JPH0824684B2 - Laser irradiation system - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser irradiation system for processing an object with a laser beam, and more particularly to improvement of a function of removing scattered objects from an object irradiated with a laser beam.

[0002]

2. Description of the Related Art Conventionally, a laser irradiation system has been used for irradiating a laser beam to an incision made of a low melting point material such as a synthetic resin or a biological tissue such as bone cortex. As a prior art document of this kind, Japanese Patent Application Laid-Open No. 62-
There is a publication No. 33088.

FIG. 3 is an explanatory view showing a bone cutting operation by a conventional laser irradiation system. The excimer laser 10 of the conventional laser irradiation system is a pulsed laser.
Laser light 11 oscillated from the excimer laser 10 passes through a beam shutter 12 and is guided to a light guide path 13 composed of a multi-joint mirror type manipulator including a plurality of reflecting mirrors (not shown), an optical fiber, a hollow waveguide, and the like. Guided and transmitted to the upper end of the cylindrical handpiece 20,
The laser beam 14 is condensed by the condensing lens 21 inside the handpiece 20 and is irradiated onto the bone cortex 70, which is the incised object, from the irradiation port 22 located at the lower tip of the handpiece 20. It

The assist gas 30 is guided from a tank (not shown) to the assist gas introduction pipe 34, and the condenser lens 21.
Is transmitted to the inside of the handpiece 20 from a supply port 23 located below the inside of the handpiece 20 and flows downward inside the handpiece 20 by the suction action of the vacuum pump 40.
From the suction port 24 located between the suction gas outlet pipe 4
5 as a suction gas 44.

FIG. 4 is an explanatory view around the irradiation site in the bone cutting operation shown in FIG. When an operator (not shown) moves the lower tip of the handpiece 20 radiating the laser beam 14 along the surface of the bone cortex 70, the incision groove 7 is formed.
1 is formed, and at this time, scattered matter 73 is generated from the irradiated portion 72 of the laser beam 14. Due to the suction action of the vacuum pump 40, the air around the irradiated portion 72 flows from the irradiation port 22 to the suction port 24, and the suction flow 74 is generated. Therefore, the scattered matter 73 is drawn out as the suction gas 44 together with the assist gas 30. It is transmitted to the pipe 45. The suction gas 44 is guided to the suction gas outlet pipe 45, and is discharged to a tank (not shown) via a filter 47 that shuts off the solid scattered matter 73 and a mist separator 48 that extracts oil mist from the vacuum pump 40.

In the inside of the handpiece 20, the assist gas 30 is sucked from above the position where the condenser lens 21 is located.
Since the optical system such as the condenser lens 21 is not contaminated by the scattered matter 73 or the like that has entered the inside of the handpiece 20 through the irradiation port 22 due to the flow of the laser beam 14, the energy of the laser beam 14 is reduced. There is no such thing. In addition, heat generated by reflection and focusing of the laser light 11 in the optical system is also removed.

Further, the irradiated portion 7 of the laser beam 14
In the vicinity of 2, the suction flow 74 flowing into the irradiation port 22 is generated, so that the surface of the bone cortex 70 and its surrounding environment are not significantly contaminated by scattering of the scattered matter 73 and the like.

[0008]

However, when the above-mentioned conventional laser irradiation system is used for surgery of living tissue, a relatively large scattered material such as a tissue piece, a film-like object, or a blood clot becomes a handpiece. Occasionally, the blockage of the suction port causes an abnormality that the function of sucking suction gas is impaired. At that time, since the assist gas is not sucked from the suction port, it is ejected from the irradiation port to the living tissue. Therefore, the assist gas intrudes into the living tissue due to the ejection pressure to generate emphysema, or scatters bacteria, tumor cells, incision debris, etc. from the incision groove, presses them into the biological tissue, and secondary It often caused unfavorable effects on the living body such as infection.

And, in the conventional laser irradiation system,
No special measures were taken for abnormalities caused by scattered matter blocking the suction port.

Therefore, the present invention has been made in view of the above problems, and automatically detects the abnormality that interferes with the function of sucking the suction gas, automatically stops the supply of the assist gas, and further causes the abnormality. It is an object of the present invention to provide a laser irradiation system that automatically eliminates

[0011]

Laser irradiation system of the present invention
Installations, substitute in order to achieve the above object, from the irradiation port located the laser beam to the lower tip and the cylindrical body to be irradiated to the irradiated site of the incision was from a supply port located at the top of the cylinder of the cylindrical body a supply means for supplying an assist gas into, the irradiated the debris generated from the irradiated site at the irradiation with the suction port located at the bottom of the cylindrical body to be irradiated site of the assist gas and the laser beam inside the cylindrical body met laser irradiation system comprising a removal means including suction means for sucking the outside as a suction gas together with air around the site, (a) its pressure and flow rate of the suction gas flowing from the suction port to the outside of the cylindrical body
Monitoring means for respectively monitoring and detected by (b) monitoring means
Set the suction gas pressure and flow rate to the reference value and flow rate of the pressure.
Comparing means for comparing each reference value, (c) on the basis of the output of the comparison means have a control circuit for controlling the operation of the supply means and removal means, the reference value of the pressure of the suction gas pressure
Is maintained at a lower level and the suction gas flow rate
Change from a state larger than the reference value of quantity to a state smaller than
If is characterized by obtaining Bei and control means Ru stops the operation of the supply means and the suction means.

[0012] Here, the monitoring means, it the pressure and flow rate of the assist gas flowing in the supply opening further from the outside of the cylindrical body
Each of them is monitored and the comparison means is the assist detected by the monitoring means.
Use the gas pressure and flow rate as the reference values for pressure and flow rate.
The suction pressure of the suction gas is adjusted by the control means.
It is maintained at a pressure lower than
The flow rate of the drawing gas is higher than that of the suction gas
If changes to again state, may be characterized Rukoto stops the operation of the supply means and the suction means.

[0013] Incidentally, removal means is configured to include a discharging means for supplying an extrusion gas to the suction port further from the outside of the cylindrical body, the monitoring means further flows from the outside of the cylindrical body to the suction port
Extruded gas pressure and flow rate are monitored and compared.
Is the pressure and flow of the extruded gas detected by the monitoring means.
Control the amount by comparing it with the respective reference values of pressure and flow rate.
The means is that the suction gas pressure is lower than the pressure reference value.
Is maintained in the state, and the flow rate of the suction gas is above the reference value of the flow rate.
When changing from a larger state to a smaller state,
After stopping the operation of the stage and suction means,
Holds the amount smaller than the reference value of flow rate, and
Extrusion gas pressure is higher than the pressure reference value
Move the supply and discharge means until the
It may be characterized in that to create.

[0014]

In the laser irradiation system the present invention, the monitoring means, the pressure and flow rate of the suction gas which is flow to the outside of the suction port <br/> or al cylinder located under the cylindrical body by a suction means
Entering a meter measuring the output to the comparison means. Comparison means suction
Inputs the output that pressure and the reference values of pressure and flow rate of the flow rate and ratio <br/> compare gas to the control means. Therefore, under the cylinder
Laser beam from the irradiation port located at the tip of the part to the incision
During irradiation, scattered objects generated from the irradiated area
When the suction port of the body is closed, the pressure of the suction gas is the basis of the pressure.
The suction gas flow is maintained while being held below the threshold value.
Change from the state where the volume is larger than the reference value of the flow rate
The control means operates the supply means and the suction means.
To stop. Therefore, the function of the suction means is abnormal.
Even if you turn it off, the supply of assist gas is automatically stopped, so
It is possible to prevent the ejection of assist gas generated at the irradiation port of the cylinder.
It becomes possible.

Here, the monitoring means is further provided by the supply means.
Therefore, the pressure and the flow rate of the assist gas flowing from the outside of the cylindrical body to the supply port are monitored, and the comparison means detects it by the monitoring means.
The pressure and flow rate of the assist gas
When setting each as a reference value, the monitoring means
Output of gas pressure and flow rate and assist gas
Input the measured output of pressure and flow rate into the comparison means ,
The comparison means uses the pressure and flow rate of the suction gas to assist gas.
The outputs respectively compared with the pressure and the flow rate are input to the control means.

[0016] Therefore, clogging when being irradiated with a laser beam onto the incision was from the irradiation port located on the lower tip of the cylindrical body, scattered materials generated from the <br/> irradiation site the suction port of the tubular body did
When the suction gas pressure is lower than the assist gas pressure,
The suction gas flow rate is
Since it changes from the state larger than the flow rate to the state smaller than the flow rate,
The control means stops the operation of the supply means and the suction means
It

[0017] Incidentally, of configuration removal means further comprises a discharging means for supplying an extrusion gas to the suction port from the outside of the cylindrical body
The monitoring means further flows from the outside of the cylinder to the suction port.
The pressure and flow rate of the extruded gas is monitored and the comparison means
The pressure and flow rate of the extruded gas detected by the monitoring means
And when the flow rate is compared respectively with the reference value, when the debris is blocked the absorption引口of the cylindrical body, control means, supply means
And , after stopping the operation of the suction means , the supply means and the discharge means are operated . This allows the monitoring means to
Was supplied from the outside of the cylinder to the suction port of the cylinder by means.
Output of pressure and flow rate of extruded gas is used as comparison means
input. The comparison means determines the pressure and flow rate of the extruded gas.
Input the output compared with each reference value of force and flow rate into the control means.
Force Therefore, the scattered material that blocked the suction port of the cylinder
But the suction direction of the suction gas is pushed inside the tubular body by the pressure in the opposite direction, when discharged to the outside of the cylindrical body from the irradiation port I by the flow of the assist gas, the flow rate of the extrusion gas
Extruded while being held below the flow rate reference value
The pressure of the gas is smaller than the standard value of the pressure.
Since the change in the state, the control processing unit Ru stops the operation of the supply means and the discharge means. In this way, obstacles that cause an abnormality in the function of the suction means are automatically removed and the supply means and
Than you restart the operation of the fine suction means, it is possible to continue the irradiation of normal laser beam and that Do.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. 1, 2 and 4 of the accompanying drawings. In the description of the drawings, the same elements will be denoted by the same reference symbols, without redundant description.

First, an embodiment of a laser beam irradiation system according to the present invention will be described with reference to FIGS. 1 and 4. FIG. 1 is an explanatory diagram showing an embodiment of a laser light irradiation system according to the present invention.

In the laser irradiation system according to the present invention, the excimer laser 10 is a pulsed laser. A laser beam 11 oscillated from the excimer laser 10 passes through a beam shutter 12 that opens and closes the optical path of the laser beam 11, and is a multi-joint mirror type manipulator, an optical fiber, a hollow waveguide, etc., which includes a plurality of reflecting mirrors (not shown). Is guided to the light guide path 13 composed of the above, transmitted to the upper end of the cylindrical handpiece 20, and condensed by the condensing lens 21 inside the handpiece 20 to become the laser beam 14, which is the laser beam 14. Irradiation is performed on the bone cortex 70, which is the incision object, from the irradiation port 22 located at the lower tip of the handpiece 20. The parts up to this point are the same as in the conventional example.

The assist gas 30 is introduced from an unillustrated tank to the assist gas introducing pipe 34, and the assist gas 30 is supplied.
Via the solenoid valve 31 for opening and closing the flow path of the gas, the pressure sensor 32 for measuring the pressure of the assist gas 30, and the flow rate sensor 33 for measuring the flow rate of the assist gas 30, and the supply port 23 located below the condenser lens 21. Is transmitted to the inside of the handpiece 20, and flows downward through the inside of the handpiece 20 by the suction action of the vacuum pump 40.
2 is transmitted as suction gas 44 from the suction port 24 located between the suction port 24 and the supply port 23 to the suction gas outlet pipe 45.

When an operator (not shown) moves the lower tip of the handpiece 20 irradiating the laser beam 14 along the surface of the bone cortex 70 of the incision, an incision groove 71 is formed. The scattered matter 73 is generated from the irradiated portion 72 of the laser beam 14. Due to the suction action of the vacuum pump 40, the air around the irradiated portion 72 flows from the irradiation port 22 to the suction port 24, and the suction flow 74 is generated.
3 is transmitted to the suction gas outlet pipe 45 as the suction gas 44 together with the assist gas 30.

The suction gas 44 is introduced into a suction gas outlet pipe 45, and a trap 46 is provided for shutting off relatively large solid and liquid scatterers 73, a filter 47 for shutting off relatively small solid and liquid scatterers 73, and suction gas. A pressure sensor 42 for measuring the pressure of 44, a flow rate sensor 43 for measuring the flow rate of the suction gas 44, a solenoid valve 41 for opening and closing the flow path of the suction gas 44, and a mist separator 48 for extracting oil mist from the vacuum pump 40. It passes through and is discharged to a tank (not shown).

When the solenoid valve 51 that opens and closes the flow path of the extruded gas 50 is opened, the extruded gas 50 is guided from the tank (not shown) to the extruded gas introduction pipe 52, and the extruded gas 50 is discharged.
Through the pressure sensor 42 for measuring the pressure of the filter 4
7 and the flow rate sensor 43 are transmitted to the suction gas lead-out pipe 45 located between them.

The controller 60 includes pressure sensors 32, 4 and
2 and the flow rate sensors 33 and 43, and an input processing unit 61 that receives output voltage signals from the pressure sensors 32 and 4, respectively.
2 and the output difference between the flow rate sensors 33 and 43, and a control processing unit that determines the opening / closing operation of the beam shutter 12 and the solenoid valves 31, 41 and 51 based on the output difference. 63, and an output processing unit 64 for transmitting respective output voltage signals to the beam shutter 12 and the solenoid valves 31, 41, 51, and issuing a warning sound if necessary.

Next, with reference to FIG. 1 and FIG. 2, the transition of the operating state in the embodiment of the above construction will be described. Figure 2
FIG. 3 is an explanatory diagram showing a transition of operating states in the embodiment shown in FIG. 1.

Normally, the beam shutter 12 (B0) and the solenoid valves 31 (S1) and 41 (S2) are open, and the solenoid valve 51 (S3) is closed (step 1). Therefore, the laser beam 14 is emitted from the irradiation opening 22 of the handpiece 20 to the irradiated portion 7 of the bone cortex 70.
2, the assist gas 30 flows at a predetermined flow rate from the assist gas introduction pipe 34 through the inside of the handpiece 20 as the suction gas 44 to the suction gas lead-out pipe 45. At this time, the flow rate F1 of the assist gas 30 is set lower than the flow rate F2 of the suction gas 44 (F1-F2 <0), and the pressure P1 of the assist gas 30 is set higher than the pressure P2 of the suction gas 44 (P1-P2>). 0).

However, when a relatively large scattered material 73 blocks the suction port 24 of the handpiece 20 or the suction gas outlet pipe 45, the pressure P1 of the assist gas 30 is higher than the pressure P2 of the suction gas 44. Although it remains high (P1-P2> 0), the flow rate F2 of the suction gas 44 decreases and becomes lower than the flow rate F1 of the assist gas 30 (F1-F).
2> 0) (step 2).

Upon detection of this, the controller 60 controls to close the beam shutter 12 (B0) and the solenoid valves 31 (S1) and 41 (S2), and further generates a warning sound indicating an abnormality in the suction function (step 3). . Therefore, the irradiation of the laser beam 14 and the supply of the assist gas 30 are stopped.

The laser irradiation system is in a standby state until an operator (not shown) operates the controller 60 so as to eliminate the cause of the abnormal suction function (step 4). Therefore, a surgeon (not shown) uses the handpiece 20.
Can be moved to a position apart from the bone cortex 70 of the incision.

Next, the controller 60 controls the solenoid valve 31 (S
1) and 51 (S3) are opened (step 5). At this time,
The extruded gas 50 is introduced at a predetermined pressure from the extruded gas inlet pipe 52 to the suction gas outlet pipe 45, and the assist gas 30 has an outflow pressure of 10 to 15 times the outflow pressure of the extruded gas 50.
%, And is guided to the outside from the irradiation port 22 through the inside of the handpiece 20 from the assist gas introduction pipe 34. At this time, since there is no opening through which the extruded gas 50 flows out, the secondary side flow path is closed, and the flow rate F2 of the extruded gas 50 becomes lower than the flow rate F1 of the assist gas 30 (F1-F2> 0). Further, as a characteristic of a high pressure gas pressure reducing valve in a tank (not shown) for supplying the extruded gas 50, when the secondary side flow passage is closed, the secondary pressure thereof rises by 20 to 30% more than the outflow pressure. The pressure P2, which is the pressure when the gas 50 is blocked, is higher than the pressure P1, which is the pressure when the assist gas flows out (P1-P).
2 <0). Therefore, the scattered matter 7 blocking the inside of the suction port 24 of the handpiece 20 or the suction gas outlet pipe 45.
A pressure opposite to the suction direction is applied to 3.

Finally, when the scattered matter 73 is pushed out of the suction port 24 into the handpiece 20 and discharged from the irradiation port 22 to the outside of the handpiece 20 by the flow of the assist gas 30, the flow rate of the assist gas 30 is increased. Although F1 remains higher than the flow rate F2 of the extruded gas 50 (F1-F2
> 0), the pressure P2 of the extruded gas 50 becomes the pressure at the time of outflow and becomes lower than the pressure P1 of the assist gas 30 (P1-P2).
> 0) (step 6).

Upon detecting this, the controller 60 controls and closes the solenoid valves 31 (S1) and 51 (S3), and further generates a warning sound notifying the recovery of the suction function (step 7). Therefore, the supply of the assist gas 30 and the extrusion gas 50 is stopped.

The laser irradiation system is in a standby state until an operator (not shown) operates the controller 60 to start laser irradiation (step 8). Therefore, an operator (not shown) can move the handpiece 20 to the vicinity of the irradiation site 72 of the bone cortex 70 of the incision object.

Next, the controller 60 controls the beam shutter 12 (B0) by the operation of an operator (not shown).
Then, the solenoid valves 31 (S1) and 41 (S2) are opened to return to the normal operating state (step 9). Therefore, the laser beam 14 is emitted from the irradiation port 22 of the handpiece 20.
Is irradiated onto the irradiated portion 72 of the bone cortex 70, and the assist gas 30 flows from the assist gas introduction pipe 34 through the inside of the handpiece 20 to the suction gas discharge pipe 45 as the suction gas 44 at a predetermined flow rate.

In the above operating state, the case where the suction function is abnormal due to the clogging of the scattered matter 73 is shown. In the normal operating state, for example, the vacuum pump 40 is used.
In the same manner, the supply of the assist gas 30 is automatically stopped even when the suction cannot be performed due to the failure of (1) or the excessive supply of the assist gas 30 occurs due to the failure of the pressure regulator (not shown).

The present invention is not limited to the above embodiment, but various modifications can be made.

For example, in the above embodiment, the arithmetic processing unit 62
At the output difference between the pressure sensors 32 and 42 and the flow rate sensor 3
(P1-P2) and (F1-F) which are the output differences of 3 and 43.
And it calculates the 2), may be computed using these P1, F1 as being the reference value <br/> a constant voltage value, respectively, in this case is necessary to install a pressure sensor 32 and flow sensor 33 Disappear.

Further, in the above-mentioned embodiment, the laser bone incision operation is described. However, when the handpiece 20 is replaced with a laser processing nozzle or the like and applied to laser processing or the like, the same operational effect as that of the above-mentioned embodiment is expected. it can.

[0040]

As has been described [of the effect the invention described above in detail, record of the present invention
In the laser irradiation system, the monitoring means is the suction means.
Therefore, flow from the suction port located at the bottom of the cylinder to the outside of the cylinder.
The output of the measured suction gas pressure and flow rate
Enter in the means. Comparing means to enter the the pressure and flow <br/> amount of suction gas compared to the reference values of pressure and flow output to the control means. Therefore, from the irradiation port of the cylinder to the incision
Generated from the irradiated area while irradiating the laser beam
When the scattered materials block the suction port of the cylinder,
Keep the pressure below the pressure reference value.
If the flow rate of suction gas is higher than the reference value of flow rate,
The control means and the supply means
And the operation of the suction means are stopped, the assist gas
Supply will stop automatically.

Here, the monitoring means is further provided by the supply means.
Therefore, the pressure of the assist gas flowing from the outside of the cylinder to the supply port
Force and flow are monitored and comparison means are detected by the monitoring means.
The pressure and flow rate of the assist gas
When setting each as a reference value, the monitoring means, the pressure and flow rate of the suction gas measured output and the assist gas
Input the measured output of pressure and flow rate into the comparison means,
The comparison means uses the pressure and flow rate of the suction gas to assist gas.
To enter the pressure and flow output as compared to the control means.

[0042] Therefore, when being irradiated with a laser beam to be dissected material from irradiation morphism opening of the tubular body, when the scattered materials generated from the irradiated site closes the suction port of the cylinder, pressure of the suction gas
The force was kept below the pressure of the assist gas
The flow rate of suction gas is higher than that of suction gas.
Since the state changes from the small state to the small state, the control means is the supply means.
And the operation of the suction means from the stopping supply of the assist gas is automatically stopped. Was, but I, of the present invention
By performing the surgery incision or excision etc. of the living tissue using a laser irradiation system, by preventing sudden assist gas ejection accidents Not <br/> to natural, prevention and emphysema occurrence and infection <br /> Ru can provide a significant effect say that with you.

The removing means is further provided from the outside of the cylindrical body.
Consists of a discharge means for supplying extrusion gas to the suction port.
The monitoring means further flows from the outside of the cylinder to the suction port.
The pressure and flow rate of the extruded gas is monitored and the comparison means
The pressure and flow rate of the extruded gas detected by the monitoring means
And when the flow rate is compared respectively with the reference value, when the debris is blocked the absorption引口of the cylindrical body, control means, supply means
And , after stopping the operation of the suction means , the supply means and the discharge means are operated . This allows the monitoring means to
Was supplied from the outside of the cylinder to the suction port of the cylinder by means.
Output of pressure and flow rate of extruded gas is used as comparison means
input. The comparison means determines the pressure and flow rate of the extruded gas.
Input the output compared with each reference value of force and flow rate into the control means.
Force Therefore, the scattered material that blocked the suction port of the cylinder
But the suction direction of the suction gas is pushed inside the tubular body by the pressure in the opposite direction, when discharged to the outside of the cylindrical body from the irradiation port I by the flow of the assist gas, the flow rate of the extrusion gas
Extruded while being held below the flow rate reference value
The pressure of the gas is smaller than the standard value of the pressure.
Since the change in the state, the control processing unit Ru stops the operation of the supply means and the discharge means. Was, but I, the laser of the present invention
If a procedure such as incision or excision of living tissue is performed using the irradiation system , an obstacle that causes an abnormality in the function of the suction means is easily removed and normal laser beam irradiation is performed. remarkable effect that Runode allowed to proceed, and that guarantees a high level of safety than conventional
Ru can provide.

[Brief description of drawings]

FIG. 1 is an explanatory diagram showing an example of a laser irradiation system according to the present invention.

FIG. 2 is an explanatory diagram showing a transition of operating states in the embodiment shown in FIG.

FIG. 3 is an explanatory view showing a bone incision operation by a conventional laser irradiation system.

