーザ本体の互いに平行な光学的平滑面を
レーザ本体を形成する物質の屈折率よりも低い屈折率を
有する物質でコーテイングしたので、品質の良いレーザ
ビームが、効率良く得られる効果がある。As described above, according to the present invention, the mutually parallel optically smooth surfaces of the laser body of the total internal reflection type solid-state laser device are coated with a substance having a refractive index lower than that of the substance forming the laser body. Therefore, there is an effect that a high-quality laser beam can be efficiently obtained.
第１図はこの発明の一実施例による内部全反射型固体レ
ーザ装置を示す断面図、第２図はこの発明の一実施例に
係るレーザ本体内におけるレーザビームの様子を示す説
明図、第３図は従来の内部全反射型固体レーザ装置を示
す断面図、第４図は従来の内部全反射型固体レーザ装置
の概略を示す部分斜視図、第５図はレーザビームの内部
全反射の様子を示す説明図、第６図は従来の装置におけ
るレーザ本体内のレーザビームの様子を示す説明図であ
る。 図において、（１）はレーザ本体、（81a）（81b）（82
a）（82b）（8a）（8b）はレーザビーム、（11a）（11
b）は平滑面、（15a）（15b）はコーテイング膜であ
る。 なお、図中、同一符号は同一又は相当部分を示す。FIG. 1 is a sectional view showing an internal total reflection type solid-state laser device according to an embodiment of the present invention, and FIG. 2 is an explanatory view showing a state of a laser beam in a laser body according to an embodiment of the present invention. FIG. 4 is a sectional view showing a conventional internal total reflection type solid-state laser device, FIG. 4 is a partial perspective view showing the outline of a conventional internal total reflection type solid-state laser device, and FIG. 5 shows a state of internal total reflection of a laser beam. FIG. 6 is an explanatory diagram showing a state of a laser beam in a laser body in a conventional device. In the figure, (1) is the laser body, (81a) (81b) (82
a) (82b) (8a) (8b) are laser beams, (11a) (11
b) is a smooth surface, and (15a) and (15b) are coating films. In the drawings, the same reference numerals indicate the same or corresponding parts.
フロントページの続き (72)発明者 永井 治彦 兵庫県尼崎市塚口本町８丁目１番１号 三 菱電機株式会社応用機器研究所内 (56)参考文献 特開 昭60−247983（ＪＰ，Ａ) 特開 昭61−23374（ＪＰ，Ａ) 特開 昭51−2396（ＪＰ，Ａ)Front page continuation (72) Inventor Haruhiko Nagai 8-1-1 Tsukaguchihonmachi, Amagasaki City, Hyogo Sanyo Electric Co., Ltd. Applied Equipment Research Laboratory (56) Reference JP-A-60-247983 (JP, A) JP 61-23374 (JP, A) JP-A-51-2396 (JP, A)
Claims (1)
し、断面がほぼ矩形のレーザ本体内を、レーザビームが
上記平滑面で複数回の内部全反射を行いながら往復する
ものにおいて、上記レーザ本体の平滑面を、上記レーザ
本体を形成する物質の屈折率よりも小さい屈折率を有す
る物質でコーテイングしたことを特徴とする内部全反射
型固体レーザ装置。1. A laser beam that reciprocates in a laser main body having two substantially parallel optical smooth surfaces and a substantially rectangular cross section while performing total internal reflection a plurality of times on the smooth surfaces. An internal total reflection type solid-state laser device characterized in that a smooth surface of the laser body is coated with a substance having a refractive index smaller than that of a substance forming the laser body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61063471A JPH0821736B2 (en) | 1986-03-19 | 1986-03-19 | Total internal reflection type solid-state laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61063471A JPH0821736B2 (en) | 1986-03-19 | 1986-03-19 | Total internal reflection type solid-state laser device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62219584A JPS62219584A (en) | 1987-09-26 |
| JPH0821736B2 true JPH0821736B2 (en) | 1996-03-04 |
Family
ID=13230177
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61063471A Expired - Fee Related JPH0821736B2 (en) | 1986-03-19 | 1986-03-19 | Total internal reflection type solid-state laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0821736B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63114184A (en) * | 1986-10-31 | 1988-05-19 | Hoya Corp | Slab type laser to which reflecting film is formed |
| FR2616976B1 (en) * | 1987-06-22 | 1989-10-13 | Lasag Ag | LASER WITH IMPROVED COOLING SYSTEM |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS512396A (en) * | 1974-06-24 | 1976-01-09 | Nippon Telegraph & Telephone | DOHAGA TAREEZA |
| JPS6123374A (en) * | 1984-07-12 | 1986-01-31 | Toshiba Corp | Solid laser ocillator |
| JPS6273685A (en) * | 1985-09-27 | 1987-04-04 | Hoya Corp | Solid-state laser device |
-
1986
- 1986-03-19 JP JP61063471A patent/JPH0821736B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62219584A (en) | 1987-09-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH06104515A (en) | Solid state laser | |
| JPWO2010052886A1 (en) | Liquid crystal display | |
| CN110308606A (en) | Wavelength conversion element, manufacturing method of wavelength conversion element, light source device, and projector | |
| CN101253659B (en) | Fiber Lasers and Optical Devices | |
| JP2002350613A (en) | Stray light shielding structure for optical device | |
| CN102162872B (en) | Polarization element and projecting apparatus | |
| JPH09214024A (en) | Solid-state laser oscillator | |
| CN110222618A (en) | A kind of screen fingerprint component and terminal device | |
| CN1310523C (en) | Light source lamp and projector | |
| JPH0821736B2 (en) | Total internal reflection type solid-state laser device | |
| US4839902A (en) | Laser with controlled geometry fluorescent converter | |
| JP2002048911A (en) | Beam splitter and laser system using the same | |
| JP6642622B2 (en) | Wire grid polarizer, liquid crystal device, and electronic equipment | |
| JP2003149414A (en) | Prism device, projection display device using the same, and method of manufacturing prism device | |
| JPH08222786A (en) | Electron beam pumped laser, method of manufacturing electron beam pumped laser, and method of driving electron beam pumped laser | |
| JPH11101903A (en) | High reflector for excimer laser | |
| JPH0214587A (en) | Solid laser equipment | |
| JPH0669569A (en) | Optical wavelength conversion apparatus | |
| JP2599087Y2 (en) | LD pumped solid-state laser device | |
| JPH033377A (en) | Semiconductor laser pumped solid-state laser device | |
| JPH05291674A (en) | Narrow band optical element | |
| JP3091764B2 (en) | Semiconductor pumped solid-state laser | |
| JPH1075006A (en) | Solid-state laser device | |
| JP2007300008A (en) | Pulse laser light source and inspection apparatus using the pulse laser light source | |
| JPH11177165A (en) | Light excitation method for solid state laser |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |