JPH0826153B2 - Soluble imide group-containing silicon-based oligomer and method for producing the same - Google Patents
Soluble imide group-containing silicon-based oligomer and method for producing the sameInfo
- Publication number
- JPH0826153B2 JPH0826153B2 JP28417287A JP28417287A JPH0826153B2 JP H0826153 B2 JPH0826153 B2 JP H0826153B2 JP 28417287 A JP28417287 A JP 28417287A JP 28417287 A JP28417287 A JP 28417287A JP H0826153 B2 JPH0826153 B2 JP H0826153B2
- Authority
- JP
- Japan
- Prior art keywords
- iii
- hours
- reaction
- temperature
- represented
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 27
- 239000010703 silicon Substances 0.000 title claims description 27
- 229910052710 silicon Inorganic materials 0.000 title claims description 27
- 125000005462 imide group Chemical group 0.000 title claims description 25
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 238000006243 chemical reaction Methods 0.000 claims description 53
- 150000001875 compounds Chemical class 0.000 claims description 32
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 21
- 239000002904 solvent Substances 0.000 claims description 19
- 239000002253 acid Substances 0.000 claims description 16
- 150000003949 imides Chemical class 0.000 claims description 15
- 150000005690 diesters Chemical class 0.000 claims description 7
- 125000004432 carbon atom Chemical group C* 0.000 claims description 4
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 4
- 125000000217 alkyl group Chemical group 0.000 claims description 3
- 238000002156 mixing Methods 0.000 claims description 3
- JCLFHZLOKITRCE-UHFFFAOYSA-N 4-pentoxyphenol Chemical compound CCCCCOC1=CC=C(O)C=C1 JCLFHZLOKITRCE-UHFFFAOYSA-N 0.000 claims description 2
- 125000003668 acetyloxy group Chemical group [H]C([H])([H])C(=O)O[*] 0.000 claims description 2
- 125000003545 alkoxy group Chemical group 0.000 claims description 2
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 claims description 2
- 229910052736 halogen Inorganic materials 0.000 claims description 2
- 150000002367 halogens Chemical class 0.000 claims description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 2
- 238000005259 measurement Methods 0.000 claims description 2
- 125000003884 phenylalkyl group Chemical group 0.000 claims description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 30
- 238000000034 method Methods 0.000 description 21
- 239000010408 film Substances 0.000 description 19
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 14
- 239000011248 coating agent Substances 0.000 description 12
- 238000000576 coating method Methods 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- 229910010272 inorganic material Inorganic materials 0.000 description 9
- -1 polydimethylsiloxane Polymers 0.000 description 9
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 7
- 239000011521 glass Substances 0.000 description 7
- 229920001721 polyimide Polymers 0.000 description 7
- 239000002994 raw material Substances 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 6
- 150000003377 silicon compounds Chemical class 0.000 description 6
- LFQCEHFDDXELDD-UHFFFAOYSA-N tetramethyl orthosilicate Chemical compound CO[Si](OC)(OC)OC LFQCEHFDDXELDD-UHFFFAOYSA-N 0.000 description 6
- 239000004642 Polyimide Substances 0.000 description 5
- 230000002378 acidificating effect Effects 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 239000007810 chemical reaction solvent Substances 0.000 description 5
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 5
- 150000002484 inorganic compounds Chemical class 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 239000000377 silicon dioxide Substances 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 239000002966 varnish Substances 0.000 description 5
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 4
- 238000006482 condensation reaction Methods 0.000 description 4
- 239000011147 inorganic material Substances 0.000 description 4
- 229920002866 paraformaldehyde Polymers 0.000 description 4
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 3
- WKDNYTOXBCRNPV-UHFFFAOYSA-N bpda Chemical compound C1=C2C(=O)OC(=O)C2=CC(C=2C=C3C(=O)OC(C3=CC=2)=O)=C1 WKDNYTOXBCRNPV-UHFFFAOYSA-N 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- VLDPXPPHXDGHEW-UHFFFAOYSA-N 1-chloro-2-dichlorophosphoryloxybenzene Chemical compound ClC1=CC=CC=C1OP(Cl)(Cl)=O VLDPXPPHXDGHEW-UHFFFAOYSA-N 0.000 description 2
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 2
- AVCOFPOLGHKJQB-UHFFFAOYSA-N 4-(3,4-dicarboxyphenyl)sulfonylphthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1S(=O)(=O)C1=CC=C(C(O)=O)C(C(O)=O)=C1 AVCOFPOLGHKJQB-UHFFFAOYSA-N 0.000 description 2
- VQVIHDPBMFABCQ-UHFFFAOYSA-N 5-(1,3-dioxo-2-benzofuran-5-carbonyl)-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(C(C=2C=C3C(=O)OC(=O)C3=CC=2)=O)=C1 VQVIHDPBMFABCQ-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 2
- ATHHXGZTWNVVOU-UHFFFAOYSA-N N-methylformamide Chemical compound CNC=O ATHHXGZTWNVVOU-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 238000000862 absorption spectrum Methods 0.000 description 2
- BTHCBXJLLCHNMS-UHFFFAOYSA-N acetyloxysilicon Chemical compound CC(=O)O[Si] BTHCBXJLLCHNMS-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000004132 cross linking Methods 0.000 description 2
- 150000004985 diamines Chemical class 0.000 description 2
- 239000004205 dimethyl polysiloxane Substances 0.000 description 2
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- QEWYKACRFQMRMB-UHFFFAOYSA-N fluoroacetic acid Chemical compound OC(=O)CF QEWYKACRFQMRMB-UHFFFAOYSA-N 0.000 description 2
- 239000003365 glass fiber Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052500 inorganic mineral Inorganic materials 0.000 description 2
- 239000003456 ion exchange resin Substances 0.000 description 2
- 229920003303 ion-exchange polymer Polymers 0.000 description 2
- 239000002648 laminated material Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
- 239000011707 mineral Substances 0.000 description 2
- 150000007522 mineralic acids Chemical class 0.000 description 2
- 150000007524 organic acids Chemical class 0.000 description 2
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 2
- 239000009719 polyimide resin Substances 0.000 description 2
- YGSDEFSMJLZEOE-UHFFFAOYSA-N salicylic acid Chemical compound OC(=O)C1=CC=CC=C1O YGSDEFSMJLZEOE-UHFFFAOYSA-N 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- HHVIBTZHLRERCL-UHFFFAOYSA-N sulfonyldimethane Chemical compound CS(C)(=O)=O HHVIBTZHLRERCL-UHFFFAOYSA-N 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- AVQQQNCBBIEMEU-UHFFFAOYSA-N 1,1,3,3-tetramethylurea Chemical compound CN(C)C(=O)N(C)C AVQQQNCBBIEMEU-UHFFFAOYSA-N 0.000 description 1
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 1
- YLHUPYSUKYAIBW-UHFFFAOYSA-N 1-acetylpyrrolidin-2-one Chemical compound CC(=O)N1CCCC1=O YLHUPYSUKYAIBW-UHFFFAOYSA-N 0.000 description 1
- RRQYJINTUHWNHW-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxyethoxy)ethane Chemical compound CCOCCOCCOCC RRQYJINTUHWNHW-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- GWHLJVMSZRKEAQ-UHFFFAOYSA-N 3-(2,3-dicarboxyphenyl)phthalic acid Chemical compound OC(=O)C1=CC=CC(C=2C(=C(C(O)=O)C=CC=2)C(O)=O)=C1C(O)=O GWHLJVMSZRKEAQ-UHFFFAOYSA-N 0.000 description 1
- HXLAEGYMDGUSBD-UHFFFAOYSA-N 3-[diethoxy(methyl)silyl]propan-1-amine Chemical compound CCO[Si](C)(OCC)CCCN HXLAEGYMDGUSBD-UHFFFAOYSA-N 0.000 description 1
- FYYYKXFEKMGYLZ-UHFFFAOYSA-N 4-(1,3-dioxo-2-benzofuran-5-yl)-2-benzofuran-1,3-dione Chemical compound C=1C=C2C(=O)OC(=O)C2=CC=1C1=CC=CC2=C1C(=O)OC2=O FYYYKXFEKMGYLZ-UHFFFAOYSA-N 0.000 description 1
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 1
- CNODSORTHKVDEM-UHFFFAOYSA-N 4-trimethoxysilylaniline Chemical compound CO[Si](OC)(OC)C1=CC=C(N)C=C1 CNODSORTHKVDEM-UHFFFAOYSA-N 0.000 description 1
- RBVMDQYCJXEJCJ-UHFFFAOYSA-N 4-trimethoxysilylbutan-1-amine Chemical compound CO[Si](OC)(OC)CCCCN RBVMDQYCJXEJCJ-UHFFFAOYSA-N 0.000 description 1
- QQGYZOYWNCKGEK-UHFFFAOYSA-N 5-[(1,3-dioxo-2-benzofuran-5-yl)oxy]-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(OC=2C=C3C(=O)OC(C3=CC=2)=O)=C1 QQGYZOYWNCKGEK-UHFFFAOYSA-N 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XEUCQOBUZPQUMQ-UHFFFAOYSA-N Glycolone Chemical compound COC1=C(CC=C(C)C)C(=O)NC2=C1C=CC=C2OC XEUCQOBUZPQUMQ-UHFFFAOYSA-N 0.000 description 1
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 235000011054 acetic acid Nutrition 0.000 description 1
- 150000008065 acid anhydrides Chemical class 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- OBFQBDOLCADBTP-UHFFFAOYSA-N aminosilicon Chemical class [Si]N OBFQBDOLCADBTP-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- SRSXLGNVWSONIS-UHFFFAOYSA-N benzenesulfonic acid Chemical compound OS(=O)(=O)C1=CC=CC=C1 SRSXLGNVWSONIS-UHFFFAOYSA-N 0.000 description 1
- 229940092714 benzenesulfonic acid Drugs 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000003729 cation exchange resin Substances 0.000 description 1
- 229940023913 cation exchange resins Drugs 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- FOCAUTSVDIKZOP-UHFFFAOYSA-N chloroacetic acid Chemical compound OC(=O)CCl FOCAUTSVDIKZOP-UHFFFAOYSA-N 0.000 description 1
- 229940106681 chloroacetic acid Drugs 0.000 description 1
- 235000015165 citric acid Nutrition 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 229940019778 diethylene glycol diethyl ether Drugs 0.000 description 1
- 229940075557 diethylene glycol monoethyl ether Drugs 0.000 description 1
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 1
- YYLGKUPAFFKGRQ-UHFFFAOYSA-N dimethyldiethoxysilane Chemical compound CCO[Si](C)(C)OCC YYLGKUPAFFKGRQ-UHFFFAOYSA-N 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- DRUOQOFQRYFQGB-UHFFFAOYSA-N ethoxy(dimethyl)silicon Chemical compound CCO[Si](C)C DRUOQOFQRYFQGB-UHFFFAOYSA-N 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- ANSXAPJVJOKRDJ-UHFFFAOYSA-N furo[3,4-f][2]benzofuran-1,3,5,7-tetrone Chemical compound C1=C2C(=O)OC(=O)C2=CC2=C1C(=O)OC2=O ANSXAPJVJOKRDJ-UHFFFAOYSA-N 0.000 description 1
- 239000012784 inorganic fiber Substances 0.000 description 1
- 239000012046 mixed solvent Substances 0.000 description 1
- OBKARQMATMRWQZ-UHFFFAOYSA-N naphthalene-1,2,5,6-tetracarboxylic acid Chemical compound OC(=O)C1=C(C(O)=O)C=CC2=C(C(O)=O)C(C(=O)O)=CC=C21 OBKARQMATMRWQZ-UHFFFAOYSA-N 0.000 description 1
- YTVNOVQHSGMMOV-UHFFFAOYSA-N naphthalenetetracarboxylic dianhydride Chemical compound C1=CC(C(=O)OC2=O)=C3C2=CC=C2C(=O)OC(=O)C1=C32 YTVNOVQHSGMMOV-UHFFFAOYSA-N 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- FJKROLUGYXJWQN-UHFFFAOYSA-N papa-hydroxy-benzoic acid Natural products OC(=O)C1=CC=C(O)C=C1 FJKROLUGYXJWQN-UHFFFAOYSA-N 0.000 description 1
- 229920005575 poly(amic acid) Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 235000019260 propionic acid Nutrition 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229960004889 salicylic acid Drugs 0.000 description 1
- 125000005373 siloxane group Chemical group [SiH2](O*)* 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000004580 weight loss Effects 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Landscapes
- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
- Silicon Polymers (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は可溶性イミド基含有シリコン系オリゴマー及
びその製造方法に関する。更に詳しくは塗布に最適な粘
性を有し、塗膜の焼成により、耐熱性にすぐれ、硬く、
低熱膨脹率の強靱なしかも強力な接着力を有する皮膜を
形成する可溶性イミド基含有シリコン系オリゴマーおよ
びその製造方法に関する。TECHNICAL FIELD The present invention relates to a soluble imide group-containing silicon-based oligomer and a method for producing the same. More specifically, it has the optimum viscosity for coating, and by baking the coating, it has excellent heat resistance and is hard.
The present invention relates to a soluble imide group-containing silicon-based oligomer which forms a film having a low coefficient of thermal expansion and having a tough yet strong adhesive force and a method for producing the same.
ポリイミド樹脂は有機高分子化合物としては最高水準
の耐熱性と低熱膨脹率等の特性を有しているが、これら
の特性も、無機化合物に比較すれば見劣りするものであ
る。Polyimide resin has the highest level of heat resistance and low coefficient of thermal expansion as an organic polymer compound, but these properties are inferior to those of inorganic compounds.
この表面硬度及び耐摩耗性等を改良するために、無機
物を充填する等の手段により無機物に近付ける努力がな
される場合がある。In order to improve the surface hardness and abrasion resistance, efforts may be made to bring the material closer to the inorganic material by means such as filling with the inorganic material.
しかし、この様な場合、無機物とポリイミド樹脂との
界面での破損が問題となり、必ずしも好ましいものでは
ない。However, in such a case, damage at the interface between the inorganic substance and the polyimide resin poses a problem and is not always preferable.
一方無機物の場合、シリカを例にとれば耐熱性は勿
論、低熱膨脹率及び高硬度等の実用上好ましい特性を有
しているが脆く、また加工成形が困難である等の欠点の
ため、その用途が制約される。On the other hand, in the case of an inorganic material, if silica is used as an example, it has not only heat resistance but also practically preferable characteristics such as low coefficient of thermal expansion and high hardness, but it is fragile and difficult to process and mold. Usage is restricted.
加工成形性を賦与するめにけい素の結合手の一部をア
ルキル基に置き換えた化合物が各種合成されている。こ
れらは例えばポリジメチルシロキサン等のようにそれな
りの成功を収めているが、耐熱性が著しく低下したり、
熱膨脹率が著しく増大したり、硬度が著しく低下する等
の欠点を有している。Various compounds have been synthesized in which a part of the bond of silicon is replaced with an alkyl group in order to impart workability. These have achieved some success, such as polydimethylsiloxane, but their heat resistance is significantly reduced,
It has drawbacks such as a significant increase in coefficient of thermal expansion and a significant decrease in hardness.
ポリイミドとシリコン化合物を化学的に結合させる努
力は既に多く報告されている。例えば特開昭57−143,32
8号公報、特開昭58−7,473号公報、特開昭58−13,631号
公報などがある。Many efforts have already been reported to chemically bond polyimide and silicon compounds. For example, JP-A-57-143,32
No. 8, JP-A-58-7,473 and JP-A-58-13,631.
これらはポリイミドの原料であるジアミン成分の一部
をジアミンで両末端停止したポリジシロキサンで置き換
えたものである。In these, a part of the diamine component, which is a raw material of polyimide, is replaced by polydisiloxane terminated at both terminals with diamine.
特公昭58−32,162号公報では、両末端に反応性シリコ
ン化合物を結合したポリアミド酸と両末端に水酸素を有
するポリジシロキサンを混合して加熱することにより得
られるシロキサン基含有架橋ポリイミドが提案されてい
る。Japanese Patent Publication No. 58-32,162 proposes a siloxane group-containing crosslinked polyimide obtained by mixing a polyamic acid having a reactive silicon compound bonded at both ends and a polydisiloxane having water oxygen at both ends and heating the mixture. There is.
さらにシリカ膜を形成する方法として、例えばアルコ
キシシラン又はアセトキシシランの反応性シランを焼成
する方法が提案されている(特公昭52−16,488号公報、
特公昭52−20,825号公報、特開昭55−34,258号公報、特
開昭61−250,032号公報、米国特許4,408,009号公報)。Further, as a method of forming a silica film, for example, a method of calcining a reactive silane of alkoxysilane or acetoxysilane has been proposed (Japanese Patent Publication No. 52-16,488,
JP-B-52-20,825, JP-A-55-34,258, JP-A-61-250,032, US Pat. No. 4,408,009).
前記の特開昭57−143,328号公報、特開昭58−7,473号
公報、特開昭58−13,631号公報に記載のものは、ポリジ
メチルシロキサン等と同様、耐熱性が著しく低下した
り、熱膨脹率が著しく増大したり、硬度が著しく低下す
る等の欠点を依然として有している。The materials described in JP-A-57-143,328, JP-A-58-7,473, and JP-A-58-13,631 have a markedly decreased heat resistance or a thermal expansion, like polydimethylsiloxane. It still has drawbacks such as a significant increase in the rate and a significant decrease in the hardness.
特公昭58−32,162号公報に記載のものは、無機化合物
との親和性には優れているが、熱膨脹率の低い材料は得
られない。The material described in Japanese Patent Publication No. 58-32,162 is excellent in affinity with inorganic compounds, but a material having a low coefficient of thermal expansion cannot be obtained.
また前記アルコキシシラン又はアセトキシシランの反
応性シランを焼成する方法では、この方法で合成された
膜は非常に脆く、またせいぜい数千オングストロームの
薄膜しか得られない。Further, in the method of baking the reactive silane of alkoxysilane or acetoxysilane, the film synthesized by this method is very brittle, and only a thin film of several thousand angstroms can be obtained at most.
このように従来の技術には種々の問題点があり、無機
材料と有機材料の中間を埋める材料の開発が要望されて
いた。As described above, the conventional technology has various problems, and there has been a demand for the development of a material that fills the gap between the inorganic material and the organic material.
本発明の目的は、塗布などの皮膜の形成に適切な粘性
を有し、該皮膜の焼成により、耐熱性にすぐれ、硬く、
低熱膨脹率の強靱な皮膜で、しかも強力な接着力を有す
る皮膜を形成するイミド基含有シリコン系オリゴマーと
その製造方法を提供することにある。An object of the present invention is to have a viscosity suitable for forming a film such as coating, and by baking the film, it has excellent heat resistance and is hard,
An object of the present invention is to provide an imide group-containing silicon-based oligomer that forms a tough film having a low coefficient of thermal expansion and a strong adhesive force, and a method for producing the same.
〔問題点を解決するための手段〕 本発明者等は前記の問題点を解決すべく鋭意研究を行
った結果、本発明に到達した。すなわち本発明は、下記
の一般式(I)で表わされる構造を主成分とし、対数粘
度数(温度30±0.01℃、濃度0.5g/dlでの測定値)が0.0
5〜0.5dl/gである可溶性イミド基含有シリコン系オリゴ
マーである。[Means for Solving Problems] The inventors of the present invention have arrived at the present invention as a result of intensive research to solve the above problems. That is, the present invention has a structure represented by the following general formula (I) as a main component and has a logarithmic viscosity number (measured value at a temperature of 30 ± 0.01 ° C. and a concentration of 0.5 g / dl) of 0.0.
It is a silicone-based oligomer containing a soluble imide group of 5 to 0.5 dl / g.
{但し、ここでR1は4価の炭素環式芳香族基を表わし、
1つのイミドを形成する2つのカルボニル基は、それぞ
れ互いにオルト位置に付いており、R2は夫々独立にCH
2 s、 R3およびR4は同一又は異なる炭素数1〜6のアルキル
基、フェニル基又は炭素数7〜12のアルキル置換フェニ
ル基であり、 mは0≦m≦3であり、γは0≦γ≦3で、m+γ≧
1、nは1≦n≦4であり、p及びqは正数である。前
記対数粘度数とは次式で表わされる〔ηinh〕である。 {However, R 1 represents a tetravalent carbocyclic aromatic group,
The two carbonyl groups forming one imide are attached to each other in the ortho positions, and R 2 is independently CH 2
2 s , R 3 and R 4 are the same or different alkyl groups having 1 to 6 carbon atoms, phenyl groups or alkyl-substituted phenyl groups having 7 to 12 carbon atoms, m is 0 ≦ m ≦ 3, and γ is 0 ≦ γ ≦ In 3, m + γ ≧
1 and n are 1 ≦ n ≦ 4, and p and q are positive numbers. The logarithmic viscosity number is [η inh ] represented by the following equation.
(ここでηはウベローデ粘度計を使用し、溶媒中で温度
30±0.01℃、濃度0.5g/dlで測定した値であり、ηOは同
粘度計を使用し、同温度における同溶媒の測定値であ
り、Cは濃度0.5g/dlである。)} 一般式(I)でR2が夫々独立に で表わされる基である場合が好ましく、またγ=3、m
=3、n=4である場合が好ましい。 (Where η is the temperature in a solvent using an Ubbelohde viscometer
It is a value measured at 30 ± 0.01 ° C. and a concentration of 0.5 g / dl, η O is a measured value of the same solvent at the same temperature using the same viscometer, and C is a concentration of 0.5 g / dl. )} In formula (I), R 2 is independently And a group represented by
= 3 and n = 4 are preferable.
この一般式(I)で表わされる構造を主成分とする可
溶性イミド基含有シリコン系オリゴマーは、下記一般式
(II)で表わされる化合物またはそのジエステルaモル
と一般式(III)、及び(III′)で表わされる化合物b
モルと一般式(IV)で表わされる化合物cモルとを下記
式(V)、(VI)の範囲の混合比のもとで、溶媒を全合
計量に対し70重量%以上となるように添加して、該3種
又は4種の化合物を、0〜200℃の温度で、0.2〜40時間
反応させることにより製造することができる。The soluble imide group-containing silicon-based oligomer having the structure represented by the general formula (I) as a main component is a compound represented by the following general formula (II) or its diester amol and general formulas (III) and (III ′). ) Compound b
Mol and the compound c mol represented by the general formula (IV) under a mixing ratio within the range of the following formulas (V) and (VI), the solvent is added in an amount of 70% by weight or more based on the total amount. Then, it can be produced by reacting the three or four compounds at a temperature of 0 to 200 ° C. for 0.2 to 40 hours.
(但し、これらの式におけるR1,R2,R3,R4,m,γ,n,p,
q及び対数粘度数は先に述べたものと同一の意味を表わ
し、Xはアルコキシ基、アセトキシ基、ハロゲン、又は
水酸基を表わす。) この反応に当っては、(II)、(III)、(III′)、
(IV)で表わされる化合物を混合して0〜200℃の温度
で0.2〜10時間反応させた後60〜200℃の温度で更に0〜
30時間反応させてもよいが、先に(II)、(III)、(I
II′)で表わされる化合物を混合し、0〜200℃の温度
で、0.2〜10時間反応させた後、(IV)で表わされる化
合物を添加して、60〜200℃の温度で、更に0〜30時間
好ましくは0.2〜30時間反応させてもよい。また(I
I)、(III)、(III′)、(IV)で表わされる化合物
を混合し、0〜200℃の温度で、0.2〜10時間反応させ、
ついで酸及び/又は少量の水を添加して、更に60〜200
℃で0〜30時間好ましくは0.2〜30時間反応させてもよ
い。又最初(II)、(III)、(III′)で表わされる化
合物を混合し、0〜200℃の温度で、0.2〜10時間反応さ
せ、ついで(IV)で表わされる化合物と酸及び/又は少
量の水を添加して更に60〜200℃の温度で、0〜30時間
好ましくは0.2〜20時間反応させてもよい。 (However, in these equations, R 1 , R 2 , R 3 , R 4 , m, γ, n, p,
q and logarithmic viscosity have the same meanings as described above, and X represents an alkoxy group, an acetoxy group, a halogen, or a hydroxyl group. ) In this reaction, (II), (III), (III ′),
The compound represented by (IV) is mixed and reacted at a temperature of 0 to 200 ° C. for 0.2 to 10 hours, and then at a temperature of 60 to 200 ° C. for a further 0 to
The reaction may be carried out for 30 hours, but (II), (III), (I
II ′) is mixed and reacted at a temperature of 0 to 200 ° C. for 0.2 to 10 hours, and then a compound of (IV) is added to the mixture at a temperature of 60 to 200 ° C. The reaction may be performed for -30 hours, preferably 0.2-30 hours. Also (I
Compounds represented by I), (III), (III ′) and (IV) are mixed and reacted at a temperature of 0 to 200 ° C. for 0.2 to 10 hours,
Then add acid and / or a small amount of water to add 60-200
The reaction may be carried out at 0 ° C. for 0 to 30 hours, preferably 0.2 to 30 hours. First, the compounds represented by (II), (III) and (III ') are mixed and reacted at a temperature of 0 to 200 ° C for 0.2 to 10 hours, and then the compound represented by (IV) and an acid and / or A small amount of water may be added and further reacted at a temperature of 60 to 200 ° C. for 0 to 30 hours, preferably 0.2 to 20 hours.
一般式(II)で表わされるテトラカルボン酸二無水物
及びそのジエステルとしては、次の化合物を例示するこ
とができる。Examples of the tetracarboxylic acid dianhydride represented by the general formula (II) and its diester include the following compounds.
ピロメリット酸二無水物、3,3′,4,4′−ビフェニル
テトラカルボン酸二無水物、2,2′,3,3′−ビフェニル
テトラカルボン酸二無水物、2,3,3′,4′−ビフェニル
テトラカルボン酸二無水物、3,3′,4,4′−ベンゾフェ
ノンテトラカルボン酸二無水物、2,3,3′,4′−ベンゾ
フェノンテトラカルボン酸二無水物、2,2′,3,3′−ベ
ンゾフェノンテトラカルボン酸二無水物、ビス(3,4−
ジカルボキシフェニル)−エーテル二無水物、ビス(3,
4−ジカルボキシフェニル)−スルホン二無水物、1,2,
5,6−ナフタリンテトラカルボン酸二無水物、2,3,6,7−
ナフタリンテトラカルボン酸二無水物及びこれらとアル
コールとのジエステル類である。Pyromellitic dianhydride, 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride, 2,2', 3,3'-biphenyltetracarboxylic dianhydride, 2,3,3 ', 4'-biphenyltetracarboxylic dianhydride, 3,3 ', 4,4'-benzophenone tetracarboxylic dianhydride, 2,3,3', 4'-benzophenone tetracarboxylic dianhydride, 2,2 ′, 3,3′-Benzophenonetetracarboxylic dianhydride, bis (3,4-
Dicarboxyphenyl) -ether dianhydride, bis (3,
4-dicarboxyphenyl) -sulfone dianhydride, 1,2,
5,6-naphthalenetetracarboxylic dianhydride, 2,3,6,7-
They are naphthalenetetracarboxylic dianhydride and diesters of these with alcohols.
一般式(III)及び(III′)で表わされるアミノシリ
コン化合物としては次の化合物を例示できる。The following compounds can be exemplified as the aminosilicon compounds represented by the general formulas (III) and (III ′).
NH2-(CH2)3-Si(OCH3)3、 NH2-(CH2)3-Si(OC2H5)3、 NH2-(CH2)3-Si(CH3)(OCH3)2、 NH2-(CH2)3-Si(CH3)(OC2H5)2、 NH2-(CH2)3-Si(C2H5)(OC3H7)2、 NH2-(CH2)4-Si(OCH3)3、 NH2-(CH2)4-Si(OC2H5)3、 NH2-(CH2)4-Si(CH3)(OC2H5)2、 また一般式(IV)で表わされるシリコン化合物として
は、次の化合物を例示することができる。 NH 2 - (CH 2) 3 -Si (OCH 3) 3, NH 2 - (CH 2) 3 -Si (OC 2 H 5) 3, NH 2 - (CH 2) 3 -Si (CH 3) (OCH 3) 2, NH 2 - ( CH 2) 3 -Si (CH 3) (OC 2 H 5) 2, NH 2 - (CH 2) 3 -Si (C 2 H 5) (OC 3 H 7) 2, NH 2 - (CH 2) 4 -Si (OCH 3) 3, NH 2 - (CH 2) 4 -Si (OC 2 H 5) 3, NH 2 - (CH 2) 4 -Si (CH 3) (OC 2 H 5 ) 2 , The following compounds can be exemplified as the silicon compound represented by the general formula (IV).
Si(OCH3)4、 Si(CH3)(OCH3)3、 Si(C6H13)(OCH3)3、 Si(CH3)2(OCH3)2、 Si(CH3)3(OCH3)、 Si(OC2H5)4、 Si(CH3)(OC2H5)3、 Si(CH3)2(OC2H5)2、 Si(CH3)3(OC2H5)、 本発明方法において上記の原料化合物を溶媒中で反応
させるための好ましい溶媒(以下反応溶媒とも言う)と
してN−メチルピロリドン、ジメチルアセトアミド、ジ
メチルホルムアミド、ジメチルスルホキシド、テトラメ
チル尿素、ピリジン、ジメチルスルホン、ヘキサメチル
ホスホンアミド、メチルホルムアミド、N−アセチル−
2−ピロリドン、トルエン、キシレン、エチレングリコ
ールモノメチルエーテル、エチレングリコールモノエチ
ルエーテル、エチレングリコールモノブチルエーテル、
ジエチレングリコールモノメチルエーテル、ジエチレン
グリコールモノエチルエーテル、ジエチレングリコール
ジメチルエーテル、ジエチレングリコールジエチルエー
テル等の1種又は2種以上を使用でき、また上記溶媒を
30重量%以上含有する他の溶媒との混合溶媒としても用
いることができる。 Si (OCH 3) 4, Si (CH 3) (OCH 3) 3, Si (C 6 H 13) (OCH 3) 3, Si (CH 3) 2 (OCH 3) 2, Si (CH 3) 3 ( OCH 3), Si (OC 2 H 5) 4, Si (CH 3) (OC 2 H 5) 3, Si (CH 3) 2 (OC 2 H 5) 2, Si (CH 3) 3 (OC 2 H 5 ), In the method of the present invention, N-methylpyrrolidone, dimethylacetamide, dimethylformamide, dimethyl sulfoxide, tetramethylurea, pyridine, dimethyl sulfone, hexa as a preferable solvent (hereinafter also referred to as a reaction solvent) for reacting the above raw material compound in a solvent Methylphosphonamide, methylformamide, N-acetyl-
2-pyrrolidone, toluene, xylene, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monobutyl ether,
One or more of diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether and the like can be used, and the above solvent is used.
It can also be used as a mixed solvent with another solvent containing 30% by weight or more.
次に反応方法について説明する。式(II)で示される
テトラカルボン酸二無水物または、そのジエステルaモ
ルと、式(III)及び(III′)で表わされるアミノシリ
コン化合物bモル及び式(IV)で示されるシリコン化合
物cモルとを反応溶媒中で反応させる。Next, the reaction method will be described. Tetracarboxylic acid dianhydride represented by the formula (II) or a diester thereof a mole, aminosilicon compound b mole represented by the formulas (III) and (III ′) and silicon compound c mole represented by the formula (IV). And are reacted in a reaction solvent.
このときa,b,cはそれらの間に式(V)、(VI)の関
係が存在するように定める。式(V)はテトラカルボン
酸二無水物又はそのジエステルとアミノシリコン化合物
とでイミドを形成する場合のほぼ当量関係を表わしてお
り、また式(VI)はその下限未満ではポリイミドに近付
き、上限を超える場合、シリコン化合物に近付き、本発
明の化合物の特徴が減少する。At this time, a, b, and c are defined so that the relationships of formulas (V) and (VI) exist between them. The formula (V) represents a nearly equivalent relationship in the case of forming an imide with a tetracarboxylic acid dianhydride or its diester and an aminosilicon compound, and the formula (VI) is close to a polyimide below the lower limit and has an upper limit. If it exceeds, it approaches a silicon compound, and the characteristics of the compound of the present invention are reduced.
反応溶媒は、これと添加した原料との合計量を基準と
して、70重量%以上使用するのがよい。これ以下の溶媒
量では、反応途中で液がゲル化し流動性を失なう場合が
あり好ましくない。The reaction solvent is preferably used in an amount of 70% by weight or more based on the total amount of the reaction solvent and the added raw materials. If the amount of solvent is less than this, the liquid may gel during the reaction and lose fluidity, which is not preferable.
反応は前記三種の原料を溶媒中で0〜200℃の温度
で、0.2〜10時間反応を行なった後(もしくは前二者を
0〜200℃の温度で、0.2〜10時間反応を行ない、後者を
添加した後)、必要により酸及び/又は少量の水を添加
し、60〜200℃で0〜30時間、好ましくは0.2〜30時間反
応させる。この際、添加する酸及び水はシロキサン縮合
反応を促進するための公知の手段である。In the reaction, the above three kinds of raw materials are reacted in a solvent at a temperature of 0 to 200 ° C. for 0.2 to 10 hours (or the former two are reacted at a temperature of 0 to 200 ° C. for 0.2 to 10 hours, the latter being the latter). After addition), if necessary, an acid and / or a small amount of water is added, and the reaction is carried out at 60 to 200 ° C. for 0 to 30 hours, preferably 0.2 to 30 hours. At this time, the acid and water to be added are known means for promoting the siloxane condensation reaction.
酸としては鉱酸、有機酸、酸性イオン交換樹脂及び担
体に無機酸を担持させた固体酸性物質を例示することが
できる。Examples of the acid include mineral acids, organic acids, acidic ion exchange resins, and solid acidic substances in which an inorganic acid is supported on a carrier.
前記鉱酸としては、塩酸、硫酸、及び硝酸が好まし
い、前記有機酸としてはギ酸、酢酸、プロピオン酸、シ
ュウ酸、クエン酸、マロン酸、サリチル酸、クロル酢
酸、フルオロ酢酸、ベンゼンスルホン酸、トルエンスル
ホン酸等が用いられる。The mineral acid is preferably hydrochloric acid, sulfuric acid, and nitric acid.The organic acid is formic acid, acetic acid, propionic acid, oxalic acid, citric acid, malonic acid, salicylic acid, chloroacetic acid, fluoroacetic acid, benzenesulfonic acid, toluenesulfone. Acid or the like is used.
前記酸性イオン交換樹脂としては、スルホン酸系の強
酸性カチオン交換樹脂及び超強酸性カチオン樹脂で、た
とえば商品名ダイヤイオンSKIB−H、ダイヤイオンPK−
228−H、アンバ−ライト−IR−120B、アンバ−ライト
−118、アンバ−ライト−112、アンバ−ライト−122、
アンバ−ライト−124、アンバ−ライト−200C、ナフィ
オン−H等が好ましい。Examples of the acidic ion-exchange resin include sulfonic acid-based strongly acidic cation-exchange resins and super-strong acidic cation resins, for example, trade names DIAION SKIB-H and DIAION PK-.
228-H, Amber Light-IR-120B, Amber Light-118, Amber Light-112, Amber Light-122,
Amberlite-124, Amberlite-200C, Nafion-H and the like are preferable.
前記担体に無機酸を担持させた触媒としては、シリ
カ、アルミナ−シリカ、ジルコニア及び活性炭に硫酸又
はりん酸を担持させたもの等が使用できる。As the catalyst having an inorganic acid supported on the carrier, silica, alumina-silica, zirconia, and activated carbon carrying sulfuric acid or phosphoric acid can be used.
酸の添加量としては、前記表現で1/10(mb+nc)モル
以下が好ましいが、またこれ以上存在してもよい。The addition amount of the acid is preferably 1/10 (mb + nc) mol or less in the above expression, but may be more.
添加する水の量は{(m−1)b+nc}モル以下でも
よいが、これ以上存在した方が反応速度は早くなる。The amount of water to be added may be not more than {(m-1) b + nc} mol, but the more it is present, the faster the reaction rate.
反応は、第1段階では式(II)で表わされる酸無水物
もしくはそのジエステルと式(III)及び(III′)で表
わされるアミノシリコン化合物が反応し、アミド酸もし
くはイミドが形成される。また条件により、このアミド
酸もしくはイミド化合物の末端のけい素に結合したX基
が溶媒中に混入した水及び/またはアミド酸のイミド化
反応により生成した水の存在下または不存在下にシロキ
サン縮合反応を起こし、より高分子量化する場合があ
る。In the reaction, in the first step, the acid anhydride represented by the formula (II) or its diester and the aminosilicon compound represented by the formulas (III) and (III ′) are reacted to form an amic acid or an imide. Depending on the conditions, the siloxane condensation may occur in the presence or absence of water mixed with the X group bonded to the terminal silicon of the amic acid or imide compound in the solvent and / or water generated by the imidization reaction of the amic acid. In some cases, a reaction may occur to increase the molecular weight.
このとき式(IV)の化合物が共存する場合、これらと
共縮合反応を行なう場合もある。さらにアミド酸が存在
する場合、昇温してイミド基に変換しておく。このよう
にして、この第1段階の反応で本発明の可溶性イミドオ
リゴマーが得られる場合があるが第1段階の反応におい
て、式(IV)の化合物が存在しない場合又は該化合物の
量が少な過ぎる場合、さらに式(IV)の化合物を添加
し、あるいは必要により水及び/又は酸系促進剤を添加
し、シロキサン縮合反応とイミド化反応を一層促進させ
ることができる。At this time, when the compound of the formula (IV) coexists, a cocondensation reaction may be carried out with them. Further, when amic acid is present, the temperature is raised to convert it to an imide group. In this way, the soluble imide oligomer of the present invention may be obtained in this first-step reaction, but in the first-step reaction, when the compound of the formula (IV) is not present or the amount of the compound is too small. In this case, the compound of formula (IV) may be further added, or if necessary, water and / or an acid accelerator may be added to further accelerate the siloxane condensation reaction and imidization reaction.
このようにして、対数粘度数が0.05〜0.5dl/gの適度
の分子量の本発明の可溶性イミドオリゴマーを得ること
ができる。In this way, it is possible to obtain the soluble imide oligomer of the present invention having a logarithmic viscosity number of 0.05 to 0.5 dl / g and an appropriate molecular weight.
上記対数粘度数が0.05未満の場合、塗膜性が不十分で
あり、0.5を超えるものは合成することが困難であっ
た。If the logarithmic viscosity number is less than 0.05, the coating property is insufficient, and if it exceeds 0.5, it is difficult to synthesize.
本発明方法により得られるオリゴマーは基本的な構造
は式(I)で表わされるが、一部未反応の が存在する。The oligomer obtained by the method of the present invention has a basic structure represented by the formula (I), but partially unreacted Exists.
そのため本発明のオリゴマーを焼成することによりシ
ロキサン縮合反応を進行させ、分子間架橋により硬化、
不溶化する。このようにして本発明のオリゴマーから得
られる構造体を得ることができる。Therefore, the siloxane condensation reaction is promoted by firing the oligomer of the present invention, and cured by intermolecular crosslinking,
Insolubilize. In this way, the structure obtained from the oligomer of the present invention can be obtained.
式(I)におけるp,qについて、q/pが大になるにつれ
て、得られた構造体はイミドの特性を弱めシリコン化合
物の特性を強める。With respect to p and q in the formula (I), as q / p becomes larger, the obtained structure weakens the properties of the imide and strengthens the properties of the silicon compound.
q/pが大になり、かつm及びnが大になるにつれ、無
機物(シリカ)の特性を強める。従って熱膨脹係数の低
下及び硬度の上昇が著しくなる。従ってq/pは0.03〜33
が好ましい。As q / p becomes larger and m and n become larger, the characteristics of the inorganic substance (silica) are strengthened. Therefore, the thermal expansion coefficient decreases and the hardness increases remarkably. Therefore, q / p is 0.03-33
Is preferred.
次に本発明のイミドオリゴマーの使用方法について説
明する。Next, a method of using the imide oligomer of the present invention will be described.
本発明によって製造したイミドオリゴマーは殆んどの
場合、ワニス等の如く、溶媒に溶解した溶液の状態で使
用されるから、本発明の製造方法で得られる溶液を濃縮
または溶媒で稀釈して使用するのが良い。溶媒としては
反応溶媒と同じものを使用することができる。In most cases, the imide oligomer produced by the present invention is used in the state of a solution dissolved in a solvent, such as a varnish, so that the solution obtained by the production method of the present invention is concentrated or diluted with a solvent before use. Is good. The same solvent as the reaction solvent can be used as the solvent.
本発明のイミドオリゴマーの溶液から成形品を形成さ
せる方法としては、既に公知のどの様な方法で行っても
よく、例えばガラス板、銅板、アルミニウム板などにイ
ミドオリゴマー溶液を流した後、加熱することにより溶
媒を除去すると共に、シロキサン結合による架橋が進行
し、硬くて強靱な皮膜が形成される。As a method for forming a molded product from the solution of the imide oligomer of the present invention, any known method may be used. For example, a glass plate, a copper plate, an aluminum plate or the like is poured with the imide oligomer solution and then heated. As a result, the solvent is removed, and at the same time, the crosslinking by the siloxane bond proceeds to form a hard and tough film.
積層された複合材料を形成させるためには、この様な
操作を逐次行なうことにより可能であるが、ワニスを接
着剤として複数の異質素材間に塗り焼成することにより
積層された複合材料を得ることができる。In order to form a laminated composite material, it is possible to carry out such an operation in sequence, but to obtain a laminated composite material by applying varnish as an adhesive between a plurality of different raw materials and firing. You can
フィラーあるいはガラス繊維等にワニスを含浸させ、
焼成硬化させることにより、強化皮膜を用いた積層材料
を形成させることができる。Filler or glass fiber impregnated with varnish,
By baking and curing, a laminated material using a reinforcing film can be formed.
焼成条件は、使用する溶媒、塗膜の厚さ等により異な
るが、50〜500℃、好ましくは200〜400℃、0.5〜2時間
位で十分である。The baking conditions vary depending on the solvent used, the thickness of the coating film, etc., but 50 to 500 ° C., preferably 200 to 400 ° C., 0.5 to 2 hours are sufficient.
本発明のイミドオリゴマーから得られた硬化物は、耐
熱性、機械的特性、電気的特性及び接着性に優れている
ため、ガラス、セラミックス、シリコンウェハー及び各
種金属酸化物等の各種コーティング剤、接着剤、あるい
はガラス繊維等の無機繊維に含浸させた後、焼成するこ
とにより複合構造体とする等の用途が考えられる。The cured product obtained from the imide oligomer of the present invention is excellent in heat resistance, mechanical properties, electrical properties and adhesiveness, and therefore various coating agents such as glass, ceramics, silicon wafers and various metal oxides, and adhesives. An application is conceivable in which the agent or the inorganic fiber such as glass fiber is impregnated and then fired to form a composite structure.
以下に、実施例、比較例及び使用試験によって本発明
を更に具体的に説明するが、本発明はこの実施例によっ
て限定されるものではないことは勿論である。Hereinafter, the present invention will be described in more detail with reference to Examples, Comparative Examples and usage tests, but it goes without saying that the present invention is not limited to these Examples.
(実施例1) 攪拌装置、滴下ロート、温度計、コンデンサー及び窒
素置換装置を付した1のフラスコ内を窒素ガスにより
置換した後、脱水精製した500gのメチルカルビトール及
び4.93g (0.0231モル)のアミノフェニルトリメトキシシラン
(以下APMSと略称する)(メタ体/パラ体=68/32)を
投入し、この溶液を30〜35℃に保ちつつ2.52g (0.0116モル)のピロメリット酸二無水物(以下PMDAと
略称する)を滴下ロートから30分間で添加し、この温度
で1時間さらに120℃に昇温して、3時間反応を行っ
た。その後、温度を70℃に保ちつつ、48.14g(0.231モ
ル)のテトラエトキシシラン、50mlの水及び4.00gの酢
酸を添加した後、反応液中から、未反応のテトラエトキ
シシランが検出されなくなるまで、10時間反応を行い、
淡褐色透明液である本発明のイミド基含有シリコン系オ
リゴマーの溶液が得られた。(Example 1) After replacing the inside of a flask equipped with a stirrer, a dropping funnel, a thermometer, a condenser and a nitrogen purging device with nitrogen gas, dehydration-purified 500 g of methyl carbitol and 4.93 g (0.0231 mol) of Aminophenyltrimethoxysilane (hereinafter abbreviated as APMS) (meta / para = 68/32) was added, and while maintaining this solution at 30 to 35 ° C, 2.52 g (0.0116 mol) of pyromellitic dianhydride. (Hereinafter abbreviated as PMDA) was added from a dropping funnel in 30 minutes, the temperature was further raised to 120 ° C. for 1 hour, and the reaction was performed for 3 hours. Then, while maintaining the temperature at 70 ° C, after adding 48.14 g (0.231 mol) of tetraethoxysilane, 50 ml of water and 4.00 g of acetic acid, until no unreacted tetraethoxysilane was detected in the reaction solution. , React for 10 hours,
A solution of the imide group-containing silicon-based oligomer of the present invention, which was a light brown transparent liquid, was obtained.