FIG. 4 is an explanatory diagram around the irradiation site in the bone cutting operation shown in FIG.

[Explanation of symbols]

10 ... Excimer laser, 11 ... Laser light, 12 ... Beam shutter, 13 ... Light guide, 14 ... Laser beam, 20 ...
Handpiece, 21 ... Condensing lens, 22 ... Irradiation port, 2
3 ... Supply port, 24 ... Suction port, 30 ... Assist gas, 31
... Solenoid valve, 32 ... Pressure sensor, 33 ... Flow rate sensor, 34 ... Assist gas introducing pipe, 40 ... Vacuum pump,
41 ... Solenoid valve, 42 ... Pressure sensor, 43 ... Flow rate sensor, 44 ... Suction gas, 45 ... Suction gas outlet pipe, 4
6 ... trap, 47 ... filter, 48 ... mist separator,
50 ... Extrusion gas, 51 ... Solenoid valve, 52 ... Extrusion gas introduction pipe, 60 ... Controller, 61 ... Input processing unit,
62 ... Arithmetic processing unit, 63 ... Control processing unit, 64 ... Output processing unit, 70 ... Bone cortex, 71 ... Incision groove, 72 ... Irradiated site,
73 ... Scattered matter, 74 ... Suction flow.

Continuation of the front page (56) References JP-A-62-148675 (JP, A) JP-A-57-168655 (JP, A) Actually opened 61-263444 (JP, U)

Claims (3)

[Claims] 1. A cylindrical body for irradiating a laser beam to an irradiated portion of an incision from an irradiation opening located at a lower end, and an assist gas inside the cylindrical body from a supply opening located above the cylindrical body. the supply means for supplying, said debris which generated from該被irradiated sites upon irradiation to the irradiated portion of the assist gas and said laser beam inside the tube body from the suction port located at the bottom of the cylindrical body In a laser irradiation system including a removing unit that includes a suction unit that sucks to the outside as a suction gas together with air around the irradiation site, the pressure of the suction gas flowing from the suction port to the outside of the cylinder and Monitoring means for monitoring the flow rate respectively , and the suction gas pressure and flow rate detected by this monitoring means
Possess comparing means for comparing respectively a reference value and the flow rate reference value of the force, the control circuit for controlling the operation of said supply means and said removal means based on an output of the comparison means, said suction gas
Pressure is less than the standard value
And the flow rate of the suction gas is lower than the reference value of the flow rate.
Is also changed from a large state to a small state,
Laser irradiation system, wherein the obtaining Bei and control means Ru stops the operation means and said suction means. Wherein said monitoring means further pressure and flow rate of the assist gas flowing through the supply port from the outside of the cylinder respectively monitors, said comparison means, the assist detected by said monitoring means
The gas pressure and flow rate are the reference values for the pressure and flow rate.
Respectively, and the control means controls the pressure of the suction gas to be the assist gas.
Is kept below the pressure of the
From the state where the gas flow rate is higher than the suction gas flow rate
When it changes to a small state, the supply means and the suction
Claim, characterized in Rukoto stops the operation of the pulling means 1 Symbol
On-board laser irradiation system. Wherein said removing means is further <br/> configured to include a discharging means for supplying an extrusion gas to the suction port from the outside of the cylindrical body, said monitoring means further from the outside of the cylindrical body The suction port
Monitoring the pressure and flow rate of the extruded gas flowing through
However, the comparison means further includes the pusher detected by the monitoring means.
The pressure and flow rate of the discharged gas are the standards for the pressure and flow rate.
And the control means determines that the pressure of the suction gas is the reference of the pressure.
It is kept smaller than the value and the suction gas
From the state where the flow rate is larger than the reference value of the flow rate
When the state changes to a state,
After stopping the operation, the flow rate of the extrusion gas is
It is kept smaller than the standard value and the extrusion gas
Pressure is higher than the standard value of pressure
Until the supply means and the discharge hand
The laser irradiation system according to claim 1 or 2, wherein the stage is operated .