JPH0826942B2 - Electromagnetic control valve - Google Patents

Description

TECHNICAL FIELD The present invention relates to a fluid ultra-precision flow rate adjusting device.

[Problems to be Solved by Prior Art and Invention]

Conventionally, the flow rate is controlled by adjusting the gap of the flow rate adjusting section by a driving body and a spring connected to the valve body section. 1 (a) and 1 (b) show an example of a conventional valve. In this adjusting method, the gap of the flow rate adjusting portion is adjusted by the displacement and deformation of the driving body, and the valve body portion can be brought into contact with the valve opening portion by a predetermined pressing force by the spring force when the valve is closed. Further, in the valve shown in FIG. 1, the position of the valve element is adjusted by the balance of the driving element and the force of the spring force, so that the position can be controlled with a certain degree of precision, and the precise flow rate of the fluid can be controlled.

However, when attempting to change the position of the valve body, a new balance state must be established after changing the balance state of the spring force and the force of the driving body, and accurate position control cannot be performed, and It has a drawback that it cannot operate at high speed because it is accompanied by vibration due to the change of the equilibrium state.

Further, conventionally, there has been a problem that the flow rate adjusting range is narrow because the gaps of the flow rate adjusting section are formed by surface-to-surface contact for fluid sealing.

The present invention solves the above-mentioned drawbacks, and further has high precision, high resolution,
It is to provide a wide range of flow rate adjusting devices.

[Means for solving the problem]

In order to solve the above problems, the present invention takes the following technical means.

That is, in the device that controls the flow rate of the fluid by the valve opening portion and the conical valve body portion that form the gap portion, the gap is changed only near the sealing portion in order to reduce the fluid resistance loss by the flow rate adjusting portion as much as possible. Slit control type (SIT type) gap, that is, a complete slit (thickness O) has a structure in which the gap makes line contact at a micro level, and a coil spring or electromagnet and a cone are formed inside a sealed valve box. A valve body, a diaphragm that supports the valve body, a balance portion composed of a coil spring arranged by connecting the diaphragm and the strain transducer between the diaphragm and the strain transducer, and located outside the valve box to surround the strain transducer. A solenoid for driving a strain transducer is arranged, and the strain transducer is deformed by a magnetic field generated by a balance of forces by the two springs and a current flowing through the solenoid, and a valve opening portion and a conical valve body portion are formed. Controlling the flow rate of the fluid by controlling a gap formed Ri.

〔Example〕

FIG. 2 shows an example of an automatic pressure control type electromagnetic valve. The fluid is input from the fluid inlet 41, the flow rate is adjusted in the gap 44, and the fluid is output to the fluid outlet 42. The gap 44 is adjusted by the balance between the coil spring 43 and the coil spring 48 having one end fixed to the magnetostrictive substance. A diaphragm 45 is provided between the coil spring 43 and the coil spring 48, and a fluid pressure is applied to the diaphragm 45. Therefore, as the fluid pressure increases, the diaphragm 45 pushes the coil spring 48 in the direction of contracting, and as a result, the gap formed by the conical valve body 49 by the valve port 44 decreases and the flow rate increase due to the fluid pressure increase is prevented. it can. On the contrary, when the pressure of the fluid decreases, the diaphragm 45 acts in the direction in which the coil spring 48 is pulled, and it is possible to prevent the flow rate from decreasing due to the pressure drop of the fluid. The flow rate is controlled by the solenoid 46, and the strain amount of the magnetostrictive substance 47 is changed by the flowing current, so that the flow rate can be adjusted with high accuracy and high resolution.

FIG. 3 shows an embodiment of an electromagnetic valve using an electromagnet instead of one spring. (This electromagnet has a function equivalent to that of the coil spring 43 shown in FIG. 3.) The electromagnetic coil 54 magnetizes the pole piece 55, which also serves as a gap, and the diaphragm 58.
The magnetic body 57 adhered to is sucked. The coil spring 59 attached to the magnetostrictive substance attracts or presses the magnet in the opposite direction, and the gap 56 is formed by the balance between the magnetic force and the force of the spring.
Gap is controlled. The flow rate of the fluid input from the fluid inlet 51 is adjusted in the gap portion 56 and output from the fluid outlet 52. When the pressure of the fluid changes, the pressure applied to the diaphragm changes, the position where the spring 59 and the pole piece 55 balance each other changes, and as a result, the gap of the gap 56 changes and the flow rate is automatically controlled. It becomes constant. The flow rate is determined by expanding and contracting the magnetostrictive substance 63. Further, if the closed container 53 and the diaphragm 58 are made of a material having a high magnetic permeability, the magnetic flux concentrates on the pole piece 55 and the magnetic body 57, and the control becomes more accurate and highly efficient. In this embodiment, since the gap is determined by the spring constant and the electromagnetic force, the control range is very large, and the current is stabilized, and the current can be controlled usually with extremely high accuracy, which is a great advantage. .

Further, the magnetostrictive substance 63 is controlled to expand and contract by applying a controlled current to the solenoid 62, and as a result, the balance position between the force of the connected coil spring 59 and the electromagnetic force can be changed. Therefore, if the current of the electromagnetic coil 62 is controlled so that the spring force is increased when the fluid pressure is high and weakened when the fluid pressure is low, the control range of the gap of the gap portion 56 controlled by the electromagnetic force is always the maximum range. It has the characteristic that it can be obtained and used in a wide range of pressures of fluids.

In the electromagnetic control valve according to the present invention described above, the fluid is controlled by the control current output to the electromagnet solenoids, 46, 54 and 62.

The control current is controlled by the current control circuit, and it is possible to obtain a resolution of thousands to tens of thousands in an electric circuit.
The gap can be controlled based on the resolution.