このオリゴマーの前記対数粘度数は0.062dl/gであ
り、KBr錠剤方により測定した赤外線吸収スペクトルを
第1図に示した。The above-mentioned logarithmic viscosity number of this oligomer was 0.062 dl / g, and the infrared absorption spectrum measured by the KBr tablet method is shown in FIG.
(実施例2) 実施例1と同様の装置及び方法で3.39g(0.0159モ
ル)のAPMS(メタ体/パラ体=68/32)を500gのメチル
カルビトール中に投入した後、これに2.56g (0.00795モル)の3,3′,4,4′−ベンゾフェノンテトラ
カルボン酸二無水物(以下BTDAと略称する)を30分間で
投入し、40℃で1時間、さらに150℃で1.5時間反応を行
なった。(Example 2) Using the same apparatus and method as in Example 1, 3.39 g (0.0159 mol) of APMS (meta / para = 68/32) was charged into 500 g of methyl carbitol, and then 2.56 g was added thereto. (0.00795 mol) of 3,3 ′, 4,4′-benzophenonetetracarboxylic dianhydride (hereinafter abbreviated as BTDA) was added in 30 minutes, and the reaction was carried out at 40 ° C. for 1 hour and further at 150 ° C. for 1.5 hours. I did.
その後、49.65g(0.238モル)のテトラエトキシシラ
ン、30mlの水、及び5.50gの酢酸を添加し、75℃で12時
間反応を行ったところ、反応液から未反応のテトラエト
キシシランは検出されなかった。After that, 49.65 g (0.238 mol) of tetraethoxysilane, 30 ml of water, and 5.50 g of acetic acid were added, and the reaction was carried out at 75 ° C for 12 hours. No unreacted tetraethoxysilane was detected in the reaction solution. It was
得られた本発明のイミド基含有シリコン系オリゴマー
の溶液は淡褐色透明であり、このオリゴマーの対数粘度
数は0.056dl/gであった。The resulting solution of the imide group-containing silicon-based oligomer of the present invention was light brown and transparent, and the logarithmic viscosity number of this oligomer was 0.056 dl / g.
(実施例3) 実施例1と同様の装置及び方法で10.93g(0.0512モ
ル)のAPMS(パラ体100%)を、500gのエチルカルビト
ール中に投入した後、これに5.59g(0.0256モル)のPMD
Aを30分間で投入し、30℃で1時間さらに120℃で3時間
反応を行なった。Example 3 Using the same apparatus and method as in Example 1, 10.93 g (0.0512 mol) of APMS (100% para form) was introduced into 500 g of ethyl carbitol, and then 5.59 g (0.0256 mol). PMD
A was added for 30 minutes, and the reaction was carried out at 30 ° C for 1 hour and further at 120 ° C for 3 hours.
その後、39.01g(0.256モル)のテトラメトキシシラ
ン、50mlの水、及び2.5mlの酢酸を添加し、60℃で15時
間反応を行なったところ反応液から未反応のテトラメト
キシシランは検出されなかった。Thereafter, 39.01 g (0.256 mol) of tetramethoxysilane, 50 ml of water, and 2.5 ml of acetic acid were added, and the reaction was carried out at 60 ° C. for 15 hours. No unreacted tetramethoxysilane was detected in the reaction solution. .
得られた本発明のイミド基含有シリコン系オリゴマー
の溶液は淡褐色透明であり、このオリゴマーの対数粘度
数は0.063dl/gであった。The resulting solution of the imide group-containing silicon-based oligomer of the present invention was light brown and transparent, and the logarithmic viscosity number of this oligomer was 0.063 dl / g.
(実施例4) 実施例1と同様の装置及び方法で26.99g(0.0838モ
ル)のBTDA、35.74g(0.168モル)のAPMS(パラ体100
%)及び25.50g(0.168モル)のテトラメトキシシラン
を375gのエチルカルビトール及び125gの2−ブトキシエ
タノールの混合液中に添加し、30℃で2時間、続いて11
0℃で2時間反応を行なった。(Example 4) Using the same apparatus and method as in Example 1, 26.99 g (0.0838 mol) of BTDA and 35.74 g (0.168 mol) of APMS (para-body 100) were used.
%) And 25.50 g (0.168 mol) of tetramethoxysilane in a mixture of 375 g of ethyl carbitol and 125 g of 2-butoxyethanol, at 30 ° C. for 2 hours, then 11
The reaction was carried out at 0 ° C for 2 hours.
その後、30gの水及び3.5gの濃塩酸を添加し、60℃で1
8時間反応を行なったところ、反応液から未反応のテト
ラメトキシシランは検出されなかった。得られた本発明
のイミド基含有シリコン系オリゴマーの溶液は褐色透明
であり、このオリゴマーの対数粘度数は0.070dl/gであ
った。Then, add 30 g of water and 3.5 g of concentrated hydrochloric acid, and add 1 at 60 ° C.
When the reaction was carried out for 8 hours, unreacted tetramethoxysilane was not detected in the reaction solution. The obtained solution of the imide group-containing silicon-based oligomer of the present invention was brown and transparent, and the logarithmic viscosity number of this oligomer was 0.070 dl / g.
(実施例5) 実施例1と同様の装置及び方法で21.23g(0.0593モ
ル)のビス(3,4−ジカルボキシフェニル)−スルホン
二無水物及び25.29g(0.119モル)のAPMS(パラ体100
%)を450gのメチルカルビトール及び50gのN−メチル
−2−ピロリドンからなる混合液に投入し、100℃で5
時間反応を行った。Example 5 Using the same apparatus and method as in Example 1, 21.23 g (0.0593 mol) of bis (3,4-dicarboxyphenyl) -sulfone dianhydride and 25.29 g (0.119 mol) of APMS (para form 100) were prepared.
%) Into a mixture of 450 g of methyl carbitol and 50 g of N-methyl-2-pyrrolidone.
The reaction was carried out over time.
その後、9.03g(0.0593モル)のテトラメトキシシラ
ン、20gの水、及び2.5gの酢酸を添加し、70℃で7時間
反応を行ったところ、反応液から未反応のテトラメトキ
シシランは検出されなかった。Thereafter, 9.03 g (0.0593 mol) of tetramethoxysilane, 20 g of water, and 2.5 g of acetic acid were added, and the reaction was carried out at 70 ° C. for 7 hours. As a result, unreacted tetramethoxysilane was not detected from the reaction solution. Was.
得られた本発明のイミド基含有シリコン系オリゴマー
の溶液は褐色透明であり、このオリゴマーの対数粘度数
は0.18dl/gであった。The resulting solution of the imide group-containing silicon-based oligomer of the present invention was transparent and brown, and the logarithmic viscosity number of this oligomer was 0.18 dl / g.
(実施例6) 実施例1と同様の装置及び方法で27.79g(0.130モ
ル)のAPMS(メタ体/パラ体=38/62)及び20.99g(0.0
651モル)のBTDAを、500gの2−メトキシエタノール中
に添加し、40℃、1時間反応を行った後、115℃で3時
間反応を行なった。その後6.78g(0.0325モル)のテト
ラエトキシシラン、10gの水、及び1.5gの酢酸を投入
し、80℃で6時間反応を行ったところ、反応液から未反
応のテトラエトキシシランは検出されなかった。得られ
た本発明のイミド基含有シリコン系オリゴマーの溶液は
淡褐色透明であり、このオリゴマーの対数粘度数は0.21
dl/gであった。(Example 6) Using the same apparatus and method as in Example 1, 27.79 g (0.130 mol) of APMS (meta / para form = 38/62) and 20.99 g (0.0
651 mol) of BTDA was added to 500 g of 2-methoxyethanol, the reaction was carried out at 40 ° C for 1 hour, and then the reaction was carried out at 115 ° C for 3 hours. After that, 6.78 g (0.0325 mol) of tetraethoxysilane, 10 g of water, and 1.5 g of acetic acid were added, and the reaction was carried out at 80 ° C. for 6 hours. No unreacted tetraethoxysilane was detected in the reaction solution. . The resulting solution of the imide group-containing silicon-based oligomer of the present invention was light brown and transparent, and the logarithmic viscosity number of this oligomer was 0.21.
dl / g.
(実施例7) 実施例1と同様の装置及び方法で6.99g(0.0238モ
ル)の3,3′,4,4′−ビフェニルテトラカルボン酸二無
水物(以下BPDAと略称する)を、500gのメチルカルビト
ールに添加し、120℃で2時間反応を行うことにより、B
PDAにメチルカルビトールを付加させた。(Example 7) Using the same apparatus and method as in Example 1, 6.99 g (0.0238 mol) of 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride (hereinafter abbreviated as BPDA) was added in an amount of 500 g. By adding to methyl carbitol and reacting at 120 ° C for 2 hours, B
Methyl carbitol was added to PDA.
その後、8.64g(0.0451モル)の3−アミノプロピル
メチルジエトキシシランを投入し、120℃で3時間反応
を行った。Then, 8.64 g (0.0451 mol) of 3-aminopropylmethyldiethoxysilane was added and the reaction was carried out at 120 ° C. for 3 hours.
さらに16.54g(0.113モル)のジメチルジエトキシシ
ラン、23.51g(0.113モル)のテトラエトキシシラン、4
5gの水、及び3.5gの酢酸を添加し、70℃で10時間反応を
行なうことにより反応液から未反応のジメチルエトキシ
シラン及びテトラエトキシシランは検出されなかった。Further, 16.54 g (0.113 mol) of dimethyldiethoxysilane, 23.51 g (0.113 mol) of tetraethoxysilane, 4
Unreacted dimethylethoxysilane and tetraethoxysilane were not detected in the reaction solution by adding 5 g of water and 3.5 g of acetic acid and conducting the reaction at 70 ° C. for 10 hours.
得られた、本発明のイミド基含有シリコン系オリゴマ
ーの溶液は淡褐色透明であり、このオリゴマーの対数粘
度数は0.058dl/gであった。The resulting solution of the imide group-containing silicon-based oligomer of the present invention was light brown and transparent, and the logarithmic viscosity number of this oligomer was 0.058 dl / g.
(実施例8) 実施例5に於いて酢酸を添加しないで2段目の反応を
行ったところ、25時間で反応液から未反応のテトラエト
キシシランは検出されなくなった。得られた本発明のイ
ミド基含有シリコン系オリゴマーの溶液は淡褐色透明で
あり、このオリゴマーの対数粘度数は0.25dl/gであっ
た。(Example 8) When the second step reaction was carried out in Example 5 without adding acetic acid, unreacted tetraethoxysilane was not detected in the reaction solution in 25 hours. The obtained solution of the imide group-containing silicon-based oligomer of the present invention was light brown and transparent, and the logarithmic viscosity number of this oligomer was 0.25 dl / g.
(実施例9) 実施例5に於いて水を添加しないで2段目の反応を行っ
たところ、20時間で反応液から未反応のテトラエトキシ
シランは検出されなくなった。得られた本発明のイミド
基含有シリコン系オリゴマーの溶液は淡褐色透明であ
り、このオリゴマーの対数粘度数は0.23dl/gであった。(Example 9) When the second step reaction was carried out in Example 5 without adding water, unreacted tetraethoxysilane was not detected in the reaction solution in 20 hours. The obtained solution of the imide group-containing silicon-based oligomer of the present invention was light brown and transparent, and the logarithmic viscosity number of this oligomer was 0.23 dl / g.
(実施例10) 実施例5に於いて酢酸及び水を添加しないで2段目の
反応を行ったところ、28時間で反応液から未反応のテト
ラエトキシシランは検出されなくなった。得られた本発
明のイミド基含有シリコン系オリゴマーの溶液は淡褐色
透明であり、このオリゴマーの対数粘度数は0.27dl/gで
あった。(Example 10) When the second step reaction was carried out without adding acetic acid and water in Example 5, unreacted tetraethoxysilane was not detected in the reaction solution in 28 hours. The resulting solution of the imide group-containing silicon-based oligomer of the present invention was light brown and transparent, and the logarithmic viscosity number of this oligomer was 0.27 dl / g.
(比較例1) 実施例1と同様の装置及び方法で55.56g(0.267モ
ル)のテトラエトキシシラン、60gの水及び5.5gの酢酸
を500gのメチルカルビトール中に添加し、80℃で18時間
反応を行なうことにより反応液から未反応のテトラエト
キシシランは検出されず、無色透明のテトラエトキシシ
ランオリゴマーが得られた。Comparative Example 1 Using the same apparatus and method as in Example 1, 55.56 g (0.267 mol) of tetraethoxysilane, 60 g of water and 5.5 g of acetic acid were added to 500 g of methyl carbitol, and the mixture was heated at 80 ° C. for 18 hours. By carrying out the reaction, unreacted tetraethoxysilane was not detected in the reaction solution, and a colorless and transparent tetraethoxysilane oligomer was obtained.
(比較例2) 実施例1と同様の装置及び方法で、31.66g(0.148モ
ル)のAPMS(パラ体100%)及び23.91g(0.0742モル)
のBTDAを500gの2−メトキシエタノールに投入し、30℃
で2時間、続いて110℃で2時間反応を行なうことによ
り淡褐色透明のイミドオリゴマーを得た。Comparative Example 2 Using the same apparatus and method as in Example 1, 31.66 g (0.148 mol) of APMS (100% para form) and 23.91 g (0.0742 mol) were used.
Of BTDA into 500 g of 2-methoxyethanol at 30 ° C
The reaction was carried out for 2 hours at 110 ° C. and then for 2 hours at 110 ° C. to obtain a light brown transparent imide oligomer.
なお参考のため実施例1〜10及び比較例1〜2で使用
した原料の量a,b,cモル、並びにb/a及びc/aを第1表に
示す。For reference, the amounts of raw materials used in Examples 1 to 10 and Comparative Examples 1 to 2 are shown in Table 1 as a, b and c moles, and b / a and c / a.
(使用試験) 実施例1〜10及び比較例1〜2で合成した各ワニスを
ガラス板上に塗布し、電気炉中で300℃、1時間焼成す
ることにより、ガラス板上に膜厚ほぼ1.5μの皮膜を形
成せしめた。それらの塗膜性及び表面硬度(鉛筆硬度JI
SK5400)を測定した結果を第2表に示した。 (Usage test) Each varnish synthesized in Examples 1 to 10 and Comparative Examples 1 and 2 was applied on a glass plate and baked in an electric furnace at 300 ° C for 1 hour to give a film thickness of about 1.5 on the glass plate. A μ film was formed. Their coating properties and surface hardness (pencil hardness JI
The results of measurement of SK5400) are shown in Table 2.
(塗膜性の試験方法)各ワニスを0.2μのフィルター
を通して過し、ゴミを除いた後、ガラス板上に滴下
し、スピンナーによりスピンコートする。これを電気
中で300℃、1時間焼成することにより硬化膜を形成せ
しめる。これを目視により判断する。評価基準において
「良好」とは次のすべてを満たすものである。(Test Method for Coating Property) Each varnish is passed through a 0.2 μ filter to remove dust, and then dropped on a glass plate and spin-coated with a spinner. This is baked in electricity at 300 ° C. for 1 hour to form a cured film. This is visually determined. In the evaluation criteria, "good" means that all of the following are satisfied.
(1)膜がガラス板全面にほぼ均一の厚みで形成されて
いること。(1) The film is formed with a substantially uniform thickness on the entire surface of the glass plate.
(2)膜表面が滑らかであること。(2) The film surface is smooth.
(3)クラックの発生がないこと。(3) No cracks occur.
(耐熱性試験) 前記、塗膜性及び表面硬度試験で形成した皮膜を、真
空理工(株)製、熱てんびんTGD5000を使用して、常温
より10℃/minの昇温速度で700℃まで昇温したときの重
量減を示すと下記の通りである。 (Heat resistance test) The film formed by the coating property and surface hardness test was heated from room temperature to 700 ° C at a heating rate of 10 ° C / min using a thermobalance TGD5000 manufactured by Vacuum Riko Co., Ltd. The weight loss when the temperature is raised is as follows.
〔発明の効果〕 本発明のイミドオリゴマーは適度な対数粘度数を有し
ているので、その溶液の粘性は適度であって塗布を良好
に行なうことができる。 [Effect of the Invention] Since the imide oligomer of the present invention has an appropriate logarithmic viscosity number, the viscosity of the solution is appropriate and the coating can be carried out satisfactorily.
また塗布皮膜を焼成することにより、シロキサン縮合
反応が進行し、分子間結合により硬くて強靱な皮膜が形
成されるとともにガラス、セラミックス、シリコンウェ
ハー及び各種金属酸化物等に対して強力な接着作用を示
す。しかも熱膨脹係数を無機化合物の近くまで低下させ
ることが可能なため、無機化合物との積層材料として好
ましい。In addition, by baking the coating film, the siloxane condensation reaction proceeds, forming a hard and tough film due to intermolecular bonding, and also exerting a strong adhesive action on glass, ceramics, silicon wafers and various metal oxides. Show. Moreover, the coefficient of thermal expansion can be lowered to a level close to that of the inorganic compound, and thus it is preferable as a laminated material with the inorganic compound.
さらに無機化合物の欠点である脆さを改善しているた
め、表面コーティング剤としてより厚膜の形成が可能で
あると同時にポリイミド等の有機膜に比較して高硬度で
ある。Further, since it improves the brittleness which is a defect of the inorganic compound, a thicker film can be formed as a surface coating agent and at the same time, it has a higher hardness than an organic film such as polyimide.
また本発明の製造方法によって、該イミドオリゴマー
が、容易に入手可能な原料から、温和な反応条件で製造
可能であって、産業上寄与するところ大である。Further, according to the production method of the present invention, the imide oligomer can be produced from easily available raw materials under mild reaction conditions, which is a great contribution to the industry.
第1図は、KBr錠剤法により測定した赤外線吸収スペク
トルを示す。FIG. 1 shows an infrared absorption spectrum measured by the KBr tablet method.