Further, since there is no crevice movement of the gap portion due to rotation, the nozzle portion is characterized by less wear and the accuracy is less deteriorated and the life is very long.

In the gap portion, magnetostrictive substances such as pure nickel, alferro piperco, chromal, and ferrite can be selectively used depending on the application, and a substance that is not violated by the chemical action of the fluid can be selected.

Further, the flow rate control when the fluid passes through the gap portion can be controlled by the complete slit control type instead of the conventional passage resistance loss type. That is, a perfect slit (thickness 0),
When the valve is turned off, the fluid seal portion is formed by one line contact at a micro level of the phase and the atomic order of the aspect, and the fluid seal portion is configured to increase the conductance of the fluid as much as possible except the fluid seal portion. It is possible to realize a structure in which the gap changes only in the very vicinity of. Therefore, a material such as metal, ceramics, or polymer having high rigidity is selected and used in the vicinity of the fluid-sealed portion so as not to be deformed due to contact between the above-mentioned phases. This provides line contact. Such a flow rate control is exactly the same as the difference between the FET type characteristic and the SIT type characteristic in the transistor characteristic in terms of electronic circuit.When the SIT type shape is adopted, the flow rate resistance loss in the valve can be reduced to the limit. It has the features that make it possible. Figure 4 shows a conceptual diagram of the EFT type valve and the SIT type valve. The conventional valve is a macro level even if it is line contact, and it belongs to the FET type because it is a surface contact with a finite width when viewed microscopically, so the fluid sealing part is formed by surface contact, as shown in the same figure. In addition, the gap portion is elongated in the fluid flow direction. Controlling the flow rate in the valve is shown in FIG.
Equivalent to lifting two gaps upwards, lifting upwards reduces or stops the flow, and downwards increases flow. In the case of the FET type, since the gap portion is long, the flow resistance loss is large. Therefore, it is difficult to precisely control the flow rate with an actual valve, and it is impossible to control the flow rate in a wide range. On the other hand, the SIT type is a transistor with a structure in which the gate length of the FET is made as narrow as possible.
In the mold, it means a valve structure in which the gap is extremely short as shown in the figure, and there is almost no flow resistance loss other than the gap.
For this reason, the flow rate can be precisely controlled with an actual valve, and the flow rate can be controlled over a wide range.

FIG. 5 shows an embodiment of the gap portion of the electromagnetic control valve according to the present invention. In the above embodiment, the valve opening portion has a spring structure and can be bent by the pressing force of the conical valve body portion. To do. FIGS. 5 (a) and 5 (b) respectively show a closed state and an open state of the gap portion of the valve having the same structure. This figure is a very enlarged view, and the conical valve body 34 and the valve opening 31 are in line contact with each other. The feature of this gap is that when the gap is closed, the conical valve body 34 and the valve opening are closed.
The close contact of 31 makes it possible to completely stop fluid leakage.
This is because the valve opening portions 31 to 33 have a spring structure that can be deformed and bent by the pressure of the contact of the conical valve body 34.
In the valve opening portion, a portion 33 farther from the seating portion of the valve body is made of a material having high rigidity, and a portion relatively close to the seating point of the valve body.
32 is made of a material having a relatively low rigidity, and the portion where the valve body and the valve seat are in contact when closed is made of a material having a relatively high rigidity. When the gap is closed, the portion 32 is flexed and the valve opening is constantly pressed against the valve body by the spring force, and is deformed as shown in FIG. 5 (a). This has the feature that leakage does not occur due to external forces such as vibration. Further, when the fluid is in a reverse flow state and a reverse pressure is applied, a force acts in the direction of strengthening the spring force, which is effective as a check valve.

〔The invention's effect〕

As described above, the present invention has various excellent characteristics such as high accuracy, high resolution, use in a wide pressure range, etc., which have not been obtained in the past, and the structure is simple, and the value is industrially very high. Is to have.

[Brief description of drawings]

FIG. 1 is an embodiment of a conventional valve, FIGS. 2, 3, and 5 are embodiments of an electromagnetically controlled valve of the present invention, and FIG. 4 is an FE.
It is a conceptual diagram of a T type valve and a SIT type valve. 47, 63 ... Magnetostrictive substance, 46, 54, 62 ... Electromagnetic solenoid, 4
4, 56 ... Gap, 55 ... Pole piece, 57 ... Magnetic material, 45, 5
8 ... diaphragm, 61 ... valve box

Continuation of the front page (56) References JP-A-56-24269 (JP, A) JP-A-49-43218 (JP, A) JP-A-52-44423 (JP, A) JP-A-59-93580 (JP , A) JP-A-48-17127 (JP, A) JP-A-57-54787 (JP, A) Actual development 55-112102 (JP, U) JP-B 45-18906 (JP, B1) JP-B 49-7966 (JP, Y2)

Claims (2)

[Claims] 1. A device for controlling a flow rate of a fluid by a valve opening portion and a conical valve body portion forming a gap portion, wherein a coil spring or an electromagnet and a conical valve body portion are provided inside a sealed valve box.
A balanced state consisting of a diaphragm supporting this and a coil spring connected between the diaphragm and the strain transducer is formed, and is placed outside the valve box to surround the strain transducer. There is a solenoid for driving the strain oscillator, and the valve opening and the conical valve body have a structure that forms a line contact portion when the gap is closed, and the strain vibration is caused by the magnetic field generated by the current flowing through the solenoid. Deform the child,
An electromagnetic control valve, wherein a flow rate of a fluid is controlled by controlling a gap formed by a valve opening portion and a conical valve body portion. 2. The electromagnetic control valve according to claim 1, wherein the valve opening portion has a spring structure and can be bent by the pressing force of the conical valve body portion.