Claims (8)
成分とし、対数粘度数(温度30±0.01℃、濃度0.5g/dl
での測定値)が0.05〜0.5dl/gである可溶性イミド基含
有シリコン系オリゴマー。 {但し、ここでR1は4価の炭素環式芳香族基を表わし、
1つのイミドを形成する2つのカルボニル基は、それぞ
れ互いにオルト位置に付いており、R2は夫々独立に(CH
2 s、 R3およびR4は同一又は異なる炭素数1〜6のアルキル
基、フェニル基又は炭素数7〜12のアルキル置換フェニ
ル基であり、 mは0≦m≦3、γは0≦γ≦3で、m+γ≧1であ
り、nは1≦n≦4であり、p及びqは正数である。前
記対数粘度数とは次式で表わされる〔ηinh〕である。 (ここでηはウベローデ粘度計を使用し、溶媒中で温度
30±0.01℃、濃度0.5g/dlで測定した値であり、ηOは同
粘度計を使用し、同温度における同溶媒の測定値であ
り、Cは濃度0.5g/dlである。)}1. A structure represented by the following general formula (I) as a main component, having a logarithmic viscosity number (temperature: 30 ± 0.01 ° C., concentration: 0.5 g / dl).
Soluble imide group-containing silicon-based oligomer having a measurement value of 0.05 to 0.5 dl / g. {However, R 1 represents a tetravalent carbocyclic aromatic group,
The two carbonyl groups forming one imide are attached to the ortho positions with respect to each other, and R 2 is independently (CH 2
2 s , R 3 and R 4 are the same or different alkyl groups having 1 to 6 carbon atoms, phenyl groups or alkyl-substituted phenyl groups having 7 to 12 carbon atoms, m is 0 ≦ m ≦ 3, γ is 0 ≦ γ ≦ 3 , M + γ ≧ 1, n is 1 ≦ n ≦ 4, and p and q are positive numbers. The logarithmic viscosity number is [η inh ] represented by the following equation. (Where η is the temperature in a solvent using an Ubbelohde viscometer
It is a value measured at 30 ± 0.01 ° C. and a concentration of 0.5 g / dl, η O is a measured value of the same solvent at the same temperature using the same viscometer, and C is a concentration of 0.5 g / dl. )}
性イミド基含有シリコン系オリゴマー。2. R 2 is independent of each other. The soluble imide group-containing silicon-based oligomer according to claim 1, which is a group represented by:
範囲第1項又は第2項記載の可溶性イミド基含有シリコ
ン系オリゴマー。3. The soluble imide group-containing silicon-based oligomer according to claim 1 or 2, wherein m = 3, γ = 3, and n = 4.
はそのジエステルaモルと一般式(III)及び(III′)
で表わされる化合物bモルと一般式(IV)で表わされる
化合物cモルとを下記式(V)、(VI)の範囲の混合比
のもとで、溶媒を全合計量に対し70重量%以上となるよ
うに添加して、該3種の化合物を、0〜200℃の温度
で、0.2〜40時間反応させることを特徴とする対数粘度
数が0.05〜0.5dl/gで一般式(I)で表わされる構造を
主成分とする可溶性イミド基含有シリコン系オリゴマー
の製造方法。 (但し、これらの式におけるR1,R2,R3,R4,m,γ、n,
p,q及び対数粘度数は第1項で述べたものと同一の意味
を表わし、Xはアルコキシ基、アセトキシ基、ハロゲ
ン、又は水酸基を表わす。)4. A compound represented by the following general formula (II) or its diester amol and general formulas (III) and (III ').
The amount of the solvent is 70% by weight or more based on the total amount of the compound (b) and the compound (c) represented by the general formula (IV) at a mixing ratio within the ranges of the following formulas (V) and (VI). So that the three compounds are reacted at a temperature of 0 to 200 ° C. for 0.2 to 40 hours, and have a logarithmic viscosity number of 0.05 to 0.5 dl / g. A method for producing a soluble imide group-containing silicon-based oligomer having a structure represented by as a main component. (However, in these formulas R 1 , R 2 , R 3 , R 4 , m, γ, n,
p, q and logarithmic viscosity have the same meanings as described in the first item, and X represents an alkoxy group, an acetoxy group, a halogen or a hydroxyl group. )
V)で表わされる3種又は4種の化合物を混合し、0〜2
00℃の温度で0.2〜10時間反応を行ったのち、60〜200℃
の温度で0〜30時間反応を行うことを特徴とする特許請
求の範囲第4項記載の可溶性イミド基含有シリコン系オ
リゴマーの製造方法。5. General formulas (II), (III), (III ') and (I
V) is mixed with three or four compounds,
After reacting at a temperature of 00 ℃ for 0.2-10 hours, 60-200 ℃
The method for producing a soluble imide group-containing silicon-based oligomer according to claim 4, wherein the reaction is performed at the temperature of 0 to 30 hours.
V)で表わされる3種又は4種の化合物を混合し、0〜2
00℃の温度で0.2〜10時間反応を行い、酸及び/又は少
量の水を添加し、60〜200℃で0〜30時間反応を行うこ
とを特徴とする特許請求の範囲第4項記載の可溶性イミ
ド基含有シリコン系オリゴマーの製造方法。6. General formulas (II), (III), (III ') and (I
V) is mixed with three or four compounds,
The reaction is carried out at a temperature of 00 ° C for 0.2 to 10 hours, an acid and / or a small amount of water is added, and the reaction is carried out at 60 to 200 ° C for 0 to 30 hours. A method for producing a soluble imide group-containing silicon-based oligomer.
V)で表わされる3種又は4種の化合物の反応を、(I
I)、(III)、(III′)で表わされる化合物を混合
し、0〜200℃の温度で0.2〜10時間反応を行なった後、
(IV)で表わされる化合物を添加し、60〜200℃で0〜3
0時間反応させることを特徴とする特許請求の範囲第4
項記載の可溶性イミド基含有シリコン系オリゴマーの製
造方法。7. General formulas (II), (III), (III ') and (I
The reaction of 3 or 4 compounds represented by
After the compounds represented by I), (III) and (III ′) are mixed and reacted at a temperature of 0 to 200 ° C. for 0.2 to 10 hours,
The compound represented by (IV) is added, and 0 to 3 at 60 to 200 ° C.
Claim 4 characterized by reacting for 0 hours
The method for producing a soluble imide group-containing silicon-based oligomer according to the above item.
V)で表わされる3種又は4種の化合物の反応を(I
I)、(III)、(III′)で表わされる化合物を混合
し、0〜200℃の温度で、0.2〜10時間反応を行った後、
(IV)で表わされる化合物及び酸及び/又は少量の水を
添加し60〜200℃の温度で、0〜30時間反応を行うこと
を特徴とする特許請求の範囲第4項記載の可溶性イミド
基含有シリコン系オリゴマーの製造方法。8. General formulas (II), (III), (III ') and (I
The reaction of three or four compounds represented by
After the compounds represented by I), (III) and (III ′) are mixed and reacted at a temperature of 0 to 200 ° C. for 0.2 to 10 hours,
The soluble imide group according to claim 4, wherein the compound represented by (IV) and an acid and / or a small amount of water are added and the reaction is carried out at a temperature of 60 to 200 ° C. for 0 to 30 hours. Method for producing contained silicon-based oligomer.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28417287A JPH0826153B2 (en) | 1987-11-12 | 1987-11-12 | Soluble imide group-containing silicon-based oligomer and method for producing the same |
| DE3853710T DE3853710T2 (en) | 1987-11-12 | 1988-11-11 | Oligomers containing silicon atoms and imido groups, curable compositions and their preparation. |
| KR1019880014808A KR970006900B1 (en) | 1987-11-12 | 1988-11-11 | Imido group-containing silicon oligomers and cured product thereof and their preparation |
| EP88310660A EP0317205B1 (en) | 1987-11-12 | 1988-11-11 | Imido group-containing silicon oligomers and cured product thereof, and their preparation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28417287A JPH0826153B2 (en) | 1987-11-12 | 1987-11-12 | Soluble imide group-containing silicon-based oligomer and method for producing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01126335A JPH01126335A (en) | 1989-05-18 |
| JPH0826153B2 true JPH0826153B2 (en) | 1996-03-13 |
Family
ID=17675114
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28417287A Expired - Lifetime JPH0826153B2 (en) | 1987-11-12 | 1987-11-12 | Soluble imide group-containing silicon-based oligomer and method for producing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0826153B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04351667A (en) * | 1991-05-29 | 1992-12-07 | Shin Etsu Chem Co Ltd | Curable resin composition and protective film for electronic component |
| CN1255563C (en) | 2001-05-24 | 2006-05-10 | 弗莱氏金属公司 | Thermal interface material and heat sink configuration |
| JP4772593B2 (en) * | 2006-06-06 | 2011-09-14 | 信越化学工業株式会社 | Polyimide silicone resin composition |
| CN115466393B (en) * | 2022-10-19 | 2023-08-08 | 开封大学 | A kind of non-combustible lightweight composite material and preparation method thereof |
-
1987
- 1987-11-12 JP JP28417287A patent/JPH0826153B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01126335A (en) | 1989-05-18 |
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